CN109901246B - Multifunctional polarization adjusting component based on three-dimensional composite structure unit - Google Patents
Multifunctional polarization adjusting component based on three-dimensional composite structure unit Download PDFInfo
- Publication number
- CN109901246B CN109901246B CN201910170319.1A CN201910170319A CN109901246B CN 109901246 B CN109901246 B CN 109901246B CN 201910170319 A CN201910170319 A CN 201910170319A CN 109901246 B CN109901246 B CN 109901246B
- Authority
- CN
- China
- Prior art keywords
- dimensional
- frequency
- wave plate
- composite structure
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Polarising Elements (AREA)
Abstract
The invention discloses a multifunctional polarization adjusting component based on a three-dimensional composite structure unit, wherein the surface of a metal film of the multifunctional polarization adjusting component is provided with a plurality of three-dimensional T-shaped structure units which are periodically arranged; the three-dimensional T-shaped structural unit comprises a first structure and a second structure which are both in a square brick shape, and the first structure and the second structure are vertically arranged and separated by a certain distance to form an approximate T-shaped structure; which has a quarter-wave plate function in a first frequency band and a half-wave plate function in a second frequency band, the first frequency being lower than the second frequency. Similarly, a multifunctional polarization adjusting component based on the three-dimensional composite structure unit is also disclosed, wherein the multifunctional polarization adjusting component has a half-wave plate function in a first frequency band and has a quarter-wave plate function in a second frequency band. The invention can respectively realize different optical functions in different working frequency bands of the infrared band by utilizing the composite structure unit so as to further promote the miniaturization and integration of the optical component.
Description
Technical Field
The invention belongs to the technical field of photoelectric functional devices and material preparation, and particularly relates to a polarization adjusting component capable of realizing different wave plate functions at different frequency bands through the design of a three-dimensional composite structure unit.
Background
Polarization regulation and control have important application in many research fields such as modern optics optoelectronics. How to precisely and flexibly regulate and control the polarization state is always an important problem in optical and photonic research. Polarization conversion of light has been achieved in the past using birefringent crystals in nature. With the development of miniaturization and integration of optoelectronic devices, the conventional polarization state control scheme based on optical crystal has many limitations in application due to the large volume of the device. If the size of the optical element is further reduced and the integration of the optical system is improved, a new design concept is required.
In recent years, the volume of a polarization adjusting component can be greatly reduced by utilizing an artificial microstructure comprising a metamaterial and a super surface to adjust and control the polarization state. If various functions can be further integrated into one optical element, and one device can realize the functions which can be realized by a plurality of devices originally, the integration level of the components can be further improved, the volume is reduced, and the manufacturing cost is reduced.
Disclosure of Invention
In order to further promote the miniaturization and integration of optical components, the invention provides a multifunctional polarization adjusting component based on a three-dimensional composite structure unit, which can respectively realize different optical functions in different working frequency bands of an infrared band, in order to utilize the composite structure unit to realize the design idea of multiple optical functions on the basis of a three-dimensional artificial microstructure.
The specific technical scheme of the invention comprises the following two types:
the first scheme is as follows: a multifunctional polarization adjusting component based on a three-dimensional composite structure unit is provided with a metal film surface, wherein the metal film surface is provided with a plurality of three-dimensional T-shaped structure units which are periodically arranged; the three-dimensional T-shaped structural unit comprises a first structure and a second structure which are both in a square brick shape, and the first structure and the second structure are vertically arranged and are spaced at a certain distance, so that an approximate T-shaped structure is formed; the length and the height of the first structure and the second structure are different; the three-dimensional T-shaped structural unit has a quarter-wave plate function in a first frequency band and a half-wave plate function in a second frequency band, and the first frequency is lower than the second frequency.
Preferably, the first structure is longer and taller than the second structure.
Preferably, the height of the first structure is 1.9 +/-0.1 microns, 2.7 +/-0.1 microns; the height of the second structure is 1.3 +/-0.1 micrometer, and the length of the second structure is 1.6 +/-0.1 micrometer; preferably, the first and second structures are spaced apart by 0.76 ± 0.03 microns.
Preferably, the width of the first structure and the second structure is 0.5 ± 0.05 microns.
Preferably, the period is 3.6 ± 0.2 microns.
Preferably, the thickness of the metal thin film is 35 ± 5 nm.
Scheme II: a multifunctional polarization adjusting component based on a three-dimensional composite structure unit is provided with a metal film surface, wherein the metal film surface is provided with a plurality of three-dimensional X-shaped structure units which are periodically arranged; the X-shaped structure unit comprises a first structure and two second structures which are both in a square brick shape, and the two second structures are respectively vertically distributed on two sides of the first structure and are spaced from the first structure by a certain distance, so that an approximate X-shaped structure is formed; the length and the height of the first structure and the second structure are different; the three-dimensional X-shaped structural unit has a half-wave plate function in a first frequency band and a quarter-wave plate function in a second frequency band, and the first frequency is lower than the second frequency.
Preferably, the first structure is longer and taller than the second structure.
Preferably, the height of the first structure is 1.9 +/-0.1 microns, and the length of the first structure is 4.5 +/-0.1 microns; the height of the second structure is 1.1 +/-0.1 micrometer, and the length of the second structure is 1.7 +/-0.1 micrometer;
preferably, the first and second structures are spaced apart by 0.27 ± 0.02 microns.
Preferably, the width of the first structure and the second structure is 0.3 ± 0.03 micrometer.
Preferably, the period is 3.6 ± 0.2 microns.
Preferably, the thickness of the metal thin film is 35 ± 5 nm.
Based on the two schemes, the first structure and the second structure with different optical functions are compounded in one structural unit, and the achievable functions utilize the specific height adjustable property of a three-dimensional structure in physical principle, which cannot be obtained by the traditional two-dimensional structure. In addition to the fact that the distance and the position of the three-dimensional structure on a plane can be adjusted in the process of combination, the first structure and the second structure can be designed respectively in height relative to a common two-dimensional structure. Therefore, the mirror image principle and the phase conjugation principle can be utilized to design different heights for the first structure and the second structure respectively, and a certain broadband effect is achieved. On the other hand, the first structure and the second structure can be separated by utilizing the difference in height space, so that the coupling effect between the first structure and the second structure is weakened, and the optical functions are not influenced mutually. Considering the two-dimensional structure in reverse, there is no such design possibility. The invention can realize the function of the half-wave plate or the quarter-wave plate in different frequency bands by adjusting the height and the length of the first structure and the second structure. It should be noted that the quarter-wave plate and the half-wave plate are the two most important devices in the polarization state adjusting optical element. In optical research, if flexible polarization state change is desired, basically, the two wave plates are used for combination and adjustment, and thus, from the viewpoint of wave plate function, only the two general functions are provided.
The invention has the following beneficial effects:
(1) the design of the three-dimensional composite structure unit is obtained by compounding a first structure and a second structure with different optical functions in one structure unit, different wave plate functions can be respectively realized in different frequency bands only through one component, and the design of the multifunctional polarization state modulation component based on the three-dimensional artificial microstructure of two working frequency bands in an infrared band is disclosed for the first time.
(2) The adopted structural basic units are square brick-shaped structures with different heights and lengths, compared with a two-dimensional structure, the three-dimensional structure has weaker coupling when different basic units are combined into a composite unit due to the difference between the heights, the mutual influence among different basic units is less when parameter debugging is carried out, and the design and the realization of multiple functions are facilitated.
(3) The designed T-shaped multifunctional polarization adjusting component (T-shaped composite structure) has a quarter-wave plate function in a low-frequency wave band T-shaped composite structure and a half-wave plate function in a high-frequency wave band T-shaped composite structure, and the original function needs to simultaneously use the quarter-wave plate of the low-frequency wave band and the half-wave plate of the high-frequency wave band.
(4) The designed X-shaped multifunctional polarization adjusting component (X-shaped composite structure) has a half-wave plate function in a low-frequency wave band X-shaped composite structure and a quarter-wave plate function in a high-frequency wave band X-shaped composite structure, and the original function needs to use the half-wave plate of the low-frequency wave band and the quarter-wave plate of the high-frequency wave band at the same time.
Drawings
Fig. 1 is an experimental diagram of a T-shaped composite structure for implementing a low-frequency quarter-wave plate and a high-frequency half-wave plate in a mid-infrared band, wherein: (a) the method is characterized by comprising the following steps of (a) preparing a T-shaped composite structure, wherein the T-shaped composite structure is a matrix schematic diagram of T-shaped composite structure units which are arranged according to a period, (b) preparing a structural unit schematic diagram of the T-shaped composite structure, (c) preparing a scanning electron microscope photo of the T-shaped composite structure, (d) preparing a scanning electron microscope photo of the T-shaped composite structure, (e) preparing an experimental measurement result of polarization conversion of the T-shaped composite structure, and (f) preparing a computer simulation result of the polarization conversion of the T-shaped composite structure;
fig. 2 is an experimental diagram of an X-shaped composite structure for implementing a low-frequency half-wave plate and a high-frequency quarter-wave plate in a mid-infrared band, wherein: (a) the method is characterized by comprising the following steps of (a) preparing an X-shaped composite structure unit, (b) preparing an X-shaped composite structure unit, wherein the X-shaped composite structure unit is arranged in a periodic mode, (c) preparing a scanning electron microscope photo of the X-shaped composite structure, (d) preparing a scanning electron microscope photo of the X-shaped composite structure, (e) representing an experimental measurement result of polarization conversion of the X-shaped composite structure, and (f) representing a computer simulation result of the polarization conversion of the X-shaped composite structure;
FIG. 3 is an experimental plot of infrared imaging using an X-shaped composite structure, wherein: (a) is an electron microscope photograph of an image prepared by using an X-shaped composite structure with different rotation angles; (b) under incident light in the x polarization direction, the focal plane array image with the polarization detection direction being the x direction has an integration interval of 1400-1900 wave numbers; (c) under incident light in the x polarization direction, the focal plane array image with the analysis direction in the x direction has an integration interval of 2100-2200 wave numbers; (d) under incident light in the x polarization direction, the focal plane array image with the polarization detection direction being the y direction has an integration interval of 1400-1900 wave numbers; (e) under incident light in the x polarization direction, the focal plane array image with the polarization detection direction being the y direction has an integration interval of 2100-2200 wave numbers; (f) under the incident light with the polarization direction of 45 degrees, the focal plane array image with the polarization detection direction of 45 degrees has an integration interval of 2100-2200 wave numbers; (g) is a focal plane array image with the analyzing direction of 135 degrees under the incident light with the polarizing direction of 45 degrees, and the integration interval is 2100-2200 wave numbers.
Detailed Description
The invention prepares a three-dimensional composite structure which is formed by combining the space of the square brick-shaped basic structure units and is uniformly distributed on a substrate, the structure prepared in the first step can be composed of a medium (such as photosensitive resin), and then a layer of metal film is fully covered on the whole medium surface and the substrate surface. By adjusting the height and length of the tile structure constituting, for example, a T-shaped composite structure and an X-shaped composite structure, to control the amplitude and phase difference of two mutually perpendicular directional components of reflected light, it is possible to realize different optical functions in a low frequency band and a high frequency band. The preparation method of the invention is to prepare the medium for forming the three-dimensional composite structure on the glass sheet by utilizing the femtosecond pulse two-photon laser direct writing technology. Magnetron sputtering was used to sputter a uniform film about 35 nm thick on the media and substrate surface. The function of the half-wave plate or the quarter-wave plate can be realized at different frequency bands by adjusting the height and the length of the square brick-shaped structure.
In order to more fully explain the technical contents of the present invention, specific embodiments are described below with reference to the accompanying drawings.
Example 1: disclosed is a multifunctional polarization state regulation component, which is shown in a combined figure 1, wherein figure 1(a) is an array diagram of a T-shaped composite structure unit, and through selecting proper structure parameters, the period of the T-shaped composite structure unit is 3.6 +/-0.2 microns, the height of a higher and longer square brick structure is 1.9 +/-0.1 microns, and the length is 2.7 +/-0.1 microns; the height of the shorter square bricks is 1.3 +/-0.1 micron, and the length is 1.6 +/-0.1 micron; the width of the two square brick structures is 0.5 +/-0.05 microns. The gap spacing (gap) between the taller and longer tiles and the shorter and shorter tiles is 0.76 ± 0.03 microns. And the upper surfaces of the square brick structure and the substrate around the square brick are covered with continuous metal films, and the thickness of the metal films is 35 +/-5 nanometers. At this time, when the polarization direction of the incident light is along the x-axis direction in fig. 1(a) and the propagation direction is the-z direction, the T-shaped composite structure will have a quarter-wave plate function in the low frequency band (1500 wave number-1950 wave number) to convert the incident linearly polarized light into circularly polarized light for reflection, and simultaneously have a half-wave plate function in the high frequency band (2100 wave number-2300 wave number) to convert the incident x-linearly polarized light into y-linearly polarized light for reflection.
According to the size, a femtosecond pulse two-photon laser direct writing technology is utilized to prepare a T-shaped structure array on a glass sheet. The specific method comprises uniformly coating a layer of photoresist (IPL photoresist of Nanocribe, Germany) on a glass substrate with thickness of 170 μm, placing on a piezoelectric ceramic table, and collecting 780 nm wavelength femtosecond laser focus in the photoresist by using an optical microscope system. The laser focus position is fixed, the movement of the piezoelectric ceramic table is controlled by a computer, so that the relative position of the laser focus in the photoresist is changed, the photoresist at the laser focus position can generate two-photon absorption reaction, the chemical property of the photoresist is changed, and the photoresist is changed from liquid state to solid state. And developing the sample subjected to laser direct writing by using a developing solution to obtain the T-shaped structure array. And sputtering a layer of uniform film with the thickness of 35 nanometers on the surface of the T-shaped structure and the surface of the substrate by utilizing magnetron sputtering. The height and the length of the square bricks forming the T-shaped structure can be regulated, so that different regulation and control on the amplitude and the phase of the electromagnetic waves can be realized at different frequency bands. It should be noted that the above-mentioned preparation scheme is only a preferred scheme, and the achievement of the performance is not limited to this scheme as long as a metal thin film meeting the requirements can be prepared.
FIGS. 1(c) and (d) are scans of samples of the experimental preparationScanning electron microscope photographs. FIG. 1 (e) is an experimental measurement of the intensity of reflected light, R, for incident light polarized in the x-directionxxRepresenting the amplitude component in the x-direction, R, of the reflected lightyxRepresenting the amplitude component in the y-direction in the reflected light. For the incident light polarized in the x direction, the amplitude components in the x direction and the y direction in the reflected light are equal in the wavelength band of 1500-1950 wave number, and the incident light polarized in the x direction is converted into the y direction to be emitted in the wavelength band of 2100-2300 wave number. Fig. 1 (f) shows simulation results of the intensity and phase of the reflected light, and the experimental results are in agreement with the simulation results. This shows that the T-shaped three-dimensional metamaterial has the function of a quarter-wave plate in the low-frequency band and the function of a half-wave plate in the high-frequency band.
Example 2: another multifunctional polarization state regulating component is disclosed, and shown in fig. 2(a) and (b), fig. 2(a) is an array diagram of an X-shaped composite structure unit, and fig. 2(b) is a detailed diagram of the X-shaped composite structure unit. By selecting appropriate structural parameters, the X-shaped composite structural unit period is 3.6 +/-0.2 microns. The height of the higher and longer square brick structures is 1.9 +/-0.1 micron, the length of the higher and longer square brick structures is 4.5 +/-0.1 micron, the height of the two shorter and shorter square bricks is 1.1 +/-0.1 micron, the length of the two shorter and shorter square bricks is 1.7 +/-0.1 micron, and the width of the two square brick structures is 0.3 +/-0.03 micron. The gap spacing between the taller and longer tiles and the shorter and shorter tiles is 0.27 + -0.02 microns. The upper surfaces of the three square brick structures and the substrates around the square bricks are covered with continuous metal films, and the thickness of the metal films is 35 +/-5 nanometers. When the polarization direction of the incident light is along the X direction in fig. 2(a) and the light propagation direction is-z direction, the X-shaped composite structure has a half-wave plate function in the low frequency band (1400-1900 wave numbers) and converts the incident X-direction linearly polarized light into y-direction linearly polarized light for reflection. Has a quarter wave plate function in a high-frequency wave band (2100 wavenumbers to 2300 wavenumbers), and converts incident linearly polarized light into circularly polarized light for reflection. In the X-shaped composite structural unit in fig. 2(a), the periodic repeating directions of this structural unit are the X-direction and the y-direction. The direction of extension of the longer and shorter squares in the X-shaped composite structure is the diagonal direction of the periodic structure, or 45 and 135 degrees in the xy coordinate system.
The preparation and processing of the X-shaped composite structural unit sample is the same as that of example 1, and the details are not repeated here. The electromagnetic wave polarization state can be adjusted in different frequency bands by adjusting and controlling the height and the length of the square bricks forming the X-shaped composite structure.
FIGS. 2(c) and (d) are scanning electron micrographs of experimentally prepared samples. Fig. 2 (e) shows experimental measurement results of the intensity of the reflected light, for the incident light polarized in the x direction, the incident light polarized in the x direction is converted into the y direction to be emitted in the band of 1400-1900 wave numbers, and the amplitude components in the x direction and the y direction in the reflected light are equal in the band of 2100-2300 wave numbers. Fig. 2 (f) shows the simulation result of the intensity of the reflected light, and the experimental result corresponds to the simulation result. This shows that the X-shaped composite structure has a function of a half-wave plate in the low frequency band and a function of a quarter-wave plate in the high frequency band.
It can be seen that the design ideas of the above two multifunctional polarization state regulation components are basically consistent, but opposite function combinations are realized, the optical components constructed by the two composite structure units have different optical functions at two working bands of high frequency and low frequency, that is, the functions of the low-frequency quarter-wave plate high-frequency half-wave plate or the low-frequency half-wave plate high-frequency quarter-wave plate can be realized at the infrared band, so that the functions of the original wave plates requiring two different functions, which are respectively realized at high and low frequencies, can be realized only through one component, and the realized optical functions have certain working bandwidth.
In the above embodiments, the gaps, height differences, and length differences of the two kinds of the square brick structures are all necessary. The gap is used for ensuring that the oscillation response modes generated by the gap under the incident excitation of electromagnetic waves are dipole oscillation modes. If the gap disappears and the structures are connected together, the connected structures as a whole are no longer in dipole oscillation mode. The length difference is to ensure that the two structures work at high and low frequencies respectively (oscillation frequency), and the oscillation frequency of the dipole is related to the length of the dipole, so that the working frequency of the structures can be flexibly selected only by controlling the length. The height difference has two functions, one is to select proper height, certain broadband property can be realized according to a mirror image principle and a phase conjugation principle, and on the other hand, the distance between the two structures is increased in height, so that the coupling effect between the two structures is weakened, and the two functions realized by high and low frequencies are not influenced by each other.
It should be noted that, two conditions of height difference and length difference are satisfied, it can only be said that the three-dimensional metamaterial may have different electromagnetic oscillation modes at high and low frequencies, but the generated electromagnetic oscillation mode cannot play a precise optical modulation function, and each parameter needs to be further fine-tuned according to requirements. The difference of height and length can guarantee to realize two functions of high frequency and low frequency, but not necessarily just can regard as the basic components and parts of standard polarization state regulation, still need to match suitable size parameter. The size distribution range is specifically adjusted according to the required operating band, and two specific adjustment schemes are provided in examples 1 and 2. The scaling of the dimensions designed in example 1 results in new structures that can theoretically be used in a wider range of frequencies, depending on the nature of the electromagnetically oscillating structure, whose dimensional parameters determine the frequency of the response. For example, in the range of 400 wavenumbers to 4000 wavenumbers in the mid-infrared operating band, the lengths of the first structure and the second structure can be set to be between 1 micron and 10 microns according to actual needs, and the corresponding parameters such as height, interval, period and the like are scaled and optimized according to the proportion.
Example 3: as shown in fig. 3, a sample with a specific pattern is further designed by using the X-shaped composite structure units with different orientations, that is, the three-dimensional X-shaped structure units are periodically arranged as the minimum pixel unit of an image to form a plurality of target images, and then the sample is optically imaged by using an infrared focal plane array imaging system with different frequencies and different polarization settings, and the result further proves the effectiveness of the multifunctional design of our kind.
Fig. 3(a) shows the pixel points of the pattern "E ═ h ν" by X-shaped composite structures at different rotation angles, and four characters are arranged with X-shaped composite structure units rotated clockwise by 0 °, 45 °, 90 °, and 135 ° with respect to the first character. It should be noted that this isThe term "rotation" means that the structural unit in FIG. 2(b) rotates around the z-axis with the central symmetry point of the structural unit as the rotation center, so that the xy directions in FIG. 3(b) all rotate together. The rotated orientation corresponds to XSS of the second row of FIG. 3(a)1To XSS4. Although the angles of "H" and "H", "═ and" v "are different, their brightness is indistinguishable because of symmetry, but when light polarization is rotated, one is clockwise rotation and one is counterclockwise rotation, and circularly polarized light obtained at high frequency is left circularly polarized light and right circularly polarized light.
In fig. 3(b), when the incident light is in the X-polarization direction and the analysis direction is also in the X-direction, since the X-shaped composite structure has a function of a half-wave plate at a low frequency, the X-polarized incident light can be converted into the y-direction to be emitted for the X-shaped composite structures forming "E" and "h", so that a signal obtained in the X-direction is very weak, and a focal plane array image obtained after integration is displayed darkest. In the X-shaped composite structure including "═ and" v ", since polarization conversion is not performed on incident light polarized in the X direction, a signal in the X direction is strong, and a focal plane array image is displayed brightest.
In fig. 3(c), when the incident light is in the X-polarization direction and the analyzing direction is also in the X-direction, since the X-shaped composite structure has the function of a quarter-wave plate at high frequency, for the X-shaped composite structures forming "E" and "h", the incident light polarized in the X-direction can be converted into circularly polarized light to be emitted, so that the signal obtained in the X-direction is moderate when the analyzing is performed, and the integrated focal plane array image shows medium brightness. In the X-shaped composite structure including "═ and" v ", since polarization conversion is not performed on incident light polarized in the X direction, a signal in the X direction is strong, and a focal plane array image is displayed brightest.
In fig. 3(d), when the incident light is in the X-polarization direction and the analyzing direction is in the y-direction, since the X-shaped composite structure has a function of a half-wave plate at a low frequency, for the X-shaped composite structures forming "E" and "h", the incident light polarized in the X-direction can be converted into the y-direction to be emitted, so that a signal obtained in the y-direction is strong, and an integrated focal plane array image is displayed to be brightest. In the X-shaped composite structure including "═ and" v ", since polarization conversion is not performed on incident light polarized in the X direction, a signal in the y direction is weak, and a focal plane array image is displayed darkest.
In fig. 3(E), when the incident light is in the X-polarization direction and the analyzing direction is in the y-direction, since the X-shaped composite structure has the function of a quarter-wave plate at high frequency, for the X-shaped composite structures forming "E" and "h", the incident light polarized in the X-direction can be converted into circularly polarized light to be emitted, so that the signal obtained in the analyzing direction is moderate, and the integrated focal plane array image shows medium brightness. In the X-shaped composite structure including "═ and" v ", since polarization conversion is not performed on incident light polarized in the X direction, a signal in the y direction is weak, and a focal plane array image is displayed darkest.
In fig. 3(f), when the incident light is polarized at 45 ° and the polarization detection direction is also 45 °, the incident light polarized at 45 ° is not subjected to polarization conversion for the X-shaped composite structure forming "E" and "h", so that the signal obtained in the direction of 45 ° is strong and the integrated focal plane array image is displayed brightest. In the X-shaped composite structure including "v" and "v", since incident light polarized in the 45 ° direction is converted into circularly polarized light and emitted, a signal obtained by integrating in the 45 ° direction is moderate, and a focal plane array image shows moderate luminance.
In fig. 3(g), when the incident light is polarized at 45 ° and the analyzing direction is 135 °, the incident light polarized at 45 ° is not polarization-converted for the X-shaped composite structure forming "E" and "h", and thus the signal obtained at the analyzing direction of 135 ° is weak, and the focal plane array image obtained after integration is displayed darkest. In the X-shaped composite structure including "v" and "v", incident light polarized in the 45 ° direction is converted into circularly polarized light and emitted, and therefore, a signal obtained by integrating in the 135 ° direction is moderate, and a focal plane array image shows moderate luminance.
The experiment of example 3 was conducted to rotate the X-shaped composite structure while keeping the polarization direction of the incident linearly polarized light constant, which is equivalent to the incident linearly polarized light vertically incident on the X-shaped composite structure with a different polarization direction. The focal plane imaging results confirm that the X-shaped composite structure respectively realizes the functions of a half-wave plate and a quarter-wave plate in a lower frequency wave band and a higher frequency wave band. Therefore, the scheme based on the three-dimensional composite structure for obtaining different optical functions in different wave bands can be applied to other spectrometers and optical display components which need high integration design.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. By changing the structure period and the structure size, the multifunctional wave plate can be realized in different wave bands. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the protection scope of the present invention should be determined by the appended claims.
Claims (10)
1. A multifunctional polarization adjusting component based on a three-dimensional composite structure unit is characterized by comprising a metal film surface, wherein the metal film surface is provided with a plurality of three-dimensional T-shaped structure units which are periodically arranged; the three-dimensional T-shaped structural unit comprises a first structure and a second structure which are both in a square brick shape, and the first structure and the second structure are vertically arranged and are spaced at a certain distance, so that an approximate T-shaped structure is formed; the length and the height of the first structure and the second structure are different; the three-dimensional T-shaped structural unit has a quarter-wave plate function in a first frequency band and a half-wave plate function in a second frequency band, and the first frequency is lower than the second frequency.
2. The multifunctional polarization adjusting component of claim 1, wherein the first structure has a height of 1.9 ± 0.1 micron and a length of 2.7 ± 0.1 micron; the height of the second structure is 1.3 +/-0.1 microns, and the length of the second structure is 1.6 +/-0.1 microns.
3. The multifunctional polarization modifying component of claim 2 wherein said first structure and said second structure are spaced apart by 0.76 ± 0.03 microns.
4. The multi-functional polarization modifying component of claim 2, wherein the period is 3.6 ± 0.2 microns.
5. The multifunctional polarization modulation component of any one of claims 1 to 4, wherein the thickness of the metal thin film is 35 ± 5 nm.
6. A multifunctional polarization adjusting component based on a three-dimensional composite structure unit is characterized by comprising a metal film surface, wherein the metal film surface is provided with a plurality of three-dimensional X-shaped structure units which are periodically arranged; the three-dimensional X-shaped structure unit comprises a first structure and two second structures which are both in a square brick shape, wherein the two second structures are respectively vertically distributed on two sides of the first structure and are separated from the first structure by a certain distance, so that an approximate X-shaped structure is formed; the length and the height of the first structure and the second structure are different; the three-dimensional X-shaped structural unit has a half-wave plate function in a first frequency band and a quarter-wave plate function in a second frequency band, and the first frequency is lower than the second frequency.
7. The multifunctional polarization adjusting component of claim 6, wherein the first structure has a height of 1.9 ± 0.1 micron and a length of 4.5 ± 0.1 micron; the height of the second structure is 1.1 +/-0.1 microns, and the length of the second structure is 1.7 +/-0.1 microns.
8. The multi-functional polarization modifying component of claim 7, wherein the first structure and the second structure are separated by 0.27 ± 0.02 microns.
9. The multi-functional polarization modifying component of claim 7, wherein the period is 3.6 ± 0.2 microns.
10. A multifunctional polarization adjustment component as claimed in any one of claims 6 to 9, wherein the thickness of said metal thin film is 35 ± 5 nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910170319.1A CN109901246B (en) | 2019-03-07 | 2019-03-07 | Multifunctional polarization adjusting component based on three-dimensional composite structure unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910170319.1A CN109901246B (en) | 2019-03-07 | 2019-03-07 | Multifunctional polarization adjusting component based on three-dimensional composite structure unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109901246A CN109901246A (en) | 2019-06-18 |
| CN109901246B true CN109901246B (en) | 2020-01-17 |
Family
ID=66946668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910170319.1A Active CN109901246B (en) | 2019-03-07 | 2019-03-07 | Multifunctional polarization adjusting component based on three-dimensional composite structure unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109901246B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110456426B (en) * | 2019-07-31 | 2021-01-15 | 天津大学 | Metamaterial dual-function terahertz wave plate with sub-wavelength dielectric column array structure |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105161857A (en) * | 2015-08-03 | 2015-12-16 | 欧阳征标 | Meta-material film for left-hand circular polarization conversion |
| CN105242341A (en) * | 2015-11-05 | 2016-01-13 | 苏州大学 | Super surface quarter wave plate based on surface plasmon polariton |
| CN106842375A (en) * | 2017-01-25 | 2017-06-13 | 南京大学 | Three-dimensional metamaterial for showing and encoding for multi-frequency two-value and preparation method thereof |
-
2019
- 2019-03-07 CN CN201910170319.1A patent/CN109901246B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105161857A (en) * | 2015-08-03 | 2015-12-16 | 欧阳征标 | Meta-material film for left-hand circular polarization conversion |
| CN105242341A (en) * | 2015-11-05 | 2016-01-13 | 苏州大学 | Super surface quarter wave plate based on surface plasmon polariton |
| CN106842375A (en) * | 2017-01-25 | 2017-06-13 | 南京大学 | Three-dimensional metamaterial for showing and encoding for multi-frequency two-value and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 《Controlling the Polarization State of Light with a Dispersion-Free Metastructure》;Shang-Chi Jiang, Xiang Xiong，et al;《PHYSICAL REVIEW X》;20140515;正文摘要 * |
| 《Tailoring the Dispersion of Plasmonic Nanorods To RealizeBroadband Optical Meta-Waveplates》;Yang Zhao and Andrea Alù*;《NANO LETTERS》;20130205;正文第2页第1段—第4页第3段 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109901246A (en) | 2019-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Kwon et al. | Nonlocal metasurfaces for optical signal processing | |
| WO2020073303A1 (en) | Medium super-surface-based polarization generator and design method therefor | |
| CN110335533B (en) | Optical information hiding method based on super-surface array structure | |
| CN108490603B (en) | Method for generating vector light beam based on transmission type medium metasurface | |
| JP2022519015A (en) | Linear polarization conversion element, manufacturing method and linear polarization conversion system | |
| US7718326B2 (en) | Seamless stitching of patterns formed by interference lithography | |
| CN110426783A (en) | A kind of multi-functional super surface based on micro-nano half-wave plate | |
| KR102129858B1 (en) | Diffractive optical element, manufacturing method thereof and optical device having the same | |
| CN1932565A (en) | Active optical phase conjugating method and apparatus | |
| Miao et al. | Low-profile 2-D THz Airy beam generator using the phase-only reflective metasurface | |
| CN110780366A (en) | Optical super-surface focusing imaging element resistant to temperature interference and method thereof | |
| CN110568540B (en) | Micro-nano wave plate array with double-image display function and construction method thereof | |
| CN112596232A (en) | Infrared light field imaging device based on polarization-independent lens and preparation method | |
| CN113671719A (en) | Super-structure lens array device | |
| CN109901246B (en) | Multifunctional polarization adjusting component based on three-dimensional composite structure unit | |
| CN110568557A (en) | Information multiplexing method based on polarization control | |
| CN107728236B (en) | The manufacturing method of super structure surface element and its method for generating nanoscale longitudinal direction hot spot chain | |
| CN110927993B (en) | Depolarizer based on all-medium super-surface structure | |
| CN110531458B (en) | Super surface capable of realizing nonreciprocal function | |
| CN200962160Y (en) | Imaging device based on active optical phase conjugation | |
| CN113378372A (en) | Design method of terahertz vortex processor, product obtained by design method and application of product | |
| TWI785237B (en) | Compact alpha-bbo acousto-optic deflector with high resolving power for uv and visible radiation | |
| CN105700073B (en) | A kind of surface phasmon unidirectional couplings and beam splitting device and preparation method | |
| US7256937B2 (en) | Structured polarizer and method for making the same | |
| CN110568527B (en) | Resonance type SOI super surface and application thereof in nano printing technology |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |