CN109705004A - A kind of photoresist stripper Mead-Bauer recovery system - Google Patents
A kind of photoresist stripper Mead-Bauer recovery system Download PDFInfo
- Publication number
- CN109705004A CN109705004A CN201910130303.8A CN201910130303A CN109705004A CN 109705004 A CN109705004 A CN 109705004A CN 201910130303 A CN201910130303 A CN 201910130303A CN 109705004 A CN109705004 A CN 109705004A
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- Prior art keywords
- stripper
- tank
- rectifying
- rectifying tower
- mead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 28
- 238000011084 recovery Methods 0.000 title claims abstract description 16
- 239000007788 liquid Substances 0.000 claims abstract description 29
- 239000011347 resin Substances 0.000 claims abstract description 15
- 229920005989 resin Polymers 0.000 claims abstract description 15
- 239000002826 coolant Substances 0.000 claims abstract description 14
- 230000002745 absorbent Effects 0.000 claims abstract description 13
- 239000002250 absorbent Substances 0.000 claims abstract description 13
- 239000002699 waste material Substances 0.000 claims abstract description 12
- 239000003957 anion exchange resin Substances 0.000 claims description 6
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000003729 cation exchange resin Substances 0.000 claims description 5
- 150000001450 anions Chemical class 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 238000005341 cation exchange Methods 0.000 claims 1
- 230000018044 dehydration Effects 0.000 claims 1
- 238000006297 dehydration reaction Methods 0.000 claims 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 abstract description 14
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 abstract description 12
- 239000000047 product Substances 0.000 abstract description 12
- 229940031098 ethanolamine Drugs 0.000 abstract description 7
- 239000012467 final product Substances 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 abstract description 2
- 238000004064 recycling Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 5
- 239000012071 phase Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000003196 chaotropic effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000003495 polar organic solvent Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
The present invention relates to a kind of photoresist stripper Mead-Bauer recovery systems, it includes: level-one rectifying component, the level-one rectifying component include the dehydrating tower being connected at the top of rectifying tower body, the rectifying tower reactor that rectifying tower body bottom is set, bottom and the rectifying column, with the cooler being connected at the top of the dehydrating tower and the coolant liquid collecting tank being connected with the cooler；Stripper concentration tank, the stripper concentration tank are connected by the first elevator pump with the rectifying tower reactor；Stripper surge tank, the stripper surge tank are connected by the second elevator pump with the rectifying tower reactor, for accepting stripper waste liquid and being delivered in the rectifying tower reactor by second elevator pump；Resin Absorbent component；Finished product preparation group.The recycling to dimethyl sulfoxide, ethanol amine in photoresist stripper waste liquid can be effectively realized in this way, and dimethyl sulfoxide, the ethanol amine final product quality obtained is more excellent, it can directly be used after simple allotment, advantageously reduce cost and improve the service efficiency of stripper.
Description
Technical field
The invention belongs to photoresist stripper devil liquor recovery fields, are related to a kind of recovery system, and in particular to a kind of photoresist stripping
Chaotropic Mead-Bauer recovery system.
Background technique
In silica-base material manufacturing process, the coating of photoresist, benefit are usually first formed on the material surfaces such as silica, Cu
It is exposed, developed with mask appropriate, according to the characteristic of photoresist used, remove the photoresist of exposure or unexposed portion,
Required position forms photoresist pattern, and plasma etching or reactant gas etching are then carried out on the photoresist pattern, into
Row pattern transfer.
Photoresist stripper is removed for that will be coated on microcircuit protection zone as the photoresist of exposure mask, it is silica-base material
Common chemicals needed for chip carries out photoresist Process of Chemical Cleaning, mainly by groups such as organic amine, polar organic solvent and/or water
At.The a large amount of organic solvent of content (such as dimethyl sulfoxide, ethanol amine) in the waste water generated after photoresist stripper use, if
Direct emission can generate environment and greatly destroy；If directly committee is outer, it can not be efficiently used, virtually be increased
The production cost of enterprise.
Summary of the invention
A kind of photoresist stripper Mead-Bauer recovery system is provided the invention aims to overcome the deficiencies in the prior art.
In order to achieve the above objectives, the technical solution adopted by the present invention is that: a kind of photoresist stripper Mead-Bauer recovery system, it wrap
It includes:
Level-one rectifying component, the level-one rectifying component include rectifying tower body, the rectifying column that rectifying tower body bottom is arranged in
The dehydrating tower that is connected at the top of kettle, bottom and the rectifying column, the cooler being connected with the dehydrating tower top and with institute
State the coolant liquid collecting tank that cooler is connected；
Stripper concentration tank, the stripper concentration tank are connected by the first elevator pump with the rectifying tower reactor；
Stripper surge tank, the stripper surge tank is connected by the second elevator pump with the rectifying tower reactor, for accepting
Stripper waste liquid is simultaneously delivered in the rectifying tower reactor by second elevator pump；
Resin Absorbent component, the Resin Absorbent component are connected with the coolant liquid collecting tank by third elevator pump, are used for
Remove the anions and canons in coolant liquid；
Finished product dispensing assembly, the finished product dispensing assembly include the fraction collection tank being connected with the Resin Absorbent component.
Optimally, the finished product dispensing assembly further include the mixed tank being connected with the fraction collection tank, with it is described at
The first head tank that product tank is connected and the second head tank being connected with the finished pot.
Further, the finished product dispensing assembly further includes the first online concentration inspection being mounted on the fraction collection tank
The the second online concentration detector surveying instrument and being mounted on the mixed tank.
Optimally, the Resin Absorbent component include the cation exchange resin tower that is connected with the third elevator pump with
And the anion exchange resin tower being connected with the cation exchange resin tower bottom, the anion exchange resin tower and institute
Fraction collection tank is stated to be connected.
Optimally, the stripper concentration tank is also connected with the waste liquid treatment tank in downstream.
Due to the above technical solutions, the present invention has the following advantages over the prior art: photoresist removing of the present invention
Liquid Mead-Bauer recovery system, by carrying out the operations such as rectifying concentration, resin adsorption, finished product preparation to photoresist stripper waste liquid, in this way
It can effectively realize the recycling to dimethyl sulfoxide, ethanol amine in photoresist stripper waste liquid, and the dimethyl obtained is sub-
Sulfone, ethanol amine final product quality are more excellent, can directly use after simple allotment, advantageously reduce cost and improve the use of stripper
Efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of photoresist stripper Mead-Bauer recovery system of the present invention.
Specific embodiment
The preferred embodiment of the invention is described in detail below in conjunction with attached drawing:
Photoresist stripper Mead-Bauer recovery system as shown in Figure 1 mainly includes level-one rectifying component 1, stripper concentration tank 2, stripping
Chaotropic surge tank 3, Resin Absorbent component 4 and finished product dispensing assembly 5 etc..
Wherein, level-one rectifying component 1 includes rectifying tower body 11, rectifying tower reactor 12, dehydrating tower 13, cooler 14 and coolant liquid
The structures such as collecting tank 15；Rectifying tower body 11 can be it is one or more (when rectifying tower body 11 is multiple, they be sequentially connected in series and
Be conducive to improve the purity of rectifying), each rectifying tower body 11 passes through the sequentially connected tower section of ring flange comprising multiple；Rectifying tower reactor
12 are generally arranged at the bottom of rectifying tower body 11 to provide power (i.e. by the object in rectifying tower reactor 12 for rectifying mass-and heat-transfer
Matter is heated, to generate the gas phase in rectifying column in gas-liquid two-phase, gas phase is contacted with the liquid phase of decline, to realize mass transfer
The process of heat transfer)；The bottom of dehydrating tower 13 usually passes through pipeline (similarly hereinafter) with the top of rectifying column 11 and is connected, in dehydrating tower 13
Filled with molecular sieve for removing the moisture content in stripper；Cooler 14 is connected by pipeline with the top of dehydrating tower 13,
For cooling down the stripper component after rectifying；Coolant liquid collecting tank 15 is then connected by pipeline with cooler 14, for accepting
Through treated the stripper component (i.e. coolant liquid) of cooler 14.Stripper concentration tank 2 passes through the first elevator pump 21 and rectifying column
Kettle 12 is connected (connection of each equipment is also to be realized by pipeline, similarly hereinafter), its waste liquid treatment tank phase usually also with downstream
Connection, with for accepting the removing concentrated liquor generated in rectifying tower reactor 12, in this way when in stripper concentration tank 2 concentrate reach
It is introduced directly into outside the waste liquid treatment tank Central Committee and handles when a certain amount.Stripper surge tank 3 passes through the second elevator pump 31 and rectifying column
Kettle 12 is connected, and is directly used in and accepts stripper waste liquid and be delivered in rectifying tower reactor 12 by the second elevator pump 31, will hold
The stripper waste liquid connect carries out rectification process.Resin Absorbent component 4 is connected by third elevator pump 40 with coolant liquid collecting tank 15
It is logical, for carrying out ionic adsorption processing to coolant liquid derived from coolant liquid collecting tank 15, thus remove the yin in coolant liquid,
Cation is to improve its quality and purity.Finished product dispensing assembly 5 includes the fraction collection tank being connected with Resin Absorbent component 4
51, for accepting through treated the fraction (the usually mixture of dimethyl sulfoxide, ethanol amine) of Resin Absorbent component 4.
In the present embodiment, finished product dispensing assembly 5 further includes the mixed tank 55 and finished product being connected with fraction collection tank 51
The first head tank 53 that tank 55 is connected and second the first head tank of head tank 54(53 and second being connected with finished pot 55
Head tank 54 is respectively used to hold dimethyl sulfoxide, ethanol amine), fraction (the fraction group after measured in such fraction collection tank 51
At) can be compounded and deposited into mixed tank 55 with the raw material in the first head tank 53, the second head tank 54, directly as light
It hinders stripper to use, above-mentioned compound process can be artificial progress.It is more preferably carried out by the way of automation control, at this time
Finished product dispensing assembly 5 can also include the first online concentration detector 52(i.e. refractometer being mounted on fraction collection tank 51, such as
Commercially available TY-100A, PRM-100 α etc., similarly hereinafter) and the second online concentration detector 56(first for being mounted on mixed tank 55
Online concentration detector 52 and the second online concentration detector 56 are realized by measurement solution refractive index (nD) this optical parameter
The measurement of dissolved matter concentration in liquid)；At this time can by the first online concentration detector 52, the second online concentration detector 56 with
Same single-chip microcontroller (such as commercially available ULN2003 chip) is connected, and (mixed tank 55 and the first head tank 53, evaporate second head tank 54
Divide between collecting tank 51 and be connected separately with feed pump), which is also connected to control it and open respectively with above-mentioned feed pump
It closes or aperture, such single-chip microcontroller can receive the letter of the first online concentration detector 52, the second online transmission of concentration detector 56
Number and control whether working for each feed pump, thus realize photoresist stripper automation prepare.In the present embodiment, resin is inhaled
Receive component 4 include the cation exchange resin tower 41 being connected with third elevator pump 40 and with 41 bottom of cation exchange resin tower
The anion exchange resin tower 42 that portion is connected, so that anion exchange resin tower 42 is connected with fraction collection tank 51, to mention
Adsorption effect of the height to ion each in fraction.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar cans understand the content of the present invention and implement it accordingly, and it is not intended to limit the scope of the present invention, it is all according to the present invention
Equivalent change or modification made by Spirit Essence, should be covered by the protection scope of the present invention.
Claims (5)
1. a kind of photoresist stripper Mead-Bauer recovery system, which is characterized in that it includes:
Level-one rectifying component (1), the level-one rectifying component (1) include rectifying tower body (11), are arranged in the rectifying tower body
(11) dehydrating tower (13) being connected at the top of the rectifying tower reactor (12) of bottom, bottom and the rectifying column (11) and the dehydration
The cooler (14) being connected and the coolant liquid collecting tank (15) being connected with the cooler (14) at the top of tower (13)；
Stripper concentration tank (2), the stripper concentration tank (2) pass through the first elevator pump (21) and the rectifying tower reactor (12) phase
Connection；
Stripper surge tank (3), the stripper surge tank (3) pass through the second elevator pump (31) and the rectifying tower reactor (12) phase
Connection, for accepting stripper waste liquid and being delivered in the rectifying tower reactor (12) by second elevator pump (31)；
Resin Absorbent component (4), the Resin Absorbent component (4) pass through third elevator pump (40) and the coolant liquid collecting tank
(15) it is connected, for removing the anions and canons in coolant liquid；
Finished product dispensing assembly (5), the finished product dispensing assembly (5) include the fraction being connected with the Resin Absorbent component (4)
Collecting tank (51).
2. photoresist stripper Mead-Bauer recovery system according to claim 1, it is characterised in that: the finished product dispensing assembly
It (5) further include the mixed tank (55) being connected with the fraction collection tank (51), be connected with the finished pot (55) first
Head tank (53) and the second head tank (54) being connected with the finished pot (55).
3. photoresist stripper Mead-Bauer recovery system according to claim 2, it is characterised in that: the finished product dispensing assembly
(5) further include the first online concentration detector (52) being mounted on the fraction collection tank (51) and be mounted on the mixture
The second online concentration detector (56) on tank (55).
4. photoresist stripper Mead-Bauer recovery system according to claim 1, it is characterised in that: the Resin Absorbent component
(4) include the cation exchange resin tower (41) being connected with the third elevator pump (40) and with the cation exchange tree
The anion exchange resin tower (42) that rouge tower (41) bottom is connected, the anion exchange resin tower (42) and the fraction are received
Collection tank (51) is connected.
5. photoresist stripper Mead-Bauer recovery system according to claim 1, it is characterised in that: the stripper concentration tank
(2) also it is connected with the waste liquid treatment tank in downstream.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910130303.8A CN109705004A (en) | 2019-02-21 | 2019-02-21 | A kind of photoresist stripper Mead-Bauer recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910130303.8A CN109705004A (en) | 2019-02-21 | 2019-02-21 | A kind of photoresist stripper Mead-Bauer recovery system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109705004A true CN109705004A (en) | 2019-05-03 |
Family
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|---|---|---|---|
| CN201910130303.8A Withdrawn CN109705004A (en) | 2019-02-21 | 2019-02-21 | A kind of photoresist stripper Mead-Bauer recovery system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111848367A (en) * | 2020-08-06 | 2020-10-30 | 昆山德源环保发展有限公司 | Method for purifying stripping liquid waste liquid |
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2019
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