CN109813211B - Method capable of simultaneously measuring displacement and thickness of metal workpiece - Google Patents

Method capable of simultaneously measuring displacement and thickness of metal workpiece Download PDF

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CN109813211B
CN109813211B CN201910135095.0A CN201910135095A CN109813211B CN 109813211 B CN109813211 B CN 109813211B CN 201910135095 A CN201910135095 A CN 201910135095A CN 109813211 B CN109813211 B CN 109813211B
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eddy current
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CN109813211A (en
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李国民
郝兵杰
白坤
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance

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Abstract

The invention belongs to the technical field of information measurement, and discloses a method capable of simultaneously measuring the displacement and the thickness of a metal workpiece, which comprises the following steps: (21) arranging an eddy current sensor at one side of a metal workpiece, wherein the eddy current sensor generates a low-frequency sinusoidal excitation signal; (22) when the eddy current sensor is not adjacent to the metal workpiece, acquiring an output signal and a current signal of the eddy current sensor; when the eddy current sensor is close to the metal workpiece, data are collected again; (23) carrying out curve fitting on the obtained measured data pairs of a plurality of groups of metal workpieces with known thickness and displacement to obtain a mathematical expression of the eddy current sensor; (24) and (5) performing the steps (21) to (22) on any metal workpiece to be measured, and substituting the obtained data into a mathematical expression so as to measure the displacement and the thickness of the metal workpiece. The invention measures displacement and thickness simultaneously through specific excitation signals, is simple and easy to implement, has higher flexibility and wider application range.

Description

Method capable of simultaneously measuring displacement and thickness of metal workpiece
The invention relates to a divisional application with the application number of 201710604578.1 and the application date of 2017, 07 and 24, and provides an eddy current sensor and a method capable of simultaneously measuring the displacement and the thickness of a metal workpiece
Technical Field
The invention belongs to the technical field related to information measurement, and particularly relates to a method capable of simultaneously measuring displacement and thickness of a metal workpiece.
Background
The measurement of the thickness of a metal workpiece is a problem which needs to be frequently faced in the manufacturing process of industrial production, for example, the measurement or inspection of the thickness of a plate in the processing of a plate strip in the metallurgical industry, the monitoring of the thickness of a corroded pipeline in chemical production equipment, the non-disassembly online thickness measurement of a machined part, the thickness measurement of metal shells of automobiles, mobile phones and the like.
At present, thickness measuring methods in the market can be divided into three types, one is that double-sided clamping equipment such as a micrometer is utilized for measurement, and the method needs to be simultaneously contacted with two sides of metal; secondly, thickness measurement is carried out by measuring the distance between two sides of the metal through displacement measuring equipment such as a laser sensor; and thirdly, performing single-side contact type thickness measurement by using an ultrasonic thickness gauge. The methods either need the measuring elements to be arranged on two sides of the metal or need the measuring elements to be in contact with the metal, but in many occasions, the measured workpiece is in a moving, shielding or high-temperature state, so that the measuring elements and the measured element cannot be in contact, the measurement cannot be normally carried out, the flexibility is low, and the application range is limited.
Disclosure of Invention
In view of the above-mentioned drawbacks or needs for improvement in the prior art, the present invention provides a method for simultaneously measuring the displacement and thickness of a metal workpiece, which is based on the working characteristics of the conventional thickness measuring method and is researched and designed for an eddy current sensor and a method for simultaneously measuring the displacement and thickness of a metal workpiece. The main control assembly of the eddy current sensor can generate an excitation signal containing a high-frequency signal and a low-frequency signal and an excitation signal containing a high-frequency signal or a low-frequency signal, a specific excitation signal can generate an eddy current which is only sensitive to displacement and is sensitive to both displacement and thickness, the displacement and the thickness are decoupled and measured by measuring magnetic field information generated by the eddy current, the method is simple and easy to implement, and target measurement can be realized.
In order to achieve the above object, the present invention provides a method for simultaneously measuring the displacement and thickness of a metal workpiece, comprising the steps of:
(21) arranging an eddy current sensor capable of measuring the displacement and the thickness of the metal workpiece at one side of the metal workpiece, wherein the eddy current sensor generates a low-frequency sinusoidal excitation signal;
(22) when the eddy current sensor is not adjacent to the metal workpiece, acquiring an output signal and a current signal of the eddy current sensor, and carrying out FFT analysis on the output signal and the current signal to obtain a measured amplitude and a phase of an excitation current corresponding to a magnetic field; when the eddy current sensor is close to the metal workpiece, obtaining the corresponding amplitude and phase again by the same method, and respectively obtaining the difference values of the amplitude and the phase obtained twice in the complex field to obtain the amplitude and the phase of the space magnetic field generated by the eddy current;
(23) curve fitting is carried out on the measured data pairs of the multiple groups of metal workpieces with known thickness and displacement obtained in the step (22) so as to obtain a mathematical expression of the eddy current sensor, wherein the measured data pairs are data pairs between displacement and thickness and spatial magnetic field amplitude and matching;
(24) and (3) executing the steps (21) to (22) on any metal workpiece to be measured, and substituting the obtained spatial magnetic field amplitude and phase into the mathematical expression so as to measure the displacement and the thickness of the metal workpiece.
Further, the eddy current sensor comprises a main control assembly, a closed-loop current amplifier and a probe, wherein the closed-loop current amplifier is electrically connected with the main control assembly and the probe, the main control assembly is used for generating an excitation signal and transmitting the excitation signal to the closed-loop current amplifier, and the excitation signal comprises a high-frequency signal and a low-frequency signal or any one of the low-frequency signal and the high-frequency signal; the closed-loop current amplifier is used for linearly converting the received excitation signal into a driving current and transmitting the driving current to the probe; the probe comprises a probe shell, a signal amplification module, an excitation coil and a magnetic sensor, wherein the signal amplification module and the excitation coil are sequentially overlapped in the probe shell, the magnetic sensor is arranged below the excitation coil, the excitation coil is electrically connected with the closed-loop current amplifier and is used for generating a variable magnetic field under the action of the driving current, the variable magnetic field induces eddy currents on the surface and the inside of a metal workpiece to be measured, and the eddy currents induce a magnetic field in space; the magnetic sensor is used for sensing the magnetic field generated by the exciting coil and the magnetic field generated by the eddy current at the same time, transmitting the sensed magnetic field signal to the signal amplification module, and the signal amplification module amplifies the received magnetic field signal and transmits the amplified magnetic field signal to the main control assembly.
Further, the magnetic sensor is spaced a predetermined distance from a central axis of the probe housing.
Further, the number of the magnetic sensors is two, and the two magnetic sensors are symmetrically arranged relative to the central axis of the probe shell.
Further, the magnetic sensor is a Z-direction sensitive magnetic sensor.
Further, the eddy current sensor is of a stacked structure.
Generally speaking, compared with the prior art, the method for simultaneously measuring the displacement and the thickness of the metal workpiece provided by the invention has the following beneficial effects:
1. the magnetic sensor is used for sensing the magnetic field generated by the exciting coil and the magnetic field generated by the eddy current at the same time, transmitting a sensed magnetic field signal to the signal amplification module, amplifying the received magnetic field signal by the signal amplification module and transmitting the amplified magnetic field signal to the main control assembly, and further realizing the simultaneous measurement of the displacement and the thickness of the metal workpiece according to the output signal and the current signal of the magnetic sensor; when in measurement, the magnetic sensor does not need to be in contact with a metal workpiece, so that the application range is enlarged, and the flexibility is higher.
2. The excitation signal comprises a high-frequency signal and a low-frequency signal or any one of the low-frequency signal and the high-frequency signal, a specific excitation signal can generate an eddy current which is only sensitive to displacement and sensitive to both displacement and thickness, the displacement and the thickness are decoupled and measured by measuring magnetic field information generated by the eddy current, and the method is simple and easy to implement and can realize multi-target measurement.
3. The eddy current sensor is of a stacked structure, is compact in structure and reduces the size.
4. The number of the magnetic sensors is two, the two magnetic sensors are symmetrically arranged relative to the central axis of the probe shell and are arranged at intervals with the central axis of the probe shell, so that magnetic field signals generated by eddy currents are increased, and the output sensitivity of the magnetic sensor signals is increased.
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FIG. 1 is a schematic structural diagram of a probe of an eddy current sensor capable of measuring displacement and thickness of a metal workpiece simultaneously according to a preferred embodiment of the present invention;
FIG. 2 is a flow chart of a method for measuring the displacement and thickness of a metal workpiece using the eddy current sensor of FIG. 1 that can simultaneously measure the displacement and thickness of a metal workpiece;
FIG. 3 is a flow chart of another method for measuring the displacement and thickness of a metal workpiece using the eddy current sensor of FIG. 1, which can measure the displacement and thickness of the metal workpiece simultaneously.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1-a magnetic sensor, 2-an exciting coil, 3-a signal amplification module and 4-a probe shell.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1 to 3, in the eddy current sensor capable of measuring displacement and thickness of a metal workpiece simultaneously according to the preferred embodiment of the present invention, the eddy current sensor generates an eddy current distribution sensitive to displacement information only and sensitive to displacement information and thickness information simultaneously by excitation of a specific signal, and performs a decoupling measurement of displacement and thickness by measuring magnetic field information generated by the eddy current. The eddy current sensor is placed on one side of the metal workpiece, and the thickness of the metal workpiece to be detected and the displacement of the metal workpiece to be detected or the real-time relative distance between the metal workpiece to be detected and the eddy current sensor can be obtained without contacting the metal workpiece.
The eddy current sensor comprises a main control assembly, a closed-loop current amplifier and a probe, wherein the closed-loop current amplifier is electrically connected with the main control assembly and the probe. The main control assembly is used for generating an excitation signal and comprises a DA module and an AD module, the DA module is electrically connected with the closed-loop current amplifier, and the AD module is electrically connected with the probe. The closed-loop current amplifier is used for linearly converting the excitation signal in the form of voltage from the DA module into a driving current and transmitting the driving current to the probe. The AD module is used for measuring signals from the probe.
The probe comprises a magnetic sensor 1, an exciting coil 2, a signal amplifying module 3 and a probe shell 4, wherein the signal amplifying module 3 and the exciting coil 2 are sequentially arranged in the probe shell 4, and the magnetic sensor 1 is arranged below the exciting coil 2 and is positioned outside the probe shell 4 and at a certain distance from the central axis of the probe shell 4. The exciting coil 2 is electrically connected to the closed-loop current amplifier, and generates a changing magnetic field under the action of the driving current, wherein the changing magnetic field can induce eddy currents on the surface and inside of the metal workpiece, and the eddy currents can induce a magnetic field in space. The magnetic sensor 1 is configured to sense a magnetic field generated by the excitation coil 2 and a magnetic field generated by the eddy current at the same time, transmit a sensed magnetic field signal to the signal amplification module 3, and amplify the received magnetic field signal and transmit the amplified magnetic field signal to the AD module by the signal amplification module 3. In this embodiment, the excitation signal includes a high frequency signal and a low frequency signal; of course, in other embodiments, the main control component may be adjusted to enable the excitation signal to include any one of a high frequency signal and a low frequency signal; the current signal in the excitation coil 2 is used as a reference signal, which is also obtained by the main control module via a sampling resistor.
The magnetic sensors 1 are Z-direction sensitive magnetic sensors, the number of the magnetic sensors is two, and the two magnetic sensors 1 are symmetrically arranged relative to the central axis of the probe shell 4 and have a certain distance from the central axis, so as to increase a magnetic field signal generated by an eddy current and further increase the signal output sensitivity of the magnetic sensors. The two magnetic sensors 1 of the present embodiment may be backup for each other to increase the operational reliability of the eddy current sensor, or the two magnetic sensors 1 measure simultaneously to reduce measurement fluctuation. In the embodiment, the eddy current sensor is of a stacked structure, so that the size is effectively reduced, and the structure is compact.
The invention provides two methods capable of simultaneously measuring the displacement and the thickness of a metal workpiece, which specifically comprise the following steps:
the first method is based on high and low frequency method for measuring displacement and thickness of metal workpiece simultaneously.
The method utilizes the frequency dependence of the penetration depth of the eddy current in the metal, and the eddy current of high-frequency components is completely distributed on the surface of the metal and is only related to metal displacement; the eddy current of low frequency components can be distributed at all thicknesses of the metal and is influenced by the displacement and thickness information of the metal. By adopting the eddy current sensor, the excitation signal can simultaneously comprise a high-frequency signal and a low-frequency signal, so that the eddy current sensor can simultaneously obtain displacement and thickness information in one measurement.
The first method is divided into two steps of calibration and measurement of the eddy current sensor, and once calibration is completed, continuous multiple measurements can be carried out. The first method for simultaneously measuring the displacement and the thickness of the metal workpiece mainly comprises the following steps:
(11) the eddy current sensor generates an excitation signal that includes both a low frequency signal and a high frequency signal. The definition of the low frequency signal and the high frequency signal is:
Figure GDA0002440407900000061
where σ is the conductivity, μ is the permeability, and hmaxAnd hminThe maximum and minimum measured thicknesses are respectively. The excitation signal can be any one of a high-frequency and low-frequency sine superposition signal, a square wave signal, a pulse signal and a triangular wave signal, and after Fourier transform is performed on the signal, the signal with the frequency component obviously containing a high-frequency component and a low-frequency component can be used as the excitation signal.
(12) When the eddy current sensor is not close to the metal workpiece, acquiring an output signal B of the eddy current sensor with a preset lengthe(t) and current signal I (t), taking the zero crossing point or rising and falling of the current signal with the time domain current signal as the referenceThe edges and the like are taken as time zero points, and the output signals of the sensor within preset time are intercepted. The current signal is obtained by measuring the voltage at two ends of the sampling resistor, and in order to ensure the sampling precision, the sampling rate of the signal is not lower than 10 times of the maximum frequency contained in the signal.
(13) The eddy current sensor is close to the metal workpiece and does not contact with the metal workpiece to measure, and an output signal B of the eddy current sensor is acquireds(t) intercepting the output signal of the eddy current sensor of the same length as in step (12) with reference to the time domain current signal, as in current signal i (t). The magnitude of the current can be precisely controlled due to the processing of the excitation signal using a closed loop current amplifier through which the current signal is made to coincide with the current signal in step (12).
(14) Solving the difference B of the two groups of output signals obtained by intercepting in the step (13) and the step (12)c(t)=Bs(t)-Be(t), obtaining a space magnetic field signal B generated by the eddy currentc(t)=Bs(t)-Be(t)。
(15) Respectively carrying out low-pass and high-pass filtering on the space magnetic field signal obtained in the step (14) to obtain a filtered low-frequency signal BcL(t) and the filtered high-frequency signal BcH(t) of (d). The filtering can be done by software, such as MATLAB programs, or by hardware filtering circuits. The filter cut-off frequencies are respectively omega given in the step (11)lAnd ωh
(16) Respectively carrying out predetermined long-time domain integration on the absolute values of the obtained filtered low-frequency signal and the filtered high-frequency signal to obtain
Figure GDA0002440407900000071
Wherein, CcLIntegration of the filtered low-frequency signal is called low-frequency integration for short; ccHThe integral of the filtered high-frequency signal is called high-frequency integral for short.
(17) Using sets of known thickness and displacement metal measurement data pairs (d, h) → (C) obtained from steps (12) - (16)cL,CcH) Is performed more than three timesFitting a term to establish a mathematical expression for the eddy current sensor:
Figure GDA0002440407900000072
in the formula, d represents the displacement of the metal workpiece (or the distance from the sensor), and h represents the thickness of the metal workpiece.
(18) And (5) performing the steps (11) to (16) to measure any metal workpiece with unknown displacement and thickness to be detected so as to obtain a low-frequency integral CtLAnd high frequency integral CtHAnd substituting the obtained mathematical expression into the mathematical expression obtained in the step (17) to carry out inverse solution so as to realize simultaneous measurement and obtain the displacement and the thickness of the metal workpiece. First, the displacement information of the metal workpiece can be obtained from the high-frequency measurement data, and further, the thickness information of the metal workpiece can be obtained from the displacement information and the low-frequency measurement data which have been measured.
Figure GDA0002440407900000073
In the formula (d)estAnd hestRespectively representing the displacement and thickness of the metal workpiece to be measured by the eddy current sensor.
The second method, phase-based, is a method that can measure both displacement and thickness of a metal workpiece.
The second method adopts low-frequency sinusoidal excitation to enable the eddy current to penetrate through the whole metal workpiece, and at the moment, amplitude and phase information extraction can be simultaneously carried out on the eddy current magnetic field measured by the magnetic sensor, wherein the amplitude of the eddy current magnetic field is mainly influenced by metal displacement, and the phase of the eddy current magnetic field is mainly related to the metal thickness. By establishing the mapping relation between the amplitude phase and the displacement thickness, the displacement and thickness information can be obtained simultaneously through single-frequency eddy current excitation.
The second method is divided into two steps of sensor calibration and measurement, and once calibration is completed, continuous multiple measurements can be carried out. The second method for simultaneously measuring the displacement and the thickness of the metal workpiece mainly comprises the following steps:
(21) the eddy current sensor generates a low frequency sinusoidal excitation signal with a frequency selected to be:
Figure GDA0002440407900000081
where σ is the conductivity, μ is the permeability, and hmaxThe maximum measured thickness. The amplitude of the signal should be such that the excited coil magnetic field does not exceed the magnetic sensor range.
(22) When the eddy current sensor is not close to the metal workpiece, acquiring an output signal Be (t) and a current signal I (t) of the eddy current sensor with a limited length. The current signal is obtained by collecting the voltage at two ends of the sampling resistor. To ensure sampling accuracy, the sampling rate of the signal is not less than 10 times the maximum frequency contained in the signal. And performing FFT analysis on the output signal and the current signal respectively to obtain amplitude and phase information of the output signal and the current signal on the excitation frequency. Obtaining the measurement amplitude M after current normalization by using the current information as a reference signalePhase P of the excitation current relative to the magnetic fielde
Figure GDA0002440407900000082
Figure GDA0002440407900000083
Figure GDA0002440407900000084
In the formula (I), the compound is shown in the specification,
Figure GDA0002440407900000085
a function is extracted for the FFT magnitude phase.
(23) When the eddy current sensor is close to the surface of the metal workpiece, the measurement is carried out by adopting the same method as the step (22) and the measured signal is processed by adopting the same method, wherein the obtained amplitude value is MsIn a phase of Ps
(24) Calculating the difference value of the complex field of the two groups of amplitudes and phases obtained in the steps (23) and (22) to obtain the space magnetic field amplitude M generated by the eddy currentcAnd phase Pc. The calculation formula is as follows:
Bc=Ms∠Ps-Me∠Pe,Mc=abs(Bc),Pc=angle(Bc)
(25) for the multiple sets of metal measurement data pairs (d, h) → (M) with known thickness and displacement obtained from steps (22) - (24)c,Pc) Performing surface fitting to obtain a mathematical expression of the eddy current sensor:
Figure GDA0002440407900000091
in the formula, d represents the displacement of the metal workpiece (or the distance between the metal workpiece and the eddy current sensor), and h represents the thickness of the metal workpiece.
(26) Executing the steps (21) to (24) for any metal workpiece with unknown displacement and thickness, and obtaining the spatial magnetic field amplitude MctAnd phase PctAnd (5) substituting the mathematical expression obtained in the step (25) for solving, and then realizing the simultaneous measurement of the displacement and the thickness of the metal workpiece.
According to the method capable of simultaneously measuring the displacement and the thickness of the metal workpiece, the main control assembly of the eddy current sensor can generate an excitation signal containing a high-frequency signal and a low-frequency signal and an excitation signal containing a high-frequency signal or a low-frequency signal, a specific excitation signal can generate an electric eddy current which is sensitive to displacement only and sensitive to both displacement and thickness, the displacement and the thickness are decoupled and measured by measuring magnetic field information generated by the electric eddy current, the method is simple and easy to implement, and target measurement can be realized.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (5)

1. A method for simultaneously measuring the displacement and the thickness of a metal workpiece is characterized by comprising the following steps:
(21) arranging an eddy current sensor capable of measuring the displacement and the thickness of the metal workpiece at one side of the metal workpiece, wherein the eddy current sensor generates a low-frequency sinusoidal excitation signal;
(22) when the eddy current sensor is not adjacent to the metal workpiece, acquiring an output signal and a current signal of the eddy current sensor, and carrying out FFT analysis on the output signal and the current signal to obtain a measured amplitude and a phase of an excitation current corresponding to a magnetic field; when the eddy current sensor is close to the metal workpiece, obtaining the corresponding amplitude and phase again by the same method, and respectively obtaining the difference values of the amplitude and the phase obtained twice in the complex field to obtain the amplitude and the phase of the space magnetic field generated by the eddy current;
(23) curve fitting is carried out on the measured data pairs of the multiple groups of metal workpieces with known thickness and displacement obtained in the step (22) so as to obtain a mathematical expression of the eddy current sensor, wherein the measured data pairs are data pairs between the displacement and the thickness and the amplitude and the phase of the spatial magnetic field;
(24) performing the steps (21) to (22) on any metal workpiece to be measured, and substituting the obtained space magnetic field amplitude and phase into the mathematical expression so as to measure the displacement and the thickness of the metal workpiece;
the eddy current sensor comprises a main control assembly, a closed-loop current amplifier and a probe, wherein the closed-loop current amplifier is electrically connected with the main control assembly and the probe; the main control assembly is used for generating an excitation signal and transmitting the excitation signal to the closed-loop current amplifier, wherein the excitation signal comprises a high-frequency signal and a low-frequency signal or any one of the low-frequency signal and the high-frequency signal; the closed-loop current amplifier is used for linearly converting the received excitation signal into a driving current and transmitting the driving current to the probe; the probe comprises a probe shell, a signal amplification module, an excitation coil and a magnetic sensor, wherein the signal amplification module and the excitation coil are sequentially overlapped in the probe shell, the magnetic sensor is arranged below the excitation coil, the excitation coil is electrically connected with the closed-loop current amplifier and is used for generating a variable magnetic field under the action of the driving current, the variable magnetic field induces eddy currents on the surface and the inside of a metal workpiece to be measured, and the eddy currents induce a magnetic field in space; the magnetic sensor is used for sensing the magnetic field generated by the exciting coil and the magnetic field generated by the eddy current at the same time, transmitting a sensed magnetic field signal to the signal amplification module, and the signal amplification module amplifies a received magnetic field signal and transmits the amplified magnetic field signal to the main control assembly;
the eddy current sensor generates electric eddy current distribution which is sensitive to displacement information and thickness information simultaneously through signal excitation, and decoupling measurement of displacement and thickness is carried out through measuring magnetic field information generated by the electric eddy current.
2. The method of claim 1, wherein the step of measuring the displacement and thickness of the metal workpiece comprises: the magnetic sensor is spaced a predetermined distance from a central axis of the probe housing.
3. The method of claim 2, wherein the step of measuring the displacement and thickness of the metal workpiece comprises: the number of the magnetic sensors is two, and the two magnetic sensors are symmetrically arranged relative to the central axis of the probe shell.
4. The method of simultaneously measuring the displacement and the thickness of a metal workpiece as set forth in any one of claims 1-2, wherein: the magnetic sensor is a Z-direction sensitive magnetic sensor.
5. The method of simultaneously measuring the displacement and the thickness of a metal workpiece as set forth in any one of claims 1-2, wherein: the eddy current sensor is of a stacked structure.
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