CN109850502B - Automatic conveying device of wafer box cleaning machine suitable for primary clean room - Google Patents
Automatic conveying device of wafer box cleaning machine suitable for primary clean room Download PDFInfo
- Publication number
- CN109850502B CN109850502B CN201811320572.2A CN201811320572A CN109850502B CN 109850502 B CN109850502 B CN 109850502B CN 201811320572 A CN201811320572 A CN 201811320572A CN 109850502 B CN109850502 B CN 109850502B
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- wafer box
- jig
- cleaning machine
- motor
- wafer
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- 238000004140 cleaning Methods 0.000 title claims abstract description 38
- 230000005540 biological transmission Effects 0.000 claims description 7
- 230000003749 cleanliness Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Abstract
The invention provides an automatic conveying device of a wafer box cleaning machine suitable for a primary clean room, which comprises a track arranged around the wafer box cleaning machine and a carrying trolley arranged on the track, wherein a rack is arranged on one side of the track, a gear driven by a second motor to operate is arranged at the lower part of the carrying trolley, the gear is meshed with the rack, a wafer box jig clamping turntable is arranged on the carrying trolley, and the wafer box jig clamping turntable can rotate in the vertical direction. The automatic conveying device of the wafer box cleaning machine, which is suitable for the first-stage clean room, effectively saves working space and improves production efficiency.
Description
Technical Field
The invention belongs to the field of semiconductor materials, and particularly relates to an automatic conveying device of a wafer box cleaning machine suitable for a primary clean room.
Background
In the field of semiconductor silicon single crystal manufacturing, a wafer box jig in a wafer box cleaning machine needs to be manually conveyed from an outlet to an inlet, so that manpower is wasted, and the wafer box cleaning efficiency is low; in addition, the space between the box cleaner and the wall is limited, and the manual carrying is very inconvenient.
The RGV trolley is adopted to transmit the wafer box jig, so that manpower can be saved, the automation degree is improved, the working space is effectively saved, and the RGV trolley has very important application value for transmitting the wafer box jig.
Disclosure of Invention
In view of the above, the invention aims to provide an automatic conveying device of a wafer box cleaning machine, which is suitable for a primary clean room, effectively saves working space and improves production efficiency.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
the utility model provides a wafer box cleaning machine automatic transmission device suitable for one-level toilet, includes the track that sets up around the wafer box cleaning machine and sets up the floor truck on the track, and one side of track is provided with the rack, and the lower part of floor truck is provided with the second motor and drives moving gear, gear and rack meshing, is provided with wafer box tool clamp turntable on the floor truck, and wafer box tool clamp turntable can rotate on vertical.
Further, the clamping rotary table of the wafer box jig comprises a wafer box jig bracket and a clamping device, the lower surface of the wafer box jig bracket is fixedly connected with a rotating shaft, the rotating shaft is connected with an output shaft of the first motor through a coupler, and the wafer box jig bracket rotates by taking the rotating shaft as the center under the driving of the first motor.
Further, the wafer box jig bracket comprises a bottom plate and side plates, the side plates are located on two sides of the bottom plate and perpendicular to the bottom plate, rollers are respectively arranged at two ends of the bottom plate, the wafer box jig is translated to the wafer box jig bracket through the rollers, the clamping device is arranged on the side plates and comprises a cylinder and a clamping plate, the cylinder is fixedly arranged on the outer side of the side plates, a piston rod of the cylinder is vertically upwards arranged, the end part of the piston rod is fixedly connected with an L-shaped clamping plate, and the clamping plate clamps the wafer box jig under the driving of the cylinder.
Further, be provided with second motor, gear and wheel below the floor truck, the wheel is arranged in orbital both sides respectively, and the vertical direction of second motor sets up and the output shaft of second motor sets up downwards, and the fixed gear that is provided with in end of the output shaft of second motor, gear and rack cooperation, the gear rotation drives under the drive of second motor.
Further, the output shaft of the second motor is connected with the gear through a flat key.
Further, the same end of the side plate is provided with a baffle plate extending inwards.
Working principle:
at the outlet of the cassette cleaner, the cassette jig is moved to the outlet of the cassette cleaner, and the cassette is mounted thereon. Firstly, start the cylinder, make the grip block rise, on the magazine tool was held in the palm through the gyro wheel and is delivered to the magazine tool bracket, owing to the setting of gyro wheel, reduced the friction between gyro wheel and the magazine tool, improved the cleanliness factor of work. After the wafer box jig enters the wafer box jig bracket, the clamping plate moves downwards so that the clamping plate clamps the wafer box jig. And starting the first motor, and driving the wafer box jig bracket to rotate 45 degrees by the first motor through the output shaft, the coupler and the rotating shaft, and taking down the wafer box and rotating the wafer box jig by 45 degrees again to be in a vertical state. The roller is made of plastic material, so that dust is prevented from being generated by friction.
Then the second motor is started, the gear rotates, the gear moves forwards through meshing with the rack, and the carrying trolley moves forwards. The wafer box jig is transmitted to the inlet of the wafer box cleaning machine, the wafer box jig is placed at the inlet of the cleaning machine, the wafer box is hung on the wafer box jig in the opposite direction by 45 degrees, and then the wafer box jig is continuously rotated by 45 degrees and is in a horizontal position. Then, the cylinder is started to enable the clamping plate to rise, and the wafer box jig with the wafer box leaves the carrying trolley through the roller wheels and enters the wafer box cleaning machine. Then the carrying trolley with the wafer box jig removed returns to the outlet of the wafer box cleaning machine again, and waits for the wafer box jig with the wafer box cleaned.
Compared with the prior art, the automatic conveying device for the wafer box cleaning machine suitable for the primary clean room has the following advantages:
the automatic transmission device of the wafer box cleaning machine suitable for the first-stage clean room can realize the transmission of the wafer box jig from the outlet to the inlet of the wafer box cleaning machine, avoid the defects of low transmission efficiency, small transmission space and the like, effectively save labor, save working time, improve working efficiency and solve the problem of labor cost.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is a schematic view of a primary clean room with a cassette cleaner according to an embodiment of the present invention;
FIG. 2 is a schematic view of a cassette cleaner with a transport device according to an embodiment of the present invention;
fig. 3 is a schematic structural view of the lower part of the carrying trolley matched with a rail according to the embodiment of the invention;
fig. 4 is a schematic structural diagram of a cart according to an embodiment of the present invention.
Reference numerals illustrate:
1-a wafer box cleaning machine; 2-track; 3-a carrying trolley; 4-racks; 5-a second motor; 6-gear; 7-a wafer box jig bracket; 701-a bottom plate; 702-side plates; 703-a baffle; 8-a first motor; 9-a roller; 10-a wafer box jig; 11-cylinder; 12-clamping the plate; 13-wheels.
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art in a specific case.
The invention will be described in detail below with reference to the drawings in connection with embodiments.
As shown in fig. 1-4, an automatic transmission device of a wafer box cleaning machine suitable for a primary clean room comprises a track 2 arranged around the wafer box cleaning machine 1 and a carrying trolley 3 arranged on the track 2, wherein a rack 4 is arranged on one side of the track 2, a gear 6 driven to run by a second motor 5 is arranged at the lower part of the carrying trolley 3, the gear 6 is meshed with the rack 4, a wafer box jig clamping turntable is arranged on the carrying trolley 3, and the wafer box jig clamping turntable can vertically rotate.
The clamping turntable of the wafer box jig comprises a wafer box jig bracket 7 and a clamping device, wherein the lower surface of the wafer box jig bracket 7 is fixedly connected with a rotating shaft, the rotating shaft is connected with an output shaft of a first motor 8 through a coupler, and the wafer box jig bracket 7 rotates by taking the rotating shaft as the center under the driving of the first motor 8.
Above-mentioned box tool bracket 7 includes bottom plate 701 and curb plate 702, curb plate 702 is located the both sides of bottom plate 701 and perpendicular with bottom plate 701, just be located the both ends that are provided with curb plate 702 on the bottom plate 701 and be provided with gyro wheel 9 respectively, box tool 10 translates to box tool bracket 7 through gyro wheel 9 on, clamping device sets up on curb plate 702, clamping device includes cylinder 11 and clamping plate 12, cylinder 11 is fixed to be set up in the outside of curb plate 702, and the piston rod of cylinder 11 is vertical upwards to be set up, the tip fixedly connected with L shape clamping plate 12 of piston rod, clamping plate 12 presss from both sides tight box tool 10 under the drive of cylinder 11.
The second motor 5, the gear 6 and the wheels 13 are arranged below the carrying trolley 3, the wheels 13 are respectively arranged on two sides of the track 2, the second motor 5 is arranged in the vertical direction, an output shaft of the second motor 5 is arranged downwards, the gear 6 is fixedly arranged at the end part of the output shaft of the second motor 5, the gear 6 is matched with the rack 4, and the gear 6 is driven to rotate under the drive of the second motor 5.
The output shaft of the second motor 5 is connected with the gear 6 by a flat key.
The same end of the side plate 702 is provided with an inwardly extending baffle 703.
The roller 9 is made of plastic.
Working principle:
at the outlet of the cassette cleaner 1, the cassette jig 10 is pulled out of the outlet, and the cassette is mounted on the cassette jig 10. Firstly, the cylinder 11 is started to enable the clamping plate 12 to ascend, the wafer box jig 10 is supported and conveyed onto the wafer box jig bracket 7 through the roller 9, and due to the arrangement of the roller 9, friction between the roller 9 and the wafer box jig 10 is reduced, and the cleanliness of work is improved. After the cassette jig 10 enters the cassette jig bracket 7, the clamping plate 12 is moved downward so that the clamping plate 12 clamps the cassette jig 10. The first motor 8 is started, and the first motor 8 drives the wafer box jig bracket 7 to rotate 45 degrees through the output shaft, the coupler and the rotating shaft, and the wafer box is taken down and then rotated 45 degrees, so that the wafer box jig 10 is in a vertical state.
Then, the second motor 5 is started, the gear 6 is rotated, the gear 6 is moved forward by meshing with the rack 4, and the carrier 3 is moved forward. The wafer box jig 10 is transmitted to the inlet of the wafer box cleaning machine 1, the wafer box jig 10 is placed at the inlet of the wafer box cleaning machine 1, the wafer box is hung on the wafer box jig 10 by rotating 45 degrees in the opposite direction, then the air cylinder 11 is started, the clamping plate 12 is lifted, the wafer box jig 10 with the wafer box leaves the carrying trolley 3 through the idler wheel 9, and the wafer box cleaning machine 1 is entered. Then, the carrier 3 from which the cassette jig 10 is removed returns again to the outlet of the cassette cleaner 1, waiting for the cassette jig 10 to be loaded with the cassette after cleaning.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (4)
1. Automatic transmission device of wafer box cleaning machine suitable for one-level toilet, its characterized in that: the automatic cleaning device comprises a track (2) arranged around a wafer box cleaning machine (1) and a carrying trolley (3) arranged on the track (2), wherein a rack (4) is arranged on one side of the track (2), a gear (6) which is driven by a second motor (5) to operate is arranged at the lower part of the carrying trolley (3), the gear (6) is meshed with the rack (4), a wafer box jig clamping turntable is arranged on the carrying trolley (3), and the wafer box jig clamping turntable can rotate in the vertical direction;
the clamping turntable of the wafer box jig comprises a wafer box jig bracket (7) and a clamping device, wherein the lower surface of the wafer box jig bracket (7) is fixedly connected with a rotating shaft, the rotating shaft is connected with an output shaft of a first motor (8) through a coupler, and the wafer box jig bracket (7) rotates by taking the rotating shaft as the center under the driving of the first motor (8);
the wafer box jig bracket (7) comprises a bottom plate (701) and side plates (702), the side plates (702) are arranged on two sides of the bottom plate (701) and are perpendicular to the bottom plate (701), rollers (9) are respectively arranged at two ends of the bottom plate (701) and are arranged at the side plates (702), the wafer box jig (10) is translated to the wafer box jig bracket (7) through the rollers (9), the clamping device is arranged on the side plates (702) and comprises an air cylinder (11) and a clamping plate (12), the air cylinder (11) is fixedly arranged on the outer side of the side plates (702), a piston rod of the air cylinder (11) is vertically upwards arranged, the end part of the piston rod is fixedly connected with the L-shaped clamping plate (12), and the clamping plate (12) clamps the wafer box jig (10) under the driving of the air cylinder (11);
a second motor (5), a gear (6) and wheels (13) are arranged below the carrying trolley (3), the wheels (13) are respectively arranged on two sides of the track (2), the second motor (5) is arranged in the vertical direction, an output shaft of the second motor (5) is arranged downwards, the end part of the output shaft of the second motor (5) is fixedly provided with the gear (6), the gear (6) is matched with the rack (4), and the gear (6) is driven to rotate under the drive of the second motor (5);
the working process of the automatic conveying device of the wafer box cleaning machine suitable for the primary clean room comprises the following steps:
at the outlet of the wafer box cleaning machine (1), the wafer box jig (10) is pulled out from the outlet, and the wafer box is arranged on the wafer box jig (10); firstly, an air cylinder (11) is started to enable a clamping plate (12) to ascend, a wafer box jig (10) is supported to a wafer box jig bracket (7) through a roller (9), and due to the arrangement of the roller (9), friction between the roller (9) and the wafer box jig (10) is reduced, and the cleanliness of work is improved; after the wafer box jig (10) enters the wafer box jig bracket (7), the clamping plate (12) is moved downwards, so that the clamping plate (12) clamps the wafer box jig (10); starting a first motor (8), and driving a wafer box jig bracket (7) to rotate 45 degrees through an output shaft, a coupler and a rotating shaft by the first motor (8), and taking off the wafer box and rotating a wafer box jig (10) by 45 degrees to be in a vertical state;
then, the second motor (5) is started, the gear (6) rotates, the gear (6) moves forwards through meshing with the rack (4), and the carrying trolley (3) moves forwards; the method comprises the steps of conveying a wafer box jig (10) to an inlet of a wafer box cleaning machine (1), placing the wafer box jig (10) at the inlet of the wafer box cleaning machine (1), rotating the wafer box by 45 degrees in the opposite direction, hanging the wafer box on the wafer box jig (10), then starting an air cylinder (11) to enable a clamping plate (12) to ascend, enabling the wafer box jig (10) with the wafer box to leave a carrying trolley (3) through a roller (9), and entering the wafer box cleaning machine (1); then the carrying trolley (3) with the wafer box jig (10) detached returns to the outlet of the wafer box cleaning machine (1) again, and waits for the wafer box jig (10) with the wafer box after cleaning.
2. The automatic conveyor for a wafer cassette cleaning machine for a primary clean room of claim 1, wherein: the output shaft of the second motor (5) is connected with the gear (6) by adopting a flat key.
3. The automatic conveyor for a wafer cassette cleaning machine for a primary clean room of claim 1, wherein: the same end of the side plate (702) is provided with a baffle plate (703) extending inwards.
4. The automatic conveyor for a wafer cassette cleaning machine for a primary clean room of claim 1, wherein: the roller (9) is made of plastic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811320572.2A CN109850502B (en) | 2018-11-07 | 2018-11-07 | Automatic conveying device of wafer box cleaning machine suitable for primary clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811320572.2A CN109850502B (en) | 2018-11-07 | 2018-11-07 | Automatic conveying device of wafer box cleaning machine suitable for primary clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109850502A CN109850502A (en) | 2019-06-07 |
| CN109850502B true CN109850502B (en) | 2024-01-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811320572.2A Active CN109850502B (en) | 2018-11-07 | 2018-11-07 | Automatic conveying device of wafer box cleaning machine suitable for primary clean room |
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| Country | Link |
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| CN (1) | CN109850502B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204508150U (en) * | 2014-12-29 | 2015-07-29 | 武汉开锐智能设备有限公司 | Divide rail passive type film magazine return device |
| CN106315210A (en) * | 2015-07-10 | 2017-01-11 | 上海微电子装备有限公司 | Wafer box storing and taking device and method |
| WO2017090797A1 (en) * | 2015-11-27 | 2017-06-01 | 주식회사 태진 | Overhead trolley conveyor washing system |
| CN206535820U (en) * | 2017-02-16 | 2017-10-03 | 深圳市德瑞安精密清洗设备有限公司 | Full-automatic multimould block cleaning machine |
| CN108555556A (en) * | 2018-03-08 | 2018-09-21 | 昆山展谐自动化设备科技有限公司 | A kind of inserted sheet cleaning all-in-one machine |
| CN209411048U (en) * | 2018-11-07 | 2019-09-20 | 天津中环领先材料技术有限公司 | A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet |
-
2018
- 2018-11-07 CN CN201811320572.2A patent/CN109850502B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204508150U (en) * | 2014-12-29 | 2015-07-29 | 武汉开锐智能设备有限公司 | Divide rail passive type film magazine return device |
| CN106315210A (en) * | 2015-07-10 | 2017-01-11 | 上海微电子装备有限公司 | Wafer box storing and taking device and method |
| WO2017090797A1 (en) * | 2015-11-27 | 2017-06-01 | 주식회사 태진 | Overhead trolley conveyor washing system |
| CN206535820U (en) * | 2017-02-16 | 2017-10-03 | 深圳市德瑞安精密清洗设备有限公司 | Full-automatic multimould block cleaning machine |
| CN108555556A (en) * | 2018-03-08 | 2018-09-21 | 昆山展谐自动化设备科技有限公司 | A kind of inserted sheet cleaning all-in-one machine |
| CN209411048U (en) * | 2018-11-07 | 2019-09-20 | 天津中环领先材料技术有限公司 | A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet |
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| Publication number | Publication date |
|---|---|
| CN109850502A (en) | 2019-06-07 |
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Effective date of registration: 20240131 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region before: China |