CN109817827B - Manufacturing equipment and manufacturing method of OLED display panel - Google Patents
Manufacturing equipment and manufacturing method of OLED display panel Download PDFInfo
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- CN109817827B CN109817827B CN201910060294.XA CN201910060294A CN109817827B CN 109817827 B CN109817827 B CN 109817827B CN 201910060294 A CN201910060294 A CN 201910060294A CN 109817827 B CN109817827 B CN 109817827B
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Abstract
The invention provides a manufacturing device and a manufacturing method of an OLED display panel, wherein the manufacturing device of the OLED display panel comprises a heat conducting plate and a heating source for heating the heat conducting plate; the heat-conducting plate comprises a plate body and salient points arranged on the plate body, and the salient points are used for heating and evaporating an insulating film layer on the OLED display panel to expose the auxiliary electrodes. The auxiliary electrode is exposed by heating and evaporating the insulating film layer on the OLED display panel through the convex points, and then the top electrode connected with the auxiliary electrode is formed, so that the auxiliary electrode is effectively contacted with the top electrode on the premise of not damaging the auxiliary electrode and the top electrode, the IR-drop generated by high resistance of the top electrode is eliminated, and the quality of the display panel is improved.
Description
Technical Field
The invention relates to the technical field of display panels, in particular to a manufacturing device and a manufacturing method of an OLED display panel.
Background
Organic electroluminescent devices (OLEDs) are currently the most promising new display devices due to their advantages of self-luminescence, full solid state, high contrast, flexibility, etc. The transparent top electrode is inevitably used in the structure of the top emitting device, but the transparent films which can be used as the top electrode at present have the problem of poor conductivity, and the IR-drop generated by high resistance directly causes the reduction of the brightness uniformity of the panel and influences the product quality. To solve the IR-drop problem, it is proposed in the industry to make the auxiliary electrode 72 of a low resistance metal on the substrate to mitigate the effect of the high resistance top electrode 74, as shown in fig. 1.
However, it is difficult to connect the auxiliary electrode and the top electrode without damaging the auxiliary electrode and the top electrode.
Disclosure of Invention
The invention provides a manufacturing device of an OLED display panel, which aims to solve the technical problem that the connection of an auxiliary electrode and a top electrode is difficult to realize on the premise of not damaging the auxiliary electrode and the top electrode.
In order to solve the above problems, the technical scheme provided by the invention is as follows:
the manufacturing equipment of the OLED display panel comprises a heat-conducting plate and a heating source for heating the heat-conducting plate; the heat-conducting plate comprises a plate body and salient points arranged on the plate body, and the salient points are used for heating and evaporating an insulating film layer on the OLED display panel to expose the auxiliary electrodes.
Furthermore, a heat insulation layer is coated on one side of the plate body, which is far away from the heating source.
Further, the heating source is a laser heating source which emits linear laser, and the laser heating source is provided with a first driving piece which drives the laser heating source to horizontally move.
Furthermore, the manufacturing equipment of the OLED display panel further comprises a cooling plate, and the cooling plate is used for cooling the OLED display panel and the heat conducting plate.
Further, the cooling plate is parallel to the heat transfer plate, and a second driving member is provided to drive the cooling plate to move up and down.
Furthermore, the OLED display panel's preparation equipment still includes the vacuum chamber, heat-conducting plate, cooling plate and heating source all are located in the vacuum chamber.
The invention also provides a manufacturing method of the OLED display panel, which comprises the following steps:
s10, providing a display device board;
s20, forming an auxiliary electrode on the display device plate;
s30, forming an insulating film layer covering the auxiliary electrode on the display device plate;
s40, placing the display device board on a heat-conducting plate with salient points, and adjusting the position of the display device board to enable the salient points on the heat-conducting plate to be located at preset positions;
s50, heating the heat conducting plate by using a heating source, and heating and evaporating the insulating film layer through the salient points so as to form contact holes corresponding to the salient points on the insulating film layer and expose auxiliary electrodes in the contact holes;
s60, forming a top electrode which fills the contact hole and is in contact connection with the auxiliary electrode on the insulating film layer;
and S70, forming a light-emitting layer and an encapsulation layer on the top electrode.
Further, after the step S50, and before the step S60, the method for manufacturing an OLED display panel further includes:
and S80, cooling the display device plate and the heat conducting plate by using a cooling plate.
Further, the heating source is a laser heating source which emits linear laser, and the laser heating source is provided with a first driving piece which drives the laser heating source to horizontally move.
Further, the heat-conducting plate comprises a plate body and salient points arranged on the plate body, and a heat-insulating layer is coated on one side, far away from the heating source, of the plate body.
The invention has the beneficial effects that: the auxiliary electrode is exposed by heating and evaporating the insulating film layer on the OLED display panel through the convex points, the top electrode connected with the auxiliary electrode is formed, the auxiliary electrode is effectively contacted with the top electrode on the premise of not damaging the auxiliary electrode and the top electrode, so that the IR-drop generated by the high resistance of the top electrode is eliminated, the quality of the display panel is improved, and meanwhile, the insulating film layer is removed by laser directly, and Tact time (takt time) in the production process is greatly shortened by adopting a heating and evaporating mode.
Drawings
In order to illustrate the embodiments or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for a person skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an OLED display panel according to the background art of the present invention;
FIG. 2 is a schematic structural diagram of an apparatus for fabricating an OLED display panel according to an embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating a manufacturing process of an OLED display panel according to an embodiment of the present invention;
fig. 4 to 7 are schematic views illustrating a manufacturing process of an OLED display panel according to an embodiment of the invention.
Reference numerals:
10. a heat conducting plate; 11. a plate body; 12. salient points; 13. a thermal insulation layer; 20. a heating source; 30. a cooling plate; 40. a vacuum chamber; 50. a first driving member; 60. a second driving member; 70. an OLED display panel; 71. a display device panel; 72. an auxiliary electrode; 73. an insulating film layer; 731. a contact hole; 74. a top electrode; 75. a light emitting layer; 76. and (7) packaging the layer.
Detailed Description
The following description of the various embodiments refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
The invention aims at the technical problem that the connection of the auxiliary electrode and the top electrode is difficult to realize on the premise of not damaging the auxiliary electrode and the top electrode in the conventional OLED display panel. The present invention can solve the above problems.
An apparatus for manufacturing an OLED display panel, as shown in fig. 2, includes a heat conducting plate 10 and a heating source 20 for heating the heat conducting plate 10.
The heat conducting plate 10 includes a plate body 11 and bumps 12 disposed on the plate body 11, wherein the bumps 12 are used for heating and evaporating the insulating film 73 on the OLED display panel 70 to expose the auxiliary electrodes 72.
The heat conducting plate 10 is heated, the insulating film 73 on the OLED display panel 70 is heated and evaporated through the salient points 12 to expose the auxiliary electrodes 72, then the top electrodes 74 connected with the auxiliary electrodes 72 are formed, the auxiliary electrodes 72 and the top electrodes 74 are effectively contacted on the premise that the auxiliary electrodes 72 and the top electrodes 74 are not damaged, so that IR-drop generated by high resistance of the top electrodes 74 is eliminated, the quality of the display panel is improved, and meanwhile, compared with the method of directly removing the insulating film 73 by laser, Tact time (takt time) in the production process is greatly shortened by adopting a heating and evaporating mode.
Specifically, the heating source 20 is a laser heating source that emits linear laser light, and the laser heating source is provided with a first driving member 50 that drives the laser heating source to move horizontally.
It should be noted that the first driving member 50 can be an electric cylinder, an air cylinder or a hydraulic cylinder, and the heating source 20 can move along the transverse direction and the longitudinal direction. The heat source 20 is driven by the first driving member 50 to move horizontally to heat the heat conducting plate 10, so that the insulating film 73 at the position corresponding to the salient point 12 is evaporated, thereby exposing the auxiliary electrode 72, and the heat conducting plate 10 is heated by adopting a laser scanning mode, thereby enabling the heat conducting plate 10 to be heated more uniformly.
Specifically, a heat insulation layer 13 is coated on one side of the plate body 11 away from the heating source 20, and the heat insulation layer 13 is made of silicon oxide. The insulating film layer 73 at a position other than the bump 12 is prevented from being thermally evaporated by the insulating layer 13.
Specifically, the manufacturing equipment of the OLED display panel further comprises a cooling plate 30 and a vacuum chamber 40, wherein the heat conducting plate 10, the cooling plate 30 and the heating source 20 are all located in the vacuum chamber 40.
The cooling plate 30 is parallel to the heat conducting plate 10, and the cooling plate 30 is provided with a second driving member 60 for driving the cooling plate 30 to move up and down, and the cooling plate 30 is used for cooling the OLED display panel 70 and the heat conducting plate 10.
It should be noted that the second driving member 60 is an electric cylinder, an air cylinder or a hydraulic cylinder.
Based on the manufacturing equipment of the OLED display panel, the invention further provides a manufacturing method of the OLED display panel, as shown in fig. 3, including the following steps:
s10, providing a display device board 71;
s20, forming an auxiliary electrode 72 on the display device board 71;
s30, forming an insulating film 73 on the display device board 71 to cover the auxiliary electrode 72;
s40, placing the display device plate 71 on the heat-conducting plate 10 with the salient points 12, and adjusting the position of the display device plate 71 to enable the salient points 12 on the heat-conducting plate 10 to be located at preset positions;
s50, heating the heat conducting plate 10 by the heat source 20, and heating and evaporating the insulating film 73 through the bump 12 to form a contact hole 731 corresponding to the bump 12 on the insulating film 73 and expose the auxiliary electrode 72 in the contact hole 731;
s60, forming a top electrode 74 on the insulating film layer 73, filling the contact hole 731, and contacting the auxiliary electrode 72;
s70, forming a light emitting layer 75 and an encapsulation layer 76 on the top electrode 74.
By heating and evaporating the insulating film 73 to expose the auxiliary electrode 72, the auxiliary electrode 72 is effectively contacted with the top electrode 74 without damaging the auxiliary electrode 72 and the top electrode 74, so that IR-drop caused by high resistance of the top electrode 74 is eliminated, and the quality of the display panel is improved.
Further, after the step S50, and before the step S60, the method for manufacturing an OLED display panel further includes:
s80, cooling the display device plate 71 and the heat conductive plate 10 by using the cooling plate 30.
As shown in fig. 4, after forming an auxiliary electrode 72 on the display device board 71, an insulating film layer 73 is formed to cover the auxiliary electrode 72.
As shown in fig. 5 and 6, after the display device plate 71 is placed on the heat conducting plate 10 with the bumps 12, the position of the display device plate 71 is adjusted so that the bumps 12 on the heat conducting plate 10 are located at the predetermined positions, the heat conducting plate 10 is heated by the heat source 20, and the insulating film 73 is heated and evaporated by the bumps 12, so that the contact holes 731 corresponding to the bumps 12 are formed on the insulating film 73 and the auxiliary electrodes 72 in the contact holes 731 are exposed.
The heating source 20 is a laser heating source 20 that emits linear laser light, and the laser heating source 20 is provided with a first driving member 50 that drives the laser heating source to move horizontally.
The heat conducting plate 10 comprises a plate body 11 and bumps 12 arranged on the plate body 11, and a heat insulating layer 13 is coated on one side of the plate body 11, which is far away from the heating source 20.
As shown in fig. 7, a top electrode 74 filling the contact hole 731 and contacting the auxiliary electrode 72 is formed on the insulating film layer 73, and a light emitting layer 75 and an encapsulation layer 76 are formed on the top electrode 74.
The invention has the beneficial effects that: the insulating film 73 on the OLED display panel 70 is heated and evaporated through the salient points 12 to expose the auxiliary electrodes 72, then the top electrodes 74 connected with the auxiliary electrodes 72 are formed, and the auxiliary electrodes 72 and the top electrodes 74 are effectively contacted on the premise that the auxiliary electrodes 72 and the top electrodes 74 are not damaged, so that IR-drop generated by high resistance of the top electrodes 74 is eliminated, the quality of the display panel is improved, meanwhile, compared with the method of directly removing the insulating film 73 by laser, Tact time (takt time) in the production process is greatly shortened by adopting a heating and evaporating mode.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (8)
1. The manufacturing equipment of the OLED display panel is characterized by comprising a heat-conducting plate and a heating source for heating the heat-conducting plate; the heat conducting plate comprises a plate body and salient points arranged on the plate body, and the salient points are used for heating and evaporating an insulating film layer on the OLED display panel to expose the auxiliary electrodes;
the heating source is arranged on one side of the plate body, which is far away from the salient points, the heating source is a laser heating source which emits linear laser, and the laser heating source is provided with a first driving piece which drives the laser heating source to horizontally move; and a heat insulation layer is coated on one side of the plate body, which is far away from the heating source.
2. The manufacturing apparatus of the OLED display panel according to claim 1, further comprising a cooling plate for cooling the OLED display panel and the heat conducting plate.
3. The apparatus for manufacturing an OLED display panel according to claim 2, wherein the cooling plate is parallel to the heat conductive plate, and the cooling plate is provided with a second driving member for driving the cooling plate to move up and down.
4. The apparatus of claim 3, further comprising a vacuum chamber, wherein the thermal conductive plate, the cooling plate, and the heating source are located in the vacuum chamber.
5. The manufacturing method of the OLED display panel is characterized by comprising the following steps of:
s10, providing a display device board;
s20, forming an auxiliary electrode on the display device plate;
s30, forming an insulating film layer covering the auxiliary electrode on the display device plate;
s40, placing the display device board on a heat-conducting plate with salient points, and adjusting the position of the display device board to enable the salient points on the heat-conducting plate to be located at preset positions;
s50, heating the heat conducting plate by using a heating source, and heating and evaporating the insulating film layer through the salient points so as to form contact holes corresponding to the salient points on the insulating film layer and expose auxiliary electrodes in the contact holes;
s60, forming a top electrode which fills the contact hole and is in contact connection with the auxiliary electrode on the insulating film layer;
and S70, forming a light-emitting layer and an encapsulation layer on the top electrode.
6. The method for fabricating the OLED display panel according to claim 5, wherein after the step S50 and before the step S60, the method further comprises:
and S80, cooling the display device plate and the heat conducting plate by using a cooling plate.
7. The method of manufacturing an OLED display panel according to claim 5, wherein the heating source is a laser heating source emitting linear laser light, and the laser heating source is provided with a first driving member driving the laser heating source to move horizontally.
8. The method as claimed in claim 5, wherein the heat conducting plate comprises a plate body and a bump disposed on the plate body, the heat source is disposed on a side of the plate body away from the bump, and a thermal insulation layer is coated on a side of the plate body away from the heat source.
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| CN201910060294.XA CN109817827B (en) | 2019-01-22 | 2019-01-22 | Manufacturing equipment and manufacturing method of OLED display panel |
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| CN201910060294.XA CN109817827B (en) | 2019-01-22 | 2019-01-22 | Manufacturing equipment and manufacturing method of OLED display panel |
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| CN109817827B true CN109817827B (en) | 2021-01-01 |
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| JP4433722B2 (en) * | 2003-08-12 | 2010-03-17 | セイコーエプソン株式会社 | Pattern forming method and wiring pattern forming method |
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| KR100686075B1 (en) * | 2005-02-22 | 2007-02-26 | 엘지전자 주식회사 | Active Matrix Organic Electroluminescence Display Device for Top Emission Type and Method for Fabricating the Same |
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