CN108568131A - A kind of stripper regenerating unit and regeneration technology - Google Patents
A kind of stripper regenerating unit and regeneration technology Download PDFInfo
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- CN108568131A CN108568131A CN201810452672.4A CN201810452672A CN108568131A CN 108568131 A CN108568131 A CN 108568131A CN 201810452672 A CN201810452672 A CN 201810452672A CN 108568131 A CN108568131 A CN 108568131A
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- Prior art keywords
- stripper
- rectifying column
- pump
- level
- waste liquid
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- 230000001172 regenerating effect Effects 0.000 title claims abstract description 29
- 230000008929 regeneration Effects 0.000 title claims abstract description 27
- 238000011069 regeneration method Methods 0.000 title claims abstract description 27
- 238000005516 engineering process Methods 0.000 title claims abstract description 17
- 239000007788 liquid Substances 0.000 claims abstract description 161
- 239000002699 waste material Substances 0.000 claims abstract description 115
- 239000010409 thin film Substances 0.000 claims abstract description 103
- 230000018044 dehydration Effects 0.000 claims abstract description 89
- 238000006297 dehydration reaction Methods 0.000 claims abstract description 89
- 230000008018 melting Effects 0.000 claims abstract description 39
- 238000002844 melting Methods 0.000 claims abstract description 39
- 238000005374 membrane filtration Methods 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims abstract description 22
- 239000010808 liquid waste Substances 0.000 claims abstract description 13
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 177
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims description 74
- 239000000945 filler Substances 0.000 claims description 46
- 229940031098 ethanolamine Drugs 0.000 claims description 36
- 239000010408 film Substances 0.000 claims description 34
- 238000010992 reflux Methods 0.000 claims description 24
- 239000012510 hollow fiber Substances 0.000 claims description 21
- 238000000926 separation method Methods 0.000 claims description 19
- 238000003860 storage Methods 0.000 claims description 17
- 238000007599 discharging Methods 0.000 claims description 15
- 238000000605 extraction Methods 0.000 claims description 9
- 239000011552 falling film Substances 0.000 claims description 7
- 238000000746 purification Methods 0.000 claims description 7
- 238000009833 condensation Methods 0.000 claims description 6
- 230000005494 condensation Effects 0.000 claims description 6
- 239000002351 wastewater Substances 0.000 claims description 6
- 230000003196 chaotropic effect Effects 0.000 claims description 4
- 229910021645 metal ion Inorganic materials 0.000 claims description 4
- 238000010025 steaming Methods 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 28
- 238000004064 recycling Methods 0.000 abstract description 9
- 229960001760 dimethyl sulfoxide Drugs 0.000 description 39
- 238000013461 design Methods 0.000 description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Natural products CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- -1 Ethyl alcohol amine Chemical class 0.000 description 6
- 235000019441 ethanol Nutrition 0.000 description 6
- 238000009834 vaporization Methods 0.000 description 5
- 230000008016 vaporization Effects 0.000 description 5
- 239000004480 active ingredient Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000003595 mist Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 3
- 238000000889 atomisation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000003912 environmental pollution Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 239000002932 luster Substances 0.000 description 3
- 238000003723 Smelting Methods 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000002045 lasting effect Effects 0.000 description 2
- 229910001338 liquidmetal Inorganic materials 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000003495 polar organic solvent Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 239000011342 resin composition Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000008542 thermal sensitivity Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- PVXVWWANJIWJOO-UHFFFAOYSA-N 1-(1,3-benzodioxol-5-yl)-N-ethylpropan-2-amine Chemical compound CCNC(C)CC1=CC=C2OCOC2=C1 PVXVWWANJIWJOO-UHFFFAOYSA-N 0.000 description 1
- QMMZSJPSPRTHGB-UHFFFAOYSA-N MDEA Natural products CC(C)CCCCC=CCC=CC(O)=O QMMZSJPSPRTHGB-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- ZZVUWRFHKOJYTH-UHFFFAOYSA-N diphenhydramine Chemical compound C=1C=CC=CC=1C(OCCN(C)C)C1=CC=CC=C1 ZZVUWRFHKOJYTH-UHFFFAOYSA-N 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- WFKAJVHLWXSISD-UHFFFAOYSA-N isobutyramide Chemical compound CC(C)C(N)=O WFKAJVHLWXSISD-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/14—Fractional distillation or use of a fractionation or rectification column
- B01D3/143—Fractional distillation or use of a fractionation or rectification column by two or more of a fractionation, separation or rectification step
- B01D3/145—One step being separation by permeation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/14—Fractional distillation or use of a fractionation or rectification column
- B01D3/143—Fractional distillation or use of a fractionation or rectification column by two or more of a fractionation, separation or rectification step
- B01D3/148—Fractional distillation or use of a fractionation or rectification column by two or more of a fractionation, separation or rectification step in combination with at least one evaporator
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The present invention relates to a kind of stripper regenerating unit and regeneration technologies, the apparatus structure being related to includes dehydration rectifying column, thin film evaporator and the decoloration rectifying column set gradually along stripper waste liquid purifying technique stripper flow direction, and dehydration rectifying column feed inlet end is provided with the stripper waste liquid melting pond to connect successively and level-one membrane filtration pond.The present invention helps to improve stripper entirety regeneration efficiency and stripper end yield, meets the recycling demand of photoresist lift off liquid waste liquid.
Description
Technical field
The present invention relates to stripper technical field of regeneration, more particularly to a kind of stripper regenerating unit and regeneration technology.
Background technology
Domestic electronic manufacture industry development is rapid, and the usage amount of the electronic chemical products such as stripper is made to increase considerably.Liquid crystal
During the Electronic Components Manufacturings such as display panel, semiconductor integrated circuit, microcircuit will be coated in stripper by, which needing, protects
It is removed as the photoresist of mask on region, the mixing that usually used stripper is made of organic amine and polar organic solvent
Object, and containing on a small quantity using moisture as the light component of representative.Above-mentioned organic amine includes monoethanolamine（MEA）, dimethylacetylamide
（DMAC）, N-METHYLFORMAMIDE（NMF）Or N methyldiethanol amine（MDEA）Deng；Polar organic solvent includes diethylene glycol dimethyl ether
（DGME）, diethylene glycol monobutyl ether（DGBE）Or dimethyl sulfoxide (DMSO)（DMSO）Deng.When being removed to photoresist using stripper
A large amount of stripper waste liquids are will produce, in addition to containing a small amount of macromolecule resin in stripper waste liquid（Or PR glue）Except water, big portion
It is the organic component for having recycle value to divide.Usually cleaning photoresist needs a large amount of solvent, and these solvents are expensive straight
Run in the operating cost for putting and be easy to causeing serious environmental pollution, and improving enterprise.
In existing photoresist removal technique, the mainstream stripper component used includes 70% ethanol amine and 30% dimethyl
Sulfoxide；Stripper is stripper waste liquid after the completion of photoresist cleaning, and the component of stripper waste liquid includes water, photoresist, second
Hydramine and dimethyl sulfoxide (DMSO)；Ethyl alcohol amine content is close to 70% in desired component after recycling, and dimethyl sulfoxide (DMSO) is close to 30%, water
Divide content ＜ 0.2%, photoresist is not detected and other metal ion contents are PPB grades.
When carrying out stripper spent solution regeneration using the prior art, whole regeneration efficiency is low, and yield is not high, influences photoresist
The recycling effect of stripper waste liquid.
Invention content
The object of the present invention is to existing stripper thin stillage recycling regeneration techniques, design is a kind of
Stripper regenerating unit and regeneration technology improve stripper entirety regeneration efficiency and stripper end yield, meet photoresist lift off
The recycling demand of liquid waste liquid.
The invention is realized by the following technical scheme：
A kind of stripper regeneration technology, which is characterized in that include the following steps：
Step 1）It is pumped using feedstock（11）Stripper waste liquid is pumped to stripper waste liquid melting pond（12）, stripper waste liquid
In stripper waste liquid melting pond（12）Interior completion melting liquefaction, obtains liquefied level-one stripper waste liquid completely；
Step 2）Using waste liquid delivery pump（13）By step 1）In completely liquefied level-one stripper waste liquid be pumped to level-one film mistake
Filter tank（14）Inside, using level-one membrane filtration pond（14）Membrane filtration separation is carried out to the metal ion of input, obtains two level stripping
Liquid waste liquid；
Step 3）Using atomizer pump（15）By step 2）The two level stripper waste liquid of middle acquisition is pumped to dehydration rectifying column（1）It is interior
Portion, using dehydration rectifying column（1）The two level stripper waste liquid of input is carried out dehydrating, primary concentration liquid is obtained；
Step 4）Using thin film evaporator（2）To step 3）The primary concentration liquid obtained after middle dehydration is evaporated separation, obtains
Group be divided into the secondary concentration liquid of ethanol amine and dimethyl sulfoxide (DMSO) via thin film evaporator（2）Output；
Step 5）Using decoloration rectifying column（3）To step 4）In via thin film evaporator（2）The secondary concentration liquid of output is taken off
Colour purity, the group obtained after decoloration is divided into ethanol amine and the stripper of dimethyl sulfoxide (DMSO) purifies product in treating column condenser（33）It is interior
Condensation is completed, the stripper purification product obtained after condensation are stored to treating column return tank（34）, storage to treating column return tank
（34）Via treating column reflux pump（35）Enter online blender afterwards（4）, the stripper purification product of input are in online blender（4）
The allotment of ethanol amine and dimethyl sulfoxide (DMSO) ratio is completed in inside, obtains ethanol amine：Dimethyl sulfoxide (DMSO) is 7：3 stripper regeneration
Product；
The stripper waste liquid melting pond（12）It is externally provided with the temperature control system controlled via PLC controller；
The thin film evaporator（2）It is circumscribed with stripper sterling atomizer pump（24）, stripper sterling atomizer pump（24）External stripping
Liquid sterling holding vessel（2401）, the step 4）In utilizing thin film evaporator（2）When being evaporated separation to primary concentration liquid,
Stripper sterling atomizer pump（24）Constantly from stripper sterling holding vessel（2401）Middle extraction stripper is simultaneously pumped to film steaming
Send out device（2）Inner surface；
Level-one membrane filtration pond（14）It has been internally integrated hollow fiber film assembly；
The atomizer pump（15）With dehydration rectifying column（1）Between preheater is set（16）, preheater（16）Outlet end passes through branch
Pipeline is respectively communicated to dehydration rectifying column（1）And thin film evaporator（2）；
The dehydration rectifying column（1）Bottom is connected with dehydrating tower circulating pump（18）, dehydrating tower circulating pump（18）Outlet end is by dividing
Bye-pass and dehydration reboiler（17）Connection is dehydrated reboiler（17）Outlet end is connected to dehydration rectifying column（1）, dehydrating tower cycle
Pump（18）Outlet end passes through branch line and preheater（16）Connection；
The dehydration rectifying column（1）Top exit end connects dehydrating tower condenser（101）, dehydrating tower condenser（101）External one
Grade goes vacuum system（104）, dehydrating tower condenser（101）Bottom connects dehydrating tower return tank（102）, dehydrating tower return tank
（102）Bottom connects dehydrating tower reflux pump（103）, dehydrating tower reflux pump（103）It is respectively connected to dehydration essence by branch line
Evaporate tower（1）With level-one technique waste water delivery valve（105）；
The thin film evaporator（2）Storage tank in residue is arranged in bottom（21）, storage tank in residue（21）Residue discharging pump is arranged in bottom
（22）, residue discharging pump（22）Residue discharge valve is arranged in outlet end（23）；
The decoloration rectifying column（3）Rectifying tower reboiler is arranged in lower left side（31）, rectifying tower reboiler（31）Outlet end is connected to
Decolourize rectifying column（3）, decolourize rectifying column（3）Rectifying column circulating pump is arranged in bottom end（32）, rectifying column circulating pump（32）Outlet end
It is respectively connected to thin film evaporator by branch line（2）With rectifying tower reboiler（31）；
The treating column condenser（33）External two level goes vacuum system；
The online blender（4）External ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）.
Further, the dehydration rectifying column（1）Tower top pressure control in 8 ~ 10Kpa.
Further, the dehydration rectifying column（1）The sensitive plate temperature of dehydrating tower control at 58 ~ 65 DEG C.
Further, the dehydrating tower circulating pump（18）For canned motor pump.
A kind of stripper regenerating unit, which is characterized in that structure includes：It is flowed along stripper waste liquid purifying technique stripper
The dehydration rectifying column that direction is set gradually（1）, thin film evaporator（2）With decoloration rectifying column（3）；
The dehydration rectifying column（1）Feed inlet end is provided with the stripper waste liquid melting pond to connect successively（12）With level-one membrane filtration
Pond（14）；
The stripper waste liquid melting pond（12）, level-one membrane filtration pond（14）, dehydration rectifying column（1）, thin film evaporator（2）And it is de-
Color rectifying column（3）It is sequentially communicated along stripper waste liquid flow direction；
The stripper waste liquid melting pond（12）Feed inlet end is arranged feedstock and pumps（11）, level-one membrane filtration pond（14）Feed inlet
End setting waste liquid delivery pump（13）, it is dehydrated rectifying column（1）Atomizer pump is arranged in feed inlet end（15）；
The atomizer pump（15）With dehydration rectifying column（1）Between preheater is set（16）, preheater（16）Outlet end passes through branch
Pipeline is respectively communicated to dehydration rectifying column（1）And thin film evaporator（2）；
The dehydration rectifying column（1）Bottom is connected with dehydrating tower circulating pump（18）, dehydrating tower circulating pump（18）Outlet end is by dividing
Bye-pass and dehydration reboiler（17）Connection is dehydrated reboiler（17）Outlet end is connected to dehydration rectifying column（1）, dehydrating tower cycle
Pump（18）Outlet end passes through branch line and preheater（16）Connection；
The dehydration rectifying column（1）Top exit end connects dehydrating tower condenser（101）, dehydrating tower condenser（101）External one
Grade goes vacuum system（104）, dehydrating tower condenser（101）Bottom connects dehydrating tower return tank（102）, dehydrating tower return tank
（102）Bottom connects dehydrating tower reflux pump（103）, dehydrating tower reflux pump（103）It is respectively connected to dehydration essence by branch line
Evaporate tower（1）With level-one technique waste water delivery valve（105）；
The thin film evaporator（2）Storage tank in residue is arranged in bottom（21）, storage tank in residue（21）Residue discharging pump is arranged in bottom
（22）, residue discharging pump（22）Residue discharge valve is arranged in outlet end（23）；
The decoloration rectifying column（3）Rectifying tower reboiler is arranged in lower left side（31）, rectifying tower reboiler（31）Outlet end is connected to
Decolourize rectifying column（3）, decolourize rectifying column（3）Rectifying column circulating pump is arranged in bottom end（32）, rectifying column circulating pump（32）Outlet end
It is respectively connected to thin film evaporator by branch line（2）With rectifying tower reboiler（31）；
The treating column condenser（33）External two level goes vacuum system；
The treating column reflux pump（35）Output end be connected to online blender（4）；
The online blender（4）External ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）.
Further, the dehydration reboiler is falling-film reboiler.
Further, the thin film evaporator（2）It is circumscribed with stripper sterling atomizer pump（24）, stripper sterling atomizer pump
（24）External stripper sterling holding vessel（2401）.
Further, level-one membrane filtration pond（14）Be internally integrated 2 groups can independent control hollow fiber film assembly
（1400）.
Further, the hollow fiber film assembly（1400）Output end is provided with for hollow fiber film assembly（1400）
The solenoid electric valve that output pipe is controlled（1401）.
Further, the dehydrating tower condenser（101）Vacuum system is gone with level-one（104）Between be provided with pneumatic filter
（1010）, pneumatic filter（1010）Mounted inside has level-one filler filter layer（1011）With two level filler filter layer（1012）,
Level-one filler filter layer（1011）With two level filler filter layer（1012）Be all made of outer aperture be 1.6mm, internal orifice dimension 1.3mm,
Length is that the hollow fiber film thread of 3mm is accumulated, level-one filler filter layer（1011）With two level filler filter layer（1012）Outside
Layer is wrapped up using strainer.
Further, the level-one filler filter layer（1011）With two level filler filter layer（1012）Connected by soft seal
Part and pneumatic filter（1010）Madial wall soft seal connects.
Further, the thin film evaporator（2）Bottom end is provided with and thin film evaporator（2）The bearing of linkage, bearing connection
It is useful for driving thin film evaporator（2）The thin film evaporator driving motor of rotation.
The present invention provides a kind of stripper regenerating units and regeneration technology, advantageous effect to be：
1, the stripper regenerating unit that designs of the present invention, structure include along stripper waste liquid purifying technique stripper flow direction according to
The dehydration rectifying column of secondary setting（1）, thin film evaporator（2）With decoloration rectifying column（3）；Using dehydration rectifying column（1）Abjection stripping
Moisture in liquid waste liquid, using thin film evaporator（2）Recoverable ethanol amine and dimethyl sulfoxide (DMSO) in stripper waste liquid is complete
It is evaporated to steam state, and residue is detached；Using decoloration rectifying column（3）Improve the color and luster of the ethanol amine and dimethyl sulfoxide (DMSO) of recycling,
Increase product purity, to meet the recycling demand of photoresist lift off liquid waste liquid.
2, the stripper regenerating unit that the present invention designs is dehydrated rectifying column（1）Feed inlet end is provided with the stripping to connect successively
Chaotropic waste liquid melting pond（12）With level-one membrane filtration pond（14）；Stripper waste liquid melting pond（12）, level-one membrane filtration pond（14）, it is de-
Crystal evaporate tower（1）, thin film evaporator（2）And decoloration rectifying column（3）It is sequentially communicated along stripper waste liquid flow direction；Stripper is useless
Liquid melting pond（12）Feed inlet end is arranged feedstock and pumps（11）, level-one membrane filtration pond（14）Waste liquid delivery pump is arranged in feed inlet end
（13）, it is dehydrated rectifying column（1）Atomizer pump is arranged in feed inlet end（15）；Level-one membrane filtration pond（14）Being internally integrated 2 groups can be independent
The hollow fiber film assembly of control（1400）；Stripper waste liquid melting pond（12）It is externally provided with the temperature control controlled via PLC controller
System；Above-mentioned design, by increasing stripper waste liquid melting pond（12）Convenient for soluble component in the stripper waste liquid to input
It is dissolved, improves the separative efficiency and the rate of recovery in later stage, the level-one membrane filtration pond of design（14）Convenient for in stripper waste liquid
Metal ion carries out separating and filtering, and the convenient follow-up separation for carrying out moisture and photoresist resin Composition improves stripper waste liquid
Treatment effeciency；By in stripper waste liquid melting pond（12）It is outer that the temperature control system controlled by PLC controller is set, it can effectively control
Stripper waste liquid melting pond processed（12）Internal temperature improves the smelting efficiency of stripper waste liquid, stripper to be regenerated is made to be in
Good fluidity, it is ensured that the continuity and smoothness of subsequent regeneration technique.
3, the stripper regenerating unit that the present invention designs, stripper waste liquid melting pond（12）Feedstock is arranged in feed inlet end
Pump（11）, level-one membrane filtration pond（14）Waste liquid delivery pump is arranged in feed inlet end（13）, it is dehydrated rectifying column（1）Mist is arranged in feed inlet end
Change pump（15）；Above-mentioned design, increased atomizer pump（15）Make via level-one membrane filtration pond（14）The two level stripping obtained after UF membrane
Chaotropic waste liquid enters preheater with spray pattern（16）, entire pre-heating technique is more efficiently and uniform, improves stripper waste liquid
First separation efficiency, convenient for the moisture in stripper waste liquid quickly, thoroughly removal.
4, the stripper regenerating unit that the present invention designs, decolourize rectifying column（3）Rectifying tower reboiler is arranged in lower left side（31）,
Rectifying tower reboiler（31）Outlet end is connected to decoloration rectifying column（3）, decolourize rectifying column（3）Rectifying column circulating pump is arranged in bottom end
（32）, rectifying column circulating pump（32）Outlet end is respectively connected to thin film evaporator by branch line（2）With rectifying tower reboiler
（31）；Treating column condenser（33）External two level goes vacuum system；Treating column reflux pump（35）Output end be connected to it is online mixed
Glassware（4）；Online blender（4）External ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）；Above-mentioned design increases
Online blender（4）And matched ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）, convenient for according to proposition
The component of the stripper obtained afterwards is constituted, and carries out the intelligence addition of ethanol amine or dimethyl sulfoxide (DMSO) so that via online blender
（4）The requirement reused is fully achieved in the stripping liquid for regenerating of output.
5, the stripper regenerating unit that the present invention designs, dehydrating tower condenser（101）Vacuum system is gone with level-one（104）It
Between be provided with pneumatic filter（1010）, pneumatic filter（1010）Mounted inside has level-one filler filter layer（1011）And two level
Filler filter layer（1012）, level-one filler filter layer（1011）With two level filler filter layer（1012）Being all made of outer aperture is
The hollow fiber film thread that 1.6mm, internal orifice dimension 1.3mm, length are 3mm is accumulated, level-one filler filter layer（1011）With two
Grade filler filter layer（1012）Outer layer is wrapped up using strainer；Level-one filler filter layer（1011）With two level filler filter layer（1012）
Pass through soft seal connector and pneumatic filter（1010）Madial wall soft seal connects；Above-mentioned design, by cold in dehydrating tower
Condenser（101）Vacuum system is gone with level-one（104）Between be provided with pneumatic filter（1010）, can effectively prevent dewatering process section
In stripper waste liquid harmful gaseous component outward discharge cause environmental pollution, use outer aperture for 1.6mm, internal orifice dimension 1.3mm,
Length is the hollow fiber film thread of 3mm as pneumatic filter（1010）Filler filter layer, filter efficiency greatly promotes, and makes
It is improved with the service life；And the level-one filler filter layer being linked and packed by soft seal（1011）With two level filler filter layer（1012）Dress
With more convenient.
6, the stripper regeneration technology that the present invention designs is utilizing dehydration rectifying column（1）Stripper waste liquid is dehydrated
When processing, stripper waste liquid passes through preheater（16）Into dehydration rectifying column（1）, stripper waste liquid passes through dehydrating tower circulating pump
（18）In dehydration reboiler（17）Middle cycle, and it is partially vaporized vaporization, gas is up dehydrated rectifying column（1）Liquid down
The heat and mass in filler achievees the purpose that purifying, is dehydrated rectifying column（1）Overhead extraction is separation water, is dehydrated rectifying column（1）'s
Height is not less than 15 meters, and the purity for detaching water is more than 99%, since the purity of tower top moisture is higher, stripper active ingredient
In dehydration rectifying column（1）In loss it is seldom, the active ingredient yield of follow-up stripper can greatly promote；In view of stripper group
The thermal sensitivity divided is dehydrated reboiler（17）Using falling-film reboiler, falling-film reboiler pressure drop is small, and operation temperature is compared with other shapes
The reboiler of formula is low；Dehydrating tower circulating pump（18）Be operated under conditions of high temperature, vacuum, and the dimethyl sulfoxide (DMSO) in material and
Ethanol amine belongs to combustible, and flash-point is dehydrated rectifying column at 90 DEG C or so（1）Bottom of tower operation temperature be 110 DEG C, consider
To the factor of operational safety, using canned motor pump as dehydrating tower circulating pump（18）, the advantages of canned motor pump is zero leakage；In order to make
The product index and yield of stripper waste liquid are protected, and are dehydrated rectifying column（1）Overhead reflux amount control unit is referred to using quality
Control program is marked, which automatically adjusts regurgitant volume according to the variation of moisture in stripper waste liquid, with
Ensure that the stripper product index obtained and yield meet production requirement.
7, the stripper regeneration technology that the present invention designs, using thin film evaporator（2）To the ethanol amine in stripper waste liquid
When component and dimethyl sulfoxide (DMSO) component are detached, the stripper waste liquid after water removal passes through and preheater（16）Enter after heat exchange thin
Film evaporator（2）, ethyl alcohol amine component and dimethyl sulfoxide (DMSO) component in stripper waste liquid are with photoresist in thin film evaporator（2）Quilt
Separation, ethyl alcohol amine component and dimethyl sulfoxide (DMSO) component are vaporizated into gaseous state, since photoresist belongs to high molecular polymer boiling point very
Height can not be evaporated, and the liquid that can not be evaporated is in thin film evaporator since gravity enters storage tank in residue（21）,
Finally by residue discharging pump（22）Discharge, the Gaseous materials being evaporated enter decoloration rectifying column（3）Complete decoloration purifying；Due to thin
Film evaporator（2）In operating pressure less than dehydration rectifying column（1）Operating pressure, be dehydrated rectifying column（1）The material of tower reactor is such as
Fruit is directly entered thin film evaporator（2）It then will appear serious flass, and this phenomenon can lead to serious entrainment,
I.e. much the mist containing photoresist can enter decoloration rectifying column（3）；In order to avoid such phenomenon occurs, rectifying column will be dehydrated
（1）Tower reactor outputting material in preheater（16）In exchange heat, after heat exchange, into thin film evaporator（2）In temperature of charge
It is reduced to the pressure bubble point that thin film evaporator operates hereinafter, avoiding thin film evaporator（2）It flashes；Stripper after water removal
After waste liquid evaporates in thin film evaporator, ethanol amine and dimethyl sulfoxide (DMSO) are evaporated to decoloration rectifying column（3）, the liquid that is not evaporated
That is " residue ", the content of photoresist is very high in this residue, and since photoresist is the polymer of resinae, residue is easy to
Thin film evaporator（2）Surface scale, to influence thin film evaporator（2）Normal use, thin film evaporator（2）It is circumscribed with stripping
Liquid sterling atomizer pump（24）, stripper sterling atomizer pump（24）External stripper sterling holding vessel（2401）, step 4）In in profit
Use thin film evaporator（2）When being evaporated separation to primary concentration liquid, stripper sterling atomizer pump（24）Constantly from stripper
Sterling holding vessel（2401）Middle extraction stripper is simultaneously pumped to thin film evaporator（2）Inner surface；It is passed through atomization by lasting
Stripper sterling, effectively prevents thin film evaporator（2）Fouling occurs for surface, ensure that entire ethanol amine and dimethyl sulfoxide (DMSO) steam
With the quick separating of photoresist.
8, the stripper regenerating unit that the present invention designs, as needed, thin film evaporator（2）Bottom end can be arranged steams with film
Send out device（2）The bearing of linkage, bearing are connected for driving thin film evaporator（2）The thin film evaporator driving motor of rotation；Thin
In film evaporator operational process, is persistently rotated using the mutual cooperation driving thin film evaporator of driving motor and bearing, prevent stripping
Photoresist in chaotropic waste liquid is in thin film evaporator（2）Inner surface fouling.
Description of the drawings
Fig. 1 is the structural schematic diagram of stripper regenerating unit in the present invention.
Fig. 2 is the structural schematic diagram of pneumatic filter in the present invention.
Fig. 3 is the structural schematic diagram in level-one membrane filtration pond in the present invention.
Specific implementation mode
The present invention is described further refering to attached drawing 1, Fig. 2 and Fig. 3.
The invention is realized by the following technical scheme：
A kind of stripper regeneration technology, which is characterized in that include the following steps：
Step 1）It is pumped using feedstock（11）Stripper waste liquid is pumped to stripper waste liquid melting pond（12）, stripper waste liquid
In stripper waste liquid melting pond（12）Interior completion melting liquefaction, obtains liquefied level-one stripper waste liquid completely；
Step 2）Using waste liquid delivery pump（13）By step 1）In completely liquefied level-one stripper waste liquid be pumped to level-one film mistake
Filter tank（14）Inside, using level-one membrane filtration pond（14）Membrane filtration separation is carried out to the metal ion of input, obtains two level stripping
Liquid waste liquid；
Step 3）Using atomizer pump（15）By step 2）The two level stripper waste liquid of middle acquisition is pumped to dehydration rectifying column（1）It is interior
Portion, using dehydration rectifying column（1）The two level stripper waste liquid of input is carried out dehydrating, primary concentration liquid is obtained；
Step 4）Using thin film evaporator（2）To step 3）The primary concentration liquid obtained after middle dehydration is evaporated separation, obtains
Group be divided into the secondary concentration liquid of ethanol amine and dimethyl sulfoxide (DMSO) via thin film evaporator（2）Output；
Step 5）Using decoloration rectifying column（3）To step 4）In via thin film evaporator（2）The secondary concentration liquid of output is taken off
Colour purity, the group obtained after decoloration is divided into ethanol amine and the stripper of dimethyl sulfoxide (DMSO) purifies product in treating column condenser（33）It is interior
Condensation is completed, the stripper purification product obtained after condensation are stored to treating column return tank（34）, storage to treating column return tank
（34）Via treating column reflux pump（35）Enter online blender afterwards（4）, the stripper purification product of input are in online blender（4）
The allotment of ethanol amine and dimethyl sulfoxide (DMSO) ratio is completed in inside, obtains ethanol amine：Dimethyl sulfoxide (DMSO) is 7：3 stripper regeneration
Product；
The stripper waste liquid melting pond（12）It is externally provided with the temperature control system controlled via PLC controller；
The thin film evaporator（2）It is circumscribed with stripper sterling atomizer pump（24）, stripper sterling atomizer pump（24）External stripping
Liquid sterling holding vessel（2401）, the step 4）In utilizing thin film evaporator（2）When being evaporated separation to primary concentration liquid,
Stripper sterling atomizer pump（24）Constantly from stripper sterling holding vessel（2401）Middle extraction stripper is simultaneously pumped to film steaming
Send out device（2）Inner surface；
Level-one membrane filtration pond（14）It has been internally integrated hollow fiber film assembly；
The atomizer pump（15）With dehydration rectifying column（1）Between preheater is set（16）, preheater（16）Outlet end passes through branch
Pipeline is respectively communicated to dehydration rectifying column（1）And thin film evaporator（2）；
The dehydration rectifying column（1）Bottom is connected with dehydrating tower circulating pump（18）, dehydrating tower circulating pump（18）Outlet end is by dividing
Bye-pass and dehydration reboiler（17）Connection is dehydrated reboiler（17）Outlet end is connected to dehydration rectifying column（1）, dehydrating tower cycle
Pump（18）Outlet end passes through branch line and preheater（16）Connection；
The dehydration rectifying column（1）Top exit end connects dehydrating tower condenser（101）, dehydrating tower condenser（101）External one
Grade goes vacuum system（104）, dehydrating tower condenser（101）Bottom connects dehydrating tower return tank（102）, dehydrating tower return tank
（102）Bottom connects dehydrating tower reflux pump（103）, dehydrating tower reflux pump（103）It is respectively connected to dehydration essence by branch line
Evaporate tower（1）With level-one technique waste water delivery valve（105）；
The thin film evaporator（2）Storage tank in residue is arranged in bottom（21）, storage tank in residue（21）Residue discharging pump is arranged in bottom
（22）, residue discharging pump（22）Residue discharge valve is arranged in outlet end（23）；
The decoloration rectifying column（3）Rectifying tower reboiler is arranged in lower left side（31）, rectifying tower reboiler（31）Outlet end is connected to
Decolourize rectifying column（3）, decolourize rectifying column（3）Rectifying column circulating pump is arranged in bottom end（32）, rectifying column circulating pump（32）Outlet end
It is respectively connected to thin film evaporator by branch line（2）With rectifying tower reboiler（31）；
The treating column condenser（33）External two level goes vacuum system；
The online blender（4）External ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）.
As an improvement, the dehydration rectifying column（1）Tower top pressure control in 8 ~ 10Kpa.
As an improvement, the dehydration rectifying column（1）The sensitive plate temperature of dehydrating tower control at 58 ~ 65 DEG C.
As an improvement, the dehydrating tower circulating pump（18）For canned motor pump.
A kind of stripper regenerating unit, which is characterized in that structure includes：It is flowed along stripper waste liquid purifying technique stripper
The dehydration rectifying column that direction is set gradually（1）, thin film evaporator（2）With decoloration rectifying column（3）；
The dehydration rectifying column（1）Feed inlet end is provided with the stripper waste liquid melting pond to connect successively（12）With level-one membrane filtration
Pond（14）；
The stripper waste liquid melting pond（12）, level-one membrane filtration pond（14）, dehydration rectifying column（1）, thin film evaporator（2）And it is de-
Color rectifying column（3）It is sequentially communicated along stripper waste liquid flow direction；
The stripper waste liquid melting pond（12）Feed inlet end is arranged feedstock and pumps（11）, level-one membrane filtration pond（14）Feed inlet
End setting waste liquid delivery pump（13）, it is dehydrated rectifying column（1）Atomizer pump is arranged in feed inlet end（15）；
The atomizer pump（15）With dehydration rectifying column（1）Between preheater is set（16）, preheater（16）Outlet end passes through branch
Pipeline is respectively communicated to dehydration rectifying column（1）And thin film evaporator（2）；
The dehydration rectifying column（1）Bottom is connected with dehydrating tower circulating pump（18）, dehydrating tower circulating pump（18）Outlet end is by dividing
Bye-pass and dehydration reboiler（17）Connection is dehydrated reboiler（17）Outlet end is connected to dehydration rectifying column（1）, dehydrating tower cycle
Pump（18）Outlet end passes through branch line and preheater（16）Connection；
The dehydration rectifying column（1）Top exit end connects dehydrating tower condenser（101）, dehydrating tower condenser（101）External one
Grade goes vacuum system（104）, dehydrating tower condenser（101）Bottom connects dehydrating tower return tank（102）, dehydrating tower return tank
（102）Bottom connects dehydrating tower reflux pump（103）, dehydrating tower reflux pump（103）It is respectively connected to dehydration essence by branch line
Evaporate tower（1）With level-one technique waste water delivery valve（105）；
The thin film evaporator（2）Storage tank in residue is arranged in bottom（21）, storage tank in residue（21）Residue discharging pump is arranged in bottom
（22）, residue discharging pump（22）Residue discharge valve is arranged in outlet end（23）；
The decoloration rectifying column（3）Rectifying tower reboiler is arranged in lower left side（31）, rectifying tower reboiler（31）Outlet end is connected to
Decolourize rectifying column（3）, decolourize rectifying column（3）Rectifying column circulating pump is arranged in bottom end（32）, rectifying column circulating pump（32）Outlet end
It is respectively connected to thin film evaporator by branch line（2）With rectifying tower reboiler（31）；
The treating column condenser（33）External two level goes vacuum system；
The treating column reflux pump（35）Output end be connected to online blender（4）；
The online blender（4）External ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）；
The online blender（4）Stripper sterling delivery pump is arranged in outlet end（401）.
As an improvement, the dehydration reboiler is falling-film reboiler.
As an improvement, the thin film evaporator（2）It is circumscribed with stripper sterling atomizer pump（24）, stripper sterling atomizer pump
（24）External stripper sterling holding vessel（2401）.
As an improvement, level-one membrane filtration pond（14）Be internally integrated 2 groups can independent control hollow fiber film assembly
（1400）.
As an improvement, the hollow fiber film assembly（1400）Output end is provided with for hollow fiber film assembly
（1400）The solenoid electric valve that output pipe is controlled（1401）.
As an improvement, the dehydrating tower condenser（101）Vacuum system is gone with level-one（104）Between be provided with gas filtration
Device（1010）, pneumatic filter（1010）Mounted inside has level-one filler filter layer（1011）With two level filler filter layer
（1012）, level-one filler filter layer（1011）With two level filler filter layer（1012）It is all made of that outer aperture is 1.6mm, internal orifice dimension is
1.3mm, the hollow fiber film thread that length is 3mm are accumulated, level-one filler filter layer（1011）With two level filler filter layer
（1012）Outer layer is wrapped up using strainer.
As an improvement, the level-one filler filter layer（1011）With two level filler filter layer（1012）Connected by soft seal
Fitting and pneumatic filter（1010）Madial wall soft seal connects.
As an improvement, the thin film evaporator（2）Bottom end can be arranged and thin film evaporator（2）The bearing of linkage, bearing connect
It is connected to for driving thin film evaporator（2）The thin film evaporator driving motor of rotation.
Compared with prior art, the stripper regenerating unit that the present invention designs, structure include purifying work along stripper waste liquid
The dehydration rectifying column that skill stripper flow direction is set gradually（1）, thin film evaporator（2）With decoloration rectifying column（3）；Using dehydration
Rectifying column（1）Deviate from the moisture in stripper waste liquid, using thin film evaporator（2）By recoverable ethanol amine in stripper waste liquid
It is steam state with dimethyl sulfoxide (DMSO) evaporating completely, and residue is detached；Using decoloration rectifying column（3）Improve the ethanol amine and two of recycling
The color and luster of methyl sulfoxide increases product purity, to meet the recycling demand of photoresist lift off liquid waste liquid.
The stripper regenerating unit that the present invention designs is dehydrated rectifying column（1）Feed inlet end is provided with the stripping to connect successively
Liquid waste liquid melting pond（12）With level-one membrane filtration pond（14）；Stripper waste liquid melting pond（12）, level-one membrane filtration pond（14）, dehydration
Rectifying column（1）, thin film evaporator（2）And decoloration rectifying column（3）It is sequentially communicated along stripper waste liquid flow direction；Stripper waste liquid
Melting pond（12）Feed inlet end is arranged feedstock and pumps（11）, level-one membrane filtration pond（14）Waste liquid delivery pump is arranged in feed inlet end
（13）, it is dehydrated rectifying column（1）Atomizer pump is arranged in feed inlet end（15）；Level-one membrane filtration pond（14）Being internally integrated 2 groups can be independent
The hollow fiber film assembly of control（1400）；Stripper waste liquid melting pond（12）It is externally provided with the temperature control controlled via PLC controller
System；Above-mentioned design, by increasing stripper waste liquid melting pond（12）Convenient for soluble component in the stripper waste liquid to input
It is dissolved, improves the separative efficiency and the rate of recovery in later stage, the level-one membrane filtration pond of design（14）Convenient for in stripper waste liquid
Metal ion carries out separating and filtering, and the convenient follow-up separation for carrying out moisture and photoresist resin Composition improves stripper waste liquid
Treatment effeciency；By in stripper waste liquid melting pond（12）It is outer that the temperature control system controlled by PLC controller is set, it can effectively control
Stripper waste liquid melting pond processed（12）Internal temperature improves the smelting efficiency of stripper waste liquid, stripper to be regenerated is made to be in
Good fluidity, it is ensured that the continuity and smoothness of subsequent regeneration technique.
The stripper regenerating unit that the present invention designs, stripper waste liquid melting pond（12）Feed inlet end is arranged feedstock and pumps
（11）, level-one membrane filtration pond（14）Waste liquid delivery pump is arranged in feed inlet end（13）, it is dehydrated rectifying column（1）Feed inlet end setting atomization
Pump（15）；Above-mentioned design, increased atomizer pump（15）Make via level-one membrane filtration pond（14）The two level stripping obtained after UF membrane
Liquid waste liquid enters preheater with spray pattern（16）, entire pre-heating technique is more efficiently and uniform, improves stripper waste liquid
First separation efficiency quickly, thoroughly removes convenient for the moisture in stripper waste liquid.
The stripper regenerating unit that the present invention designs, decolourize rectifying column（3）Rectifying tower reboiler is arranged in lower left side（31）, essence
Evaporate tower reboiler（31）Outlet end is connected to decoloration rectifying column（3）, decolourize rectifying column（3）Rectifying column circulating pump is arranged in bottom end
（32）, rectifying column circulating pump（32）Outlet end is respectively connected to thin film evaporator by branch line（2）With rectifying tower reboiler
（31）；Treating column condenser（33）External two level goes vacuum system；Treating column reflux pump（35）Output end be connected to it is online mixed
Glassware（4）；Online blender（4）External ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）；Above-mentioned design increases
Online blender（4）And matched ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）, convenient for according to proposition
The component of the stripper obtained afterwards is constituted, and carries out the intelligence addition of ethanol amine or dimethyl sulfoxide (DMSO) so that via online blender
（4）The requirement reused is fully achieved in the stripping liquid for regenerating of output.
The stripper regenerating unit that the present invention designs, dehydrating tower condenser（101）Vacuum system is gone with level-one（104）Between
It is provided with pneumatic filter（1010）, pneumatic filter（1010）Mounted inside has level-one filler filter layer（1011）It is filled out with two level
Expect filter layer（1012）, level-one filler filter layer（1011）With two level filler filter layer（1012）Be all made of outer aperture be 1.6mm,
The hollow fiber film thread that internal orifice dimension is 1.3mm, length is 3mm is accumulated, level-one filler filter layer（1011）With two level filler
Filter layer（1012）Outer layer is wrapped up using strainer；Level-one filler filter layer（1011）With two level filler filter layer（1012）Pass through
Soft seal connector and pneumatic filter（1010）Madial wall soft seal connects；Above-mentioned design, by dehydrating tower condenser
（101）Vacuum system is gone with level-one（104）Between be provided with pneumatic filter（1010）, dewatering process section can effectively be prevented to remove
Discharge causes environmental pollution to harmful gaseous component outward in liquid waste liquid, uses outer aperture for 1.6mm, internal orifice dimension 1.3mm, length
For 3mm hollow fiber film thread as pneumatic filter（1010）Filler filter layer, filter efficiency greatly promotes, and uses the longevity
Life improves；And the level-one filler filter layer being linked and packed by soft seal（1011）With two level filler filter layer（1012）Assembly is more
For convenience.
The stripper regeneration technology that the present invention designs is utilizing dehydration rectifying column（1）Stripper waste liquid is carried out at dehydration
When reason, stripper waste liquid passes through preheater（16）Into dehydration rectifying column（1）, stripper waste liquid passes through dehydrating tower circulating pump（18）
In dehydration reboiler（17）Middle cycle, and it is partially vaporized vaporization, gas is up dehydrated rectifying column（1）Liquid down is being filled out
Heat and mass in material achievees the purpose that purifying, is dehydrated rectifying column（1）Overhead extraction is separation water, is dehydrated rectifying column（1）Height
Not less than 15 meters, the purity for detaching water is more than 99%, and since the purity of tower top moisture is higher, stripper active ingredient is de-
Crystal evaporate tower（1）In loss it is seldom, the active ingredient yield of follow-up stripper can greatly promote；In view of stripper component
Thermal sensitivity is dehydrated reboiler（17）Using falling-film reboiler, falling-film reboiler pressure drop is small, and operation temperature is compared with other forms
Reboiler is low；Dehydrating tower circulating pump（18）It is to be operated under conditions of high temperature, vacuum, and the dimethyl sulfoxide (DMSO) in material and ethyl alcohol
Amine belongs to combustible, and flash-point is dehydrated rectifying column at 90 DEG C or so（1）Bottom of tower operation temperature be 110 DEG C, it is contemplated that fortune
The factor of row safety, using canned motor pump as dehydrating tower circulating pump（18）, the advantages of canned motor pump is zero leakage；In order to make stripping
The product index and yield of liquid waste liquid are protected, and are dehydrated rectifying column（1）Overhead reflux amount control unit uses quality index control
Scheme processed, the regurgitant volume control unit automatically adjust regurgitant volume according to the variation of moisture in stripper waste liquid, to ensure
The stripper product index and yield of acquisition meet production requirement.
The stripper regeneration technology that the present invention designs, using thin film evaporator（2）To the ethanol amine group in stripper waste liquid
Point and dimethyl sulfoxide (DMSO) component when being detached, the stripper waste liquid after water removal passes through and preheater（16）Enter film after heat exchange
Evaporator（2）, ethyl alcohol amine component and dimethyl sulfoxide (DMSO) component in stripper waste liquid are with photoresist in thin film evaporator（2）Divided
From, ethyl alcohol amine component and dimethyl sulfoxide (DMSO) component are vaporizated into gaseous state, since to belong to high molecular polymer boiling point very high for photoresist,
It can not be evaporated, the liquid that can not be evaporated is in thin film evaporator since gravity enters storage tank in residue（21）, most
Afterwards by residue discharging pump（22）Discharge, the Gaseous materials being evaporated enter decoloration rectifying column（3）Complete decoloration purifying；Due to film
Evaporator（2）In operating pressure less than dehydration rectifying column（1）Operating pressure, be dehydrated rectifying column（1）If the material of tower reactor
It is directly entered thin film evaporator（2）It then will appear serious flass, and this phenomenon can lead to serious entrainment, i.e.,
Much the mist containing photoresist can enter decoloration rectifying column（3）；In order to avoid such phenomenon occurs, rectifying column will be dehydrated（1）
Tower reactor outputting material in preheater（16）In exchange heat, after heat exchange, into thin film evaporator（2）In temperature of charge reduce
The pressure bubble point operated to thin film evaporator is hereinafter, avoid thin film evaporator（2）It flashes；Stripper waste liquid after water removal exists
After being evaporated in thin film evaporator, ethanol amine and dimethyl sulfoxide (DMSO) are evaporated to decoloration rectifying column（3）, the liquid not being evaporated is i.e. " residual
Slag ", the content of photoresist is very high in this residue, and since photoresist is the polymer of resinae, residue is easy to steam in film
Send out device（2）Surface scale, to influence thin film evaporator（2）Normal use, thin film evaporator（2）It is circumscribed with stripper sterling
Atomizer pump（24）, stripper sterling atomizer pump（24）External stripper sterling holding vessel（2401）, step 4）In utilizing film
Evaporator（2）When being evaporated separation to primary concentration liquid, stripper sterling atomizer pump（24）Constantly stored up from stripper sterling
Deposit tank（2401）Middle extraction stripper is simultaneously pumped to thin film evaporator（2）Inner surface；Pass through the lasting stripper for being passed through atomization
Sterling effectively prevents thin film evaporator（2）Fouling occurs for surface, ensure that entire ethanol amine and dimethyl sulfoxide (DMSO) steams and photoresist
The quick separating of agent.
The stripper regenerating unit that the present invention designs, as needed, thin film evaporator（2）Bottom end can be arranged and thin film evaporation
Device（2）The bearing of linkage, bearing are connected for driving thin film evaporator（2）The thin film evaporator driving motor of rotation；In film
In evaporator operational process, is persistently rotated using the mutual cooperation driving thin film evaporator of driving motor and bearing, prevent stripping
Photoresist in liquid waste liquid is in thin film evaporator（2）Inner surface fouling.
Stripper waste liquid melting pond（12）Feed inlet end is arranged feedstock and pumps（11）, level-one membrane filtration pond（14）Feed inlet
End setting waste liquid delivery pump（13）, it is dehydrated rectifying column（1）Atomizer pump is arranged in feed inlet end（15）；
In the use of the present invention, stripper waste liquid is pumped by feedstock（11）By flowmeter flow control, and pass through preheater
（16）Enter dehydration rectifying column after preheating（1）；The dehydrating tower circulating pump that liquid material passes through bottom of tower（18）In dehydration reboiler
（17）Middle cycle, and part vaporizes, Gaseous materials are by dehydrating tower condenser（101）It is condensed into liquid, and by being dehydrated rectifying column
（1）The reflux of tower top controls, and partly flows back to dehydration rectifying column（1）, part extraction is that tower top detaches water, and gas and liquid are in rectifying
Mass transfer achievees the effect that separation in tower, is dehydrated rectifying column（1）Overhead extraction is water, is dehydrated rectifying column（1）Bottom of tower is dewatered
Stripper；
Dewatered stripper enters thin film evaporator（2）, in thin film evaporator（2）Middle ethanol amine and dimethyl sulfoxide (DMSO) are by vapour
Change, the high boiler material not being vaporized is by residue discharging pump（22）Discharge, the solvent being vaporized enter decoloration rectifying column（3）.
In thin film evaporator（2）The material of middle vaporization enters decoloration rectifying column（3）, since thin film evaporator vaporization may
Mist is formed, carries color and luster substance secretly, the solvent of vaporization enters thin film evaporator（2）Afterwards, in treating column condenser（33）It is middle cold
It coagulates for liquid, and a part of liquid that quantitatively flowed back by flow control, the liquid of reflux and the gas of the rising mass transfer in filler,
Achieve the effect that purify uprising gas, remaining passes through product purification tower reflux pump（35）It is sent to online blender（4）It is dense through row
Degree allotment, the product of concentration qualification is via stripper sterling delivery pump（401）Output.
As described above, you can the present invention is applied.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Any one skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (10)
1. a kind of stripper regenerating unit, which is characterized in that structure includes：Along stripper waste liquid purifying technique stripper flowing side
To the dehydration rectifying column set gradually（1）, thin film evaporator（2）With decoloration rectifying column（3）；
The dehydration rectifying column（1）Feed inlet end is provided with the stripper waste liquid melting pond to connect successively（12）With level-one membrane filtration
Pond（14）；
The stripper waste liquid melting pond（12）, level-one membrane filtration pond（14）, dehydration rectifying column（1）, thin film evaporator（2）And it is de-
Color rectifying column（3）It is sequentially communicated along stripper waste liquid flow direction；
The stripper waste liquid melting pond（12）Feed inlet end is arranged feedstock and pumps（11）, level-one membrane filtration pond（14）Feed inlet
End setting waste liquid delivery pump（13）, it is dehydrated rectifying column（1）Atomizer pump is arranged in feed inlet end（15）；
The atomizer pump（15）With dehydration rectifying column（1）Between preheater is set（16）, preheater（16）Outlet end passes through branch
Pipeline is respectively communicated to dehydration rectifying column（1）And thin film evaporator（2）；
The dehydration rectifying column（1）Bottom is connected with dehydrating tower circulating pump（18）, dehydrating tower circulating pump（18）Outlet end is by dividing
Bye-pass and dehydration reboiler（17）Connection is dehydrated reboiler（17）Outlet end is connected to dehydration rectifying column（1）, dehydrating tower cycle
Pump（18）Outlet end passes through branch line and preheater（16）Connection；
The dehydration rectifying column（1）Top exit end connects dehydrating tower condenser（101）, dehydrating tower condenser（101）External one
Grade goes vacuum system（104）, dehydrating tower condenser（101）Bottom connects dehydrating tower return tank（102）, dehydrating tower return tank
（102）Bottom connects dehydrating tower reflux pump（103）, dehydrating tower reflux pump（103）It is respectively connected to dehydration essence by branch line
Evaporate tower（1）With level-one technique waste water delivery valve（105）；
The thin film evaporator（2）Storage tank in residue is arranged in bottom（21）, storage tank in residue（21）Residue discharging pump is arranged in bottom
（22）, residue discharging pump（22）Residue discharge valve is arranged in outlet end（23）；
The decoloration rectifying column（3）Rectifying tower reboiler is arranged in lower left side（31）, rectifying tower reboiler（31）Outlet end is connected to
Decolourize rectifying column（3）, decolourize rectifying column（3）Rectifying column circulating pump is arranged in bottom end（32）, rectifying column circulating pump（32）Outlet end
It is respectively connected to thin film evaporator by branch line（2）With rectifying tower reboiler（31）；
The treating column condenser（33）External two level goes vacuum system；
The online blender（4）External ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）；
The online blender（4）Stripper sterling delivery pump is arranged in outlet end（401）.
2. stripper regenerating unit according to claim 1, which is characterized in that the dehydration reboiler is that falling film type boils again
Device.
3. stripper regenerating unit according to claim 1, which is characterized in that the thin film evaporator（2）It is circumscribed with stripping
Chaotropic sterling atomizer pump（24）, stripper sterling atomizer pump（24）External stripper sterling holding vessel（2401）.
4. stripper regenerating unit according to claim 1, which is characterized in that level-one membrane filtration pond（14）Inside collection
At have 2 groups can independent control hollow fiber film assembly（1400）.
5. stripper regenerating unit according to claim 4, which is characterized in that the hollow fiber film assembly（1400）It is defeated
Outlet is provided with for hollow fiber film assembly（1400）The solenoid electric valve that output pipe is controlled（1401）.
6. stripper regenerating unit according to claim 1, which is characterized in that the dehydrating tower condenser（101）With one
Grade goes vacuum system（104）Between be provided with pneumatic filter（1010）, pneumatic filter（1010）Mounted inside has level-one to fill out
Expect filter layer（1011）With two level filler filter layer（1012）, level-one filler filter layer（1011）With two level filler filter layer
（1012）It is all made of the hollow fiber film thread that outer aperture is 1.6mm, internal orifice dimension 1.3mm, length are 3mm to accumulate, level-one
Filler filter layer（1011）With two level filler filter layer（1012）Outer layer is wrapped up using strainer；The level-one filler filter layer
（1011）With two level filler filter layer（1012）Pass through soft seal connector and pneumatic filter（1010）Madial wall soft seal
Connection.
7. a kind of stripper regeneration technology, which is characterized in that include the following steps：
Step 1）It is pumped using feedstock（11）Stripper waste liquid is pumped to stripper waste liquid melting pond（12）, stripper waste liquid
In stripper waste liquid melting pond（12）Interior completion melting liquefaction, obtains liquefied level-one stripper waste liquid completely；
Step 2）Using waste liquid delivery pump（13）By step 1）In completely liquefied level-one stripper waste liquid be pumped to level-one film mistake
Filter tank（14）Inside, using level-one membrane filtration pond（14）Membrane filtration separation is carried out to the metal ion of input, obtains two level stripping
Liquid waste liquid；
Step 3）Using atomizer pump（15）By step 2）The two level stripper waste liquid of middle acquisition is pumped to dehydration rectifying column（1）It is interior
Portion, using dehydration rectifying column（1）The two level stripper waste liquid of input is carried out dehydrating, primary concentration liquid is obtained；
Step 4）Using thin film evaporator（2）To step 3）The primary concentration liquid obtained after middle dehydration is evaporated separation, obtains
Group be divided into the secondary concentration liquid of ethanol amine and dimethyl sulfoxide (DMSO) via thin film evaporator（2）Output；
Step 5）Using decoloration rectifying column（3）To step 4）In via thin film evaporator（2）The secondary concentration liquid of output is taken off
Colour purity, the group obtained after decoloration is divided into ethanol amine and the stripper of dimethyl sulfoxide (DMSO) purifies product in treating column condenser（33）It is interior
Condensation is completed, the stripper purification product obtained after condensation are stored to treating column return tank（34）, storage to treating column return tank
（34）Via treating column reflux pump（35）Enter online blender afterwards（4）, the stripper purification product of input are in online blender（4）
The allotment of ethanol amine and dimethyl sulfoxide (DMSO) ratio is completed in inside, obtains ethanol amine：Dimethyl sulfoxide (DMSO) is 7：3 stripper regeneration
Product；
The stripper waste liquid melting pond（12）It is externally provided with the temperature control system controlled via PLC controller；
The thin film evaporator（2）It is circumscribed with stripper sterling atomizer pump（24）, stripper sterling atomizer pump（24）External stripping
Liquid sterling holding vessel（2401）, the step 4）In utilizing thin film evaporator（2）When being evaporated separation to primary concentration liquid,
Stripper sterling atomizer pump（24）Constantly from stripper sterling holding vessel（2401）Middle extraction stripper is simultaneously pumped to film steaming
Send out device（2）Inner surface；
Level-one membrane filtration pond（14）It has been internally integrated hollow fiber film assembly；
The atomizer pump（15）With dehydration rectifying column（1）Between preheater is set（16）, preheater（16）Outlet end passes through branch
Pipeline is respectively communicated to dehydration rectifying column（1）And thin film evaporator（2）；
The dehydration rectifying column（1）Bottom is connected with dehydrating tower circulating pump（18）, dehydrating tower circulating pump（18）Outlet end is by dividing
Bye-pass and dehydration reboiler（17）Connection is dehydrated reboiler（17）Outlet end is connected to dehydration rectifying column（1）, dehydrating tower cycle
Pump（18）Outlet end passes through branch line and preheater（16）Connection；
The dehydration rectifying column（1）Top exit end connects dehydrating tower condenser（101）, dehydrating tower condenser（101）External one
Grade goes vacuum system（104）, dehydrating tower condenser（101）Bottom connects dehydrating tower return tank（102）, dehydrating tower return tank
（102）Bottom connects dehydrating tower reflux pump（103）, dehydrating tower reflux pump（103）It is respectively connected to dehydration essence by branch line
Evaporate tower（1）With level-one technique waste water delivery valve（105）；
The thin film evaporator（2）Storage tank in residue is arranged in bottom（21）, storage tank in residue（21）Residue discharging pump is arranged in bottom
（22）, residue discharging pump（22）Residue discharge valve is arranged in outlet end（23）；
The decoloration rectifying column（3）Rectifying tower reboiler is arranged in lower left side（31）, rectifying tower reboiler（31）Outlet end is connected to
Decolourize rectifying column（3）, decolourize rectifying column（3）Rectifying column circulating pump is arranged in bottom end（32）, rectifying column circulating pump（32）Outlet end
It is respectively connected to thin film evaporator by branch line（2）With rectifying tower reboiler（31）；
The treating column condenser（33）External two level goes vacuum system；
The online blender（4）External ethanol amine addition pump（41）It adds and pumps with dimethyl sulfoxide (DMSO)（42）.
8. stripper regeneration technology according to claim 7, which is characterized in that the dehydration rectifying column（1）Tower top pressure
Power is controlled in 8 ~ 10Kpa.
9. stripper regeneration technology according to claim 7, which is characterized in that the dehydration rectifying column（1）Dehydrating tower
Sensitive plate temperature control is at 58 ~ 65 DEG C.
10. stripper regeneration technology according to claim 7, which is characterized in that the dehydrating tower circulating pump（18）For screen
Cover pump.
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| CN201810452672.4A CN108568131B (en) | 2018-05-13 | 2018-05-13 | Stripping liquid regeneration device and stripping liquid regeneration process |
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|---|---|---|---|
| CN201810452672.4A CN108568131B (en) | 2018-05-13 | 2018-05-13 | Stripping liquid regeneration device and stripping liquid regeneration process |
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| CN108568131B CN108568131B (en) | 2023-11-28 |
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| CN108873627A (en) * | 2018-05-29 | 2018-11-23 | 四川久远化工技术有限公司 | A kind of photoresist minimizing technology of stripper regeneration technology section |
| CN109705004A (en) * | 2019-02-21 | 2019-05-03 | 苏州晶洲装备科技有限公司 | A kind of photoresist stripper Mead-Bauer recovery system |
| CN109734634A (en) * | 2019-02-21 | 2019-05-10 | 苏州晶洲装备科技有限公司 | A kind of photoresist stripper devil liquor recovery liquid dispensing device |
| CN109925781A (en) * | 2019-03-28 | 2019-06-25 | 武汉华星光电半导体显示技术有限公司 | Stripper recovery system |
| CN111694229A (en) * | 2020-07-14 | 2020-09-22 | 苏州市晶协高新电子材料有限公司 | High-efficiency regeneration device and regeneration method for resist stripping liquid |
| CN111792984A (en) * | 2020-07-14 | 2020-10-20 | 福建中融科技有限公司 | Stripping liquid recovery device |
| CN111807974A (en) * | 2020-08-06 | 2020-10-23 | 江阴市大洋固废处置利用有限公司 | Stripping waste liquid component recovery system and recovery process |
| CN111848367A (en) * | 2020-08-06 | 2020-10-30 | 昆山德源环保发展有限公司 | Method for purifying stripping liquid waste liquid |
| CN112875781A (en) * | 2021-01-12 | 2021-06-01 | 安徽远扬环保科技有限公司 | Device and method for reducing chroma of recovered stripping liquid |
| CN114470930A (en) * | 2022-02-18 | 2022-05-13 | 福建钰融科技有限公司 | Filter equipment and photoresist waste liquid regeneration system |
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| CN112875781A (en) * | 2021-01-12 | 2021-06-01 | 安徽远扬环保科技有限公司 | Device and method for reducing chroma of recovered stripping liquid |
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