KR20190063999A - RF power distribution apparatus and RF power distribution method - Google Patents

Abstract

The present invention relates to RF power distribution to a plurality of plasma loads and, more specifically, to an RF power distribution device and an RF power distribution method which use variable elements such as appropriate a variable capacitor or a variable inductor or properly place the variable elements in order to distribute RF power transmitted from an RF generator to a plurality of ICP coils or a plurality of CCP electrodes, used as a plasma source. The RF power distribution device is to distribute power from an output terminal of a matching network (200) to which one or more RF generators (100) are connected, towards a plurality of output terminals (311, 312, 321, 322, 313) to which loads (L1, L2, L3, L4, L5) are connected, by comprising: a first branch point (P1) which is connected to the output terminal of the matching network (200); one or more pairs of branch modules (M1, M2) which include first output terminals (311, 321) and second output terminals (312, 322), an output terminal branch point (Pt) branched into the first output terminals (311, 321) and the second output terminals (312, 322), and output terminal variable elements (420, 430) installed between the output terminal branch point (Pt) and the first output terminals (311, 321); and a route variable element (410) which is installed in at least one between the output terminal branch points (Pt) of the one or more pairs of branch modules (M1, M2) and the first branch point (P1). Therefore, the RF power distribution device and the RF power distribution method can remarkably reduce manufacturing costs through easy manufacturing.

Description

Technical Field [0001] The present invention relates to an RF power distribution apparatus and an RF power distribution method,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to RF power distribution to a plurality of plasma loads, and in particular, to RF power distribution from a RF generator to an RF power generator using plasma To an RF power distribution device and an RF power distribution method for distributing RF power to a plurality of ICP coils or a plurality of CCP electrodes used as a source.

In general, substrates such as a semiconductor substrate, a liquid crystal panel substrate, and an OLED substrate are processed in a process chamber for substrate processing, such as a deposition process using an RF plasma, an etching process, and the like. In this process chamber, Coil, etc.) and the RF power transmission method, and are manufactured on the basis of proper process results.

Here, the RF power applying unit applied to the substrate processing apparatus is generally a method of connecting independent RF power sources and matching boxes to independent plasma loads. However, as the deposition and etching processes of substrates such as a semiconductor substrate, a liquid crystal panel substrate, and an OLED substrate have become complicated and complicated, a technique of distributing power to a plurality of plasma loads through one RF power source and one RF matching network And there is a lot of research on this.

A plurality of electrodes or a plurality of antenna coils are placed in a plurality of separate spaces and the amount of RF power applied to the separated plasma source is appropriately distributed in order to perform uniform substrate processing when power is applied for substrate processing, Is required.

On the other hand, Patent Literatures 1 to 3 disclose devices and techniques for supplying electric power to a plurality of electrodes or antenna coils equally or in different amounts to respective loads as needed.

However, in the case of the prior arts 1 to 3, a variable element for power distribution, for example, a circuit constituted by a variable capacitor or a variable coil is complicated, and a variable element equal to or more than the number of plasma sources for power distribution is used And a power distribution method is basically connected in series to a plurality of plasma sources, so that when a variable device value is varied to apply a specific power to one of a plurality of plasma sources, The amount of power applied to the remaining plasma sources affects the amount of electric power of each plasma source, which is not efficient.

Therefore, the present invention has been devised to overcome the disadvantages of the above-mentioned prior patent.

(Patent Document 1) KR10-1151419 B1

(Patent Document 2) US6507155 B1

(Patent Document 3) US20170117869 A1

It is an object of the present invention to provide an RF power distribution device and an RF power distribution device capable of minimizing the use of a variable capacitor for power distribution and simplifying a circuit structure, And to provide a distribution method.

(L1, L2, L3, L4, L5) from an output terminal of a matching network (200) to which at least one RF generator (100) is connected, (311, 312, 321, 322, 313) to which the matching network (200) is connected, comprising: a first branching point (P1) connected to an output end of the matching network (200); An output terminal branch point Pt branched from the first output terminals 311 and 321 and the second output terminals 312 and 322 to the first output terminals 311 and 321 and the second output terminals 312 and 322, At least one pair of branch modules (M1, M2) including a branch point (Pt) and output stage variable elements (420, 430) installed between the first output stages (311, 321); And a root variable element (410) installed in at least one of the output branch points (Pt) of the one or more pairs of branch modules (M1, M2) and the first branch point (P1) Discloses a dispensing apparatus.

The root variable element 410 is provided at any one of the pair of output terminal branch points Pt and the first branch point P1 and is connected to the pair of output terminal branch points Pt, A reactance element 451 having a fixed reactance value may be provided in the other of the branch points P1.

The root variable element 410 is installed in series between the output branch point Pt and the first branch point P1 or one end is connected between the output branch point Pt and the first branch point P1 And the other end can be grounded.

One end of the output stage variable elements 420 and 430 may be connected between the output terminal branch point Pt and the first output terminals 311 and 321 and the other end may be grounded.

A reactance element 452 having a fixed reactance value may be additionally provided in series between the output terminal branch point Pt and the first output terminals 311 and 321.

The branching modules M1 and M2 may be installed in a plurality of pairs based on the first branching point P1.

The first branch point P1 is connected to the even number of loads L1, L2, L3, L4, and the plurality of output stages 311, 312, 321, 322, 313 are coupled to the branch modules M1, , L5), one or more odd-numbered output stages (313) to which the additional load (Lo) is coupled so that the total number of loads is an odd number.

One end of the output stage variable elements 420 and 430 may be connected between the output terminal branch point Pt and the first output terminals 311 and 321 and the other end may be grounded.

A reactance element 452 having a fixed reactance value may be additionally provided in series between the output terminal branch point Pt and the first output terminals 311 and 321.

The output stage variable elements 420 and 430 and the root varying element 410 may have capacitive reactance.

The present invention also provides an RF power distribution method using the RF power distribution apparatus having the above configuration, wherein the RF power distribution method comprises the steps of: And distributes RF power to each of the output stages (311, 312, 313, 314) by sequentially controlling respective capacitance values of the capacitors.

The present invention also includes a plurality of pairs of output stages 311, 312, 321, 322, and 313 to which loads L1, L2, L3, L4, and L5 are connected from the matching network 200 to which one or more RF generators 100 are connected (P1) branching from the matching network (200) to a pair; A plurality of pairs of output terminal branch points (Pt) branched into pairs as the plurality of output terminals (311, 312, 321, 322, 313); (N-1) pairs (n is a natural number of 2 or more) branched from the first branch point P1 to the plurality of output end branch points Pt one or more times sequentially; Output reactance elements 452 and 453 provided between the output terminal branch points Pt and the first output terminals 311 and 321; Output stage variable elements 420 and 430, one end of which is connected between the output stage reactance elements 452 and 453 and the first output stages 311 and 321 and the other end is grounded; (Pn) between each of the first output terminals (311, 321) and each output terminal branch point (Pt) except between the first branch point (P1) and the second branch point (P2) And an (n-1) th junction (Pn-1); An nth variable capacitor whose one end is connected between the nth capacitor and the nth branch point (Pn) except for the first branch point (P1) and the second branch point (P2), and the other end is grounded; A reactance element (451) installed between any one of the pair of second branch points (P2) and the first branch point (P1); And a root variable element (410) having one end connected between the reactance element (451) and the second branch point (P2) and the other end grounded.

The present invention also includes a plurality of output stages 311, 312, 321, 322, and 313 to which loads L1, L2, L3, L4, and L5 are connected from the matching network 200 to which at least one RF generator 100 is connected, (100), comprising: a first branch point (P1) that branches from the matching network (200) into a pair; A plurality of pairs of output terminal branch points (Pt) branched into pairs as the plurality of output terminals (311, 312, 321, 322, 313); (N-1) pairs (n is a natural number of 2 or more) branched from the first branch point P1 to the plurality of output end branch points Pt one or more times sequentially; Output reactance elements 452 and 453 provided between the output terminal branch points Pt and the first output terminals 311 and 321; Output stage variable elements 420 and 430, one end of which is connected between the output stage reactance elements 452 and 453 and the first output stages 311 and 321 and the other end is grounded; (N-1) -th branch point Pn-1 between any one of the n-th branch points Pn between each of the first output terminals 311 and 321 and each output terminal branch point Pt, n capacitor; And an nth variable capacitor having one end connected between the nth capacitor and the nth branch point (Pn) and grounded at the other end.

The RF power distribution device and the RF power distribution method according to the present invention can be applied to an electrode of a substrate processing apparatus that performs substrate processing using a capacitive electrode, an output terminal to which an antenna of an ICP (Inductively Coupled Plasma) By using a fixed capacitor and a variable capacitor having a fixed capacitance value in distributing electric power at each pair of output stages, the use of a variable capacitor for power distribution is minimized and the circuit structure is simplified, And the manufacturing cost can be remarkably reduced.

The RF power distribution device and the RF power distribution method according to the present invention can quickly and effectively distribute the power to each pair of output terminals by changing the capacitance value of a variable capacitor provided adjacent to each branch point in the power distribution of each pair of output terminals There is an advantage to be able to perform.

Further, the RF power distribution device and the RF power distribution method according to the present invention minimizes the use of variable elements (variable capacitors, variable inductors) for power distribution and modulates the circuit structure to each plasma source, And an RF power distribution circuit between the plasma source and the plasma source, thereby facilitating manufacturing and facilitating the distribution of RF power.

Also, in order to facilitate the RF power distribution to a plurality of output stages, the RF power distribution device and the RF power distribution method according to the present invention may define two output stages as a pair when a plurality of output stages are composed of an even number, And the power distribution adjustment between the modules is performed by using a variable element for the output stage in which power is distributed between the two output terminals of the module after the first division by using the variable element dedicated for the module, The inventive circuit arrangement and power distribution method are more efficient and more intuitive than conventional power distribution techniques.

In the RF power distribution apparatus and the RF power distribution method according to the present invention, when a plurality of output stages are composed of an odd number, at least one output stage among the odd number output stages is defined as a reference output stage, Power distribution can be performed in the same manner, so that the power can be distributed irrespective of whether the number of output stages is an even number or an odd number.

1 is a circuit diagram showing a first embodiment of an RF power distribution device according to the present invention.
2 is a circuit diagram showing a second embodiment of an RF power distribution device according to the present invention.
3 is a circuit diagram showing a third embodiment of an RF power distribution device according to the present invention.
4 is a circuit diagram showing a fourth embodiment of the RF power distribution device according to the present invention.
5 is a circuit diagram showing a fifth embodiment of the RF power distribution device according to the present invention.
6 is a circuit diagram showing a sixth embodiment of an RF power distribution apparatus according to the present invention.
7 is a circuit diagram showing a seventh embodiment of an RF power distribution device according to the present invention.
8A to 8B are graphs showing an RF power distribution method using the RF power distribution apparatus according to the present invention.

Hereinafter, an RF power distribution apparatus and an RF power distribution method according to the present invention will be described with reference to the accompanying drawings.

The RF power distribution apparatus 300 according to the present invention may be configured such that loads L1, L2, L3, L4, and L5 are provided from the matching network 200 to which one or more RF generators 100 are connected, The power is distributed to a plurality of output terminals 311, 312, 321, 322, and 313 to which a plurality of output terminals are connected.

As shown in FIG. 6, the RF generator 100 may include at least one RF generator, which has a high frequency (HF) of 27.12 MHz and a low frequency (LF) of 370 KHz, Lt; / RTI >

Specifically, the present invention can be applied to a plurality of RF generators 100, for example two RF generators 100 and two corresponding matching networks 200, respectively, as shown in FIG. 6, After the devices are combined, they can be configured to share output terminals.

That is, after the RF generator 100, the matching network 200, and the RF power distribution device are sequentially coupled, the output stage can be shared so that each output stage can be coupled to one load.

In addition, the RF generator 100 may include a plurality of RF generators 100 having different frequencies for one matching network 200.

The matching network 200 is constituted by a combination of circuit elements such as a capacitive reactance and an inductive reactance as a configuration in which one or more RF generators 100 are connected to match the impedance of the load and the RF generator 100 Various configurations are possible.

The plurality of output terminals 311, 312, 321, 322, and 313 are electrodes of a substrate processing apparatus that performs substrate processing using capacitive electrodes, and an antenna of an ICP (Inductively Coupled Plasma) , L3, L4, L5).

The power applied to each of the loads L1, L2, L3, L4 and L5 coupled to the respective output terminals 311, 312, 321, 322 and 313 is controlled by an RF power distribution device Lt; / RTI >

Hereinafter, an RF power distribution apparatus according to the present invention will be described with reference to embodiments of the present invention.

The RF power distribution apparatus according to the present invention includes a first branch point P1 connected to an output terminal of the matching network 200, as shown in Figs. 1 to 6; An output terminal branch point Pt which is branched to the first output terminals 311 and 321 and the second output terminals 312 and 322 and an output terminal branch point Pt One or more pairs of branching modules M1 and M2 including output variable elements 420 and 430 provided between the first output terminals 311 and 321; And a root variable element 410 installed in at least one of the output branch points Pt of the one or more pairs of branch modules M1 and M2 and the first branch point P1.

The first branch point P1 is defined as a circuit branch point branched from the output terminal of the matching network 200 to one or more pairs of branch modules M1 and M2 to output terminal branch points Pt.

1 to 3, the first branch point P1 includes a pair of output stage branch points Pt, that is, an even number of output stages, i.e., first output stages 311 and 321 and second output stages 312 and 322, Can be connected.

As shown in FIG. 5, the first branch point P1 may be connected to one odd-numbered output stage 313, and an odd-numbered output stage may be connected to the output stage.

The one or more pairs of branching modules M1 and M2 may include first output terminals 311 and 321 and second output terminals 312 and 322 and first and second output terminals 311 and 321 and second output terminals 312 and 322, And output stage variable nodes 420 and 430 provided between the output stage branch point Pt and the first output stages 311 and 321. The output stage branch points Pt and the output stage branch points Pt and the first output stages 311 and 321,

The first output terminals 311 and 321 and the second output terminals 312 and 322 are physically connected to external loads L1, L2, L3 and L4, respectively, Various configurations are possible according to the coupling structure of the first embodiment.

The output terminal branch point Pt is defined as a branch point on a circuit that branches to a pair of output terminals, i.e., the first output terminals 311 and 321 and the second output terminals 312 and 322.

The output stage variable elements 420 and 430 may be various circuit elements provided between the output terminal branch point Pt and the first output terminals 311 and 321.

For example, one end of the output variable elements 420 and 430 may be connected between the output terminal branch point Pt and the first output terminals 311 and 321, and the other end may be grounded.

A reactance element 452 having a fixed reactance value may be additionally provided in series between the output terminal branch point Pt and the first output terminals 311 and 321.

The output stage reactance elements 452 and 453 are circuit elements provided between the output terminal branch points Pt and the first output stages 311 and 321. The reactance elements 452 and 453 are designed to have reactance values, Value can be determined.

Meanwhile, the output stage variable elements 420 and 430 and the reactance element 452 may have capacitive reactance, inductive reactance, and preferably inductive reactance depending on the overall circuit characteristics.

Particularly, the output stage variable elements 420 and 430 are characterized in that a reactance value, in particular, a capacitance value is controlled in order to vary power distribution conditions for one and the other of the pair of output terminals.

The plurality of branching modules M1 and M2 may be installed as a pair based on the first branching point P1 as shown in Figs. 1 to 3 and 5, And may be installed in a plurality of pairs based on the first branch point P1.

In order to facilitate the RF power distribution to a plurality of output stages, the present invention is characterized in that, in a case where a plurality of output stages are composed of an even number, two output stages are defined as a pair, (311, 312) or (321 (312)) in the modules (M1, M2) after the primary distribution of power by using the module dedicated variable element 410 after the power distribution adjustment between the modules The present invention's circuit configuration and power distribution method that are capable of finally distributing the power of all the output stages using variable output devices 420 and 430 positioned between the power distribution devices 321 and 322) are more efficient and more intuitive A power distribution method can be provided.

The root variable element 410 may be provided in at least one of the output branch points Pt of the one or more pairs of branch modules M1 and M2 and the first branch point P1.

For example, as shown in FIGS. 1 to 6, the root varying element 410 may be provided at any one of a pair of output terminal branch points Pt and a first branch point P1, A reactance element 451 having a fixed reactance value may be provided in the other of the output terminal branch points Pt and the first branch point P1.

As another example, the root variable element 410 may be installed in both the first branch point P1 and the branch modules M1 and M2 based on the first branch point P1.

Meanwhile, as shown in FIGS. 1 and 3, one end of the root varying element 410 may be connected between the output terminal branch point Pt and the first branch point P1, and the other end may be grounded.

Further, the root variable element 410 may be connected in series between the first branch point P1 and the output node branch Pt, as shown in FIGS. 2, 4 to 6.

On the other hand, in the root variable element 410, various variable elements can be used as the configuration in which the reactance value can control the reactance value according to predetermined design requirements.

The reactance element 451 is a circuit element which is provided between any one of the pair of output terminal branch points Pt and the first branch point P1 and which has a reactance value in accordance with design requirements in which the RF power distribution apparatus is installed, The capacitance value can be determined.

The reactance element 451 may be provided on the side of the root varying element 410 on the basis of the first branch point P1 or on the opposite side of the side where the root varying element 410 is installed according to circuit conditions.

On the other hand, the root varying element 410 and the reactance element 451 may have capacitive reactance, inductive reactance, and preferably inductive reactance depending on the overall circuit characteristics.

When the concept is expanded, the root variable element 410 is configured so as to include a pair of branch points next to the first branch point P1, for example, one of the pair of branch points and the remaining one The capacitance value is controlled in order to differentiate the power distribution condition for the input signal.

The RF power distribution apparatus having the above-described configuration performs power distribution for each of the branch points via the root variable element 410, and finally, through the output stage variable elements 420 and 430, Power distribution can be performed.

Meanwhile, as described above, the RF power distributing apparatus according to the present invention can be implemented in various embodiments according to the embodiment of the installation position of the root varying element 410.

For example, in the RF power distribution device according to the first embodiment of the present invention, as shown in FIG. 1, a reactance element 451 having a fixed reactance value, particularly a fixed capacitance value, And the root variable element 410 is installed on the other side.

The root variable element 410 may be installed at one end between the first branch point P1 and the modules M1 and M2 and at the other end by being grounded.

2, the reactance element 451 having a fixed reactance value, particularly a fixed capacitance value, is connected to the first branch point P1, And the root variable element 410 is installed on the other side.

The root variable element 410 may be installed in series between the first branch point P1 and the modules M1 and M2.

2, the reactance element 451 having a fixed reactance value, particularly a fixed capacitance value, is connected to the first branch point P1 (P1) And the root variable element 410 is installed between the reactance element 451 and the module M2.

The root variable element 410 may be installed at one end between the first branch point P1 and the modules M1 and M2 and at the other end by being grounded.

5, the first branch point P1 is divided into a plurality of output stages 311, 312, 321, 322, and 313 for a more diversified power distribution, One or more odd output terminals 313 to which an additional load Lo is coupled so that the total number of loads is an odd number in addition to the even number of loads L1, L2, L3, L4, and L5 coupled to the branch modules M1 and M2, Can be further combined.

The odd number output stage 313 is further branched from the first branch point P1 so that a plurality of output stages 311, 312, 321, 322 and 313 are connected to the even number of loads (Lo) are combined so that the total number of loads is an odd number in addition to the load (L1, L2, L3, L4, L5).

In the embodiment shown in Figs. 1 to 6, it is described that the two branches, that is, the first branch point and the second branch point are sequentially set, but it is needless to say that the embodiment can be implemented by n times, that is, to be.

That is, the RF power distribution apparatus according to the present invention includes, as an extension example of FIG. 1, a first branch point P1 branched from a matching network 200 in a pair; A plurality of pairs of output terminal branch points (Pt) branched into a plurality of pairs of output terminals (311, 312, 321, 322, 313); (N-1) pairs (n is a natural number equal to or greater than 2) branching from the first branch point P1 to the plurality of output end branch points Pt one or more times in succession; An output stage reactance element 452, 453 provided between each output stage branch point Pt and the first output stage 311, 321; Output stage variable elements 420 and 430 connected between the output stage reactance elements 452 and 453 and the first output stages 311 and 321 and grounded at the other end; (N-1) -th switching point Pn-1 provided between the n-th switching point Pn and one of the n-th switching points Pn between the first output terminals 311 and 321 and the output terminal branch point Pt, Wow; And an n-th variable capacitor, one end of which is connected between the n-th capacitor and the n-th switching point Pn, and the other end of which is grounded.

As an extension of the second embodiment according to the present invention, the RF matching network according to the present invention includes a first branch point P1 branched from the matching network 200 in a pair; A plurality of pairs of output terminal branch points (Pt) branched into a plurality of pairs of output terminals (311, 312, 321, 322, 313); (N-1) pairs (n is a natural number equal to or greater than 2) branching from the first branch point P1 to the plurality of output end branch points Pt one or more times in succession; An output stage reactance element 452, 453 provided between each output stage branch point Pt and the first output stage 311, 321; Output stage variable elements 420 and 430 connected between the output stage reactance elements 452 and 453 and the first output stages 311 and 321 and grounded at the other end; (Pn) between each of the first output terminals 311 and 321 and each output terminal branch point Pt except for the first branch point P1 and the second branch point P2, n-1) th switching point Pn-1; An n-th variable capacitor having one end connected between the n-th capacitor and the n-th switching point Pn except for a point between the first branch point P1 and the second branch point P2, and the other end grounded; A reactance element 451 installed between any one of the pair of second branch points P2 and the first branch point P1; And a root variable element 410 connected between the reactance element 451 and the second branch point P2 at one end and grounded at the other end.

Hereinafter, an RF power distribution method using the RF power distribution apparatus according to the present invention will be described.

As shown in Fig. 8A, the reactance value of the root variable element 410 adjacent to the first branch point P1 is changed so as to change from the first branch point P1 to the next And distributes the power to the branched second branch point P2.

At this time, the powers distributed through the second branch point P2 are the same.

Next, as shown in FIGS. 8B and 8C, in the case of the nth variable capacitor adjacent to the second branch point P2, the nth branch point, the output end branch point Pt, and the output end branch point Pt, And 430, and sequentially distributes power to a pair of output terminals at an nth branch point that branches to the next, and ultimately, an output terminal branch point Pt.

Here, the RF power distribution at the nth branch point can distribute the RF power sequentially at the same time as the RF power distribution at the plurality of nth branching points.

By such an RF power distribution method, power can be distributed to meet the required RF power distribution requirements.

Particularly, in the above-described RF power distribution method, since the power distribution is sequentially performed, the power distribution is efficient and the power distribution can be performed simply.

- Example

8A to 8C are graphs showing a case where power distribution is performed using an RF power distribution apparatus having the circuit structure shown in FIG. Specifically, the power of the four output terminals 311, 312, 321, and 322 is distributed using three variable elements 410, 420, and 430.

Basic condition: first output stage variable element 420 = 250 pF, second output stage variable element 430 = 250 pF, root variable element 410 = 0 to 2000 pF variable

First, as shown in FIG. 8A, the capacitance of the root variable element 410 is changed to perform power distribution to the respective modules M1 and M2.

At this time, the first output stage variable device 420 and the second output stage variable device 430 maintain 250 pF, that is, the same value (fixed).

The output terminal RF voltage has a first output terminal 311 = a second output terminal 312, a first output terminal 321 = a second output terminal 322,

Next, as shown in FIG. 8B, by changing the capacitance value of any one of the first output stage variable device 420 and the second output stage variable device 430, for example, the first output stage variable device 420 And performs power distribution to any one of the modules M1 and M2, for example, the output terminals 311 and 312 in the module M1.

Here, the first output stage variable element 420 = 0 to 2000 pF variable, the second output stage variable element 430 = 250 pF (fixed), the root variable element 410 =

As an example, the output stage RF voltage includes a first output 311 = a second output 312, a first output 321, a second output 322,

Lastly, as shown in FIG. 8C, the capacitance value of the other one of the first output stage variable element 420 and the second output stage variable element 430, for example, the second output stage variable element 430 is changed And performs power distribution to any one of the modules M1 and M2, for example, the output terminals 321 and 322 in the module M2.

Where the first output stage variable element 420 is fixed, the second output stage variable element 430 is variable from 0 to 2000 pF, the root variable element 410 is fixed

The output stage RF voltage includes a first output 311> a second output 312, a first output 321, a second output 322,

Here, the steps of FIG. 8A and FIG. 8B may be performed sequentially or simultaneously.

Meanwhile, as shown in FIGS. 8A to 8C, power values for the output stages of the simulation result can be variously set.

As described above, according to the present invention, when an even number (2n) is formed, two loads (L1, L2) are included as one pair, and the two loads are grouped into one pair. As shown in FIG.

More specifically, in the example of FIG. 1, the output modules 311 and 312 are a pair of output modules M1 and the output modules 321 and 322 are another output module M2. The four output stages 311, 312, 321 and 322 are reconfigured into two module stages, so that a branch point P1 for power distribution between modules and an output stage branch point Pt for power distribution between a pair of output stages in the module .

The RF power distribution of four output terminals can be facilitated by using three variable elements through the above-described circuit configuration.

That is, the present invention has a feature that a variable element having one less than the number of output stages can be used. This is because it is configured to be able to distribute the power to four more output stages more than the variable device in spite of using one less number of variable devices than the number of output stages, Brings the effect.

More specifically, the present invention provides, as an embodiment, the power between a module M1 having two pairs of output stages 311 and 312 and a module M2 having another output stage 321 and 322, The inter-module power distribution can be performed by the variable elements 410 included in the first power line P1, and the first-order distributed power between the modules can be controlled by the variable elements 420 and 430 connected to the output terminal branch point Pt, And can be configured to distribute power to the output stages 311, 312, 321, and 322 in the second order.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. It is to be understood that both the technical idea and the technical spirit of the invention are included in the scope of the present invention.

100: RF generator 200: matching network
311, 312, 321, 322:

Claims (16)

A plurality of output terminals 311, 312, 321, 322, and 313 to which loads L1, L2, L3, L4, and L5 are connected are connected to an output terminal of the matching network 200 to which one or more RF generators 100 are connected. A distributed RF power distribution apparatus comprising:
A first branch point P1 connected to an output terminal of the matching network 200;
An output terminal branch point Pt branched from the first output terminals 311 and 321 and the second output terminals 312 and 322 to the first output terminals 311 and 321 and the second output terminals 312 and 322, At least one pair of branch modules (M1, M2) including a branch point (Pt) and output stage variable elements (420, 430) installed between the first output stages (311, 321);
And a root variable element (410) installed in at least one of the output branch points (Pt) of the one or more pairs of branch modules (M1, M2) and the first branch point (P1) Distribution device. The method according to claim 1,
The root variable element 410 is installed at any one of the pair of output terminal branch points Pt and the first branch point P1,
And a reactance element (451) having a fixed reactance value is provided in the other of the pair of output terminal branch points (Pt) and the first branch point (P1). The method of claim 2,
The root variable element 410 may be,
The output branch point Pt and the first branch point P1,
Wherein one end is connected between the output terminal branch point (Pt) and the first branch point (P1) and the other end is grounded. The method according to any one of claims 1 to 3,
The output stage variable elements 420 and 430,
And one end connected between the output terminal branch point (Pt) and the first output terminals (311, 321), and the other end grounded. The method of claim 4,
And a reactance element (452) having a fixed reactance value is further provided in series between the output terminal branch point (Pt) and the first output terminals (311, 321). The method according to any one of claims 1 to 3,
Wherein the branching modules (M1, M2) are installed in a plurality of pairs based on the first branch point (P1). The method according to any one of claims 1 to 3,
The first branch point P1 is connected to the even number of loads L1, L2, L3, L4, and the plurality of output stages 311, 312, 321, 322, 313 are coupled to the branch modules M1, , L5, and one or more odd output stages (313) to which the additional load (Lo) is coupled such that the total number of loads is an odd number. The method of claim 7,
The output stage variable elements 420 and 430,
And one end connected between the output terminal branch point (Pt) and the first output terminals (311, 321), and the other end grounded. The method of claim 8,
And a reactance element (452) having a fixed reactance value is further provided in series between the output terminal branch point (Pt) and the first output terminals (311, 321). The method according to any one of claims 1 to 3,
The output stage variable elements (420, 430) and the root varying element (410) have capacitive reactance. 7. An RF power distribution method using an RF power distribution apparatus according to any one of claims 1 to 3,
312, 313, and 314 by sequentially controlling respective capacitance values of the variable capacitors arranged in order of the output Pt from the first branch point P1 positioned closest to the matching network 200, ≪ / RTI > wherein the RF power distribution for the RF power distribution is distributed. The method of claim 11,
The first branch point P1 is connected to the even number of loads L1, L2, L3, L4, and the plurality of output stages 311, 312, 321, 322, 313 are coupled to the branch modules M1, , L5, and one or more odd output stages (313) to which the additional load (Lo) is coupled such that the number of total loads is an odd number. The method of claim 12,
The output stage variable elements 420 and 430,
Wherein one end is connected between the output terminal branch point (Pt) and the first output terminal (311, 321) and the other end is grounded. 14. The method of claim 13,
Wherein a reactance element (452) having a fixed reactance value is further provided in series between the output terminal branch point (Pt) and the first output terminals (311, 321). A plurality of pairs of output terminals 311, 312, 321, 322, and 313 to which loads L1, L2, L3, L4, and L5 are connected from the matching network 200 to which one or more RF generators 100 are connected, The RF power distribution device comprising:
A first branch point P1 branched from the matching network 200 in a pair;
A plurality of pairs of output terminal branch points (Pt) branched into pairs as the plurality of output terminals (311, 312, 321, 322, 313);
(N-1) pairs (n is a natural number of 2 or more) branched from the first branch point P1 to the plurality of output end branch points Pt one or more times sequentially;
Output reactance elements 452 and 453 provided between the output terminal branch points Pt and the first output terminals 311 and 321;
Output stage variable elements 420 and 430, one end of which is connected between the output stage reactance elements 452 and 453 and the first output stages 311 and 321 and the other end is grounded;
(Pn) between each of the first output terminals (311, 321) and each output terminal branch point (Pt) except between the first branch point (P1) and the second branch point (P2) And an (n-1) th junction (Pn-1);
An nth variable capacitor whose one end is connected between the nth capacitor and the nth branch point (Pn) except for the first branch point (P1) and the second branch point (P2), and the other end is grounded;
A reactance element (451) installed between any one of the pair of second branch points (P2) and the first branch point (P1);
And a root variable element (410) having one end connected between the reactance element (451) and the second branch point (P2) and the other end grounded. A plurality of pairs of output terminals 311, 312, 321, 322, and 313 to which loads L1, L2, L3, L4, and L5 are connected from the matching network 200 to which one or more RF generators 100 are connected, The RF power distribution device comprising:
A first branch point P1 branched from the matching network 200 in a pair;
A plurality of pairs of output terminal branch points (Pt) branched into pairs as the plurality of output terminals (311, 312, 321, 322, 313);
(N-1) pairs (n is a natural number of 2 or more) branched from the first branch point P1 to the plurality of output end branch points Pt one or more times sequentially;
Output reactance elements 452 and 453 provided between the output terminal branch points Pt and the first output terminals 311 and 321;
Output stage variable elements 420 and 430, one end of which is connected between the output stage reactance elements 452 and 453 and the first output stages 311 and 321 and the other end is grounded;
(N-1) -th branch point Pn-1 between any one of the n-th branch points Pn between each of the first output terminals 311 and 321 and each output terminal branch point Pt, n capacitor;
And an nth variable capacitor having one end connected between the nth capacitor and the nth branch point (Pn) and the other end grounded.

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