CN108840495A - A kind of stripping waste liquor method of purification - Google Patents
A kind of stripping waste liquor method of purification Download PDFInfo
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- CN108840495A CN108840495A CN201810452667.3A CN201810452667A CN108840495A CN 108840495 A CN108840495 A CN 108840495A CN 201810452667 A CN201810452667 A CN 201810452667A CN 108840495 A CN108840495 A CN 108840495A
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/02—Treatment of water, waste water, or sewage by heating
- C02F1/04—Treatment of water, waste water, or sewage by heating by distillation or evaporation
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/281—Treatment of water, waste water, or sewage by sorption using inorganic sorbents
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F2001/007—Processes including a sedimentation step
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
- C02F2101/20—Heavy metals or heavy metal compounds
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- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The present invention proposes a kind of stripping waste liquor method of purification, is filtered separation to the stripper waste liquid with hollow fiber membrane filter, obtains without granulometric impurity, the primary filtrate of photoresist and the concentrate containing granulometric impurity, photoresist；The pre-heat treatment is carried out to primary filtrate with preheater；Water separating treatment is carried out to the primary filtrate after preheating with dehydrating tower, isolated vapor forms high purity water by condensation process by tower top discharge；Adsorption treatment is carried out with dehydrated filtrate of the adsorption tower to pumping；Heating evaporation processing is carried out to adsorption filtration liquid with evaporator, forms material steam；The stripper after refinement treatment is purified is carried out to material steam with rectifying column.Photoresist ingredient in stripping waste liquor, water constituent, other granulometric impurity ingredient, metal cation components etc. can be effectively removed, available purity reaches 99% or more stripper.
Description
Technical field
The present invention relates to stripper regeneration, especially related with a kind of stripping waste liquor method of purification.
Background technique
Stripper is largely used in microelectronic industry, is applied to printed circuit board, liquid crystal display, semiconductor integrated circuit
Etc. techniques manufacture in.Usually used stripper is mainly the mixture of organic amine and polar organic solvent, also containing on a small quantity with
Light component and some granulometric impurity of the moisture for representative.Major part is the organic component for having recycle value.Usually cleaning light
Photoresist needs a large amount of solvent, and these solvent prices are never cheap, from the viewpoint of recycling, carries out to stripping waste liquor
Effective purification, improves the purity of purification stripper, so that it is had recycle value, can not only reduce the harm to environment,
The production cost of enterprise can also be reduced.
Summary of the invention
The present invention proposes a kind of stripping waste liquor method of purification, for composition include water, photoresist, ethanol amine, dimethyl sulfoxide,
The waste liquid of granulometric impurity, other impurity metal ions etc., can effectively remove photoresist ingredient in stripping waste liquor, water constituent, its
His granulometric impurity ingredient, metal cation component etc., available purity reaches 99% or more stripper.
In order to achieve the object of the present invention, the following technology of proposed adoption：
A kind of stripping waste liquor method of purification, be to comprising water, photoresist, ethanol amine, dimethyl sulfoxide, granulometric impurity, metal from
The stripper waste liquid of sub- impurity is purified, which is characterized in that including：
Step 001, separation is filtered to the stripper waste liquid with hollow fiber membrane filter, obtain without granulometric impurity,
The primary filtrate of photoresist and concentrate containing granulometric impurity, photoresist；Wherein, the hollow fiber membrane filter is beam formula
Hollow fiber membrane filter, cylinder inboard wall arranged for interval have the annular unhurried current web plate that end face is wedge shape；
Step 002, concentrate is passed through precipitation and separation pond, filtering diaphragm plate is equipped in the middle part of precipitation and separation pond, filtering diaphragm plate will precipitate
Separate tank is divided into filter chamber and precipitating chamber, precipitates the intracavitary cylinder partition equipped with multi-layer bottom for mesh, the height of cylinder partition
Successively increase from inside to outside, the inlet tube of concentrate extend into that precipitating is intracavitary, and filtering diaphragm plate stops impurity and photoresist in heavy
It forms sediment intracavitary precipitating, the concentrated filtrate of the free from foreign meter and photoresist in filter chamber, which is recycled back to hollow fiber membrane filter, to be continued
Filter；
Step 003, the pre-heat treatment is carried out to primary filtrate with preheater；
Step 004, water separating treatment is carried out to the primary filtrate after preheating with dehydrating tower, isolated vapor is discharged by tower top
High purity water is formed by condensation process；The dehydrated filtrate of separation is discharged from tower reactor bottom, sends dehydration back to by being dehydrated reboiler
It after tower, repeatedly recycles, after dehydration sufficiently, pumps subsequent processing；
Step 005, adsorption treatment is carried out with dehydrated filtrate of the adsorption tower to pumping, dehydrated filtrate in adsorption tower along filling
The S type sorption channel of active charcoal carries out the Adsorption processing of impurity metal ion, obtains eliminating impurity metal ion
Absorb and filter liquid；
Step 006, heating evaporation processing is carried out to adsorption filtration liquid with evaporator, forms material steam；
Step 007, refinement treatment is carried out to material steam with rectifying column, material steam is upward through inner-tower filling material, passes through filler
Gaseous materials afterwards are discharged from tower top and are condensed into treating column condenser liquid, and treating column reflux pump is by a part of liquid object
Material is back to treating column, and the liquid material of reflux conducts heat and reaches in inner-tower filling material with upward material steam, reaches purifying
Material and the effect for trapping mist；The material of tower reactor heated simultaneously part of the circulation in purification tower reboiler by treating column circulating pump
Vaporization, is again introduced into treating column, the material not being vaporized sends evaporator back to；After treating column reaches dynamic balance state, treating column
The yet another operative liquid material of reflux pump is sent out, the stripper after being purified.
Further, the inside of the filtering diaphragm plate is filled with hollow-fibre membrane ball particle.
Further, the tower top pressure of the dehydrating tower is set as 8 ~ 10Kpa.
Further, the sensitive plate temperature of the dehydrating tower is controlled at 58 ~ 65 DEG C.
Further, the bottom temperature of the dehydrating tower is greater than 110 DEG C.
Further, the tower top pressure of the treating column is set as 4 ~ 6Kpa.
Beneficial effects of the present invention：
1, primary filter separation is realized by hollow fiber membrane filter, granulometric impurity and photoresist is separated to precipitation and separation
Pond, by only have water, ethanol amine, dimethyl sulfoxide, impurity metal ion primary filtrate enter dehydration procedure, by preheating,
After dehydration, 99% moisture is removed, removes impurity metal ion using adsorption tower, preferably by evaporator and treating column into one
Step is removed remaining moisture and other impurities, realizes the purification to stripper active principle ethanol amine, dimethyl sulfoxide
Purification；
2, primary filter is carried out using the hollow fiber membrane filter of innovative design, realization divides granulometric impurity and photoresist
From；Particularly by cylinder inboard wall arranged for interval annular unhurried current web plate, so that multistage unhurried current chamber is formed in filter cartridge body, so that
The concentrated filtrate that the stripper waste liquid of entrance and circulation flow into, unhurried currents at different levels it is intracavitary sufficiently with hollow-fibre membrane filtering at
Reason improves separating effect；The end face of annular unhurried current web plate is wedge shape, can effectively play good unhurried current effect, while annular is slow
Drift net plate is the plate of mesh type, and is unlikely to excessively to influence the intracorporal liquid flowing of cylinder, and separative efficiency is played well
Facilitation；
3, since the primary filter mode for using hollow-fibre membrane also contains more need in the concentrate of filter discharge
Therefore the effective component for purifying out in order to improve the rate of recovery while improving purity, adds precipitation and separation pond, utilize
Filtering diaphragm plate filled with hollow-fibre membrane ball particle realize granulometric impurity and photoresist with effective liquid separating spatially,
Chamber is precipitated by lower part and is detained depositing particles and photoresist ingredient, by the disengagement chamber reflux concentrated filtrate on top, is recycled to
Filter improves the amount of primary filtrate；Particularly, precipitating chamber avoids the material of precipitating in fluid to improve sedimentation effect
It is disorderly gone here and there after being ignited under effect, uses multi-layer bottom as the structure of the cylinder partition of mesh, and the height of cylinder partition is by interior
And successively increase outside, so that the blocking by partition is defined in certain region, partition bottom by the precipitating material being ignited
For mesh, entire precipitating chamber bottom space can be allowed to be connected, be designed as the mode that the height of multilayer successively increases, be conducive to be formed
Barrier effect step by step improves the sedimentation effect of precipitating chamber, to improve the efficiency that is spatially separating with effective liquid, promotes recycling
Effect；
4, it is dehydrated conducive to preheater cooperation dehydrating tower, improves dehydrating effect；Meanwhile it being followed using dehydration reboiler
Ring reaches in tower so that tower reactor liquid continues to be evaporated vaporization, reaches purifying purpose, and overhead extraction purity is greater than 99%
High purity water, effectively realize the separation of water；
5, the removal to metal ion is carried out using adsorption tower, has been specifically designed the sorption channel of S type, it is effective by extending path
Adsorption effect is improved, metal ion can be removed well；
6, evaporator and treating column process links are added, it can be effectively to other impurities preamble process remaining water and may contained
Further sufficiently removal is carried out, achievees the effect that purification purification, output purity is up to 99% stripper.
Detailed description of the invention
Fig. 1 is the method for the present invention flow chart.
Fig. 2 is the hollow fiber membrane filter structural schematic diagram that the present invention uses.
Fig. 3 is the precipitation and separation pool structure schematic diagram that the present invention uses.
Fig. 4 is the adsorption tower structural schematic diagram that the present invention uses.
Specific embodiment
A kind of stripping waste liquor method of purification is to comprising water, photoresist, ethanol amine, dimethyl sulfoxide, granulometric impurity, gold
The stripper waste liquid for belonging to ionic impurity is purified, as shown in Figure 1, including：
Step 001, separation is filtered to the stripper waste liquid with hollow fiber membrane filter, obtain without granulometric impurity,
The primary filtrate of photoresist and concentrate containing granulometric impurity, photoresist；Wherein, the structure of the hollow fiber membrane filter
As shown in Figure 1, being beam formula hollow fiber membrane filter, 1 inner wall arranged for interval of cylinder has the annular unhurried current net that end face is wedge shape
Plate 2；
Step 002, concentrate is passed through precipitation and separation pond, shown in the structure chart 2 in precipitation and separation pond, is equipped in the middle part of precipitation and separation pond
Diaphragm plate 3 is filtered, the inside of filtering diaphragm plate 3 is filled with hollow-fibre membrane ball particle, filters diaphragm plate 3 for precipitation and separation pond and is divided into filtering
Chamber 4 and precipitating chamber 5, precipitating chamber 5 is interior to be equipped with the cylinder partition 6 that multi-layer bottom is mesh 7, and the height of cylinder partition 6 is from inside to outside
Successively increase, the inlet tube of concentrate is extend into precipitating chamber 5, and filtering diaphragm plate 3 stops impurity and photoresist in precipitating chamber 5
It precipitates, the free from foreign meter and photoresist concentrated filtrate in filter chamber 4, which is recycled back to hollow fiber membrane filter, to be continued to filter；
Step 003, the pre-heat treatment is carried out to primary filtrate with preheater；
Step 004, water separating treatment is carried out to the primary filtrate after preheating with dehydrating tower, the tower top pressure of dehydrating tower is set as
8 ~ 10Kpa, the sensitive plate temperature control of dehydrating tower is at 58 ~ 65 DEG C, and the bottom temperature of dehydrating tower is greater than 110 DEG C, and isolated water steams
Gas forms high purity water by condensation process by tower top discharge；The dehydrated filtrate of separation is discharged from tower reactor bottom, by being dehydrated again
It after boiling device sends dehydrating tower back to, repeatedly recycles, after dehydration sufficiently, pumps subsequent processing；
Step 005, adsorption treatment is carried out with dehydrated filtrate of the adsorption tower to pumping, adsorbs tower structure as shown in figure 3, dehydrated
Filtrate is handled along the Adsorption that the S type sorption channel 8 for being filled with active carbon in adsorption tower carries out impurity metal ion, is obtained
Eliminate the adsorption filtration liquid of impurity metal ion；
Step 006, heating evaporation processing is carried out to adsorption filtration liquid with evaporator, forms material steam；
Step 007, refinement treatment is carried out to material steam with rectifying column, the tower top pressure for the treatment of column is set as 4 ~ 6Kpa, material
Steam is upward through inner-tower filling material, and the Gaseous materials after filler are discharged from tower top and are condensed into liquid in treating column condenser
A part of liquid material is back to treating column by state, treating column reflux pump, and the liquid material of reflux and upward material steam exist
It conducts heat and reaches in inner-tower filling material, have the function that purifying mass and trap mist；The material of tower reactor passes through treating column circulating pump
Circulation is heated in purification tower reboiler and part vaporizes, and is again introduced into treating column, the material not being vaporized sends evaporator back to；Essence
After tower processed reaches dynamic balance state, the yet another operative liquid material for the treatment of column reflux pump is sent out, the stripper after being purified.
Primary filter separation is realized by hollow fiber membrane filter, and granulometric impurity and photoresist are separated to precipitation and separation
Pond, by only have water, ethanol amine, dimethyl sulfoxide, impurity metal ion primary filtrate enter dehydration procedure, by preheating,
After dehydration, 99% moisture is removed, removes impurity metal ion using adsorption tower, preferably by evaporator and treating column into one
Step is removed remaining moisture and other impurities, realizes the purification to stripper active principle ethanol amine, dimethyl sulfoxide
Purification obtains the stripper that purity is greater than 99%.
The present invention carries out primary filter using the hollow fiber membrane filter of innovative design, realizes to granulometric impurity and photoetching
The separation of glue；Particularly by cylinder inboard wall arranged for interval annular unhurried current web plate, so that being formed with multistage unhurried current in filter cartridge body
Chamber, so that the concentrated filtrate that the stripper waste liquid and circulation that enter flow into, intracavitary sufficiently and hollow-fibre membrane in unhurried currents at different levels
Filtration treatment improves separating effect；The end face of annular unhurried current web plate is wedge shape, can effectively play good unhurried current effect, simultaneously
Annular unhurried current web plate is the plate of mesh type, and is unlikely to excessively to influence the intracorporal liquid flowing of cylinder, and separative efficiency is played
Good facilitation；Due to using the primary filter mode of hollow-fibre membrane, in the concentrate of filter discharge, also
Containing the more effective component for needing to purify out, therefore, in order to improve the rate of recovery while improving purity, precipitating point is added
From pond, realize granulometric impurity and photoresist and effective liquid in space using the filtering diaphragm plate filled with hollow-fibre membrane ball particle
On separation, chamber is precipitated by lower part and is detained depositing particles and photoresist ingredient, the disengagement chamber for passing through top flows back thickening filtration
Liquid is recycled to filter, improves the amount of primary filtrate；Particularly, precipitating chamber avoids the object of precipitating to improve sedimentation effect
Material is disorderly gone here and there after being ignited under fluid matasomatism, uses multi-layer bottom as the structure of the cylinder partition of mesh, and cylinder partition
Height successively increases from inside to outside, so that the blocking by partition is defined in certain region by the precipitating material being ignited,
Partition bottom is mesh, and entire precipitating chamber bottom space can be allowed to be connected, be designed as the mode that the height of multilayer successively increases,
Conducive to barrier effect step by step is formed, the sedimentation effect of precipitating chamber is improved, is spatially separating efficiency with effective liquid to improve,
Promote recovering effect.
The present invention is conducive to preheater cooperation dehydrating tower and is dehydrated, and improves dehydrating effect；Meanwhile utilizing dehydration reboiler
It is recycled, so that tower reactor liquid continues to be evaporated vaporization, is reached in tower, reach purifying purpose, overhead extraction purity
High purity water greater than 99% effectively realizes the separation of water；Removal to metal ion is carried out using adsorption tower, has been specifically designed S
The sorption channel of type effectively increases adsorption effect by extending path, can remove metal ion well；Add evaporator and
Treating column process links effectively further can sufficiently remove the remaining water of preamble process and the other impurities that may contain progress
It removes, achievees the effect that purification purification, output purity is up to 99% stripper.
Claims (6)
1. a kind of stripping waste liquor method of purification is to comprising water, photoresist, ethanol amine, dimethyl sulfoxide, granulometric impurity, metal
The stripper waste liquid of ionic impurity is purified, which is characterized in that including：
Step 001, separation is filtered to the stripper waste liquid with hollow fiber membrane filter, obtain without granulometric impurity,
The primary filtrate of photoresist and concentrate containing granulometric impurity, photoresist；Wherein, the hollow fiber membrane filter is beam formula
Hollow fiber membrane filter, cylinder（1）Inner wall arranged for interval has the annular unhurried current web plate that end face is wedge shape（2）；
Step 002, concentrate is passed through precipitation and separation pond, filtering diaphragm plate is equipped in the middle part of precipitation and separation pond（3）, filter diaphragm plate（3）
Precipitation and separation pond is divided into filter chamber（4）With precipitating chamber（5）, precipitate chamber（5）The interior multi-layer bottom that is equipped with is mesh（7）Cylinder every
Plate（6）, cylinder partition（6）Height successively increase from inside to outside, the inlet tube of concentrate extend into precipitating chamber（5）It is interior, filtering
Diaphragm plate（3）Impurity and photoresist are stopped in precipitating chamber（5）Interior precipitating, filter chamber（4）Interior free from foreign meter and photoresist it is dense
Contracting filtered fluid, which is recycled back to hollow fiber membrane filter, to be continued to filter；
Step 003, the pre-heat treatment is carried out to primary filtrate with preheater；
Step 004, water separating treatment is carried out to the primary filtrate after preheating with dehydrating tower, isolated vapor is discharged by tower top
High purity water is formed by condensation process；The dehydrated filtrate of separation is discharged from tower reactor bottom, sends dehydration back to by being dehydrated reboiler
It after tower, repeatedly recycles, after dehydration sufficiently, pumps subsequent processing；
Step 005, adsorption treatment is carried out with dehydrated filtrate of the adsorption tower to pumping, dehydrated filtrate in adsorption tower along filling
The S type sorption channel of active charcoal（8）The Adsorption processing for carrying out impurity metal ion, obtains eliminating impurity metal ion
Adsorption filtration liquid；
Step 006, heating evaporation processing is carried out to adsorption filtration liquid with evaporator, forms material steam；
Step 007, refinement treatment is carried out to material steam with rectifying column, material steam is upward through inner-tower filling material, passes through filler
Gaseous materials afterwards are discharged from tower top and are condensed into treating column condenser liquid, and treating column reflux pump is by a part of liquid object
Material is back to treating column, and the liquid material of reflux conducts heat and reaches in inner-tower filling material with upward material steam, reaches purifying
Material and the effect for trapping mist；The material of tower reactor heated simultaneously part of the circulation in purification tower reboiler by treating column circulating pump
Vaporization, is again introduced into treating column, the material not being vaporized sends evaporator back to；After treating column reaches dynamic balance state, treating column
The yet another operative liquid material of reflux pump is sent out, the stripper after being purified.
2. stripping waste liquor method of purification according to claim 1, which is characterized in that the filtering diaphragm plate（3）Inside fill out
Filled with hollow-fibre membrane ball particle.
3. stripping waste liquor method of purification according to claim 1, which is characterized in that the tower top pressure of the dehydrating tower is arranged
For 8 ~ 10Kpa.
4. stripping waste liquor method of purification according to claim 1, which is characterized in that the sensitive plate temperature control of the dehydrating tower
System is at 58 ~ 65 DEG C.
5. stripping waste liquor method of purification according to claim 1, which is characterized in that the bottom temperature of the dehydrating tower is greater than
110℃。
6. stripping waste liquor method of purification according to claim 1, which is characterized in that the tower top pressure of the treating column is arranged
For 4 ~ 6Kpa.
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| CN201810452667.3A CN108840495B (en) | 2018-05-13 | 2018-05-13 | Method for purifying stripping waste liquid |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109432874A (en) * | 2018-12-29 | 2019-03-08 | 上海亿鼎电子系统集成有限公司 | A kind of the purification recyclable device and its methods and applications of organic solvent |
| CN109705004A (en) * | 2019-02-21 | 2019-05-03 | 苏州晶洲装备科技有限公司 | A kind of photoresist stripper Mead-Bauer recovery system |
| CN110387158A (en) * | 2019-07-16 | 2019-10-29 | 福建钰融科技有限公司 | With the iron oxide red anticorrosive paint and preparation method thereof of dilution vacuum distillation raffinate preparation |
| CN111196643A (en) * | 2020-02-18 | 2020-05-26 | 福建钰融科技有限公司 | Method for reducing iron content in regeneration stripping liquid by silica gel powder |
| CN112321044A (en) * | 2020-09-01 | 2021-02-05 | 福建钰融科技有限公司 | Purification liquid of waste stripping liquid and purification method and application thereof |
| CN112851541A (en) * | 2021-02-24 | 2021-05-28 | 河北科技大学 | Method and device for recovering NMF and MDG from waste photoresist stripping solution |
| CN114212942A (en) * | 2021-12-22 | 2022-03-22 | 扬州臻微生物技术有限公司 | Adsorption and desorption device, equipment for removing impurities and non-metal ions in chlor-alkali chemical production and treatment method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110387158A (en) * | 2019-07-16 | 2019-10-29 | 福建钰融科技有限公司 | With the iron oxide red anticorrosive paint and preparation method thereof of dilution vacuum distillation raffinate preparation |
| CN110387158B (en) * | 2019-07-16 | 2021-07-16 | 福建钰融科技有限公司 | Iron oxide red antirust paint prepared by using diluent to distill residual liquid under reduced pressure and preparation method thereof |
| CN111196643A (en) * | 2020-02-18 | 2020-05-26 | 福建钰融科技有限公司 | Method for reducing iron content in regeneration stripping liquid by silica gel powder |
| CN112321044A (en) * | 2020-09-01 | 2021-02-05 | 福建钰融科技有限公司 | Purification liquid of waste stripping liquid and purification method and application thereof |
| CN112851541A (en) * | 2021-02-24 | 2021-05-28 | 河北科技大学 | Method and device for recovering NMF and MDG from waste photoresist stripping solution |
| CN112851541B (en) * | 2021-02-24 | 2022-08-12 | 河北科技大学 | Method and device for recovering NMF and MDG from waste photoresist stripping solution |
| CN114212942A (en) * | 2021-12-22 | 2022-03-22 | 扬州臻微生物技术有限公司 | Adsorption and desorption device, equipment for removing impurities and non-metal ions in chlor-alkali chemical production and treatment method |
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