CN109791901A - Stripping off device and stripping means - Google Patents
Stripping off device and stripping means Download PDFInfo
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- CN109791901A CN109791901A CN201780060393.7A CN201780060393A CN109791901A CN 109791901 A CN109791901 A CN 109791901A CN 201780060393 A CN201780060393 A CN 201780060393A CN 109791901 A CN109791901 A CN 109791901A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Abstract
A kind of stripping off device (10), stripping off device (10) is for removing glass substrate (40) and flexible base board (20), glass substrate (40) and flexible base board (20) are bonded by light absorbing layer (30), light absorbing layer (30) cohesive force under the irradiation of laser reduces, and stripping off device (10) includes laser (11) and roller (12).Laser (11) is for emitting laser, so that side where flexible base board (20) of the laser from glass substrate (40) and irradiating light absorbing layer (30) from the side of light absorbing layer (30).Roller (12) can be in conjunction with the edge of flexible base board (20), and rotation and movement remove flexible base board (20) from glass substrate (40) to roll flexible base board (20).Also disclose a kind of stripping means.
Description
The present invention relates to display screen technology field, in particular to a kind of stripping off device and stripping means.
In the manufacturing process of flexible base board, in order to which flexible base board is removed from glass substrate, the interface of flexible base board and glass substrate is irradiated to after so that laser is passed through glass substrate, further remove flexible base board, however, it might have scratch or dust etc. on glass substrate, influence laser across glass substrate, the yields of the flexible base board of removing is caused to reduce.
Summary of the invention
Embodiments of the present invention provide a kind of stripping off device and stripping means.
The stripping off device of embodiment of the present invention is bonded for removing glass substrate and flexible base board, the glass substrate and the flexible base board by light absorbing layer, and light absorbing layer cohesive force under the irradiation of laser reduces, and the stripping off device includes:
Laser, the laser is for emitting laser, so that side where the flexible base board of the laser from the glass substrate and irradiating the light absorbing layer from the side of the light absorbing layer；With
Roller, the roller can be in conjunction with the edge of the flexible base board, and rotation and movement remove the flexible base board from the glass substrate to roll the flexible base board.
In some embodiments, the roller is connect by way of viscose glue with the flexible base board；Or
The roller is connect by way of absorption with the flexible base board.
In some embodiments, the roller can be moved relative to the glass substrate along the thickness direction of the flexible base board in rotation；And/or
The roller can be moved relative to the glass substrate along the direction of the thickness perpendicular to the flexible base board in rotation.
In some embodiments, the stripping off device further includes bracket, the bracket includes that roller erects guide rail, the roller is movably connected in the roller and erects on guide rail, the roller can be erected in the roller and be moved on guide rail, so that thickness direction of the roller relative to the glass substrate along the flexible base board moves.
In some embodiments, the stripping off device further includes bracket, the bracket includes roller cross rail, the roller is movably connected on the roller cross rail, the roller can move on the roller cross rail, so that the roller is moved relative to the glass substrate along the direction of the thickness perpendicular to the flexible base board.
In some embodiments, the stripping off device further includes bracket, and on the bracket, the laser can adjust the direction of the launch of laser relative to the holder pivots for the laser installation,
The laser can be moved relative to the glass substrate along the thickness direction of the flexible base board in rotation；And/or
The laser can be moved relative to the glass substrate along the direction of the thickness perpendicular to the flexible base board in rotation.
In some embodiments, the bracket includes that laser erects guide rail, the laser activity is connected to the laser and erects on guide rail, the laser can be erected in the laser and be moved on guide rail, so that thickness direction of the laser relative to the glass substrate along the flexible base board moves, to change the direction of the launch of laser.
In some embodiments, the bracket includes laser cross rail, the laser activity is connected on the laser cross rail, the laser can move on the laser cross rail, so that the laser is moved relative to the glass substrate along the direction of the thickness perpendicular to the flexible base board, to change the direction of the launch of laser.
In some embodiments, the stripping off device further includes mounting platform, and the glass substrate is fixed on the mounting platform.
In some embodiments, the mounting platform offers fixing groove, and the glass substrate covers the fixing groove, negative pressure is capable of forming in the fixing groove, so that the glass substrate is fixed under the action of negative pressure on the mounting platform.
The stripping means of embodiment of the present invention is bonded for removing glass substrate and flexible base board, the glass substrate and the flexible base board by light absorbing layer, and light absorbing layer cohesive force under the irradiation of laser reduces, and the stripping means includes:
Emit laser so that side where the flexible base board of the laser from the glass substrate and irradiating the light absorbing layer from the side of the light absorbing layer；With
The edge of rotation and the mobile flexible base board, removes the flexible base board from the glass substrate to roll the flexible base board.
In the stripping off device and stripping means of embodiment of the present invention, laser can irradiate the side of light absorbing layer from the flexible base board side of glass substrate, laser can irradiate light absorbing layer without pass through glass substrate, influence of the defect to laser of glass substrate is avoided, and then improves the yields of flexible base board.
The additional aspect and advantage of embodiments of the present invention will be set forth in part in the description, and partially will become apparent from the description below, or the practice of embodiment through the invention is recognized.
Above-mentioned and/or additional aspect and advantage of the invention will be apparent and be readily appreciated that in the description from combination following accompanying drawings to embodiment, in which:
Fig. 1 is the stereoscopic schematic diagram of the stripping off device working condition of embodiment of the present invention；
Fig. 2 is the status diagram of stripping off device the removing flexible base board and glass substrate of embodiment of the present invention；
Fig. 3 is the roller of embodiment of the present invention and the combination schematic diagram of flexible base board；
Fig. 4 is the roller of embodiment of the present invention and the combination schematic diagram of flexible base board；
Fig. 5 is the status diagram of stripping off device the removing flexible base board and glass substrate of embodiment of the present invention；
Fig. 6 is the stereoscopic schematic diagram of the stripping off device of embodiment of the present invention；
Fig. 7 is the cooperation schematic diagram that the roller of embodiment of the present invention, roller cross rail and roller erect guide rail；
Fig. 8 is that roller, roller cross rail and the roller in Fig. 7 erect guide rail along the schematic cross-section of VIII-VIII line；
Fig. 9 is the status diagram of stripping off device the removing flexible base board and glass substrate of embodiment of the present invention；
Figure 10 is the flow diagram of the stripping means of embodiment of the present invention.
Main element symbol Detailed description of the invention:
Stripping off device 10, laser 11, roller 12, shaft 121, cylinder 122, viscose glue 123, sucker 124, mounting platform 13, fixing groove 131, bracket 14, roller erect guide rail 141, the first guide groove 1411, the second guide groove 1412, roller cross rail 142, laser and erect guide rail 143, laser cross rail 144, flexible base board 20, light absorbing layer 30, glass substrate 40.
Embodiments of the present invention are described further below in conjunction with attached drawing.Same or similar label indicates same or similar element or element with the same or similar functions from beginning to end in attached drawing.
In addition, the embodiments of the present invention described with reference to the accompanying drawing are exemplary, embodiment for explaining only the invention, and be not considered as limiting the invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature can be that the first and second features directly contact or the first and second features are by intermediary mediate contact in the second feature " on " or " down ".It is directly above or diagonally above the second feature moreover, fisrt feature can be fisrt feature above the second feature " above ", " above " and " above ", or is merely representative of first feature horizontal height higher than second feature.Fisrt feature can be fisrt feature under the second feature " below ", " below " and " below " and be directly under or diagonally below the second feature, or be merely representative of first feature horizontal height less than second feature.
Please refer to Fig. 1 and Fig. 6, the stripping off device 10 of embodiment of the present invention from glass substrate 40 for stripping down flexible base board 20, glass substrate 40 and flexible base board 20 are bonded by light absorbing layer 30, the cohesive force under the irradiation of laser of light absorbing layer 30 reduces, and stripping off device 10 includes laser 11 and roller 12.Laser 11 is for emitting laser, so that laser irradiates light absorbing layer 30 from the side at 20 place of flexible base board of glass substrate 40 and from the side of light absorbing layer 30.Roller 12 can be in conjunction with the edge of flexible base board 20, and rotation and movement remove flexible base board 20 from glass substrate 40 to roll flexible base board 20.
In the stripping off device 10 of embodiment of the present invention, laser can be from the side of the side irradiation light absorbing layer 30 at 20 place of flexible base board of glass substrate 40, laser can irradiate light absorbing layer 30 without pass through glass substrate 40, influence of the defect to laser of glass substrate 40 is avoided, and then improves the yields of flexible base board 20.
Flexible base board 20 can be OLED screen; flexible base board 20 generally requires one layer of flexible substrate of manufacture on glass substrate 40; and prepare device layer, protective layer etc. on flexible substrates to form flexible base board 20, it then needs to strip down flexible base board 20 from glass substrate 40.In the manufacturing process of flexible base board 20, in order to guarantee preferably to be combined between flexible base board 20 and glass substrate 40, when bonding flexible base board 20 and glass substrate 40 using light absorbing layer 30, the spreading area of light absorbing layer 30 needs to cover the area of flexible base board 20, and the spreading area of light absorbing layer 30 needs the area more than or equal to flexible base board 20 in other words.
Specifically, incorporated by reference to Fig. 2, when needing to remove flexible base board 20 and glass substrate 40, by roller 12 in conjunction with the edge of flexible base board 20 (a state of such as Fig. 2), the side of the transmitting laser irradiation light absorbing layer 30 of laser 11, that is laser does not pass through injury of the flexible base board 20 to avoid laser to the device layer in flexible base board 20, and laser does not pass through influence of the glass substrate 40 to avoid the defect of glass to the laser being radiated on light absorbing layer 30 yet.Laser direct irradiation is in light absorbing layer 30, so that the cohesive force of light absorbing layer 30 reduces.When rotation and traveling roller 12 (the b state of such as Fig. 2), under the action of the binding force of roller 12 and flexible base board 20, the edge of flexible base board 20 is separated with glass substrate 40, and expose the light absorbing layer 30 not being irradiated with a laser, laser irradiates the light absorbing layer 30 newly exposed again so that its cohesive force reduces, roller 12 further can be rotated or be moved to draw flexible base board 20 with glass substrate 40 and be gradually disengaged, and strip down flexible base board 20 from glass substrate 40 completely.
In stripping process, light absorbing layer 30 can be combined with flexible base board 20 and be stripped down from glass substrate 40 together, light absorbing layer 30 is also possible to bond with glass substrate 40 and gradually separate with flexible base board 20 always, light absorbing layer 30 can also be that a part is retained on glass substrate 40, and a part is bonded on flexible base board 20.After flexible base board 20 is removed from glass substrate 40, the light absorbing layer 30 remained on flexible base board 20 will not influence subsequent processing operations and the use of flexible base board 20, can form protective layer on flexible base board 20 further to wrap up light absorbing layer 30.
It is appreciated that binding force when roller 12 is combined with flexible base board 20 needs to be greater than the cohesive force of the light absorbing layer 30 after being irradiated with a laser, so that flexible base board 20 is gradually separated with glass substrate 40 under the traction of roller 12.And when needing separation barrel 12 and flexible base board 20, the binding force between roller 12 and flexible base board 20 is easy to cancel to guarantee that flexible base board 20 will not be damaged.
Please refer to Fig. 3 in some embodiments, roller 12 is connect by way of viscose glue 123 with flexible base board 20.Roller 12 and the combination of flexible base board 20 are simple, and the structure of stripping off device 10 is simple.
Specifically, roller 12 includes shaft 121, cylinder 122 and viscose glue 123.Shaft 121 is fixedly connected with cylinder 122, and shaft 121 can rotate and move to drive the rotation of cylinder 122 and movement, and cylinder 122 can be coated in the outer surface of cylinder 122 with the shapes such as cylindrical, viscose glue 123.When needing to combine roller 12 and flexible base board 20, for mobile shaft 121 so that cylinder 122 close to flexible base board 20, and contacts viscose glue 123 with flexible base board 20, viscose glue 123 combines cylinder 122 and flexible base board 20.Viscose glue 123 can be coated in the entire outer surface of cylinder 122, can also be coated in the specific position of the outer surface of cylinder 122, be not limited thereto.
Referring to Fig. 4, in some embodiments, roller 12 can also be connect by way of absorption with flexible base board 20.The binding force size of roller 12 and flexible base board 20 is easy to control and is easy to cancel.
Specifically, roller 12 includes shaft 121, cylinder 122 and sucker 124.Shaft 121 is fixedly connected with cylinder 122, and shaft 121 can be rotated and be moved to drive the rotation of cylinder 122 and movement, cylinder 122 that can be arranged in the outer surface of cylinder 122 with the shapes such as cylindrical, sucker 124.Sucker 124 connects a vacuum pump by the aperture being provided on 122 side wall of cylinder, and vacuum pump can extract the air in sucker 124 so as to form negative pressure in sucker 124 after opening.When needing to combine roller 12 and flexible base board 20, vacuum pump is opened and mobile shaft 121 so that sucker 124 is close to flexible base board 20, until flexible base board 20 is adsorbed by sucker 124.The adjustable sucker 124 of power by adjusting vacuum pump closes vacuum pump then when needing separation barrel 12 and flexible base board 20 to the size of the adsorption capacity of flexible base board 20 to cancel sucker 124 to the adsorption capacity of flexible base board 20.
Referring to Fig. 5, in some embodiments, roller 12 can be mobile along the thickness direction (the direction D1 in such as Fig. 5) of flexible base board 20 relative to glass substrate 40 in rotation.
It is understood that, flexible base board 20 is when being bent, flexible base board 20 has restorable trend, in embodiments of the present invention, after roller 12 is combined with flexible base board 20, roller 12 rotates so that originally in the winding of flat flexible base board 20 on roller 12, flexible base board 20 bends and flexible base board 20 can generate and be restored back to flat stress, stress is increased with flexible base board 20 by the increase of bending degree, when stress is gradually increased, flexible base board 20 may be detached from roller 12 and cause roller 12 that cannot draw flexible base board 20 and move.Especially when the size of flexible base board 20 is larger, during removing flexible base board 20, the stress that flexible base board 20 is accumulated is larger, it is easier to so that flexible base board 20 and roller 12 are detached from.
Since roller 12 can also move while rotation along direction D1, to increase the distance of roller 12 and glass substrate 40, so that the partially flexible substrate 20 removed from glass substrate 40 does not need to bend, therefore the stress in flexible base board 20 is reduced, flexible base board 20 and roller 12 is avoided to be detached from.
Referring again to Fig. 5, in some embodiments, roller 12 can be mobile along the direction (the direction D2 in such as Fig. 5) of the thickness perpendicular to flexible base board 20 relative to glass substrate 40 in rotation.
Since roller 12 can also move while rotation along direction D2, so that the partially flexible substrate 20 removed from glass substrate 40 does not need to bend, therefore restorable stress in flexible base board 20 is reduced, flexible base board 20 and roller 12 is avoided to be detached from.
Roller 12 in rotation can individually along direction, D1 is moved, can also individually along direction, D2 is moved, can also be moved simultaneously along the direction D1 and the direction D2, to increase the mobile freedom degree of roller 12.In one embodiment, roller 12 first rotates predetermined angular, such as rotation 360 degree or 180 degree, so that the first part winding of flexible base board 20 is on roller 12, the combination of roller 12 and flexible base board 20 is more abundant, flexible base board 20 is not easy to be detached from roller 12, then roller 12 is moved along direction D1 or direction D2.In another embodiment, after roller 12 is combined close to flexible base board 20 and with flexible base board 20,
Roller 12 can be moved first along direction D1 or direction D2, be rotated further by roller 12 to roll flexible base board 20.Certainly, it does not interact between the rotation and movement of roller 12, user can rotate according to needing to control roller 12 at any time or movement.
Incorporated by reference to Fig. 1 and Fig. 6, in some embodiments, stripping off device 10 further includes mounting platform 13, and glass substrate 40 is fixed on mounting platform 13.
It is appreciated that needing to keep glass substrate 40 static, so that flexible base board 20 can be separated with glass substrate 40 when rolling flexible base board 20 during removing flexible base board 20 and glass substrate 40.
Specifically, referring again to Fig. 1 and Fig. 6, in some embodiments, mounting platform 13 offers fixing groove 131, glass substrate 40 covers fixing groove 131, negative pressure is capable of forming in fixing groove 131, so that glass substrate 40 is fixedly mounted under the action of negative pressure on mounting platform 13.
When needing fixed glass substrate 40, first glass substrate 40 can be placed on mounting platform 13 and cover fixing groove 131, the air in fixing groove 131 is then aspirated by vacuum pump, forms negative pressure in fixing groove 131, glass substrate 40 is attracted on mounting platform 13.When needing to remove glass substrate 40 from mounting platform 13, vacuum pump can be closed and fixing groove 131 is communicated with the atmosphere, after the disappearance of negative pressure in fixing groove 131, then glass substrate 40 removed.
Incorporated by reference to Fig. 1 and Fig. 6, in some embodiments, stripping off device 10 further includes bracket 14, bracket 14 includes that roller erects guide rail 141, roller 12 is movably connected in roller and erects on guide rail 141, roller 12 can be erected in roller and be moved on guide rail 141, so that thickness direction of the roller 12 relative to glass substrate 40 along flexible base board 20 moves.
Under the guide function that roller erects guide rail 141, roller 12 can be moved along the thickness direction of flexible base board 20 and the moving direction of roller 12 is easy to control.In embodiments of the present invention, roller erects the two sides that roller 12 is arranged in guide rail 141, so that the movement of roller 12 is more stable.Certainly, roller erects the side that guide rail 141 can also be positioned only at roller 12, is not limited thereto.
Referring again to Fig. 1 and Fig. 6, in some embodiments, bracket 14 further includes roller cross rail 142, roller 12 is movably connected on roller cross rail 142, roller 12 can move on roller cross rail 142, so that roller 12 is moved relative to glass substrate 40 along the direction of the thickness perpendicular to flexible base board 20.
Under the guide function of roller cross rail 142, roller 12 can be moved along the thickness direction perpendicular to flexible base board 20, and the moving direction of roller 12 is easy to control.Incorporated by reference to Fig. 7 and Fig. 8, in one example, roller erects and offers the first guide groove 1411 on guide rail 141, first guide groove 1411 is through slot, roller cross rail 142 wears the first guide groove 1411, roller erects guide rail 141 can be (as shown in Figure 8) mobile along Y-direction relative to roller cross rail 142, it will be understood that wherein Y-direction is consistent with the direction D2 in Fig. 5.Roller erects guide rail 141 and is also provided with the second guide groove 1412, the end of the shaft 121 of roller 12 is embedded in the second guide groove 1412, shaft 121 can opposing roller erect guide rail along Z-direction it is (as shown in Figure 7) move, it will be understood that wherein Z-direction is consistent with the direction D1 in Fig. 5.When the needs of roller 12 are moved along the thickness direction of flexible base board 20, guide rail 141 (namely along Z-direction) movement can be erected along roller by the drive shafts such as motor, hydraulic cylinder 121, that is, roller 12 is moved along the thickness direction of flexible base board 20.Roller 12 need along moved perpendicular to the thickness direction of flexible base board 20 when, roller can be driven to erect guide rail 141 along roller cross rail 142 (namely along Y by motor, hydraulic cylinder etc.
Direction) it is mobile, that is, roller 12 is driven to move along the thickness direction perpendicular to flexible base board 20.Further, shaft 121 can be driven by a motor rotation, and motor also can be set in the second guide groove 1412, and when the needs of roller 12 are moved along Z-direction, motor and shaft 121 are jointly mobile relative to the second guide groove 1412；When the needs of roller 12 are moved along Y-direction, it is jointly mobile relative to the first guide groove 1411 that roller erects guide rail 141, motor and shaft 121.
Referring again to Fig. 1 and Fig. 6, in some embodiments, stripping off device 10 further includes bracket 14, laser 11 is installed on the support 14, laser 11 can be rotated relative to bracket 14 to adjust the direction of the launch of laser, and laser 11 can be moved relative to glass substrate 40 along the thickness direction of flexible base board 20 in rotation.
In some embodiments, laser 11 can also be moved relative to glass substrate 40 along the direction of the thickness perpendicular to flexible base board 20 while rotation.
That is, laser 11 can be rotated, moves along the thickness direction of flexible base board 20 and be moved along the direction of the thickness perpendicular to flexible base board 20 to adjust the direction of the launch of laser 11.In actual use, as flexible base board 20 is gradually rolled, the position of the newest light absorbing layer 30 exposed also can constantly change, at this time, the direction of the launch of adjustable laser 11, and adjust laser 11 and need at a distance from illuminated light absorbing layer 30, so that the intensity for the laser being irradiated on light absorbing layer 30 is in suitable range, and the intensity of the laser of the transmitting of laser 11 can be constant, saves energy consumption.Such as on the thickness direction perpendicular to flexible base board 20, laser 11 can follow the movement of roller 12 and move, and keep the distance of laser 11 and the newest light absorbing layer 30 exposed constant.
Referring again to Fig. 1 and Fig. 6, in some embodiments, bracket 14 includes that laser erects guide rail 143, laser 11 is movably connected in laser and erects on guide rail 143, laser 11 can be erected in laser and be moved on guide rail 143, so that thickness direction of the laser 11 relative to glass substrate 40 along flexible base board 20 moves, to change the direction of the launch of laser.
In some embodiments, bracket 14 includes laser cross rail 144, laser 11 is movably connected on laser cross rail 144, laser 11 can move on laser cross rail 144, so that laser 11 is moved relative to glass substrate 40 along the direction of the thickness perpendicular to flexible base board 20, to change the direction of the launch of laser.
Under the guide function that laser erects guide rail 143 and laser cross rail 144, laser 11 can be moved along the thickness direction of flexible base board 20 and perpendicular to the thickness direction of flexible base board 20, can neatly adjust the direction of the launch of laser 11 and at a distance from light absorbing layer 30.In embodiments of the present invention, laser erects guide rail 143 and laser cross rail 144 is arranged at the two sides of laser 11, so that the movement of laser 11 is more stable.
Laser erects guide rail 143 and can be same guide rail with the perpendicular guide rail 141 of roller, or is different guide rail, and similarly, laser cross rail 144 and roller cross rail 142 are also possible to same guide rail, or are different guide rail.In embodiments of the present invention, it is same guide rail that laser, which erects guide rail 143 and erects guide rail 141 with roller, and laser cross rail 144 is different guide rails from roller cross rail 142.
Laser 11 and laser erect the connection and the kind of drive that guide rail 143, laser 11 and roller erect the connection of guide rail 141 and the kind of drive can use above-mentioned roller 12 and roller to erect guide rail 141, roller 12 and roller cross rail 142, can also
In a manner of using others and make adaptive change, details are not described herein.
Please refer to Fig. 9, in some embodiments, laser 11 can also remain stationary, laser 11 irradiates light absorbing layer 30 from the side of light absorbing layer 30, as flexible base board 20 is gradually rolled, the light absorbing layer 30 newly exposed increases at a distance from laser light source, and adjustable laser 11 emits the intensity of laser at this time, to guarantee that laser is enough to make the cohesive force of light absorbing layer 30 to reduce the radiation of light absorbing layer 30.
Incorporated by reference to Figure 10, invention additionally discloses a kind of stripping means, and for stripping down flexible base board 20 from glass substrate 40, glass substrate 40 and flexible base board 20 are bonded by light absorbing layer 30, and the cohesive force under the irradiation of laser of light absorbing layer 30 reduces.Stripping means comprising steps of
S1: transmitting laser is so that laser irradiates light absorbing layer 30 from the side at 20 place of flexible base board of glass substrate 40 and from the side of light absorbing layer 30；With
S2: the edge of rotation and mobile flexible base board 20 removes flexible base board 20 from glass substrate 40 to roll flexible base board 20.
The stripping means of embodiment of the present invention, laser can be from the side of the side irradiation light absorbing layer 30 at 20 place of flexible base board of glass substrate 40, laser can irradiate light absorbing layer 30 without pass through glass substrate 40, influence of the defect to laser of glass substrate 40 is avoided, and then improves the yields of flexible base board 20.
In the description of this specification, the description of reference term " certain embodiments ", " embodiment ", " some embodiments ", " example ", " specific example " or " some examples " etc. means that particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are included at least one embodiment or example of the invention.In the present specification, the schematic representation of the above terms does not necessarily have to refer to the same embodiment or example.Moreover, particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more of the embodiments or examples.In addition, without conflicting with each other, the feature of different embodiments or examples described in this specification and different embodiments or examples can be combined by those skilled in the art.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicate the quantity of indicated technical characteristic." first " is defined as a result, the feature of " second " can explicitly or implicitly include at least one described feature.In the description of the present invention, the meaning of " plurality " is at least two, such as two, three, unless otherwise specifically defined.
Although the embodiments of the present invention has been shown and described above, it can be understood that, above-described embodiment is exemplary, it is not considered as limiting the invention, those skilled in the art can make changes, modifications, alterations, and variations to the above described embodiments within the scope of the invention, and the scope of the present invention is defined by the claims and their equivalents.
Claims (11)
- A kind of stripping off device, for removing glass substrate and flexible base board, the glass substrate and the flexible base board pass through light absorbing layer and bond, and light absorbing layer cohesive force under the irradiation of laser reduces, which is characterized in that the stripping off device includes:Laser, the laser is for emitting laser, so that side where the flexible base board of the laser from the glass substrate and irradiating the light absorbing layer from the side of the light absorbing layer；WithRoller, the roller can be in conjunction with the edge of the flexible base board, and rotation and movement remove the flexible base board from the glass substrate to roll the flexible base board.
- Stripping off device according to claim 1, which is characterized in that the roller is connect by way of viscose glue with the flexible base board；OrThe roller is connect by way of absorption with the flexible base board.
- Stripping off device according to claim 1, which is characterized in that the roller can be moved relative to the glass substrate along the thickness direction of the flexible base board in rotation；And/orThe roller can be moved relative to the glass substrate along the direction of the thickness perpendicular to the flexible base board in rotation.
- Stripping off device according to claim 1 to 3, it is characterized in that, the stripping off device further includes bracket, the bracket includes that roller erects guide rail, the roller is movably connected in the roller and erects on guide rail, the roller can be erected in the roller and be moved on guide rail, so that thickness direction of the roller relative to the glass substrate along the flexible base board moves.
- Stripping off device according to claim 1 to 3, it is characterized in that, the stripping off device further includes bracket, the bracket includes roller cross rail, the roller is movably connected on the roller cross rail, the roller can move on the roller cross rail, so that the roller is moved relative to the glass substrate along the direction of the thickness perpendicular to the flexible base board.
- Stripping off device according to claim 1 to 3, which is characterized in that the stripping off device further includes bracket, and on the bracket, the laser can adjust the direction of the launch of laser relative to the holder pivots for the laser installation,The laser can be moved relative to the glass substrate along the thickness direction of the flexible base board in rotation；And/orThe laser can be moved relative to the glass substrate along the direction of the thickness perpendicular to the flexible base board in rotation.
- Stripping off device according to claim 6, it is characterized in that, the bracket includes that laser erects guide rail, the laser activity is connected to the laser and erects on guide rail, the laser can be erected in the laser and be moved on guide rail, so that thickness direction of the laser relative to the glass substrate along the flexible base board moves, to change the direction of the launch of laser.
- Stripping off device according to claim 6, it is characterized in that, the bracket includes laser cross rail, the laser activity is connected on the laser cross rail, the laser can move on the laser cross rail, so that the laser is moved relative to the glass substrate along the direction of the thickness perpendicular to the flexible base board, to change the direction of the launch of laser.
- Stripping off device according to claim 1 to 3, which is characterized in that the stripping off device further includes mounting platform, and the glass substrate is fixed on the mounting platform.
- Stripping off device according to claim 1 to 3, it is characterized in that, the mounting platform offers fixing groove, the glass substrate covers the fixing groove, it is capable of forming negative pressure in the fixing groove, so that the glass substrate is fixed under the action of negative pressure on the mounting platform.
- A kind of stripping means, for removing glass substrate and flexible base board, the glass substrate and the flexible base board pass through light absorbing layer and bond, and light absorbing layer cohesive force under the irradiation of laser reduces, which is characterized in that the stripping means includes:Emit laser so that side where the flexible base board of the laser from the glass substrate and irradiating the light absorbing layer from the side of the light absorbing layer；WithThe edge of rotation and the mobile flexible base board, removes the flexible base board from the glass substrate to roll the flexible base board.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2017/094744 WO2019019114A1 (en) | 2017-07-27 | 2017-07-27 | Peeling device and peeling method |
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| Publication Number | Publication Date |
|---|---|
| CN109791901A true CN109791901A (en) | 2019-05-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780060393.7A Pending CN109791901A (en) | 2017-07-27 | 2017-07-27 | Stripping off device and stripping means |
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| CN (1) | CN109791901A (en) |
| WO (1) | WO2019019114A1 (en) |
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| CN112103404A (en) * | 2020-09-21 | 2020-12-18 | 福建华佳彩有限公司 | Flexible OLED device and manufacturing method thereof |
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| CN104347449A (en) * | 2013-07-24 | 2015-02-11 | 上海和辉光电有限公司 | Peeling apparatus and peeling method |
| CN105374728A (en) * | 2014-08-08 | 2016-03-02 | 日东电工株式会社 | Method and apparatus for separating adhesive tapes |
| CN106783688A (en) * | 2016-12-28 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of stripping off device and its stripping means |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101857288B1 (en) * | 2011-08-26 | 2018-05-14 | 삼성디스플레이 주식회사 | Methods and apparatus for peeling a donor film from a substrate |
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- 2017-07-27 WO PCT/CN2017/094744 patent/WO2019019114A1/en active Application Filing
- 2017-07-27 CN CN201780060393.7A patent/CN109791901A/en active Pending
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| KR20110060265A (en) * | 2009-11-30 | 2011-06-08 | 동우 화인켐 주식회사 | Method for peeling a polarizing plate from a liquid crystal cell |
| CN104347449A (en) * | 2013-07-24 | 2015-02-11 | 上海和辉光电有限公司 | Peeling apparatus and peeling method |
| CN103560101A (en) * | 2013-11-11 | 2014-02-05 | 京东方科技集团股份有限公司 | Flexible device stripping device |
| CN105374728A (en) * | 2014-08-08 | 2016-03-02 | 日东电工株式会社 | Method and apparatus for separating adhesive tapes |
| CN106783688A (en) * | 2016-12-28 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of stripping off device and its stripping means |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112103404A (en) * | 2020-09-21 | 2020-12-18 | 福建华佳彩有限公司 | Flexible OLED device and manufacturing method thereof |
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| WO2019019114A1 (en) | 2019-01-31 |
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