CN109813211A - A kind of method that can measure metal works displacement and thickness simultaneously - Google Patents
A kind of method that can measure metal works displacement and thickness simultaneously Download PDFInfo
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- CN109813211A CN109813211A CN201910135095.0A CN201910135095A CN109813211A CN 109813211 A CN109813211 A CN 109813211A CN 201910135095 A CN201910135095 A CN 201910135095A CN 109813211 A CN109813211 A CN 109813211A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
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Abstract
The invention belongs to information measurement correlative technology fields, it discloses the methods that one kind can measure metal works displacement and thickness simultaneously, method includes the following steps: eddy current sensor is set to the side of metal works by (21), and eddy current sensor generates low frequency sinusoidal pumping signal；(22) when the non-adjacent metal workpiece of eddy current sensor, the output signal and current signal of eddy current sensor are acquired；When eddy current sensor adjacent metal workpiece, data are acquired again；(23) to the measurement data of the metal works of obtained multiple groups known thickness and displacement to carrying out curve fitting in the hope of the mathematic(al) representation of eddy current sensor；(24) step (21)-(22) are executed to any metal works to be measured, and brings obtained data into mathematic(al) representation, to measure displacement and the thickness of metal works.The present invention measures displacement and thickness simultaneously by specific pumping signal, and simple easily to implement, flexibility is higher, and application range is wider.
Description
The application is application No. is 201710604578.1, and the applying date is 07 month 2017 24, and invention and created name is " one
Kind can measure the eddy current sensor and method of metal works displacement and thickness simultaneously " application divisional application
Technical field
The invention belongs to information measurement correlative technology fields, can measure metal works position simultaneously more particularly, to one kind
The method of shifting and thickness.
Background technique
The measurement of metal works thickness is that industrial production and manufacturing needs the problem of often facing, such as metallurgy industry in the process
Strip processing in thickness measure or inspection to plate, the duct thickness monitoring corroded in chemical production equipment, machine
Tool processes the non-collapsible online thickness measure of part, thickness measure of metal shells such as automobile, mobile phone etc..
Currently, thickness measuring method in the market can be divided into three classes, one is being surveyed using the two-sided chucking device such as micrometer
Amount, this method needs contact simultaneously with metal two sides；The second is passing through measurement by displacement measuring equipments such as laser sensors
Metal two lateral extent carries out thickness measure；The third is carrying out single-contact formula thickness measure by sonigauge.This
It a little methods or needs measuring cell to be installed on metal two sides or measuring cell is needed to contact with metal, however in many fields
In conjunction, measured workpiece is in movement, blocks or the condition of high temperature, causes measuring cell that can not be contacted with detected element,
Measurement can not be normally carried out, and flexibility is lower, limits use scope.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides one kind can measure metal works position simultaneously
It moves and the method for thickness, based on the work characteristics of existing thickness measuring method, for metal works displacement and thickness can be measured simultaneously
Eddy current sensor and method carried out study and design.The master component of the eddy current sensor can produce while comprising height
The pumping signal of frequency signal and low frequency signal and pumping signal comprising high-frequency signal or low frequency signal, it is specific to motivate
Signal can produce current vortex only sensitive to displacement and sensitive to displacement and thickness simultaneously, be generated by measurement current vortex
Magnetic Field carry out displacement and the decoupling of thickness measurement, it is simple easily to implement, and can realize target measurement.
It to achieve the above object, should the present invention provides the method that one kind can measure metal works displacement and thickness simultaneously
Method the following steps are included:
(21) eddy current sensor that will measure metal works displacement and thickness simultaneously is set to the sides of metal works, and
The eddy current sensor generates low frequency sinusoidal pumping signal；
(22) when the non-adjacent metal workpiece of the eddy current sensor, the output signal and electric current of the eddy current sensor are acquired
Signal obtains the corresponding excitation electricity of measurement amplitude and magnetic field to carry out fft analysis to the output signal and the current signal
The phase of stream；When the eddy current sensor adjacent metal workpiece, corresponding amplitude and phase are in kind obtained again, and divide
The difference of the amplitude obtained twice and phase in complex field is not sought, to obtain the space magnetic field amplitude and phase of current vortex generation
Position；
(23) to the measurement data of the metal works of the multiple groups known thickness and displacement obtained by step (22) to march
The mathematic(al) representation that line is fitted in the hope of the eddy current sensor, the measurement data is to for displacement and thickness and space magnetic field width
Data pair between value and matching；
(24) step (21)-(22) are executed to any metal works to be measured, and by obtained space magnetic field amplitude and
Phase brings the mathematic(al) representation into, to measure displacement and the thickness of metal works.
Further, the eddy current sensor includes master component, current amplifier and probe, the closed loop current
Amplifier is electrically connected the master component and the probe, and the master component swashs for generating pumping signal, and by described
It encourages signal and is transferred to the current amplifier, the pumping signal includes high-frequency signal and low frequency signal or low frequency letter
Number and any one of high-frequency signal；The pumping signal linear transformation that the current amplifier is used to receive is driving
Electric current, and the driving current is transferred to the probe；The probe includes probing shell, is sequentially overlapped in the probe shell
Intracorporal signal amplification module and excitation coil and the Magnetic Sensor being set to below the excitation coil, the excitation line
Circle is electrically connected at the current amplifier, is used to generate variation magnetic field under the action of the driving current, described
Variation magnetic field generates current vortex in surface of workpiece to be measured and induced inside, and the current vortex induces magnetic in space
?；The Magnetic Sensor is used for while sensing the magnetic field that the excitation coil generates and the magnetic field that the current vortex generates, and will
The magnetic field signal sensed is transferred to the signal amplification module, and the signal amplification module carries out the magnetic field signal received
The master component is transferred to after amplification.
Further, the central axis of the Magnetic Sensor and the probing shell is spaced a predetermined distance.
Further, the quantity of the Magnetic Sensor is two, and two Magnetic Sensors are relative to the probing shell
Setting substantially symmetrical about its central axis.
Further, the Magnetic Sensor is Z-direction sensitivity Magnetic Sensor.
Further, the eddy current sensor is overlaying structure.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, it is provided by the invention can
The method for measuring metal works displacement and thickness simultaneously has the advantages that
1. the Magnetic Sensor is used for while sensing the magnetic field that the excitation coil generates and the magnetic that the current vortex generates
, and the magnetic field signal sensed is transferred to the signal amplification module, the magnetic field that the signal amplification module will receive
Signal is transferred to the master component, and then output signal and current signal according to the Magnetic Sensor after amplifying
Realize while measuring displacement and the thickness of metal works；The Magnetic Sensor is improved without contacting with metal works when measurement
Application range, and flexibility is higher.
2. the pumping signal includes any in high-frequency signal and low frequency signal or low frequency signal and high-frequency signal
Kind, specific pumping signal can produce current vortex only sensitive to displacement and sensitive to displacement and thickness, pass through measurement
The Magnetic Field that current vortex generates carries out displacement and the decoupling of thickness measurement, simple easily to implement, and can realize multi-target measurement.
3. the eddy current sensor is overlaying structure, compact-sized, and reduces volume.
4. the quantity of the Magnetic Sensor is two, the central axis pair of the relatively described probing shell of two Magnetic Sensors
Claim setting and be arranged with the central axis interval of the probing shell, to increase the magnetic field signal of current vortex generation, and then increases
The output sensitivity of magnetic sensor signal.
Detailed description of the invention
Fig. 1 is the eddy current sensor that can measure metal works displacement and thickness simultaneously that better embodiment of the present invention provides
Probe structural schematic diagram；
Fig. 2 is to measure metal work using the eddy current sensor that can measure metal works displacement and thickness simultaneously in Fig. 1
The flow chart of the method for part displacement and thickness；
Fig. 3 is another eddy current sensor that can measure metal works displacement and thickness simultaneously using in Fig. 1 to measure
The flow chart of the method for metal works displacement and thickness.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which: 1- Magnetic Sensor,
2- excitation coil, 3- signal amplification module, 4- probing shell.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
It please refers to Fig.1 to Fig.3, metal works displacement that better embodiment of the present invention provided can measure simultaneously and thickness
Eddy current sensor, the eddy current sensor are generated only by signal specific excitation to displacement information sensing and simultaneously to displacement information
And the current vortex distribution of thickness information sensitivity, displacement is carried out by the Magnetic Field that measurement current vortex generates and the decoupling of thickness is surveyed
Amount.The eddy current sensor is placed in metal works side, and can be obtained tested metal works without being in contact with workpiece
Real-time relative distance between the displacement of thickness and tested metal works or tested metal works and the eddy current sensor.
The eddy current sensor includes master component, current amplifier and probe, the current amplifier electricity
Property connect the master component and the probe.The master component is for generating pumping signal comprising D/A module and AD mould
Block, the D/A module are electrically connected at the current amplifier, and the A/D module is electrically connected at the probe.It is described to close
Circular current amplifier will be for that will be driving current from the pumping signal linear transformation of the voltage form of the D/A module, and by institute
It states driving current and is transferred to the probe.The A/D module is for measuring the signal from the probe.
The probe includes Magnetic Sensor 1, excitation coil 2, signal amplification module 3 and probing shell 4, the signal amplification
Module 3 and the excitation coil 2 are successively set in the probing shell 4, and the Magnetic Sensor 1 is arranged in the excitation coil
2 lower section is located at outside the probing shell 4 and spaced apart with the central axis of the probing shell 4.The excitation
Coil 2 is electrically connected at the current amplifier, and variation magnetic field, the change are generated under the action of the driving current
Magnetizing field can generate current vortex in surface of workpiece and induced inside, and the current vortex can induce magnetic field in space again.
The Magnetic Sensor 1 is used for while sensing the magnetic field that the excitation coil 2 generates and the magnetic field that the current vortex generates, and will sense
The magnetic field signal measured is transferred to the signal amplification module 3, and the signal amplification module 3 carries out the magnetic field signal received
The A/D module is transferred to after amplification.In present embodiment, the pumping signal includes high-frequency signal and low frequency signal；Certainly exist
In other embodiments, by adjusting the master component, can make the pumping signal includes high-frequency signal and low frequency letter
Any one of number；Current signal in the excitation coil 2 is as reference signal, by sampling resistor also by the master control
Component obtains.
The Magnetic Sensor 1 is Z-direction sensitivity Magnetic Sensor, and quantity is two, and two Magnetic Sensors 1 are relatively described
The setting substantially symmetrical about its central axis of probing shell 4 and with the central axis there are certain distance, to increase the magnetic field letter of current vortex generation
Number, and then increase magnetic sensor signal output sensitivity.Two Magnetic Sensors 1 of present embodiment can be mutually backups, to increase
Add the eddy current sensor operational reliability or two Magnetic Sensors 1 at the same measurement with reduce measurement fluctuation.This reality
Apply in mode, the eddy current sensor is stacked structures, effectively reduce volume, while making compact-sized.
The method that metal works displacement and thickness can be measured simultaneously the present invention provides two kinds, specific as follows:
First method, the method that can measure metal works displacement and thickness simultaneously based on low-and high-frequency.
This process employs the frequency dependence of current vortex penetration depth in a metal, the current vortex of radio-frequency component divides completely
It is distributed in metal surface, it is only related to metal displacement；The current vortex of low-frequency component can be distributed at all thickness of metal, while by
Metal displacement is influenced with thickness information.Using eddy current sensor as described above, can make in pumping signal while comprising high frequency
Signal and low frequency signal, so that the eddy current sensor is displaced simultaneously in one-shot measurement and thickness information.
First method is divided into eddy current sensor calibration and two steps of measurement, once calibration completes that continuous several times survey can be carried out
Amount.The first can measure metal works displacement simultaneously and the method for thickness mainly comprises the steps that
(11) eddy current sensor generates while including the pumping signal of low frequency signal and high-frequency signal.Low frequency signal with
High-frequency signal is defined as:
In formula, σ is conductivity, and μ is magnetic conductivity, hmaxAnd hminRespectively minimum and maximum measurement thickness.Wherein, described to swash
Encourage signal type can any one of for low-and high-frequency sine superposed signal, square-wave signal, pulse signal and triangular signal,
It is all by carrying out Fourier transformation to signal after, signal frequency ingredient obviously includes that the signal of radio-frequency component and low-frequency component is equal
It can be used as pumping signal.
(12) when eddy current sensor is not close to metal works, the output signal B of the eddy current sensor of predetermined length is acquirede
(t) with current signal I (t), using temporal current signal as benchmark, the zero crossing of obtaining current signal or up and down along etc. work
For time zero, the sensor output signal in the predetermined time is intercepted.Wherein, current signal passes through measurement sampling resistor both ends electricity
Pressure obtains, and to guarantee sampling precision, the sample rate of signal is not less than 10 overtones bands of maximum frequency included in signal.
(13) eddy current sensor close to the metal works and is not contacted with the metal works to measure, and is adopted
Collection obtains the output signal B of the eddy current sensors(t) with current signal I (t), likewise, using temporal current signal as base
Standard intercepts the output signal of the eddy current sensor of equal length in same step (12).Due to using current amplifier
The processing of pumping signal is carried out, size of current can be accurately controlled, and make the current signal by the current amplifier
It is consistent with the current signal in step (12).
(14) two groups of output signals that interception obtains in step (13) and step (12) are sought into difference Bc(t)=Bs(t)-
Be(t), the space magnetic field signal B that vortex generates can be obtainedc(t)=Bs(t)-Be(t)。
(15) the space magnetic field signal for respectively obtaining step (14) carries out low pass and high-pass filtering, low frequency after being filtered
Signal BcL(t) and filtering after high-frequency signal BcH(t).Filtering can be completed by software, such as MATLAB program, can also be by hard
Part filter circuit is completed.Filter cutoff frequency is respectively the ω provided in step (11)lAnd ωh。
(16) pre- fixed length time domain is carried out to the absolute value of high-frequency signal after low frequency signal after obtained filtering and filtering respectively
Integral, to obtainWherein, CcLFor the integral of low frequency signal after filtering, abbreviation low frequency product
Point；CcHFor the integral of high-frequency signal after filtering, abbreviation high frequency integral.
(17) using the metal measurement data by step (12)-multiple groups known thickness and displacement that (16) obtain to (d, h)
→(CcL, CcH), cubic polynomial fitting is carried out, to establish the mathematic(al) representation of the eddy current sensor:
In formula, d indicates metal works displacement (or at a distance from sensor), and h indicates the thickness of metal works.
(18) for the metal works of any Unknown Displacement and thickness to be detected, step (11)-(16) is executed and are surveyed
Amount, to obtain low frequency integral CtLC is integrated with high frequencytH, and substitute into it is counter in mathematic(al) representation obtained in step (17) solved,
To realize while measure the displacement and the thickness that obtain metal works.Firstly, can be in the hope of metal works by high frequency measurement data
Displacement information, it is possible to further obtain the thickness letter of metal works by the displacement information measured and low frequency measurement data
Breath.
In formula, destAnd hestRespectively indicate the displacement and thickness of the metal works to be measured obtained by vortex sensor measuring
Degree.
Second method, the method that can measure metal works displacement and thickness simultaneously based on phase.
Second method is motivated using low frequency sinusoidal, so that current vortex is penetrated entire metal works, can be sensed at this time to by magnetic
Eddy current magnetism that device measurement obtains while carrying out amplitude and phase information is extracted, wherein eddy current magnetism amplitude is mainly displaced by metal
It influences, and eddy current magnetism phase is then mainly related to metal thickness.By establishing the mapping between amplitude phase and displacement thickness
Relationship can pass through the excitation of single-frequency vortex while is displaced and thickness information.
Second method is divided into two steps of transducer calibration and measurement, once calibration completes that continuous several times measurement can be carried out.
The method that metal works displacement and thickness can be measured for second simultaneously mainly comprises the steps that
(21) eddy current sensor generates low frequency sinusoidal pumping signal, signal frequency selection are as follows:
In formula, σ is conductivity, and μ is magnetic conductivity, hmaxThickness is measured for maximum.The amplitude of signal should make the line motivated
It encloses magnetic field and is no more than Magnetic Sensor range.
(22) when the eddy current sensor is not close to metal works, the output letter of the eddy current sensor of finite length is acquired
Number Be (t) and current signal I (t).Wherein, current signal is obtained by acquiring sampling resistor both end voltage.To guarantee sampling essence
Degree, the sample rate of signal are not less than 10 overtones bands of maximum frequency included in signal.To output signal and current signal point
Not carry out fft analysis, obtain its amplitude and phase information in driving frequency.Using current information as reference signal, obtain
Measurement amplitude M after electric current normalizationeWith the phase P of magnetic field relative excitation electric currente。
In formula,Function is extracted for FFT amplitude phase.
(23) it when the eddy current sensor is close to the surface of workpiece, is carried out using method identical with step (22)
It measures and the signal for using same method to obtain measurement is handled, the amplitude obtained at this time is Ms, phase Ps。
(24) two groups of amplitudes and phase that step (23) and step (22) obtain are sought into the difference in complex field, can be obtained
It is vortexed the space magnetic field amplitude M generatedcWith phase Pc.Calculation formula are as follows:
Bc=Ms∠Ps-Me∠Pe,Mc=abs (Bc),Pc=angle (Bc)
(25) to the metal measurement data by step (22)-multiple groups known thickness and displacement that (24) obtain to (d, h) →
(Mc, Pc) surface fitting is carried out, to obtain the mathematic(al) representation of the eddy current sensor:
In formula, d represents metal works displacement the distance between (or with eddy current sensor), and h represents metal works thickness；fd
And fhThe fitting function for d and the thickness h of respectively adjusting the distance, can be fitting of a polynomial or spline-fit, when using more than 3 times
When item formula fitting, fitting function can be indicated are as follows:
Wherein aijAnd b is fitting coefficient, so far calibration process is completed.
(26) for the metal works of any Unknown Displacement and thickness, step (21)-(24), and the space that will be obtained are executed
Magnetic field amplitude MctWith phase PctIt substitutes into the mathematic(al) representation that step (25) obtain to be solved, metal works displacement can be realized
It is measured while with thickness.
The method provided by the invention that metal works displacement and thickness can be measured simultaneously, the master control group of the eddy current sensor
Part can produce while the pumping signal comprising high-frequency signal and low frequency signal and comprising high-frequency signal or low frequency signal
Pumping signal, specific pumping signal can produce current vortex only sensitive to displacement and sensitive to displacement and thickness, lead to
It crosses the Magnetic Field that measurement current vortex generates and carries out displacement and the decoupling of thickness measurement, it is simple easily to implement, and can realize that target is surveyed
Amount.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (6)
1. the method that one kind can measure metal works displacement and thickness simultaneously, which is characterized in that method includes the following steps:
(21) eddy current sensor that will measure metal works displacement and thickness simultaneously is set to the sides of metal works, and described
Eddy current sensor generates low frequency sinusoidal pumping signal；
(22) when the non-adjacent metal workpiece of the eddy current sensor, the output signal and electric current letter of the eddy current sensor are acquired
Number, exciting current is corresponded to carry out fft analysis to the output signal and the current signal to obtain measurement amplitude and magnetic field
Phase；When the eddy current sensor adjacent metal workpiece, corresponding amplitude and phase are in kind obtained again, and respectively
The difference of the amplitude obtained twice and phase in complex field is sought, to obtain the space magnetic field amplitude and phase of current vortex generation
Position；
(23) quasi- to curve is carried out to the measurement data of the metal works of the multiple groups known thickness and displacement obtained by step (22)
Close the mathematic(al) representation in the hope of the eddy current sensor, the measurement data to for displacement and thickness and space magnetic field amplitude and
Data pair between matching；
(24) step (21)-(22), and the space magnetic field amplitude and phase that will be obtained are executed to any metal works to be measured
The mathematic(al) representation is brought into, to measure displacement and the thickness of metal works.
2. the method for metal works displacement and thickness can be measured simultaneously as described in claim 1, it is characterised in that: the vortex
Sensor includes master component, current amplifier and probe, and the current amplifier is electrically connected the master control group
Part and the probe；The pumping signal is transferred to the closed loop current for generating pumping signal by the master component
Amplifier, the pumping signal include high-frequency signal and low frequency signal or any one of low frequency signal and high-frequency signal；Institute
Current amplifier is stated for being driving current by the pumping signal linear transformation received, and the driving current is transmitted
To the probe；It is described probe include probing shell, be sequentially overlapped in the probing shell signal amplification module and excitation
Coil and the Magnetic Sensor being set to below the excitation coil, the excitation coil are electrically connected at the closed loop current
Amplifier is used to generate variation magnetic field under the action of the driving current, and the variation magnetic field is in metal work to be measured
Part surface and induced inside generate current vortex, and the current vortex induces magnetic field in space；The Magnetic Sensor is used for while feeling
The magnetic field that the excitation coil generates and the magnetic field that the current vortex generates are surveyed, and the magnetic field signal sensed is transferred to described
Signal amplification module, the signal amplification module are transferred to the master component after amplifying the magnetic field signal received.
3. the method for metal works displacement and thickness can be measured simultaneously as claimed in claim 2, it is characterised in that: the magnetic passes
The central axis of sensor and the probing shell is spaced a predetermined distance.
4. the method for metal works displacement and thickness can be measured simultaneously as claimed in claim 3, it is characterised in that: the magnetic passes
The quantity of sensor is two, substantially symmetrical about its central axis setting of two Magnetic Sensors relative to the probing shell.
5. the method that metal works displacement and thickness can be measured simultaneously as claim 2-3 is described in any item, it is characterised in that:
The Magnetic Sensor is Z-direction sensitivity Magnetic Sensor.
6. the method that metal works displacement and thickness can be measured simultaneously as claim 2-3 is described in any item, it is characterised in that:
The eddy current sensor is overlaying structure.
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| CN109813211B (en) | 2020-09-08 |
| CN107270808A (en) | 2017-10-20 |
| CN107270808B (en) | 2019-08-13 |
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