CN109807767A - Material holding unit and material detection method - Google Patents
Material holding unit and material detection method Download PDFInfo
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- CN109807767A CN109807767A CN201711160596.1A CN201711160596A CN109807767A CN 109807767 A CN109807767 A CN 109807767A CN 201711160596 A CN201711160596 A CN 201711160596A CN 109807767 A CN109807767 A CN 109807767A
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- holding unit
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Abstract
The present invention provides a kind of material holding unit and material detection methods, the material holding unit includes positioning plate, material fixed mechanism, switching board, pedestal, general-purpose interface, the positioning plate is arranged on the pedestal, wherein the pedestal is provided with general-purpose interface, is docked with realizing with external detection equipment；The switching board is for the detection interface of material to be attached with external detection equipment.It is realized by the general-purpose interface of the material holding unit and is automatically and quickly docked with external detection equipment, and the material holding unit is when clamping material and being moved, it can be realized as clamping without being attached with external equipment, improve detection producing line working efficiency.
Description
Technical field
The present invention relates to microelectronics equipment field more particularly to a kind of material holding unit and material detection methods.
Background technique
In microelectronics equipment manufacture, it usually needs carry out a series of processing, movement to workpiece using various boards
With detection etc. operation.The operation needs first clamp workpiece, are positioned, and then just can be processed and be detected.
In the production of microelectronic product, generally in order to guarantee the quality of product or semi-finished product, need to product (object
Material) carry out defects detection (such as OTP detection, electric-examination).The pipeline flow chart of material detection is as shown in Figure 1: firstly, will test
Object (hereinafter also referred to " material ") is transmitted to A by transmission device and is clamped, and is attached with detection device, at A
Detect it is complete after, then material is unlocked, again pressed from both sides material transferring to next station B by transmission device after unlock
It holds, be connected to, detect, unlocked again after having detected；And so on arrive next station C, D etc. again.
Moreover, traditional operation mode has following a few place's features:
(1) a set of clamping device is required in each detection station；
(2) it when each station is detected, requires to clamp material and the clamping device of current station and detection is electric
Road interface such as is attached, unlocks at the repetitive operations；
(3) it when material size changes, needs to replace in the clamping device to each detection station.
It can thus be seen that traditional detection pattern needs more manual operation and operation repeatability is big, due to detection
Number is more to be repeated the operation several times, and greatly reduces the working efficiency of detection producing line, this is to mechanization mass production stream
Waterline operation has very big inhibition.
It should be noted that the information for being disclosed in the background of invention technology segment is merely intended to deepen to of the invention general
The understanding of background technique, and be not construed as recognizing or implying in any form that information composition has been those skilled in the art
The known prior art.
Summary of the invention
In view of the foregoing deficiencies of prior art, the present invention provides a kind of material holding unit and material detection method,
Material is set rapidly to be attached, detect and move with external detection equipment.
In order to achieve the above object, in the one aspect of the application, a kind of material holding unit is provided, including positioning plate,
Material fixed mechanism, switching board, pedestal, general-purpose interface, the positioning plate are arranged on the pedestal,
Wherein the pedestal is provided with general-purpose interface, is docked with realizing with external detection equipment；The switching board is used for
The detection interface of material is attached with external detection equipment.
In some embodiments, the material fixed mechanism includes chuck mechanism and/or sucker, and the sucker is for adsorbing
Material, the chuck mechanism are arranged in around the sucker and for the material to be clamped in the sucker.
In some embodiments, the switching board is arranged in the chassis interior.
In some embodiments, the size and model of the positioning plate and the size or material of material are consistent.
In some embodiments, the pinboard card has pinboard card interface, for the detection interface with the material
Docking.
In some embodiments, the chuck mechanism include collet, cylinder, cylinder piston, elastic component, force snesor,
Adjustment means and pressure sensor, the pressure sensor are connected to adjustment means, and the force snesor connects the elasticity
One end of component, the collet connect cylinder piston and move under the drive of the cylinder piston.
In some embodiments, the elastic component is spring.
In some embodiments, the adjustment means are adjusting screw rods.
In some embodiments, the material is carried out by being moved the material holding unit for being clamped with material
It is mobile.
In some embodiments, the clamping force of the collet is adjusted by adjusting the adjustment means.
In some embodiments, the pinboard card interface be arranged in material holding unit left part or top or right part or
Lower part.
In the another aspect of the application, a kind of material detection method is also provided, the material detection method uses above one
Material holding unit described in a aspect, comprising:
S1: the detection interface of the docking switching board and the material；
S2: join the material on the material holding unit；
S3: the material holding unit holds the material.
In some embodiments, the S2 further comprises: joining the material on the material holding unit, and leans on
The position of the nearly positioning plate.
In some embodiments, the S3 further comprises: the material holding unit passes through vacuum suction and/or clamping
Mode realizes the fixing to the material.
At the another aspect of the application, a kind of material detection method is also provided, the material detection method includes:
Step a: material is held using material holding unit described in the above one aspect；
Step b: the material holding unit of material connect by the general-purpose interface with external detection equipment fixing；
Step c: the general-purpose interface and the external detection equipment are disconnected upon completion of the assays.
In some embodiments, the material detection method further include:
Step d: the material holding unit for holding the material is moved to by another detection station by transmission device
It is detected at place；
Step e: repeating step b, and c, d are until entire detection producing line detection finishes.
In some embodiments, when detecting to multiple materials, corresponding multiple material holding units are provided, and divide
Other to carry out fixing operation to multiple materials, the material holding unit that material is clamped at one finishes shifting in detection station detection
When moving next detection station and being detected, by another material holding unit equipped with material be connected to the detection station into
Row detection.
The beneficial effects of the present invention are: the present invention provides a kind of material holding unit and material detection method, by described
The general-purpose interface realization of material holding unit is automatically and quickly docked with external detection equipment, moreover, the material holding unit
It when clamping material and being moved, can be realized as clamping without being attached with external equipment, improve detection producing line
Working efficiency.In addition, material holding unit of the invention can realize the function of being clamped to different size materials, material fixing
Device clamping force is adjustable, so as to which to different materials, various sizes of clamping object plays safety protection function.
Detailed description of the invention
By Figure of description and then it is used to illustrate the specific reality of the certain principles of the present invention together with Figure of description
Mode is applied, other feature possessed by the present invention and advantage will be apparent or more specifically illustrated.
Fig. 1 shows conventional microelectronic product testing pattern diagram；
Fig. 2 shows the top views of material holding unit according to an embodiment of the present invention；
Fig. 3 shows the side view of material holding unit according to an embodiment of the present invention；
Fig. 4 shows the chassis interior structural schematic diagram of material holding unit according to an embodiment of the present invention；
Fig. 5 shows detected material schematic diagram according to an embodiment of the present invention；
Fig. 6 shows the chuck mechanism structural schematic diagram of material holding unit according to an embodiment of the present invention；
Fig. 7 a and 7b respectively illustrate the material fixing dress after the positioning plate according to an embodiment of the present invention using different model
Set structural schematic diagram.
It is to be appreciated that Figure of description shows specific structure of the invention with being not necessarily to scale, and in specification
For illustrating that the n-lustrative feature of the certain principles of the present invention can also take the slightly simplified technique of painting in attached drawing.Disclosed herein
The specific design feature of invention includes that such as specific size, direction, position and shape will be partly by specifically to be applied and be made
Environment determines.
In several attached drawings of Figure of description, identical appended drawing reference indicates identical or equivalent part of the invention.
Specific embodiment
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention.But the present invention can be with
Much it is different from other way described herein to implement, those skilled in the art can be without prejudice to intension of the present invention the case where
Under do similar popularization, therefore the present invention is not limited by the specific embodiments disclosed below.
In the following, specific embodiments of the present invention are described in conjunction with attached drawing.It please refers to shown in Fig. 1-6, the present invention provides
A kind of material holding unit.
As Fig. 2 and 3 respectively illustrates the top view and side view of material holding unit according to an embodiment of the present invention.It is described
Material holding unit is mainly made of positioning plate 1, material fixed mechanism, switching board 54 (Fig. 4), pedestal 5, general-purpose interface 6 etc..
The material fixed mechanism includes chuck mechanism 2 and/or sucker 3.The positioning plate 1 is arranged on the pedestal 5, the suction
Disk 3 is for adsorbing material, and the chuck mechanism 2 is arranged in around the sucker 3, for the material to be clamped in the suction
On disk 3, the pedestal 5 is provided with several general-purpose interfaces 6, can be 1,2,3 or more, and those skilled in the art can be with
It is configured according to actual needs.The switching board 54 has pinboard card interface 4.The positioning plate can have different sizes
Model, the applicable material for clamping different sizes, different materials, that is, the size and model of the positioning plate can be according to materials
Size or material select, so that the size and model of the positioning plate and the size or material of material are consistent.
Inside the pedestal 5, the material of material 7 is detected into interface 9 (Fig. 5) and external detection as shown in figure 4, being provided with
Switching board 54, control piper interface 50, control piper and the board route 55,56 that equipment is attached.The control pipe
Road interface 50 passes to the control medium of the forms such as gas, liquid, vacuum, and the control piper includes vacuum line 51 and control
The control that pipeline 52,53, the control piper 52 and/or control piper 52 can be passed through the forms such as gas, liquid, vacuum is situated between
Matter.Preferably, control piper is all set as vacuum line.Wherein the control piper 52 is for connecting in pinboard card interface 4
Cylinder, the vacuum line 51 be used for connecting sucker and/or sucker cylinder, the control piper 53 be used for connecting clip cylinder
25。
Fig. 5 shows detected material schematic diagram according to an embodiment of the present invention.It is carried out in clamping process to material, people
Work automatically docks the detection interface 9 of material with the pinboard card interface 4 of material holding unit, simultaneously or after pass through
Detection interface 9 described in cylinder clamping in the control connection pinboard card interface 4 of control piper 52；Material is placed in material fixing again
On the pedestal 5 and sucker 3 of device, it is preferable that the material is close to the position of positioning plate 1.Finally detected material is carried out
Fixing, chuck mechanism 2 and sucker 3 can individually carry out detected material gripping/adsorbing fixation, this example is preferably used
Chuck mechanism 2 and sucker 3, which cooperate, realizes that wherein chuck mechanism 2 is to material to the more stable fixing of detected material
It is clamped, sucker 3 is passed through vacuum by vacuum line 51 and adsorbs to material.
Fig. 6 shows the chuck mechanism structural schematic diagram of material holding unit according to an embodiment of the present invention.The collet
Mechanism 2 is by collet 20, cylinder 25, cylinder piston 21, elastic component, force snesor 23, adjusting component, cylinder conduit 53 (Fig. 4)
And the composition such as pressure sensor 24.The elastic component can be rubber, spring or other Combined elastic structures, this reality
Example preferably spring 22, preferred adjusting screw rod 26, those skilled in the art can according to need choosing in described this example of adjustings component
It selects the suitable existing component that adjusts and realizes the function same or similar with adjusting screw rod 26.The pressure sensor 24 is connected to
Adjusting screw rod 26, the force snesor 23 connect the either end of the spring 22.The collet 20 connect cylinder piston 21 and
It is moved under the drive of the cylinder piston 21.The collet 20 can also include elastic damping material layer.Before clamping material,
The adjusting screw rod 26 is adjusted, makes dynamics when clamping in suitable range.In view of the safety of material, carried out to material
When clamping, clamping force cannot be excessive, and the maximum grip power that different material can bear may be different.Therefore, in design material
When chuck mechanism, when material detection, which finishes, to be carried out unclamping operation, air is pressed by the vacuum pipeline 53 of connecting clip cylinder 25
Cylinder piston 21 is set to move right, to complete to unclamp operation.
The invention also provides a kind of material detection methods, as shown in Figure 1, adopting when material is detected in producing line
Material is clamped at detection station A with the above described material holding unit, and the material for accompanying material can be consolidated
It holds device to connect by the general-purpose interface 6 on material holding unit with external detection equipment at A, consolidates material after having detected
It holds device and external detection equipment disconnects, the material fixing dress of material will be clamped with by the automatic conveying device in detection producing line
It sets to be moved at next detection station B and be detected next time, same operation carries out at detection station C, D respectively again later
Detection, and so on until entire detection producing line detection finishes.
When having different sizes or different materials or interface position difference simultaneously in detected material, can have by selection
There is the material holding unit of the positioning plate of different model.Fig. 7 a and 7b respectively illustrate according to an embodiment of the present invention using different
Material holding device constructions schematic diagram after model positioning plate.In figure 7 a, the pinboard clamping in the material holding unit
The left part of material holding unit is arranged in mouth 4, is suitble to detection interface 9 in the material in left side；And the fixing dress of material shown in Fig. 7 b
The top of material holding unit is arranged in connecting plate card interface 4 in setting, is suitble to detection interface 9 in the material on top.The present invention
Without being limited thereto, pinboard card interface 4 can also be provided at right part or the lower part of material holding unit, to adapt in right side or lower part
Material.Certainly, the transfer position of board can flexibly replace different positioning plates according to the detection position of detected material completely.
When detecting to different size materials, in order to improve the efficiency of whole detection producing line, need to prepare multiple objects
Expect holding unit, clipping operation carried out to material under online, when a material holding unit equipped with material a station (such as
Station A in Fig. 1) detection finishes when being moved to next station and carrying out (station B as shown in figure 1) detection, can fill another
There is the material holding unit of material to be connected at A to be detected, the working efficiency of entire producing line can be made to get a promotion in this way.
Above-described embodiment is for the principle of the present invention and its effect to be illustrated, but the present invention is not limited to above-mentioned
Embodiment.Those skilled in the art without departing from the spirit and scope of the present invention, in claims
It is interior, it modifies to above-described embodiment.Therefore protection scope of the present invention, should cover such as claims of the present invention.
Claims (17)
1. a kind of material holding unit, which is characterized in that including positioning plate, material fixed mechanism, switching board, pedestal, general
Interface, the positioning plate are arranged on the pedestal,
Wherein the pedestal is provided with general-purpose interface, is docked with realizing with external detection equipment；
The switching board is for the detection interface of material to be attached with external detection equipment.
2. material holding unit according to claim 1, which is characterized in that the material fixed mechanism includes chuck mechanism
And/or sucker, for adsorbing material, the chuck mechanism is arranged in around the sucker and for will be described the sucker
Material is clamped on the sucker.
3. material holding unit according to claim 1, which is characterized in that the switching board is arranged in the pedestal
Portion.
4. material holding unit according to claim 1, which is characterized in that the size and model and material of the positioning plate
Size or material be consistent.
5. material holding unit according to claim 1, which is characterized in that the pinboard card is clamped with pinboard
Mouthful, it is docked for the detection interface with the material.
6. material holding unit according to claim 2, which is characterized in that the chuck mechanism includes collet, cylinder, gas
The cylinder piston, elastic component, force snesor, adjustment means and pressure sensor, the pressure sensor are connected to adjusting structure
Part, the force snesor connect one end of the elastic component, and the collet connects cylinder piston and in the cylinder piston
Drive under move.
7. material holding unit according to claim 6, which is characterized in that the elastic component is spring.
8. material holding unit according to claim 6, which is characterized in that the adjustment means are adjusting screw rods.
9. material holding unit according to claim 4, which is characterized in that the material by that will be clamped with material holds dress
It sets and is moved to be moved to the material.
10. material holding unit according to claim 6, which is characterized in that adjusted by adjusting the adjustment means
The clamping force of the collet.
11. material holding unit according to claim 5, which is characterized in that the pinboard card interface is arranged in material
The left part of holding unit or top or right part or lower part.
12. a kind of material holding method, which is characterized in that held using the material as described in any one of claim 1-11
Device, comprising:
S1: the detection interface of the docking switching board and the material；
S2: join the material on the material holding unit；
S3: the material holding unit holds the material.
13. material clamp method according to claim 12, which is characterized in that the S2 further comprises: described in handover
Material is on the material holding unit, and close to the position of the positioning plate.
14. material clamp method according to claim 12, which is characterized in that the S3 further comprises:
The material holding unit realizes the fixing to the material by vacuum suction and/or method of clamping.
15. a kind of material detection method characterized by comprising
Step a: material is held using material holding unit described in any one of -11 according to claim 1；
Step b: the material holding unit of material connect by the general-purpose interface with external detection equipment fixing；
Step c: the general-purpose interface and the external detection equipment are disconnected upon completion of the assays.
16. material detection method according to claim 15, which is characterized in that further include:
Step d: by transmission device by the material holding unit for holding the material be moved at another detection station into
Row detection.
17. material detection method according to claim 15, spy is being, when being detected to multiple materials, mention
For the multiple material holding units of correspondence, and fixing operation is carried out to multiple materials respectively, the material of material is clamped at one
Another is equipped with the object of material when detection station detection finishes and is moved to next detection station and detected by holding unit
Material holding unit is connected to the detection station and is detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711160596.1A CN109807767B (en) | 2017-11-20 | 2017-11-20 | Material holding device and material detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711160596.1A CN109807767B (en) | 2017-11-20 | 2017-11-20 | Material holding device and material detection method |
Publications (2)
| Publication Number | Publication Date |
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| CN109807767A true CN109807767A (en) | 2019-05-28 |
| CN109807767B CN109807767B (en) | 2021-11-05 |
Family
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|---|---|
| CN109807767B (en) | 2021-11-05 |
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