CN109786582B - Mask plate, display backboard, display panel and display device - Google Patents

Mask plate, display backboard, display panel and display device Download PDF

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Publication number
CN109786582B
CN109786582B CN201910175401.3A CN201910175401A CN109786582B CN 109786582 B CN109786582 B CN 109786582B CN 201910175401 A CN201910175401 A CN 201910175401A CN 109786582 B CN109786582 B CN 109786582B
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China
Prior art keywords
area
region
opening
shielding
display
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CN201910175401.3A
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Chinese (zh)
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CN109786582A (en
Inventor
杜森
吴建鹏
嵇凤丽
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN201910175401.3A priority Critical patent/CN109786582B/en
Publication of CN109786582A publication Critical patent/CN109786582A/en
Priority to PCT/CN2020/076380 priority patent/WO2020181980A1/en
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Publication of CN109786582B publication Critical patent/CN109786582B/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/82Interconnections, e.g. terminals

Abstract

The application provides a mask plate, a display backboard, a display panel and a display device, wherein the mask plate is used for film evaporation of the display backboard and comprises a first area and a second area; the position of the first region corresponds to the position of the first pixel density region of the display backboard; the position of the second region corresponds to the position of the second pixel density region of the display backboard; the pixel density of the first pixel density area is larger than that of the second pixel density area, the second area comprises a shielding area and an opening area, and the position of the shielding area is arranged corresponding to the position where the vapor deposition film layer is not needed. When the mask plate provided by the embodiment of the application is used for film evaporation, a film with a thinner film thickness can be evaporated in a region with a lower pixel density, so that the light transmittance of the local position of a display area can be improved, and the characteristics and visual experience of a full-face screen product are improved.

Description

Mask plate, display backboard, display panel and display device
Technical Field
The application relates to the technical field of display, in particular to a mask plate, a display backboard, a display panel and a display device.
Background
The comprehensive screen mobile phone pursues visual extreme experience, but is limited by the arrangement of the camera and the infrared sensor, so that the development of the comprehensive screen mobile phone has some technical problems so far, such as normal display of the position of the infrared sensor in the display area of the comprehensive screen, so that the position of the infrared sensor is provided with vapor deposition material, the light transmittance of the vapor deposition material can be reduced, and particularly the influence of cathode material on the light transmittance is great, so that the normal operation of the infrared sensor can be influenced.
In summary, the light transmittance at the position of the infrared sensor of the current full-screen mobile phone is low, and the visual experience effect of the user is poor.
Disclosure of Invention
Therefore, the application aims to provide a peep-proof film, a manufacturing method thereof and a display module, which are used for improving the light transmittance of a local position of a full screen and improving the product characteristics and visual experience.
In order to achieve the above object, the present application provides the following technical solutions:
In a first aspect, a mask is provided, and the mask is used for film evaporation of a display backboard, and comprises a first area and a second area;
the first area is overlapped with a first pixel density area of the display backboard in a orthographic projection area of the display backboard;
the second area is overlapped with a second pixel density area of the display backboard in a orthographic projection area of the display backboard;
the pixel density of the first pixel density area is greater than the pixel density of the second pixel density area;
the second area comprises a shielding area and an opening area, and the position of the shielding area is arranged corresponding to the position of the non-evaporated film layer.
Optionally, the first region is a fully open region.
Optionally, the display backboard includes a first functional area and a second functional area, the position of the first functional area corresponds to the setting position of the infrared sensor, and the position of the second functional area corresponds to the setting position of the camera;
the opening area comprises a first opening area and a second opening area, and the shielding area comprises a first shielding area and a second shielding area;
the position of the first shielding area corresponds to the position of the camera, and the position of the first opening area corresponds to the position of the infrared sensor.
Optionally, the second opening region comprises a number of second opening sub-regions extending along the first direction, the second shielding region comprises a number of second shielding sub-regions extending along the first direction;
In a second direction, the second opening subregions alternate with the second shielding subregions; the first direction and the second direction are arranged in a crossing manner.
Optionally, the opening area comprises a plurality of opening subareas, the shielding area comprises a first shielding area and a second shielding area, the position of the first shielding area corresponds to the position of the camera, and the second shielding area comprises a plurality of second shielding subareas;
The positions of the opening subareas correspond to the positions of the pixel areas, and the second shielding subareas are arranged between the adjacent opening subareas.
Optionally, the plurality of opening subregions are distributed according to a matrix arrangement mode, one row of the second shielding subregions is arranged between two adjacent rows of the opening subregions, and one column of the second shielding subregions is arranged between two adjacent columns of the opening subregions.
Optionally, the area of each of the opening sub-regions is larger than the area of the pixel region at the corresponding position.
Optionally, the shape of the opening subregion is square.
In a second aspect, a display backboard is provided, including a substrate base plate and an electrode layer located on the substrate base plate, where the electrode layer is formed by using the mask provided in the first aspect.
Optionally, the electrode layer includes a third region and a fourth region, the position of the third region corresponds to the position of the first region, and the position of the fourth region corresponds to the position of the second region;
The display backboard comprises a first functional area, and the position of the first functional area corresponds to the setting position of the infrared sensor;
The electrode layer at the position corresponding to the fourth region includes a first electrode layer and a second electrode layer, and the position of the first electrode layer corresponds to the position of the infrared sensor.
Optionally, the second electrode layer includes a plurality of second sub-electrode layers extending along the first direction, and in the second direction, the second sub-electrode layers are distributed between the layers.
Optionally, the second electrode layer includes a plurality of second sub-electrode layers arranged in a matrix, and positions of the second sub-electrode layers correspond to positions of the pixel regions.
Optionally, the display backboard further comprises an auxiliary electrode, and the auxiliary electrode is positioned on one side of the electrode layer close to the substrate;
the area of each second sub-electrode layer is larger than that of the pixel area at the corresponding position, and the adjacent second sub-electrode layers are conducted through the auxiliary electrodes.
In a third aspect, a display panel is provided, including the display back panel provided in the second aspect.
In a fourth aspect, a display device is provided, including a display panel provided on a third face.
Compared with the prior art, the scheme of the application has the following beneficial effects:
the mask plate provided by the embodiment of the application comprises a first area and a second area, wherein the first area is overlapped with a first pixel density area of a display backboard in a orthographic projection area of the display backboard; the second area is overlapped with the second pixel density area of the display backboard in the orthographic projection area of the display backboard; the pixel density of the first pixel density area is greater than that of the second pixel density area, and the second area comprises a shielding area and an opening area; compared with the prior art that the full-opening mask plate is used for film evaporation, the mask plate provided by the embodiment of the application comprises the second area comprising the shielding area and the opening area, and the position of the second area corresponds to the area with lower pixel density, so that when the mask plate provided by the embodiment of the application is used for film evaporation, a film with thinner film thickness can be evaporated in the area with lower pixel density, and therefore, the light transmittance of the local position of the display area can be improved, and the characteristics and visual experience of the whole screen product are improved.
Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application.
Drawings
The foregoing and/or additional aspects and advantages of the application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a schematic diagram of a prior art full screen handset;
fig. 2 is a schematic structural diagram of a first mask plate used in the prior art for performing film evaporation on a full-screen mobile phone;
fig. 3 is a schematic structural diagram of a second mask plate used in the prior art for performing film evaporation on a full-screen mobile phone;
Fig. 4 is a schematic structural diagram of a mask plate provided by the application;
FIG. 5 is a schematic structural diagram of another mask plate according to the present application;
FIG. 6 is an enlarged view of region 50 of FIG. 5;
FIG. 7 is another enlarged view of region 50 of FIG. 5;
FIG. 8 is an enlarged view of region 70 of FIG. 7;
FIG. 9 is a schematic diagram of a display back plate according to the present application;
fig. 10 is an enlarged view of a partial area of a display back plate provided by the application.
Reference numerals illustrate:
11-a low pixel density region; 12-a high pixel density region; 41-a first region; 42-a second region; 421-occlusion region; 422-an opening region; 50-a local area in the second area of the mask; 51-a first opening region; 53-a first occlusion region;
521-second opening subregions; 541-a second occlusion sub-area; 55-red subpixels; 56-green subpixels; 57-blue subpixels; 70-another local area in the second area of the mask plate; 71-an opening subregion; 72-a second occlusion sub-area; 73-pixel region;
91-electrode layer; 92-a third region; 93-fourth region; 94-regions of the electrode layer not evaporated; 95-auxiliary electrode.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the application.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless expressly stated otherwise, as understood by those skilled in the art. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. Further, "connected" as used herein may include wireless connections. The term "and/or" as used herein includes all or any element and all combination of one or more of the associated listed items.
It will be understood by those skilled in the art that all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs unless defined otherwise. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The inventor of the present application found that the problem of low light transmittance at the position of the infrared sensor of the full-screen mobile phone is solved at present, and the adopted method is to design different pixel densities in different areas on the display area of the display screen, as shown in fig. 1, that is, the upper part of the screen where the infrared sensor 13 is located is low pixel density, corresponding to the low pixel density area 11 in the figure, the main body of the display screen is high pixel density, corresponding to the high pixel density area 12 in the figure. In the low pixel density region 11, due to low pixel density, the mask plate has few openings and large spacing, and the low pixel density region 11 has less vapor deposition material, which is helpful for improving the light transmittance. The low pixel density region 11 also requires the same normal display time, power, signal strength, etc. as the high pixel density region 12.
The inventor of the present application found that, in the current method for realizing different pixel density designs in different areas, two masks are used to separately vapor-deposit a low pixel density area 11 and a high pixel density area 12, and cathode vapor deposition is used as an example, as shown in fig. 2, a first mask (the mask is a completely open mask) is used to vapor-deposit a layer of thinner cathode material in the low pixel density area 11, the high pixel density area 12 is blocked from vapor deposition while vapor deposition, after vapor deposition is completed, a second mask (the mask is a completely open mask) is replaced to vapor-deposit a layer of cathode material with normal thickness in the high pixel density area 12, as shown in fig. 3, the low pixel density area 11 is blocked from vapor deposition while vapor deposition is performed, so that the vapor deposition material in the low pixel density area 11 is thinner, and the light transmittance is higher.
The inventors of the present application found that since the cathode is a point evaporation source, shadow (shadow) is serious, and a large shadow is easily generated in the connection region between the low pixel density region 11 and the high pixel density region 12, for example: the shadow of the high pixel density area 12 covers several rows of pixels of the low pixel density area 11, and the shadow of the low pixel density area 11 covers several rows of pixels of the high pixel density area 12, resulting in abnormal film thicknesses of the low pixel density area 11 and the high pixel density area 12, thereby causing poor display.
In addition, the inventor of the present application found that the method of vapor deposition by using two masks separately cannot cover the area of the camera 14, and the requirement of alignment of the two masks is higher, which increases the cost, also prolongs the process time of vapor deposition, and reduces the productivity.
In order to solve the above problems, the embodiment of the application provides a new mask plate setting mode.
The following describes a specific technical scheme of an embodiment of the present application with reference to the accompanying drawings.
As shown in fig. 4, the mask provided by the embodiment of the application is used for film evaporation of a display backboard, and comprises a first area 41 and a second area 42; the first region 41 overlaps the first pixel density region of the display backplate in the orthographic projection region of the display backplate; the second region 42 overlaps the second pixel density region of the display backplane in the orthographic projection region of the display backplane; the pixel density of the first pixel density region is greater than that of the second pixel density region, and the second region 42 includes a shielding region 421 and an opening region 422, and the position of the shielding region 421 is set corresponding to the position where the vapor deposition film layer is not required.
Specifically, the mask plate in the embodiment of the application is a metal mask plate, and the film layer evaporated by the mask plate can be a cathode layer of the organic light-emitting display panel.
Specifically, when the mask plate and the display backboard are aligned, the orthographic projection area of the first area 41 on the display backboard is completely overlapped with the high pixel density area 12; the orthographic projection area of the second area 42 on the display back panel completely overlaps the low pixel density area 11, and the specific arrangement of the high pixel density area 12 and the low pixel density area 11 is similar to that of the prior art, and will not be repeated here.
In specific implementation, the position of the shielding area 421 may be set corresponding to the position of the camera.
The mask provided by the embodiment of the application comprises a first area 41 and a second area 42, wherein the first area 41 is overlapped with a first pixel density area of a display backboard in a front projection area of the display backboard; the second region 42 overlaps the second pixel density region of the display backplane in the orthographic projection region of the display backplane; the first pixel density region has a pixel density greater than that of the second pixel density region, and the second region 42 includes a shielding region 421 and an opening region 422; compared with the prior art that the full-open mask plate is adopted for film evaporation, the mask plate provided by the embodiment of the application comprises the second region 42 comprising the shielding region 421 and the opening region 422, and the position of the second region 42 corresponds to the region with lower pixel density, so that when the mask plate provided by the embodiment of the application is adopted for film evaporation, a film layer with thinner film layer thickness can be evaporated in the region with lower pixel density, the light transmittance of the local position of the display region can be improved, and the characteristics and visual experience of the whole screen product are improved.
Optionally, as shown in fig. 4, the first area 41 of the mask plate is a full open area, and the second area 42 includes a shielding area 421 and an open area 422, because the mask plate in the embodiment of the present application includes two different areas, compared with the prior art, when the mask plate in the embodiment of the present application is used for film evaporation, a shadow phenomenon does not occur in the areas with different pixel densities, and evaporation of the whole film can be completed by using one mask plate, so that the process time of evaporation is reduced, and further the productivity is improved. Of course, in actual design, the first area 41 may also be provided with a shielding area according to actual production requirements, and the embodiment of the present application is described only by taking the first area 41 as a completely open area as an example.
Optionally, the display backboard includes a first functional area and a second functional area, the position of the first functional area corresponds to the setting position of the infrared sensor, the position of the second functional area corresponds to the setting position of the camera, and the specific setting positions of the infrared sensor and the camera can be shown with reference to fig. 1; the opening region 422 includes a first opening region and a second opening region, and the shielding region 421 includes a first shielding region and a second shielding region; the position of the first shielding area corresponds to the position of the camera, and the position of the first opening area corresponds to the position of the infrared sensor. The specific arrangement of the first opening area, the second opening area, the first shielding area and the second shielding area will be described in detail below.
In some embodiments, as shown in fig. 5 and 6, fig. 6 is an enlarged view of region 50 in fig. 5, with open region 422 comprising first open region 51 and second open region, and with occlusion region 421 comprising first occlusion region 53 and second occlusion region; the second opening region comprises a number of second opening sub-regions 521 extending in the first direction (e.g. in the horizontal direction in the figure) and the second shielding region comprises a number of second shielding sub-regions 541 extending in the first direction; in the second direction (e.g., vertical direction in the drawing), the second opening subregions 521 alternate with the second barrier subregions 541; the first direction and the second direction are arranged in a crossing way.
Fig. 6 also shows a partial pixel structure at a position corresponding to the position of the second opening area, including a red subpixel 55, a green subpixel 56, and a blue subpixel 57, and the specific arrangement manner of the red subpixel 55, the green subpixel 56, and the blue subpixel 57 is similar to that of the prior art, and will not be repeated here.
In particular, as shown in fig. 6, in the second direction, the width of the second opening sub-area 521 is equal to the width of the second shielding sub-area 541.
In the embodiment, as shown in fig. 5 and 6, the first region 41 is an entire surface vapor deposition region, and the second region 42 is a vapor deposition halving region, and the second region 42 is not completely vapor deposited with the cathode material, so that the light transmittance of the second region 42 is improved. In addition, the first shielding region 53 may also shield the camera area, so as to avoid the cathode material from being evaporated on the camera.
In some embodiments, as shown in fig. 5, 7 and 8, fig. 7 is another enlarged view of region 50 in fig. 5, fig. 8 is an enlarged view of region 70 in fig. 7, the open region 422 includes a number of open sub-regions 71, and the occlusion region 421 includes a first occlusion region 53 and a second occlusion region; the position of the first shielding region 53 corresponds to the position of the camera, and the second shielding region comprises a plurality of second shielding sub-regions 72; the positions of the open sub-areas 71 correspond to the positions of the pixel areas 73, and second shielding sub-areas 72 are arranged between adjacent open sub-areas 71. Specifically, the specific arrangement of the pixel regions 73 (e.g., the positions and sizes of the pixel regions) is similar to that of the prior art, and will not be described herein.
Optionally, as shown in fig. 7 and 8, the plurality of opening subregions 71 are distributed in a matrix arrangement, a row of second shielding subregions 72 is disposed between two adjacent rows of opening subregions 71, and a column of second shielding subregions 72 is disposed between two adjacent columns of opening subregions 71.
Alternatively, as shown in fig. 7 and 8, the area of each opening sub-region 71 is larger than the area of the pixel region at the corresponding position, so that a film layer (such as a cathode layer) evaporated at the position of the adjacent opening sub-region 71 can be conducted through a conductive layer under the film layer.
Alternatively, the shape of the opening subregion 71 is square, and in practical implementation, all the opening subregions 71 may be provided to have equal areas; of course, in practical design, the shape of the opening subregion 71 may be set to other shapes, and the specific shape of the opening subregion 71 is not limited in the embodiments of the present application.
In specific implementation, as shown in fig. 7 and 8, the cathode is only evaporated at the position corresponding to the pixel area, the cathode is not evaporated in the area outside the pixel area, the evaporation area can be further reduced, the light transmittance of the local position of the display area can be further improved, the infrared sensor built in the display area can work normally, the display effect of the area is not affected, and the product characteristics and the visual experience are further improved.
Based on the same inventive concept, the embodiment of the present application further provides a display back plate, as shown in fig. 9, including a substrate (not shown in the figure) and an electrode layer 91 located on the substrate, where the electrode layer 91 is formed by using the mask plate provided by the embodiment of the present application, and specifically, the electrode layer 91 may be a cathode layer. The electrode layer included in the display backboard is formed by adopting the mask plate provided by the embodiment of the application, so that the display backboard provided by the embodiment of the application has the same beneficial effects as the mask plate and is not repeated here.
Alternatively, as shown in fig. 9, the electrode layer 91 includes a third region 92 and a fourth region 93, the position of the third region 92 corresponds to the position of the first region 41, and the position of the fourth region 93 corresponds to the position of the second region 42; that is, when the mask provided by the embodiment of the application is used for manufacturing, after the mask is aligned with the substrate, the position of the first region 41 corresponds to the position of the third region 92, and the position of the second region 42 corresponds to the position of the fourth region 93. Because the second region 42 of the mask provided in the embodiment of the present application includes the shielding region, the electrode layer cannot be evaporated at the position corresponding to the shielding region, that is, the region 94 in the figure is not evaporated with the upper electrode layer.
Optionally, the display backboard includes a first functional area, and the position of the first functional area corresponds to the setting position of the infrared sensor, and the specific setting position of the infrared sensor can be shown in fig. 1; the electrode layer 91 at a position corresponding to the fourth region 93 includes a first electrode layer and a second electrode layer, the position of the first electrode layer corresponding to the position of the infrared sensor.
In an alternative embodiment, the second electrode layer includes a plurality of second sub-electrode layers extending along the first direction, and in the second direction, the second sub-electrode layers are intermittently distributed, and a specific position of the second sub-electrode layer corresponds to a position of the second opening sub-region 521 included in the mask plate.
In another alternative embodiment, the second electrode layer includes a plurality of second sub-electrode layers arranged in a matrix, where the positions of the second sub-electrode layers correspond to the positions of the pixel regions, and the specific positions of the second sub-electrode layers correspond to the positions of the opening sub-regions 71 included in the mask plate.
Optionally, as shown in fig. 10, the display back panel provided in the embodiment of the present application further includes an auxiliary electrode 95, where the auxiliary electrode 95 is located on a side of the electrode layer 91 close to the substrate, that is, the auxiliary electrode 95 is located below the electrode layer 91, and an area of each second sub-electrode layer (a specific position of the second sub-electrode layer corresponds to a position of the opening sub-region 71 included in the mask plate) is larger than an area of the pixel region at the corresponding position, and adjacent second sub-electrode layers are conducted through the auxiliary electrode 95.
In particular, the auxiliary electrode 95 may be an anode layer disposed on the substrate and below the electrode layer 91, where a partial area of the auxiliary electrode 95 partially overlaps the second sub-electrode layer, so that the auxiliary electrode 95 is better connected to the evaporated second sub-electrode layer.
In specific implementation, the auxiliary electrode 95 may be a metal layer with better conductivity, or a transparent conductive layer with better transmittance, for example: indium Tin Oxide (ITO) was selected.
Based on the same inventive concept, the embodiment of the application also provides a display panel, which comprises the display backboard provided by the embodiment of the application. The display panel comprises the display backboard provided by the embodiment of the application, so that the display panel provided by the embodiment of the application has the same beneficial effects as the display backboard, and the description is omitted here.
Based on the same inventive concept, the embodiment of the application also provides a display device, which comprises the display panel provided by the embodiment of the application.
In summary, the mask plate provided by the application has the following beneficial effects:
The mask provided by the embodiment of the application comprises a first area and a second area, wherein the first area is overlapped with a first pixel density area of the display backboard in a orthographic projection area of the display backboard; the second area is overlapped with the second pixel density area of the display backboard in the orthographic projection area of the display backboard; the pixel density of the first pixel density area is greater than that of the second pixel density area, and the second area comprises a shielding area and an opening area; compared with the prior art that the full-opening mask plate is used for film evaporation, the mask plate provided by the embodiment of the application comprises the second area comprising the shielding area and the opening area, and the position of the second area corresponds to the area with lower pixel density, so that when the mask plate provided by the embodiment of the application is used for film evaporation, a film with thinner film thickness can be evaporated in the area with lower pixel density, and therefore, the light transmittance of the local position of the display area can be improved, and the characteristics and visual experience of the whole screen product are improved.
The second, the mask plate provided by the embodiment of the application is a complete opening area, and the second area comprises a shielding area and an opening area, and because the mask plate provided by the embodiment of the application comprises two different areas, compared with the prior art, when the mask plate provided by the embodiment of the application is used for film evaporation, the shadow phenomenon cannot occur in the areas with different pixel densities, and the evaporation of the whole film can be completed by adopting one mask plate, so that the process time of evaporation is reduced, and the productivity is further improved.
The foregoing is only a partial embodiment of the present application, and it should be noted that it will be apparent to those skilled in the art that modifications and adaptations can be made without departing from the principles of the present application, and such modifications and adaptations are intended to be comprehended within the scope of the present application.

Claims (14)

1. The mask plate is used for film evaporation of a display backboard and is characterized in that the film comprises a cathode, and the mask plate comprises a first area and a second area;
the first area is overlapped with a first pixel density area of the display backboard in a orthographic projection area of the display backboard;
the second area is overlapped with a second pixel density area of the display backboard in a orthographic projection area of the display backboard;
the pixel density of the first pixel density area is greater than the pixel density of the second pixel density area;
the second area comprises a shielding area and an opening area, and the position of the shielding area is arranged corresponding to the position of the non-deposition film layer;
The display backboard comprises a first functional area and a second functional area, the position of the first functional area corresponds to the setting position of the infrared sensor, and the position of the second functional area corresponds to the setting position of the camera;
the opening area comprises a first opening area and a second opening area, and the shielding area comprises a first shielding area and a second shielding area;
the position of the first shielding area corresponds to the position of the camera, and the position of the first opening area corresponds to the position of the infrared sensor.
2. The mask of claim 1, wherein the first region is a fully open region.
3. The mask plate according to claim 1, wherein the second opening area comprises a number of second opening sub-areas extending in the first direction, and the second shielding area comprises a number of second shielding sub-areas extending in the first direction;
In a second direction, the second opening subregions alternate with the second shielding subregions; the first direction and the second direction are arranged in a crossing manner.
4. The mask plate according to claim 2, wherein the opening area comprises a plurality of opening sub-areas, the shielding area comprises a first shielding area and a second shielding area, the position of the first shielding area corresponds to the position of the camera, and the second shielding area comprises a plurality of second shielding sub-areas;
The positions of the opening subareas correspond to the positions of the pixel areas, and the second shielding subareas are arranged between the adjacent opening subareas.
5. The mask plate according to claim 4, wherein a plurality of the opening subregions are distributed in a matrix arrangement mode, one row of the second shielding subregions is arranged between two adjacent rows of the opening subregions, and one column of the second shielding subregions is arranged between two adjacent columns of the opening subregions.
6. The mask plate according to claim 4, wherein an area of each of the opening subregions is larger than an area of the pixel region at a corresponding position.
7. The mask plate according to claim 4, wherein the shape of the opening subregion is square.
8. A display backboard, which is characterized by comprising a substrate base plate and an electrode layer positioned on the substrate base plate, wherein the electrode layer is formed by adopting the mask plate according to any one of claims 1-7.
9. The display back plate according to claim 8, wherein the electrode layer includes a third region and a fourth region, a position of the third region corresponding to a position of the first region, and a position of the fourth region corresponding to a position of the second region;
The display backboard comprises a first functional area, and the position of the first functional area corresponds to the setting position of the infrared sensor;
The electrode layer at the position corresponding to the fourth region includes a first electrode layer and a second electrode layer, and the position of the first electrode layer corresponds to the position of the infrared sensor.
10. The display back plate of claim 9, wherein the second electrode layer comprises a plurality of second sub-electrode layers extending along a first direction, the second sub-electrode layers being spaced apart in the second direction.
11. The display back panel according to claim 9, wherein the second electrode layer includes a plurality of second sub-electrode layers arranged in a matrix, and positions of the second sub-electrode layers correspond to positions of the pixel regions.
12. The display back plate of claim 11, further comprising an auxiliary electrode, said auxiliary electrode being located on a side of said electrode layer adjacent to said substrate;
the area of each second sub-electrode layer is larger than that of the pixel area at the corresponding position, and the adjacent second sub-electrode layers are conducted through the auxiliary electrodes.
13. A display panel comprising the display backplane of any of claims 8-12.
14. A display device comprising the display panel of claim 13.
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