CN109799611A - A kind of design method and its super structure lens of achromatism of the super structure lens of achromatism - Google Patents
A kind of design method and its super structure lens of achromatism of the super structure lens of achromatism Download PDFInfo
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Abstract
The present invention relates to optical lens technical fields, more particularly to a kind of design method and its super structure lens of achromatism of super structure lens of achromatism, the invention firstly uses each freedom degree geometric parameter of the Method for Numerical to single nano unit to carry out analog scanning, then phase shift caused by the nano unit combined with different geometric parameter is subjected to numerical value addition, transmitance carries out numerical value multiplication, to obtain the superimposed total phase shift of multi-layer nano unit and total transmittance, the nano unit of suitable parameters is subjected to stacked combination again, superimposed nano unit is arranged according to the corresponding Fresnel double shaped form rule of each target wavelength is met, to obtain the super structure lens of achromatism.The present invention is by carrying out parameter designing, stacked combination and arrangement to the nano unit for forming the super structure lens of achromatism, so that the super structure lens of achromatism can act on multiple target wavelengths, to eliminate the influence of color difference brought by conventional lenses, and the area of the super structure lens of the achromatism can increase to centimetre rank or more.
Description
Technical field
The present invention relates to optical lens technical fields, more particularly, to a kind of design method of the super structure lens of achromatism
And its super structure lens of achromatism.
Background technique
Super structure surface is the manual manufacture material in sub-wavelength rank thickness, mainly by photon resonance come to electromagnetic wave
It is modulated.Their characteristic is based on utilization sub-wavelength grade medium or metal nanoresonators to the phase of light and the control of polarization
Ability processed.Correspondingly, super structure surface can change the properties such as each phase of transmission or reflection light beam, polarization, intensity, realize inclined
Turn, retrodirective reflection, polarization conversion, the various very optical phenomenas such as focusing and beam shaping.Textured surface is focused, normally referred to as
Super structure lens, compared with binary amplitude and phase fresnel's zone plate, sub-wavelength nanostructure is capable of providing more accurately and more
Efficient phase controlling can be used for mobile phone camera camera lens or ultrathing microscope object lens etc..
The influence of color difference is usually associated in conventional lenses, it is difficult to it uses in imaging systems, therefore, achromatic lens
Very important effect is played in imaging optical path.The existing super structure lens of major part often act only on specific wavelength,
Wave band function and effect other than specific wavelength are often unsatisfactory；If desired surpass in single layer and realize disappearing for wide spectrum band on structure lens
Color difference focuses, then its area is limited by formula R_max NA Δ ω≤2c ΔΦ, and area is substantially reduced that (wherein R_max is
Lens radius, NA are numerical apertures, and Δ ω is spectral width, and c is the light velocity in vacuum, and ΔΦ is phase dispersion interval).In addition,
Most super structure lens are all that polarization is relevant, this requirement for incident light is stringenter, are easy by different polarization states
Stray light influence.The above limitation leads to super structure lens, and effect is undesirable in practical applications.
Summary of the invention
The present invention is directed to overcome at least one defect of the above-mentioned prior art, a kind of design of super structure lens of achromatism is provided
Method, by carrying out parameter designing, stacked combination and arrangement to the nano unit for forming the super structure lens of achromatism, so that described disappear
The super structure lens of color difference can act on multiple target wavelengths, to eliminate the influence of color difference brought by conventional lenses, and the colour killing
The area of the super structure lens of difference can increase to centimetre rank or more.
The invention also discloses a kind of super structure lens of achromatism.
The technical solution adopted by the present invention is that:
A kind of design method of super structure lens of achromatism is provided, the super structure lens of achromatism include multi-layer nano unit,
Characterized by comprising the following steps:
S1 determines total freedom degree of single nano unit, and sets required incident light wave band, then several to each freedom degree
The range of what parameter and interval are set, and Method for Numerical is recycled to carry out each freedom degree geometric parameter of nano unit
Analog scanning, to obtain the lower single nano unit of different geometric parameter combination to phase shift caused by the incident light wave band and saturating
Cross rate；
S2 changes incident light wave band, repeats the scan method of step S1, single under different geometric parameter combination to obtain
Nano unit is to phase shift and transmitance caused by different incident light wave bands；
S3 by step S1, S2 it is resulting under identical incident light wave band with different geometric parameter combination single nanometer list
Phase shift caused by member carries out numerical value addition, and corresponding transmitance is carried out numerical value multiplication, to obtain identical incident light wave band
Total phase shift and total transmitance after being laminated between the nano unit of lower different geometric parameter combination；
S4 repeat step S3, obtain it is all setting incident light wave bands under different geometric parameter combine nano unit between into
The data of total phase shift and total transmitance after row stacking, and all data are put into database；
S5 selectes suitable nano unit from the database of step S4 according to each target wavelength and carries out stacked combination, and
Nano unit after making stacking follows Fresnel double curve arrangement rule in total phase shift of Different Plane coordinate: Under arranged, wherein x, y be each nanometer of list
The coordinate of position,For the phase shift of nano unit, λ is target wavelength, and n is the exponent of refractive index of material Background, and f is that design is burnt
Away from C (λ) is first phase bit constant, to obtain the super structure lens of achromatism.
Freedom degree refers to the geometrical characteristic that completely describe a nano unit, the geometric parameter number at least needed.Benefit
Single nano unit is carried out with method for numerical simulation, such as Finite-Difference Time-Domain Method, Finite Element Difference Method, Coupled Wave Analysis method
Then analog scanning can directly obtain single nano unit to corresponding incident light by numerical simulation to the result of analog scanning
Phase shift and transmitance caused by wave band are specifically the electromagnetic field data that light wave can be obtained by numerical simulation, specifically include
Intensity, component, polarization, phase, transmitance etc..The purpose for carrying out analog scanning to single nano unit is: can determine difference
Geometric parameter combines the phase shift and transmitance of lower nano unit, suitable to find when being laminated and being arranged to nano unit
Supplemental characteristic, and only to single nano unit carry out analog scanning can greatly reduce operation memory and time.In addition, right
The phase shift between nano unit under different parameters combination carries out numerical value addition, and corresponding transmitance carries out the mesh of numerical value multiplication
: (1) the superimposed total phase shift of multi-layer nano unit and total transmittance can directly be calculated, compared to single layer nano unit
There are more phase shifts and transmitance combination, greatly enriches database；(2) it only needs to be scanned single nano unit, it can
Greatly to reduce scanning times and design time, play an important role in the design for surpassing structure lens to achromatism；(3) it reduces
The processing complexity of the super structure lens of every layer of achromatism, production easy to produce are also easy to produce the achromatism of centimetres area
Super structure lens.
If desired surpass in single layer and realize that the achromatism of wide spectrum band focuses on structure lens, area is by formula R_max NA
The limitation of Δ ω≤2c ΔΦ, area will be substantially reduced that (wherein R_max is lens radius, and NA is numerical aperture, and Δ ω is spectrum
Width, c are the lighies velocity in vacuum, and ΔΦ is phase dispersion interval), stacking method of the invention, which is equivalent to, focuses optical band for target
Multiple independent target wave bands are divided into, realize that achromatism focuses by the super structure lens of different layers, to reduce every layer of structure
Spectral dispersion enables the area of the super structure lens of achromatism to reach li so as to effectively increase the area of the super structure lens of achromatism
Meter level not or more, promote its application in terms of imaging.
In above scheme, the present invention carries out analog scanning to each freedom degree geometric parameter of single nano unit first,
Then phase shift caused by the nano unit combined with different geometric parameter is subjected to numerical value addition, transmitance carries out numerical value phase
Multiply, to obtain the superimposed total phase shift of multi-layer nano unit and total transmittance, richer phase shift and transmitance can be obtained
Data, the nano unit for being conducive to find suitable parameters carry out stacked combination.Then again by superimposed nano unit according to full
The corresponding Fresnel double shaped form rule of each target wavelength of foot is arranged, so that the super structure lens of achromatism are obtained, it is described to disappear
The super structure lens of color difference may act on multi-wavelength, and the super structure lens of achromatism to the focus of each wavelength in same position, from
And the color difference for eliminating conventional lenses influences, it is more reasonable to design.
Preferably, in step s 5, when there are many geometric parameters arrays for the nano unit selected in the database from step S4
When conjunction is all satisfied Fresnel double curve arrangement rule, the nano unit chosen under the big geometric parameter combination of transmissivity is laminated
Combination, to obtain the super structure lens of efficient achromatism.
Preferably, in step s 5, it before carrying out stacked combination, selectes from the database of step S4 to each target
The nano unit that the transmissivity of wavelength and each phase is close, to further increase the achromatism energy of super structure lens.
A kind of super structure lens of achromatism, including substrate and set on one side of substrate and the multi-layer nano list of progress stacked combination
Member, the nano unit is sub-wavelength dimensions, and the multi-layer nano unit after stacked combination is according to Fresnel double shaped form rule:It is arranged, wherein x, y are each nanometer unit
Coordinate,For the phase shift of nano unit, λ is target wavelength, and n is the exponent of refractive index of material Background, and f is design focal length, C
(λ) is first phase bit constant.
Structure lens are surpassed for achromatism, target wavelength λ has multiple numerical value, so, superimposed nano unit needs simultaneously
Meet the Fresnel double shaped form rule of each target wavelength, to meet the achromatism effect to the incident light of different target wavelength.
The nano unit forms the super structure lens of achromatism through parameter designing, stacking and arrangement, and multiple target wavelengths can be expired
The achromatic condition of foot, has both the super structure lens achromatism function of achievable Centimeter Level, and can be put to more practical applications, such as
Mobile phone camera, high resolution microscope, virtual reality etc..
Preferably, it is overlapped between the adjacent layer nano unit of combination and is additionally provided with adhesive phase.
Preferably, the nano unit is symmetrical structure.That is incident light action of the nano unit to different linear polarizations
It is consistent, therefore the super structure lens of the achromatism also meet the irrelevant condition that polarizes simultaneously, it is not severe to incident light polarization state
The requirement at quarter, sphere of action are wider.
Preferably, the nano unit using optical crystal, optical glass, optical thin film, optical plastic, optical metal or
A kind of optical medium material of optical metamaterial is prepared.The optical crystal includes that Optical Single Crystals, optics polycrystalline, optics are non-
Crystalline substance etc.；Nano unit can be by optical crystal, optical glass, optical thin film, optical plastic, optical metal or optical metamaterial etc. no
Same optical medium material is prepared.
Preferably, the nano unit is equipped with the micro-nano structure graphically arranged.It can be existed by dry or wet etch
Required micro-nano structure is etched on nano unit.
It is further preferred that the graphical aligning method of the micro-nano structure is electron beam lithography, ultraviolet photolithographic and laser
Direct write it is one or more.The super structure lens can be through but not limited to the methods of electron beam lithography, ultraviolet photolithographic, laser direct-writing
It is patterned the arrangement of micro-nano structure.
Compared with prior art, the invention has the benefit that
One, phase shift caused by the nano unit of different geometric parameter combination is subjected to numerical value addition, transmitance is counted
Value is multiplied, and can be scanned, reach: (1) compared to single layer nanometer to avoid to the great multi-layer nano unit of sweep parameter amount
Unit has more phase shifts and transmitance data, greatly enriches database；It (2) can to the stacked combination design of nano unit
Greatly to reduce scanning times and design time, and the design for surpassing structure lens to achromatism plays an important role；(3) it reduces every
The processing complexity of the super structure lens of layer, production easy to produce are also easy to produce the super structure lens of achromatism of centimetres area.
Two, stacking method of the invention, which is equivalent to, is divided into multiple independent target wave bands for target focusing optical band, by
The super structure lens of different layers realize that achromatism focuses, to reduce the spectral dispersion of every layer of structure, so as to effectively increase colour killing
The area extremely centimetre rank or more of the super structure lens of difference, there is important application in terms of imaging.
Three, in addition, super structure lens of the present invention, which meet, polarizes irrelevant condition, to incident light polarization state without harshness
Requirement, design it is more reasonable.
Four, phase shift and transmitance caused by the nano unit of different geometric parameter combination carry out the stack combinations of numerical value,
As long as finding suitable nano unit parameter, resulting super structure surface can be all satisfied achromatic work to the incident light of any wavelength
With, while the super structure lens of gained can also be put to more practical applications, such as high-resolution, low consumption confocal microscope, cell-phone camera
Head, virtual reality etc..
Detailed description of the invention
Fig. 1 (a) is the main view of the cylindrical nanometer unit of the super structure lens of the achromatism.
Fig. 1 (b) is the left view of the cylindrical nanometer unit of the super structure lens of the achromatism.
Fig. 1 (c) is the top view of the cylindrical nanometer unit of the super structure lens of the achromatism.
Fig. 2 is the structural schematic diagram of the super structure lens of achromatism of three layers of superposition.
The super structure lens of achromatism that Fig. 3 is superimposed for three layers are on different radial coordinates to the actual phase shift of different wave length and phenanthrene
The matching degree schematic diagram of ideal phase shift required by Nie Er hyperbola.
Fig. 4 is the nano unit arrangement surface Local map of the super structure lens of the achromatism.
Fig. 5 is the nano unit arrangement side sectional partial view of the super structure lens of the achromatism.
Drawing reference numeral explanation: 1 substrate；2 first nano units；3 first adhesive phases；4 second nano units；5 second is viscous
Mixture layer；6 third nano units.
Specific embodiment
Attached drawing of the present invention only for illustration, is not considered as limiting the invention.It is following in order to more preferably illustrate
Embodiment, the certain components of attached drawing have omission, zoom in or out, and do not represent the size of actual product；For art technology
For personnel, the omitting of some known structures and their instructions in the attached drawings are understandable.
Embodiment 1
A kind of design method of the super structure lens of achromatism, as shown in Figs. 1-2, with the first nano unit 2, the second nano unit
4 and the superposition of this three layers of third nano unit 6 the super structure lens of achromatism for, the first nano unit 2,4 and of the second nano unit
The freedom degree of third nano unit 6 is respectively three, and total freedom degree of three layers of superposition is nine, comprising the following steps:
S1 determines the respective total freedom degree of single nano unit 2,4,6, and sets required incident light wave band, then to each
The range of freedom degree geometric parameter and interval are set, and recycle Method for Numerical respectively to each of nano unit 2,4,6
Freedom degree geometric parameter carries out analog scanning, and to obtain 2,4,6 pairs of single nano unit under different geometric parameter combination, this enters
Penetrate optical band generated phase shift and transmitance respectively；
S2 changes incident light wave band, repeats the scan method of step S1, single under different geometric parameter combination to obtain
Phase shift and transmitance caused by 2,4,6 pairs of nano unit different incident light wave bands difference；
S3 by step S1, S2 it is resulting under identical incident light wave band with different geometric parameter combination single nanometer list
Phase shift caused by member 2,4,6 carries out numerical value addition, and corresponding transmitance is carried out numerical value multiplication, to obtain identical incident light
Total phase shift and total transmitance after being laminated between the nano unit 2,4,6 that different geometric parameter combines under wave band；
S4 repeats step S3, obtains the nano unit 2,4,6 that different geometric parameter combines under all setting incident light wave bands
Between be laminated after total phase shift and total transmitance data, and all data are put into database；
S5 selectes suitable nano unit 2,4,6 from the database of step S4 according to each target wavelength and carries out stacking group
It closes, and the nano unit 2,4,6 after stacking is made to follow Fresnel double curve arrangement rule in total phase shift of Different Plane coordinate:Under arranged, wherein x, y be each nanometer unit
Coordinate,For the phase shift of nano unit, λ is target wavelength, and n is the exponent of refractive index of material Background, and f is that design is burnt
Away from C (λ) is first phase bit constant, to obtain the super structure lens of achromatism.
The present invention utilizes method for numerical simulation, such as Finite-Difference Time-Domain Method, Finite Element Difference Method, Coupled Wave Analysis method pair
Single nano unit 2,4,6 carries out analog scanning, then can directly obtain list by numerical simulation to the result of analog scanning
Phase shift and transmitance caused by 2,4,6 pairs of a nano unit corresponding incident light wave bands, are specifically that can be obtained by numerical simulation
To the electromagnetic field data of light wave, intensity, component, polarization, phase, transmitance etc. are specifically included.Stacking method of the invention is suitable
In target focusing optical band is divided into multiple independent target wave bands, realize that achromatism focuses by the super structure lens of different layers,
To reduce the spectral dispersion of every layer of structure, so as to effectively increase the super structure lens of achromatism area extremely centimetre rank or with
On, promote its application in terms of imaging.
The present invention carries out analog scanning to each freedom degree geometric parameter of single nano unit 2,4,6 first, then will
Phase shift caused by nano unit 2,4,6 with different geometric parameter combination carries out numerical value addition, and transmitance carries out numerical value phase
Multiply, to obtain the superimposed total phase shift of multi-layer nano unit 2,4,6 and total transmittance, richer phase shift and thoroughly can be obtained
Rate data are crossed, the nano unit 2,4,6 for being conducive to find suitable parameters carries out stacked combination.Then again by superimposed nanometer list
Member 2,4,6 is arranged according to the corresponding Fresnel double shaped form rule of each target wavelength is met, so that it is super to obtain achromatism
Structure lens, the super structure lens of achromatism may act on multi-wavelength, and the super structure lens of achromatism are equal to the focus of each wavelength
In same position, so that eliminating the color difference of conventional lenses influences, it is more reasonable to design.
Wherein, in step s 5, when there are many geometric parameters for the nano unit 2,4,6 selected in the database from step S4
When combination is all satisfied Fresnel double curve arrangement rule, the preferential nano unit 2 chosen under the big geometric parameter combination of transmissivity,
4,6 stacked combination is carried out.In addition, also to guarantee as far as possible selected to each target wavelength and each phase before stacked combination
The nano unit 2,4,6 that the transmissivity of position is close, to obtain the super structure lens of efficient achromatism.
Embodiment 2
A kind of super structure lens of achromatism, as shown in Fig. 2,4,5, using the super structure lens design of achromatism described in embodiment 1
Method, including substrate 1 and set on 1 side of substrate and carry out stacked combination multi-layer nano unit 2,4,6, the nano unit 2,
4,6 be sub-wavelength dimensions, and the multi-layer nano unit 2,4,6 after stacked combination is according to Fresnel double shaped form rule:It is arranged, wherein x, y are each nanometer unit
Coordinate,For the phase shift of nano unit, λ is target wavelength, and n is the exponent of refractive index of material Background, and f is design focal length, C
(λ) is first phase bit constant.
As shown in Fig. 2,4,5, by taking the super structure lens of achromatism that three layers are superimposed as an example, the first nano unit 2 and second nanometer
Unit 4 is monocrystalline silicon cylindrical nanometer unit, and third nano unit 6 is silicon nitride cylindrical nanometer unit.Wherein, it is overlapped
It is additionally provided with adhesive phase between combined adjacent layer nano unit 2,4,6, as shown in Fig. 2, the first nano unit 2 and second nanometer
It is equipped with first adhesive phase 3 between unit 4, second adhesive phase 5 is equipped between the second nano unit 4 and third nano unit 6.
Since this lens is the super structure lens of achromatism, there are multiple target wave band λ, therefore designed nano unit 2,4,6 is laminated
Total phase shift afterwards must meet the rule of Fresnel double shaped form corresponding to each target wave band simultaneously.As shown in figure 3, three layers of superposition
The resulting super structure lens of achromatism are on different location to reason required by the actual phase of different wave length and Fresnel double curve
Think the matching degree of phase.
Specifically, the nano unit 2,4,6 is preferably symmetrical structure to meet the irrelevant condition of polarization, thus to entering
Polarization state not harsh requirement is penetrated, it is more reasonable to design.
Wherein, the nano unit 2,4,6 is using optical crystal, optical glass, optical thin film, optical plastic, optics gold
Belong to or a kind of optical medium material of optical metamaterial is prepared.
Using design method described in embodiment 1 and arrangement mode, the super structure lens of achromatism can be through but not limited to
The methods of electron beam lithography, ultraviolet photolithographic, laser direct-writing are patterned micro-nano structure arrangement to nano unit 2,4,6, and lead to
It crosses dry or wet etch and etches required micro-nano structure on the chip of nano unit 2,4,6.
Certainly, the stacking number of the super structure lens of achromatism of the present invention is not limited solely to three-decker, can be according to more
The demand of kind target wavelength, carries out flexible design.
Obviously, the above embodiment of the present invention is only intended to clearly illustrate technical solution of the present invention example, and
It is not the restriction to a specific embodiment of the invention.It is all made within the spirit and principle of claims of the present invention
Any modifications, equivalent replacements, and improvements etc., should all be included in the scope of protection of the claims of the present invention.
Claims (9)
1. a kind of design method of the super structure lens of achromatism, the super structure lens of achromatism include multi-layer nano unit, feature
It is, comprising the following steps:
S1 determines total freedom degree of single nano unit, and sets required incident light wave band, then to each freedom degree geometric parameters
Several ranges and interval are set, and Method for Numerical is recycled to simulate each freedom degree geometric parameter of nano unit
Scanning, to obtain the single nano unit under different geometric parameter combination to phase shift and transmission caused by the incident light wave band
Rate；
S2 changes incident light wave band, repeats the scan method of step S1, to obtain the single nanometer under different geometric parameter combination
Unit is to phase shift and transmitance caused by different incident light wave bands；
S3 by step S1, S2 it is resulting under identical incident light wave band with different geometric parameter combination single nano unit institute
The phase shift of generation carries out numerical value addition, and corresponding transmitance is carried out numerical value multiplication, to obtain under identical incident light wave band not
Total phase shift and total transmitance after being laminated between nano unit with geometric parameter combination；
S4 repeats step S3, obtains carrying out layer between the nano unit that different geometric parameter combines under all setting incident light wave bands
Total phase shift of poststack and the data of total transmitance, and all data are put into database；
S5 selectes suitable nano unit from the database of step S4 according to each target wavelength and carries out stacked combination, and makes layer
The nano unit of poststack follows Fresnel double curve arrangement rule in total phase shift of Different Plane coordinate: Under arranged, wherein x, y be each nanometer unit coordinate,
For the phase shift of nano unit, λ is target wavelength, and n is the exponent of refractive index of material Background, and f is design focal length, and C (λ) is initial phase
Constant, to obtain the super structure lens of achromatism.
2. the design method of the super structure lens of achromatism according to claim 1, which is characterized in that in step s 5, when from step
When the nano unit selected in the database of rapid S4 is all satisfied Fresnel double curve arrangement rule there are many geometric parameter combination, choosing
Nano unit under the geometric parameter combination for taking transmissivity big carries out stacked combination.
3. the design method of the super structure lens of achromatism according to claim 1, which is characterized in that in step s 5, carrying out
Before stacked combination, selectes from the database of step S4 and received to what the transmissivity of each target wavelength and each phase was close
Meter Dan Yuan.
4. a kind of super structure lens of achromatism using any one of the claim 1-3 design method design, which is characterized in that packet
It includes substrate and set on one side of substrate and the multi-layer nano unit of progress stacked combination, the nano unit is sub-wavelength dimensions, and
Multi-layer nano unit after stacked combination is according to Fresnel double shaped form rule: It is arranged, wherein x, y are each nanometer unit
Coordinate,For the phase shift of nano unit, λ is target wavelength, and n is the exponent of refractive index of material Background, and f is design focal length, C
(λ) is first phase bit constant.
5. the super structure lens of achromatism according to claim 4, which is characterized in that be overlapped the adjacent layer nano unit of combination
Between be additionally provided with adhesive phase.
6. the super structure lens of achromatism according to claim 4, which is characterized in that the nano unit is symmetrical structure.
7. the super structure lens of achromatism according to claim 4, which is characterized in that the nano unit uses optical crystal, light
A kind of optical medium material for learning glass, optical thin film, optical plastic, optical metal or optical metamaterial is prepared.
8. the super structure lens of achromatism according to claim 4, which is characterized in that the nano unit is equipped with graphical arrangement
Micro-nano structure.
9. the super structure lens of achromatism according to claim 8, which is characterized in that the graphical aligning method of the micro-nano structure
For the one or more of electron beam lithography, ultraviolet photolithographic and laser direct-writing.
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Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110376731A (en) * | 2019-07-13 | 2019-10-25 | 南京理工大学 | Construction method based on the super structure lens group of broadband achromatism that multilayer surpasses structure surface |
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