CN208632696U - A kind of polycrystalline ingot furnace vacuum plant - Google Patents
A kind of polycrystalline ingot furnace vacuum plant Download PDFInfo
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- CN208632696U CN208632696U CN201821303305.XU CN201821303305U CN208632696U CN 208632696 U CN208632696 U CN 208632696U CN 201821303305 U CN201821303305 U CN 201821303305U CN 208632696 U CN208632696 U CN 208632696U
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Abstract
The utility model discloses a kind of polycrystalline ingot furnace vacuum plants, including lobe pump and the first mechanical pump being connect with the lobe pump, the second mechanical pump, the rated power of second mechanical pump is less than the rated power of first mechanical pump, the lobe pump and first mechanical pump are co-located on working condition under vacuum mode, and second mechanical pump is in running order in the case where maintaining predetermined furnace pressure mode.Second mechanical pump of the rated power less than the first mechanical pump is connected in parallel by the first mechanical pump connected for existing lobe pump; so that lobe pump and first mechanical pump are co-located on working condition under vacuum mode; and in the case where being filled with protective gas after vacuum mode in maintenance furnace pressure; lesser second mechanical pump of unlatching volume electrical power; achieve the purpose that energy saving; and second mechanical pump industry can also be used as the stand-by pump of the first mechanical pump, improve the operational reliability of vacuum pump set.
Description
Technical field
The utility model relates to polycrystalline cast ingot technical fields, more particularly to a kind of polycrystalline ingot furnace vacuum plant.
Background technique
Due to the continuous maturation of photovoltaic cell technology, cost of electricity-generating declines to a great extent, to obtain more massive answer
With with irreplaceable role in terms of substitution new energy, protection environment.
And the continuous reduction of subsidy and constantly improve for photovoltaic module technology now with government to photovoltaic module, it is single
The cost of the photovoltaic module of position power obtains a sharp decline, and competition becomes more fierce in the industry.And the competition of photovoltaic module is main
It is the competition of unit power component cost and the competition of reliability.Photovoltaic module generally uses monocrystalline silicon or polysilicon to be made,
Therefore photovoltaic module competition have be greatly crystal silicon or polysilicon quality and cost competition.
During carrying out polycrystalline cast ingot, polycrystalline silicon purifying ingot furnace is the key that polycrystalline silicon purifying process dephosphorization is set
Standby, high temperature high vacuum is the critical process of dephosphorization, since heating temperature needs to reach 1600 DEG C or so during dephosphorization, largely
Silicon steam and the volatilization of other volatile matter moments, it is desirable that there is the vacuum pump set of high pumping rate to extract these impurity out and by vacuum degree
It is maintained at higher state.
Ingot furnace vacuum pump set uses lobe pump+mechanical pumping system in the prior art.When vacuum mode, lobe pump+machinery
Pump is operated together, and when being gradually filled with protective gas in furnace, vacuum pump set only opens mechanical pump.And in 90% or more time,
Furnace pressure is held in 300mmbar or more, will cause waste of energy using existing high-power machinery pump.
Utility model content
The purpose of the utility model is to provide a kind of polycrystalline ingot furnace vacuum plants, reduce the consumption of electric energy, improve fortune
Capable reliability.
In order to solve the above technical problems, the utility model embodiment provides a kind of polycrystalline ingot furnace vacuum plant, including
Lobe pump and the first mechanical pump connecting with the lobe pump, the second mechanical pump, the rated power of second mechanical pump are small
In the rated power of first mechanical pump, the lobe pump and first mechanical pump are co-located on work under vacuum mode
State, second mechanical pump are in running order in the case where maintaining predetermined furnace pressure mode.
Wherein, further include the state-detection switch being connect with first mechanical pump, second mechanical pump, be used for
Detect first mechanical pump or after second mechanical pump breaks down in the energized state, open do not open currently it is described
First mechanical pump or second mechanical pump.
Wherein, the rated power of second mechanical pump is the 1/3~1/2 of the rated power of first mechanical pump.
Wherein, further include state detector with first mechanical pump, second mechanical pump, for detecting described
One mechanical pump, second mechanical pump whether be in can working condition, and should be at the described of working condition under the current model
When first mechanical pump or second mechanical pump are not in working condition, start first mechanical pump that should work or described the
First mechanical pump or second mechanical pump that two mechanical pumps and closing should not work.
Wherein, second mechanical pump is connect with the lobe pump of multiple vacuum pump sets by total pipeline in parallel.
Wherein, multiple second mechanical pumps are connect with the total pipeline in parallel.
Wherein, the quantity of second mechanical pump is less than or equal to the quantity of the lobe pump.
Polycrystalline ingot furnace vacuum plant provided by the utility model embodiment has following excellent compared with prior art
Point:
The polycrystalline ingot furnace vacuum plant is connected in parallel specified by the first mechanical pump connected for existing lobe pump
Power less than the first mechanical pump the second mechanical pump so that lobe pump is co-located on first mechanical pump under vacuum mode
Working condition, and in the case where being filled with protective gas after vacuum mode in maintenance furnace pressure, it is smaller to open volume electrical power
The second mechanical pump, achieve the purpose that energy saving, and the second mechanical pump industry can also be used as the stand-by pump of the first mechanical pump,
Improve the operational reliability of vacuum pump set.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is this
Some embodiments of utility model, for those of ordinary skill in the art, without creative efforts, also
Other drawings may be obtained according to these drawings without any creative labor.
Fig. 1 is a kind of structure of specific embodiment of polycrystalline ingot furnace vacuum plant provided by the embodiment of the utility model
Schematic diagram.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Referring to FIG. 1, Fig. 1 is a kind of specific implementation of polycrystalline ingot furnace vacuum plant provided by the embodiment of the utility model
The structural schematic diagram of mode.
In a specific embodiment, the polycrystalline ingot furnace vacuum plant, including lobe pump 10 and with sieve
The first mechanical pump 20, the second mechanical pump 30 of 10 connection of thatch pump, the rated power of second mechanical pump 30 are less than described first
The rated power of mechanical pump 20, the lobe pump 10 are co-located on work shape with first mechanical pump 20 under vacuum mode
State, second mechanical pump 30 are in running order in the case where maintaining predetermined furnace pressure mode.
Rated power is connected in parallel less than the first mechanical pump by the first mechanical pump 20 connected for existing lobe pump 10
20 the second mechanical pump 30, so that lobe pump 10 and first mechanical pump 20 are co-located on working condition under vacuum mode,
And in the case where being filled with protective gas after vacuum mode in maintenance furnace pressure, it is mechanical to open volume electrical power lesser second
Pump 30, achievees the purpose that energy saving, and 30 industry of the second mechanical pump can also be used as the stand-by pump of the first mechanical pump 20, improves
The operational reliability of vacuum pump set.
In order to improve the automation efficiency of entire polycrystalline ingot furnace vacuum plant, operational reliability is improved, originally practical new
In one embodiment of type, the polycrystalline ingot furnace vacuum plant further includes and first mechanical pump 20, second machinery
The state-detection switch of 30 connection of pump, for detecting first mechanical pump 20 or second mechanical pump 30 in energization shape
After breaking down under state, first mechanical pump 20 or second mechanical pump 30 that do not open currently are opened.
By using state-detection switch, detect that first mechanical pump 20 or second mechanical pump 30 are being powered
After breaking down under state, first mechanical pump 20 or second mechanical pump 30 that do not open currently are opened, realizes first
It is switched over automatically after 30 outlet failure of mechanical pump 20 or second mechanical pump, without manually carrying out operation and checkout, and
And the testing result that should be obtained by state-detection switch and current mechanical pump operating status, staff can be timely
Position and repair out of order mechanical pump.
For example, the lobe pump 10 should be co-located on work shape with first mechanical pump 20 under vacuum mode
State, but state-detection switch detects first mechanical pump 20 cisco unity malfunction in the energized state, is automatically closed
First mechanical pump 20 starts the second mechanical pump 30, the first mechanical pump 20 can be in malfunction and externally exported, worked at the same time
Personnel are in malfunction according to the first mechanical pump 20 that state-detection switch exports and can be maintained in time, or
Staff should be the first mechanical pump 20 and be actually that the second mechanical pump 30 carries out according to what is worked, illustrate the first machine
Tool pump 20 is in malfunction, and safeguards to the first mechanical pump 20.
The second mechanical pump 30 can also be safeguarded in time in the case where maintaining furnace pressure state.
The utility model detects the first mechanical pump 20 for state-detection switch, the second mechanical pump 30 is in malfunction
Mode be not specifically limited, can be in the energized state its electric current with work normally under by it is larger difference and determine it and be in
The sound issued under failure or energized state is beyond the decibel range for working normally the sound issued, or other inspections
Survey mode.
The utility model is not specifically limited the power of the power and the first mechanical pump 20 of the second mechanical pump 30, as long as
The first mechanical pump 20 of relatively high power can be replaced to maintain the state of 300mmbar or more furnace pressure, general described second is mechanical
The rated power of pump 30 is the 1/3~1/2 of the rated power of first mechanical pump 20.
In one embodiment of the utility model, after opening lobe pump 10 and the first mechanical pump 20 opening valve, into
Row vacuumizes, so that polycrystalline ingot furnace is in vacuum mode, after vacuum mode terminates, closes lobe pump 10, opens first
Mechanical pump 20, and it is filled with protective gas, after furnace pressure reaches 300mmbar or more, the first mechanical pump 20 is closed, opens the second machine
Tool pump 30 maintains the furnace pressure of 300mmbar.
Wherein, further include state detector with first mechanical pump 20, second mechanical pump 30, for detecting
State the first mechanical pump 20, second mechanical pump 30 whether be in can working condition, and should be at work shape under the current model
When first mechanical pump 20 or second mechanical pump 30 of state are not in working condition, start first machine that should be worked
Tool pumps 20 or described second mechanical pumps 30 and closes first mechanical pump 20 or second mechanical pump 30 that should not be worked.
Polycrystalline ingot furnace vacuum plant in the utility model, the main problem faced are to increase by 30 needs of the second mechanical pump
Exhaust branch pipeline is added, is transformed and uncomplicated, therefore increased cost is very limited.
In order to further increase the utilization efficiency of the second mechanical pump 30, reduce cost, general second mechanical pump 30 with
The lobe pump 10 of multiple vacuum pump sets passes through total pipeline connection in parallel.
The second mechanical pump 30 is connect with multiple vacuum pump sets, to multiple and different vacuum in such a way that timesharing uses
Unit carries out furnace pressure maintenance and the mechanical pump as backup and shares making for the second mechanical pump 30 to further decrease energy consumption
With cost and improve service efficiency.
And in order to further increase service efficiency and reliability, multiple second mechanical pumps 30 and the general pipeline in parallel
Road connection.
For the quantitative relation of the second mechanical pump 30 and lobe pump 10 or the first mechanical pump 20, one-to-one correspondence can be,
It can be quantity of the quantity less than the first machinery or lobe pump 10, to reduce use cost, the utility model is for the second machine
It the quantity of tool pump 30 and is not especially limited with the quantitative proportion of lobe pump 10, therefore, general second mechanical pump 30
Quantity is less than or equal to the quantity of the lobe pump 10.
In conclusion polycrystalline ingot furnace vacuum plant provided by the embodiment of the utility model, by for existing lobe pump
First mechanical pump of connection is connected in parallel second mechanical pump of the rated power less than the first mechanical pump, so that sieve under vacuum mode
Thatch pump is co-located on working condition with first mechanical pump, and is filled with protective gas after vacuum mode and is in maintenance furnace
In the case where pressure, lesser second mechanical pump of volume electrical power is opened, achievees the purpose that energy saving, and the second mechanical pump industry
The stand-by pump that can be used as the first mechanical pump improves the operational reliability of vacuum pump set.
Polycrystalline ingot furnace vacuum plant provided by the utility model is described in detail above.It is used herein
Specific case is expounded the principles of the present invention and embodiment, and the explanation of above example is only intended to help to manage
Solve the method and its core concept of the utility model.It should be pointed out that for those skilled in the art, not
Under the premise of being detached from the utility model principle, several improvements and modifications can be made to this utility model, these improve and repair
Decorations are also fallen into the protection scope of the utility model claims.
Claims (7)
1. a kind of polycrystalline ingot furnace vacuum plant, which is characterized in that including lobe pump and connect with the lobe pump first
Mechanical pump, the second mechanical pump, the rated power of second mechanical pump are less than the rated power of first mechanical pump, sieve
Thatch pump is co-located on working condition with first mechanical pump under vacuum mode, and second mechanical pump is maintaining predetermined furnace pressure
It is in running order under mode.
2. polycrystalline ingot furnace vacuum plant as described in claim 1, which is characterized in that further include and first mechanical pump, institute
The state-detection switch for stating the connection of the second mechanical pump, for detecting first mechanical pump or second mechanical pump logical
After breaking down under electricity condition, first mechanical pump or second mechanical pump that do not open currently are opened.
3. polycrystalline ingot furnace vacuum plant as claimed in claim 2, which is characterized in that the rated power of second mechanical pump is
The 1/3~1/2 of the rated power of first mechanical pump.
4. polycrystalline ingot furnace vacuum plant as claimed in claim 3, which is characterized in that further include and first mechanical pump, institute
State the second mechanical pump connection state detector, for detect first mechanical pump, whether second mechanical pump is in can
Working condition, and should be at first mechanical pump of working condition under the current model or second mechanical pump is not in work
When making state, starts first mechanical pump that should be worked or second mechanical pump and close first machine that should not be worked
Tool pump or second mechanical pump.
5. polycrystalline ingot furnace vacuum plant as claimed in claim 4, which is characterized in that second mechanical pump and multiple vacuum machines
The lobe pump of group passes through total pipeline connection in parallel.
6. polycrystalline ingot furnace vacuum plant as claimed in claim 5, which is characterized in that multiple second mechanical pumps and it is described simultaneously
Join total pipeline connection.
7. polycrystalline ingot furnace vacuum plant as claimed in claim 6, which is characterized in that the quantity of second mechanical pump be less than etc.
In the quantity of the lobe pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821303305.XU CN208632696U (en) | 2018-08-13 | 2018-08-13 | A kind of polycrystalline ingot furnace vacuum plant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821303305.XU CN208632696U (en) | 2018-08-13 | 2018-08-13 | A kind of polycrystalline ingot furnace vacuum plant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208632696U true CN208632696U (en) | 2019-03-22 |
Family
ID=65743192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821303305.XU Active CN208632696U (en) | 2018-08-13 | 2018-08-13 | A kind of polycrystalline ingot furnace vacuum plant |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208632696U (en) |
-
2018
- 2018-08-13 CN CN201821303305.XU patent/CN208632696U/en active Active
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