CN109712923B - 一种晶圆周转装置及晶圆周转方法 - Google Patents
一种晶圆周转装置及晶圆周转方法 Download PDFInfo
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- CN109712923B CN109712923B CN201811622408.7A CN201811622408A CN109712923B CN 109712923 B CN109712923 B CN 109712923B CN 201811622408 A CN201811622408 A CN 201811622408A CN 109712923 B CN109712923 B CN 109712923B
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- 238000000034 method Methods 0.000 title claims abstract description 23
- 235000012431 wafers Nutrition 0.000 claims abstract description 488
- 230000007246 mechanism Effects 0.000 claims abstract description 88
- 238000012546 transfer Methods 0.000 claims abstract description 34
- 238000012545 processing Methods 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims 1
- 230000007306 turnover Effects 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 description 18
- 238000005240 physical vapour deposition Methods 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Application Number | Priority Date | Filing Date | Title |
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CN201811599687 | 2018-12-26 | ||
CN201811599687X | 2018-12-26 |
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CN109712923A CN109712923A (zh) | 2019-05-03 |
CN109712923B true CN109712923B (zh) | 2020-12-11 |
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CN201811622408.7A Active CN109712923B (zh) | 2018-12-26 | 2018-12-28 | 一种晶圆周转装置及晶圆周转方法 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111029287B (zh) * | 2019-11-29 | 2021-01-12 | 上海福赛特机器人有限公司 | 晶圆自动上下片系统 |
US20230104871A1 (en) * | 2020-02-19 | 2023-04-06 | Mao-Yen Sung | Wafer carrier disc installation/uninstallation device and installation/uninstallation method thereof |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI274393B (en) * | 2002-04-08 | 2007-02-21 | Acm Res Inc | Electropolishing and/or electroplating apparatus and methods |
JP2004297040A (ja) * | 2003-03-12 | 2004-10-21 | Seiko Epson Corp | 移載装置、搬送装置及び移載方法 |
CN201017864Y (zh) * | 2007-03-28 | 2008-02-06 | 沈阳芯源先进半导体技术有限公司 | 一种晶片自动定位控制装置 |
CN106558526B (zh) * | 2016-05-24 | 2019-09-13 | 芯导精密(北京)设备有限公司 | 一种自带晶圆寻边传感器的机械手 |
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Address after: 200233 room 1101, building 2, No. 188, Yizhou Road, Xuhui District, Shanghai Applicant after: SHANGHAI FORESIGHT ROBOTICS Co.,Ltd. Address before: Room 305-308, Kaike International Building, Area A, 1801 Hongmei Road, Xuhui District, Shanghai, 2003 Applicant before: SHANGHAI FORESIGHT ROBOTICS Co.,Ltd. |
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CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 201702 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee after: Shanghai Forsyte Robot Co.,Ltd. Address before: Room 1101, building 2, 188 Yizhou Road, Xuhui District, Shanghai Patentee before: SHANGHAI FORESIGHT ROBOTICS Co.,Ltd. |
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CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 201712 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee after: Shanghai Fosaite Technology Co.,Ltd. Country or region after: China Address before: 201702 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee before: Shanghai Forsyte Robot Co.,Ltd. Country or region before: China |