CN109841490A - A kind of multistage bar ion focusing transmission device - Google Patents
A kind of multistage bar ion focusing transmission device Download PDFInfo
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- CN109841490A CN109841490A CN201910286637.4A CN201910286637A CN109841490A CN 109841490 A CN109841490 A CN 109841490A CN 201910286637 A CN201910286637 A CN 201910286637A CN 109841490 A CN109841490 A CN 109841490A
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Abstract
The invention discloses multistage bar ion focusing transmission devices, including ion source component, ion lens component, focusing block, analyzer component and detector elements, ion lens component, focusing block analyzer component are all coupled with vacuum system, inner vacuum vessel is formed under working condition, multistage bar ion focusing transmission part is installed, multistage bar ion focusing transmission part includes entrance greatly and exports the multistage bar focusing structure that the small and described inlet calibre smoothly successively decreases to the exit caliber inside focusing block；The present invention can make mechanism make simple and convenient, can more further decrease the volume of integral device, while can also reduce certain cost, can more improve ion focusing ability, promote final detection sensitivity.
Description
Technical field
It is especially a kind of based on multistage bar ion focusing transmission device the present invention relates to ion focusing transmission field.
Background technique
Mass spectrograph is a kind of for detecting highly sensitive, the high-resolution instrument of substance chemical component, it is first by sample
Product are converted into gas ion, are then separated ion according to the size of mass-to-charge ratio (m/z) by electric field or magnetic field, then measure
The intensity of ion forms mass spectrogram out, qualitatively or quantitatively can obtain the chemical component of substance according to mass spectrogram.
It can be produced by any system in various ionizing systems for the analyte ions by mass-spectrometry analysis
It is raw.For example, AP-MALDI, APPI, ESI, APCI and ICP system can be used in mass spectrometry system and generate ion.This
Many (760Torr) under atmospheric or near atmospheric pressure in a little systems generate ion.After generating ion, analyte from
Son must be guided into or sample in mass spectrum.In general, mass spectrometric analyzer part is maintained at from 10-4Torr to 10-8Torr
High vacuum levels.In practice, to ion carry out sampling include by analyte ions in the form of the ion beam finely limited from
Ion source is transferred to high vacuum mass spectrograph room via one or more middle vacuum rooms.Before each of middle vacuum room is held at
Vacuum level between rear chamber.Therefore, wherein analyte ions form associated pressure water from ion in a stepped fashion
It is flat to be transitioned into mass spectrometric stress level.In most applications, it is expected that by ion not significant losses of ions state
Under be transmitted through each of various rooms of spectrometer system.Ion guidance is usually used to come so that ion edge in MS system
The direction that limits it is mobile.
Ion transmission product is six grades of bars of homogeneous diameter currently on the market, and entering of constituting of 6 six grades of bar inscribed circles
As mouthful diameter with outlet diameter is.After six grades of bars apply rf electric field and axial gradient electric field, ion convergent coke is at six grades
Inside bar, outlet then is entered from entrance, is ion and neutral gas one in the atmospheric pressure outside vacuum due to ion source
Rise and driven by vacuum and the pressure difference of atmospheric pressure, entered by the narrower bore of a very little, borehole enlargement, can enter vacuum from
The total amount of son amount and neutral gas will increase, but be needed the vacuum pump of bigger pumping speed, could maintain separation, detection ion must
The base vacuum of palpus.And correspondingly, the inscribed circle of six grades of bars needs bigger, can just make most of ion, anxious after small holes
After speed expansion, into six grades of bars, by the constraint of AC field, it is then focused into.But six grades of bar inscribe garden circular diameters are big
After, the focusing effect in exit is deteriorated, and will lead to after more ions have gone out six grades of bars, diverging has lost, it is difficult under entrance
In grade ion optical path, it is therefore desirable to which the measured ion to be checked of more quantity can be obtained in inlet and go out by finding one kind
Mouthful better focused ion of place's acquisition, at the same also available better detection background to obtain more highly sensitive mode and side
Method.
Summary of the invention
In view of this, needing to overcome at least one of drawbacks described above in the prior art, it is more that the present invention provides one kind
Grade bar ion focusing transmission device, including being located at the ion source component of the first cis-position, the ion lens component of the second cis-position, being located at
The focusing block of third cis-position, the analyzer component positioned at the 4th cis-position and the detector elements positioned at the 5th cis-position, it is described
The ion beam for being provided through that the ion source component generates is installed between ion source component and the ion lens component
The first partition of first through hole, be equipped between the ion lens component and the focusing block be provided through through it is described from
The second partition of second through-hole of the ion beam that sub-lens focus, is equipped between the focusing block and the analyzer component
The third partition of third through-hole provided with the ion beam after focusing block focusing, the analyzer component and the inspection
It surveys between device component and the 4th partition for being provided through the fourth hole of the ion beam from the analyzer component is installed；Institute
It states analyzer component described in ion lens component, the focusing block to be all coupled with vacuum system, be formed under working condition
Inner vacuum vessel, multistage bar ion focusing transmission part is equipped with inside the focusing block, and the multistage bar ion focusing passes
Defeated component includes entrance greatly and exports the multistage bar focusing structure that the small and described inlet calibre smoothly successively decreases to the exit caliber.
The ion source component emits ion beam, and the vacuum of the ion lens components interior is entered by first through hole
Room enters the vacuum chamber of the focusing block by second through-hole after the ion lens component is focused, described
With gap between second partition and the entrance, the outlet and the third plate, the aperture of second through-hole according to
Shaped ion beam at diameter set, the ion beam is focused by the multistage bar focusing structure through the outlet
It projects, the bore of the third through-hole is set according to the ion beam for projecting the outlet, and through the third through-hole
The detector elements into the analyzer component and the 5th cis-position are analyzed and are detected.
According to the bore phase described in the prior art, exported due to ion beam entrance and ion beam in this patent background technique
Together, lead to not meet simultaneously and reach the cost that can not go to increase integral device with lower cost or simple method and answer
Miscellaneous degree, while the problem of focusing capability can be promoted again；And multistage bar ion focusing transmission device disclosed by the invention, by using
It is greater than the multistage bar ion focusing transmission device of ion beam exit caliber with ion beam inlet calibre, can mechanism is made
Simple and convenient can more further decrease the volume of integral device, while can also reduce certain cost, and it is poly- more to improve ion
Burnt ability promotes final detection sensitivity, leaves the ion lens component into described focusing block etc. for ion beam
The through-hole bore selection of link needs to be set according to the diameter for the ion beam for entering corresponding component, in this case application, institute
It states the effective ion ingredient that first through hole bore needs to guarantee as far as possible that the ion source generates and enters the ion lens component,
Prevent simultaneously it is non-effective enter the ion lens at one's duty, the second through-hole bore need to guarantee as far as possible from it is described from
Effective ion in sub-lens enters at one's duty, after ion beam enters the focusing block vacuum chamber, one side of non-active ingredients
Face is extracted by vacuum pump, on the other hand gradually decreases corresponding accounting also due to can not focus, the third through-hole diameter
It can need the diameter according to ion beam and non-active ingredients is stopped to be determined by theoretical and experiment, the third through-hole diameter
It is significantly smaller than the respective diameters of traditional equipment；The equipment of this case application can cause the increase of the field strength of inner space, gradually increase
Strong inner space ion focusing ability, while outlet size can be further reduced, so that final detection result is more accurate, and
Using size, gradually scaled-down version structure can be than can more reduce exit caliber using size uniformity structure, to final detection knot
Fruit brings better effect, wherein cylindrical structure described in this case and conical structure, should also comprising cross section and
The structure that the consistent structure of size and cross section and size are gradually reduced should not be limited to the specific word face meaning of this case institute.
Ion source is in the atmospheric pressure outside vacuum, and ion and neutral gas are together by the pressure difference of vacuum and atmospheric pressure
Driving, enters the space structure that entrance is big and outlet is small by first through hole and the second through-hole at a high speed, and bar body applies radio frequency electrical
Behind field and axial gradient electric field, ion convergent coke enters outlet inside multistage bar, from entrance, on the one hand multistage bar entrance mouth
Diameter is big, can make more ions, after small holes rapid expansion, into multistage bar, by the constraint of AC field, then
It focuses；On the other hand due to the device structure of this case application of use, the field strength in space structure can not only be made to further increase,
And outlet size can be made to further decrease, which in turn enhances ion focusing performances, simultaneously as outlet size is further
Reduce, the background of detection can also be further decreased, promote the overall sensitivity of detection.
In addition, a kind of disclosed multistage bar ion focusing transmission device also has following supplementary technology special according to the present invention
Sign:
Further, the multistage bar focusing structure includes more conductive rod pieces, and the conduction rod piece surrounds same central axis
The space symmetr structure that the entrance hole diameter of formation is big, exit caliber is small；Multiple support bases with hollow via-hole, the conducting rod
Part fixed connection is in the hollow cavity of the support base.
Further, the conductive rod piece 4 or 6 or 8.
Further, the conductive rod piece is metal rod or rod piece or internal tool with package metal coating
There is metal rod outer layer that there is the rod piece of insulating coating.
Further, the multistage bar focusing structure be include more isometrical conducting rods of root long axis, the long axis is isometrical to lead
Electric pole, at space symmetr structure, forms the isometrical pyramidal structure of long axis that inlet calibre is greater than outlet aperture around same axle center；It is more
A support base, the support base have interior bone, and the isometrical conducting rod fixed connection of long axis is described on the inside of the through-hole
Exit caliber is more than or equal to 2mm, and the isometrical conductive shank diameter of the long axis is more than or equal to1Mm, and be less than or equal to50Mm, the support
Seat is staggeredly coupled with the isometrical conducting rod of the long axis, and is coupled and can be formed inside the conical structure with the long axis conductive electrode bar
Rf electric field and axial gradient electric field external power supply；
Or
The multistage bar focusing structure be include more tapered conductive bars, support base, the more tapered conductive bars surround axis
Line distribution in a center of symmetry and the internal cone space structure with open chamber of formation, the both ends of the cone space structure
Entrance and exit is formed, the inlet calibre is greater than the exit caliber；The support base includes fixing piece, the first conductive plate
With the second conductive plate, the tapered conductive bar and first conductive plate and second conductive plate form the opening
The successively connection of formula chamber interior high-frequency electric field and axial gradient electric field, first conductive plate and second conductive plate
It is fixedly mounted on the fixing piece, the more tapered conductive bar fixed connections are on the inside of the hollow hole of the fixing piece, institute
It states the first conductive plate and second conductive plate is coupled external power supply.
Or
The multistage bar focusing structure be include more bending-type conducting rods, support base, the more bending-type conducting rods surround
Central axes distribution in a center of symmetry and the internal bending space structure with open chamber of formation, shown bending-type conducting rod packet
Flat segments and bending section are included, shown flat segments are cylindrical structure or pyramidal structure, and shown bending section is cylindrical structure or cone
Shape structure, the top end faces of the flat segments are the bottom face of the bending section, and the top of the bending section is to the axis congruence
Combinate form forms inlet calibre greatly and outlet mouth at central axes distributed architecture in a center of symmetry, the bending space structure is surrounded
The small bending space structure of diameter；The support base includes fixing piece, the first conductive plate and the second conductive plate, and described first leads
Electrode plate and second conductive plate are fixedly mounted on the fixing piece, and the more bending-type conducting rod fixed connections exist
On the inside of the hollow hole of the fixing piece, first conductive plate and second conductive plate are coupled external power supply, the folding
Curved conducting rod and first conductive plate and second conductive plate form the open chamber internal high frequency electric field
With the successively connection of axial gradient electric field.
It is cheaper in manufacturing cost using the isometrical conducting rod of long axis, processing and assembly, safeguard it is more convenient, but its
Production when, outlet diameter minimum value is restricted, thus for integral device overall volume reduce there are disadvantages；
Using tapered conductive rod structure, relative to, processing and assembly, maintenance higher using the isometrical conducting rod of long axis in manufacturing cost
Upper slightly complicated, but theoretically exist outlet diameter can infinitesimal advantage, reduce integral device volume on advantage extremely
Obviously；
Using bending conducting rod, the ion beam of inlet can be stablized on the basis of using tapered conductive rod structure, be subsequent
Every process bring better effect, but in terms of volume reduction it is weak with use tapered conductive structure.
Further, the multistage bar focusing structure is tapered conductive bar position when including more tapered conductive bars
There is the first end face around central axes central symmetry distribution, the inclined-plane and the end face in the end face of the inlet
The lesser second end face of opposed facets is being formed close to central axes side；
Or
The multistage bar focusing structure is when including more bending-type conducting rods, and the bending-type conducting rod is located at the inlet
End face there is the first end face around central axes central symmetry distribution, the inclined-plane and the end face are close to central axes
Side forms the lesser second end face of opposed facets；The flat segments are cylindrical structure or pyramidal structure, and shown bending section is
Cylindrical structure or pyramidal structure, the bending-type conducting rod are the independent assortment of above structure.
Preferably, the tapered conductive bar or the bending-type conducting rod are integrally formed.
If larger, the aggregation of this particle size is more for the end face of conducting rod lower end, can generate to entering for ion
Certain inhibition, therefore the end face herein close to central axes is reduced as far as possible, can greatly reduce particle size into
Enter the repulsive interaction of ion, it is possible thereby to make more ions enter cone space inside configuration, so that the result finally detected
More accurate, the specific area of first end face can be adjusted according to specific empirical data, while the tapered conductive bar is
It is integrally formed, as guarantees enough measures of precision, same root timber material is needed to be made.
Further, the third through-hole bore is less than the second through-hole bore, and the inlet calibre is greater than described the
Two-way bore open, the exit caliber are greater than the third through-hole bore.
Further, the taper of the space symmetr structure is less than or equal to 30 degree and is greater than 0 degree.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the following description of the accompanying drawings of embodiments
Obviously and it is readily appreciated that, in which:
Fig. 1 is the structural schematic diagram of the embodiment of the present invention；
Fig. 2 is the multistage bar focusing structure schematic diagram that the present invention uses the isometrical conducting rod of long axis；
Fig. 3 is the multistage bar focusing structure schematic diagram that the present invention uses tapered conductive bar；
Fig. 4 is the tapered conductive bar schematic diagram in Fig. 3；
Fig. 5 is the multistage bar focusing structure schematic diagram that the present invention uses bending-type conducting rod；
Fig. 6 is the bending-type conducting rod schematic diagram in Fig. 5；
Fig. 7 is partial enlargement diagram in Fig. 4, and end and the corresponding end in Fig. 6 are similar；
Wherein, in Fig. 1, A ion source component, B ion lens component, C focusing block, D analyzer component, E detector elements, to
Under arrow be to vacuumize signal, A1 first through hole, A2 first partition, the second through-hole of B1, B2 second partition, C1 third through-hole,
C2 third partition, D1 fourth hole, the 4th partition of D2；
In Fig. 2,1 bending-type space structure, 2 bending-type conducting rods, 21 flat segments, 22 bending sections, 3 support bases (fixing piece), 32
First conductive plate, 33 second conductive plates, 11 entrances, 12 outlets, 211 first end faces, 212 second end faces.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions；Below with reference to attached
The embodiment of figure description is exemplary, and for explaining only the invention, and is not construed as limiting the claims.
In the description of the present invention, it is to be understood that, term " on ", "lower", "bottom", "top", "front", "rear",
The orientation or positional relationship of the instructions such as "inner", "outside", " cross ", " perpendicular " is to be based on the orientation or positional relationship shown in the drawings, and is only
For the convenience of describing the present invention and simplifying the description, rather than the device or element of indication or suggestion meaning must have specific side
Position is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " connection " " connects
It is logical ", " connected ", " connection ", " cooperation " shall be understood in a broad sense, for example, it may be being fixedly connected, be integrally connected, be also possible to
It is detachably connected；It can be the connection inside two elements；It can be directly connected, the indirect phase of intermediary can also be passed through
Even；" cooperation " can be the cooperation in face and face, be also possible to the cooperation a little with face or line and face, also include the cooperation of hole axle, right
For those skilled in the art, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
Inventive concept of the invention is as follows, a kind of multistage bar ion focusing transmission device is provided, by using with ion
The beam entrance bore space structure small greater than the multistage bar entrance large outlet of ion beam exit caliber can make mechanism production letter
It is easily convenient, while certain cost can also be reduced, ion focusing ability can be more improved, promotes final detection sensitivity, together
When the space structure small due to this entrance large outlet of use, the entrance opening dimension for testing and analyzing component can be made, can not only
The precision of detection is greatly promoted, and background noise can be substantially reduced, simultaneously because enabling to whole set using this structure
Standby volume more reduces, while can cost is also reduced.
As shown, according to an embodiment of the invention, a kind of multistage bar ion focusing transmission device, including it is located at the
The ion source component of one cis-position, the second cis-position ion lens component, positioned at third cis-position focusing block, be located at the 4th cis-position
Analyzer component and detector elements positioned at the 5th cis-position, between the ion source component and the ion lens component
The first partition for being provided through the first through hole for the ion beam that the ion source component generates, the ion lens portion are installed
The of the second through-hole for being provided through the ion beam focused through the ion lens is equipped between part and the focusing block
Two partitions are equipped with the ion being provided with after focusing block focusing between the focusing block and the analyzer component
The third partition of the third through-hole of beam, is equipped with to be provided through and comes between the analyzer component and the detector elements
The ion beam of the analyzer component4th partition of fourth hole；Described in the ion lens component, the focusing block
Analyzer component is all coupled with vacuum system, and inner vacuum vessel, installation inside the focusing block are formed under working condition
Have a multistage bar ion focusing transmission part, the multistage bar ion focusing transmission part include that entrance is big and outlet is small and it is described enter
The multistage bar focusing structure that mouth bore to the exit caliber is smoothly successively decreased.
The ion source component emits ion beam, and the vacuum of the ion lens components interior is entered by first through hole
Room enters the vacuum chamber of the focusing block by second through-hole after the ion lens component is focused, described
With gap between second partition and the entrance, the outlet and the third plate, the aperture of second through-hole according to
Shaped ion beam at diameter set, the ion beam is focused by the multistage bar focusing structure through the outlet
It projects, the bore of the third through-hole is set according to the ion beam for projecting the outlet, and through the third through-hole
The detector elements into the analyzer component and the 5th cis-position are analyzed and are detected.
In addition, a kind of disclosed multistage bar ion focusing transmission device also has following supplementary technology special according to the present invention
Sign:
According to some embodiments of the present invention, the multistage bar focusing structure includes more conductive rod pieces, and the conduction rod piece encloses
Around the space symmetr structure that the entrance hole diameter that same central axis is formed is big, exit caliber is small；Multiple branch with hollow via-hole
Seat is supportted, the conduction rod piece fixed connection is in the hollow cavity of the support base.
According to some embodiments of the present invention, the conductive rod piece 4 or 6 or 8.
Further, the conductive rod piece is metal rod or has with the rod piece or inside for wrapping up metal coating
Metal rod outer layer has the rod piece of insulating coating.
According to some embodiments of the present invention, the multistage bar focusing structure be include more isometrical conducting rods of root long axis, institute
The isometrical conducting rod of long axis is stated around same axle center into space symmetr structure, it is isometrical greater than the long axis of outlet aperture to form inlet calibre
Pyramidal structure；Multiple support bases, the support base have interior bone, and the isometrical conducting rod fixed connection of long axis is described logical
On the inside of hole, the exit caliber is more than or equal to 2mm, and the isometrical conductive shank diameter of the long axis is more than or equal to1Mm, and be less than or equal to50Mm, the support base are staggeredly coupled with the isometrical conducting rod of the long axis, and are coupled and can form institute with the long axis conductive electrode bar
State the external power supply of the rf electric field and axial gradient electric field inside conical structure；
Or
According to some embodiments of the present invention, the multistage bar focusing structure be include more tapered conductive bars, support base, more
The tapered conductive bar is around central axes distribution in a center of symmetry and formation inside has the cone space structure of open chamber,
The both ends of the cone space structure form entrance and exit, and the inlet calibre is greater than the exit caliber；The support base
Including fixing piece, the first conductive plate and the second conductive plate, the tapered conductive bar and first conductive plate and described
Second conductive plate forms the successively connection of the open chamber internal high frequency electric field and axial gradient electric field, and described first leads
Electrode plate and second conductive plate are fixedly mounted on the fixing piece, and the more tapered conductive bar fixed connections are in institute
On the inside of the hollow hole for stating fixing piece, first conductive plate and second conductive plate are coupled external power supply.
Or
According to some embodiments of the present invention, the multistage bar focusing structure be include more bending-type conducting rods, support base is more
Bending-type conducting rod described in root is around central axes distribution in a center of symmetry and the internal bending space with open chamber of formation
Structure, shown bending-type conducting rod include flat segments and bending section, and shown flat segments are cylindrical structure or pyramidal structure, shown
Bending section is cylindrical structure or pyramidal structure, and the top end face of the flat segments is the bottom face of the bending section, the bending
It converges to be formed around central axes distributed architecture in a center of symmetry, the bending space structure to the central axes in the top of section
Form the bending space structure that inlet calibre is big and exit caliber is small；The support base include fixing piece, the first conductive plate and
Second conductive plate, first conductive plate and second conductive plate are fixedly mounted on the fixing piece, more institutes
Bending-type conducting rod fixed connection is stated on the inside of the hollow hole of the fixing piece, first conductive plate and second conduction
Pole plate is coupled external power supply, and the bending-type conducting rod forms described with first conductive plate and second conductive plate
The successively connection of open chamber internal high frequency electric field and axial gradient electric field.
It is cheaper in manufacturing cost using the isometrical conducting rod of long axis, processing and assembly, safeguard it is more convenient, but its
Production when, outlet diameter minimum value is restricted, thus for integral device overall volume reduce there are disadvantages；
Using tapered conductive rod structure, relative to, processing and assembly, maintenance higher using the isometrical conducting rod of long axis in manufacturing cost
Upper slightly complicated, but theoretically exist outlet diameter can infinitesimal advantage, reduce integral device volume on advantage extremely
Obviously；
Using bending conducting rod, the ion beam of inlet can be stablized on the basis of using tapered conductive rod structure, be subsequent
Every process bring better effect, but in terms of volume reduction it is weak with use tapered conductive structure.
According to some embodiments of the present invention, the multistage bar focusing structure is when including more tapered conductive bars, described
The end face that tapered conductive bar is located at the inlet has the first end face around central axes central symmetry distribution, described oblique
Face and the end face are forming the lesser second end face of opposed facets close to central axes side；
Or
According to some embodiments of the present invention, the multistage bar focusing structure is folding when including more bending-type conducting rods
The end face that curved conducting rod is located at the inlet has the first end face around central axes central symmetry distribution, described oblique
Face and the end face are forming the lesser second end face of opposed facets close to central axes side；The flat segments are cylindrical structure
Or pyramidal structure, shown bending section are cylindrical structure or pyramidal structure, the bending-type conducting rod is the freedom of above structure
Combination.
Preferably, the tapered conductive bar or the bending-type conducting rod are integrally formed.
If larger, the aggregation of this particle size is more for the end face of conducting rod lower end, can generate to entering for ion
Certain inhibition, therefore the end face herein close to central axes is reduced as far as possible, can greatly reduce particle size into
Enter the repulsive interaction of ion, it is possible thereby to make more ions enter cone space inside configuration, so that the result finally detected
More accurate, the specific area of first end face can be adjusted according to specific empirical data, while the tapered conductive bar is
It is integrally formed, as guarantees enough measures of precision, same root timber material is needed to be made.
According to some embodiments of the present invention, flat segments described in the bending-type conducting rod are cylindrical structure or taper
Structure, shown bending section are cylindrical structure or pyramidal structure, and the bending-type conducting rod is the independent assortment of above structure.
According to one embodiment of present invention, the flat segments are cylindrical type, and the bending section is cylindrical type, straight at this time
Space electric field in section is uniform, and bending section space electric field can gradually becoming smaller and enhance due to space bore, but the outlet
Bore can not further reduce because cylinder type end side is uniform, i.e., caliber size will receive limitation.
According to one embodiment of present invention, the flat segments are cylindrical type, and the bending section is pyramid type, straight at this time
Space electric field in section is uniform, and bending section space electric field can gradually becoming smaller and enhance due to space bore, simultaneously because circle
Itself cross sectional dimensions of tapered rod piece is also reducing, and will also result in the enhancing of corresponding field strength, meanwhile, the exit caliber can be with
Further reduce, theoretically can be infinitely small, this can greatly improve the environment in exit, specific number can by test into
Row determines.
According to one embodiment of present invention, the flat segments are pyramid type, and the bending section is cylindrical type, this embodiment
In, the flat segments conical structure variation then needs gently, and in favor of entering the stabilization of air-flow at a high speed, bending section then can be according to reality
Border needs to be adjusted, and major function is for ion focusing.
According to one embodiment of present invention, the flat segments are pyramid type, and the bending section is pyramid type, this embodiment
In, flat segments conical structure variation then need it is gentle, in favor of entering the stabilization of air-flow at a high speed, flat segments itself taper and
Flat segments angle, is determined according to actual needs, and bending section can then be adjusted according to actual needs, in the present embodiment, institute
The bore for stating outlet theoretically can also be infinitely small, and major function is for ion focusing.
According to one embodiment of present invention, the third through-hole bore is less than the second through-hole bore, the entrance
Bore is greater than the second through-hole bore, and the exit caliber is greater than the third through-hole bore.
According to some embodiments of the present invention, the taper of the space symmetr structure is less than or equal to 30 degree and is greater than 0 degree.
It is any to refer to that " one embodiment ", " embodiment ", " illustrative examples " etc. mean to combine embodiment description
Specific component, structure or feature are included at least one embodiment of the present invention；This specification everywhere this schematically
Statement is not necessarily referring to identical embodiment；Moreover, when combining any embodiment to describe specific component, structure or feature
When, advocated, component, structure or feature in conjunction with as the realization of other embodiments all fall within those skilled in the art
Within the scope of.
Although having carried out detailed retouch to a specific embodiment of the invention referring to multiple illustrative examples of the invention
It states, it must be understood that those skilled in the art can be designed that various other improvement and embodiment, these improve and implement
Example will be fallen within spirit and scope；Specifically, in aforementioned disclosure, attached drawing and the scope of the claims
Within, reasonable variations and modifications can be made in terms of the arrangement that components and/or sub-combination are laid out, without departing from
Spirit of the invention；In addition to components and/or the variations and modifications of layout aspect, range is by appended claims and its is equal
Object limits.
Claims (9)
1. a kind of multistage bar ion focusing transmission device, which is characterized in that including be located at the first cis-position ion source component, second
The ion lens component of cis-position, the focusing block positioned at third cis-position, the analyzer component positioned at the 4th cis-position and it is located at the
The detector elements of five cis-positions, be equipped between the ion source component and the ion lens component be provided through it is described from
The first partition of the first through hole for the ion beam that source component generates, pacifies between the ion lens component and the focusing block
Second partition equipped with the second through-hole for being provided through the ion beam focused through the ion lens, the focusing block and institute
The third partition that the third through-hole for the ion beam being provided with after focusing block focusing is equipped between analyzer component is stated,
It is equipped between the analyzer component and the detector elements and is provided through the ion beam from the analyzer component
Fourth hole the 4th partition；Analyzer component described in the ion lens component, the focusing block all with vacuum system
It is coupled, forms inner vacuum vessel under working condition, multistage bar ion focusing transport part is installed inside the focusing block
Part, the multistage bar ion focusing transmission part include that entrance is big and outlet is small and the inlet calibre is flat to the exit caliber
The sliding multistage bar focusing structure to successively decrease；
The ion source component emits ion beam, and the vacuum chamber of the ion lens components interior, warp are entered by first through hole
After the ion lens component is focused, by second through-hole enter the focusing block vacuum chamber, described second
There is gap between partition and the entrance, the outlet and the third plate, the aperture of second through-hole is according to ion
The diameter that beam is formed is set, and the ion beam is focused by the multistage bar focusing structure and is penetrated by the outlet
Out, the bore of the third through-hole is set according to the ion beam for projecting the outlet, and through the third through-hole into
The detector elements for entering the analyzer component and the 5th cis-position are analyzed and are detected.
2. a kind of multistage bar ion focusing transmission device according to claim 1, which is characterized in that the multistage bar focuses
Structure includes more conductive rod pieces, and the conduction rod piece is big around the entrance hole diameter that same central axis is formed, exit caliber is small
Space symmetr structure；Multiple support bases with hollow via-hole, the conduction rod piece fixed connection is in the support base
In cavity.
3. a kind of multistage bar ion focusing transmission device according to claim 2, which is characterized in that the conduction rod piece 4
Or 6 or 8.
4. a kind of multistage bar ion focusing transmission device according to claim 2, which is characterized in that the conduction rod piece is
Metal rod or the rod piece with the rod piece or inside for wrapping up metal coating with metal rod outer layer with insulating coating.
5. a kind of multistage bar ion focusing transmission device according to claim 2, which is characterized in that the multistage bar focuses
Structure be include more isometrical conducting rods of root long axis, the isometrical conducting rod of long axis is around same axle center at space symmetr structure, shape
It is greater than the isometrical pyramidal structure of long axis of outlet aperture at inlet calibre；Multiple support bases, the support base have interior bone, institute
The isometrical conducting rod fixed connection of long axis is stated on the inside of the through-hole, the exit caliber is more than or equal to 2mm, and the long axis is isometrical to lead
Pole diameter is more than or equal to1Mm, and be less than or equal to50Mm, the support base are staggeredly coupled with the isometrical conducting rod of the long axis, and
It is coupled the external electrical that rf electric field and axial gradient electric field inside the conical structure can be formed with the long axis conductive electrode bar
Source；
Or
The multistage bar focusing structure be include more tapered conductive bars, support base, the more tapered conductive bars surround axis
Line distribution in a center of symmetry and the internal cone space structure with open chamber of formation, the both ends of the cone space structure
Entrance and exit is formed, the inlet calibre is greater than the exit caliber；The support base includes fixing piece, the first conductive plate
With the second conductive plate, the tapered conductive bar and first conductive plate and second conductive plate form the opening
The successively connection of formula chamber interior high-frequency electric field and axial gradient electric field, first conductive plate and second conductive plate
It is fixedly mounted on the fixing piece, the more tapered conductive bar fixed connections are on the inside of the hollow hole of the fixing piece, institute
It states the first conductive plate and second conductive plate is coupled external power supply
Or
The multistage bar focusing structure be include more bending-type conducting rods, support base, the more bending-type conducting rods surround
Central axes distribution in a center of symmetry and the internal bending space structure with open chamber of formation, shown bending-type conducting rod packet
Flat segments and bending section are included, shown flat segments are cylindrical structure or pyramidal structure, and shown bending section is cylindrical structure or cone
Shape structure, the top end faces of the flat segments are the bottom face of the bending section, and the top of the bending section is to the axis congruence
Combinate form forms inlet calibre greatly and outlet mouth at central axes distributed architecture in a center of symmetry, the bending space structure is surrounded
The small bending space structure of diameter；The support base includes fixing piece, the first conductive plate and the second conductive plate, and described first leads
Electrode plate and second conductive plate are fixedly mounted on the fixing piece, and the more bending-type conducting rod fixed connections exist
On the inside of the hollow hole of the fixing piece, first conductive plate and second conductive plate are coupled external power supply, the folding
Curved conducting rod and first conductive plate and second conductive plate form the open chamber internal high frequency electric field
With the successively connection of axial gradient electric field.
6. a kind of multistage bar ion focusing transmission device according to claim 5, which is characterized in that the multistage bar focuses
Structure is when including more tapered conductive bars, and the end face that the tapered conductive bar is located at the inlet has around the axis
The first end face of line central symmetry distribution, the inclined-plane is with the end face lesser close to central axes side formation opposed facets
Second end face；
Or
The multistage bar focusing structure is when including more bending-type conducting rods, and the bending-type conducting rod is located at the inlet
End face there is the first end face around central axes central symmetry distribution, the inclined-plane and the end face are close to central axes
Side forms the lesser second end face of opposed facets；The flat segments are cylindrical structure or pyramidal structure, and shown bending section is
Cylindrical structure or pyramidal structure, the bending-type conducting rod are the independent assortment of above structure.
7. a kind of multistage bar ion focusing transmission device according to claim 6, which is characterized in that the tapered conductive bar
Or the bending-type conducting rod is integrally formed.
8. a kind of multistage bar ion focusing transmission device according to claim 1, which is characterized in that the third through-hole mouth
Diameter is less than the second through-hole bore, and the inlet calibre is greater than the second through-hole bore, and the exit caliber is greater than described
Third through-hole bore.
9. a kind of multistage bar ion focusing transmission device according to claim 2, the taper of the space symmetr structure are small
In equal to 30 degree and greater than 0 degree.
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| CN201910286637.4A CN109841490A (en) | 2019-04-10 | 2019-04-10 | A kind of multistage bar ion focusing transmission device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910286637.4A CN109841490A (en) | 2019-04-10 | 2019-04-10 | A kind of multistage bar ion focusing transmission device |
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Citations (4)
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|---|---|---|---|---|
| US5850084A (en) * | 1996-05-03 | 1998-12-15 | Leybold Inficon Inc. | Ion lens assembly for gas analysis system |
| US20080283742A1 (en) * | 2005-11-16 | 2008-11-20 | Shimadzu Corporation | Mass Spectrometer |
| CN106340437A (en) * | 2015-07-09 | 2017-01-18 | 株式会社岛津制作所 | Mass spectrometer and method used to reduce ion loss and post-stage vacuum load |
| CN209843657U (en) * | 2019-04-10 | 2019-12-24 | 江苏天瑞仪器股份有限公司 | Multistage rod ion focusing transmission equipment |
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2019
- 2019-04-10 CN CN201910286637.4A patent/CN109841490A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5850084A (en) * | 1996-05-03 | 1998-12-15 | Leybold Inficon Inc. | Ion lens assembly for gas analysis system |
| US20080283742A1 (en) * | 2005-11-16 | 2008-11-20 | Shimadzu Corporation | Mass Spectrometer |
| CN106340437A (en) * | 2015-07-09 | 2017-01-18 | 株式会社岛津制作所 | Mass spectrometer and method used to reduce ion loss and post-stage vacuum load |
| CN209843657U (en) * | 2019-04-10 | 2019-12-24 | 江苏天瑞仪器股份有限公司 | Multistage rod ion focusing transmission equipment |
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| Title |
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| 申鑫;苏小保;唐康淞;尚新文;: "磁聚焦多级降压收集极的设计及优化", 真空电子技术, no. 01, 25 February 2017 (2017-02-25) * |
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