CN1098200A - The manufacture craft of foil sensor - Google Patents
The manufacture craft of foil sensor Download PDFInfo
- Publication number
- CN1098200A CN1098200A CN 94107219 CN94107219A CN1098200A CN 1098200 A CN1098200 A CN 1098200A CN 94107219 CN94107219 CN 94107219 CN 94107219 A CN94107219 A CN 94107219A CN 1098200 A CN1098200 A CN 1098200A
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- sensor
- foil
- metal
- sensitive surface
- light
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Abstract
A kind of manufacture craft of foil sensor, it is characterized in that at first the sensor foil being cleaned up and drying after, under temperature is 140 ℃-160 ℃ and pressurized conditions, press light-sensitive surface respectively on the two sides of foil, at surface adhesion one deck mylar protective seam of light-sensitive surface; Stick the shape egative film of sensor in one side; expose in the two sides; remove the protective seam of the plane of exposure that the shape of sensor egative film is arranged; it is sent into developing machine, and unexposed portion and alkaline reaction are removed, the exposed portions serve metal foil; the metal foil that exposes is eroded; the clean back of rinsing is dry, with eroding the one side encapsulation of metal, makes sensor.Utilize the quality homogeneous of the sensor that above-mentioned technology makes, improved production efficiency.Its encapsulation performance is good, has improved the insulativity of encapsulating material under the dynamic high-pressure loading, thereby has improved the sensitivity of sensor and the record life-span under the dynamic high-pressure effect.
Description
The present invention relates to a kind of processing and encapsulation of sensor, refer to a kind of processing and packaging technology of foil sensor especially.
Foil sensor application at present is very extensive, particularly is the pressure that is applied to different Laplaces position in the dynamic high-pressure flow field, the measurement of distortion and displacement.What the making of foil sensor was adopted at present is traditional whirl coating photoetching process, and its shortcoming is that efficient is low, the size-constrained system of amount meter, and manufacturing process is poisonous, and is influential to health.The encapsulation of foil sensor mainly contains two kinds of methods.A kind of is to encapsulate with polytetrafluoroethylene film, use 203A glue to encapsulate as bonding agent, this method for packing is generally finished by manual, so consistance is relatively poor, and this is under moment dynamic high-pressure measuring condition, the consistance of measurement parameter will be influenced, cause increasing measuring error, manual operations simultaneously is difficult to eliminate the minute bubbles in the bonding agent, because the 203A adhesive curing is extremely slow, therefore the performance of sealing of sensor changes obviously in time, equally also the essence amount and the measuring error of influence measurement.Another kind is to use polyimide, or materials such as polyvinyl formal acetal or epoxy resin seal, and utilizes the above-mentioned material encapsulation, its complex manufacturing technology, production efficiency is low, the cost height, and some material is under the dynamic high-pressure effect, and its insulating property variation causes the sensitivity of sensor to reduce.
The objective of the invention is to disclose a kind of method for making of foil sensor,, reduce cost, and improve the insulativity of encapsulating material under the dynamic high-pressure loading with the production efficiency of raising foil sensor and the consistance of performance parameter.
Realize that technical solution of the present invention is as follows: at first the sensor foil is cleaned up and drying after; under temperature is 140 ℃-160 ℃ and pressurized conditions; two sides at foil presses light-sensitive surface respectively; surface adhesion one deck mylar protective seam at light-sensitive surface; stick the shape egative film of sensor in one side; exposure is advanced on the two sides; remove the protective seam of the plane of exposure that the shape of sensor egative film is arranged; it is sent into developing machine, and unexposed portion and alkaline reaction are removed, the exposed portions serve metal foil; the metal foil that exposes is eroded; rinsing clean back oven dry with eroding the one side encapsulation of metal, then makes sensor.
The technology of utilizing the present invention to provide is made foil sensor, its good manufacturability, the quality homogeneous, avoided of the harm of the noxious material of the low and manufacturing process of efficient that traditional whirl coating technology brings to human body, improved production efficiency, and sensor is not subjected to the restriction of size substantially, its encapsulation performance is good, improved the insulativity of encapsulating material under the dynamic high-pressure loading, thereby improved the sensitivity of sensor and the record life-span under the dynamic high-pressure effect.
Provide concrete steps of the present invention in detail below in conjunction with embodiment.
The concrete steps of the manufacture craft of foil sensor are as follows: at first the sensor foil is cleaned up, clean with cleanser earlier, use 5% dilute sulfuric acid again, use the acetone scrub at last, send into the press mold machine after the drying, under temperature is 140 ℃-160 ℃ and pressurized conditions, press the light-sensitive surface that thickness is the 0.03-0.05 millimeter respectively on the two sides of foil, water soluble corrosion resisting dry film preferably, said temperature preferably are controlled at about 150 ℃ to well; Surface adhesion one deck mylar protective seam at the water soluble corrosion resisting dry film, its thickness is 0.05-0.1mm, one side burn-out on exposure machine at the foil that presses water soluble corrosion resisting dry film and protective seam, the shape egative film that another side sticks sensor exposes, the shape of the sensor that provides on the shape egative film of sensor can be any effective shape, to be suitable for the pressure of different Laplaces position in the dynamic high-pressure flow field, become the measurement of open form and displacement; Remove the protective seam of egative film plane of exposure; send into developing machine; unexposed portion and alkaline reaction are corroded; the exposed portions serve metal foil; send into etching machine again; the metal foil that exposes is eroded; the part metals that then stays is the metal part of the foil sensor of required form; will erode the one side encapsulation of metal, its encapsulation step is as follows: the one side that will erode a part of metal is sent into the press mold machine and is compressed one deck light-sensitive surface, preferably presses the water soluble corrosion resisting dry film; compress a strata thinfilm protective coating on its surface; the dilute sulfuric acid of application 5% carries out rinsing to sensor before encapsulation, uses flushing with clean water again, at last oven dry.
Utilize above-mentioned technology can produce multiple foil sensor, have purposes quite widely, for example can be used to produce copper-manganese paper tinsel pressure regulation resistance amount meter and constantan amount of tension meter, be with the dynamic calibration result of the copper pressure transducer of this explained hereafter:
P（GPA）＝0.40+30.42（ (△R)/(Ro) ）+14.19（ (△R)/(Ro) ）
2
（1.0GPA≤P≤13GPA）
Wherein P is a pressure, and (△ R)/(Ro) is the oscillograph recording result.
Claims (3)
1, a kind of manufacture craft of foil sensor, it is characterized in that at first the sensing foil being cleaned up and drying after, under temperature is 140 ℃-160 ℃ and pressurized conditions, press light-sensitive surface respectively on the two sides of foil, at surface adhesion one deck mylar protective seam of light-sensitive surface; Stick the shape egative film of sensor in one side; expose in the two sides; remove the protective seam of the plane of exposure that the shape of sensor egative film is arranged; it is sent into developing machine, and unexposed portion and alkaline reaction are removed, the exposed portions serve metal foil; the metal foil that exposes is eroded; the clean back of rinsing is dry, with eroding the one side encapsulation of metal, makes sensor.
2, by the manufacture craft of the described foil sensor of claim 1, it is characterized in that the temperature of press mold preferably is controlled at about 150 ℃, light-sensitive surface is the water soluble corrosion resisting dry film preferably.
3, press the manufacture craft of the described foil sensor of claim 1; the processing step of one side encapsulation that it is characterized in that eroding metal is as follows: the one side that will erode a part of metal is sent into the press mold machine and is compressed one deck light-sensitive surface; preferably press the water soluble corrosion resisting dry film, compress one deck mylar protective seam on its surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94107219 CN1098200A (en) | 1994-06-27 | 1994-06-27 | The manufacture craft of foil sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94107219 CN1098200A (en) | 1994-06-27 | 1994-06-27 | The manufacture craft of foil sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1098200A true CN1098200A (en) | 1995-02-01 |
Family
ID=5032891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94107219 Pending CN1098200A (en) | 1994-06-27 | 1994-06-27 | The manufacture craft of foil sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1098200A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100342982C (en) * | 2002-12-26 | 2007-10-17 | 增田胜利 | Fluid storage container |
| CN102023179A (en) * | 2010-11-04 | 2011-04-20 | 中南大学 | Foil type sensor with function of automatically accumulating resistance |
-
1994
- 1994-06-27 CN CN 94107219 patent/CN1098200A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100342982C (en) * | 2002-12-26 | 2007-10-17 | 增田胜利 | Fluid storage container |
| CN102023179A (en) * | 2010-11-04 | 2011-04-20 | 中南大学 | Foil type sensor with function of automatically accumulating resistance |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |