CN109737032B - Anti-jamming method for restarting vacuum pump after stopping - Google Patents
Anti-jamming method for restarting vacuum pump after stopping Download PDFInfo
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- CN109737032B CN109737032B CN201811640412.6A CN201811640412A CN109737032B CN 109737032 B CN109737032 B CN 109737032B CN 201811640412 A CN201811640412 A CN 201811640412A CN 109737032 B CN109737032 B CN 109737032B
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Abstract
The invention discloses an anti-blocking method for restarting a vacuum pump after stopping, which relates to the technical field of solar cell manufacturing and comprises the following steps: cooling the equipment; opening the pre-pumping, and pumping the equipment to a vacuum state; opening the main pump, and pumping the internal pressure of the equipment to 0%; opening constant-pressure nitrogen, and continuously purging the vacuum pump; after the equipment is cooled, the heating is closed, and the equipment is closed to supply nitrogen with constant pressure; clicking a 'stop' vacuum pump once, and keeping the vacuum pump running at a low speed; checking whether each pump has abnormal sound or not in the low-speed running process of the equipment; pressing the 'stop' vacuum pump again after 2 hours, stopping the vacuum pump, closing the cooling water, and closing the purging nitrogen of the vacuum pump; turning off a power supply of the vacuum pump, and turning off a tail hand exhaust valve of the vacuum pump; and after the power failure, the vacuum pump is manually coiled and checked to determine whether the vacuum pump is stuck or not. The invention has the characteristic of preventing the resetting of the vacuum pump from being locked.
Description
Technical Field
The invention belongs to the technical field of solar cell manufacturing, and particularly relates to an anti-jamming method for restarting a vacuum pump after the vacuum pump is stopped.
Background
The current process flow of stopping the vacuum pump is as follows:
1. closing and heating the abundant film coating equipment to cool;
2. opening the pre-pumping, and pumping the equipment to a vacuum state;
3. opening the main pump, and pumping the internal pressure of the equipment to 0 mbar;
4. opening nitrogen with constant pressure, and performing continuous nitrogen purging on an ADXEN602H vacuum pump for 2 hours;
5. after 2 hours, stopping the vacuum pump by using a stop ADXEN602H vacuum pump, stopping the operation of the vacuum pump, closing the cooling water inlet and return water of the vacuum pump, closing the vacuum pump to dilute nitrogen, closing the power supply of the vacuum pump, and closing the tail hand exhaust valve of the vacuum pump;
6. ① the shell of the vacuum pump is disassembled by a straight screwdriver, ② the end cover of the roots pump is disassembled by a 3mm inner hexagon, ③ the disk pump is performed by shaking left and right by a 21mm ratchet socket spanner until the disk pump is smooth and has no clamping stagnation.
The required vacuum environment of solar photovoltaic cell silicon chip in positive membrane completion coating film process is provided by multistage lobe pump, the vacuum pump is at the operation in-process, because the long-time high load operation of vacuum pump, the vacuum pump is in high temperature and high rotational speed state all the time at the operation in-process simultaneously, after the vacuum pump shutdown, because rotor silicon nitride adheres to, lead to the clearance between the rotor to reduce, the inside silicon nitride dust deposit of pump body, the inside temperature reduction of vacuum pump leads to the vacuum pump card to die, the vacuum pump can't start when the recovery starts. Even through the condition that the manual disc pump can not be used, the vacuum pump is finally blocked and repaired.
Disclosure of Invention
The invention aims to: the novel method for preventing the vacuum pump from being stuck after the vacuum pump is stopped is provided for solving the problems that the maintenance process of the vacuum pump is complex, the input of human resources is high, the machine resetting difficulty is high, and the maintenance cost is high when the vacuum pump is stuck after the vacuum pump is stopped at present.
The technical scheme adopted by the invention is as follows:
1. a method for preventing a vacuum pump from being stuck after being stopped is started, and comprises the following steps:
(1) cooling the equipment: setting the heating temperature to be 200 ℃;
(2) opening the pre-pumping, and pumping the equipment to a vacuum state;
(3) opening the main pump, and pumping the internal pressure of the equipment to 0%;
further comprising the steps of:
(4) opening constant-pressure nitrogen, and continuously purging the vacuum pump;
(5) after the temperature of the equipment is reduced to below 200 ℃, the heating is closed, and the equipment is closed to keep the nitrogen at constant pressure;
(6) clicking a 'stop' vacuum pump once, and keeping the vacuum pump running at a low speed;
(7) whether each pump has abnormal sound or not is checked in the low-speed running process of the equipment, and the abnormal sound is processed in time;
(8) pressing the 'stop' vacuum pump again after 2 hours, stopping the vacuum pump, closing the cooling water, and closing the purging nitrogen of the vacuum pump; turning off a power supply of the vacuum pump, and turning off a tail hand exhaust valve of the vacuum pump;
(9) and after the power failure is carried out for 2 hours, further checking the vacuum pump by a manual disc pump to determine whether the vacuum pump has a clamping stagnation condition.
Preferably, the low-speed operation time of the vacuum pump in the step (6) is not less than two hours.
Preferably, the vacuum pump is an ADXEN602H vacuum pump.
Preferably, the equipment is abundant coating equipment.
In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:
1. compared with the pump stopping process, the new method is used for preventing the ADXEN602H vacuum pump from being stuck after being stopped, and a large number of actions for preventing the vacuum pump from being stuck are added, such as continuous N2 purging, low-speed running and pretreatment of abnormal states, and the effect is obvious. Compared with field practice results, the vacuum pump is blocked when the vacuum pumps are stopped for the first few times, so that the human resources are greatly wasted, four persons are required to circularly pump 60 vacuum pumps at intervals of 2 hours at the same time, the blocking condition of the vacuum pumps is reduced, the vacuum pumps cannot be simply repaired due to the blocking, and the return maintenance is carried out; after the novel pump stopping method is adopted, the ADXEN602H vacuum pump is only required to be stopped for 2 hours, and then whether the vacuum pump has the clamping stagnation phenomenon is checked, so that a large amount of manpower is saved in the process, and the vacuum pump is smoothly restored without the clamping stagnation phenomenon.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a flow chart of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The features and properties of the present invention are described in further detail below with reference to examples.
Example 1
The method for preventing the blockage of the vacuum pump after the vacuum pump is stopped provided by the preferred embodiment of the invention comprises the following steps:
(1) cooling the equipment: setting the heating temperature to be 200 ℃;
(2) opening the pre-pumping, and pumping the equipment to a vacuum state;
(3) opening the main pump, and pumping the internal pressure of the equipment to 0%;
(4) opening constant-pressure nitrogen, and continuously purging the vacuum pump;
(5) after the temperature of the equipment is reduced to below 200 ℃, the heating is closed, and the equipment is closed to keep the nitrogen at constant pressure;
(6) clicking a 'stop' vacuum pump once, and keeping the vacuum pump running at a low speed;
(7) whether each pump has abnormal sound or not is checked in the low-speed running process of the equipment, and the abnormal sound is processed in time;
(8) pressing the 'stop' vacuum pump again after 2 hours, stopping the vacuum pump, closing the cooling water, and closing the purging nitrogen of the vacuum pump; turning off a power supply of the vacuum pump, and turning off a tail hand exhaust valve of the vacuum pump;
(9) and after the power failure is carried out for 2 hours, further checking the vacuum pump by a manual disc pump to determine whether the vacuum pump has a clamping stagnation condition.
And (4) the low-speed running time of the vacuum pump in the step (6) is not less than two hours.
The vacuum pump is the model ADXEN602H vacuum pump.
The equipment is abundant coating equipment.
The working principle of the embodiment is as follows: the scheme is carried out according to the following steps in sequence,
1. cooling the abundant film coating equipment: setting the heating temperature to 200 ℃, and performing circulating cooling by using cooling water carried by the abundant coating equipment;
2. opening a pre-pumping valve, and pumping the equipment to a vacuum state by an ADXEN602H vacuum pump through a pre-pumping pipeline;
3. opening a main pumping valve, and simultaneously pumping the pressure PV value inside the equipment to 0 by an ADXEN602H vacuum pump through a pre-pumping pipeline and a main pumping pipeline;
4. opening the constant pressure N2, continuously purging the ADXEN602H vacuum pump, and synchronously purging the vacuum pump while cooling;
5. sequentially clicking 'SET', 'ENTER' to select 'SETTING', 'ENTER', selecting 'THERM, ADP T DEG', 'ENTER', selecting 'INPUT VALUE', 'ENTER', modifying SET VALUEs of 100 ℃ → 70 ℃, 'ENTER' and returning to a main interface by clicking 'SET';
6. and (3) after the temperature of the five temperature zones I, II, III, IV and V of the abundant coating equipment is reduced to below 200 ℃, turning off heating, breaking vacuum of the abundant coating equipment, turning off the abundant coating equipment at a constant pressure N2 when the pressure PV value rises to 1645 and a normal pressure indicator lamp is on, and further cooling the abundant coating equipment (the equipment is stopped for cooling below 80 ℃) for 4 hours.
7. The operation of an ADXEN602H vacuum pump can be synchronously carried out in the process of cooling the abundant coating equipment: clicking and pressing the CONTROL until X appears at the upper left corner of the display, clicking the stop vacuum pump once, and keeping the low-speed running state of the vacuum pump for 2 hours;
8. checking whether each pump has abnormal sound or not in the low-speed running process of the ADXEN602H vacuum pump, timely processing abnormal sound, and keeping the cooling water and purging N2 of the vacuum pump continuously opened;
9. after 2 hours, clicking the "stop" ADXEN602H vacuum pump again, stopping the operation of the ADXEN602H vacuum pump, closing the cooling water, and closing the purging nitrogen of the ADXEN602H vacuum pump; changing the set VALUE of INPUT VALUE back to 100 ℃, turning off the power supply and closing the tail exhaust hand valve;
10. after 2 hours of power down, one further check was made to confirm that the vacuum pump was stuck on ADXEN602H vacuum pump manual pan pump.
The scheme adopts a stepped cooling mode in the cooling process of the abundant coating equipment, and simultaneously performs uninterrupted purging on the ADXEN602H vacuum pump, so that the ADXEN602H vacuum pump is stopped after running at a low speed for more than 2 hours.
Compared with the previous pump stopping process, the pump stopping process has the advantages that the ADXEN602H vacuum pump is stopped for the first few times and the clamping stagnation phenomenon of the ADXEN602H vacuum pump occurs, the ADXEN602H vacuum pump is clamped to be returned to the factory for maintenance, and after the novel pump stopping method is adopted, the ADXEN602H vacuum pump is free of the clamping stagnation phenomenon, the recovery is smooth, and the clamping stagnation phenomenon is avoided.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (4)
1. A method for preventing a vacuum pump from being stuck after being stopped is started, and comprises the following steps:
(1) cooling the equipment: setting the heating temperature to be 200 ℃;
(2) opening the pre-pumping, and pumping the equipment to a vacuum state;
(3) opening the main pump, and pumping the internal pressure of the equipment to 0%;
the method is characterized by further comprising the following steps:
(4) opening constant-pressure nitrogen, and continuously purging the vacuum pump;
(5) after the temperature of the equipment is reduced to below 200 ℃, the heating is closed, and the equipment is closed to keep the nitrogen at constant pressure;
(6) clicking a 'stop' vacuum pump once, and keeping the vacuum pump running at a low speed;
(7) whether each pump has abnormal sound or not is checked in the low-speed running process of the equipment, and the abnormal sound is processed in time;
(8) pressing the 'stop' vacuum pump again after 2 hours, stopping the vacuum pump, closing the cooling water, and closing the purging nitrogen of the vacuum pump; turning off a power supply of the vacuum pump, and turning off a tail hand exhaust valve of the vacuum pump;
(9) and after the power failure is carried out for 2 hours, further checking the vacuum pump by a manual disc pump to determine whether the vacuum pump has a clamping stagnation condition.
2. The method for preventing the seizure of the vacuum pump after the stop thereof according to claim 1, wherein: and (4) the low-speed running time of the vacuum pump in the step (6) is not less than two hours.
3. The method for preventing the seizure of the vacuum pump after the stop thereof according to claim 1, wherein: the vacuum pump is the model ADXEN602H vacuum pump.
4. The method for preventing the seizure of the vacuum pump after the stop thereof according to claim 1, wherein: the equipment is abundant coating equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811640412.6A CN109737032B (en) | 2018-12-29 | 2018-12-29 | Anti-jamming method for restarting vacuum pump after stopping |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811640412.6A CN109737032B (en) | 2018-12-29 | 2018-12-29 | Anti-jamming method for restarting vacuum pump after stopping |
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| CN109737032B true CN109737032B (en) | 2020-02-11 |
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Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0382985A1 (en) * | 1989-02-13 | 1990-08-22 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Gas purge system |
| US6341615B1 (en) * | 2000-09-13 | 2002-01-29 | Air Products And Chemicals, Inc. | Self-cleaning vacuum purge system |
| KR101553286B1 (en) * | 2008-03-25 | 2015-09-15 | 어플라이드 머티어리얼스, 인코포레이티드 | Methods and apparatus for conserving electronic device manufacturing resources |
| CN104062153B (en) * | 2014-06-17 | 2016-08-31 | 中国船舶重工集团公司第七一八研究所 | Purging sampler and purging sampling method for gaseous impurity content analysis |
| CN204107930U (en) * | 2014-09-19 | 2015-01-21 | 浙江摩泰螺杆真空泵有限公司 | The cleaning system of screw vacuum pump |
| CN108405501A (en) * | 2018-06-06 | 2018-08-17 | 上海正帆科技股份有限公司 | Blowing pipeline device and process gas convey cleaning systems |
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