CN109889966A - 基于微机电系统的骨传导传感器 - Google Patents

基于微机电系统的骨传导传感器 Download PDF

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CN109889966A
CN109889966A CN201910173096.4A CN201910173096A CN109889966A CN 109889966 A CN109889966 A CN 109889966A CN 201910173096 A CN201910173096 A CN 201910173096A CN 109889966 A CN109889966 A CN 109889966A
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bone conduction
mems
conduction sensor
sensor
output end
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CN109889966B (zh
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叶菁华
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Yutaixin Microelectronics Technology Shanghai Co Ltd
Zilltek Technology Corp
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Zilltek Technology Corp
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    • G10K11/175—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general using interference effects; Masking sound
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    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10L—SPEECH ANALYSIS TECHNIQUES OR SPEECH SYNTHESIS; SPEECH RECOGNITION; SPEECH OR VOICE PROCESSING TECHNIQUES; SPEECH OR AUDIO CODING OR DECODING
    • G10L19/00—Speech or audio signals analysis-synthesis techniques for redundancy reduction, e.g. in vocoders; Coding or decoding of speech or audio signals, using source filter models or psychoacoustic analysis
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    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/10—Earpieces; Attachments therefor ; Earphones; Monophonic headphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
    • H04R1/40—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers
    • H04R1/406—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers microphones
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    • H04R3/00—Circuits for transducers, loudspeakers or microphones
    • H04R3/005—Circuits for transducers, loudspeakers or microphones for combining the signals of two or more microphones
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K2210/00—Details of active noise control [ANC] covered by G10K11/178 but not provided for in any of its subgroups
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    • G10K2210/108—Communication systems, e.g. where useful sound is kept and noise is cancelled
    • G10K2210/1081—Earphones, e.g. for telephones, ear protectors or headsets
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K2210/00—Details of active noise control [ANC] covered by G10K11/178 but not provided for in any of its subgroups
    • G10K2210/30—Means
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    • G10K2210/3028—Filtering, e.g. Kalman filters or special analogue or digital filters
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    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
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    • H04R2460/00—Details of hearing devices, i.e. of ear- or headphones covered by H04R1/10 or H04R5/033 but not provided for in any of their subgroups, or of hearing aids covered by H04R25/00 but not provided for in any of its subgroups
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Abstract

本发明涉及电子技术领域，具体涉及一种麦克风结构。基于微机电系统的骨传导传感器，其中，包括一密闭腔体，腔体内部设置一单轴或双轴加速度传感器，放置于贴近人耳部骨骼的位置；一专用集成电路处理芯片，单轴或双轴加速度传感器连接，专用集成电路处理芯片设有震动信号输出端。本发明通过设置一带有密闭腔体的骨震动传感器，通过将一单轴或双轴加速度传感器和一专用集成电路处理芯片放置于上述密闭腔体内，不仅降低了生产成本，还减少了外部环境对传感器的扰动。

Description

基于微机电系统的骨传导传感器
技术领域
本发明涉及电子技术领域，具体涉及一种麦克风结构。。
背景技术
MEMS(Micro-Electro-Mechanical System，微机电系统)麦克风是指基于MEMS技术制造的麦克风，简单的说就是一个电容器集成在微硅晶片上，可以采用表贴工艺进行制造,能够承受很高的回流焊温度，容易与CMOS工艺及其它音频电路相集成,并具有改进的噪声消除性能与抑制能力。传统的MEMS麦克风仅仅只能捕获人在说话时声带振动产生的声波，传播介质为空气，但是声波在传播途中往往会受到大量外界的噪声干扰，就会使得语音通话效果大打折扣，所以这种通过使用声学感测元件捕获声波的麦克风要实现高信噪比有一定困难。
为了改善和增强麦克风的性能，现有技术采用G-sensor(Accelerometer-sensor，加速度传感器)做骨传导传感器，G-sensor是MEMS传感器的一种，它能够感知到加速力的变化，比如晃动、跌落、上升、下降等各种移动变化都能被G-sensor转化为电信号，G-sensor内部有finger sets，用来测量产生加速度时质量块的位移。每一个finger set相当两个电容极板，当有加速度时质量块会产生相对运动，而位移的变化会导致差分电容发生变化，然后具体的差分电容检测和计算加速度过程由G-sensor内部完成并产生一个输出值。G-sensor采用了对在三维笛卡尔坐标系下三个轴向物体运动情况的测量，在这种麦克风里检测的就是人在说话时骨骼产生的震动。由于G-sensor较普通的加速度传感器多了重力加速度传感器，带有智能化重力感应系统，往往会增加助听器或蓝牙耳机等一系列产品的制造成本，使得生产商在降低生产成本和提高产品质量以及消费者对产品需求等环节造成一定困难。
发明内容
本发明的目的在于，提供一种基于微机电系统的骨传导传感器，解决以上技术问题。
本发明所解决的技术问题可以采用以下技术方案来实现：
基于微机电系统的骨传导传感器，设置于耳带式设备上，其中，包括，
一密闭的腔体，所述腔体内设置：
一单轴或双轴加速度传感器，所述单轴或双轴加速度传感器放置于贴近人耳部骨骼的位置；
一专用集成电路处理芯片，与所述声学感测器连接，所述集成电路处理芯片设有震动信号输出端。
一种耳带式设备，其中，包括，
一主麦克风，用来感测声波信号；
一辅麦克风，与所述主麦克风相隔设定距离设置；
一音频编解码器，与所述主麦克风和辅麦克风连接；
一微控制器，与所述骨传导传感器的信号输出端和所述音频编解码器的信号输入端连接。
优选地，所述密闭的腔体内设置空气、真空或其他气体。
优选地，所述所述骨传导传感器内部包括至少一个声学感测器，所述声学感测器包括背极板和振膜，所述振膜用于感测震动信号。
优选地，所述耳带式设备采用助听器或蓝牙耳机。
优选地，所述耳带式还包括一时分复用电路，所述时分复用电路的输入接口连接所述的骨传导传感器的输出端和所述主麦克风和所述辅麦克风的输出端，所述时分复用电路的输出端口连接所述微控制器的输入端口。
优选地，所述音频编解码器包括一自适应滤波器，所述自适应滤波器用于将转换而来的音频信号进行噪声抵消并将噪声抵消后的音频信号进行增强。
优选地，所述音频编解码器包括一扬声器，与所述音频编解码器的输出端连接。
有益效果：由于采用以上技术方案，本发明通过设置一带有密闭腔体的骨震动传感器，通过将一单轴或双轴加速度传感器和一专用集成电路处理芯片放置于上述密闭腔体内，不仅降低了生产成本，还减少了外部环境对传感器的扰动。
附图说明
图1为本发明的一种具体实施方式的电路连接示意图。
图2为本发明的一种具体实施方式的局部电路连接示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动的前提下所获得的所有其他实施例，都属于本发明保护的范围。
需要说明的是，在不冲突的情况下，本发明中的实施例及实施例中的特征可以相互组合。
下面结合附图和具体实施例对本发明作进一步说明，但不作为本发明的限定。
参照图1，基于微机电系统的骨传导传感器，其中，包括，
一主麦克风2，用于感测声波信号；
一辅麦克风3，与主麦克风1相隔设定距离设置，用于感测声波信号；
一音频编解码器6，与主麦克风2和辅麦克风3连接；
一微控制器，与密闭腔体1的信号输出端和所述音频编解码器6的信号输入端连接；
一密闭的腔体1，参照图2，腔体内设置：
一单轴或双轴加速度传感器11，单轴或双轴加速度传感器11放置于贴近人耳部骨骼的位置；一专用集成电路处理芯片12，与单轴或双轴加速度传感器11连接，专用集成电路处理芯片12设有震动信号输出端。
作为本发明的一种优选的实施例，还包括一分时复用电路4，时分复用电路4的输入端连接密闭腔体1、主麦克风2和辅麦克风3，输出端连接微处理器5，用于将单轴或双轴加速度传感器11捕捉的震动信号和主麦克风2、辅麦克风3感测到的声波信号在一个信道上同时传输。
分时复用电路4给多个设备提供了单个接口，降低了电路连接的复杂性，同时对RAM的需求变低，降低了主机上的功耗。
作为本发明的一种优选的实施例，密闭腔体1体内设置空气、真空或其他气体，以降低周围环境对单轴或双轴加速度传感器11的扰动性，使得提高语音质量，密闭腔体1的构成摆脱了现有技术G-sensor高成本的难题，降低了生产商的制造成本，使得可以大量生产。
作为本发明的一种优选的实施例，单轴或双轴加速度传感器11包括至少一个声学感测器111，声学感测器111包括背极板1111和振膜1112，振膜1112用于感测震动信号。
作为本发明的一种优选的实施例，音频编解码器6包括一自适应滤波器61，自适应滤波器用于将转换而来的音频信号进行噪声抵消并将噪声抵消后的音频信号进行增强。
作为本发明的一种优选的实施例，密闭腔体1的信号输出端设有专门的时分复用电路接口，用来与时分电路的输入端连接。
作为本发明的一种优选的实施例，由此电路结构构成的耳带式设备可以采用助听器或蓝牙耳机。
以上所述仅为本发明较佳的实施例，并非因此限制本发明的实施方式及保护范围，对于本领域技术人员而言，应当能够意识到凡运用本发明说明书及图示内容所作出的等同替换和显而易见的变化所得到的方案，均应当包含在本发明的保护范围内。

Claims (9)

1.基于微机电系统的骨传导传感器，设置于耳带式设备上，其特征在于，包括，
一密闭的腔体，所述腔体内设置：
一单轴或双轴加速度传感器，所述单轴或双轴加速度传感器放置于贴近人耳部骨骼的位置；
一专用集成电路处理芯片，与所述单轴或双轴加速度传感器连接，所述专用集成电路处理芯片设有震动信号输出端。
2.根据权利要求1所述的基于微机电系统的骨传导传感器，其特征在于，所述腔体内设置空气或真空。
3.根据权利要求1所述的基于微机电系统的骨传导传感器，其特征在于，所述骨传导传感器内部包括至少一个声学感测器，所述声学感测器包括背极板和振膜，所述振膜用于感测震动信号。
4.根据权利要求1所述的基于微机电系统的骨传导传感器，其特征在于，所述耳带式设备采用助听器或蓝牙耳机。
5.根据权利要求1所述的基于微机电系统的骨传导传感器，其特征在于，所述专用集成电路处理芯片设有时分复用电路接口。
6.一种耳带式设备，其特征在于，包括权利要求1-5任意一项所述的骨传导传感器，还包括，
一主麦克风，用于感测声波信号；
一辅麦克风，与所述主麦克风相隔设定距离设置；
一音频编解码器，与所述主麦克风和辅麦克风连接；
一微控制器，与所述骨传导传感器的信号输出端和所述音频编解码器的信号输入端连接。
7.根据权利要求6所述的耳带式设备，其特征在于，还包括一时分复用电路，所述时分复用电路的输入接口连接所述的骨传导传感器的输出端和所述主麦克风和所述辅麦克风的输出端，所述时分复用电路的输出端口连接所述微控制器的输入端口。
8.根据权利要求6所述的耳带式设备，其特征在于，所述音频编解码器包括一自适应滤波器，所述自适应滤波器用于将转换而来的音频信号进行噪声抵消并将噪声抵消后的音频信号进行增强。
9.根据权利要求6所述的耳带式设备，其特征在于，还包括一扬声器，与所述音频编解码器的输出端连接。
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Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5692059A (en) * 1995-02-24 1997-11-25 Kruger; Frederick M. Two active element in-the-ear microphone system
US20090282917A1 (en) * 2008-05-19 2009-11-19 Cenk Acar Integrated multi-axis micromachined inertial sensing unit and method of fabrication
CN102611957A (zh) * 2012-03-15 2012-07-25 曾超宁 一种方便佩戴和佩戴舒适的骨传导拾音耳机
CN103818874A (zh) * 2014-02-12 2014-05-28 北京时代民芯科技有限公司 Mems结构与处理电路集成系统的新型封装方法
US20150097253A1 (en) * 2013-10-04 2015-04-09 Analog Devices, Inc. Sealed MEMS Devices with Multiple Chamber Pressures
CN104649217A (zh) * 2014-12-23 2015-05-27 北京时代民芯科技有限公司 一种多mems传感器的单芯片加工方法
US20150230036A1 (en) * 2014-02-13 2015-08-13 Oticon A/S Hearing aid device comprising a sensor member
CN204761712U (zh) * 2015-07-08 2015-11-11 福建太尔电子科技股份有限公司 带语音交流的骨传导帽子助听器
CN105554606A (zh) * 2015-12-15 2016-05-04 广州三星通信技术研究有限公司 数字耳机及电子设备
US20170064427A1 (en) * 2014-04-21 2017-03-02 Apple Inc. Wireless earphone
US20170171679A1 (en) * 2015-12-15 2017-06-15 Sony Mobile Communications Inc. Controlling own-voice experience of talker with occluded ear
CN107277723A (zh) * 2017-07-05 2017-10-20 杭州双弯月电子科技有限公司 一种可自动检测运动状态的压电陶瓷骨传导麦克风
CN108369098A (zh) * 2015-12-10 2018-08-03 应美盛股份有限公司 具有腔体压力监视的双密封mems封装
CN209627692U (zh) * 2019-03-07 2019-11-12 钰太芯微电子科技（上海）有限公司 基于微机电系统的骨传导传感器

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106686494A (zh) 2016-12-27 2017-05-17 广东小天才科技有限公司 一种可穿戴设备的语音输入控制方法及可穿戴设备

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5692059A (en) * 1995-02-24 1997-11-25 Kruger; Frederick M. Two active element in-the-ear microphone system
US20090282917A1 (en) * 2008-05-19 2009-11-19 Cenk Acar Integrated multi-axis micromachined inertial sensing unit and method of fabrication
CN102611957A (zh) * 2012-03-15 2012-07-25 曾超宁 一种方便佩戴和佩戴舒适的骨传导拾音耳机
US20150097253A1 (en) * 2013-10-04 2015-04-09 Analog Devices, Inc. Sealed MEMS Devices with Multiple Chamber Pressures
CN103818874A (zh) * 2014-02-12 2014-05-28 北京时代民芯科技有限公司 Mems结构与处理电路集成系统的新型封装方法
US20150230036A1 (en) * 2014-02-13 2015-08-13 Oticon A/S Hearing aid device comprising a sensor member
US20170064427A1 (en) * 2014-04-21 2017-03-02 Apple Inc. Wireless earphone
CN104649217A (zh) * 2014-12-23 2015-05-27 北京时代民芯科技有限公司 一种多mems传感器的单芯片加工方法
CN204761712U (zh) * 2015-07-08 2015-11-11 福建太尔电子科技股份有限公司 带语音交流的骨传导帽子助听器
CN108369098A (zh) * 2015-12-10 2018-08-03 应美盛股份有限公司 具有腔体压力监视的双密封mems封装
CN105554606A (zh) * 2015-12-15 2016-05-04 广州三星通信技术研究有限公司 数字耳机及电子设备
US20170171679A1 (en) * 2015-12-15 2017-06-15 Sony Mobile Communications Inc. Controlling own-voice experience of talker with occluded ear
CN107277723A (zh) * 2017-07-05 2017-10-20 杭州双弯月电子科技有限公司 一种可自动检测运动状态的压电陶瓷骨传导麦克风
CN209627692U (zh) * 2019-03-07 2019-11-12 钰太芯微电子科技（上海）有限公司 基于微机电系统的骨传导传感器

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
FANG CHEN等: "Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator", 《2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)》, 13 March 2014 (2014-03-13) *
范金焰 等: "真空微电子加速度传感器闭环控制模型仿真与实现", 《压电与声光》, 26 June 2012 (2012-06-26) *
蔡梅妮等: "用于器件级真空封装的MEMS加速度传感器的设计与制作", 《传感器与微系统》, 20 December 2012 (2012-12-20) *
袁哲俊: "《纳米科学与技术》", 31 August 2005, 哈尔滨工业大学出版社, pages: 403 *

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