CN108732744A - A kind of MEMS tunable optical filters - Google Patents
A kind of MEMS tunable optical filters Download PDFInfo
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- CN108732744A CN108732744A CN201810427949.8A CN201810427949A CN108732744A CN 108732744 A CN108732744 A CN 108732744A CN 201810427949 A CN201810427949 A CN 201810427949A CN 108732744 A CN108732744 A CN 108732744A
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- 230000008878 coupling Effects 0.000 claims description 4
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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Abstract
A kind of MEMS tunable optical filters disclosed by the invention, it is a kind of tunable optical filter based on MEMS micromirror and optical filter, which includes with the sequentially connected MEMS micromirror of light path (4), optical filter (5), lens (3), speculum (8).The present invention is by rotating MEMS micromirror, thus it is possible to vary the light angle being incident on optical filter achievees the purpose that filtering to change the optical wavelength of optical filter output；The flexible adjustable of output spectrum bandwidth can also be realized while realizing fine spectrum output, cascade mode has optical filter directly to cascade, and also has cascade tunable optical filter module by cascade filtering piece；The rotation angle of MEMS micromirror is efficiently utilized, light path design is compact.
Description
Technical field
The present invention relates to a kind of filter more particularly to a kind of tunable optical filters based on MEMS technology
Background technology
Tunable optical filter is a kind of important optic communication device, for filtering out the required wavelength of system, and will be not required to
The wavelength signals wanted mask, and are widely used in wavelength-division multiplex system, reconstructable OADM system, optical property monitoring, light
The fields such as device detection and photoelectric sensing.Realize that the technology of tunable optical filter includes mainly：Mach-Zehnder interference-type filters
Device, the filter based on F-P cavity, the filter based on grating, the filter etc. based on dielectric film.
As microelectromechanical-systems (Miro-Electro Mechanical Systems, hereinafter referred to as MEMS) and medium plate
The development of membrane technology, tunable optical filter have gradually formed two kinds of main technical solutions, are that scheme (1) is micro- based on MEMS respectively
Mirror and grating；Scheme (2) is based on optical filter and electric rotating machine, and principle difference is as depicted in figs. 1 and 2.In scheme (1), prism
At required shape, the optical signal of different wave length is unfolded in space along different angles through grating 2 for spot shaping for combination 1,
Hot spot is compressed on MEMS micromirror 4 by lens 3, by the rotation of MEMS micromirror 4, is realized the output of different wave length optical signal, is reached
To the purpose of filtering.In scheme (2), prism arrangement 1 adjusts the shape of hot spot, and the prism 7 that is all-trans realizes the deviation of light path, electric rotating
Machine 6 controls the rotation of optical filter 5, by changing the incidence angle being incident on optical filter 5, changes the wavelength that optical filter 5 exports.Side
The small size of MEMS micromirror is utilized in case (1), but the design of grating filtering increases the complexity of system, is also unfavorable for cost drop
It is low.Optical filtering chip size in scheme (2) is smaller, but the size of electric rotating machine is larger, and cost is higher.Therefore, above two side
All there is certain defect in case.
In consideration of it, it is the art urgent problem to be solved to overcome the problems of the above-mentioned prior art.
Invention content
The technical problem to be solved by the present invention is to：To overcome the above-mentioned prior art insufficient, and combine the technology of the two excellent
Point provides a kind of technical solution of the tunable optical filter based on MEMS micromirror and optical filter.MEMS micromirror can pass through rotation
Minute surface changes the light angle being incident on optical filter, to change the optical wavelength of optical filter output, realizes that output light wavelength can
The function of tuning.And on this basis, the cascade innovative design of optical filter is further provided, finer light can be exported
Bands of a spectrum are wide, and realize the flexible adjustable of spectral bandwidth, can significantly improve the performance indicator of tunable optical filter.
The present invention solves its technical problem and uses technical solution below：
MEMS tunable optical filters provided by the invention are a kind of based on the filtering of the tunable optical of MEMS micromirror and optical filter
Device, the tunable optical filter include with the sequentially connected MEMS micromirror of light path, optical filter, lens, speculum.
The MEMS micromirror uses the MEMS micromirror of one-dimensional rotation, by applying different driving voltages, it can be achieved that MEMS
The continuous rotation of micro mirror for changing the angle for the light being incident on optical filter, and then changes the output wavelength of optical filter,
Size should meet the transformation requirement of Gaussian beam.
The optical filter uses the technique of medium plated film, is connected with input/output port by MEMS micromirror, is used for wavelength
The output of tuning, when size is that MEMS micromirror rotates, space length that light scanning is crossed.
The optical filter realizes " vernier " effect of spectrum, and then in single optical filter output light wavelength by cascade
On the basis of, realize more fine spectral bandwidth.
The cascade system of the optical filter is：Optical filter and cascade optical filter keep a fixed angle, the tool of the angle
Body numerical value should be determined by the spectral wavelength and bandwidth value of required output；The angle of incidence of light of optical filter and cascade optical filter differs
Sample exports different spectral wavelengths and bandwidth respectively, after cascade, can export finer spectral bandwidth；When MEMS is micro-
When mirror rotates, optical filter can be changed simultaneously and cascade the angle of incidence of light on optical filter, but relative angle between the two closes
System can keep, and the fixed optical wavelength of output bandwidth tunes the curve of spectrum.
The lens use body lens, and for realizing the coupling matching of Gaussian beam, the size of the lens should match optical filtering
The size of piece.
The speculum uses plane mirror, is reflected for realizing the former road of light, makes light again by lens, filter
Mating plate, MEMS micromirror are exported from output port.
The present invention realizes the flexibly adjustable spectrum output of fine and bandwidth by cascade mode；By increasing by one
MEMS micromirror individually changes the incident angle on cascade optical filter, you can realize the adjustable fine wavelength tuning of bandwidth.
The present invention uses two cascade schemes of tunable optical filter, specially：Optical filter and cascade optical filter distinguish structure
At a tunable optical filter module, individually a corresponding MEMS micromirror, the angle of incidence of light of the two are independent for each optical filter
It is adjusted, while realizing fine spectrum output, bandwidth can be also adjusted flexibly.
The present invention uses the cascade structure of optical filter, while realizing fine spectrum output, also realizes output spectrum band
Wide is flexible adjustable, and cascade mode has optical filter directly to cascade, or has cascade tunable optical filter module.
The present invention has the advantages that following main compared with prior art：
1. the implementation of existing tunable optical filter, which includes mainly scheme (1), is based on MEMS micromirror and grating, scheme (2)
Based on optical filter and electric rotating machine, all there is certain defect in the design of the two, design is more complex, and size is also larger, the present invention
The tunable optical filter based on MEMS micromirror and filter plate proposed is using MEMS micromirror as the element for changing light angle, filter
Output element of the mating plate as wavelength tuning, both belongs to the optical element of small size, can be effectively reduced tunable optical filtering
The integral module size of device reduces design difficulty；
2. rotating MEMS micromirror, change the light angle being incident on optical filter, to change the output wavelength of optical filter,
Achieve the purpose that filtering；The design easily realizes that the cascade of optical filter, light are incident on above optical filter at different angles, realizes
The secondary tuning of spectrum generates spectrum " vernier " effect, and then realizes more fine spectral bandwidth；
3. a MEMS micromirror is separately configured to each optical filter, you can individually change the angle of incidence of light of each optical filter
It spends, no longer there are fixed angled relationships between two optical filters, it can be while realizing more fine spectral bandwidth output, also
The flexible adjustable of spectral bandwidth may be implemented；
4. the tunable optical filter proposed by the present invention based on MEMS micromirror and optical filter, can also pass through the side of module-cascade
Formula uses, and individually changes the angle of incidence of light of each optical filter, while can also realizing fine bandwidth and flexible bandwidth spectrum
Output has larger design and process flexibility.
Description of the drawings
Fig. 1 is the tunable optical filter principle index path based on MEMS micromirror and grating.
Fig. 2 is the tunable optical filter principle index path based on optical filter and electric rotating machine.
Fig. 3 is that the present invention is based on the tunable optical filter principle index paths of MEMS micromirror and optical filter.
Fig. 4 is the cascade principle index path of two optical filters.
Fig. 5 is that the fixed fine spectrum of bandwidth exports schematic diagram.
Fig. 6 is the cascade schematic diagram of two tunable optical filters.
Fig. 7 is that the adjustable spectrum of bandwidth exports schematic diagram.
Fig. 8 is the principle schematic of another embodiment of the present invention.
Fig. 9 is that the optical filter of another embodiment of the present invention cascades schematic diagram.
Figure 10 is that the tunable optical filter of another embodiment of the present invention cascades schematic diagram.
Wherein：1. prism arrangement；2. grating；3. lens；4.MEMS micro mirrors；5. optical filter；6. electric rotating machine；7. be all-trans rib
Mirror；8. speculum；9. cascading optical filter.
Specific implementation mode
With reference to embodiment and attached drawing, invention is further described in detail.It should be appreciated that tool described herein
Body embodiment is only used to explain the present invention, however it is not limited to the present invention.
MEMS tunable optical filters provided by the invention are a kind of based on the filtering of the tunable optical of MEMS micromirror and optical filter
Device, structure as shown in figure 3, include with the sequentially connected MEMS micromirror 4 of light path, optical filter 5, lens 3, speculum 8, wherein：
The MEMS micromirror 4 uses the MEMS micromirror of one-dimensional rotation, by applying different driving voltages, it can be achieved that MEMS
The continuous rotation of micro mirror, for changing the angle for the light being incident on optical filter 5, size should meet the transformation of Gaussian beam
It is required that.
The optical filter 5 is connected by MEMS micromirror 4 with input/output port using the technique of medium plated film, is used for wave
The output of long tuning, when size is that MEMS micromirror 4 rotates, space length that light scanning is crossed.
The optical filter 5 easily by cascade, realizes " vernier " effect of spectrum, and then in single optical filter output light wavelength
On the basis of, realize more fine spectral bandwidth, as shown in Figure 5.
The cascade system of the optical filter 5 is as shown in figure 4, be specially：Optical filter 5 and cascade optical filter 9 keep one to fix
Angle, the concrete numerical value of the angle should determine by the spectral wavelength and bandwidth value of required output.Optical filter 5 and cascade optical filter
9 angle of incidence of light is different, exports different spectral wavelengths and bandwidth respectively, after cascade, can export finer
Spectral bandwidth, as shown in Figure 5.When MEMS micromirror 4 rotates, optical filter 5 can be changed simultaneously and cascade the light on optical filter 9
Incidence angle, but relative angular relationship between the two can be kept, and can tune the curve of spectrum with the fixed optical wavelength of output bandwidth, such as
Shown in Fig. 5.
Above-mentioned MEMS micromirror 4 and optical filter 5 belong to the optical element of small size, can be effectively reduced tunable optical filter
Integral module size.
The lens 3 use body lens, and for realizing the coupling matching of Gaussian beam, the size of the lens 3 should match filter
The size of mating plate 5.
The speculum 8 use plane mirror, for realizing light former road reflect, make light again by lens 3,
Optical filter 5, MEMS micromirror 4 are exported from output port.
A kind of tunable filter based on MEMS micromirror and optical filter provided by the invention can by rotating MEMS micromirror
To change the light angle being incident on optical filter, to change the optical wavelength of optical filter output, achieve the purpose that filtering.
The cascade design scheme of optical filter proposed by the present invention can also be realized while realizing fine spectrum output
Output spectrum bandwidth it is flexible adjustable, cascade mode has optical filter directly to cascade, also have cascade tunable optical filter module.
MEMS tunable optical filters provided by the invention can also realize that fine and bandwidth is flexible by cascade mode
Adjustable spectrum output.By increasing a MEMS micromirror, individually change the incident angle on cascade optical filter 9, you can realize
The adjustable fine wavelength tuning of bandwidth.But two MEMS micromirrors are used inside a light path, can greatly increase MEMS micromirror
Design and difficulty of processing, be unfavorable for the present invention commercialization application.Therefore, the present invention introduces two tunable optical filtering
The cascade scheme of device, as shown in Figure 6.In this scheme, optical filter 5 and cascade optical filter 9 individually correspond to a MEMS micromirror 4,
The angle of incidence of light of the two is independently adjusted, and while realizing fine spectrum output, also can flexibly be adjusted to bandwidth
It is whole, as shown in Figure 7.The program uses two independent MEMS micromirrors, and the MEMS micromirror product of current standard, Bu Huizeng can be used
Add whole product difficulty and cost, is the optimum choice of commercialization application.
MEMS tunable optical filters proposed by the present invention also have following several embodiments：
Embodiment 1：Relative to light path shown in Fig. 3, while realizing wavelength tuning, the whole light path of Fig. 8 is more
Compact, symmetry is stronger, easily designed and production.
As shown in figure 8, optical signal enters from input port, after the Gaussian transformation by lens 3, it is coupled to MEMS micromirror
On 4, by adjusting the voltage being applied on MEMS micromirror 4, rotation is incident on by the light angle on MEMS micromirror 4, change
Light angle on optical filter 5, then through 3 coupling transform of lens to speculum 8, light is by 8 backtracking of speculum, then successively
By lens 3, optical filter 5, MEMS micromirror 4, lens 3, exported from output port.
Embodiment 2：Shown in Fig. 9 is the cascaded design based on Fig. 8.
As shown in figure 9, the main element of which is consistent with shown in Fig. 8, only increase a cascade optical filter 9, and and
Optical filter 5 generates different wavelength tuning output at a fixed angle, and the two realizes the secondary filter of spectrum by cascade
Wave, exportable more fine spectrum.
Embodiment 3：Figure 10 is that two tunable optical filters based on Fig. 8 cascade schematic diagram.
As shown in Figure 10, tunable optical filter shown in Fig. 8 is cascaded, with Fig. 9 the difference is that the independent grade of module
It when connection, can individually change the angle of incidence of light of each optical filter, therebetween without fixed angled relationships, export more
For fine spectrum while, the flexible adjustable of output spectrum bandwidth may be implemented.
The function and principle that above-mentioned Fig. 8, Fig. 9 and Figure 10 are realized are similar with Fig. 3, Fig. 4, Fig. 6, and details are not described herein again.This
Embodiment light path can also be adjusted flexibly bandwidth while realizing fine spectrum output.
Technical solution proposed by the present invention based on MEMS micromirror and optical filter, can effectively utilize the rotation of MEMS micromirror
Gyration, light path design are compact.
Although the present invention has been illustrated in detail in and has described a relevant embodiment reference, those skilled in the art
Member can make various changes in the form and details it should be appreciated that in without departing substantially from the spirit and scope of the present invention,
These changes fall within the protection domain required by the claim of the present invention.
Claims (10)
1. a kind of MEMS tunable optical filters, it is characterized in that a kind of tunable optical filter based on MEMS micromirror and optical filter, it should
Tunable optical filter includes with the sequentially connected MEMS micromirror of light path (4), optical filter (5), lens (3), speculum (8).
2. MEMS tunable optical filters according to claim 1, it is characterised in that the MEMS micromirror (4) uses one-dimensional rotation
The MEMS micromirror turned, by the different driving voltage of application, it can be achieved that the continuous rotation of MEMS micromirror, is filtered for changing being incident on
The angle of light on mating plate (5), and then change the output wavelength of optical filter, the transformation that size should meet Gaussian beam is wanted
It asks.
3. MEMS tunable optical filters according to claim 1, it is characterised in that the optical filter (5) uses medium plated film
Technique, be connected with input/output port by MEMS micromirror (4), be used for wavelength tuning output, size be MEMS micromirror
(4) when rotating, space length that light scanning is crossed.
4. MEMS tunable optical filters according to claim 1, it is characterised in that the optical filter (5) is real by cascade
" vernier " effect of existing spectrum, and then on the basis of single optical filter output light wavelength, realize more fine spectral bandwidth.
5. MEMS tunable optical filters according to claim 4, it is characterised in that the cascade system of the optical filter (5)
For：Optical filter (5) and cascade optical filter (9) keep a fixed angle, and the concrete numerical value of the angle should be by the light of required output
Spectrum wavelength and bandwidth value determine；The angle of incidence of light of optical filter (5) and cascade optical filter (9) is different, exports respectively different
Spectral wavelength and bandwidth after cascade, can export finer spectral bandwidth；It, can be simultaneously when MEMS micromirror (4) rotate
Change the angle of incidence of light on optical filter (5) and cascade optical filter (9), but relative angular relationship between the two can be kept,
The fixed optical wavelength of output bandwidth tunes the curve of spectrum.
6. MEMS tunable optical filters according to claim 1, it is characterised in that the lens (3) use body lens, use
In the coupling matching for realizing Gaussian beam, the size of the lens (3) answers the size of match filter (5).
7. MEMS tunable optical filters according to claim 1, it is characterised in that the speculum (8) uses plane reflection
Mirror reflects for realizing the former road of light, makes light again by lens (3), optical filter (5), MEMS micromirror (4), from output
Port exports.
8. MEMS tunable optical filters according to claim 1, it is characterised in that the tunable optical filter passes through cascade
Mode realizes the flexibly adjustable spectrum output of fine and bandwidth；By increasing a MEMS micromirror, individually change cascade optical filter
(9) incident angle on, you can realize the adjustable fine wavelength tuning of bandwidth.
9. MEMS tunable optical filters according to claim 8, it is characterized in that cascade using two tunable optical filters
Scheme, specially：Optical filter (5) and cascade optical filter (9) respectively constitute a tunable optical filter module, each optical filter list
Solely a corresponding MEMS micromirror (4), the angle of incidence of light of the two are independently adjusted, and are realizing the same of fine spectrum output
When, bandwidth can be also adjusted flexibly.
10. MEMS tunable optical filters according to claim 1, it is characterised in that the cascade structure of optical filter is used,
While realizing fine spectrum output, the flexible adjustable of output spectrum bandwidth is also realized, cascade mode has the direct grade of optical filter
Connection, or have cascade tunable optical filter module.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109814082A (en) * | 2019-01-21 | 2019-05-28 | 上海禾赛光电科技有限公司 | Optical receiver module and laser radar system |
| CN109839735A (en) * | 2019-01-30 | 2019-06-04 | 南京邮电大学 | A kind of cascade F-P cavity formula optical filter based on movable mirror |
| CN110212977A (en) * | 2019-06-10 | 2019-09-06 | 昂纳信息技术（深圳）有限公司 | A kind of wavelength and power monitor device |
| CN113218515A (en) * | 2021-06-02 | 2021-08-06 | 安徽淮光智能科技有限公司 | Infrared multispectral temperature calibrator |
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Effective date of registration: 20190510 Address after: 430205 No. 219 Guanggu No. 2 Road, Donghu Development Zone, Wuhan City, Hubei Province Applicant after: Wuhan Jiaxun Photoelectric Co.,Ltd. Address before: 430074 Guanggu Coordinate City A1-3-302, Guanshan Avenue, Hongshan District, Wuhan City, Hubei Province Applicant before: Wang Nian |
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| CI02 | Correction of invention patent application | ||
| CI02 | Correction of invention patent application |
Correction item: Applicant|Address Correct: Wuhan Jiaxun Photoelectric Co., Ltd.|430205 No. 219 Guanggu No. 2 Road, Donghu Development Zone, Wuhan City, Hubei Province False: Wuhan Jiaxun Photoelectric Co., Ltd.|430205 No. 219 Guanggu No. 2 Road, Donghu Development Zone, Wuhan City, Hubei Province Number: 22-02 Volume: 35 |
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181102 |