CN109822401A - Active control shear action and temperature-induced gradient thicken polishing method - Google Patents
Active control shear action and temperature-induced gradient thicken polishing method Download PDFInfo
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- CN109822401A CN109822401A CN201910246394.1A CN201910246394A CN109822401A CN 109822401 A CN109822401 A CN 109822401A CN 201910246394 A CN201910246394 A CN 201910246394A CN 109822401 A CN109822401 A CN 109822401A
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- 238000005498 polishing Methods 0.000 title claims abstract description 237
- 230000009471 action Effects 0.000 title claims abstract description 32
- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000012530 fluid Substances 0.000 claims abstract description 95
- 239000007788 liquid Substances 0.000 claims abstract description 56
- 230000008719 thickening Effects 0.000 claims abstract description 56
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 30
- 230000000694 effects Effects 0.000 claims abstract description 24
- 230000006698 induction Effects 0.000 claims abstract description 5
- 239000002245 particle Substances 0.000 claims description 20
- 230000010412 perfusion Effects 0.000 claims description 17
- 239000006061 abrasive grain Substances 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000004615 ingredient Substances 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 238000001802 infusion Methods 0.000 claims 1
- 238000007517 polishing process Methods 0.000 abstract description 10
- 239000000463 material Substances 0.000 description 13
- 239000010410 layer Substances 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000003487 electrochemical reaction Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A kind of active control shear action and temperature-induced gradient thicken polishing method, comprising the following steps: 1) select work piece holder；2) by clamping workpiece on work piece holder；3) configuration has the polishing fluid of temperature-induced gradient thickening effect, and polishing fluid is placed in polishing liquid case；4) start main shaft and water pump, polishing fluid is input on polishing disk, so that polishing fluid relative motion on polishing disk, forms polishing fluid circulation；5) make workpiece rough polishing under big shear action；6) temperature sensor is used, monitors T DEG C of temperature of polishing fluid, starts alternating temperature stick, the polishing fluid temperature of gradient adjustment at regular intervals is controlled in conjunction with active shear rate, i.e. polishing fluid viscosity increases at regular intervals, and polishing fluid gradient is caused to thicken, and realizes temperature-induced gradient thickening polishing.The present invention provides a kind of higher polishing efficiency, polishing process controllability and the good active control shear temperature induction gradient thickening polishing method of flexibility.
Description
Technical field
The invention belongs to Ultraprecision Machining field, be specifically related to a kind of active control shear action with it is temperature-induced
Gradient thickens polishing method.
Background technique
Ultraprecision Machining is widely applied in various fields in the important component of modern science and technology.Such as
In terms of the processing of the hard materials such as crisp difficult-to-machine material and bearing element such as sapphire, monocrystalline silicon, each functionality ceramic；Various complexity
The high-precision of curved surface, low damage, beauty etc..Using Ultraprecision Machining, low surface roughness, low/no can be obtained
The workpiece surface of surface damage or sub-surface damage.
Polishing is one kind of Ultra-precision Turning, refers to and enables to workpiece under the action of mechanical, chemistry or electrochemistry, drop
Low workpiece surface roughness improves the Ultra-precision Turning technique of workpiece surface finish.Shear thickening polishing is to propose in recent years
New Polishing Process, shear thickening polishing be using have shear thickening effect non-newtonian fluid as base fluid, wherein plus
Enter abrasive grain and polishing fluid is made, because shear action forms shear thickening flexible abrasive product, under the action of speed and load, realizes
The polishing process of workpiece surface progress material removal.Workpiece under shear thickening polishing has smaller surface roughness, causes
Surface damage or sub-surface damage it is small, have it is from a wealth of sources, it is inexpensive the features such as.The viscosity of shear thickening fluid is with temperature
Decline, viscosity becomes larger.
Temperature sensor refers to the sensor that can be experienced temperature and be converted into usable output signal.Temperature sensor is temperature
The core of measuring instrumentss, it is various in style.Contact and contactless two major classes can be divided by measurement method, according to sensor
Material and electron component characteristic are divided into two class of thermal resistance and thermocouple.
It discloses Chinese invention patent (CN201810122104.8), patent name: a kind of efficient ultraprecise shear thickening-
Chemical cooperated polishing processing device.The patent working equipment includes polishing tool, polishing tool fixture, polishes solid Moving plate, is dust-proof
Cover and polishing liquid circulating device.The present invention utilizes liquid stream boundary active constraint and polishing liquid stream Active flow control, shear thickening
It is cooperateed with Green Chemistry effect, improves processing efficiency, precision, and extend machinable material and face shape.The patent advantage is can
Rapidoprint is wide, machined surface type is various, polishing fluid environmental protection, and shear thickening effect is utilized, this is made to be finished to flexible polishing, improves
Material removes certainty, and damaged surface layer is few；Disadvantage is in polishing process, can not directed change workpiece polishing area polishing fluid
Viscosity, so that polishing process lacks flexibility.
It has authorized Chinese utility model patent (CN 201410436897.2), patent name: non-Newtonian shear thickening
With the ultra-precision processing apparatus of electrolysis complex effect, including polishing tool, polishing tool fixture, work piece holder and polishing pond, institute
The conduct piece for stating work piece holder is connect with power anode, and the conduct piece of the polishing tool fixture is connect with power cathode.Having
There are addition abrasive grain or micro mist in the non-newtonian fluid of shear thickening effect to prepare polishing fluid, and add electrolyte composition, makes to throw
I.e. have electrolysis again has shear thickening effect to light liquid.After power supply is powered, produced between anode workpiece and cathode polishing tool
Raw electrochemical reaction, the metal of workpiece surface is by electrodissolution, and workpiece surface will form one layer of obstruction electrochemical reaction therewith
Oxidation film.The oxidation film of workpiece surface high spot is worn away first, exposes fresh metal, and electrochemical reaction is able in high spot
Continue.And the oxidation film of recess is not removed, chemical reaction is hindered, and metal is protected at this.While by
In the spike effect of electric current, high spot electric field strength is big, also strong to corrosion of metal ability, in addition shear thickening acts on lower abrasive grain
Stronger to the removal effect of workpiece surface high spot, the collective effect of this several respect influences, so that workpiece surface high spot is rapid
It is removed, surface roughness is also reduced rapidly.The patent disadvantage is not can solve the face shape bad adaptability of processable workpiece
The certain problem of material removal, it is difficult to which the deterministic theory and high surface figure accuracy for realizing workpiece material limit processable material
The range of material (conductive energy), electrolyte belong to non-environmental protection substance, and effect on environment is big, environmental protection treatment is at high cost.But by
Single shear thickening effect being relied solely in the polishing, the removal of micro-cutting forming material being generated to workpiece, polishing efficiency still has promotion
Space.
Authorized Chinese invention patent (CN 201510366852.7), patent name: a kind of active control workpiece material is gone
Except the Ultraprecise polished method of mechanism transformation.The patent using workpiece-polishing disk contact condition by being adjusted in polishing process
Mechanism, uses close contact polishing to guarantee work pieces process form accuracy when polishing initial, then adjusts workpiece and connects with polishing disk
Touching state, using the workpiece surface machining damage layer of non-contact polishing removal close contact polishing.The patent is gone in non-contact polishing
Except the stage, the concentration of polishing fluid can not be changed, polishing efficiency at this stage has deficiency.
Summary of the invention
In order to overcome the shortcomings of that the lower polishing efficiency for having polishing mode, polishing process controllability and flexibility are poor,
The present invention provides a kind of higher polishing efficiency, polishing process controllability and the good active control shear temperature induction ladder of flexibility
Degree thickening polishing method.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of active control shear action and temperature-induced gradient thicken polishing method, and the polishing method includes following step
It is rapid:
1) work piece holder is selected；
2) by clamping workpiece on work piece holder；
3) configuration has the polishing fluid of temperature-induced gradient thickening effect, and polishing fluid is placed in polishing liquid case；
4) start main shaft and water pump, polishing fluid is input on polishing disk, so that polishing fluid relative motion on polishing disk,
Form polishing fluid circulation；
5) make workpiece rough polishing under big shear action；
6) temperature sensor is used, monitors T DEG C of temperature of polishing fluid, starts alternating temperature stick, at regular intervals gradient tune
Whole polishing fluid temperature is controlled in conjunction with active shear rate, i.e., polishing fluid viscosity increases at regular intervals, causes polishing fluid gradient
Temperature-induced gradient thickening polishing is realized in thickening.
Further, in the step 3), each ingredient of the polishing fluid and its ratio: polishing abrasive grain 8wt.%-25wt.%,
Shear thickening base fluid 16wt.%-25wt.%, water 35wt.%-55wt.%, alternating temperature particle 1wt.%-16wt.%, polishing fluid exist
In process, quick alternating temperature, realization active control shear temperature induction gradient thickening it can be thrown under the action of alternating temperature stick
Light.
Further, (numerical value can be than water or thickening phase for the particle of the optional setting specific heat capacitance of the alternating temperature particle
It is small), it is desirable that the alternating temperature particle of selection will not have an impact the thickening effect of polishing fluid.
Further, the facilities and equipments of the method include work piece holder, polishing disk, polishing pad, polishing liquid pool, main shaft,
Polishing liquid case, temperature sensor, alternating temperature stick and water pump, the polishing disk are mounted on main shaft, and polishing pad is mounted on polishing disk；
The work piece holder is in the top of polishing disk, and clamping workpiece is on work piece holder；The polishing liquid case is on a left side for polishing liquid pool
Lower section, polishing liquid pool are mounted under polishing disk, and perfusion tube connection polishing liquid pool and polishing liquid case, water pump are mounted on polishing liquid case
In, water pump is connect with perfusion tube；The temperature sensor is mounted in work piece holder, and contact and workpiece polishing area polish
Liquid contact；The alternating temperature stick is mounted in work piece holder；For with temperature-induced gradient thickening effect in the polishing liquid case
Polishing fluid.
Further, the equipment further includes data sink, the signal that is transmitted for wireless receiving from temperature sensor,
It is capable of the on/off of wireless control alternating temperature stick；The temperature sensor has data wireless transmission function and internal battery；
The alternating temperature stick has data wireless transmission function and internal battery feature；The temperature sensor and alternating temperature stick with it is described
Data sink communication connection.
In the step 4), the perfusion tube, polishing liquid pool, polishing liquid case, water pump form polishing fluid circulation, polishing
Polishing fluid in liquid case is input in work piece holder, on polishing pad through perfusion tube by water pump, and extra polishing fluid is flowed into throwing
Light liquid pool reaches polishing liquid case through perfusion tube.
Technical concept of the invention are as follows: with temperature-induced gradient thickening effect polishing fluid, shear thickening effect be because
It is the shear thickening phase in polishing fluid when by shear action, polishing fluid viscosity increases, and abrasive grain is around thickening particle formation " mill
Grain thickened mass ", a large amount of " abrasive grain thickened mass " forms flexible abrasive product and is identical workpiece polished surface, realizes the shearing to workpiece
Thickening polishing；Temperature-induced is due to joined alternating temperature particle in polishing fluid, and polishing fluid, can be quick under the action of alternating temperature stick
Alternating temperature (cooling or heating).
Polishing fluid circulatory function, i.e., polishing liquid case in polishing fluid be input in work piece holder by water pump through perfusion tube,
On polishing pad, extra polishing fluid is flowed into polishing liquid pool and reaches polishing fluid temperature control box formation polishing fluid circulation function through perfusion tube
Energy.
Above-mentioned active control shear action and the thickening of temperature-induced gradient polish, and active control shear action is to pass through
Change work piece holder and be applied to the revolving speed of load or polishing disk on workpiece or the revolving speed of work piece holder, realizes active control workpiece
The shear action being subject to；Temperature-induced gradient thickening, is to change polishing at regular intervals by the alternating temperature stick in work piece holder
The temperature of liquid is controlled in conjunction with active shear rate, so that it may be reached the viscosity for changing polishing fluid at regular intervals, be realized polishing
The thickening of liquid gradient.The rough polishing stage, since big shear action increases workpiece polished surface polishing fluid viscosity, and by shear action
Frictional heat is generated to polish fluid viscosity reduction, final polishing fluid viscosity stabilization, workpiece rough polishing under the viscosity；The smart throwing stage,
Polishing fluid temperature is set to rapidly change x DEG C by alternating temperature stick every the t time, polishing fluid viscosity increases, and one section is polished under the viscosity
Time, such Circulated polishing are final to realize that active control shear action and the thickening of temperature-induced gradient polish.
Compared with prior art, the beneficial effects of the present invention are:
(1) it present invention utilizes active control shear action and temperature-induced gradient thickening technology, not only increases to work
The polishing efficiency of part, obtain the high and low surface roughness of surface quality workpiece, also improve polishing process controllability, flexibly
Property, increase the diversity of polishing process.
(2) present invention utilizes the shear thickening effect of non-newtonian fluid, this is made to be finished to flexible polishing, can arrive
The workpiece of surface damage or sub-surface damage low/no.
Detailed description of the invention
Fig. 1 be active control shear action and temperature-induced gradient thickening polishing schematic diagram, workpiece 1, temperature sensor 2,
Polishing fluid 3, alternating temperature stick 4, polishing pad 5, work piece holder 6, perfusion tube 7, water pump 8, polishing liquid case 9, main shaft 10, polishing liquid pool 11,
Polishing disk 12, flexible abrasive product layer 13.
Fig. 2 is the microgram of the flexible abrasive product layer 13 formed when polishing, wherein 1 is workpiece, and 21 be abrasive grain, and 22 be alternating temperature
Particle, 23 be thickening particle, and 24 be flexible abrasive product layer；5 be polishing pad.
Specific embodiment
The present invention is further illustrated with reference to the accompanying drawing.
Referring to Fig.1, a kind of active control shear action and temperature-induced gradient thicken polishing method, include the following steps:
1) work piece holder 6 is selected；
2) by 1 clamping of workpiece on work piece holder 6；
3) configuration has the polishing fluid 3 of temperature-induced gradient thickening effect, and polishing fluid 3 is placed in polishing liquid case 9；
4) start main shaft 10 and water pump 8, polishing fluid 3 is input on polishing disk 12, so that polishing fluid 3 is on polishing disk 12
Relative motion forms polishing fluid circulation；
5) make the rough polishing under big shear action of workpiece 1；
6) temperature sensor 2 is used, monitors T DEG C of temperature of polishing fluid 3, starts alternating temperature stick 4, at regular intervals gradient
It adjusts 3 temperature of polishing fluid, controlled in conjunction with active shear rate, i.e., 3 viscosity of polishing fluid increases at regular intervals, causes polishing fluid
Temperature-induced gradient thickening polishing is realized in the thickening of 3 gradients.
Further, in the step 3), each ingredient of the polishing fluid and its ratio: polishing abrasive grain 8wt.%-25wt.%,
Shear thickening base fluid 16wt.%-25wt.%, water 35wt.%-55wt.%, alternating temperature particle 1wt.%-16wt.%, polishing fluid exist
In process, quick alternating temperature, realization active control shear temperature induction gradient thickening it can be thrown under the action of cooling piece
Light.
In the present embodiment, each ingredient and its ratio that the polishing fluid can choose are as follows:
Polish abrasive grain 8wt.%, shear thickening base fluid 25wt.%, water 55wt.%, alternating temperature particle 12wt.%；
Either: polishing abrasive grain 20wt.%, shear thickening base fluid 16wt.%, water 50wt.%, alternating temperature particle 14wt.%；
Again either: polishing abrasive grain 25wt.%, shear thickening base fluid 24wt.%, water 35wt.%, alternating temperature particle
16wt.%；
Or it is: polishing abrasive grain 24wt.%, shear thickening base fluid 23wt.%, water 52wt.%, alternating temperature particle
1wt.%.
Further, (numerical value can be than water or thickening phase for the particle of the optional setting specific heat capacitance of the alternating temperature particle
It is small), it is desirable that the alternating temperature particle of selection will not have an impact the thickening effect of polishing fluid.
The facilities and equipments of this method include work piece holder 6, polishing disk 12, polishing pad 5, polishing liquid pool 11, main shaft 10, polishing
Liquid case 9, temperature sensor 2, alternating temperature stick 4 and water pump 8, the polishing disk 12 are mounted on main shaft 10, and polishing pad 5 is mounted on polishing
On disk 12, polishing liquid pool 11 is mounted under polishing disk 12；The work piece holder 6 is in the top of polishing disk 12, and 1 clamping of workpiece is in work
On part fixture 6；The polishing liquid case 9 is in the lower left of polishing liquid pool 11, the connection of perfusion tube 7 polishing liquid pool 11 and polishing liquid case
9, water pump 8 is mounted in polishing liquid case 9, and water pump 8 is connect with perfusion tube 7；The temperature sensor 2 is mounted on work piece holder 6
Interior, contact is contacted with 1 polishing area polishing fluid of workpiece；The alternating temperature stick 4 is mounted in work piece holder, the polishing liquid case
It is the polishing fluid with temperature-induced gradient thickening effect in 9.
The equipment further includes data sink, the signal that transmits for wireless receiving from temperature sensor 2, can be wireless
Control the on/off of alternating temperature stick 4；The temperature sensor 2 has data wireless transmission function and internal battery；Described
Alternating temperature stick 4 has data wireless transmission function and internal battery feature；The temperature sensor 2 and alternating temperature stick 4 and the number
According to receiver communication connection.
The perfusion tube 7, polishing liquid pool 11, polishing liquid case 9, water pump 8 form polishing fluid circulation, polish in liquid case 9
Polishing fluid be input in work piece holder by water pump 8 through perfusion tube, on polishing pad 5, extra polishing fluid is flowed into polishing fluid
Pond 11 reaches polishing liquid case 9 through perfusion tube.
As shown in Figure 1, the present invention is hard for processing bearing steel, hard alloy, cermet, optical glass and difficult processing
The workpiece such as crisp material.
Claims (6)
1. a kind of active control shear action and temperature-induced gradient thicken polishing method, which is characterized in that the polishing method
The following steps are included:
1) work piece holder is selected；
2) by clamping workpiece on work piece holder；
3) configuration has the polishing fluid of temperature-induced gradient thickening effect, and polishing fluid is placed in polishing liquid case；
4) start main shaft and water pump, polishing fluid is input on polishing disk, so that polishing fluid relative motion on polishing disk, forms
Polish fluid circulation；
5) make workpiece rough polishing under big shear action；
6) temperature sensor is used, monitors T DEG C of temperature of polishing fluid, starts alternating temperature stick, gradient adjustment at regular intervals is thrown
Light liquid temperature is controlled in conjunction with active shear rate, i.e., polishing fluid viscosity increases at regular intervals, and polishing fluid gradient is caused to increase
It is thick, realize temperature-induced gradient thickening polishing.
2. active control shear action as described in claim 1 and temperature-induced gradient thicken polishing method, which is characterized in that
In the step 3), each ingredient of the polishing fluid and its ratio: polishing abrasive grain 8wt.%-25wt.%, shear thickening base fluid
16wt.%-25wt.%, water 35wt.%-55wt.%, alternating temperature particle 1wt.%-16wt.%, polishing fluid in process,
It being capable of quick alternating temperature, realization active control shear temperature induction gradient thickening polishing under the action of alternating temperature stick.
3. active control shear action as claimed in claim 2 and temperature-induced gradient thicken polishing method, which is characterized in that
The particle of setting specific heat capacitance may be selected in the alternating temperature particle, it is desirable that the alternating temperature particle of selection will not be to the thickening effect of polishing fluid
It has an impact.
4. the active control shear action and temperature-induced gradient as described in one of claims 1 to 3 thicken polishing method, special
Sign is that the facilities and equipments of the method include work piece holder, polishing disk, polishing pad, polishing liquid pool, main shaft, polishing liquid case, temperature
Degree sensor, alternating temperature stick and water pump, the polishing disk are mounted on main shaft, and polishing pad is mounted on polishing disk；The workpiece clamp
Tool is in the top of polishing disk, and clamping workpiece is on work piece holder；The polishing liquid case is in the lower left of polishing liquid pool, polishing fluid
Pond is mounted under polishing disk, and perfusion tube connection polishing liquid pool and polishing liquid case, water pump are mounted in polishing liquid case, water pump and infusion
Pipe connection；The temperature sensor is mounted in work piece holder, and contact is contacted with workpiece polishing area polishing fluid；Described
Alternating temperature stick is mounted in work piece holder；It is the polishing fluid with temperature-induced gradient thickening effect in the polishing liquid case.
5. active control shear action as claimed in claim 4 and temperature-induced gradient thicken polishing method, which is characterized in that
The equipment further includes data sink, the signal that transmits for wireless receiving from temperature sensor, being capable of wireless control alternating temperature
The on/off of stick；The temperature sensor has data wireless transmission function and internal battery；The alternating temperature stick has
Data wireless transmission function and internal battery feature；The temperature sensor and alternating temperature stick and data sink communication connect
It connects.
6. active control shear action as claimed in claim 4 and temperature-induced gradient thicken polishing method, which is characterized in that
In the step 4), the perfusion tube, polishing liquid pool, polishing liquid case, water pump form polishing fluid circulation, polish in liquid case
Polishing fluid is input in work piece holder, on polishing pad through perfusion tube by water pump, and extra polishing fluid is flowed into polishing liquid pool warp
Perfusion tube reaches polishing liquid case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910246394.1A CN109822401B (en) | 2019-03-29 | 2019-03-29 | Active control shearing action and temperature induction gradient thickening polishing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910246394.1A CN109822401B (en) | 2019-03-29 | 2019-03-29 | Active control shearing action and temperature induction gradient thickening polishing method |
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| Publication Number | Publication Date |
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| CN109822401A true CN109822401A (en) | 2019-05-31 |
| CN109822401B CN109822401B (en) | 2024-09-10 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110181359A (en) * | 2019-06-03 | 2019-08-30 | 成都精密光学工程研究中心 | It is a kind of for adjusting the device of annular polishing machine pitch panel surface face shape |
| CN112497044A (en) * | 2020-11-10 | 2021-03-16 | 浙江工业大学 | Ultra-precise polishing method based on thermal thickening effect |
| CN114393503A (en) * | 2021-12-20 | 2022-04-26 | 浙江工业大学 | Jet polishing device and method based on ultraviolet light response self-assembly system |
| WO2022187023A1 (en) * | 2021-03-03 | 2022-09-09 | Applied Materials, Inc. | Temperature controlled rate of removal in cmp |
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|---|---|---|---|---|
| CN104308670B (en) * | 2014-08-29 | 2016-09-14 | 浙江工业大学 | Ultraprecise processing method based on non-Newtonian shear thickening with electrolysis complex effect |
| CN108015661A (en) * | 2017-12-15 | 2018-05-11 | 浙江工业大学 | A kind of polishing plate clamp for being integrated with temperature control device |
| CN109054656A (en) * | 2018-09-17 | 2018-12-21 | 宁波日晟新材料有限公司 | A kind of metal free form surface surface polishing liquid and its preparation method and application |
-
2019
- 2019-03-29 CN CN201910246394.1A patent/CN109822401B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104308670B (en) * | 2014-08-29 | 2016-09-14 | 浙江工业大学 | Ultraprecise processing method based on non-Newtonian shear thickening with electrolysis complex effect |
| CN108015661A (en) * | 2017-12-15 | 2018-05-11 | 浙江工业大学 | A kind of polishing plate clamp for being integrated with temperature control device |
| CN109054656A (en) * | 2018-09-17 | 2018-12-21 | 宁波日晟新材料有限公司 | A kind of metal free form surface surface polishing liquid and its preparation method and application |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110181359A (en) * | 2019-06-03 | 2019-08-30 | 成都精密光学工程研究中心 | It is a kind of for adjusting the device of annular polishing machine pitch panel surface face shape |
| CN110181359B (en) * | 2019-06-03 | 2020-10-30 | 成都精密光学工程研究中心 | Device for adjusting surface shape of asphalt disc surface of annular polishing machine |
| CN112497044A (en) * | 2020-11-10 | 2021-03-16 | 浙江工业大学 | Ultra-precise polishing method based on thermal thickening effect |
| WO2022187023A1 (en) * | 2021-03-03 | 2022-09-09 | Applied Materials, Inc. | Temperature controlled rate of removal in cmp |
| CN114393503A (en) * | 2021-12-20 | 2022-04-26 | 浙江工业大学 | Jet polishing device and method based on ultraviolet light response self-assembly system |
| CN114393503B (en) * | 2021-12-20 | 2023-05-02 | 浙江工业大学 | Jet polishing device and method based on ultraviolet light response self-assembly system |
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| Publication number | Publication date |
|---|---|
| CN109822401B (en) | 2024-09-10 |
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