CN109887706A - A kind of magnetic nanoparticle composite film and preparation method thereof - Google Patents
A kind of magnetic nanoparticle composite film and preparation method thereof Download PDFInfo
- Publication number
- CN109887706A CN109887706A CN201910273164.4A CN201910273164A CN109887706A CN 109887706 A CN109887706 A CN 109887706A CN 201910273164 A CN201910273164 A CN 201910273164A CN 109887706 A CN109887706 A CN 109887706A
- Authority
- CN
- China
- Prior art keywords
- magnetic
- particle
- composite membrane
- sio
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 53
- 239000002122 magnetic nanoparticle Substances 0.000 title claims abstract description 31
- 238000002360 preparation method Methods 0.000 title claims abstract description 18
- 239000002245 particle Substances 0.000 claims abstract description 26
- 239000006249 magnetic particle Substances 0.000 claims abstract description 23
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 6
- 239000012528 membrane Substances 0.000 claims description 41
- 238000001704 evaporation Methods 0.000 claims description 19
- 230000008020 evaporation Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 13
- 239000013528 metallic particle Substances 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 5
- 230000001476 alcoholic effect Effects 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 230000003746 surface roughness Effects 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000004615 ingredient Substances 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 238000002604 ultrasonography Methods 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 33
- 239000002105 nanoparticle Substances 0.000 abstract description 11
- 238000000151 deposition Methods 0.000 abstract description 8
- 238000004891 communication Methods 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 6
- 230000005389 magnetism Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000002787 reinforcement Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000010792 warming Methods 0.000 description 3
- 230000005355 Hall effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910002555 FeNi Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000002173 high-resolution transmission electron microscopy Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000010458 rotten stone Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Thin Magnetic Films (AREA)
- Silicon Compounds (AREA)
- Hard Magnetic Materials (AREA)
Abstract
一种磁性纳米颗粒复合膜及其制备方法，属于薄膜材料磁性控制技术领域。一种磁性纳米颗粒复合膜，所述复合膜由磁性层和绝缘层连续交替沉积而成，复合膜厚度为15～100nm；所述磁性层是由磁性颗粒均匀嵌入绝缘介质中形成的层膜，所述磁性颗粒成分为Fe或Fe‑Ni，磁性颗粒体积分数为80～95％，磁性层厚度为1～20nm；所述绝缘层是由绝缘介质组成，厚度为0.1～10nm。本发明所制备的磁性纳米颗粒复合膜能够控制纳米颗粒的合并生长、颗粒大小及分布均匀性等，从而在晶粒细化的同时实现磁性的提高。使用此发明所制备的复合膜特别适用于数字化电子工业和通信技术领域的电子元器件。
A magnetic nanoparticle composite film and a preparation method thereof belong to the technical field of magnetic control of thin film materials. A magnetic nanoparticle composite film, the composite film is formed by continuously alternately depositing magnetic layers and insulating layers, and the thickness of the composite film is 15-100 nm; the magnetic layer is a layer film formed by uniformly embedding magnetic particles in an insulating medium, The composition of the magnetic particles is Fe or Fe-Ni, the volume fraction of the magnetic particles is 80-95%, and the thickness of the magnetic layer is 1-20 nm; the insulating layer is composed of an insulating medium, and the thickness is 0.1-10 nm. The magnetic nano-particle composite film prepared by the invention can control the combined growth, particle size and distribution uniformity of the nano-particles, so as to realize the improvement of the magnetic properties while the crystal grains are refined. The composite film prepared by using the invention is especially suitable for electronic components in the field of digital electronic industry and communication technology.
Description
Technical field
The invention belongs to thin-film material magnetic control technical fields, and in particular to a kind of magnetic nanoparticle composite membrane and its
Preparation method.
Background technique
The demand for development electronic component of digitalized electron industry and the communication technology is towards high integration, high-frequency and nanometer
Change direction to develop.Thin magnetic film as core material after nanosizing, can generate as huge conductance effect, giant magnetoresistance effect,
The special electromagnet phenomenon such as giant Hall effect.This makes magnetic nanoscale films in high density storage, magnetic resistance sensor, high frequency sensing
The fields such as device, MEMS, micro-transformer, electromagnetism interference and microwave absorption have a wide range of applications.
Nanosizing refers to crystallite dimension control in the range of 1~100nm.Meet application requirement sometimes for obtaining
Performance, crystallite dimension are even less than 5nm.However, the reduction of crystallite dimension can be such that the magnetism of film is influenced by thermal agitation, generate
Superparamagnetic e ffect.And crystallite dimension reduces, and will affect the signal-to-noise ratio of magnetic signal, enhances the scattering of conduction electronics and influences thin
The resistivity and high frequency performance of film.Meanwhile the crystal grain of small size is easy to produce the phase transformation different from block, reduces the magnetism of film
Energy.Therefore, nano particle is embedded into dielectric (such as: SiO, SiO2, MgO etc.) in form nanoparticle composite film, benefit
Particle is improved to the effect of compound membrane granule coupling, magnetic anisotropy and demagnetization effects etc. with dielectric and refines rear film
Magnetism.And electronics also will affect the magnetism and magnetic resistive energy of nano-particles reinforcement film in intergranular tunnel-effect, produce
The raw special effects such as Hall effect and tunnel magneto resistance.However, nano-particles reinforcement film merging growth and size be difficult to control,
Grain size and the problems such as be unevenly distributed, limits that nano-particles reinforcement film is magnetic to be further increased.It is new therefore, it is necessary to develop
Preparation method magnetic property is improved by the control of nano particle in composite membrane.
Summary of the invention
In order to solve the above technical problem, the present invention provides a kind of magnetic nanoparticle composite membranes and preparation method thereof.This
The prepared magnetic nanoparticle composite membrane of invention can control merging growth, granular size and the distributing homogeneity of nano particle
Deng to realize magnetic raising while particle refinement.Using composite membrane prepared by the invention especially suitable for number
Change the electronic component of electronics industry and field of communication technology.
A kind of magnetic nanoparticle composite membrane, the composite membrane are formed by magnetosphere and the continuous alternating deposit of insulating layer, multiple
Conjunction film thickness is 15~100nm；
The magnetosphere is that the tunic formed in dielectric, the magnetism are uniformly embedded by the magnetic-particle of size uniformity
Particulate component is Fe or Fe-Ni, and magnetic particle size score is 80~95%, and the diameter of magnetic-particle is 1~20nm, magnetosphere
With a thickness of 1~20nm；
The insulating layer is made of dielectric, with a thickness of 0.1~10nm.
Magnetosphere is by dielectric SiO coated magnetic particle, dielectric of the magnetic-particle in magnetosphere in the present invention
In neatly arrange.
Magnetic-particle is size uniformity in the present invention, i.e., the magnetic-particle size in magnetosphere, which is distributed, to be concentrated, and changes model
Enclose is the 1~2% of magnetic-particle size.
Preferably, the Fe-Ni is Fe20Ni80。
Preferably, the dielectric is SiO.
It is a further object of the present invention to provide a kind of preparation methods of magnetic nanoparticle composite membrane, comprising the following steps:
Using pretreated quartz plate or monocrystalline silicon piece as substrate；Using metallic particles and SiO particle as deposits materials composite membrane, the metal
Particle and SiO particle diameter are 1~3mm, purity >=99.99%, and the metallic particles is Fe or Fe-Ni particle；Deposition parameter:
The vacuum degree of coating chamber is superior or equal to 5.0 × 10-5Pa, 900~1600 DEG C of molecular beam source temperature, sample stage temperature 25~
500℃；Magnetosphere and the continuous alternating deposit of insulating layer to composite film thickness are 15~100nm；
The magnetospheric deposition: the molecular beam evaporation source baffle and base for being placed with metallic particles and SiO particle are opened simultaneously
The deposition rate ratio of piece baffle, metallic particles and SiO particle is 1:1~20:1, and control magnetic layer thickness is 1~20nm；
The deposition of the insulating layer: will be placed with the molecular beam evaporation source flapper closure of metallic particles, individually deposit SiO, control
Thickness of insulating layer processed is 0.1~10nm.
Continuous alternating deposit magnetosphere and insulating layer in the present invention are realized to nano particle in magnetic nanoparticle composite membrane
Merging growth, granular size and distributing homogeneity etc. control.
It is closer apart from evaporation source due to substrate in the present invention, and it is located at homogeneity range, in the area, deposition rate is to steam
Send out rate.
Preferably, in the deposition of the magnetosphere and insulating layer, thicknesses of layers is controlled by evaporation time.
Preferably, the Fe-Ni is Fe20Ni80。
Preferably, the pretreated quartz plate or monocrystalline silicon piece are the rotten-stone for selecting surface roughness to be less than 0.5nm
English piece or monocrystalline silicon piece are successively cleaned by ultrasonic 15min in acetone, deionized water and alcoholic solution, with the high pressure of high-purity argon gas
Spray gun drying.
Preferably, molecular beam evaporation source baffle is closed after the deposition composite membrane, and substrate temperature is down to room temperature, cooling speed
Rate takes out composite membrane less than 15 DEG C/min.
Magnetosphere is to make magnetic-particle by two molecular beam evaporation source coevaporation metallic particles and dielectric in the present invention
It is uniformly embedded into dielectric, makes magnetic nanoparticle laterally neat arrangement；In insulating layer preparation, molecular beam evaporation source list
Dielectric is solely evaporated, is separated metallic particles on longitudinal direction, to control magnetic particle size.
A kind of magnetic nanoparticle composite membrane of the present invention and preparation method thereof, compared with prior art, beneficial effect is:
1, a kind of magnetic nanoparticle composite membrane of the present invention and preparation method thereof, by alternating deposit magnetosphere with it is non magnetic
Layer prepares the magnetic nanoparticle composite membrane that magnetic-particle size is controllable, arrangement is neat；
2, in magnetosphere preparation process, co-evaporating metal and dielectric using molecular beam source makes the metal magnetic of composite membrane
Particle is uniformly embedded into dielectric, the size of influencing magnetic particles, and making particle, laterally arrangement is neat；Alternately deposited layers growth
Method then can by magnetosphere and nonmagnetic layer surface can be differently formed magnetic-particle, keep particle longitudinal arrangement neat,
And it can control magnetospheric thickness to achieve the purpose that control magnetic particle size；
3, by electron gun temperature adjust growth rate, the merging growth of particle can be influenced, can control particle size and its
Volume fraction of the uniformity and magnetic-particle of distribution in composite membrane；
4, a kind of magnetic nanoparticle composite membrane of the invention, realizes the raising and coercive of composite membrane saturation magnetization
Power is from several oersteds to the variation of several hundred oersteds；Make that still there is magnetism in particle size 3.6nm, reduces and superparamagnetic occurs
The crystallite dimension of effect；Change the electrical property of nano-particles reinforcement film；
5, a kind of magnetic nanoparticle composite membrane and preparation method thereof of the invention, equipment is simply reproducible, and film is raw
Long controllability is good, and the composite membrane of preparation is with high purity, high-quality, low in cost.
Detailed description of the invention
Fig. 1 is a kind of cross section structure schematic diagram of magnetic nanoparticle composite membrane of preparation of the embodiment of the present invention；Wherein, 1-
Magnetosphere；2-SiO insulating layer；Magnetic nanoparticle Fe in 3- magnetosphere20Ni80-SiO；Dielectric in 4- magnetosphere
SiO.Wherein magnetic layer thickness is 6nm, and insulating layer SiO is with a thickness of 1nm；
Fig. 2 is Fe prepared by the embodiment of the present invention 120Ni80- SiO magnetic nanoparticle composite membrane cross-section TEM figure；
Fig. 3 is Fe prepared by the embodiment of the present invention 120Ni80- SiO magnetic nanoparticle composite membrane cross-section high-resolution TEM figure；
Fig. 4 is Fe20Ni80Metal film (a) and the embodiment of the present invention 1 prepare Fe20Ni80- SiO magnetic nanoparticle is multiple
Close the optical contrast figure of film (b)；
Fig. 5 is Fe20Ni80Metal film (a) and the embodiment of the present invention 1 prepare Fe20Ni80- SiO magnetic nanoparticle is multiple
Close film (b) surface topography comparison diagram；
Fig. 6 is Fe20Ni80Metal film (a) and the embodiment of the present invention 1 prepare Fe20Ni80- SiO magnetic nanoparticle is multiple
Close film (b) magnetic domain comparison diagram.
Specific embodiment
Illustrate a specific embodiment of the invention with reference to the accompanying drawing.
Test method described in following embodiments is unless otherwise specified usual manner；Agents useful for same and material, such as
Without specified otherwise, commercially obtain.
Embodiment 1
Fe20Ni80Evaporation rate at 1375 DEG C is 0.916nm/min, and evaporation rate of SiO when for 982 DEG C is
0.238nm/min。Fe20Ni80SiO layer deposits 6min33s with above-mentioned rate, and insulating layer SiO is deposited with above-mentioned rate
4min12s, alternating deposit 5 times.The preparation method of magnetic nanoparticle composite membrane the following steps are included:
Step 1, substrate selection and pretreatment:
Select surface roughness be less than 0.5nm crystal orientation for (100) polished silicon slice, by silicon wafer successively in acetone, go
It is cleaned by ultrasonic 15min in ionized water and alcoholic solution, and is dried up with the high-pressure spray gun of high-purity argon gas；
Step 2, raw material preparation:
The raw materials used Fe for diameter 1mm20Ni80The SiO particle that particle and diameter are 3mm, material purity are
99.999%, two kinds of raw materials are respectively put into the big mouth crucible of 2 customizations, crucible is respectively put into two electron guns, and is closed
Beam cut-off source baffle；
Step 3, compound film preparation:
The substrate handled in step 1 is put on sample stage.When the vacuum degree of coating chamber is better than 5.0 × 10-5When Pa, by sample
Sample platform is warming up to 200 DEG C with the rate of 15 DEG C/min；Fe will be placed with20Ni80The molecular beam evaporation source of particle is warming up to 1375 DEG C,
The molecular beam evaporation source for being placed with SiO particle is warming up to 982 DEG C, deposits composite membrane:
(1) prepared by magnetosphere: opening simultaneously two molecular beam evaporation source baffles, after rate stabilization to be evaporated, opens substrate
Baffle, starts simultaneously at timing, and sedimentation time 6min33s closes substrate baffle plate after timing；
(2) prepared by insulating layer: will be placed with Fe20Ni80The molecular beam evaporation source flapper closure of particle is placed with point of SiO particle
Beamlet evaporation source gear is kept open, and is opened substrate baffle plate, is started simultaneously at timing, sedimentation time 4min12s, timing terminates
After close substrate baffle plate；
It repeats (1) (2) 5 times, closes substrate baffle plate, close electron gun baffle, replacing for magnetosphere and insulating layer can be realized
Growth；
Step 4, substrate temperature is cooled to room temperature, and takes out composite membrane, and wherein rate of temperature fall is 15 DEG C/min.
Fe is made20Ni80The structure of-SiO magnetic nanoparticle composite films is as shown in Figure 1, section TEM figure and section
High-Resolution Map is respectively Fig. 2 and Fig. 3；Wherein Fig. 2 can be seen that composite membrane and obvious layering occurs, have between every layer on longitudinal direction bright
Aobvious SiO layer, i.e., white bright line part in figure.Fig. 3 is it is apparent that Fe20Ni80- SiO magnetic-particle, and magnetosphere
Endoparticle arrangement is uniform.
Fe is made20Ni80- SiO magnetic nanoparticle composite films and Fe20Ni80The magnetic property of metal film, surface shape
Looks, domain structure comparison diagram be respectively Fig. 3,4 and 5, by comparison as can be seen that Fe in Fig. 320Ni80- SiO magnetic Nano
The coercivity of grain composite membrane is greater than metal film Fe20Ni80, the two saturation magnetization difference is little.Due to nano particle in Fig. 4
Merging, Fe20Ni80The surface particles of-SiO magnetic nanoparticle composite membrane are greater than pure FeNi film.The Fe from Fig. 520Ni80-
SiO magnetic nanoparticle composite membrane can be seen that apparent domain structure.
Claims (8)
1. a kind of magnetic nanoparticle composite membrane, which is characterized in that the composite membrane is continuously alternately heavy by magnetosphere and insulating layer
Product forms, and composite film thickness is 15~100nm；
The magnetosphere is that the tunic formed in dielectric, the magnetic-particle are uniformly embedded by the magnetic-particle of size uniformity
Ingredient is Fe or Fe-Ni, and magnetic particle size score is 80~95%, and the diameter of magnetic-particle is 1~20nm, magnetic layer thickness
For 1~20nm；
The insulating layer is made of dielectric, with a thickness of 0.1~10nm.
2. composite membrane according to claim 1, which is characterized in that the Fe-Ni is Fe20Ni80。
3. composite membrane according to claim 1, which is characterized in that the dielectric is SiO.
4. the preparation method of magnetic nanoparticle composite membrane described in claim 1, which comprises the following steps: with
Pretreated quartz plate or monocrystalline silicon piece are substrate；Using metallic particles and SiO particle as deposits materials composite membrane, the metal
Grain and SiO particle diameter are 1~3mm, purity >=99.99%, and the metallic particles is Fe or Fe-Ni particle；Deposition parameter: plating
The vacuum degree of film room is superior or equal to 5.0 × 10-5Pa, 900~1600 DEG C of molecular beam source temperature, sample stage temperature 25~
500℃；Magnetosphere and the continuous alternating deposit of insulating layer to composite film thickness are 15~100nm；
The magnetospheric deposition: molecular beam evaporation source baffle and the substrate gear for being placed with metallic particles and SiO particle are opened simultaneously
The deposition rate ratio of plate, metallic particles and SiO particle is 1:1~20:1, and control magnetic layer thickness is 1~20nm；
The deposition of the insulating layer: will be placed with the molecular beam evaporation source flapper closure of metallic particles, individually deposit SiO, and control is exhausted
Edge layer is with a thickness of 0.1~10nm.
5. according to the method described in claim 4, it is characterized in that, passing through evaporation in the deposition of the magnetosphere and insulating layer
Time controls thicknesses of layers.
6. according to the method described in claim 4, it is characterized in that, the Fe-Ni is Fe20Ni80。
7. according to the method described in claim 4, it is characterized in that, the pretreated quartz plate or monocrystalline silicon piece are selection table
Surface roughness is less than the polishing quartz plate or monocrystalline silicon piece of 0.5nm, and successively ultrasound is clear in acetone, deionized water and alcoholic solution
15min is washed, is dried up with the high-pressure spray gun of high-purity argon gas.
8. according to the method described in claim 4, it is characterized in that, closing molecular beam evaporation source gear after the deposition composite membrane
Substrate temperature is down to room temperature by plate, and rate of temperature fall takes out composite membrane less than 15 DEG C/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910273164.4A CN109887706B (en) | 2019-04-04 | 2019-04-04 | Magnetic nano-particle composite membrane and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910273164.4A CN109887706B (en) | 2019-04-04 | 2019-04-04 | Magnetic nano-particle composite membrane and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109887706A true CN109887706A (en) | 2019-06-14 |
| CN109887706B CN109887706B (en) | 2021-05-25 |
Family
ID=66936197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910273164.4A Expired - Fee Related CN109887706B (en) | 2019-04-04 | 2019-04-04 | Magnetic nano-particle composite membrane and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109887706B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110289349A (en) * | 2019-06-27 | 2019-09-27 | 东北大学 | A magnetically adjustable composite metal phthalocyanine thin film and its preparation method |
| CN115413210A (en) * | 2021-05-27 | 2022-11-29 | 华为技术有限公司 | Magnetic thin film, preparation method thereof, semiconductor packaging module and electronic equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1750184A (en) * | 2004-09-17 | 2006-03-22 | 太阳诱电株式会社 | Laminated magnetic thin film and method of manufacturing the same |
| JP2006188727A (en) * | 2005-01-05 | 2006-07-20 | Sony Corp | Cluster of nanoparticles of magnetic metal, and production method therefor |
| JP2013008767A (en) * | 2011-06-23 | 2013-01-10 | Taiyo Yuden Co Ltd | Laminated magnetic thin film and magnetic component |
| CN105374374A (en) * | 2015-10-30 | 2016-03-02 | 钢铁研究总院 | High-density low-cost magnetic recording medium FeNi alloy and preparation method therefor |
| CN108698369A (en) * | 2016-03-04 | 2018-10-23 | 3M创新有限公司 | Magnetic multiplayer sheet material |
-
2019
- 2019-04-04 CN CN201910273164.4A patent/CN109887706B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1750184A (en) * | 2004-09-17 | 2006-03-22 | 太阳诱电株式会社 | Laminated magnetic thin film and method of manufacturing the same |
| JP2006188727A (en) * | 2005-01-05 | 2006-07-20 | Sony Corp | Cluster of nanoparticles of magnetic metal, and production method therefor |
| JP2013008767A (en) * | 2011-06-23 | 2013-01-10 | Taiyo Yuden Co Ltd | Laminated magnetic thin film and magnetic component |
| CN105374374A (en) * | 2015-10-30 | 2016-03-02 | 钢铁研究总院 | High-density low-cost magnetic recording medium FeNi alloy and preparation method therefor |
| CN108698369A (en) * | 2016-03-04 | 2018-10-23 | 3M创新有限公司 | Magnetic multiplayer sheet material |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110289349A (en) * | 2019-06-27 | 2019-09-27 | 东北大学 | A magnetically adjustable composite metal phthalocyanine thin film and its preparation method |
| CN110289349B (en) * | 2019-06-27 | 2021-03-30 | 东北大学 | A kind of magnetically tunable composite metal phthalocyanine film and preparation method thereof |
| CN115413210A (en) * | 2021-05-27 | 2022-11-29 | 华为技术有限公司 | Magnetic thin film, preparation method thereof, semiconductor packaging module and electronic equipment |
| WO2022247465A1 (en) * | 2021-05-27 | 2022-12-01 | 华为技术有限公司 | Magnetic thin film and preparation method therefor, semiconductor package module, and electronic device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109887706B (en) | 2021-05-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102534511A (en) | Film vapor deposition device and application method thereof | |
| CN109887706A (en) | A kind of magnetic nanoparticle composite film and preparation method thereof | |
| Ovejero et al. | Exchange bias and two steps magnetization reversal in porous Co/CoO layer | |
| Russak et al. | Magnetic and structural characterization of sputtered FeN multilayer films | |
| Kodama et al. | Synthesis and characterization of magnetic nanocomposite films | |
| CN108624852B (en) | high-Curie-temperature Fe-Zr amorphous multilayer film and preparation method thereof | |
| Zhao et al. | Cluster-assembled Tb–Fe nanostructured films produced by low energy cluster beam deposition | |
| CN102061451B (en) | A kind of preparation method of L10-FePt particle film | |
| RU2451769C2 (en) | Method, and apparatus for multi-layer film production and multi-layer structure produced by their means | |
| CN100409379C (en) | Crystal size-controllable polycrystalline Fe3O4 thin-film material and its preparation method | |
| Urse et al. | Magnetic, electrical and structural properties of granular [FeCoB/(SiO~ 2)] xn thin films | |
| Karpov et al. | Effect of the Vacuum-Arc Synthesis Parameters on the Structure and Magnetic Properties of NiO Nanoparticles | |
| CN102321863A (en) | Method for preparing Ni-Zn ferrite film | |
| Chen et al. | Dependences of giant magnetoresistance in Co/Cu multilayers on sputtering conditions | |
| Wang et al. | Nano‐Magnetic Feal and Feain Thin Films Via Sputtering | |
| Hayashi et al. | Magnetic thin films of cobalt nanocrystals encapsulated in graphite-like carbon | |
| CN100401433C (en) | Preparation method and application of polycrystalline Fe3O4 thin film material | |
| Yuan et al. | Magnetic properties of [FeCo-O/NiZn-Ferrite] n bi-magnetic phase nanocomposite multilayer films | |
| Daumont et al. | Characterization of FeAIN Thin Films with Nano Sized Particles | |
| Tan et al. | Magnetic properties and microstructure of FePt–SiO2 nanocomposite films fabricated by nanocluster beam technology | |
| Mo et al. | Structure and magnetic properties of Fe films with pyramid-like nanostructures deposited by oblique target direct current magnetron sputtering | |
| CN116397193A (en) | Preparation method of high-resistivity high-cutoff frequency soft magnetic film | |
| Urse et al. | Magnetic and electrical properties of [NiFe/SiO2] x N multilayer thin films | |
| Guanghua et al. | Ultrathin permalloy films | |
| CN104451568A (en) | Preparing method for double-magnetism phase nanocomposite film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210525 |