CN109870104A - A kind of laser interferometer and light path collimation method equipped with auxiliary alignment device - Google Patents

A kind of laser interferometer and light path collimation method equipped with auxiliary alignment device Download PDF

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Publication number
CN109870104A
CN109870104A CN201910216938.XA CN201910216938A CN109870104A CN 109870104 A CN109870104 A CN 109870104A CN 201910216938 A CN201910216938 A CN 201910216938A CN 109870104 A CN109870104 A CN 109870104A
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China
Prior art keywords
reflecting mirror
spectroscope
guide rod
mounting base
seat
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CN201910216938.XA
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Chinese (zh)
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吴剑武
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WENZHOU CITY INDUSTRY SCIENCE INST
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WENZHOU CITY INDUSTRY SCIENCE INST
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Priority to CN201910216938.XA priority Critical patent/CN109870104A/en
Publication of CN109870104A publication Critical patent/CN109870104A/en
Pending legal-status Critical Current

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Abstract

A kind of laser interferometer and light path collimation method equipped with auxiliary alignment device.Solve existing laser interference collimation trouble, time-consuming and laborious problem.It includes host, input light beam, spectroscope, first reflecting mirror and the second reflecting mirror, it further include auxiliary alignment device, the auxiliary alignment device respectively with spectroscope, second reflecting mirror is connected and the second reflecting mirror can be fixed quickly, it is received by a detector so that measuring beam can be returned correctly on measurement motion path, its method uses: by assisting the movement of alignment device to cooperate, so that the second mirror center is in always on the measuring beam direction of spectroscope generation in motion measurement, it ensure that the measuring beam returned through the second reflecting mirror is received by a detector.The present invention has structure simple, and beam path alignment is once completed, convenient and reliable, time saving and energy saving, high-efficient.

Description

A kind of laser interferometer and light path collimation method equipped with auxiliary alignment device
Technical field
The present invention relates to a kind of laser interferometer, and in particular to a kind of laser interferometer and light equipped with auxiliary alignment device Road alignment method.
Background technique
Laser interferometer utilizes the general length of Michelson Interferometer systematic survey displacement using optical maser wavelength as known length Measuring instrument.It is commonly used to the interferometer of measurement length at present, mainly using frequency stabilization He-Ne Lasers as light source, constitutes one with dry Relate to the measuring system of effect.Laser interferometer can cooperate various refracting telescopes, reflecting mirror etc. to make linear, angle, straightness, very straight The measurement work such as degree, verticality and flatness, and correction work can be made for precision instrument or measuring instrument.
Accurate lathe is needed to measure its positioning accuracy after a period of time, be calibrated, and is typically required progress Measurement of the X of machine tool motion workbench to, Y-direction and the linear orientation precision of main shaft Z-direction, to guarantee the machining accuracy of lathe.? System is more demanding to interferometer, spectroscope and reflecting mirror three's relative position degree when measurement, since microscope group is free placement, makes Existing means be according to reflection light point by rule of thumb repeatedly adjust interferometer, spectroscope and reflecting mirror relative position, even if Measuring beam is detected on measuring instrument when being in the position of certain point by adjusting reflecting mirror, but works as machine tool motion work to be measured Make the X of platform to after, Y-direction or the mobile certain position of main shaft Z-direction, measuring beam still may not fallen on detector, i.e., carefully Micro- angular deviation can all cause light reflection path deviate, therefore install after interferometer light source issue light it is difficult to ensure that Whole section of test path glazed thread can return to the position being detected by the detector at one, cause to fail to light, need from the beginning to open Begin to adjust.Usual skilled worker requires to spend half an hour or even more than one hours time could when measuring operation The beam path alignment in a direction is completed, time-consuming and laborious, detection efficiency is low.
Summary of the invention
One kind is provided and is set to solve existing laser interference collimation trouble, time-consuming and laborious problem, the present invention in background technique There are the laser interferometer and light path collimation method of auxiliary alignment device.
The technical scheme is that it is a kind of equipped with auxiliary alignment device laser interferometer, including host, spectroscope, First reflecting mirror, the second reflecting mirror and auxiliary alignment device, the host is interior to be equipped with light source and detector, and described first is anti- Mirror is penetrated on spectroscope, the spectroscope is set in the first mounting base by auxiliary alignment device, second reflection Mirror is set in the second mounting base by auxiliary alignment device, and the input light beam that the light source is launched is divided into ginseng after spectroscope Light beam and measuring beam are examined, the reference beam is received by a detector after the first reflecting mirror, spectroscope, the measurement light Beam is received by a detector after the second reflecting mirror, spectroscope, the auxiliary alignment device respectively with spectroscope, the second reflecting mirror Be connected and the second reflecting mirror can quickly be fixed so that measuring beam measurement motion path on can correctly return it is detected Device receives.
As an improvement of the present invention, the auxiliary alignment device includes guide rod seat, guide rod and swing mechanism, institute The guide rod stated is set on guide rod seat, and the guide rod seat is set on spectroscope, and the spectroscope is set to by swing mechanism It swings in first mounting base and with the first mounting base and connects, second reflecting mirror slides along the axial direction and spectroscope of guide rod Cooperation.
As a further improvement of the present invention, the guide rod seat is equipped with the pilot hole for guide rod insertion, described The axis of pilot hole and each datum level keeping parallelism of guide rod seat are vertical.
As a further improvement of the present invention, the guide rod and guide rod seat are detachably connected, on the guide rod seat Equipped with the holding screw knob fixed for guide rod.
As a further improvement of the present invention, the axis of the guide rod is equal with the measuring beam generated after spectroscope Row.
As a further improvement of the present invention, the swing mechanism includes swing seat and link block, the spectroscope On link block, connecting rod is equipped between the swing seat and link block, first mounting base is equipped with gap slot, The swing seat is set in the first mounting base and can rotate relative to the first mounting base.
As a further improvement of the present invention, the swing seat and connecting rod in swing seat can opposite first Mounting base rotation, further includes the fixing screws knob for fixed connecting rod swing angle.
As a further improvement of the present invention, second mounting base is equipped with guide holder, second reflecting mirror On guide holder, the guide holder is equipped with support plate, and the guide rod is set in support plate.
As a further improvement of the present invention, the support plate is set to the outside of guide holder, sets in the support plate There is U-type groove, the guide rod is set in U-type groove and is supported plate support.
As a further improvement of the present invention, first reflecting mirror is detachably connected with spectroscope, and described first Reflecting mirror and the second reflecting mirror are angle rib reflecting mirror.
A kind of light path collimation method of laser interferometer, including host, spectroscope, the first reflecting mirror, the second reflecting mirror, One mounting base, the second mounting base, swing seat, guide rod seat, guide rod and guide holder, the host is interior to be equipped with light source and detection Device, using following steps: the first reflecting mirror, guide rod seat and link block are fixed on spectroscope according to optical path direction by A pacifies accordingly On dress face;Swing seat is mounted in the first mounting base by B, and the first mounting base is fixed on machine tool chief axis;C is by spectroscope, One reflecting mirror, guide rod seat and link block combination are connected and fixed by connecting rod and swing seat, and guide rod is inserted into guide rod seat It is fixed in pilot hole, unclamp the fixing screws knob in swing seat;D adjusts the first mounting base, so that guide rod is in horizontal position It sets, guiding rod axis is consistent with machine tool motion direction;Guide holder is fixed on the corresponding mounting surface of the second reflecting mirror by E, And it is mounted in the second mounting base;Second mirror center height is adjusted to consistent with spectroscope centre-height by F;G is by second Mounting base is corresponding to be set on machine tool motion workbench to be measured, and as close as possible to the first mounting base;H is by adjusting installation position It sets, keeps spectroscope, the second reflecting mirror in the same plane, guide rod is in the U-type groove of rod guide supports plate, guide holder branch Fagging is vertical with guiding rod axis;I presses measurement direction mobile machine tool workbench, slides onto so that the second reflecting mirror is oppositely oriented bar Guide rod end;J tightens the fixing screws knob in swing seat, fixed angle of revolution;K erection host in place, adjustment Height of main frame and beat pitch angle, so that the input light beam that light source issues generates reference beam and measuring beam after spectroscope It can be received by a detector after the first reflecting mirror, the second reflecting mirror;L unclamps the holding screw knob on guide rod seat, removes guiding Bar, beam path alignment are completed.
The invention has the advantages that being provided with auxiliary alignment device makes the spectroscope center in measurement length accordingly Always on the path where measuring beam, measuring beam is received convenient for host, consequently facilitating measuring to machine, optical path Collimation is primary to be completed, convenient and reliable, time saving and energy saving, high-efficient.The present invention also has structure simple, easy to assembly, reliable in action, The advantages that long service life.
Detailed description of the invention
Attached drawing 1 is the structural schematic diagram of a pair of of embodiment of the present invention light starting point.
Attached drawing 2 is the structural schematic diagram of a pair of of embodiment of the present invention light terminal point.
Attached drawing 3 is the structural schematic diagram of two pairs of light starting points of the embodiment of the present invention.
Attached drawing 4 is the structural schematic diagram of two pairs of light terminal points of the embodiment of the present invention.
Attached drawing 5 is the schematic top plan view of attached drawing 3.
Attached drawing 6 is the schematic top plan view of attached drawing 4.
Attached drawing 7 is the structural schematic diagram of guide holder 61 in attached drawing 2.
Attached drawing 8 is the structural schematic diagram of guide holder 61 in attached drawing 4.
Attached drawing 9 is the structural schematic diagram of guide rod seat 71 in attached drawing 2.
Attached drawing 10 is the structural schematic diagram of guide rod seat 71 in attached drawing 4.
Attached drawing 11 is the structural schematic diagram in attached drawing 1 at first mounting base 5.
Attached drawing 12 is the schematic cross-sectional view of attached drawing 11.
Attached drawing 13 is the structural schematic diagram of 12 other direction of attached drawing.
Systematic schematic diagram when attached drawing 14 is two ranging of the embodiment of the present invention.
In figure, 1, host;11, light source;111, light beam is inputted;112, reference beam;113, measuring beam;12, detector; 2, spectroscope;3, the first reflecting mirror;4, the second reflecting mirror;5, the first mounting base;51, gap slot;6, the second mounting base;61, it leads To seat;62, support plate;621, U-type groove;7, alignment device is assisted;71, guide rod seat;711, holding screw knob;72, guide rod; 8, swing mechanism;81, swing seat;82, link block;83, connecting rod;84, fixing screws knob;91, platen;92, main Axis.
Specific embodiment
Embodiments of the present invention is further illustrated with reference to the accompanying drawing:
As shown in Fig. 1 combination Fig. 2-14, a kind of laser interferometer equipped with auxiliary alignment device, including host 1, spectroscope 2, the One reflecting mirror 3, the second reflecting mirror 4 and auxiliary alignment device 7, the host 1 is interior equipped with light source 11 and detector 12, described First reflecting mirror 3 is set on spectroscope 2, and the spectroscope 2 is set in the first mounting base 5 by auxiliary alignment device 7, described The second reflecting mirror 4 be set in the second mounting base 6 by auxiliary alignment device 7, input light beam that the light source 11 is launched 111 are divided into reference beam 112 and measuring beam 113 after spectroscope, and the reference beam 112 is through the first reflecting mirror 3, light splitting It is received after mirror 2 by detector 12, the measuring beam 113 is received after the second reflecting mirror 4, spectroscope 2 by detector 12, institute The auxiliary alignment device 7 stated is connected with spectroscope 2, the second reflecting mirror 4 respectively and the second reflecting mirror 4 can be fixed quickly so that Measuring beam 113 can be returned correctly on measurement motion path and be received by detector 12.Specifically, it referring to attached drawing 14, surveys It measures light beam to generate after the reflection of the second reflecting mirror, is known as the first measurement light between the second reflecting mirror and spectroscope for statement is convenient Beam is known as the second measuring beam between spectroscope and detector, specifically, for the ease of identification, by measuring beam and ginseng Examine light beam is indicated with different arrows in accompanying fig. 14.Make the invention has the advantages that being provided with auxiliary alignment device On the corresponding path measured where the second mirror center in length is in measuring beam always, measurement light is received convenient for host Beam, consequently facilitating measuring to machine, beam path alignment is once completed, convenient and reliable, time saving and energy saving, high-efficient.The present invention is also It is simple with structure, it is easy to assembly, the advantages that reliable in action, long service life.Specifically, the present invention can be to existing machine Movement of the X to, Y-direction carry out ranging, according to machine is mobile and the difference adjustment machine of ranging is to guarantee the processing essence of machine Degree.It is accurate to light before measuring to make provided with auxiliary alignment device, and convenient for measurement, and measurement accuracy is high, avoids machine Signal cannot be received after machine tool motion workbench or motion of main shaft, so that repeatedly debugging is needed, it is time-consuming and laborious.Laser interferometer Working principle be the light beam issued from the light source of laser, two-way is divided into after spectroscope expands, and respectively from fixation reflex Mirror (the first reflecting mirror) and moving reflector (the second reflecting mirror) reflect congregation and generate interference fringe on spectroscope.When When moving reflector is mobile, the light intensity of interference fringe changes by the photo-electric conversion element and electronic circuit in receiver (detector) Etc. being converted to electric impulse signal, input forward-backward counter calculates overall pulse number after shaped, amplification, then is pressed by electronic computer Calculating formula calculates, and is optical maser wavelength (N is electric pulse sum) according to λ, calculates the displacement L of moving reflector.This is specifically surveyed Measuring principle and calculation formula etc. is the prior art, and this will not be repeated here.It certainly in the present invention can be dry using single-frequency laser Interferometer measures can also be using two-frequency laser interferometer, and in collimation, auxiliary alignment device reliably can quickly to connect It receives device and receives signal, so that the carry out ranging that product can be quick and easy, and the operating experience of worker is required low.Specifically Say, embodiment one and implement two to be product of the present invention respectively carrying out linear orientation precision measure to X-direction and Y direction When application.The present invention is usually to fix the first magnet base (the first mounting base) in ranging, by the second magnet base (the second peace Dress seat) follow machine tool motion working table movement.The embodiment of the present invention one and implementation two are product of the present invention respectively to X-direction Ranging is carried out with Y direction, therefore the first magnet base is fixed on machine tool chief axis, the second magnet base is fixed on machine to be measured On bed motion workbench.
The auxiliary alignment device 7 includes guide rod seat 71, guide rod 72 and swing mechanism 8, and the guide rod 72 is set In on guide rod seat 71, the guide rod seat 71 is set on spectroscope 2, and the spectroscope 2 is set to the first peace by swing mechanism 8 It fills on seat 5 and is swung with the first mounting base 5 and connected, second reflecting mirror 4 slides along the axial direction and spectroscope 2 of guide rod 72 Cooperation.Specifically, first mounting base is fixed on machine tool chief axis or other are fixed on position, spectroscope connected to it Combination can horizontally rotate within a certain angle.The setting of guide rod so that locate always at measurement length upper reflector center accordingly In on the place path of measuring beam, so that only need to adjust single beam path alignment between host and spectroscope, it is right It is accurate that light facilitates, and can according to need setting, and range of fit is wide, while can according to need the selection for carrying out multiple positions, Guarantee that detector reliably receives signal.Specifically, usually by the second reflecting mirror as close as possible to spectroscope (to light starting point), lead to The axial sliding that the second reflecting mirror is crossed along guide rod adjusts spectroscopical angle position so that swing mechanism is swung, thus being oriented to On path where spectroscope center capable of being made to be in measuring beam always after end (to light terminal) beam path alignment of bar, detection Device energy reliable reception measuring beam.Certainly in the actual production process, auxiliary alignment device can also be arranged to Z-type, by the Two-mirror and spectroscope are set to the two sides of Z-type auxiliary alignment device, and make the first mirror center, the spectroscope line of centres With the second mirror center, the spectroscope line of centres in 90 degree of settings, by the movement of platen so that the second reflecting mirror Horizontally separated in the case where collimation with spectroscope, so that detector energy reliable reception is to signal, beam path alignment is conveniently.
The guide rod seat 71 is equipped with the pilot hole being inserted into for guide rod 72, the axis and guide rod seat of the pilot hole 71 each datum level keeping parallelisms are vertical.Such structure can guarantee guide rod and measuring beam in spectroscope and the second reflecting mirror Between keeping parallelism receive measuring beam convenient for detector consequently facilitating beam path alignment.Specifically, the guide rod 72 Axis is parallel with the measuring beam 113 generated after spectroscope 2.Such structure enable detector reliable reception to letter Number, beam path alignment is convenient, quickly.
The guide rod and guide rod seat is detachably connected, and the guide rod seat is equipped with the tightening fixed for guide rod Screw knob 711.Such structure is convenient for the dismounting of guide rod, convenient for the installation of product.
The swing mechanism 8 includes swing seat 81 and link block 82, and the spectroscope 2 is set on link block 82, institute Connecting rod 83 is equipped between the swing seat 81 stated and link block 82, first mounting base 5 is equipped with gap slot 51, described Swing seat 81 is set in the first mounting base 5 and can rotate relative to the first mounting base 5.Such structure enables swing seat " horizontal (horizontal direction is also possible to vertical side when moving on measuring Z-direction as the case may be referring to attached drawing 1-4 in direction " To) on carry out certain swing, spectroscope is finely adjusted.Specifically, by pivoted housing, the setting of change, so that swing seat Rotation in pivoted housing can be inserted, and locked by locking bolt, fixed spectroscope avoids the swing in machine operating measurement.
The swing seat 81 and the connecting rod 83 in swing seat 81 can be rotated relative to the first mounting base 5, also be wrapped Include the fixing screws knob 84 for 83 swing angle of fixed connecting rod.It is such can by the fixed swing seat of fixing screws and The position of connecting rod guarantees that spectroscope center is in measurement light always so that the position of spectroscope and guide rod be fixed On path where beam, it is convenient for detector energy reliable reception measuring beam.
Second mounting base 6 is equipped with guide holder 61, and second reflecting mirror 4 is set on guide holder 61, described Guide holder 61 be equipped with support plate 62, the guide rod 72 be set to support plate 62 on.Specifically, the support plate 62 Set on the outside of guide holder 61, the support plate 62 is equipped with U-type groove 621, and the guide rod 72 is set in U-type groove 621 And it is supported the support of plate 62.Specifically, the U-type groove notch is upward, and guide rod is set in U-type groove and is supported plate branch Support, the U-shaped sliding slot and guide rod sliding cooperate.In to light alignment procedure, the second mounting base can be made mobile to So that the support plate 62 cooperates along axial direction and spectroscope 2 sliding of guide rod 72, pass through the cooperation of swing mechanism, adjustment point The angular deviation of light microscopic and the second reflecting mirror, so that spectroscope center is in always on the path where measuring beam, just In detector energy reliable reception measuring beam.Such structure makes during beam path alignment, measuring beam energy and guide rod In parallel, it avoids measuring beam from generating angle to influence detector signal acquisition, influences the accuracy of measurement.
Spectroscope 2, the first reflecting mirror 3 and second reflecting mirror 4 is cuboid.Such structure is convenient for assembly, Convenient for calibration, convenient for cooperating with other component.
First reflecting mirror 3 is detachably connected with spectroscope 2, and first reflecting mirror 3 and the second reflecting mirror 4 are For angle rib reflecting mirror.Such structure is convenient for reliable dismounting combination, convenient for the protection of product after measurement, so that product service life It is long.
A kind of light path collimation method of laser interferometer, including host, spectroscope, the first reflecting mirror, the second reflecting mirror, One mounting base, the second mounting base, swing seat, guide rod seat, guide rod and guide holder, the host is interior to be equipped with light source and detection Device, using following steps: the first reflecting mirror, guide rod seat and link block are fixed on spectroscope according to optical path direction by A pacifies accordingly On dress face;Swing seat is mounted in the first mounting base by B, and the first mounting base is fixed on machine tool chief axis 92;C by spectroscope, First reflecting mirror, guide rod seat and link block combination are connected and fixed by connecting rod and swing seat, and guide rod is inserted into guide rod seat Pilot hole in it is fixed, unclamp the fixing screws knob in swing seat;D adjusts the first mounting base, so that guide rod is in level Position, guiding rod axis are consistent with machine tool motion direction;Guide holder is fixed on the corresponding mounting surface of the second reflecting mirror by E On, and be mounted in the second mounting base;Second mirror center height is adjusted to consistent with spectroscope centre-height by F;G is by Two mounting bases are corresponding to be set on machine tool motion workbench to be measured, and as close as possible to the first mounting base;H is by adjusting installation Position keeps spectroscope, the second reflecting mirror in the same plane, and guide rod is in the U-type groove of rod guide supports plate, guide holder Support plate is vertical with guiding rod axis;I presses measurement direction mobile machine tool workbench 91, so that the second reflecting mirror is oppositely oriented bar and slides Move to guide rod end;J tightens the fixing screws knob in swing seat, fixed angle of revolution;K erection host in place, Height of main frame and beat pitch angle are adjusted, so that the input light beam that light source issues generates reference beam and measurement after spectroscope Light beam can be received by a detector after the first reflecting mirror, the second reflecting mirror;L unclamps the holding screw knob on guide rod seat, removes Guide rod, beam path alignment are completed.This method is by the second reflecting mirror along the axial sliding of guide rod so that swing seat swing adjusts Spectroscopical angle position, to spectroscope center can be made to locate always after end (to light terminal) beam path alignment of guide rod In on the path where measuring beam, detector energy reliable reception measuring beam, beam path alignment is convenient, high-efficient.
In the description of the present invention, it should be noted that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower", The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside" is It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as pair Limitation of the invention.In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply opposite Importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can To be mechanical connection, it is also possible to be electrically connected;It can be directly connected, can also can be indirectly connected through an intermediary Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition Concrete meaning in invention.In addition, in the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or two More than.
Every technical staff's notice: of the invention although the present invention is described according to above-mentioned specific embodiment Invention thought be not limited in the invention, any repacking with inventive concept will all be included in this patent protection of the patent right In range.

Claims (10)

1. a kind of laser interferometer equipped with auxiliary alignment device, it is characterised in that: including host (1), spectroscope (2), first Reflecting mirror (3), the second reflecting mirror (4) and auxiliary alignment device (7), the host (1) is interior to be equipped with light source (11) and detector (12), first reflecting mirror (3) is set on spectroscope (2), and the spectroscope (2) is by assisting alignment device (7) to set In on the first mounting base (5), second reflecting mirror (4) is set on the second mounting base (6) by auxiliary alignment device (7), The input light beam (111) that the light source (11) is launched is divided into reference beam (112) and measuring beam after spectroscope (113), the reference beam (112) is received after the first reflecting mirror (3), spectroscope (2) by detector (12), the survey It measures light beam (113) to be received after the second reflecting mirror (4), spectroscope (2) by detector (12), the auxiliary alignment device (7) It is connected respectively with spectroscope (2), the second reflecting mirror (4) and the second reflecting mirror (4) can be fixed quickly so that measuring beam (113) it can correctly return on measurement motion path and be received by detector (12).
2. a kind of laser interferometer equipped with auxiliary alignment device according to claim 1, it is characterised in that described is auxiliary Helping alignment device (7) includes guide rod seat (71), guide rod (72) and swing mechanism (8), and the guide rod (72) is set to guide rod On seat (71), the guide rod seat (71) is set on spectroscope (2), and the spectroscope (2) is set to the by swing mechanism (8) It swings in one mounting base (5) and with the first mounting base (5) and connects, axial direction of second reflecting mirror (4) along guide rod (72) It slides and cooperates with spectroscope (2).
3. a kind of laser interferometer equipped with auxiliary alignment device according to claim 2, it is characterised in that described leads Pole socket (71) is equipped with the pilot hole for guide rod (72) insertion, the axis and guide rod seat (71) each datum level of the pilot hole Keeping parallelism is vertical.
4. a kind of laser interferometer equipped with auxiliary alignment device according to claim 2, it is characterised in that the guiding The axis of bar (72) is parallel with measuring beam (113) that generate after spectroscope (2).
5. a kind of laser interferometer equipped with auxiliary alignment device according to claim 2, it is characterised in that the pendulum Motivation structure (8) includes swing seat (81) and link block (82), and the spectroscope (2) is set on link block (82), the pendulum Connecting rod (83) are equipped between dynamic seat (81) and link block (82), first mounting base (5) is equipped with gap slot (51), institute The swing seat (81) stated is set on the first mounting base (5) and can rotate relative to the first mounting base (5).
6. a kind of laser interferometer equipped with auxiliary alignment device according to claim 5, it is characterised in that the pendulum Dynamic seat (81) and the connecting rod (83) being set on swing seat (81) can be rotated relative to the first mounting base (5), further include for solid Determine the fixing screws knob (84) of connecting rod (83) swing angle.
7. a kind of laser interferometer equipped with auxiliary alignment device according to claim 2, it is characterised in that described the Two mounting bases (6) are equipped with guide holder (61), and second reflecting mirror (4) is set on guide holder (61), the guide holder (61) support plate (62) are equipped with, the guide rod (72) is set on support plate (62).
8. a kind of laser interferometer equipped with auxiliary alignment device according to claim 4, it is characterised in that the branch Fagging (62) is set to the outside of guide holder (61), and the support plate (62) is equipped with U-type groove (621), the guide rod (72) it is set in U-type groove (621) and is supported plate (62) support.
9. a kind of laser interferometer equipped with auxiliary alignment device according to claim 1, it is characterised in that described the One reflecting mirror (3) is detachably connected with spectroscope (2), and first reflecting mirror (3) and the second reflecting mirror (4) are that angle rib is anti- Penetrate mirror.
10. a kind of light path collimation method of laser interferometer, it is characterised in that: including host, spectroscope, the first reflecting mirror, Two-mirror, the first mounting base, the second mounting base, swing seat, guide rod seat, guide rod and guide holder are equipped in the host Light source and detector, using following steps: the first reflecting mirror, guide rod seat and link block are fixed on light splitting according to optical path direction by A On the corresponding mounting surface of mirror;Swing seat is mounted in the first mounting base by B, and the first mounting base is fixed on machine tool chief axis;C will Spectroscope, the first reflecting mirror, guide rod seat and link block combination are connected and fixed by connecting rod and swing seat, and guide rod is inserted into It is fixed in the pilot hole of guide rod seat, unclamp the fixing screws knob in swing seat;D adjusts the first mounting base, so that at guide rod In horizontal position, it is oriented to rod axis and is consistent with machine tool motion direction;Guide holder is fixed on the second reflecting mirror by E pacifies accordingly On dress face, and it is mounted in the second mounting base;Second mirror center height is adjusted to consistent with spectroscope centre-height by F;G It is set to the second mounting base is corresponding on machine tool motion workbench to be measured, and as close as possible to the first mounting base;H by adjusting Installation site keeps spectroscope, the second reflecting mirror in the same plane, and guide rod is in the U-type groove of rod guide supports plate, leads It is vertical with guiding rod axis to seat supports plate;I presses measurement direction mobile machine tool workbench, so that the second reflecting mirror is oppositely oriented bar Slide onto guide rod end;J tightens the fixing screws knob in swing seat, fixed angle of revolution;K erection master in place Machine adjusts height of main frame and beat pitch angle so that the input light beam that light source issues is generated after spectroscope reference beam with Measuring beam can be received by a detector after the first reflecting mirror, the second reflecting mirror;L unclamps the holding screw knob on guide rod seat, Guide rod is removed, beam path alignment is completed.
CN201910216938.XA 2019-03-21 2019-03-21 A kind of laser interferometer and light path collimation method equipped with auxiliary alignment device Pending CN109870104A (en)

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CN110666590A (en) * 2019-09-12 2020-01-10 天津大学 Machine tool body diagonal error measuring method based on multi-beam laser interferometer

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