CN109817827A - The making apparatus and production method of OLED display panel - Google Patents
The making apparatus and production method of OLED display panel Download PDFInfo
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- CN109817827A CN109817827A CN201910060294.XA CN201910060294A CN109817827A CN 109817827 A CN109817827 A CN 109817827A CN 201910060294 A CN201910060294 A CN 201910060294A CN 109817827 A CN109817827 A CN 109817827A
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- display panel
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Abstract
The present invention provides the making apparatus and production method of a kind of OLED display panel, and the making apparatus of the OLED display panel includes heat-conducting plate and the heating source for being heated to the heat-conducting plate；The heat-conducting plate includes plate body and the salient point that is arranged on the plate body, and the salient point is used to carry out heating evaporation to the insulating film layer in OLED display panel to expose auxiliary electrode.Heating evaporation is carried out to expose auxiliary electrode to the insulating film layer in OLED display panel by salient point, re-form the top electrode connecting with auxiliary electrode, under the premise of not causing damage to auxiliary electrode and top electrode, contact auxiliary electrode and top electrode effectively, to eliminate IR-drop caused by top electrode resistance height, display panel quality is promoted.
Description
Technical field
The present invention relates to the making apparatus and production side of technical field of display panel more particularly to a kind of OLED display panel
Method.
Background technique
Organic electroluminescence device (OLED) with its self-luminous, all solid state, high contrast, it is flexible the advantages that, become mesh
Preceding most potential New Type Display Devices.Transparent top electrode is inevitably used in top emitting device structure, and it is current
The transparent membrane that can be used as top electrode has that poorly conductive, the IR-drop that high resistance generates directly result in panel
Brightness homogeneity decline influences product quality.To solve the problems, such as IR-drop, as shown in Figure 1, proposing to use on substrate in industry
The metal of low resistance makes auxiliary electrode 72 to alleviate the influence of high resistance top electrode 74.
However at present under the premise of not causing damage to auxiliary electrode and top electrode, auxiliary electrode and top electrode are realized
Connection is more difficult.
Summary of the invention
The present invention provides a kind of making apparatus of OLED display panel, to solve do not causing auxiliary electrode and top electrode
Under the premise of damage, the more difficult technical problem of the connection of auxiliary electrode and top electrode is realized.
To solve the above problems, technical solution provided by the invention is as follows:
A kind of making apparatus of OLED display panel adds including heat-conducting plate and for what is heated to the heat-conducting plate
Heat source；The heat-conducting plate includes plate body and the salient point that is arranged on the plate body, and the salient point is used for OLED display panel
Insulating film layer carry out heating evaporation to expose auxiliary electrode.
Further, thermal insulation layer is coated on side of the plate body far from the heating source.
Further, the heating source is the laser heating source for issuing linear laser, and the laser heating source is equipped with drive
Move its first actuator moved horizontally.
Further, the making apparatus of the OLED display panel further includes coldplate, and the coldplate is used for described
OLED display panel and the heat-conducting plate cool down.
Further, the coldplate is parallel with the heat-conducting plate, also, the coldplate is equipped with driving and moves down thereon
The second dynamic actuator.
Further, the making apparatus of the OLED display panel further includes vacuum chamber, the heat-conducting plate, coldplate with
And heating source is respectively positioned in the vacuum chamber.
The present invention also provides a kind of production methods of OLED display panel, comprising the following steps:
S10, a display device plate is provided；
S20, auxiliary electrode is formed on the display device plate；
S30, the insulating film layer for covering the auxiliary electrode is formed on the display device plate；
S40, display device plate is placed on the heat-conducting plate with salient point, the position of adjustment display device plate makes described lead
Salient point on hot plate is located at predetermined position；
S50, heat-conducting plate is heated using heating source, heating evaporation is carried out to insulating film layer by the salient point, with
Contact hole corresponding with the salient point is formed on insulating film layer and exposes the auxiliary electrode in contact hole；
S60, the top electricity filling the contact hole and connecting with the auxiliary electrode is formed on the insulating film layer
Pole；
S70, luminescent layer and encapsulated layer are formed on top electrode.
Further, after the step S50, also, before the step S60, the production side of the OLED display panel
Method further include:
S80, cooled down using coldplate to the display device plate and the heat-conducting plate.
Further, the heating source is the laser heating source for issuing linear laser, and the laser heating source is equipped with drive
Move its first actuator moved horizontally.
Further, the heat-conducting plate includes plate body and the salient point that is arranged on plate body, and the plate body is far from the heating
Thermal insulation layer is coated on the side in source.
The invention has the benefit that carrying out heating evaporation to the insulating film layer in OLED display panel by salient point to reveal
Auxiliary electrode out re-forms the top electrode connecting with auxiliary electrode, in the premise for not causing damage to auxiliary electrode and top electrode
Under, it contacts auxiliary electrode and top electrode effectively, to eliminate IR-drop caused by top electrode resistance height, promotes display surface
Plate quality, while relative to laser ablation insulating film layer is directly used, the Tact in production process is made by the way of heating evaporation
Time (pitch time) substantially shortens.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of embodiment or technical solution in the prior art
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only some of invention
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the structural schematic diagram of OLED display panel in background of invention；
Fig. 2 is the structural schematic diagram of the making apparatus of OLED display panel in the specific embodiment of the invention；
Fig. 3 is the making step schematic diagram of OLED display panel in the specific embodiment of the invention；
Fig. 4 to Fig. 7 is the production process schematic diagram of OLED display panel in the specific embodiment of the invention.
Appended drawing reference:
10, heat-conducting plate；11, plate body；12, salient point；13, thermal insulation layer；20, heating source；30, coldplate；40, vacuum chamber；
50, the first actuator；60, the second actuator；70, OLED display panel；71, display device plate；72, auxiliary electrode；73, it insulate
Film layer；731, contact hole；74, top electrode；75, luminescent layer；76, encapsulated layer.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention
Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side]
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
The present invention is not causing the premise damaged to auxiliary electrode and top electrode in existing OLED display panel
Under, realize the more difficult technical problem of the connection of auxiliary electrode and top electrode.The present invention can solve the above problem.
A kind of making apparatus of OLED display panel, as shown in Fig. 2, the making apparatus of the OLED display panel includes leading
Hot plate 10 and heating source 20 for being heated to the heat-conducting plate 10.
Wherein, the heat-conducting plate 10 includes plate body 11 and the salient point 12 being arranged on the plate body 11, and the salient point 12 is used
In in OLED display panel 70 insulating film layer 73 carry out heating evaporation to expose auxiliary electrode 72.
Heat-conducting plate 10 is heated, heating steaming is carried out to the insulating film layer 73 in OLED display panel 70 by salient point 12
After hair is to expose auxiliary electrode 72, the top electrode 74 connecting with auxiliary electrode 72 is re-formed, not to auxiliary electrode 72 and top electricity
Under the premise of damage is caused in pole 74, contact auxiliary electrode 72 and top electrode 74 effectively, to eliminate the high institute of 74 resistance of top electrode
The IR-drop of generation promotes display panel quality, while relative to laser ablation insulating film layer 73 is directly used, being steamed using heating
The mode of hair shortens the Tact time (pitch time) in production process substantially.
Specifically, the heating source 20 is the laser heating source for issuing linear laser, the laser heating source is equipped with drive
Move its first actuator 50 moved horizontally.
It should be noted that first actuator 50 can be electric cylinders, cylinder or hydraulic cylinder, the heating source 20 can be with
Transversely and longitudinal movement.By the first actuator 50 drive heating source 20 move horizontally to heat-conducting plate 10 heat, make with it is convex
The insulating film layer 73 of 12 corresponding positions of point evaporates, to expose auxiliary electrode 72, is heated by the way of laser scanning thermally conductive
Plate 10, so that heat-conducting plate 10 be made to be uniformly heated.
Specifically, being coated with thermal insulation layer 13, the thermal insulation layer 13 on side of the plate body 11 far from the heating source 20
Be made material be silica.It prevents from being located at salient point 12 with the insulating film layer 73 at external position by thermal evaporation by thermal insulation layer 13.
Specifically, the making apparatus of the OLED display panel further includes coldplate 30 and vacuum chamber 40, it is described to lead
Hot plate 10, coldplate 30 and heating source 20 are respectively positioned in the vacuum chamber 40.
Wherein, the coldplate 30 is parallel with the heat-conducting plate 10, also, the coldplate 30 is equipped and drives above and below it
The second mobile actuator 60, the coldplate 30 is for dropping the OLED display panel 70 and the heat-conducting plate 10
Temperature.
It should be noted that second actuator 60 is electric cylinders, cylinder or hydraulic cylinder.
Based on the making apparatus of above-mentioned OLED display panel, the present invention also provides a kind of production sides of OLED display panel
Method, as shown in Figure 3, comprising the following steps:
S10, a display device plate 71 is provided；
S20, auxiliary electrode 72 is formed on the display device plate 71；
S30, the insulating film layer 73 for covering the auxiliary electrode 72 is formed on the display device plate 71；
S40, display device plate 71 is placed on the heat-conducting plate 10 with salient point 12, adjusts the position of display device plate 71
The salient point 12 on the heat-conducting plate 10 is set to be located at predetermined position；
S50, heat-conducting plate 10 is heated using heating source 20, insulating film layer 73 is heated by the salient point 12
Evaporation, to form contact hole 731 corresponding with the salient point 12 on insulating film layer 73 and make the auxiliary electrode in contact hole 731
72 expose；
S60, it is formed on the insulating film layer 73 and fills the contact hole 731 and connected with the auxiliary electrode 72
Top electrode 74；
S70, luminescent layer 75 and encapsulated layer 76 are formed on top electrode 74.
By heating evaporation insulating film layer 73 in the way of exposing auxiliary electrode 72, not to auxiliary electrode 72 and top electrode
Under the premise of 74 cause damage, contact auxiliary electrode 72 and top electrode 74 effectively, 74 resistance of top electrode is high to be produced to eliminate
Raw IR-drop promotes display panel quality.
Further, after the step S50, also, before the step S60, the production side of the OLED display panel
Method further include:
S80, cooled down using coldplate 30 to the display device plate 71 and the heat-conducting plate 10.
As shown in figure 4, being formed after forming auxiliary electrode 72 on the display device plate 71 and covering the auxiliary electrode 72
Insulating film layer 73.
As shown in Figure 5 and Figure 6, display device plate 71 is placed on the heat-conducting plate 10 with salient point 12, adjusts display
After the position of part plate 71 makes the salient point 12 on the heat-conducting plate 10 be located at predetermined position, using heating source 20 to heat-conducting plate 10 into
Row heating carries out heating evaporation to insulating film layer 73 by the salient point 12, to be formed and the salient point on insulating film layer 73
12 corresponding contact holes 731 simultaneously expose the auxiliary electrode 72 in contact hole 731.
Wherein, the heating source 20 is the laser heating source 20 for issuing linear laser, and the laser heating source 20 is equipped
Drive the first actuator 50 that it is moved horizontally.
Wherein, the heat-conducting plate 10 includes plate body 11 and the salient point 12 being arranged on plate body 11, and the plate body 11 is far from institute
It states and is coated with thermal insulation layer 13 on the side of heating source 20.
It fills the contact hole 731 as shown in fig. 7, being formed on the insulating film layer 73 and is connect with the auxiliary electrode 72
The top electrode 74 for touching connection forms luminescent layer 75 and encapsulated layer 76 on top electrode 74.
The invention has the benefit that carrying out heating steaming to the insulating film layer 73 in OLED display panel 70 by salient point 12
Hair re-forms the top electrode 74 connecting with auxiliary electrode 72, not to auxiliary electrode 72 and top electrode to expose auxiliary electrode 72
Under the premise of 74 cause damage, contact auxiliary electrode 72 and top electrode 74 effectively, 74 resistance of top electrode is high to be produced to eliminate
Raw IR-drop promotes display panel quality, while relative to laser ablation insulating film layer 73 is directly used, using heating evaporation
Mode shorten the Tact time (pitch time) in production process substantially.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of making apparatus of OLED display panel, which is characterized in that including heat-conducting plate and for the heat-conducting plate into
The heating source of row heating；The heat-conducting plate includes plate body and the salient point that is arranged on the plate body, and the salient point is used for OLED
Insulating film layer on display panel carries out heating evaporation to expose auxiliary electrode.
2. the making apparatus of OLED display panel according to claim 1, which is characterized in that the plate body adds far from described
Thermal insulation layer is coated on the side of heat source.
3. the making apparatus of OLED display panel according to claim 1, which is characterized in that the heating source is to issue line
Property laser laser heating source, the laser heating source is equipped with its first actuator for moving horizontally of driving.
4. the making apparatus of OLED display panel according to claim 1, which is characterized in that the OLED display panel
Making apparatus further includes coldplate, and the coldplate is for cooling down to the OLED display panel and the heat-conducting plate.
5. the making apparatus of OLED display panel according to claim 4, which is characterized in that the coldplate is led with described
Hot plate is parallel, also, the coldplate is equipped with the second actuator for driving it to move up and down.
6. the making apparatus of OLED display panel according to claim 5, which is characterized in that the OLED display panel
Making apparatus further includes vacuum chamber, and the heat-conducting plate, coldplate and heating source are respectively positioned in the vacuum chamber.
7. a kind of production method of OLED display panel, which comprises the following steps:
S10, a display device plate is provided；
S20, auxiliary electrode is formed on the display device plate；
S30, the insulating film layer for covering the auxiliary electrode is formed on the display device plate；
S40, display device plate is placed on the heat-conducting plate with salient point, the position of adjustment display device plate makes the heat-conducting plate
On salient point be located at predetermined position；
S50, heat-conducting plate is heated using heating source, heating evaporation is carried out to insulating film layer by the salient point, exhausted
Contact hole corresponding with the salient point is formed on velum layer and exposes the auxiliary electrode in contact hole；
S60, the top electrode filling the contact hole and connecting with the auxiliary electrode is formed on the insulating film layer；
S70, luminescent layer and encapsulated layer are formed on top electrode.
8. the production method of OLED display panel according to claim 7, which is characterized in that after the step S50, and
And before the step S60, the production method of the OLED display panel further include:
S80, cooled down using coldplate to the display device plate and the heat-conducting plate.
9. the production method of OLED display panel according to claim 7, which is characterized in that the heating source is to issue line
Property laser laser heating source, the laser heating source is equipped with its first actuator for moving horizontally of driving.
10. the production method of OLED display panel according to claim 7, which is characterized in that the heat-conducting plate includes plate
Body and the salient point being arranged on plate body are coated with thermal insulation layer on side of the plate body far from the heating source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910060294.XA CN109817827B (en) | 2019-01-22 | 2019-01-22 | Manufacturing equipment and manufacturing method of OLED display panel |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910060294.XA CN109817827B (en) | 2019-01-22 | 2019-01-22 | Manufacturing equipment and manufacturing method of OLED display panel |
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| CN109817827A true CN109817827A (en) | 2019-05-28 |
| CN109817827B CN109817827B (en) | 2021-01-01 |
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| CN201910060294.XA Active CN109817827B (en) | 2019-01-22 | 2019-01-22 | Manufacturing equipment and manufacturing method of OLED display panel |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110534554A (en) * | 2019-09-12 | 2019-12-03 | 云谷（固安）科技有限公司 | Display panel and display device |
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