CN109814082A - Optical receiver module and laser radar system - Google Patents

Optical receiver module and laser radar system Download PDF

Info

Publication number
CN109814082A
CN109814082A CN201910055848.7A CN201910055848A CN109814082A CN 109814082 A CN109814082 A CN 109814082A CN 201910055848 A CN201910055848 A CN 201910055848A CN 109814082 A CN109814082 A CN 109814082A
Authority
CN
China
Prior art keywords
light
optical
absorption
reflecting mirror
type substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910055848.7A
Other languages
Chinese (zh)
Other versions
CN109814082B (en
Inventor
杨金涛
向少卿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hesai Photonics Technology Co Ltd
Original Assignee
Hesai Photonics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hesai Photonics Technology Co Ltd filed Critical Hesai Photonics Technology Co Ltd
Priority to CN201910055848.7A priority Critical patent/CN109814082B/en
Publication of CN109814082A publication Critical patent/CN109814082A/en
Application granted granted Critical
Publication of CN109814082B publication Critical patent/CN109814082B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The present invention provides a kind of optical receiver module and laser radar system, the optical receiver module includes: the optical transport submodule and detection submodule set gradually along receiving light path;The optical transport submodule is suitable for receiving, filtering and transmitting beam, the light beam include signal light;And the detection submodule, suitable for receiving and detecting the light beam of the optical transport submodule transmission;Wherein, the optical transport submodule and/or the detection submodule include absorption-type substrate, and the absorption-type substrate is suitable for absorbing the light of the default wave band other than at least described signal light wavelength range.The laser radar system includes: optical transmitter module, suitable for outwardly emitting detection laser beam;And the optical receiver module, suitable for receiving and detecting by the extraneous echo-signal for reflecting the laser beam that the detection laser beam is formed.The optical receiver module and laser radar system of the embodiment of the present invention are able to suppress environment light, improve the intensity of wide-angle oblique incidence signal light, improve signal-to-noise ratio.

Description

Optical receiver module and laser radar system
Technical field
The present invention relates to technical field of laser detection more particularly to a kind of optical receiver modules and laser radar system.
Background technique
Laser radar is a kind of advanced detection mode for combining laser technology with detecting technique.Laser radar because Its high resolution, good concealment, active jamming rejection ability are strong, low-altitude detection performance is good, the small in size and advantages such as light-weight, wide It is general to be applied to the fields such as automatic Pilot, traffic communication, unmanned plane, intelligent robot, energy security detection, resource exploration.
The quality of data of laser radar is to measure a major criterion of its performance height.The data of laser radar will receive The influence of environment light, in order to inhibit environment light, existing laser radar system usually using transmission-type spike interference filter, However this scheme can bring some problems, such as the transmitance of transmission-type interferometric filter to be influenced big, big angle by incidence angle The transmitance for spending incident signal light can be very low, causes laser radar not receive the signal of large angle incidence, unless relaxing The transmitance bandwidth of formula interferometric filter is penetrated, but this will increase the influence of environment light again.
Therefore, how reducing the influence to signal light as much as possible while inhibiting environment light, improving signal-to-noise ratio is mesh Urgent problem to be solved in preceding laser radar application.
Summary of the invention
Present invention solves the technical problem that being environment light, the raising signal-to-noise ratio how inhibited in laser radar application.
In order to solve the above technical problems, the embodiment of the present invention provides a kind of optical receiver module, comprising: successively along receiving light path The optical transport submodule and detection submodule of setting;The optical transport submodule is suitable for reception, filtering and transmitting beam, institute Stating light beam includes signal light;And the detection submodule, suitable for receiving and detecting the light beam of the optical transport submodule transmission; Wherein, the optical transport submodule and/or the detection submodule include absorption-type substrate, and the absorption-type substrate is suitable for absorbing The light of default wave band other than at least described signal light wavelength range.
Optionally, the optical transport submodule includes the optical filter set gradually along the receiving light path and at least one Piece reflecting mirror;The optical filter includes the absorption-type substrate and is plated in the absorption-type substrate and the signal light wavelength Corresponding anti-reflection film, wherein the absorption-type substrate is suitable for transmiting the signal light and absorbs the signal light wavelength range The light of default wave band in addition;At least a piece of reflecting mirror is suitable for reflecting the signal light.
Optionally, the optical transport submodule includes at least a piece of reflecting mirror set gradually along the receiving light path, institute Stating at least a piece of reflecting mirror includes the reflection on the absorption-type substrate and the light incident surface for being plated on the absorption-type substrate Film;The reflectance coating of at least a piece of reflecting mirror is suitable for increasing the reflectivity of the signal light, at least a piece of reflecting mirror The absorption-type substrate is suitable for absorbing the light of the default wave band other than at least described signal light wavelength range.
Optionally, the optical transport submodule further include: optical filter, be set on the receiving light path and be located at it is described extremely The optical path upstream of few a piece of reflecting mirror, the optical filter include the absorption-type substrate and be plated in the absorption-type substrate with The corresponding anti-reflection film of the signal light wavelength, wherein the absorption-type substrate is suitable for transmiting the signal light and described in absorbing The light of default wave band other than signal light wavelength range.
Optionally, the optical transport submodule includes that the first reflecting mirror set gradually along the receiving light path and second are anti- Penetrate mirror.
Optionally, the light of the default wave band other than the signal light wavelength range includes that the detection submodule is able to respond Environment light.
Optionally, the absorption-type substrate of the optical filter be suitable for absorbing wavelength be 350nm to 850nm light and thoroughly The near-infrared and infrared light of a length of 850nm or more of ejected wave, and be coated in the absorption-type substrate of the optical filter and be suitable for increasing Wavelength is the anti-reflection film of the transmitance of the light of 875nm to 940nm.
Optionally, the optical transport submodule further includes focus lens group, and the optical filter is set to the condenser lens The optical path upstream or downstream of group, or be set between the lens that the focus lens group includes.
Optionally, the reflectivity for increasing the light of first band is coated in the absorption-type substrate of first reflecting mirror Reflectance coating is coated with the reflectance coating for increasing the reflectivity of light of second band in the absorption-type substrate of second reflecting mirror, The first band is overlapped in the wave-length coverage of the signal light with the second band.
Optionally, the first band is 875nm to 1100nm, and the second band is 350nm to 940nm;Or institute Stating first band is 350nm to 940nm, and the second band is 875nm to 1100nm.
Optionally, the absorption-type substrate of the absorption-type substrate of first reflecting mirror and second reflecting mirror It is adapted to absorb the light of 350nm to 1100nm.
Optionally, which is characterized in that the detection submodule includes array hole diaphragm and the detection with absorption-type substrate Device array;Each detector position on the array hole diaphragm corresponding to the detector array is provided with multiple through-holes, described Other than the substrate of array hole diaphragm is suitable for absorption and the signal light with the environment light of frequency range and the signal light wavelength range The light of default wave band, the light incident surface of the substrate of the array hole diaphragm are coated with comprising the wave band including the signal light wavelength Anti-reflection film.
Optionally, the substrate of the array hole diaphragm is suitable for absorbing the light of 350nm to 1100nm, the array hole diaphragm The light incident surface of substrate is coated with the anti-reflection film of 600nm to 1000nm.
Correspondingly, the embodiment of the present invention also provides a kind of laser radar system, including optical transmitter module, suitable for outwardly sending out Penetrate detection laser beam;And the optical receiver module, the optical receiver module, which is suitable for receiving and detecting, reflects the inspection by the external world Survey the echo-signal for the laser beam that laser beam is formed.
Compared with prior art, the technical solution of the embodiment of the present invention has the advantages that
The optical receiver module of the embodiment of the present invention includes optical transport submodule and detection submodule, due to optical transport Module and/or the detection submodule include absorption-type substrate, and the absorption-type substrate is suitable for absorbing at least described signal light-wave The light of default wave band other than long range, it is thus possible to weaken influence of the reception light of non-signal optical band to signal light, enhance To the inhibitory effect of environment light.
Further, the optical transport submodule includes the optical filter set gradually along receiving light path and two reflecting mirrors, The optical filter includes the anti-reflection film of absorption-type substrate and plating on the substrate, and the substrate is suitable for absorbing non-signal optical band Environment light, the anti-reflection film be suitable for increase signal light transmissivity, it is thus possible to improve signal-to-noise ratio;Due to the anti-reflection film Film layer is relatively thin, influenced by angle of incidence of light it is little, thus the transmittance curve of the optical filter blue shift degree reduce;This Outside, since reflecting mirror has shared big incident angle, cause the change of incident angle on each reflecting mirror little, incident angle pair The influence of the reflectance curve of reflecting mirror reduces, and " blue shift " phenomenon of reflectance curve weakens.Therefore, the light of the embodiment of the present invention The intensity that receiving module is able to suppress environment light, improves wide-angle oblique incidence signal light, to improve signal-to-noise ratio.
Further, the optical transport submodule includes two reflecting mirrors set gradually along receiving light path, described two Reflecting mirror includes the reflectance coating on absorption-type substrate and the light incident surface for being plated on the substrate, due to the reflectance coating energy Enough increase the reflectivity of signal light, and the substrate can absorb the environment light of non-signal optical band, thus only signal light with And enough there is biggish reflectivity to be reflected by described two reflecting mirrors with the ambient light energy of frequency range with signal light.It is described two that there is suction The reflecting mirror of receipts type substrate has reached the performance of optical filter, enhances the inhibition to the environment light of non-signal optical band, improves The intensity of wide-angle oblique incidence signal light, to improve signal-to-noise ratio.
Further, the optical transport submodule includes the optical filtering with absorption-type substrate set gradually along receiving light path Piece and two reflecting mirrors with absorption-type substrate, the optical filter further includes the anti-reflection film of plating on its substrate, described two Reflecting mirror further includes plating reflectance coating on its substrate, i.e., the reception light of the described optical receiver module respectively through the optical filter and Being filtered for multiple times for two reflecting mirrors, inhibits the environment light of non-signal optical band to a greater degree, improves wide-angle oblique incidence The intensity of signal light, to improve signal-to-noise ratio.
Further, the detection submodule includes the array hole diaphragm and detector array with absorption-type substrate, institute It states the position on array hole diaphragm corresponding to the detector array and is provided with multiple through-holes, the signal being emitted from two reflecting mirrors Light and array hole diaphragm can be passed through with the light in the environment light of frequency range only in the detector field of view with signal light Through-hole, into detector, the base material that other light then enter array hole diaphragm is absorbed, thus is further enhanced to environment The inhibition of light, improves signal-to-noise ratio;Further, since being coated with anti-reflection film in the substrate of the array hole diaphragm, reduces light and be situated between Then plasma membrane surfaces reflection enters a possibility that detector in receiving cavity after multiple reflections, thus weaken the influence of environment light, " dark " environment is formed in optical receiver cavity, reduces the difference of the optical receiver module whole day (daytime and night) performance.
The laser radar system of the embodiment of the present invention includes optical transmitter module and the optical receiver module, since the light connects It receives module and is able to suppress environment light, improve the intensity of wide-angle oblique incidence signal light, improve signal-to-noise ratio, thus the laser radar The quality of data of system is significantly promoted, and the difference of laser radar system whole day (the daytime and night) performance reduces.
Detailed description of the invention
Fig. 1 is a kind of transmittance curve of interferometric filter with incidence angle variation diagram;
Fig. 2 is a kind of laser radar line number distribution map schematic diagram;
Fig. 3 is the structural schematic diagram of the laser radar system 10 of one embodiment of the invention;
Fig. 4 is the structural schematic diagram of the array hole diaphragm 124a of one embodiment of the invention;
Fig. 5 is the structural schematic diagram of the laser radar system 20 of another embodiment of the present invention;
Fig. 6 is the structural schematic diagram of the laser radar system 30 of another embodiment of the present invention.
Specific embodiment
It is understandable to enable above-mentioned purpose of the invention, feature and beneficial effect to become apparent, with reference to the accompanying drawing to this The specific embodiment of invention is described in detail.Each embodiment in this specification is described in a progressive manner, each implementation What example stressed is the difference from other embodiments, and same or similar part refers to each other i.e. between each embodiment It can.
As stated in the background art, existing transmission-type interferometric filter is for inhibiting environment light that can have some problems.Ginseng Fig. 1 is examined, Fig. 1 is a kind of transmittance curve of interferometric filter with incidence angle variation diagram, and specifically respectively illustrating incidence angle is 6 The transmittance curve of interferometric filter when degree, 20 degree, 30 degree, 40 degree.As shown in Figure 1, the transmitance of the interferometric filter is bent Line is mobile to shortwave length direction with the increase of incident angle.The problem of this characteristic causes is: when laser radar works, by It is increased in temperature, the wavelength of laser will increase i.e. generation " red shift ".Particularly, for multi-thread (multi-laser) laser radar, Lesser volume is unfavorable for radiating, and warming phenomenon is more obvious.As shown in Fig. 2, being a kind of laser radar line number distribution map signal Figure, after the wavelength increase of laser, large angle incidence light corresponds to laser radar and is emitted to the nearby harness on ground or outgoing To top visual field harness reach transmission-type interferometric filter when, transmitance can become very low, cause detector that may receive not To signal, unless increase the transmitance bandwidth of transmissive filter, but this will increase the influence of environment light again.
In order to effectively inhibit environment light, the intensity for improving wide-angle oblique incidence signal light and then improve signal-to-noise ratio, this hair It includes: successively to set along receiving light path that bright embodiment, which provides a kind of optical receiver module and laser radar system, the optical receiver module, The optical transport submodule and detection submodule set;The optical transport submodule is suitable for reception, filtering and transmitting beam, the light Beam includes signal light;And the detection submodule is suitable for receiving and detecting the light beam of the optical transport submodule transmission;Wherein, The optical transport submodule and/or the detection submodule include absorption-type substrate, and the absorption-type substrate is suitable for absorbing at least The light of default wave band other than the signal light wavelength range.The laser radar system includes that optical transmitter module and the light connect Receive module, the optical transmitter module is suitable for outwardly emitting detection laser beam, the optical receiver module be suitable for receiving and detecting by The echo-signal for the laser beam that the detection laser beam is formed is reflected in the external world.
To more fully understand those skilled in the art and implementing the present invention, with reference to the accompanying drawing to the embodiment of the present invention The structure of optical receiver module and laser radar system is described in detail.
It is the structural schematic diagram of the laser radar system 10 of one embodiment of the invention in conjunction with reference Fig. 3, Fig. 3.It is described to swash Optical detection and ranging system 10 includes:
Rotor and stator, the internal rotor are isolated into emission cavity 11 and receiving cavity 12, the emission cavity 11 and described Receiving cavity 12 is isolated by partition 13, and the rotor and stator are the state of the art, and details are not described herein again.
Optical transmitter module is set in the emission cavity 11, suitable for outwardly emitting detection laser beam.In some embodiments In, the optical transmitter module includes laser 111, front mirror 112, back mirror 113 and light outgoing device 114.It is described to swash Light device 111 can be the multiple lasers arranged in array, and the light outgoing device 114 can be collimation lens (group).Institute The detection laser beam for stating the sending of laser 111 successively passes through the front-reflection 112 and the reflection of back mirror 113 and described Light is emitted the transmissive illumination of device 114 to extraneous.
Optical receiver module, is set in the receiving cavity 12, reflects the detection by foreign objects 18 suitable for receiving and detecting The echo-signal for the laser beam that laser beam is formed.In some embodiments, the optical receiver module may include: along receiving light path The optical transport submodule and detection submodule 124 set gradually, the optical transport submodule are suitable for receiving, filter and transmit light Beam, the light beam may include signal light and environment light, and the detection submodule 124 is suitable for receiving and detecting optical transport The light beam of module transfer.
In some embodiments, the optical transport submodule may include the optical filter set gradually along the receiving light path 121, the first reflecting mirror 122 and the second reflecting mirror 123.Wherein, the optical filter 121 may include absorption-type substrate and be plated in Anti-reflection film corresponding with the signal light wavelength in the absorption-type substrate, the absorption-type substrate are suitable for transmiting the signal Light and the light for absorbing the default wave band other than the signal light wavelength range, the anti-reflection film are suitable for increasing the signal light Transmissivity;First reflecting mirror 122 and the second reflecting mirror 123 are suitable for reflecting the signal light.
In some embodiments, the signal light can be the detection laser beam of the transmitting of laser radar system 10 through institute The echo-signal of the laser beam formed after foreign objects 18 reflect is stated, the light of the default wave band other than the signal light wavelength range can To include the environment light for detecting submodule and being able to respond.Such as: the detection submodule 124 non-signal light that can be detected The environment light of wave band.
Specifically, the base material of the optical filter 121 may be adapted to absorbing wavelength be 350nm to 850nm light and Transmission peak wavelength is the near-infrared and infrared light of 850nm or more, can also be coated in the substrate of the optical filter and be suitable for increasing wavelength For the anti-reflection film of the transmitance of the light of 875nm to 940nm, the substrate of the optical filter 121 can be coloured glass or plastics filter Mating plate;The substrate of first reflecting mirror 122 and the second reflecting mirror 123 can be common material, such as K9 optical glass or floating The substrate of method glass, i.e., described first reflecting mirror 122 and the second reflecting mirror 123 is without absorbent properties, 122 He of the first reflecting mirror Reflectance coating corresponding with the signal light wavelength can be coated on the light incident surface of second reflecting mirror 123, the reflectance coating is suitable for Increase the reflectivity of the signal light.
In some embodiments, the optical receiver module can also include receiving camera lens 125, and the reception camera lens 125 can To include focus lens group, the optical filter 121 be can be set in the optical path upstream of the focus lens group or downstream, or set It is placed between the lens that the focus lens group includes.
In some embodiments, the detection submodule 124 may include the array hole diaphragm with absorption-type substrate 124a and detector array 124b.
It is the knot of the array hole diaphragm 124a of the detection submodule 124 of one embodiment of the invention in conjunction with reference Fig. 4, Fig. 4 Structure schematic diagram.Corresponding on each detector position of the detector array 124b on the array hole diaphragm 124a can be set There are multiple through-holes 1241, the substrate of the array hole diaphragm 124a may be adapted to absorb other than at least described signal light wavelength range Default wave band light.
In some embodiments, the laser radar system 10 can be configured as: signal light passes through the reception camera lens 125 focus to the detector array 124b, then the substrate of the array hole diaphragm 124a may be adapted to absorb and the signal Light of the light with the default wave band other than the environment light of frequency range and the signal light wavelength range.In this way by the array hole light Late 124a is placed in the optical path upstream of the detector array 124b, can further filter out the environment light of the signal optical frequencies.
In some embodiments, it is also coated on the light incident surface of the substrate of the array hole diaphragm 124a comprising the signal The anti-reflection film of wave band including optical wavelength.
Specifically, the substrate of the array hole diaphragm 124a may be adapted to the light for absorbing 350nm to 1100nm, the array The light incident surface of the substrate of hole diaphragm 124a is coated with the anti-reflection film of 600nm to 1000nm.
In some embodiments, the through-hole 1241 on the array hole diaphragm 124a can use laser processing or computer numerical controlled The mode of (Computer Numerical Control, CNC) processing is formed.
It should be noted that with incidence angle blue shift can occur for the transmitance or reflectance curve of deielectric-coating, film layer number is more, Blue-shifted phenomenon is more obvious.Existing transmission-type interferometric filter because film layer is thicker, transmitance influenced by angle of incidence of light it is big, And the film layer of the anti-reflection film on the optical filter 121 of the embodiment of the present invention and the anti-reflection film on the array hole diaphragm 124a is equal Relatively thin, transmitance is influenced little, i.e., the transmitance song of the described optical filter 121 and array hole diaphragm 124a by angle of incidence of light The blue shift degree of line reduces, to improve the intensity of wide-angle oblique incidence signal light.
Here to the light-receiving of the laser radar system 10 by taking wave-length coverage is the signal light of 875nm to 940nm as an example The course of work of module is illustrated:
By the reception camera lens 125, medium wavelength is less than for the optical receiver module received signal light and environment light The light of 850nm can be absorbed by the absorption-type substrate of the optical filter 121, and light of the wavelength greater than 850nm is transmissive to the filter Mating plate 121, in this section the signal light of transmitted light medium wave a length of 875nm to 940nm and with the signal light with the environment of frequency range Light transmitance with higher, then institute is reached after first reflecting mirror 122 and second reflecting mirror 123 reflection respectively State detection submodule 124 array hole diaphragm 124a, wherein only signal light and be located at the detector array 124b visual field in Enough pass through the through-hole 1241 on the array hole diaphragm 124a with the ambient light energy of frequency range with the signal light, into the spy Device array 124b is surveyed, the substrate of other light then incident array hole diaphragm 124a is absorbed.The optical receiver module is received Signal light and environment light pass through the multiple absorption of the optical filter 121 and the array hole diaphragm 124a, it is suppressed that environment light mentions High signal-to-noise ratio.
Due to being also coated with anti-reflection film in the substrate of the array hole diaphragm 124a, light can reduce in the array hole diaphragm Then 124a surface reflection enters a possibility that detector array 124b in the receiving cavity 12 after multiple reflections, i.e., The stray light for entering the detector array 124b after elimination multiple reflections, forms " dark " ring in the receiving cavity 12 Border reduces the influence of environment light, reduces the difference of the optical receiver module whole day (daytime and night) performance.
In addition, first reflecting mirror 122 and the second reflecting mirror 123 have shared big incident angle, lead to each reflection The change of incident angle is little on mirror, and " blue shift " phenomenon of reflectance curve weakens, to improve wide-angle oblique incidence signal The intensity of light, it helps improve signal-to-noise ratio.It can be with about this point for example: the inspection that the laser radar system 10 emits The incident light that laser beam returns to 0 degree to 25 degree after the foreign objects 18 reflection is surveyed, according to calculating in first reflecting mirror 122 The incidence angle of 45 degree to 51 degree of upper correspondence, corresponding 39 degree to 45 degree of the incidence angle on second reflecting mirror 123 are that is, each anti- The angle change for penetrating incident light on mirror reduces, and influence of the angle of incidence of light to the reflectance curve of reflecting mirror reduces, reflectivity " blue shift " of curve is reduced.Therefore, even if temperature raising leads to laser when the laser radar system 10 is due to work Wavelength increases, and the intensity of wide-angle oblique incidence signal light will not reduce, and avoids hot spot deterioration.
In some embodiments, the detector array 124b can be photoelectric sensor.The photoelectric sensor is suitable for Its received optical signal is converted into electric signal.Specifically, the photoelectric sensor can be PIN photoelectric sensor, snowslide light Electric diode (Avalanche Photo Diode, APD) or geiger mode avalanche photodiodes (Geiger-mode Avalanche Photodiode, GM-APD) etc..
In some embodiments, the laser radar system 10 can also include processing module, be suitable for handling the detection The electric signal that submodule 124b is detected, and the information of the foreign objects 18 is obtained by the programs such as calculating.The foreign objects 18 Information can be its position, shape or speed etc..
It is the structural schematic diagram of the laser radar system 20 of another embodiment of the present invention with reference to Fig. 5, Fig. 5.The present embodiment Laser radar system 20 also includes: rotor and stator, and the internal rotor is isolated into emission cavity 21 and receiving cavity 22;Light emitting Module is set in the emission cavity 21;Optical receiver module is set in the receiving cavity 22.The structure and function of each module It can refer to previous embodiment, details are not described herein again.Here only the difference of the present embodiment and previous embodiment is described in detail.
The difference of the present embodiment and embodiment illustrated in fig. 3 is: first reflecting mirror 222 and second reflecting mirror 223 further include absorption-type substrate, and reflectance coating is coated on the light incident surface of the absorption-type substrate, first reflecting mirror 222 Substrate and the substrate of second reflecting mirror 223 are adapted to absorb the default wave band other than at least described signal light wavelength range The reflectance coating of light, the reflectance coating of first reflecting mirror 222 and second reflecting mirror 223 is adapted to increase the signal light Reflectivity.
In some embodiments, the substrate of first reflecting mirror 222 and the substrate of second reflecting mirror 223 can be equal Suitable for absorbing the light of the default wave band other than the signal light and the signal light wavelength range, so that the non-letter The reception light of number optical band can pass through the absorption twice of described two reflecting mirrors 222 and 223, and the effect of environment light is inhibited to be able to Enhancing;The reflectance coating for being suitable for reflecting first band, second reflecting mirror can be coated in the substrate of first reflecting mirror 222 The reflectance coating for being suitable for reflecting second band can be coated in 223 substrate, the first band and the second band can be It is overlapped in the wave-length coverage of the signal light.Specifically, the wave-length coverage of the signal light is 875nm to 940nm, described first Wave band is overlapped with the second band in 875nm to 940nm.
In some embodiments, the substrate material of the base material of first reflecting mirror 222 and second reflecting mirror 223 Material can be adapted to the light that absorbing wavelength is 350nm to 1100nm, can be coated with and be suitable in the substrate of first reflecting mirror 222 Increase the reflectance coating of the reflectivity for the light that wavelength is 875nm to 1100nm, can be coated in the substrate of second reflecting mirror 223 Suitable for increasing the reflectance coating of the reflectivity for the light that wavelength is 350nm to 940nm.
In other embodiments, the base material of first reflecting mirror 222 may be adapted to absorbing wavelength be 350nm extremely The light of 875nm, the base material of second reflecting mirror 223 may be adapted to the light that absorbing wavelength is 940nm to 1100nm, described The reflectance coating for being suitable for increasing the reflectivity for the light that wavelength is 875nm to 1100nm can be coated in the substrate of first reflecting mirror 222, The reflection for being suitable for increasing the reflectivity for the light that wavelength is 350nm to 940nm can be coated in the substrate of second reflecting mirror 223 Film.
Here to the laser radar system 20 of the present embodiment still by taking wave-length coverage is the signal light of 875nm to 940nm as an example The course of work of optical receiver module be described as follows:
The optical receiver module received signal light and environment light are by receiving camera lens 225, and medium wavelength is less than 850nm's Light can be absorbed by the optical filter 221, and light of the wavelength greater than 850nm is transmissive to the optical filter 221, in this section transmitted light It the signal light of medium wave a length of 875nm to 940nm and is reached with the signal light with the environment light transmitance with higher of frequency range First reflecting mirror 222, light of the medium wavelength less than 875nm is on first reflecting mirror 222 because having lower reflection Rate, the base material into the first reflecting mirror 222 are absorbed, and light of the wavelength greater than 940nm has on second reflecting mirror 223 There is lower reflectivity, the base material into second reflecting mirror 223 is absorbed, therefore only wavelength is 875nm- The signal light of 940nm and with the signal light with frequency range environment light due to biggish reflectivity by first reflecting mirror 222 and second reflecting mirror 223 reflection, reach it is described detection submodule 224 array hole diaphragm 224a;Wherein, only Signal light and enough passing through with the signal light with the ambient light energy of frequency range in the detector array 224b visual field are described Through-hole on array hole diaphragm 224a, into the detector array 224b, other light then enter the array hole diaphragm 224a Substrate be absorbed.In the present embodiment, the light that the optical receiver module receives passes through the optical filter 221, two instead respectively Being filtered for multiple times for mirror 222 and 223 and the respective absorption-type substrate of array hole diaphragm 224a is penetrated, inhibits environment to a greater degree Light improves signal-to-noise ratio.
Further, since being also coated with anti-reflection film in the substrate of the array hole diaphragm 224a, light can reduce in the array The stray light for entering the detector array 224b after multiple reflections is eliminated in the reflection on the hole surface diaphragm 224a, in the reception " dark " environment is formed in chamber 22, is reduced the influence of environment light, is reduced the optical receiver module whole day (daytime and night) The difference of performance;Also, since first reflecting mirror 222 and the second reflecting mirror 223 have shared big incident angle, cause every The change of incident angle is little on a reflecting mirror, and influence of the incident angle to reflectance curve reduces, " the indigo plant of reflectance curve Move " phenomenon decrease, to improve the intensity of wide-angle oblique incidence signal light, it helps improve signal-to-noise ratio.
The present invention be not limited in more than embodiment, in some embodiments, the substrate material of first reflecting mirror 222 Expect that the light that absorbing wavelength is 350nm to 1100nm can be adapted to the base material of second reflecting mirror 223, described first The reflectance coating for being suitable for increasing the reflectivity for the light that wavelength is 350nm to 940nm can also be coated in the substrate of reflecting mirror 222, and The anti-of the reflectivity for being suitable for increasing the light that wavelength is 875nm to 1100nm can be coated in the substrate of second reflecting mirror 223 Penetrate film.
In other embodiments, the base material of first reflecting mirror 222 also may be adapted to absorbing wavelength be 940nm extremely The light of 1100nm, the base material of second reflecting mirror 223 may be adapted to the light that absorbing wavelength is 350nm to 875nm, described The reflectance coating for being suitable for increasing the reflectivity for the light that wavelength is 350nm to 940nm can be coated in the substrate of first reflecting mirror 222, And the reflectivity for being suitable for increasing the light that wavelength is 875nm to 1100nm can be coated in the substrate of second reflecting mirror 223 Reflectance coating.
It is the structural schematic diagram of the laser radar system 30 of another embodiment of the present invention with reference to Fig. 6, Fig. 6.The present embodiment Laser radar system 30 also includes: rotor and stator, and the internal rotor is isolated into emission cavity 31 and receiving cavity 32;Light emitting Module is set in the emission cavity 31;Optical receiver module is set in the receiving cavity 32.The structure and function of each module It can refer to previous embodiment, details are not described herein again.Here only the difference of the present embodiment and previous embodiment is described in detail.
The difference of the present embodiment and embodiment illustrated in fig. 5 is: not set optical filter in the present embodiment, i.e., the described light-receiving Module includes the reception camera lens 325 set gradually along the receiving light path, the first reflecting mirror 322, the second reflecting mirror 323 and visits Survey submodule 324, described two reflecting mirrors 322 and 323 and it is described detection submodule 324 structure and function with Fig. 5 institute Show that embodiment is similar.
In some embodiments, the substrate material of the base material of first reflecting mirror 322 and second reflecting mirror 323 Material is adapted to the light that absorbing wavelength is 350nm to 1100nm, can be coated in the substrate of first reflecting mirror 322 and be suitable for increasing Wavelength is the reflectance coating of the reflectivity of the light of 875nm to 1100nm, can be coated with and be suitable in the substrate of second reflecting mirror 323 Increase the reflectance coating of the reflectivity for the light that wavelength is 350nm to 940nm;The substrate of the array hole diaphragm 324a may be adapted to inhale The light of 350nm to 1100nm is received, the increasing of 600nm to 1000nm is coated on the light incident surface of the substrate of the array hole diaphragm 324a Permeable membrane.
Here to the laser radar system 30 of the present embodiment still by taking wave-length coverage is the signal light of 875nm to 940nm as an example The course of work of optical receiver module be described as follows:
The optical receiver module received signal light and environment light reach described first by the reception camera lens 325 and reflect Mirror 322, light of the medium wavelength less than 875nm have lower reflectivity on first reflecting mirror 322, into the first reflection The base material of mirror 322 is absorbed, and light of the wavelength greater than 940nm has lower reflectivity on second reflecting mirror 323, Base material into second reflecting mirror 323 is absorbed, thus only wavelength be 875nm to 940nm signal light and with The signal light has larger reflectivity with the environment light of frequency range, reaches the spy through the reflection of described two reflecting mirrors 322 and 323 Survey the array hole diaphragm 324a of submodule 324;Wherein, only signal light and in the detector array 324b visual field Enough pass through the through-hole on the array hole diaphragm 324a with the ambient light energy of frequency range with the signal light, into the detector array 324b is arranged, other light are then absorbed into the substrate of the array hole diaphragm 324a.
In the present embodiment, described two reflecting mirrors 322 and 323 with absorption-type substrate have reached Fig. 3 and Fig. 5 embodiment In optical filter 121 and 221 function, its advantage is that can not only inhibit environment light, can also improve wide-angle oblique incidence letter The intensity of number light.Since the reception light of the optical receiver module passes through described two reflecting mirrors 322 and 323 and array hole respectively The respective absorption-type substrate of diaphragm 324a is filtered for multiple times, and greatly inhibits environment light, improves signal-to-noise ratio;Due to the battle array Arrange hole diaphragm 324a substrate on be also coated with anti-reflection film, can reduce light the surface array hole diaphragm 324a reflection, disappear Except the stray light for entering the detector array 324b after multiple reflections, the influence of environment light is reduced, the light-receiving is reduced The difference of module whole day (daytime and night) performance;The array hole diaphragm 324a with absorption-type substrate is set to described Before detector array 324b, the environment light of the signal optical frequencies can also be further filtered out.
The present invention is not limited to above embodiments, in some embodiments, the base material of first reflecting mirror 322 and The base material of second reflecting mirror 323 is adapted to the light that absorbing wavelength is 350nm to 1100nm, first reflecting mirror Can also be coated in 322 substrate be suitable for increase wavelength be 350nm to 940nm light reflectivity reflectance coating, described second The reflectance coating for being suitable for increasing the reflectivity for the light that wavelength is 875nm to 1100nm can be coated in the substrate of reflecting mirror 323;It is described The substrate of array hole diaphragm 324a may be adapted to the light for absorbing 350nm to 1100nm, the substrate of the array hole diaphragm 324a The anti-reflection film of 600nm to 1000nm is coated on light incident surface.
In addition, the case where all having two panels reflecting mirror the present invention is not limited to emission cavity and receiving cavity.In some embodiments In, the optical transport submodule of the optical receiver module can only have a piece of reflecting mirror, receive signal light received by camera lens And environment light is transferred to the detection submodule by primary event.It is 350nm that the substrate of the reflecting mirror, which is suitable for absorbing wavelength, To the light of 1100nm, and the anti-of the signal light for being suitable for increasing that wavelength is 875nm to 940nm can be coated in the substrate of the reflecting mirror The reflectance coating for penetrating rate, since reflecting mirror has shared big incident angle at this time, incidence angle changes less, reflectance curve " blue shift " phenomenon is unobvious, therefore the intensity for being able to suppress environment light, improving wide-angle oblique incidence signal light, to improve letter It makes an uproar ratio.
The embodiment of the present invention also provides a kind of vehicle, comprising: the laser thunder of vehicle body and present invention Up to system, the laser radar system is mounted on the vehicle body, suitable for detecting the information of the vehicle periphery object.
Specifically, the laser radar system may be mounted at the top of the vehicle.The letter of the vehicle periphery object Breath may include the information such as the distance, speed or orientation of the barrier of the vehicle periphery.
In conclusion the optical receiver module of the embodiment of the present invention has the optical transport submodule of absorption-type substrate by setting And/or detection submodule, it specifically can be optical filter with absorption-type substrate, reflecting mirror and detect a variety of groups of submodule The anti-reflection film for closing and being plated in the substrate of the optical filter and array hole diaphragm substitutes existing transmission-type interference filter with this Mating plate realizes the inhibition to environment light, and overcoming existing transmission-type interferometric filter because the film layer of deielectric-coating is thicker leads to light Transmitance is big by incident angle effect, technical problem that blue-shifted phenomenon is obvious;On the other hand, the embodiment of the present invention is by using two A reflecting mirror with absorption-type substrate can be realized optical filter, and reflecting mirror has shared big incident angle, drop The blue shift degree of low influence of the incidence angle to the reflectance curve of reflecting mirror, reflectance curve reduces, therefore even if described swash Optical radar due in the course of work temperature raising cause the wavelength of laser to increase, the intensity of wide-angle oblique incident ray will not drop It is low, avoid hot spot deterioration.
The laser radar system of the embodiment of the present invention includes optical transmitter module and the optical receiver module, since the light connects It receives module and is able to suppress environment light, improve the intensity of wide-angle oblique incidence signal light, improve signal-to-noise ratio, thus the laser radar The quality of data of system is significantly promoted, and the difference of laser radar system whole day (the daytime and night) performance reduces.
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute Subject to the range of restriction.

Claims (14)

1. a kind of optical receiver module characterized by comprising the optical transport submodule set gradually along receiving light path and detection Submodule;
The optical transport submodule is suitable for receiving, filtering and transmitting beam, the light beam include signal light;And
The detection submodule, suitable for receiving and detecting the light beam of the optical transport submodule transmission;
Wherein, the optical transport submodule and/or the detection submodule include absorption-type substrate, and the absorption-type substrate is suitable for Absorb the light of the default wave band other than at least described signal light wavelength range.
2. optical receiver module as described in claim 1, which is characterized in that the optical transport submodule includes along the reception light The optical filter and at least a piece of reflecting mirror that road is set gradually;
The optical filter includes the absorption-type substrate and is plated in corresponding with the signal light wavelength in the absorption-type substrate Anti-reflection film, wherein the absorption-type substrate is suitable for transmiting the signal light and absorbs other than the signal light wavelength range The light of default wave band;
At least a piece of reflecting mirror is suitable for reflecting the signal light.
3. optical receiver module as described in claim 1, which is characterized in that the optical transport submodule includes along the reception light At least a piece of reflecting mirror that road is set gradually, at least a piece of reflecting mirror include the absorption-type substrate and are plated on described Reflectance coating on the light incident surface of absorption-type substrate;
The reflectance coating of at least a piece of reflecting mirror is suitable for increasing the reflectivity of the signal light, at least a piece of reflecting mirror The absorption-type substrate is suitable for absorbing the light of the default wave band other than at least described signal light wavelength range.
4. optical receiver module as claimed in claim 3, which is characterized in that the optical transport submodule further include:
Optical filter is set on the receiving light path and is located at the optical path upstream of at least a piece of reflecting mirror, the optical filter Including the absorption-type substrate and it is plated in anti-reflection film corresponding with the signal light wavelength in the absorption-type substrate, wherein institute It states absorption-type substrate and is suitable for transmiting the signal light and absorb the light of the default wave band other than the signal light wavelength range.
5. optical receiver module as described in claim 3 or 4, which is characterized in that the optical transport submodule includes connecing along described Receive the first reflecting mirror and the second reflecting mirror that optical path is set gradually.
6. such as the described in any item optical receiver modules of Claims 1-4, which is characterized in that other than the signal light wavelength range The light of default wave band include the environment light that is able to respond of detection submodule.
7. optical receiver module as claimed in claim 2 or 4, which is characterized in that the absorption-type substrate of the optical filter is suitable The near-infrared and infrared light for being 850nm or more in light and transmission peak wavelength that absorbing wavelength is 350nm to 850nm, and the optical filtering The anti-reflection film for being suitable for increasing the transmitance for the light that wavelength is 875nm to 940nm is coated in the absorption-type substrate of piece.
8. optical receiver module as claimed in claim 2 or 4, which is characterized in that the optical transport submodule further includes focusing thoroughly Microscope group, the optical filter are set to the optical path upstream or downstream of the focus lens group, or are set to the focus lens group packet Between the lens contained.
9. optical receiver module as claimed in claim 5, which is characterized in that in the absorption-type substrate of first reflecting mirror It is coated with the reflectance coating for increasing the reflectivity of light of first band, is coated with increase in the absorption-type substrate of second reflecting mirror The wave-length coverage of the reflectance coating of the reflectivity of the light of second band, the first band and the second band in the signal light Interior coincidence.
10. optical receiver module as claimed in claim 9, which is characterized in that the first band is 875nm to 1100nm, institute Stating second band is 350nm to 940nm;Or the first band be 350nm to 940nm, the second band be 875nm extremely 1100nm。
11. optical receiver module as claimed in claim 5, which is characterized in that the absorption-type substrate of first reflecting mirror It is adapted to absorb the light of 350nm to 1100nm with the absorption-type substrate of second reflecting mirror.
12. such as the described in any item optical receiver modules of Claims 1-4, which is characterized in that the detection submodule includes having The array hole diaphragm and detector array of absorption-type substrate;
Each detector position on the array hole diaphragm corresponding to the detector array is provided with multiple through-holes, the array The substrate of hole diaphragm is suitable for absorbing with the signal light with default other than the environment light of frequency range and the signal light wavelength range The light incident surface of the light of wave band, the substrate of the array hole diaphragm is coated with comprising the anti-reflection of the wave band including the signal light wavelength Film.
13. optical receiver module as claimed in claim 12, which is characterized in that the substrate of the array hole diaphragm is suitable for absorbing The light incident surface of the light of 350nm to 1100nm, the substrate of the array hole diaphragm is coated with the anti-reflection film of 600nm to 1000nm.
14. a kind of laser radar system characterized by comprising
Optical transmitter module, suitable for outwardly emitting detection laser beam;And
Such as the described in any item optical receiver modules of claim 1 to 13, the optical receiver module is suitable for receiving and detecting by the external world Reflect the echo-signal for the laser beam that the detection laser beam is formed.
CN201910055848.7A 2019-01-21 2019-01-21 Light receiving module and laser radar system Active CN109814082B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910055848.7A CN109814082B (en) 2019-01-21 2019-01-21 Light receiving module and laser radar system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910055848.7A CN109814082B (en) 2019-01-21 2019-01-21 Light receiving module and laser radar system

Publications (2)

Publication Number Publication Date
CN109814082A true CN109814082A (en) 2019-05-28
CN109814082B CN109814082B (en) 2021-10-22

Family

ID=66603008

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910055848.7A Active CN109814082B (en) 2019-01-21 2019-01-21 Light receiving module and laser radar system

Country Status (1)

Country Link
CN (1) CN109814082B (en)

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021035689A1 (en) * 2019-08-30 2021-03-04 上海禾赛光电科技有限公司 Receiving system for lidar, lidar and method for inhibiting ghost lines
CN112558099A (en) * 2020-12-10 2021-03-26 易思维(杭州)科技有限公司 Incoming vehicle triggering system capable of effectively preventing ambient light interference
CN112639514A (en) * 2020-07-07 2021-04-09 深圳市速腾聚创科技有限公司 Laser receiving device, laser radar and intelligent sensing equipment
CN112955786A (en) * 2019-09-26 2021-06-11 深圳市速腾聚创科技有限公司 Laser radar, control method thereof and equipment with laser radar
WO2022116531A1 (en) * 2020-12-04 2022-06-09 上海禾赛科技有限公司 Detection apparatus, detection method, and laser radar
US11555895B2 (en) 2021-04-20 2023-01-17 Innovusion, Inc. Dynamic compensation to polygon and motor tolerance using galvo control profile
US11569632B2 (en) 2018-04-09 2023-01-31 Innovusion, Inc. Lidar systems and methods for exercising precise control of a fiber laser
US11567213B2 (en) 2021-02-18 2023-01-31 Innovusion, Inc. Dual shaft axial flux motor for optical scanners
US11579258B1 (en) 2018-08-30 2023-02-14 Innovusion, Inc. Solid state pulse steering in lidar systems
US11579300B1 (en) 2018-08-21 2023-02-14 Innovusion, Inc. Dual lens receive path for LiDAR system
US11604279B2 (en) 2017-01-05 2023-03-14 Innovusion, Inc. MEMS beam steering and fisheye receiving lens for LiDAR system
US11609336B1 (en) 2018-08-21 2023-03-21 Innovusion, Inc. Refraction compensation for use in LiDAR systems
US11614521B2 (en) 2021-04-21 2023-03-28 Innovusion, Inc. LiDAR scanner with pivot prism and mirror
US11614526B1 (en) 2018-08-24 2023-03-28 Innovusion, Inc. Virtual windows for LIDAR safety systems and methods
US11644543B2 (en) 2018-11-14 2023-05-09 Innovusion, Inc. LiDAR systems and methods that use a multi-facet mirror
US11662439B2 (en) 2021-04-22 2023-05-30 Innovusion, Inc. Compact LiDAR design with high resolution and ultra-wide field of view
US11662440B2 (en) 2021-05-21 2023-05-30 Innovusion, Inc. Movement profiles for smart scanning using galvonometer mirror inside LiDAR scanner
US11675053B2 (en) 2018-06-15 2023-06-13 Innovusion, Inc. LiDAR systems and methods for focusing on ranges of interest
US11675050B2 (en) 2018-01-09 2023-06-13 Innovusion, Inc. LiDAR detection systems and methods
US11675055B2 (en) 2019-01-10 2023-06-13 Innovusion, Inc. LiDAR systems and methods with beam steering and wide angle signal detection
US11768294B2 (en) 2021-07-09 2023-09-26 Innovusion, Inc. Compact lidar systems for vehicle contour fitting
US11927696B2 (en) 2018-02-21 2024-03-12 Innovusion, Inc. LiDAR systems with fiber optic coupling
US11947047B2 (en) 2017-01-05 2024-04-02 Seyond, Inc. Method and system for encoding and decoding LiDAR
US11953601B2 (en) 2016-12-30 2024-04-09 Seyond, Inc. Multiwavelength lidar design
US11965980B2 (en) 2018-01-09 2024-04-23 Innovusion, Inc. Lidar detection systems and methods that use multi-plane mirrors
US11977185B1 (en) 2019-04-04 2024-05-07 Seyond, Inc. Variable angle polygon for use with a LiDAR system
US11977183B2 (en) 2016-12-31 2024-05-07 Seyond, Inc. 2D scanning high precision LiDAR using combination of rotating concave mirror and beam steering devices
US11988773B2 (en) 2018-02-23 2024-05-21 Innovusion, Inc. 2-dimensional steering system for lidar systems

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019165130A1 (en) 2018-02-21 2019-08-29 Innovusion Ireland Limited Lidar detection systems and methods with high repetition rate to observe far objects
WO2020013890A2 (en) 2018-02-23 2020-01-16 Innovusion Ireland Limited Multi-wavelength pulse steering in lidar systems
US11796645B1 (en) 2018-08-24 2023-10-24 Innovusion, Inc. Systems and methods for tuning filters for use in lidar systems
US11789128B2 (en) 2021-03-01 2023-10-17 Innovusion, Inc. Fiber-based transmitter and receiver channels of light detection and ranging systems
US11871130B2 (en) 2022-03-25 2024-01-09 Innovusion, Inc. Compact perception device

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1051860A1 (en) * 1998-01-29 2000-11-15 Thomson Licensing S.A. Projection televisions with mirrors incident on holographic screens
CN1996074A (en) * 2006-12-18 2007-07-11 武汉光迅科技股份有限公司 Tri-port depolarizing tunable optical filter based on TFF
CN102439393A (en) * 2009-05-15 2012-05-02 密歇根宇航公司 Range imaging lidar
CN103380401A (en) * 2011-02-24 2013-10-30 Asml荷兰有限公司 Grazing incidence reflector, lithographic apparatus, method for manufacturing grazing incidence reflector and method for manufacturing a device
CN103424971A (en) * 2012-05-16 2013-12-04 深圳市绎立锐光科技开发有限公司 Light source system and related projection system
CN104076589A (en) * 2014-07-21 2014-10-01 成都菲斯特科技有限公司 Positive projection optical screen projection system short in projection distance
US20140293267A1 (en) * 2013-03-27 2014-10-02 Omron Automotive Electronics Co., Ltd. Laser radar device
CN204924943U (en) * 2015-06-03 2015-12-30 陈小梅 Burnt fluorescing system of micro - copolymerization of micro -control
CN105954872A (en) * 2016-07-15 2016-09-21 中国科学院光电技术研究所 Optimization design method for extended pyramid
CN205809286U (en) * 2016-05-03 2016-12-14 中国科学院上海技术物理研究所 The Novel double-channel laser radar improving echo dynamic range receives system
CN106574895A (en) * 2014-08-21 2017-04-19 夏普株式会社 Sensor and system for measuring a concentration
CN207114035U (en) * 2017-08-07 2018-03-16 中国科学院化学研究所 A kind of autocorrelation measurer for measuring Ps Laser Pulse width
CN207817199U (en) * 2018-01-31 2018-09-04 中国科学技术大学 A kind of receiving system and ozone sounding laser radar
CN108572359A (en) * 2018-06-08 2018-09-25 上海禾赛光电科技有限公司 A kind of reception system for laser radar
CN208013418U (en) * 2018-04-18 2018-10-26 北京爱尔达电子设备有限公司 A kind of optical system of laser cloud radar
CN108732744A (en) * 2018-05-07 2018-11-02 王念 A kind of MEMS tunable optical filters
CN108931832A (en) * 2018-09-28 2018-12-04 杭州科汀光学技术有限公司 Deep cut-off narrow band filter and optical instrument based on ultra-wide wavelength high reflection
CN109164465A (en) * 2018-08-29 2019-01-08 西安电子科技大学 Coaxial optical system based on the micro-pulse lidar measurement cloud level

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1284239A (en) * 1998-01-29 2001-02-14 汤姆森许可公司 Projection televisions with morrors incident on holographic screens
EP1051860A1 (en) * 1998-01-29 2000-11-15 Thomson Licensing S.A. Projection televisions with mirrors incident on holographic screens
CN1996074A (en) * 2006-12-18 2007-07-11 武汉光迅科技股份有限公司 Tri-port depolarizing tunable optical filter based on TFF
CN102439393A (en) * 2009-05-15 2012-05-02 密歇根宇航公司 Range imaging lidar
CN103380401A (en) * 2011-02-24 2013-10-30 Asml荷兰有限公司 Grazing incidence reflector, lithographic apparatus, method for manufacturing grazing incidence reflector and method for manufacturing a device
CN103424971A (en) * 2012-05-16 2013-12-04 深圳市绎立锐光科技开发有限公司 Light source system and related projection system
US20140293267A1 (en) * 2013-03-27 2014-10-02 Omron Automotive Electronics Co., Ltd. Laser radar device
CN104076589A (en) * 2014-07-21 2014-10-01 成都菲斯特科技有限公司 Positive projection optical screen projection system short in projection distance
CN106574895A (en) * 2014-08-21 2017-04-19 夏普株式会社 Sensor and system for measuring a concentration
CN204924943U (en) * 2015-06-03 2015-12-30 陈小梅 Burnt fluorescing system of micro - copolymerization of micro -control
CN205809286U (en) * 2016-05-03 2016-12-14 中国科学院上海技术物理研究所 The Novel double-channel laser radar improving echo dynamic range receives system
CN105954872A (en) * 2016-07-15 2016-09-21 中国科学院光电技术研究所 Optimization design method for extended pyramid
CN207114035U (en) * 2017-08-07 2018-03-16 中国科学院化学研究所 A kind of autocorrelation measurer for measuring Ps Laser Pulse width
CN207817199U (en) * 2018-01-31 2018-09-04 中国科学技术大学 A kind of receiving system and ozone sounding laser radar
CN208013418U (en) * 2018-04-18 2018-10-26 北京爱尔达电子设备有限公司 A kind of optical system of laser cloud radar
CN108732744A (en) * 2018-05-07 2018-11-02 王念 A kind of MEMS tunable optical filters
CN108572359A (en) * 2018-06-08 2018-09-25 上海禾赛光电科技有限公司 A kind of reception system for laser radar
CN109164465A (en) * 2018-08-29 2019-01-08 西安电子科技大学 Coaxial optical system based on the micro-pulse lidar measurement cloud level
CN108931832A (en) * 2018-09-28 2018-12-04 杭州科汀光学技术有限公司 Deep cut-off narrow band filter and optical instrument based on ultra-wide wavelength high reflection

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
S. TAMARI: "Testing a near-infrared Lidar mounted with a large incidence angle to monitor the water level of turbid reservoirs", 《ELSEVIER》 *
胡小川等: "变形镜热形变及其对光束质量的影响分析", 《中国激光》 *
邢晓: "入射角和杂质吸收对一维光子晶体反射镜的影响", 《激光与红外》 *
魏健宁: "《大学物理实验(下册)-综合设计性实验》", 31 March 2011, 华中科技大学出版社 *

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11953601B2 (en) 2016-12-30 2024-04-09 Seyond, Inc. Multiwavelength lidar design
US11977183B2 (en) 2016-12-31 2024-05-07 Seyond, Inc. 2D scanning high precision LiDAR using combination of rotating concave mirror and beam steering devices
US11947047B2 (en) 2017-01-05 2024-04-02 Seyond, Inc. Method and system for encoding and decoding LiDAR
US11604279B2 (en) 2017-01-05 2023-03-14 Innovusion, Inc. MEMS beam steering and fisheye receiving lens for LiDAR system
US11965980B2 (en) 2018-01-09 2024-04-23 Innovusion, Inc. Lidar detection systems and methods that use multi-plane mirrors
US11977184B2 (en) 2018-01-09 2024-05-07 Seyond, Inc. LiDAR detection systems and methods that use multi-plane mirrors
US11675050B2 (en) 2018-01-09 2023-06-13 Innovusion, Inc. LiDAR detection systems and methods
US11927696B2 (en) 2018-02-21 2024-03-12 Innovusion, Inc. LiDAR systems with fiber optic coupling
US11988773B2 (en) 2018-02-23 2024-05-21 Innovusion, Inc. 2-dimensional steering system for lidar systems
US11569632B2 (en) 2018-04-09 2023-01-31 Innovusion, Inc. Lidar systems and methods for exercising precise control of a fiber laser
US11675053B2 (en) 2018-06-15 2023-06-13 Innovusion, Inc. LiDAR systems and methods for focusing on ranges of interest
US11579300B1 (en) 2018-08-21 2023-02-14 Innovusion, Inc. Dual lens receive path for LiDAR system
US11609336B1 (en) 2018-08-21 2023-03-21 Innovusion, Inc. Refraction compensation for use in LiDAR systems
US11614526B1 (en) 2018-08-24 2023-03-28 Innovusion, Inc. Virtual windows for LIDAR safety systems and methods
US11940570B2 (en) 2018-08-24 2024-03-26 Seyond, Inc. Virtual windows for LiDAR safety systems and methods
US11579258B1 (en) 2018-08-30 2023-02-14 Innovusion, Inc. Solid state pulse steering in lidar systems
US11914076B2 (en) 2018-08-30 2024-02-27 Innovusion, Inc. Solid state pulse steering in LiDAR systems
US11686824B2 (en) 2018-11-14 2023-06-27 Innovusion, Inc. LiDAR systems that use a multi-facet mirror
US11644543B2 (en) 2018-11-14 2023-05-09 Innovusion, Inc. LiDAR systems and methods that use a multi-facet mirror
US11675055B2 (en) 2019-01-10 2023-06-13 Innovusion, Inc. LiDAR systems and methods with beam steering and wide angle signal detection
US11977185B1 (en) 2019-04-04 2024-05-07 Seyond, Inc. Variable angle polygon for use with a LiDAR system
WO2021035689A1 (en) * 2019-08-30 2021-03-04 上海禾赛光电科技有限公司 Receiving system for lidar, lidar and method for inhibiting ghost lines
CN112955786A (en) * 2019-09-26 2021-06-11 深圳市速腾聚创科技有限公司 Laser radar, control method thereof and equipment with laser radar
CN112639514B (en) * 2020-07-07 2024-02-23 深圳市速腾聚创科技有限公司 Laser receiving device, laser radar and intelligent induction equipment
WO2022006752A1 (en) * 2020-07-07 2022-01-13 深圳市速腾聚创科技有限公司 Laser receiving apparatus, laser radar, and smart sensing device
CN112639514A (en) * 2020-07-07 2021-04-09 深圳市速腾聚创科技有限公司 Laser receiving device, laser radar and intelligent sensing equipment
WO2022116531A1 (en) * 2020-12-04 2022-06-09 上海禾赛科技有限公司 Detection apparatus, detection method, and laser radar
CN112558099A (en) * 2020-12-10 2021-03-26 易思维(杭州)科技有限公司 Incoming vehicle triggering system capable of effectively preventing ambient light interference
US11567213B2 (en) 2021-02-18 2023-01-31 Innovusion, Inc. Dual shaft axial flux motor for optical scanners
US11555895B2 (en) 2021-04-20 2023-01-17 Innovusion, Inc. Dynamic compensation to polygon and motor tolerance using galvo control profile
US11614521B2 (en) 2021-04-21 2023-03-28 Innovusion, Inc. LiDAR scanner with pivot prism and mirror
US11662439B2 (en) 2021-04-22 2023-05-30 Innovusion, Inc. Compact LiDAR design with high resolution and ultra-wide field of view
US11662440B2 (en) 2021-05-21 2023-05-30 Innovusion, Inc. Movement profiles for smart scanning using galvonometer mirror inside LiDAR scanner
US11768294B2 (en) 2021-07-09 2023-09-26 Innovusion, Inc. Compact lidar systems for vehicle contour fitting

Also Published As

Publication number Publication date
CN109814082B (en) 2021-10-22

Similar Documents

Publication Publication Date Title
CN109814082A (en) Optical receiver module and laser radar system
US10935638B2 (en) Laser radar system
CN111398933B (en) Laser radar detection system and laser radar
CN108415148B (en) Photoelectric pod multi-sensor common optical path system
CN109738880A (en) A kind of laser radar system and laser ranging system
AU2020101889A4 (en) A three-channel optical receiver for airborne dual-frequency lidar
CN110045498A (en) Light scanning apparatus and laser radar
WO2020142870A1 (en) Distance measurement device
WO2020142941A1 (en) Light emitting method, device and scanning system
WO2020107250A1 (en) Laser receiving circuit, distance measurement device, and mobile platform
CN113514814A (en) Anti-ambient light optical receiving system and laser radar
CN218978799U (en) Cleaning device, light-transmitting cover and self-moving device applied to same
CN209248019U (en) A kind of optical system of laser radar
US20220120869A1 (en) Receiving system for lidar, lidar and method for inhibiting ghost lines
CN114966727A (en) Common-aperture transmitting and receiving laser ranging optical device of photoelectric system
CN110687667B (en) Coaxial internal reflection and coaxial beam-shaped distance measurement sighting telescope
CN109188447B (en) Optical fiber array reflective laser radar
CN219302669U (en) Laser receiving device and laser radar
CN219456484U (en) Laser radar
CN116125436B (en) Integrated coaxial transceiver for single-photon radar and single-photon radar
CN216083083U (en) Coaxial optical system for laser ranging
CN220064367U (en) Laser radar
US20240192326A1 (en) Optical detector, systems, and methods
CN218567598U (en) Transmit-receive paraxial optical system of laser scanner
CN218383285U (en) Laser radar overexposure inhibition module, laser radar and radar product

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information
CB02 Change of applicant information

Address after: 201800 Building 2, no.468 xinlai Road, Jiading District, Shanghai

Applicant after: Shanghai Hesai Technology Co., Ltd

Address before: Block B, L2, Langhong Bridge World Center, 1588 Zhuguang Road, Qingpu District, Shanghai, 20102

Applicant before: HESAI PHOTONICS TECHNOLOGY Co.,Ltd.

CB02 Change of applicant information
CB02 Change of applicant information

Address after: No.2 building, no.468 xinlai Road, Jiading District, Shanghai, 201821

Applicant after: Shanghai Hesai Technology Co.,Ltd.

Address before: 201800 Building 2, no.468, xinlai Road, Jiading District, Shanghai

Applicant before: Shanghai Hesai Technology Co., Ltd

GR01 Patent grant
GR01 Patent grant