CN109813492A - A kind of capacitive films vacuum meter - Google Patents
A kind of capacitive films vacuum meter Download PDFInfo
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- CN109813492A CN109813492A CN201910263025.3A CN201910263025A CN109813492A CN 109813492 A CN109813492 A CN 109813492A CN 201910263025 A CN201910263025 A CN 201910263025A CN 109813492 A CN109813492 A CN 109813492A
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- capacitive films
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Abstract
The present invention relates to a kind of capacitive films vacuum meter, including shell, detection diaphragm, fixed substrate and fixed polar plate, there is an accommodating space in shell, detection diaphragm is fixed in accommodating space and accommodating space is divided into test chamber and vacuum chamber.Fixed substrate is fixed in vacuum chamber, and there are two fixed polar plate, two fixed polar plates bilateral symmetries and arranged for interval for the one side fixed setting of fixed substrate direction detection diaphragm.It is arranged by two fixed polar plates by bilateral symmetry in the present invention and in the way of being spaced apart, so that two fixed polar plates all some areas are in detection center deflection maximum region, two Δ C can thus maximized, and then increase the accuracy and stability of measurement, the measurement accuracy and measurement range of vacuum meter are improved, while improving the sensitivity and resolution ratio of vacuum meter.
Description
Technical field
The invention belongs to technical field of vacuum measurement, and in particular to a kind of capacitive films vacuum meter.
Background technique
Vacuum has been widely used in metallurgy, chemical industry, space flight, atomic energy accelerator, semiconductor and electricity in the industrial production
In vacuum manufacture, so vacuum measurement is also essential.Recently as the development of electronic technology, small capacitance can measure
Variation, therefore capacitive films vacuum meter is developed rapidly.
Capacitive films vacuum meter is to generate strain under differential pressure action according to the detection diaphragm of elasticity and capacitor is caused to become
Made of the principle of change, mainly by capacitive films rule (also known as condenser type absolute pressure transmitter) and measuring instrument two parts group
At.Capacitive films vacuum meter has a characteristic that 1 compared with other low-vacuum measurement instruments, is total pressure measurement, and tested
The type of gas is unrelated, and sensitivity is identical to various gases, steam.2, dynamic response time is fast.3, it is wide to survey most range.
4, the telemeasurement and control of pressure may be implemented.It, which exports electric signal, can connect hundred meters of cable to realize vacuum system
Telemeasurement.
But current capacitive films vacuum meter low measurement accuracy, measurement error is larger, stability is poor and sensitive
Degree and resolution ratio are lower.
Summary of the invention
(1) technical problems to be solved
The present invention provides a kind of capacitive films vacuum meter, it is intended to solve capacitive films vacuum existing in the prior art
Count low measurement accuracy, measurement error is larger, stability is poor and sensitivity and the lower problem of resolution ratio.
(2) technical solution
In order to achieve the above object, the main technical schemes that the present invention uses include:
The present invention provides a kind of capacitive films vacuum meter, including shell, detection diaphragm, fixed substrate and fixed polar plate；
There is an accommodating space, detection diaphragm is fixed in accommodating space and accommodating space is divided into test chamber and vacuum in shell
Chamber；Fixed substrate is fixed in vacuum chamber, fixed substrate towards detection diaphragm one side fixed setting there are two fixed polar plate, two
A fixed polar plate bilateral symmetry and arranged for interval；Wherein, two fixed polar plates are fixed electrode, and detection diaphragm is meander electrode,
Fixed electrode and meander electrode form a variable condenser.
According to the present invention, the width in the gap between two fixed polar plates is less than or equal to 0.1mm.
According to the present invention, metal layer is equipped in the one side that two fixed polar plates and detection diaphragm are oppositely arranged.
According to the present invention, metal layer with a thickness of 8~10 μm.
According to the present invention, the material of metal layer is gold or silver.
According to the present invention, getter is additionally provided on shell, getter is connected with vacuum chamber.
It according to the present invention, further include pole plate lead-out wire, one end of pole plate lead-out wire is connect with two fixed polar plates, another
The outside of vacuum chamber is stretched out at end.
According to the present invention, shell is equipped with detection hole, and detection hole is connected with test chamber.
According to the present invention, exhaust pipe is additionally provided on shell, exhaust pipe is connected with vacuum chamber.
According to the present invention, the material of shell is nickel-base alloy.
(3) beneficial effect
The beneficial effects of the present invention are:
It is arranged by two fixed polar plates by bilateral symmetry in the present invention and in the way of being spaced apart, so that two fixed poles
Plate all some areas can be such that two Δ C maximize, and then increase in detection center deflection maximum region
The accuracy and stability of measurement, improve the measurement accuracy and measurement range of vacuum meter, while improving the sensitivity of vacuum meter
And resolution ratio.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the capacitive films vacuum meter that following examples provide；
Fig. 2 is the partial enlarged view of left side fixed polar plate and right side fixed polar plate shown in Fig. 1；
Fig. 3 is the structural schematic diagram of capacitive films vacuum meter in the prior art.
[description of symbols]
1: shell；11: test chamber；12: vacuum chamber；2: detection diaphragm；3: fixed substrate；4: fixed polar plate；41: pole plate draws
Outlet；42: left side fixed polar plate；43: right side fixed polar plate；44: outer ring fixed polar plate；45: inner ring fixed polar plate；5: cooling down
Agent；6: exhaust pipe；7: detection hole.
Specific embodiment
In order to preferably explain the present invention, in order to understand, with reference to the accompanying drawing, by specific embodiment, to this hair
It is bright to be described in detail.
Referring to Figures 1 and 2, the application provides a kind of capacitive films vacuum meter, which is characterized in that including shell 1, detection
Diaphragm 2, fixed substrate 3 and fixed polar plate 4.
Wherein, there is an accommodating space, detection diaphragm 2 is fixed in accommodating space and divides accommodating space in shell 1
At test chamber 11 and vacuum chamber 12.Fixed substrate 3 is fixed in vacuum chamber 12, and the one side of fixed substrate 3 towards detection diaphragm 2 is solid
There are two fixed polar plate 4, two 4 bilateral symmetries of fixed polar plate and arranged for interval for fixed setting.Two fixed polar plates 4 are fixed electricity
Pole, detection diaphragm 2 are meander electrode, and fixed electrode and meander electrode form a variable condenser.
Specifically, above-mentioned vacuum chamber 12 be all-sealed structure, tested low vacuum pressure by following detection holes 7 into
After entering test chamber 11, detection diaphragm 2 generates strain under the action of pressure difference, changes the distance between itself and fixed polar plate 4, because
And cause the variation of capacitor.Different vacuum degrees determines different elastic deformations, and capacitor also changes correspondingly, to realize to true
The measurement of reciprocal of duty cycle.
Find under study for action, for vacuum meter in the prior art, structure as shown in figure 3, include two pole plates of Internal and external cycle,
Respectively outer ring fixed polar plate 44 and inner ring fixed polar plate 45, as the pressure P in test chamber 111Greater than the pressure in vacuum chamber 12
P0When, detection diaphragm 2 can be deformed.The shape of deformation is a similar ball-crown body, and the high surrounding in center is low, and the height of spherical crown is big
It is small to depend entirely on P1With P0Between pressure difference size.According to capacitance equation C=ere0A/d (wherein er、e0It is normal for capacitivity
Number, public area of the A between two-plate, gap of the d between two-plate), it can be deduced that for each measuring electrode,
The score variation of capacitor is equal to the score variation in negative electrode gap spacing, i.e. Δ C//C0=-Δ d//d0(wherein C0It is first
Beginning state capacitance, d0For original state the two poles of the earth sheet separation).
However, for spherical crown, Δ d be not be a steady state value, it is big centered on distribution, surrounding is small, therefore in Δ C just
It can be much larger than outside Δ C.It is too small outside Δ C, for just there was only the C of tens pF originally0For, Δ C value is smaller, is more unfavorable for accurately
It gets, to influence to measure P1Precision.That is, the capacitance variations of vacuum meter Internal and external cycle pole plate are uneven in the prior art
Even, the capacitance change of outer ring is very small, also will while generally requiring to carry out signal enhanced processing in measurement, but amplify
Interference signal amplification, and then greatly reduce measurement accuracy.
Based on above-mentioned the study found that by two fixed polar plates 4 according to bilateral symmetry and the side that is spaced apart in the application
Formula setting, respectively left side fixed polar plate 42 and right side fixed polar plate 43, in this way, make two fixed polar plates 4 all some
Area can be such that two Δ C maximize, and then increase the accurate of measurement in detection 2 center deformation amount maximum region of diaphragm
Degree and stability, improve the measurement accuracy and measurement range of vacuum meter, while improving the sensitivity and resolution ratio of vacuum meter.
In a specific embodiment of the present application, the width in the gap between above-mentioned two fixed polar plate 4 is less than or equal to
0.1mm maximizes two Δ C as far as possible to make full use of the area of space in fixed substrate 3.
In practical applications, metal layer is equipped in the one side that two fixed polar plates 4 and detection diaphragm 2 are oppositely arranged.Gold
It is preferably nickel-base alloy that the material for belonging to layer, which is generally torpescence metal, the materials of shell 1 such as gold or silver, so that entire vacuum meter
Have better corrosion resistance, can be applied in harsh corrosive environment.The thickness of metal layer is generally 8~10 μm, with
The electric property for making fixed polar plate 4 more preferably, further increases the accuracy and sensitivity of vacuum meter.
Two fixed polar plates 4 generally use the means such as coating, plating or sputtering for fixed substrate 3 when being prepared
One layer of uniform metal layer is completely covered on one side towards detection diaphragm 2.Using laser-engraving technique, one is carved out in centre
Shielding wire, is divided into the right and left for block of metal layer, shielding wire is the gap between above-mentioned two fixed polar plate 4.This
The design of sample is so that two fixed polar plates 4 all some areas are detecting 2 center deformation amount maximum region of diaphragm, thus can make
Two Δ C are maximized, and then increase the accuracy and stability of measurement.
In the specific implementation process, exhaust pipe 6 is additionally provided on shell 1, exhaust pipe 6 is connected with vacuum chamber 12.General row
Tracheae 6 is controlled to a vacuum pump in the outside of vacuum chamber 12, to make to be in vacuum chamber 12 and being evacuated vacuum chamber 12
Vacuum state.In order to eliminate the residual gas in vacuum chamber 12, the condition of high vacuum degree in vacuum chamber 12 is kept for a long time to reach
Purpose is additionally provided with getter 5 on shell 1, and getter 5 is connected with vacuum chamber 12, to improve vacuum meter inner and outer air pressure
Stability.In actual use, such as the getter room being connected with vacuum chamber 12 can be set, getter 5 is placed on
In getter room, and the type of getter 5 is selected according to actual needs, the application is to this and without limit
It is fixed.
Above-mentioned vacuum meter further includes pole plate lead-out wire 41, and one end of pole plate lead-out wire 41 is connect with two fixed polar plates 4,
Its other end stretches out the outside of vacuum chamber 12 and is connected with external capacitance measurement circuit.Shell 1 is equipped with detection hole 7, and examines
Gaging hole 7 is connected with test chamber 11, is generally connect by air inlet pipe with the detection hole 7, for use in the low vacuum pressure that will be tested
Strength body is passed into test chamber 11.
It below will be with vacuum meter in the prior art shown in the vacuum meter and Fig. 3 in the present embodiment shown in Fig. 1
Structure for tested, it is specific as follows come the variation of the capacitance both compared:
First, capacitive films in the prior art vacuum meter shown in Fig. 3 is tested, measures its initial capacitance
Measure C0, then give certain constant pressure P1, the capacitance difference DELTA C of Internal and external cycle is measured, multiple samples are measured and guaranteed
The consistency of environment is tested, measurement result is as shown in table 1 below:
Table 1
The vacuum meter in the prior art it can be seen from upper table 1, the capacitance change of pole plate outer ring is very small,
Interference signal can also be simultaneously amplified while generally requiring to carry out signal enhanced processing when measurement, but amplify, this is to measurement
Precision is very unfavorable.
Secondly, similarly measurement environment and under the conditions of to the capacitive films vacuum in the present embodiment shown in Fig. 1
Meter is tested, its initial capacitance C is measured0, then give identical constant pressure P1, measure the left and right sides capacitance it is poor
It is worth Δ C, multiple samples is measured and guarantee to test with the consistency of environment, measurement result are as shown in the table:
Table 2
After using two fixed polar plates 4 being symmetrically distributed in the present embodiment it can be seen from upper table 2, vacuum meter
Initial capacitance is improved, and capacitance change is expanded, and left and right sides capacitance relative equilibrium.Therefore, subsequent letter
Number sampling and processing difficulty decrease, and interference signal is reduced, and measurement accuracy is guaranteed.
More than, it is only presently preferred embodiments of the present invention, is not the limitation for doing other forms to invention, it is any to be familiar with
Professional and technical personnel is changed or is modified as the equivalence enforcement of equivalent variations possibly also with the technology contents of the disclosure above
Example.But without departing from the technical solutions of the present invention, according to the technical essence of the invention to the above embodiments
What simple modification, equivalent variations and remodeling, still falls within the protection scope of technical solution of the present invention.
Claims (10)
1. a kind of capacitive films vacuum meter, which is characterized in that including shell (1), detection diaphragm (2), fixed substrate (3) and consolidate
Fixed plate (4)；
There is an accommodating space, it is interior and by the appearance that the detection diaphragm (2) is fixed on the accommodating space in the shell (1)
Test chamber (11) and vacuum chamber (12) are divided between emptying；
The fixed substrate (3) is fixed in the vacuum chamber (12), and the fixed substrate (3) is towards the detection diaphragm (2)
One side fixed setting there are two the fixed polar plate (4), two fixed polar plates (4) bilateral symmetries and arranged for interval；
Wherein, two fixed polar plates (4) are fixed electrode, and the detection diaphragm (2) is meander electrode, the fixed electrode
A variable condenser is formed with the meander electrode.
2. capacitive films vacuum meter as described in claim 1, which is characterized in that
The width in the gap between two fixed polar plates (4) is less than or equal to 0.1mm.
3. capacitive films vacuum meter as described in claim 1, which is characterized in that
Metal layer is equipped in the one side that two fixed polar plates (4) and detection diaphragm (2) are oppositely arranged.
4. capacitive films vacuum meter as claimed in claim 3, which is characterized in that
The metal layer with a thickness of 8~10 μm.
5. capacitive films vacuum meter as claimed in claim 3, which is characterized in that
The material of the metal layer is gold or silver.
6. capacitive films vacuum meter as described in claim 1, which is characterized in that
It is additionally provided with getter (5) on the shell (1), the getter (5) is connected with the vacuum chamber (12).
7. capacitive films vacuum meter as described in claim 1, which is characterized in that it further include pole plate lead-out wire (41), it is described
One end of pole plate lead-out wire (41) is connect with two fixed polar plates (4), and the other end stretches out the outer of the vacuum chamber (12)
Portion.
8. capacitive films vacuum meter as described in claim 1, which is characterized in that
The shell (1) is equipped with detection hole (7), and the detection hole (7) is connected with the test chamber (11).
9. capacitive films vacuum meter as described in claim 1, which is characterized in that
It is additionally provided with exhaust pipe (6) on the shell (1), the exhaust pipe (6) is connected with the vacuum chamber (12).
10. such as the described in any item capacitive films vacuum meters of claim 1-9, which is characterized in that
The material of the shell (1) is nickel-base alloy.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910263025.3A CN109813492A (en) | 2019-04-02 | 2019-04-02 | A kind of capacitive films vacuum meter |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910263025.3A CN109813492A (en) | 2019-04-02 | 2019-04-02 | A kind of capacitive films vacuum meter |
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| CN109813492A true CN109813492A (en) | 2019-05-28 |
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| CN201910263025.3A Pending CN109813492A (en) | 2019-04-02 | 2019-04-02 | A kind of capacitive films vacuum meter |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110319971A (en) * | 2019-08-02 | 2019-10-11 | 上海振太仪表有限公司 | A kind of bipolar condenser type vacuum meter and its corresponding measuring circuit |
| CN114001858A (en) * | 2020-07-28 | 2022-02-01 | 中微半导体设备(上海)股份有限公司 | Capacitance type film vacuum gauge, plasma reaction device and film preparation method |
| CN114459670A (en) * | 2022-04-12 | 2022-05-10 | 季华实验室 | Capacitance film vacuum gauge |
| CN115386856A (en) * | 2022-10-19 | 2022-11-25 | 季华实验室 | Diamond thin film capacitor, manufacturing method thereof, vacuum gauge and manufacturing method thereof |
| CN110319971B (en) * | 2019-08-02 | 2024-04-23 | 上海振太仪表有限公司 | Measuring circuit for measuring pressure in bipolar capacitance type vacuum gauge |
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| EP0195985A2 (en) * | 1985-03-27 | 1986-10-01 | Siemens Aktiengesellschaft | Capacitive pressure sensor |
| JPS62167426A (en) * | 1985-11-29 | 1987-07-23 | Shimadzu Corp | Electrostatic capacity type pressure sensor |
| CN101776502A (en) * | 2008-12-24 | 2010-07-14 | 佳能安内华股份有限公司 | Capacitance diaphragm gauge and vaccum apparatus |
| CN201637532U (en) * | 2009-12-30 | 2010-11-17 | 中山市创源电子有限公司 | Capacitance pressure sensor and pressure detection device comprising same |
| CN209470807U (en) * | 2019-04-02 | 2019-10-08 | 上海振太仪表有限公司 | A kind of capacitive films vacuum meter |
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2019
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| EP0195985A2 (en) * | 1985-03-27 | 1986-10-01 | Siemens Aktiengesellschaft | Capacitive pressure sensor |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110319971A (en) * | 2019-08-02 | 2019-10-11 | 上海振太仪表有限公司 | A kind of bipolar condenser type vacuum meter and its corresponding measuring circuit |
| CN110319971B (en) * | 2019-08-02 | 2024-04-23 | 上海振太仪表有限公司 | Measuring circuit for measuring pressure in bipolar capacitance type vacuum gauge |
| CN114001858A (en) * | 2020-07-28 | 2022-02-01 | 中微半导体设备(上海)股份有限公司 | Capacitance type film vacuum gauge, plasma reaction device and film preparation method |
| CN114001858B (en) * | 2020-07-28 | 2024-04-05 | 中微半导体设备(上海)股份有限公司 | Capacitive film vacuum gauge, plasma reaction device and film preparation method |
| CN114459670A (en) * | 2022-04-12 | 2022-05-10 | 季华实验室 | Capacitance film vacuum gauge |
| CN114459670B (en) * | 2022-04-12 | 2022-06-17 | 季华实验室 | Capacitance film vacuum gauge |
| CN115386856A (en) * | 2022-10-19 | 2022-11-25 | 季华实验室 | Diamond thin film capacitor, manufacturing method thereof, vacuum gauge and manufacturing method thereof |
| CN115386856B (en) * | 2022-10-19 | 2023-06-02 | 季华实验室 | Diamond thin film capacitor, method for manufacturing the same, vacuum gauge and method for manufacturing the same |
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