CN115493744B - Wide-range capacitive thin film vacuum gauge and vacuum degree detection method - Google Patents
Wide-range capacitive thin film vacuum gauge and vacuum degree detection method Download PDFInfo
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- CN115493744B CN115493744B CN202211454920.1A CN202211454920A CN115493744B CN 115493744 B CN115493744 B CN 115493744B CN 202211454920 A CN202211454920 A CN 202211454920A CN 115493744 B CN115493744 B CN 115493744B
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- 239000010409 thin film Substances 0.000 title claims description 28
- 238000001514 detection method Methods 0.000 title abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 8
- 238000005259 measurement Methods 0.000 claims description 76
- 239000010408 film Substances 0.000 claims description 57
- 239000003990 capacitor Substances 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 26
- 230000005684 electric field Effects 0.000 claims description 8
- 229910052594 sapphire Inorganic materials 0.000 claims description 8
- 239000010980 sapphire Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 6
- 239000012528 membrane Substances 0.000 abstract description 4
- 238000012360 testing method Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 35
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
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Abstract
The utility model relates to the field of semiconductors, particularly, relate to a capacitance film vacuometer of wide range and vacuum degree detection method, through setting up first reference chamber and second reference chamber, and first degree of depth is big than the second degree of depth, first pressure sensing membrane is big than the thickness of second pressure sensing membrane, therefore, the measurable pressure value of first reference chamber is big than the measurable pressure value of second reference chamber, and the vacuum degree measuring range of first reference chamber is big than the vacuum degree measuring range of second reference chamber, no matter the pressure value of the gas to be measured is big or little, can all realize through the capacitance film vacuometer of wide range and detect, need not to cooperate the use through the capacitance film vacuometer of a plurality of current vacuum degrees, reduce capacitance film vacuometer manufacturing cost and avoid the testing process miscellaneous, thereby improve the universality of the capacitance film vacuometer of wide range.
Description
Technical Field
The application relates to the field of semiconductors, in particular to a wide-range capacitive thin film vacuum gauge and a vacuum degree detection method.
Background
The capacitance film vacuum gauge is a direct measurement type, full-pressure type high-sensitivity and high-precision vacuum gauge, the core part of the capacitance film vacuum gauge is a first sensing diaphragm, the capacitance variation between the first sensing diaphragm and a first fixed electrode plate is a core factor influencing the precision, sensitivity and range of the capacitance film vacuum gauge, the existing capacitance film vacuum gauge is composed of the first sensing diaphragm with single thickness and a fixed electrode, the capacitance film vacuum gauge is limited by the influences of factors such as pressure bearing capacity, micro capacitance signal processing capacity and sensitivity, the vacuum degree measurement range is small, if high-precision measurement is required to be carried out in a wider vacuum range, a plurality of capacitance film vacuum gauges are required to be matched for use, and the cost and the complexity of equipment are greatly increased.
In view of the above problems, no effective technical solution exists at present.
Disclosure of Invention
The application aims to provide a wide-range capacitance film vacuum gauge and a vacuum degree detection method, which can measure the wide-range vacuum degree and improve the universality of the capacitance film vacuum gauge.
In a first aspect, the present application provides a wide range capacitive thin film vacuum gauge comprising: the device comprises a shell, a first pressure sensing film, a second pressure sensing film, a first fixed electrode, a second fixed electrode, a first movable electrode, a second movable electrode and a fixed base;
the shell is provided with an accommodating cavity, the fixed base is arranged in the shell, and a measuring chamber is formed between the fixed base and the inner wall of the shell;
a first groove with a first depth and a second groove with a second depth are respectively formed in two sides of the fixing base, the first pressure sensing film and the first groove form a first reference chamber in a surrounding mode, the second pressure sensing film and the second groove form a second reference chamber in a surrounding mode, the first depth is larger than the second depth, and the thickness of the first pressure sensing film is larger than that of the second pressure sensing film;
the first fixed electrode and the first movable electrode are parallel to each other and are oppositely arranged to form a first capacitor, the first fixed electrode is arranged on the groove wall of the first groove, and the first movable electrode is arranged on the first pressure sensing film;
the second fixed electrode and the second movable electrode are parallel to each other and are oppositely arranged to form a second capacitor, the second fixed electrode is arranged on the groove wall of the second groove, and the second movable electrode is arranged on the second pressure sensing film.
The application provides a wide-range capacitance film vacuum gauge, through setting up first reference chamber and second reference chamber, and first degree of depth is big than the second degree of depth, first pressure sensing diaphragm is big than the thickness of second pressure sensing diaphragm, therefore, the measurable pressure value of first reference chamber is big than the measurable pressure value of second reference chamber, and the vacuum measurement range of first reference chamber is big than the vacuum measurement range of second reference chamber, the pressure value of the gas that awaits measuring is less then with the measurement result of second reference chamber as the standard, the pressure value of the gas that awaits measuring is great then with the measurement result of first reference chamber as the standard, no matter whether the pressure value of the gas that awaits measuring is big or little, can all realize vacuum degree detection through the capacitance film vacuum gauge of wide-range, need not to use through the cooperation of a plurality of current capacitance film vacuum gauges, reduce capacitance film vacuum gauge production cost and avoid the testing process complicated, thereby improve the universality of wide capacitance film vacuum gauge.
Optionally, the first groove and the second groove are respectively disposed on two opposite sides of the fixing base.
Optionally, a metal plate is disposed between the first reference chamber and the second reference chamber, the metal plate is fixedly connected to the housing, a plurality of through holes are formed in the position of the metal plate, which is located in the measurement chamber, and the through holes are used for communicating the measurement chamber on two sides of the metal plate, and the metal plate is used for shielding an electric field between the first capacitor and the second capacitor.
This application utilizes the electric field between first condenser and the second condenser of metal sheet shielding through setting up the metal sheet to can improve measurement accuracy.
Optionally, the first pressure sensing membrane, the second pressure sensing membrane and the fixing base are all sapphire materials.
Optionally, the vacuum measurement ranges of the first reference chamber and the second reference chamber partially overlap.
The vacuum degree measuring ranges of the first reference chamber and the second reference chamber are partially overlapped, so that the gas to be detected can be prevented from being positioned between the vacuum degree measuring range of the first reference chamber and the vacuum degree measuring range of the second reference chamber and being incapable of being detected.
Optionally, the first vacuum degree measurement range of the first reference chamber is 0.7Torr-1000Torr, and the second vacuum degree measurement range of the second reference chamber is 0.001Torr-2Torr.
Optionally, the first depth is 30 μm to 42 μm, the thickness of the first pressure sensitive film is 750 μm to 850 μm, and the diameter of the first groove is 26 μm to 30 μm;
the second depth is 15-25 μm, the thickness of the second pressure-sensitive film is 120-160 μm, and the diameter of the second groove is 26-30 μm.
Optionally, the first depth is 40 μm, the thickness of the first pressure-sensitive film is 800 μm, and the diameter of the first groove is 28 μm;
the second depth is 20 μm, the thickness of the second pressure sensing diaphragm is 150 μm, and the diameter of the second groove is 28 μm.
Optionally, the casing is provided with a connector, the connector is communicated with the measuring chamber, a baffle is arranged at the joint of the connector and the measuring chamber, and a plurality of mesh-shaped sieve holes are arranged on the baffle.
In a second aspect, the present application provides a vacuum degree detection method, based on any one of the above wide-range capacitance thin film vacuum gauges, including the steps of:
A1. acquiring the maximum value of the pressure values of the gas to be measured in the first reference chamber and the second reference chamber;
A2. judging whether the maximum value is larger than a preset threshold value or not;
A3. if the maximum value is larger than the preset threshold value, outputting the measurement result of the first reference chamber as a valid result;
A4. and if the maximum value is not larger than the preset threshold value, outputting the measurement result of the second reference chamber as a valid result.
Has the beneficial effects that:
the application provides a wide range's electric capacity film vacuometer and vacuum detection method, reference the room through setting up first reference room and second, and first degree of depth is big than the second degree of depth, first pressure sensing diaphragm is big than the thickness of second pressure sensing diaphragm, therefore, the measurable pressure value of first reference room is big than the measurable pressure value of second reference room, and the vacuum measurement range of first reference room is big than the vacuum measurement range of second reference room, no matter the pressure value of the gas that awaits measuring is big or little, can all realize vacuum detection through the electric capacity film vacuometer of wide range, need not to use through the cooperation of a plurality of current electric capacity film vacuometers, reduce electric capacity film vacuometer manufacturing cost and avoid the testing process complicated, thereby improve the universality of the electric capacity film vacuometer of wide range.
Drawings
Fig. 1 is a cross-sectional view of the overall structure of a wide-range capacitance thin film vacuum gauge provided by the present application.
FIG. 2 is experimental data provided herein for measuring vacuum in a first reference cell.
FIG. 3 is a linear plot of the laboratory data of FIG. 2.
FIG. 4 is experimental data provided herein for measuring vacuum in a second reference cell.
FIG. 5 is a linear plot of the laboratory data of FIG. 4.
Description of reference numerals: 100. a housing; 101. a measurement chamber; 102. a connecting port; 201. A first pressure-sensitive film; 202. a second pressure-sensitive film; 301. a first fixed electrode; 302. a second fixed electrode; 401. a first movable electrode; 402. a second movable electrode; 500. a fixed base; 601. a first reference chamber; 602. a second reference chamber; 700. a metal plate; 701. a first depth; 702. a second depth; 800. and a baffle plate.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
Referring to fig. 1, fig. 1 is a cross-sectional view of an overall structure of a wide-range capacitance thin film vacuum gauge in an embodiment of the present application, which can measure a wide-range vacuum degree and improve the universality of the capacitance thin film vacuum gauge.
The application provides a capacitance film vacuum gauge of wide range includes: a case 100, a first pressure-sensitive film 201, a second pressure-sensitive film 202, a first fixed electrode 301, a second fixed electrode 302, a first movable electrode 401, a second movable electrode 402, and a fixed base 500
The housing 100 has a receiving cavity, the fixing base 500 is disposed in the housing 100, and a measuring chamber 101 is formed between the fixing base 500 and the inner wall of the housing 100;
a first groove with a first depth 701 and a second groove with a second depth 702 are respectively arranged on two sides of the fixed base 500, the first pressure sensing diaphragm 201 and the first groove enclose a first reference chamber 601, the second pressure sensing diaphragm 202 and the second groove enclose a second reference chamber 602, the first depth 701 is larger than the second depth 702, and the first pressure sensing diaphragm 201 is larger than the second pressure sensing diaphragm 202 in thickness;
the first fixed electrode 301 and the first movable electrode 401 are parallel to each other and are oppositely arranged to form a first capacitor, the first fixed electrode 301 is arranged on the wall of the first groove, and the first movable electrode 401 is arranged on the first pressure-sensitive film 201;
the second fixed electrode 302 and the second movable electrode 402 are parallel to each other and are disposed opposite to each other to form a second capacitor, the second fixed electrode 302 is disposed on the groove wall of the second groove, and the second movable electrode 402 is disposed on the second pressure-sensitive film 202.
Specifically, as shown in fig. 1, by providing a first reference chamber 601 and a second reference chamber 602, and the first depth 701 is greater than the second depth 702, and the first pressure sensing diaphragm 201 is greater than the second pressure sensing diaphragm 202, therefore, the pressure value measurable by the first reference chamber 601 is greater than the pressure value measurable by the second reference chamber 602, and the vacuum degree measurement range of the first reference chamber 601 is greater than the vacuum degree measurement range of the second reference chamber 602, the pressure value of the gas to be measured is smaller than the measurement result of the second reference chamber 602, and the pressure value of the gas to be measured is larger than the measurement result of the first reference chamber 601, no matter whether the pressure value of the gas to be measured is large or small, the vacuum degree detection can be achieved by the wide-range capacitance film vacuum gauge, and there is no need to use a plurality of existing capacitance film vacuum gauges in cooperation, thereby reducing the production cost of the capacitance film vacuum gauge and avoiding the complexity of the detection process, and thus improving the universality of the wide-range capacitance film vacuum gauge.
In practical applications, the first reference chamber 601 and the second reference chamber 602 may be disposed on two adjacent sides or two opposite sides of the fixed base 500, and are not limited in particular, wherein the first pressure sensing diaphragm 201, the second pressure sensing diaphragm 202, the first groove, the second groove, the first fixed electrode 301, the first movable electrode 401, the second fixed electrode 302, and the second movable electrode 402 are all circular, so that when subjected to air pressure, the first pressure sensing diaphragm 201 and the second pressure sensing diaphragm 202 can elastically deform uniformly, so as to ensure that the capacitance values and the pressure values of the first capacitor and the second capacitor have good linearity.
Wherein, the specific shape of casing 100 and fixed base 500 can set up according to actual need, in this application embodiment, preferably, casing 100 is cylindrical, and first pressure sensing diaphragm 201 and second pressure sensing diaphragm 202 are the circular of coaxial setting with casing 100, and fixed base 500 is cylindrical with casing 100 coaxial setting (at this moment, first recess and second recess set up respectively in fixed base 500's two terminal surfaces department), guarantee to be relatively parallel between first pressure sensing diaphragm 201 and the second pressure sensing diaphragm 202, can avoid first pressure sensing diaphragm 201 and second pressure sensing diaphragm 202's position to take place the slope, lead to the measured data distortion.
In some embodiments, the first and second grooves are disposed on opposite sides of the fixing base 500.
Specifically, when the first groove and the second groove are respectively disposed at opposite sides of the fixing base 500, a distance between the first capacitor formed by the first groove and the second capacitor formed by the second groove is the farthest, so that an influence of electric field interference between the first capacitor and the second capacitor is minimized, and thus, measurement accuracy of the first capacitor and the second capacitor can be improved.
In some embodiments, a metal plate 700 is disposed between the first reference chamber 601 and the second reference chamber 602, the metal plate 700 is fixedly connected to the housing 100, a plurality of through holes are opened at a position of the metal plate 700, where the through holes are located at the measurement chamber 101, the through holes are used for communicating the measurement chamber 101 at two sides of the metal plate 700, and the metal plate 700 is used for shielding an electric field between the first capacitor and the second capacitor.
Specifically, as shown in fig. 1, since the first capacitor and the second capacitor are closer to each other, and are powered on at the same time when in use, and are affected by electric field coupling, a certain interference may be generated between the first capacitor and the second capacitor, and in order to suppress the coupling of parasitic capacitance and achieve the purpose of shielding the electric field, in the present application, a metal plate 700 is disposed between the first capacitor and the second capacitor, wherein the metal plate 700 completely divides the accommodating cavity of the housing 100 into two inner cavities (i.e., the first capacitor and the measurement chamber 101 where the first capacitor is located, and the second capacitor and the measurement chamber 101 where the second capacitor is located), and meanwhile, a plurality of through holes are disposed at the position of the measurement chamber 101 of the metal plate 700, and the measurement chambers 101 at the two sides of the metal plate 700 are communicated through the through holes, so as to meet the purpose of shielding the electric field, improve the measurement accuracy, and enable the entire measurement chamber 101 inside the housing 100 to be communicated, and there is no need to additionally dispose interfaces for connecting the measurement chambers 101 and the gas to be measured at the two sides separated by the metal plate 700.
Wherein, the fixing base 500 may be fixedly connected with the housing 100 by a fixing component (e.g., a connecting column); since the metal plate 700 is directly fixed to the housing 100, the fixing base 500 can be fixed to the housing 100 by the metal plate 700, and thus the number of fixing members for providing the fixing base 500 can be reduced.
In some embodiments, the first pressure sensing die 201, the second pressure sensing die 202, and the fixture base 500 are all sapphire materials.
Specifically, most of the traditional capacitance film vacuum gauges adopt a ceramic material as a base, an induction diaphragm made of a metal material, the ceramic material belongs to polycrystal, a sapphire material is single crystal, the single crystal material cannot generate fatigue, creep and hysteresis, the sapphire material has higher corrosion resistance than the ceramic material and is basically not influenced by various corrosive gases, so that the diaphragm made of the sapphire material has the advantages that compared with the diaphragm made of the metal material: since the fixing base 500 made of sapphire has higher corrosion resistance than a base made of a ceramic material without hysteresis and fatigue, the first pressure-sensing diaphragm 201, the second pressure-sensing diaphragm 202, and the fixing base 500 are all made of sapphire in the embodiment of the present application.
In some embodiments, the vacuum measurement ranges of the first reference chamber 601 and the second reference chamber 602 partially overlap.
Specifically, the present application can prevent the gas to be measured from being undetectable between the vacuum degree measurement range of the first reference chamber 601 and the vacuum degree measurement range of the second reference chamber 602 by setting the vacuum degree measurement ranges of the first reference chamber 601 and the second reference chamber 602 to have a partial overlap.
In some embodiments, the first vacuum measurement range of the first reference cell 601 is 0.7Torr to 1000Torr and the second vacuum measurement range of the second reference cell 602 is 0.001Torr to 2Torr (for convenience of distinguishing the vacuum measurement ranges of the first reference cell 601 and the second reference cell 602, the vacuum measurement range of the first reference cell 601 is referred to herein as the first vacuum measurement range and the vacuum measurement range of the second reference cell 602 is referred to herein as the second vacuum measurement range).
Specifically, by setting the measurement of the first reference chamber 601 to a large range and the measurement of the second reference chamber 602 to a small range, a relatively wide range is formed, and thus, the measurement range of the capacitance thin film vacuum gauge can be increased.
In some embodiments, the first depth 701 is 30 μm to 42 μm, the thickness of the first pressure-sensitive film 201 is 750 μm to 850 μm, and the diameter of the first groove is 26 μm to 30 μm;
the second depth 702 is 15 μm to 25 μm, the thickness of the second pressure-sensitive film 202 is 120 μm to 160 μm, and the diameter of the second groove is 26 μm to 30 μm.
Specifically, the parameters of the first reference chamber 601 are set, so that the vacuum degree measurement range of the first reference chamber 601 is in a wide range of 0.7Torr-1000Torr, and it is calculated through experiments of the applicant and related theories (which are prior art and not described in detail here), when actually measuring the gas to be measured in the first vacuum degree measurement range, the measurement result of the measurement performed by using the wide-range capacitance film vacuum gauge set in the present application is shown in fig. 2, it can be known from the data in fig. 2 that the displacement variation of the first movable electrode on the first pressure sensing film 201 is smaller than the first depth 701, so that the sensitivity of the vacuum degree detection of the first reference chamber 601 is ensured, and by inputting the gas to be measured with different pressure values, the linearity between the capacitance value and the pressure value can be visually seen from fig. 3, so that the linearity of the vacuum degree detection result of the first reference chamber 601 is ensured to be more reliable, wherein the data output by the first capacitor and the second capacitor are capacitance values; similarly, by setting various parameters of the second reference chamber 602, the vacuum degree measurement range of the second reference chamber 602 is within a small range of 0.001Torr to 2Torr, which is calculated through experiments and related theories (which are prior art and not described in detail herein) of the applicant, when actually measuring the gas to be measured within the second vacuum degree measurement range, the measurement result obtained by using the wide-range capacitance thin film vacuum gauge set in the present application is as shown in fig. 4, it can be known from the data in fig. 4 that the displacement variation of the second movable electrode on the second pressure sensing diaphragm 202 is smaller than the second depth 702, the sensitivity of the vacuum degree detection of the second reference chamber 602 is ensured, and by inputting the gas to be measured with different pressure values, the linearity between the capacitance value and the pressure value can be visually seen from fig. 5 to be good, thereby ensuring that the linearity of the vacuum degree detection result of the second reference chamber 602 is more reliable.
In some embodiments, the first depth 701 is 40 μm, the thickness of the first pressure sensing die 201 is 800 μm, and the diameter of the first grooves is 28 μm;
the second depth 702 was 20 μm, the thickness of the second pressure-sensitive die 202 was 150 μm, and the diameter of the second groove was 28 μm.
Specifically, by setting the preferable parameters of the first reference chamber 601 and the second reference chamber 602, the sensitivity of the detection of the vacuum degrees of the first reference chamber 601 and the second reference chamber 602 is ensured to be higher, and the linearity of the detection results of the vacuum degrees of the first reference chamber 601 and the second reference chamber 602 is ensured to be more reliable.
In some embodiments, the housing 100 is provided with a connection port 102, the connection port 102 is communicated with the measurement chamber 101, a baffle 800 is arranged at the connection position of the connection port 102 and the measurement chamber 101, and a plurality of mesh-shaped sieve holes are arranged on the baffle 800.
Specifically, set up connector 102 on through casing 100, and make connector 102 and measuring chamber 101 communicate, when in actual use, make things convenient for the gas that awaits measuring to directly let in measuring chamber 101 from connector 102, when the gas that awaits measuring lets in measuring chamber 101 from connector 102, the gas that awaits measuring can directly impact first pressure sensing diaphragm 201 or second pressure sensing diaphragm 202, cause first pressure sensing diaphragm 201 or second pressure sensing diaphragm 202 to produce excessive deformation easily, influence the accuracy of wide-range electric capacity film vacuum gauge, consequently set up baffle 800 in the junction of connector 102 and measuring chamber 101, baffle 800 can avoid the gas that awaits measuring to directly impact the elastic diaphragm, be equipped with a plurality of netted sieve meshes on baffle 800, make the gas that awaits measuring smoothly let in measuring chamber 101.
In a second aspect, the present application provides a vacuum degree detection method, based on any one of the wide-range capacitance thin film vacuum gauges, including the steps of:
A1. acquiring the maximum value of the pressure values of the gas to be measured in the first reference chamber 601 and the second reference chamber 602;
A2. judging whether the maximum value is larger than a preset threshold value or not;
A3. if the maximum value is greater than the preset threshold value, outputting the measurement result of the first reference chamber 601 as a valid result;
A4. if the maximum value is not greater than the predetermined threshold value, the measurement result of the second reference chamber 602 is output as a valid result.
For example, based on the first vacuum degree measurement range of the first reference chamber 601 being 0.7Torr-1000Torr and the second vacuum degree measurement range of the second reference chamber 602 being 0.001Torr-2Torr, if the actual pressure value of the gas to be measured is 10Torr and the preset threshold value is 2Torr, then the maximum value of the pressure value of the gas to be measured by the first reference chamber 601 can output 10Torr, and the maximum value of the pressure value of the gas to be measured by the second reference chamber 602 can output 2Torr, then the measurement result of the first reference chamber 601 is output as a valid result;
if the actual pressure of the gas to be measured is 1Torr, the maximum value of the pressure value of the gas to be measured by the first reference chamber 601 may output 1Torr, while the maximum value of the pressure value of the gas to be measured by the second reference chamber 602 may output 1Torr, and the preset threshold value is 2Torr, the result measured by the second reference chamber 602 is output as a valid result (since the vacuum degree measurement ranges are in the overlapping range, it is also reasonable to output the result measured by the first reference chamber 601 as a valid result).
Specifically, the vacuum degree measurement values corresponding to the first reference chamber 601 and the second reference chamber 602 of the present application are absolute value vacuum degrees (i.e. directly equal to the pressure value of the gas to be measured), and by determining whether the maximum value is greater than the preset threshold, the measurement result of the corresponding reference chamber is output as an effective result, because the vacuum degree measurement range of the first reference chamber 601 is greater than the vacuum degree measurement range of the second reference chamber 602, the measurement result of the second reference chamber 602 is taken as the reference when the pressure value of the gas to be measured is smaller (and not greater than the preset threshold), and the measurement result of the first reference chamber 601 is taken as the reference when the pressure value of the gas to be measured is larger (and greater than the preset threshold), therefore, no matter whether the pressure value of the gas to be measured is large or small, vacuum degree detection can be achieved by a wide-range capacitive thin film vacuum gauge, and an effective result is automatically output, without using a plurality of existing capacitive thin film vacuum gauges in a matching manner, thereby reducing the production cost of the capacitive thin film vacuum gauges and avoiding a complex detection process, thereby improving the universality of the wide-range capacitive thin film vacuum gauges.
As can be seen from the above, according to the wide-range capacitive thin film vacuum gauge and the vacuum degree detection method provided by the present application, by providing the first reference chamber 601 and the second reference chamber 602, and the first depth 701 is greater than the second depth 702, and the first pressure sensing diaphragm 201 is greater than the second pressure sensing diaphragm 202, therefore, the pressure value measurable by the first reference chamber 601 is greater than the pressure value measurable by the second reference chamber 602, and the vacuum degree measurement range of the first reference chamber 601 is greater than the vacuum degree measurement range of the second reference chamber 602, when the pressure value of the gas to be detected is smaller, the measurement result of the second reference chamber 602 is taken as the reference, when the pressure value of the gas to be detected is larger, the measurement result of the first reference chamber 601 is taken as the reference, regardless of whether the pressure value of the gas to be detected is large or small, the vacuum degree detection can be achieved by the wide-range capacitive thin film vacuum gauge, without using a plurality of existing capacitive thin film vacuum gauges in a matching manner, the production cost of the capacitive thin film vacuum gauges is reduced, and the detection process is avoided, thereby increasing the popularity of the wide-range capacitive thin film vacuum gauges.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. The above-described apparatus embodiments are merely illustrative, and for example, a division of a unit is only a logical division, and other divisions may be realized in practice, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
In addition, units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
Furthermore, the functional modules in the embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The above embodiments are merely examples of the present application and are not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (8)
1. A wide range capacitive thin film vacuum gauge comprising: a housing (100), a first pressure-sensitive film (201), a second pressure-sensitive film (202), a first fixed electrode (301), a second fixed electrode (302), a first movable electrode (401), a second movable electrode (402), and a fixed base (500);
the shell (100) is provided with an accommodating cavity, the fixed base (500) is arranged in the shell (100), and a measuring chamber (101) is formed between the fixed base (500) and the inner wall of the shell (100);
a first groove with a first depth (701) and a second groove with a second depth (702) are respectively arranged on two sides of the fixing base (500), the first pressure sensing film (201) and the first groove enclose a first reference chamber (601), the second pressure sensing film (202) and the second groove enclose a second reference chamber (602), the first depth (701) is greater than the second depth (702), and the first pressure sensing film (201) is greater than the second pressure sensing film (202);
the first fixed electrode (301) and the first movable electrode (401) are parallel to each other and are oppositely arranged to form a first capacitor, the first fixed electrode (301) is arranged on the wall of the first groove, and the first movable electrode (401) is arranged on the first pressure-sensitive film (201);
the second fixed electrode (302) and the second movable electrode (402) are parallel to each other and are oppositely arranged to form a second capacitor, the second fixed electrode (302) is arranged on the wall of the second groove, and the second movable electrode (402) is arranged on the second pressure sensing film (202);
the first pressure sensing film (201), the second pressure sensing film (202) and the fixed base (500) are made of sapphire materials;
be provided with metal sheet (700) between first reference room (601) and second reference room (602), metal sheet (700) with casing (100) fixed connection, metal sheet (700) will the holding chamber of casing (100) is totally separated into two inner chambers, and first the inner chamber includes first condenser and measuring chamber (101) that locate, and the second the inner chamber includes second condenser and measuring chamber (101) that locate, a plurality of through-holes have been seted up in metal sheet (700) position department in measuring chamber (101), the through-hole is used for communicating measuring chamber (101) of metal sheet (700) both sides, metal sheet (700) are used for shielding the electric field between first condenser and the second condenser.
2. The wide-range capacitive thin film gauge of claim 1, wherein the first and second grooves are disposed on opposite sides of the fixed base (500).
3. The wide-range capacitive thin film gauge of claim 1, characterized in that the vacuum measurement ranges of the first reference chamber (601) and the second reference chamber (602) partially overlap.
4. The wide-range capacitive thin film gauge of claim 3, characterized in that the first vacuum measurement range of the first reference chamber (601) is 0.7Torr-1000Torr and the second vacuum measurement range of the second reference chamber (602) is 0.001Torr-2Torr.
5. The wide-range capacitive thin film gauge as claimed in claim 4, wherein the first depth (701) is 30 μm to 42 μm, the thickness of the first pressure sensing diaphragm (201) is 750 μm to 850 μm, and the diameter of the first groove is 26 μm to 30 μm;
the second depth (702) is 15 μm to 25 μm, the thickness of the second pressure-sensitive film (202) is 120 μm to 160 μm, and the diameter of the second groove is 26 μm to 30 μm.
6. The wide-range capacitive thin film gauge as claimed in claim 5, wherein the first depth (701) is 40 μm, the thickness of the first pressure sensing diaphragm (201) is 800 μm, and the diameter of the first groove is 28 μm;
the second depth (702) is 20 μm, the thickness of the second pressure-sensitive die (202) is 150 μm, and the diameter of the second groove is 28 μm.
7. The wide-range capacitive thin film gauge as claimed in claim 1, characterized in that the housing (100) is provided with a connection port (102), the connection port (102) communicating with the measuring chamber (101); a baffle (800) is arranged at the joint of the connecting port (102) and the measuring chamber (101), and a plurality of mesh-shaped sieve holes are arranged on the baffle (800).
8. A method for detecting a degree of vacuum, based on the wide-range capacitive thin film vacuum gauge of any one of claims 1to 7, comprising the steps of:
A1. acquiring the maximum value of the pressure values of the gas to be measured in the first reference chamber (601) and the second reference chamber (602);
A2. judging whether the maximum value is larger than a preset threshold value or not;
A3. -if said maximum value is greater than said preset threshold value, outputting the measurement result of said first reference chamber (601) as a valid result;
A4. if the maximum value is not greater than the preset threshold value, outputting the measurement result of the second reference chamber (602) as a valid result.
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