CN109765429A - Impedance measurement system and impedance measurement method - Google Patents
Impedance measurement system and impedance measurement method Download PDFInfo
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- CN109765429A CN109765429A CN201811106546.XA CN201811106546A CN109765429A CN 109765429 A CN109765429 A CN 109765429A CN 201811106546 A CN201811106546 A CN 201811106546A CN 109765429 A CN109765429 A CN 109765429A
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Abstract
The present invention provides the impedance measurement system and impedance measurement method of a kind of measurement error caused by reducing influence of induced voltage because of impedometer to each other etc. in the case where measuring using more impedometers to measurement sample；Keep the constant-current source as the measurement alternating current source of more impedometers synchronous, and synchronous measurement is supplied with alternating current to measurement sample；Alternatively, being each other in antiphase and supply extremely measurement sample, to measure by the phase controlling of measurement alternating current caused by adjacent impedometer.
Description
Technical field
The present invention relates to impedance measurement systems and impedance measurement method.
Background technique
As the method measured to internal driving possessed by the element for constituting circuit, exist to as measurement object
Sample assign AC signal and measure the ac impedance measurement method of its electrical response.Using this method, sample institute can be checked
The size of the resistive component, capacitive component, inductive component that have.In addition, can find out what above-mentioned component constitutes in sample
The parameter of kind equivalent circuit or the equivalent circuit.
As impedance measurement as above, there are following methods: that is, from constant-current source to sample supply in the measurement of sine wave
With alternating current, using the reference signal of the identical frequency of the measurement alternating current synchronous with supply (or also referred to as " with reference to believing
Number "), detection is synchronized to the voltage signal occurred in sample, thus reduces the influence of the noise component(s) occurred in sample
This has used the impedance measurement method of synchronous detection.
About the impedance measurement using synchronous detection, there are existing technical literatures below.
Hereinafter, being illustrated referring to attached drawing to using the impedance measurement of synchronous detection.
Fig. 6 is the figure for indicating the composition of the impedometer using synchronous detection.
Impedance measurement movement in the impedometer of Fig. 6 is illustrated.
From constant-current source to the additional i=Isin (ω of sample 131T) sine wave is as measurement alternating current.In sample 13
Both ends generate the internal resistance R with batteryXCorresponding voltage, the voltage pass through after amplifier 15 amplifies with v1=iRXForm output.
In addition, from the output of amplifier 16 and current detecting resistance RSCorresponding v2=iRs, and synchronized using lock detector 20
Detection.Here, v1、v2Are as follows:
v1=Vsin (ω1T)=IRX sin(ω1t)
v2=iRS=IRS sin(ω1T)=ksin (ω1t)。
Wherein, k is constant (I be definite value with Rs).
Synchronous detection output are as follows:
v1×v2=kIRX sin(ω1t)sin(ω1t)
=1/2kIRX[cos (0)-cos (2 ω1t)]。
When using low-pass filter truncation AC compounent, the input of analog-digital converter 23 becomes:
VAD=1/2kIRXCos (0)=1/2kIRX,
The resistance value Rx of sample passes through following formula as a result,
RX=2/k (VAD/I)
And it can find out.
In this way, due to by using with measurement alternating current with phase reference signal to the voltage detection signal at sample both ends
Detection is synchronized, and removes AC compounent (cos (2 ω using low-pass filter1T)), to only extract DC component, therefore
The effective impedance that battery etc. includes the sample of the measurement object of component other than pure resistance can be found out.In addition, due to synchronous detection
The AC compounent of middle appearance is removed by low-pass filter, therefore, can remove the influence of the noise as exchange, so as to
Enough extract the tiny signal buried by noise.
[existing technical literature]
[patent document]
Patent document 1: JP Publication, special open No. 2017-058176 number
Using multiple above-mentioned impedometers and is being measured using the AC impedance of such as battery etc. as measurement object
When, there are following situations: that is, generating since measurement magnetic flux caused by alternating current that impedometer supplies interferes with each other
Induced voltage cause to generate measurement error, and then sense caused by the vortex due to generating in the neighbouring metal of impedometer
It answers voltage and causes to generate measurement error.
The phenomenon that generating measurement error is caused to be illustrated by induced voltage this.
The case where there are metals using near impedometer is illustrated as model.When being intended to measure in the production line
When the impedance of the battery of the sample as measurement object, there is the bracket of receiving battery or the basket of battery near measurement object
The metals such as body.In the metal, due to impedometer generate measurement alternating current caused by electromagnetic induction and generate vortex.
Illustrate near impedometer that there are shadows when metal plate (parallel with the loop aerial of cable) in Fig. 7
It rings.
As the additional measurement alternating current i=Isin of sample (resistance) of the constant-current source from impedometer to measurement object
When the measurement alternating current of (ω t), the magnetic flux of φ ∝ Isin (ω t) is generated in the cable of gauge head.Pass through the magnetic flux, such as Fig. 7
In (A) shown in generate V belowMInduced voltage.
[formula 1]
On the other hand, as shown in (B) in Fig. 7, due to the electricity in the metal plate 4 being present near impedometer
The magnetic flux that is generated on cable and the vortex for generating following formula expression.
[formula 2]
Due to the presence of the vortex, generate the magnetic flux of vortex to be eliminated, by the magnetic flux impedometer gauge head
Induced voltage Vu is generated on cable.
[formula 3]
There are the induced voltages of 90 degree of phase differences can pass through above-mentioned synchronous inspection with the measuring signal that detects from sample
Wave is eliminated, still, be vortexed as caused by the metal plate 4 near impedometer and the induced voltage Vu that generates, phase
It rotates and not vertical with the phase of measurement alternating current, therefore, it is difficult to be eliminated by synchronous detection, caused by becoming because of phase shift
Noise, to generate measurement error.
The above-mentioned example that generated induced voltage in case of a metal is deposited near impedometer, to be surveyed with impedance
Measure the cable of instrument in parallel there are metal plate in case where studied, but to the induction that impedometer has an impact
The phase of voltage Vu, amplitude can change according to position, direction of metal etc..
But being deposited near individual impedometer caused by the induced voltage generated in case of a metal
The phase shift of constant-current source and voltage detection department 12 is small, therefore measurement error is small, can be by using the tune of zero impedance measured material
Zero power can correct the measurement error.
On the other hand, it when there are multiple impedometers, becomes more complicated.Magnetic is generated by an impedometer
It is logical, due to the magnetic flux, induced voltage is generated in the cable of other impedometers and is mutually influenced.In addition, attached
Closely there are in the case where metal, it is vortexed by being generated in the nigh metal of the electromagnetic induction of an impedometer, in order to
Eliminate the vortex and the magnetic flux that generates in other impedometers but also generate induced voltage, in addition, due to others
Vortex, generates induced voltage in another impedometer caused by impedometer, in this way, passing through generation to each other
Magnetic flux and mutually giving influences.The magnetic flux that multiple impedometers generate interferes with each other and the induced voltage generated and respective survey
Amount is inconsistent with alternating current phases, therefore becomes big noise, to generate big measurement error.
In this way, there are noises caused by the induced voltage that multiple impedometers influence each other to each other and generate
In the case where noise caused by upper and then vortex along with neighbouring metal, eliminates these noises and be difficult.Multiple resistances
Naturally there is deviation in the phase of measurement alternating current when anti-measuring instrument measures simultaneously, in addition, resulting induced electricity each other
The phase of pressure is different, and therefore, the deviation of the phase of induced voltage caused by other impedometers and measuring signal simultaneously can not
It uniquely determines.In addition, no matter when multiple impedometers measure simultaneously or the work of impedometer and its
When his impedometer does not work, the phase of generated induced voltage is different, therefore, is produced between multiple impedometers
The deviation of the phase of raw induced voltage and measuring signal can not simultaneously uniquely determine.In turn, due to multiple impedometers
Mutual positional relationship is different but also the direction of the magnetic flux generated changes, therefore eliminates due to multiple impedometers
Influence each other and the induced voltage that generates caused by noise be difficult, to eliminate measurement error caused by these noises
It is difficult.
Summary of the invention
It is expected that reducing above-mentioned due to multiple impedometers mutually influence and generate measurement error.In addition, due to
Measured using multiple impedometers, and then nearby there are when metal, induced voltage is generated due to magnetic flux each other, from
And become noise and generate measurement error, it is therefore desirable for reducing such measurement error.
It can reduce the purpose of the present invention is to provide one kind and as above be produced due to multiple measuring instruments and neighbouring metal
Measurement error caused by raw induced voltage thus allows for impedance measurement system and the impedance measurement side of stable measurement
Method.
The first aspect of the present invention is a kind of impedance measurement system, has the sample supply regulation of multiple pairs of measurement objects
Frequency measures the impedometer for using alternating current, which is characterized in that, the measurement of multiple impedometers
With the phase of alternating current in synchronization.
The impedance measurement system has phase synchronized signal generating unit, and phase synchronized signal generating unit can be exported
Phase synchronized signal is supplied to the measurement alternating current source of each impedometer.
Another aspect of the present invention is a kind of impedance measurement system, and the sample for having multiple pairs of measurement objects is supplied respectively to
Assigned frequency measures the impedometer for using alternating current, which is characterized in that, adjacent impedometer
The phase of the measurement supplied alternating current is antiphase.
In addition, impedometer can have: measurement alternating current source, generation and the measurement friendship of supply measurement alternating current
The reference signal generating section of the synchronous reference signal of galvanic electricity synchronizes inspection to the detection signal occurred in sample with reference signal
The synchronous detection portion of wave and the low-pass filter for passing through the signal after synchronous detection.
Another aspect of the present invention is a kind of impedance measurement method, the examination from multiple impedometers to each measurement object
Sample supplies the measurement alternating current of assigned frequency, and the inspection with the reference signal with measurement alternating current synchronous to occurring in sample
It surveys signal and synchronizes detection, the DC component of the signal after extracting synchronous detection and the AC impedance for measuring sample, the impedance
Measurement method is characterized in that, keeps measurement alternating current phases caused by multiple impedometers synchronous.
Another aspect of the present invention is a kind of impedance measurement method, the examination from multiple impedometers to each measurement object
Sample supplies the measurement alternating current of assigned frequency, and the inspection with the reference signal with measurement alternating current synchronous to occurring in sample
It surveys signal and synchronizes detection, the DC component of the signal after extracting synchronous detection and the AC impedance for measuring sample, the impedance
Measurement method is characterized in that, makes the phase of measurement alternating current caused by adjacent impedometer in antiphase.
(invention effect)
The generation of noise for mutually influencing and generating due to being able to suppress or reducing multiple measuring instruments, can subtract
The error of small impedance measurement thus allows for more correctly measuring.In addition, it is able to carry out stable measurement, so as to
Realize the efficient activity of the production process of measurement object.
Detailed description of the invention
Fig. 1 is the phase for indicating the measurement alternating current for generating multiple impedometers in first embodiment of the invention
The figure of the composition of bit synchronization.
Fig. 2 is the impedance measurement system for indicating to have used multiple synchronous detection impedometers in the first embodiment
The figure of example.
Fig. 3 is to indicate that inducting flux caused by multiple impedometers is formed as the figure of same-phase.
Fig. 4 is the phase for indicating to make in second embodiment of the invention the measurement alternating current of adjacent impedometer
Be formed as the figure of the composition of antiphase.
Fig. 5 is to indicate to make inducting flux caused by multiple impedometers in the reversed figure to eliminate.
Fig. 6 is the figure for indicating the composition of the impedometer in the way of synchronous detection.
Fig. 7 is the induced voltage generated to inducting flux caused by the vortex as the metal near impedometer
The figure being illustrated.
(symbol description)
1-1~1-n ... impedometer
2 ... phase synchronized signal generators
The sample of 3-1,3-2 ... measurement object
4 ... metal plates
11-1~11-n ... constant-current source
12 ... voltage detection departments
13,13-1~13~n ... sample (DUT)
14,14-1~14-n ... current detecting is with resistance (Rs)
15,15-1~15-n, 16,16-1~16-n ... amplifier
17,17-1~17-n ... bandpass filter (BPF)
20,20-1~20-n, 21,21-1~21-n ... lock detector
22,22-1~22-n ... low-pass filter (LPF)
23,23-1~23-n ... analog-digital converter
24,24-1~24-n ... processing unit
25, the output section 25-1~25-n ...
Specific embodiment
Hereinafter, the embodiments of the present invention will be described with reference to the drawings.Fig. 1 indicates first embodiment of the invention
The figure of the composition of impedance measurement system, also, show the measurement alternating current synchronous for generating multiple impedometers and with
Same-phase supplies to the sample of measurement object the composition for carrying out impedance measurement.
Multiple impedometer 1-1,1-2 ... are respectively from constant-current source 11-1,11-2 ... to the sample 3- of measurement object
1,3-2 ... supplies the measurement alternating current of assigned frequency, and detects voltage using voltage detection department 12-1,12-2 ..., from
And the impedance of the sample of measurement object is measured.The impedance measurement system is configured to have multiple impedometer 1-1,1-
2 ..., impedometer 1-1,1-2 ... are in communication connection, and being supplied measurement with same-phase to measurement pair with alternating current
This mode of the sample of elephant is controlled.
Impedometer in such a way that Fig. 2 is to synchronous detection is used constitutes the example of impedance measurement system shown in FIG. 1
Son is illustrated.
The impedance measurement system have multiple impedometer 1-1,1-2 ... 1-n and these impedometers 1-1,
1-2 ... 1-n shared phase synchronized signal generator 2, also, each impedometer 1-1,1-2 ... 1-n is constituted are as follows: benefit
With the phase synchronized signal assigned from phase synchronized signal generator 2 so that measurement alternating current caused by respective constant-current source
Phase locked mode controlled, to measure the impedance of sample 13-1,13-2 ... 13-n of each measurement object.
Each impedometer has: generating the measurement constant-current source of alternating current i, the current detecting resistance of assigned frequency
(Rs) 14, amplifier 15,16, the bandpass filter (BPF) 17, the lock detector 20, low-pass filtering that allow measurement frequency to pass through
Device (LPF) 22, analog-digital converter (ADC) 23, processing unit 24 and output section 25.
The movement of the impedometer is illustrated.
It is (abbreviation of DUT:device under test, " tested that measurement with alternating current i is supplied to sample 13 from constant-current source
Device ").In addition, here, sample 13 is the battery with internal resistance Rx.Resistance (Rs) 14 is for detecting measurement alternating current i
The current detecting resistance of current value, by with constant-current source, sample 13 it is concatenated in a manner of be inserted into.Symbol 15 is according to measurement friendship
The amplifier that galvanic electricity i amplifies the detection signal (voltage signal) occurred in sample 13.Similarly, symbol 16 is will to utilize electric current
Detect the amplifier of the voltage signal amplification detected with resistance (Rs) 14.It is amplified the voltage detection signal of the amplification of device 15
v1, lock detector 20 is input to by the bandpass filter (BPF) 17 for allowing measurement frequency to pass through.In addition, with measurement
With the synchronous reference signal v of alternating current i2Device 16 is amplified to amplify and be entered lock detector 20.Lock detector 20 utilizes
Reference signal v2To voltage detection signal v1Detection is synchronized, detection output is input for removing the low pass of AC compounent
AC compounent is removed in filter (LPF) 22, is then fed into analog-digital converter (ADC) 23.Analog-digital converter 23 will be same
Step detection output is converted to digital signal.Digital signal after conversion is entered in the processing unit 24 for having arithmetic element, is calculated
AC impedance, parameter of equivalent circuit of sample 13 etc., and these values are shown in display unit of output section 25 etc. or
Printout.In addition, in the storage device by the record of processing unit 24.
In addition, voltage detection department 12 shown in FIG. 1 is equivalent to the voltage of the detection sample after amplifier 15 and exports friendship
The composition of flow impedance value.
It is generated using Fig. 3 to by the Phase synchronization for making the measurement alternating current of multiple impedometer 1-1,1-2
Effect be illustrated.
Since the phase of constant-current source 11-1,11-2 of impedometer 10-1,10-2 measurement alternating current exported is same
Step, therefore the phase of the vortex and magnetic flux generated in metal plate 4 is consistent.It therefore, may by the induced voltage that vortex generates
The size become twice as, but it influences to be as fixed deviation for impedometer 10-1,10-2.Due to being fixed
Deviation, therefore can pass through and carry out zero-bit adjustment (also referred to as " zeroing (Zero Adjust) ") and ignore.Zero-bit adjusts
Refer to: for the sample of measurement object, the electricity occurred when the sample of the fixture for using zero-bit adjustment, such as 0 Ω is measured
Resistance value is subtracted from measured value later, thus the error transfer factor being fixed.
As described above, the Phase synchronization of the measurement alternating current by making multiple impedometer supplies, is detected fixed
The deviation of measured value, also, be adjusted by the deviation of the measured value to the fixation, to even if having induced electricity to each other
It is influenced caused by pressure, is also able to carry out more correct and small error impedance measurement.
Next, being illustrated using Fig. 4, Fig. 5 to second embodiment of the present invention.
In second embodiment of the invention, as shown in figure 4, the measurement alternating current that adjacent impedometer exports
Phase is in antiphase.
At this point, since the direction of the magnetic flux of the cable generation of the gauge head from adjacent impedometer is opposite direction, because
This is eliminated each other as shown in Figure 5 and from Fig. 3 the case where is different, and induced voltage becomes smaller, and noise becomes smaller.In addition, due to
Vortex is not generated yet in the metal of surrounding, therefore measurement error becomes caused by the influence of the vortex due to generating in surrounding metal
It is small.At this point, being led there is no the induced voltage of the magnetic flux as caused by multiple impedometers as in the first embodiment
This case that the deviation for the measured value for causing generation fixed, therefore, it is necessary right in first embodiment not need in this case
The zero-bit of error caused by induced voltage adjusts.
The case where being odd number for impedometer, as long as the survey of the impedometer on the neighbour side of the impedometer in center
Amount alternating current is formed as antiphase, therefore, not only impedometer be even number the case where, but also be odd number the case where
With effect.
It, can be according to the Phase synchronization of supply to each impedometer in order to make the phase of measurement alternating current in antiphase
Signal, the phase shifting half-wavelength for the measurement alternating current for generating one of adjacent impedometer, to be respectively formed
Antiphase and export.
In the above-described embodiment, the phase locked composition as the measurement alternating current for making impedometer, in Fig. 2
In be configured to supply synchronization signal to each impedometer using phase synchronized signal generator 2, but also may be formed so that
To the first impedometer 1-1 setting phase synchronized signal generator 2 as main impedometer, by other impedance measurements
Instrument 1-2 ... synchronization signal is transmitted as secondary impedometer, and from the first impedometer 1-1.Alternatively, it is also possible to constitute
Are as follows: the clock pulses that the oscillator of the constant-current source of the measurement alternating current of each impedometer is become using synchronization signal is same
Step.Alternatively, also may be constructed are as follows: the measurement alternating current of a main impedometer output assigned frequency, each impedometer
Make the Phase synchronization of respective measurement alternating current or be staggered half-wavelength and supply to measurement object sample.In turn, for general
Synchronization signal is transferred to impedometer, not only can be used wired, but also can be used wireless.
Above embodiment is illustrated with the example for supplying exchange constant current to sample from constant-current source and measuring impedance,
But also impedance measurement can be carried out using voltage.For example, it is also possible to supply AC constant voltage to sample from voltage source and pass through synchronization
Detection measures impedance.In the case where measurement object is battery, impedance measurement is carried out preferably by constant current, but for example by group
Enter circuit in the case where being possible to the capacitor for noise occur, also can use constant pressure exchange and carry out impedance measurement.
Claims (6)
1. a kind of impedance measurement system has the resistance of the measurement alternating current of the sample supply assigned frequency of multiple pairs of measurement objects
Anti- measuring instrument, the impedance measurement system be characterized in that,
The phase of the measurement alternating current of the multiple impedometer is in synchronization.
2. impedance measurement system as described in claim 1, which is characterized in that
The impedance measurement system has phase synchronized signal generating unit, and the phase that the phase synchronized signal generating unit is exported
Bit synchronization signal is supplied to the measurement alternating current source of each impedometer.
3. a kind of impedance measurement system, the sample for having multiple pairs of measurement objects is supplied respectively to the measurement alternating current of assigned frequency
Impedometer, the impedance measurement system is characterized in that,
The phase of the measurement that adjacent impedometer is supplied alternating current is antiphase.
4. impedance measurement system according to any one of claims 1 to 3, which is characterized in that
The impedometer is synchronous detection impedometer, which has:
The measurement alternating current source of the measurement alternating current is supplied,
The reference signal generating section with the reference signal of the measurement alternating current synchronous is generated,
The synchronous detection portion of detection is synchronized to the detection signal occurred in the sample with the reference signal, and
The low-pass filter that signal after making synchronous detection passes through.
5. a kind of impedance measurement method, the measurement from multiple impedometers to the sample supply assigned frequency of each measurement object
With alternating current, and the detection signal occurred in the sample is carried out together with the reference signal with measurement alternating current synchronous
Detection is walked, the DC component of the signal after extracting synchronous detection and the AC impedance for measuring the sample, the impedance measurement side
Method is characterized in that,
Make the Phase synchronization of measurement alternating current caused by the multiple impedometer.
6. a kind of impedance measurement method, the measurement from multiple impedometers to the sample supply assigned frequency of each measurement object
With alternating current, and the detection signal occurred in the sample is carried out together with the reference signal with measurement alternating current synchronous
Detection is walked, the DC component of the signal after extracting synchronous detection and the AC impedance for measuring the sample, the impedance measurement side
Method is characterized in that,
Make the phase of measurement alternating current caused by adjacent impedometer in antiphase.
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| JP2017216792A JP6943727B2 (en) | 2017-11-09 | 2017-11-09 | Impedance measurement system and impedance measurement method |
| JP2017-216792 | 2017-11-09 |
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| CN117169755A (en) * | 2023-11-02 | 2023-12-05 | 青岛艾诺仪器有限公司 | AC impedance measuring system and measuring method |
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| JP7364434B2 (en) * | 2019-11-14 | 2023-10-18 | 日置電機株式会社 | Zero adjustment correction method and impedance measurement method |
| JP7338600B2 (en) * | 2020-10-02 | 2023-09-05 | 株式会社デンソー | gas sensor |
| US11604229B2 (en) | 2020-12-28 | 2023-03-14 | Analog Devices International Unlimited Company | Techniques for determining energy storage device state of health |
| JP2022188935A (en) * | 2021-06-10 | 2022-12-22 | 株式会社デンソー | Battery measuring device and battery state measuring method |
| WO2023277178A1 (en) * | 2021-07-02 | 2023-01-05 | 日置電機株式会社 | Impedance measurement system |
| CN114190041B (en) * | 2021-11-08 | 2023-10-20 | 陕西千山航空电子有限责任公司 | Electromagnetic interference filtering structure of power supply module |
| JP2023107030A (en) * | 2022-01-21 | 2023-08-02 | 日置電機株式会社 | Impedance measuring device and method |
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| JP2019086474A (en) | 2019-06-06 |
| CN109765429B (en) | 2023-02-24 |
| JP6943727B2 (en) | 2021-10-06 |
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