CN209411048U - A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet - Google Patents
A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet Download PDFInfo
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- CN209411048U CN209411048U CN201821830659.XU CN201821830659U CN209411048U CN 209411048 U CN209411048 U CN 209411048U CN 201821830659 U CN201821830659 U CN 201821830659U CN 209411048 U CN209411048 U CN 209411048U
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- film magazine
- cleaning machine
- gear
- jig
- motor
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- 238000004140 cleaning Methods 0.000 title claims abstract description 40
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Abstract
The utility model provides a kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet, including the track being arranged in around film magazine cleaning machine and setting floor truck in orbit, the side of track is provided with rack gear, the lower part of floor truck is provided with the gear that the second motor drives operating, gear and rack gear engagement, it is provided with film magazine jig on floor truck and clamps turntable, film magazine jig clamps turntable and can be rotated in the vertical direction.Film magazine cleaning machine automatic conveying device described in the utility model suitable for level-one toilet, effectively saving working space improve production efficiency.
Description
Technical field
The utility model belongs to field of semiconductor materials, cleans more particularly, to a kind of film magazine suitable for level-one toilet
Machine automatic conveying device.
Background technique
In semiconductor silicon single crystal manufacturing field, in film magazine cleaning machine film magazine jig need manually from outlet be carried into
Mouth, waste of manpower, film magazine cleaning efficiency are low；In addition, film magazine cleaning machine and space between the walls are limited, manual handling is very not
Just.
Film magazine jig is transmitted using RGV trolley, manpower can be saved, improves the degree of automation, effectively saving working space, it is right
Transmitting film magazine jig has very important application value.
Summary of the invention
In view of this, the utility model is directed to a kind of film magazine cleaning machine suitable for level-one toilet transmits dress automatically
It sets, effectively saves working space, improves production efficiency.
In order to achieve the above objectives, the technical solution of the utility model is achieved in that
A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet, including be arranged around film magazine cleaning machine
Track and setting floor truck in orbit, the side of track is provided with rack gear, and the lower part of floor truck is provided with the
Two motors drive the gear of operating, gear and rack gear engagement, are provided with film magazine jig on floor truck and clamp turntable, film magazine jig
Clamping turntable can be rotated on vertical.
Further, it includes film magazine jig bracket and clamping device that film magazine jig, which clamps turntable, below film magazine jig bracket
It is fixedly connected with the rotating shaft, rotation axis passes through the output axis connection of shaft coupling and first motor, under the drive of first motor, piece
Box jig bracket is rotated centered on rotation axis.
Further, film magazine jig bracket includes bottom plate and side plate, and side plate is located at the two sides of bottom plate and, bottom vertical with bottom plate
It is respectively arranged with idler wheel on plate and positioned at the both ends for being provided with side plate, film magazine jig is moved to film magazine jig bracket by idler wheel
On, clamping device is arranged on side plate, and clamping device includes cylinder and clamping plate, and cylinder is fixed at the outside of side plate, and
The piston rod of cylinder is arranged vertically upwards, and the end of piston rod is fixedly connected with L-shaped clamping plate, drive of the clamping plate in cylinder
Lower clamping film magazine jig.
Further, the second motor, gear and wheel is provided below in floor truck, and wheel is arranged in the two of track
The output shaft of side, the setting of the second motor vertical direction and the second motor is arranged downward, and the end of the output shaft of the second motor is fixed
It is provided with gear, wheel and rack cooperation is rotated in the drive lower gear of the second motor and driven.
Further, it is attached between the output shaft and gear of the second motor using flat key.
Further, the same end of side plate is provided with the baffle to extend internally.
Working principle:
In the exit of film magazine cleaning machine, film magazine jig is moved to film magazine cleaning machine exit, and film magazine is housed thereon.
Start cylinder first, increase clamping plate, film magazine jig passes through in idler wheel delivery to film magazine jig bracket, due to setting for idler wheel
It sets, reduces the friction between idler wheel and film magazine jig, improve the cleanliness of work.Enter film magazine jig support to film magazine jig
After on frame, clamping plate is moved down, so that clamping plate clamps film magazine jig.Start first motor, first motor passes through
Output shaft, shaft coupling and rotation axis and then 45 ° of film magazine jig carriage turns of drive, remove film magazine and rotate 45 ° of film magazine jigs again
It is in a vertical state.Idler wheel is plastic material, avoids friction dust.
Then start the second motor, and then gear rotates, and then gear is by being engaged with rack forward movement, and then carrying
Trolley moves forward.Film magazine jig is transmitted to film magazine cleaning machine inlet, film magazine jig is placed on cleaning machine inlet, instead
Direction rotates 45 °, and film magazine is hung on film magazine jig, is further continued for 45 ° of rotation, film magazine jig is in a horizontal position.Then start
Cylinder rises clamping plate, and the film magazine jig with film magazine leaves floor truck by idler wheel, enters film magazine cleaning machine.So
The floor truck for having unloaded film magazine jig afterwards again returns to the outlet of film magazine cleaning machine, and the film magazine equipped with film magazine after cleaning is waited to control
Tool.
Compared with the existing technology, the film magazine cleaning machine described in the utility model suitable for level-one toilet transmits dress automatically
It sets and has the advantage that
Film magazine cleaning machine automatic conveying device described in the utility model suitable for level-one toilet, can be realized piece
Box jig is transmitted to inlet from film magazine cleaning machine exit, avoids the drawbacks such as efficiency of transmission is low, transmission space is small, effectively
Saving manpower, save the working time, improve working efficiency, solve cost of labor.
Detailed description of the invention
The attached drawing for constituting a part of the utility model is used to provide a further understanding of the present invention, this is practical new
The illustrative embodiments and their description of type are not constituteed improper limits to the present invention for explaining the utility model.?
In attached drawing:
Fig. 1 is the schematic diagram of the level-one toilet described in the utility model embodiment equipped with film magazine cleaning machine；
Fig. 2 is the structural schematic diagram of the film magazine cleaning machine described in the utility model embodiment with transmitting device；
Fig. 3 is the lower part of floor truck described in the utility model embodiment and the structural schematic diagram of track cooperation；
Fig. 4 is the structural schematic diagram of floor truck described in the utility model embodiment.
Description of symbols:
1- film magazine cleaning machine；2- track；3- floor truck；4- rack gear；The second motor of 5-；6- gear；7- film magazine jig support
Frame；701- bottom plate；702- side plate；703- baffle；8- first motor；9- idler wheel；10- film magazine jig；11- cylinder；12- is clamped
Plate；13- wheel.
Specific embodiment
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For limitations of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, and should not be understood as indicating
Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " etc. are defined as a result,
Feature can explicitly or implicitly include one or more of the features.It is in the description of the present invention, unless another
It is described, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, on being understood by concrete condition
State the concrete meaning of term in the present invention.
The utility model will be described in detail below with reference to the accompanying drawings and embodiments.
As shown in Figs 1-4, a kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet, including be arranged in piece
Track 2 around box cleaning machine 1 and the floor truck 3 being arranged on track 2, the side of track 2 are provided with rack gear 4, carry
The lower part of trolley 3 is provided with the gear 6 that the second motor 5 drives operating, and gear 6 and rack gear 4 are engaged, be provided on floor truck 3
Film magazine jig clamps turntable, and film magazine jig clamps turntable and can be rotated on vertical.
It includes film magazine jig bracket 7 and clamping device that above-mentioned film magazine jig, which clamps turntable, and film magazine jig bracket 7 is following and turns
Moving axis is fixedly connected, and rotation axis passes through the output axis connection of shaft coupling and first motor 8, under the drive of first motor 8, film magazine
Jig bracket 7 is rotated centered on rotation axis.
Above-mentioned film magazine jig bracket 7 include bottom plate 701 and side plate 702, side plate 702 be located at the two sides of bottom plate 701 and with bottom
Plate 701 is vertical, is respectively arranged with idler wheel 9 on bottom plate 701 and positioned at the both ends for being provided with side plate 702, film magazine jig 10 passes through rolling
Wheel 9 is moved on film magazine jig bracket 7, and clamping device is arranged on side plate 702, and clamping device includes cylinder 11 and clamping plate
12, cylinder 11 is fixed at the outside of side plate 702, and the piston rod of cylinder 11 is arranged vertically upwards, and the end of piston rod is solid
Surely it is connected with L-shaped clamping plate 12, clamping plate 12 clamps film magazine jig 10 under the drive of cylinder 11.
The second motor 5, gear 6 and wheel 13 is provided below in above-mentioned floor truck 3, and wheel 13 is arranged in track 2
Two sides, 5 vertical direction of the second motor setting and output shaft of the second motor 5 is arranged downward, the end of the output shaft of the second motor 5
Portion is fixedly installed gear 6, and gear 6 and rack gear 4 cooperate, and rotates and drives in the drive lower gear 6 of the second motor 5.
It is attached between the output shaft and gear 6 of above-mentioned second motor 5 using flat key.
The same end of above-mentioned side plate 702 is provided with the baffle 703 to extend internally.
Above-mentioned rollers 9 are plastic material.
Working principle:
In the exit of film magazine cleaning machine 1, film magazine jig 10 is drawn away from outlet, and film magazine jig 10 is fitted at this time
Film magazine.Starting cylinder 11 first, increase clamping plate 12, film magazine jig 10 passes through in 9 delivery of idler wheel to film magazine jig bracket 7,
Due to the setting of idler wheel 9, the friction between idler wheel 9 and film magazine jig 10 is reduced, improves the cleanliness of work.It is controlled to film magazine
After tool 10 enters on film magazine jig bracket 7, clamping plate 12 is moved down, so that clamping plate 12 clamps film magazine jig 10.
Start first motor 8, first motor 8 drives film magazine jig bracket 7 to rotate by output shaft, shaft coupling and rotation axis
45 °, removing film magazine, to rotate 45 ° of film magazine jigs 10 again in a vertical state.
Then start the second motor 5, and then gear 6 rotates, and then gear 6 is by engaging forward movement with rack gear 4, in turn
Floor truck 3 moves forward.Film magazine jig 10 is transmitted to 1 inlet of film magazine cleaning machine, film magazine jig 10 is placed on film magazine
1 inlet of cleaning machine, opposite direction rotate 45 °, film magazine are hung on film magazine jig 10, then start cylinder 11, make clamping plate 12
Rise, the film magazine jig 10 with film magazine leaves floor truck 3 by idler wheel 9, enters film magazine cleaning machine 1.Then it unloads
The floor truck 3 of film magazine jig 10 again returns to the outlet of film magazine cleaning machine 1, waits the film magazine jig equipped with film magazine after cleaning
10。
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (7)
1. a kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet, it is characterised in that: including being arranged in film magazine
The side setting of the floor truck (3) of track (2) and setting on track (2) around cleaning machine (1), track (2) is with teeth
Item (4), the lower part of floor truck (3) are provided with the gear (6) that the second motor (5) drive operating, and gear (6) and rack gear (4) are nibbled
It closes, film magazine jig is provided on floor truck (3) and clamps turntable, film magazine jig, which clamps turntable, to be turned in the vertical direction
It is dynamic.
2. the film magazine cleaning machine automatic conveying device according to claim 1 suitable for level-one toilet, it is characterised in that:
It includes film magazine jig bracket (7) and clamping device that film magazine jig, which clamps turntable, and film magazine jig bracket (7) is fixed with rotation axis below
Connection, rotation axis pass through the output axis connection of shaft coupling and first motor (8), under the drive of first motor (8), film magazine jig
Bracket (7) is rotated centered on rotation axis.
3. the film magazine cleaning machine automatic conveying device according to claim 1 suitable for level-one toilet, it is characterised in that:
Film magazine jig bracket (7) includes bottom plate (701) and side plate (702), and side plate (702) is located at the two sides of bottom plate (701) and and bottom plate
(701) vertically, idler wheel (9), film magazine jig are respectively arranged on bottom plate (701) and positioned at the both ends for being provided with side plate (702)
(10) it is moved on film magazine jig bracket (7) by idler wheel (9), clamping device is arranged on side plate (702), and clamping device includes
Cylinder (11) and clamping plate (12), cylinder (11) is fixed at the outside of side plate (702), and the piston rod of cylinder (11) is vertical
It sets up, the end of piston rod is fixedly connected with L-shaped clamping plate (12), and clamping plate (12) presss from both sides under the drive of cylinder (11)
Tight film magazine jig (10).
4. the film magazine cleaning machine automatic conveying device according to claim 1 suitable for level-one toilet, it is characterised in that:
The second motor (5), gear (6) and wheel (13) is provided below in floor truck (3), and wheel (13) is arranged in track (2)
Two sides, the second motor (5) vertical direction setting and output shaft of the second motor (5) is arranged downward, the output of the second motor (5)
The end of axis is fixedly installed gear (6), and gear (6) and rack gear (4) cooperate, and is turned in the drive lower gear (6) of the second motor (5)
It is dynamic to drive.
5. the film magazine cleaning machine automatic conveying device according to claim 4 suitable for level-one toilet, it is characterised in that:
It is attached between the output shaft and gear (6) of second motor (5) using flat key.
6. the film magazine cleaning machine automatic conveying device according to claim 3 suitable for level-one toilet, it is characterised in that:
The same end of side plate (702) is provided with the baffle (703) to extend internally.
7. the film magazine cleaning machine automatic conveying device according to claim 3 suitable for level-one toilet, it is characterised in that:
Idler wheel (9) is plastic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821830659.XU CN209411048U (en) | 2018-11-07 | 2018-11-07 | A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821830659.XU CN209411048U (en) | 2018-11-07 | 2018-11-07 | A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209411048U true CN209411048U (en) | 2019-09-20 |
Family
ID=67933254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821830659.XU Active CN209411048U (en) | 2018-11-07 | 2018-11-07 | A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209411048U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109850502A (en) * | 2018-11-07 | 2019-06-07 | 天津中环领先材料技术有限公司 | A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet |
-
2018
- 2018-11-07 CN CN201821830659.XU patent/CN209411048U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109850502A (en) * | 2018-11-07 | 2019-06-07 | 天津中环领先材料技术有限公司 | A kind of film magazine cleaning machine automatic conveying device suitable for level-one toilet |
| CN109850502B (en) * | 2018-11-07 | 2024-01-05 | 天津中环领先材料技术有限公司 | Automatic conveying device of wafer box cleaning machine suitable for primary clean room |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200103 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring road No. 12 in Haitai) Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address |