CN109861581A - A kind of micro displacement magnifying mechanism - Google Patents

A kind of micro displacement magnifying mechanism Download PDF

Info

Publication number
CN109861581A
CN109861581A CN201811481046.4A CN201811481046A CN109861581A CN 109861581 A CN109861581 A CN 109861581A CN 201811481046 A CN201811481046 A CN 201811481046A CN 109861581 A CN109861581 A CN 109861581A
Authority
CN
China
Prior art keywords
lever
grade
input terminal
flexible hinge
level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201811481046.4A
Other languages
Chinese (zh)
Other versions
CN109861581B (en
Inventor
张丽敏
王建立
赵勇志
宋云夺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN201811481046.4A priority Critical patent/CN109861581B/en
Publication of CN109861581A publication Critical patent/CN109861581A/en
Application granted granted Critical
Publication of CN109861581B publication Critical patent/CN109861581B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

Micro displacement magnifying mechanism provided by the invention, it include: piezoelectric ceramic actuator, it is displaced input terminal, it is displaced output end and multi-grade lever, multi-grade lever includes that several levers are sequentially connected in series, it is displaced input terminal, output end and multi-grade lever is displaced to be symmetrical arranged by symmetry axis of the vertical axis where piezoelectric ceramic actuator, every grade of lever in multi-grade lever all has 1-2 input terminal and at least one output end, an output end or displacement input terminal for each input terminal connection preamble primary lever of every grade of lever, the output end connection position shifter output terminal of final stage lever, micro displacement magnifying mechanism provided by the invention, since its multi-grade lever uses string and mixed connection scheme, different from traditional simple overlapped in series of multi-grade lever, therefore compared with prior art, it can realize bigger amplification factor in smaller space, and, Connection and reasonable arrangement is orderly in structure, compact-sized, takes full advantage of the confined space, and flexible hinge is evenly distributed, convenient for machining.

Description

A kind of micro displacement magnifying mechanism
Technical field
The present invention relates to precision machinery technology field, in particular to a kind of micro displacement magnifying mechanism.
Background technique
In recent years, piezoelectric ceramics with the advantages that its high resolution, fast response time and High power output in accurate optical-mechanical system It is widely studied and applied.But piezoelectric ceramics output displacement is about its one thousandth for being superimposed length, to make it Application range can only concentrate on several microns to tens microns of occasion.In order to make piezoelectric ceramics can apply to the driving of bigger stroke Occasion needs that displacement amplifying mechanism is arranged.
Flexure hinge mechanism is most common piezoelectric ceramics displacement amplifying mechanism, is divided according to its structure type and principle, Mainly there are trigonometric expression, lever, parallel four-bar type etc..Lever amplification principle can produce biggish amplification factor, but its is defeated Outlet motion profile is arc, is not suitable for requiring the occasion of linear convergent rate.Therefore, structure is generally designed as axisymmetric shape Formula obtains good input and output performance to eliminate the non-linear of output.Lever displacement amplifying mechanism can be according to actually putting The structure type of big multiple demand setting lever, and series multistage lever can be set.
Application No. is 201710019537.6 Chinese patent applications of ZL to disclose a kind of Grazing condition micro displacement magnifying mechanism, Which employs symmetrical arrangements, and the lever mechanism with two-stage series connection, the design of lever displacement amplifying mechanism should expire The demand of sufficient amplification factor, will also meet the requirement of installation space, and guarantee to be easily worked in the manufacturing.And this three aspect Factor mutually restricts, and when required amplification factor is larger, needs rationally to increase the length ratio of lever arm of force, and be appropriately arranged with Multi-grade lever, in the case where same processing conditions can be realized, above two aspect can all cause the increase of enlarger size, So that not being able to satisfy space requirement.
Chinese patent ZL200820042483.1 discloses a kind of asymmetric lever-type lever micro-displacement amplifying device, , with three-level lever, preceding two-stage lever is in parallel for it, then connects with third level lever, such structure only takes up and two-stage series connection The much the same space of lever can but reach the amplification factor close to three-level lever.This arrangement mode is special, without generally fitting With property, the arrangement of more stages lever is not adapted to.
Summary of the invention
Have in view of that, it is necessary in view of the defects existing in the prior art, provide a kind of maximization benefit that space may be implemented With the micro displacement magnifying mechanism that can simultaneously generate bigger amplification factor.
To achieve the above object, the present invention adopts the following technical solutions:
A kind of micro displacement magnifying mechanism, comprising: piezoelectric ceramic actuator is fixedly connected with the piezoelectric ceramic actuator Being displaced input terminal, displacement output end and multi-grade lever, the multi-grade lever includes that several levers are sequentially connected in series, and the displacement is defeated Enter end, displacement output end and multi-grade lever to be symmetrical arranged by symmetry axis of the vertical axis where the piezoelectric ceramic actuator, Every grade of lever in the multi-grade lever all has 1-2 input terminal and at least one output end;Each input of every grade of lever End all connects an output end or displacement input terminal for preamble primary lever;The output end connection displacement output of final stage lever End.
In some preferred embodiments, in the multi-grade lever, only the lever with an input terminal also has one A fixed pivot.
In some preferred embodiments, in the multi-grade lever, every grade of lever all only one output ends remove final stage The output end of other every grade lever in addition connects an input terminal of adjacent rear stage lever.
In some preferred embodiments, each odd level lever in addition to the first order has 2 input terminals, one of them Input terminal connects the displacement input terminal.
In some preferred embodiments, with the contrary of the input displacement of 2 input terminals on primary lever.
In some preferred embodiments, the multi-grade lever is 4 grades of levers.
In some preferred embodiments, the micro displacement magnifying mechanism further includes fixed part, is displaced the two sides of input terminal It is connect respectively with one end of two input levers by flexible hinge, the other end of the input lever passes through flexible hinge and level-one thick stick One end of bar connects, and the middle part of primary lever is connect by flexible hinge with the fixed part, the other end of the primary lever It is connect by flexible hinge with one end of level-one connecting rod, the other end of the level-one connecting rod passes through flexible hinge and second level thick stick The middle part of bar connects, and one end of the second lever is connect by flexible hinge with the fixed part, the second lever it is another One end is connect with by flexible hinge with one end of second level connecting rod, the other end of the second level connecting rod by flexible hinge with The middle part of three-level lever connects, and one end of the three-level lever is connect by flexible hinge with the input lever, the three-level thick stick The other end of bar is connect by flexible hinge with one end of three-level connecting rod, and the other end of the three-level connecting rod passes through flexible hinge Chain is connect with the middle part of level Four lever, and one end of the level Four lever is connect by flexible hinge with the fixed part, and described four The other end of grade lever is connect with one end by flexible hinge and output rod, and the other end of the output rod passes through flexible hinge It is connect with the side of the displacement output end.
The present invention by adopting the above technical scheme the advantages of be:
Micro displacement magnifying mechanism provided by the invention, comprising: piezoelectric ceramic actuator is consolidated with the piezoelectric ceramic actuator Surely displacement input terminal, displacement output end and multi-grade lever, the multi-grade lever connected includes that several levers are sequentially connected in series, institute Rheme moves input terminal, displacement output end and multi-grade lever using the vertical axis where the piezoelectric ceramic actuator as symmetry axis pair Claim setting, every grade of lever in the multi-grade lever all has 1-2 input terminal and at least one output end, every grade of lever it is every A input terminal all connects an output end or displacement input terminal for preamble primary lever, and the output end of final stage lever connects displacement Output end, micro displacement magnifying mechanism provided by the invention propose a kind of novel multi-grade lever and decline displacement amplifying mechanism, by String and mixed connection scheme are used in its multi-grade lever, different from traditional simple overlapped in series of multi-grade lever, therefore phase Than the prior art, bigger amplification factor can be realized in smaller space, also, connection and reasonable arrangement is orderly in structure, structure is tight It gathers, takes full advantage of the confined space, flexible hinge is evenly distributed, convenient for machining.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the structural schematic diagram of micro displacement magnifying mechanism provided in an embodiment of the present invention;
Fig. 2 is equivalent mechanism kinematic sketch provided in an embodiment of the present invention;
Fig. 3 is equivalent mechanism kinematic sketch provided in an embodiment of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts all other Embodiment shall fall within the protection scope of the present invention.
Referring to Fig. 1, being the structural schematic diagram of micro displacement magnifying mechanism 2 provided in an embodiment of the present invention, comprising: piezoelectricity pottery Porcelain driver 1, the displacement input terminal 202 being fixedly connected with the piezoelectric ceramic actuator 1, displacement output end 212 and multistage thick stick Bar, the multi-grade lever include that several levers are sequentially connected in series.The connection relationship of all parts described further below.
The displacement input terminal 202, displacement output end 212 and multi-grade lever are with 1 place of piezoelectric ceramic actuator Vertical axis is symmetrical arranged for symmetry axis, and every grade of lever in the multi-grade lever all has 1-2 input terminal and at least one Output end;An output end or displacement input terminal for each input terminal connection preamble primary lever of every grade of lever;Final stage The output end connection position shifter output terminal of lever.
In some preferred embodiments, in the multi-grade lever, only the lever with an input terminal also has one A fixed pivot.
In some preferred embodiments, in the multi-grade lever, every grade of lever all only one output ends remove final stage The output end of other every grade lever in addition connects an input terminal of adjacent rear stage lever.
It is appreciated that in the multi-grade lever, the input terminal of the output end connection next stage lever of upper level lever, and The fixed pivot of part grade lever in intermediate levers at different levels is also become into input terminal, and applies one and former input terminal phase to it Anti- input displacement can make output end obtain more big displacement in this way, these grade of lever is made to have bigger amplification factor, thus Increase the amplification factor of entire mechanism.
In some preferred embodiments, each odd level lever in addition to the first order has 2 input terminals, one of them Input terminal connects the displacement input terminal.
In some preferred embodiments, with the contrary of the input displacement of 2 input terminals on primary lever.
It is appreciated that in practice, no fixed pivot but tool there are two the levers of input terminal to call floating lever rod, Lever still with fixed pivot and an input terminal is called truck dead lever, then, it is applied to the new input of floating lever rod The reversed displacement at end can choose some points on the preamble levers at different levels of this floating lever rod from He Erlai, the position of these points Move it is just contrary with the input displacement of former input terminal of this floating lever rod, can choose by these put in one output It is displaced the input displacement of the new input terminal as this floating lever rod;If the direction of the initial input displacement of entire mechanism and this The input displacement of the former input terminal of floating lever rod is contrary, it is also contemplated that being displaced initial input as this floating lever rod The input displacement of new input terminal.It is specifically chosen any, being mainly in view of spatial arrangement form should be reasonable, easy to process, It should not cross or interfere with, in this way, there is only multi-grade lever tool, there are two input terminals;There is likely to be multi-grade levers with more A output end.
Further, in order to avoid interference, the new output end of all floating lever rods is all connected into the initial of entire mechanism It is displaced input terminal, in this way, every grade of lever still only has an output end;It, will be in addition to the first order in view of spatial arrangement Odd level lever is set as floating lever rod.
It is the equivalent mechanism kinematic sketch of micro displacement magnifying mechanism 2 in Fig. 1 embodiment incorporated by reference to Fig. 2, Fig. 2.Due to microbit Shifting enlarger 2 is symmetrical structure, and forms of motion is also bilateral symmetry, therefore, in Fig. 2, only shows one half structure Kinematic sketch of mechanism.It can be reduced to connect with rack by prismatic pair T1 and T2 in the middle part of displacement input terminal 202 and displacement output end 212 It connects.
The micro displacement magnifying mechanism further includes fixed part 201, is displaced the two sides of input terminal 202 by flexible hinge R1 points One end of other two input levers 203 connects, and the other end of input lever 203 passes through one end of flexible hinge R2 and primary lever 204 The middle part of connection, primary lever 204 is connect by flexible hinge R4 with fixed part 201, and the other end of primary lever 204 passes through soft Property hinge R5 connect with one end of level-one connecting rod 205, the other end of level-one connecting rod 205 passes through flexible hinge R6 and second level thick stick The middle part of bar 206 connects, and one end of second lever 206 is connect by flexible hinge R7 with fixed part 201, second lever 206 The other end is connect with by flexible hinge R8 with one end of second level connecting rod 207, and the other end of second level connecting rod 207 passes through flexibility Hinge R9 is connect with the middle part of three-level lever 208, and one end of three-level lever 208 passes through 203 middle part flexible hinge R2 and input lever The other end of connection, three-level lever 208 is connect by flexible hinge R10 with one end of three-level connecting rod 209, three-level connecting rod 209 other end is connect by flexible hinge R11 with the middle part of level Four lever 210, and one end of level Four lever 210 passes through flexible hinge Chain R12 is connect with fixed part 201, and the other end of level Four lever 210 connects with by one end of flexible hinge R13 and output rod 211 It connects, the other end of output rod 211 is connect by flexible hinge R14 with the side for being displaced output end 212.
It is appreciated that distance is less than the spacing of R4 and R5 between R3 and R4 in Fig. 2 in order to reach better amplification effect From;Distance is less than distance between R6 and R8 between R6 and R7;Distance is less than distance between R9 and R10 between R2 and R9;R11 with Distance is less than distance between R11 and R13 between R12.
It is appreciated that one end of three-level lever 208 is connect in the middle part of input lever 203 by flexible hinge R2 by the present invention, So at work, due to counter motion at flexible hinge R2 and R9, it can make three-level lever 208 that there is much bigger times magnification Number.For example, it is assumed that the amplification factor of primary lever is 4, the amplification factor of second lever is 5, then the amplification factor of three-level lever It can reach 4 × 5=20.
Referring to Fig. 3, being the equivalent mechanism kinematic sketch of another embodiment of the present invention, with N grades of levers (N >=3), N Grade lever is sequentially connected in series arrangement.
In some preferred embodiments, every grade of lever all has 1-2 input terminal and at least one output end;Every grade of thick stick An output end or displacement input terminal for each input terminal connection preamble primary lever of bar;The output end of final stage lever connects Connect displacement output end.Only the levers at different levels with an input terminal also have a fixed pivot.
In some preferred embodiments, every grade of lever all has an output end, also has an input terminal and one Fixed pivot or 2 input terminals.
In some preferred embodiments, the output end of the levers at different levels in addition to final stage connects adjacent rear stage lever An input terminal.
Preferably, each odd level lever in addition to the first order has 2 input terminals, one of connection displacement input End;With 2 input terminals on primary lever input displacement it is contrary;There are two the lever of input terminal, output ends for tool It cannot be between two input terminals.
It is appreciated that Fig. 3 shows a kind of highly preferred arrangement.Odd level lever in addition to the first order is all There are two input terminals for tool, one of them connect with displacement input terminal.
It is divided into a basic superpositing unit of the N grades of lever micro displacement magnifying mechanism in the middle part of Fig. 3 dotted line frame, only needs basis The number of basic superpositing unit is arranged in actual demand, can be obtained different size of amplification factor.
Micro displacement magnifying mechanism provided by the invention proposes a kind of novel multi-grade lever and declines displacement amplifying mechanism, Since its multi-grade lever uses string and mixed connection scheme, different from traditional simple overlapped in series of multi-grade lever, therefore Compared with prior art, bigger amplification factor can be realized in smaller space, also, connection and reasonable arrangement is orderly in structure, structure It is compact, the confined space is taken full advantage of, flexible hinge is evenly distributed, convenient for machining.
Micro displacement magnifying mechanism provided by the invention additionally provides a kind of multi-grade lever being of universal significance and declines displacement The lever arrangement of enlarger, it is only necessary to the quantity of basic superpositing unit is set, suitable amplification factor can be obtained, realization is set The modularization of meter, generalization simplify design cycle.
Certainly micro displacement magnifying mechanism of the invention can also have a variety of transformation and remodeling, it is not limited to above-mentioned embodiment party The specific structure of formula.In short, protection scope of the present invention should include that those are aobvious and easy to those skilled in the art The transformation or substitution seen and remodeling.

Claims (7)

1. a kind of micro displacement magnifying mechanism characterized by comprising piezoelectric ceramic actuator and the piezoelectric ceramic actuator Displacement input terminal, displacement output end and multi-grade lever, the multi-grade lever being fixedly connected include that several levers are sequentially connected in series, The displacement input terminal, displacement output end and multi-grade lever are using the vertical axis where the piezoelectric ceramic actuator as symmetry axis It is symmetrical arranged, every grade of lever in the multi-grade lever all has 1-2 input terminal and at least one output end;Every grade of lever An output end or displacement input terminal for each input terminal connection preamble primary lever;The output end connection position of final stage lever Shifter output terminal.
2. micro displacement magnifying mechanism as described in claim 1, which is characterized in that in the multi-grade lever, only there is one The lever of input terminal also has a fixed pivot.
3. micro displacement magnifying mechanism as described in claim 1, which is characterized in that in the multi-grade lever, every grade of lever is all Only one output end, the output end of other the every grade lever in addition to final stage connect an input of adjacent rear stage lever End.
4. micro displacement magnifying mechanism as claimed in claim 3, which is characterized in that each odd level lever tool in addition to the first order There are 2 input terminals, one of input terminal connects the displacement input terminal.
5. micro displacement magnifying mechanism as claimed in claim 4, which is characterized in that with the defeated of 2 input terminals on primary lever Enter the contrary of displacement.
6. micro displacement magnifying mechanism as described in claim 1, which is characterized in that the multi-grade lever is 4 grades of levers.
7. micro displacement magnifying mechanism as claimed in claim 6, which is characterized in that the micro displacement magnifying mechanism further includes fixing The other end in portion, the piezoelectric ceramic actuator is fixedly mounted on fixed part, and the two sides for being displaced input terminal pass through flexible hinge It is connect respectively with one end of two input levers, the other end of the input lever is connected by one end of flexible hinge and primary lever It connects, the middle part of primary lever is connect by flexible hinge with the fixed part, and the other end of the primary lever passes through flexible hinge Chain is connect with one end of level-one connecting rod, and the other end of the level-one connecting rod in the middle part of flexible hinge and second lever by connecting Connect, one end of the second lever is connect by flexible hinge with the fixed part, the other end of the second lever with pass through Flexible hinge is connect with one end of second level connecting rod, and the other end of the second level connecting rod passes through flexible hinge and three-level lever One end of middle part connection, the three-level lever is connect by flexible hinge with the input lever, the other end of the three-level lever It is connect by flexible hinge with one end of three-level connecting rod, the other end of the three-level connecting rod passes through flexible hinge and level Four thick stick The middle part of bar connects, and one end of the level Four lever is connect by flexible hinge with the fixed part, the level Four lever it is another One end is connect with one end by flexible hinge and output rod, and the other end of the output rod passes through flexible hinge and the displacement The side of output end connects.
CN201811481046.4A 2018-12-05 2018-12-05 Micro-displacement amplifying mechanism Active CN109861581B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811481046.4A CN109861581B (en) 2018-12-05 2018-12-05 Micro-displacement amplifying mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811481046.4A CN109861581B (en) 2018-12-05 2018-12-05 Micro-displacement amplifying mechanism

Publications (2)

Publication Number Publication Date
CN109861581A true CN109861581A (en) 2019-06-07
CN109861581B CN109861581B (en) 2020-08-21

Family

ID=66890732

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811481046.4A Active CN109861581B (en) 2018-12-05 2018-12-05 Micro-displacement amplifying mechanism

Country Status (1)

Country Link
CN (1) CN109861581B (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110445414A (en) * 2019-08-05 2019-11-12 包头稀土研究院 The novel actuator with three-level enlarger of bar offer axial magnetic field
CN110492783A (en) * 2019-08-05 2019-11-22 包头稀土研究院 The actuator with second level micro displacement magnifying mechanism of shell offer axial magnetic field
CN110492781A (en) * 2019-08-05 2019-11-22 包头稀土研究院 Three-level micro displacement magnifying mechanism and its amplification method
CN110504863A (en) * 2019-08-05 2019-11-26 包头稀土研究院 The actuator with three-level micro displacement magnifying mechanism of skeleton offer axial magnetic field
CN110504862A (en) * 2019-08-05 2019-11-26 包头稀土研究院 The actuator with second level micro displacement magnifying mechanism of skeleton offer axial magnetic field
CN110504861A (en) * 2019-08-05 2019-11-26 包头稀土研究院 Second level micro displacement magnifying mechanism and its amplification method
CN118054692A (en) * 2024-04-16 2024-05-17 华东交通大学 Flexible mechanism with compact structure and high displacement amplification ratio

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007032026A2 (en) * 2005-09-14 2007-03-22 Hilaal Alam An apparatus for moving an object in nanometer and method thereof
CN205177409U (en) * 2015-10-24 2016-04-20 江西理工大学 Little operation platform of one -dimensional translation based on gentle and agreeable mechanism
CN106685262A (en) * 2017-01-12 2017-05-17 广东工业大学 Full-flexible micro-displacement amplification mechanism
CN206551010U (en) * 2017-02-28 2017-10-13 山东理工大学 A kind of full decoupled high-precision micromotion platform of big stroke two dimension
CN107492396A (en) * 2017-09-08 2017-12-19 渤海大学 A kind of micro-displacement multistage enlarger
CN107860329A (en) * 2017-12-22 2018-03-30 西安交通大学 A kind of highly sensitive fiber Bragg grating strain sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007032026A2 (en) * 2005-09-14 2007-03-22 Hilaal Alam An apparatus for moving an object in nanometer and method thereof
CN205177409U (en) * 2015-10-24 2016-04-20 江西理工大学 Little operation platform of one -dimensional translation based on gentle and agreeable mechanism
CN106685262A (en) * 2017-01-12 2017-05-17 广东工业大学 Full-flexible micro-displacement amplification mechanism
CN206551010U (en) * 2017-02-28 2017-10-13 山东理工大学 A kind of full decoupled high-precision micromotion platform of big stroke two dimension
CN107492396A (en) * 2017-09-08 2017-12-19 渤海大学 A kind of micro-displacement multistage enlarger
CN107860329A (en) * 2017-12-22 2018-03-30 西安交通大学 A kind of highly sensitive fiber Bragg grating strain sensor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110445414A (en) * 2019-08-05 2019-11-12 包头稀土研究院 The novel actuator with three-level enlarger of bar offer axial magnetic field
CN110492783A (en) * 2019-08-05 2019-11-22 包头稀土研究院 The actuator with second level micro displacement magnifying mechanism of shell offer axial magnetic field
CN110492781A (en) * 2019-08-05 2019-11-22 包头稀土研究院 Three-level micro displacement magnifying mechanism and its amplification method
CN110504863A (en) * 2019-08-05 2019-11-26 包头稀土研究院 The actuator with three-level micro displacement magnifying mechanism of skeleton offer axial magnetic field
CN110504862A (en) * 2019-08-05 2019-11-26 包头稀土研究院 The actuator with second level micro displacement magnifying mechanism of skeleton offer axial magnetic field
CN110504861A (en) * 2019-08-05 2019-11-26 包头稀土研究院 Second level micro displacement magnifying mechanism and its amplification method
CN110492781B (en) * 2019-08-05 2024-03-29 包头稀土研究院 Three-stage micro-displacement amplifying mechanism and amplifying method thereof
CN118054692A (en) * 2024-04-16 2024-05-17 华东交通大学 Flexible mechanism with compact structure and high displacement amplification ratio

Also Published As

Publication number Publication date
CN109861581B (en) 2020-08-21

Similar Documents

Publication Publication Date Title
CN109861581A (en) A kind of micro displacement magnifying mechanism
Enflo A counterexample to the approximation problem in Banach spaces
CN1243277C (en) Variable light attennator of micro electromechanical system
CN101813156B (en) Flexible high-precision spacial vibration damping platform
CN102540442A (en) Plane parallel three-degree-of-freedom precise operating platform
JPS63500140A (en) optical space switch
CN109650327B (en) Flat plate type three-dimensional large-stroke nano operating platform
CN103486413A (en) Three-freedom-degree decoupling large-stroke micro-positioning platform
CN101745915B (en) Rectilinear translation planar nine-bar mechanism and method for constructing a rectilinear translation motion mechanism
CN114200782B (en) Flexible two-dimensional guide mechanism
CN109079766A (en) A kind of Three-degree-of-freedom motion platform based on flexible amplification mechanism
CN110492781B (en) Three-stage micro-displacement amplifying mechanism and amplifying method thereof
CN109412459B (en) Flexible amplifying mechanism
WO2006022557A1 (en) Optical fibre switch
CN110310696A (en) Three-level displacement equations two degrees of freedom meek precisively positioning platform
CN101563540B (en) Actuator
CN105174210A (en) Three-degree-of-freedom micro-positioning platform based on symmetrical double compliant hinge
CN102576145A (en) Zoom lens and image-capturing device comprising same
CN109256175B (en) High-precision large-stroke space translation micro-positioning platform
CN109889088B (en) Linear driving device based on full-piezoelectric ceramic driving
CN103033885B (en) Straight beam buckling electrostatic type micro mechanical optical switch
CN205023842U (en) Three degree of freedom microposition platforms based on two gentle and agreeable hinges of symmetry type
CN101355326A (en) Piezoelectric actuator
CN115490201A (en) Multi-stage driven MEMS electrostatic driver
CN205704162U (en) A kind of two-freedom compliant parallel mechanism of mobile decoupling

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant