CN109702439B - Sample tray for ultra-high vacuum downward sample transfer and manufacturing method thereof - Google Patents
Sample tray for ultra-high vacuum downward sample transfer and manufacturing method thereof Download PDFInfo
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- CN109702439B CN109702439B CN201910169888.4A CN201910169888A CN109702439B CN 109702439 B CN109702439 B CN 109702439B CN 201910169888 A CN201910169888 A CN 201910169888A CN 109702439 B CN109702439 B CN 109702439B
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Abstract
The invention discloses a sample tray for ultra-high vacuum sample downloading and a manufacturing method thereof, relates to the technical field of ultra-high vacuum sample downloading, and aims to solve the technical problems that the sample tray under the ultra-high vacuum has low sample transmitting efficiency and a sample is easy to fall off in the prior art. The manufacturing method of the sample tray for the ultra-high vacuum downloading comprises the following steps: forming a disc body, a rotating shaft and a support column by machining, stamping or cutting 316 stainless steel, 316L stainless steel or 304 stainless steel materials, wherein the disc body and the rotating shaft are integrally formed, and a plurality of mounting holes are uniformly formed in the periphery of the disc body; an oxygen-free copper material is adopted to form a grabbing disc through machining, stamping or cutting, and the grabbing disc is connected with the disc body through a mounting hole; the pillar is connected with the grabbing disc in a welding mode, and the welding line is polished to be smooth and flat.
Description
Technical Field
The invention relates to the technical field of ultrahigh vacuum sample downloading, in particular to a sample tray for ultrahigh vacuum sample downloading and a manufacturing method thereof.
Background
At present, the structure of sample tray under the ultrahigh vacuum is mostly the linear type, can bear two sample trays simultaneously at most.
The inventor of the application finds that the existing sample tray mainly has the following defects:
firstly, at most, only two sample holders can be simultaneously carried, so that the research efficiency is directly limited;
secondly, the sample can be transferred only by a single sample holder, and the whole transportation cannot be realized; specifically, firstly, the sample tray is linear, so that the desorption action with the transfer device is difficult to realize, namely the sample tray is difficult to freely assemble, fix and disassemble with the transfer device, so that most sample trays are designed to be combined with the transfer device into a whole, and only the sample tray can be freely desorbed; secondly, when the whole body is transported, the linear structure is easy to swing or be unstable of the sample table, so that the sample falls off.
Third, the linear sample tray is easy to confuse samples, because the field of view in the pipeline is limited, and multiple samples in parallel are easy to confuse.
Therefore, it is a technical problem to be solved by those skilled in the art how to provide an ultra-high vacuum sample transfer tray and a manufacturing method thereof, which can simultaneously carry a plurality of samples, effectively improve sample transfer efficiency, and effectively prevent the samples from falling off.
Disclosure of Invention
The invention aims to provide a sample tray for ultra-high vacuum sample transfer and a manufacturing method thereof, and aims to solve the technical problems that the sample transfer efficiency of the existing sample tray under ultra-high vacuum is low and a sample is easy to fall off.
The invention provides a method for manufacturing an ultrahigh vacuum sample downloading tray, which comprises the following steps: the sample taking device comprises a disc body, wherein a rotating shaft is arranged at the central position of the disc body, a plurality of grabbing discs are uniformly arranged at the edge of the disc body at intervals along the circumferential direction, a supporting column is arranged on one side, away from the disc body, of each grabbing disc, the supporting columns extend along the radial direction of the grabbing discs, a sample tray can be assembled between every two adjacent grabbing discs, and a sample is placed on the sample tray; the tray body is made of 316 stainless steel, 316L stainless steel or 304 stainless steel, and the tray grabbing material is made of oxygen-free copper; the manufacturing method of the sample tray for the ultra-high vacuum downward transmission comprises the following steps: forming a disc body, a rotating shaft and a support column by machining, stamping or cutting 316 stainless steel, 316L stainless steel or 304 stainless steel materials, wherein the disc body and the rotating shaft are integrally formed, and a plurality of mounting holes are uniformly formed in the periphery of the disc body; an oxygen-free copper material is adopted to form a grabbing disc through machining, stamping or cutting, and the grabbing disc is connected with the disc body through the mounting hole; the support is connected with the grabbing disc in a welding mode.
Compared with the prior art, the manufacturing method of the sample tray for the ultra-high vacuum downward transfer has the following advantages:
in the method for manufacturing the sample tray for the ultra-high vacuum downloading, the sample tray for the ultra-high vacuum downloading comprises the following steps: the sample taking device comprises a disc body, wherein a rotating shaft is arranged at the central position of the disc body, a plurality of grabbing discs are uniformly arranged at the edge of the disc body at intervals along the circumferential direction, a support column is arranged on one side, away from the disc body, of each grabbing disc in an extending mode along the radial direction of each grabbing disc, a sample support can be assembled between every two adjacent grabbing discs, and a sample is placed on the sample support; the material of the tray body is 316 stainless steel, 316L stainless steel or 304 stainless steel, and the material of the tray grasping tray is oxygen-free copper; the manufacturing method of the sample tray for the ultra-high vacuum downward transmission comprises the following steps: forming a disc body, a rotating shaft and a support column by machining, stamping or cutting 316 stainless steel, 316L stainless steel or 304 stainless steel materials, wherein the disc body and the rotating shaft are integrally formed, and a plurality of mounting holes are uniformly formed in the periphery of the disc body; an oxygen-free copper material is adopted to form a grabbing disc through machining, stamping or cutting, and the grabbing disc is connected with the disc body through a mounting hole; the pillar is connected with the grabbing disc in a welding mode, and the welding line is polished to be smooth and flat. Therefore, the ultrahigh vacuum sample-passing tray manufacturing method provided by the invention has the advantages that the tray body, the rotating shaft and the support are made of 316 stainless steel, 316L stainless steel or 304 stainless steel through machining, stamping or cutting, and the grabbing tray is made of oxygen-free copper material through machining, stamping or cutting, so that the material is small in deformation and good in elasticity under ultrahigh vacuum conditions, and has ultrahigh machining precision and deformation precision, so that the movement effect of the sample tray can be indirectly ensured; and, because the edge of disk body evenly is equipped with a plurality of grabs the dish along circumference interval, and can hold in the palm through the mode assembly sample of plug between two adjacent grabs the dish, has placed the sample on the sample holds in the palm, therefore a plurality of samples hold in the palm and can effectively improve the sample transfer efficiency, and the connected mode of plug can effectively prevent that the sample from droing.
The invention also provides an ultrahigh vacuum sample-transferring tray, comprising: the sample holder comprises a disc body, wherein a rotating shaft is arranged at the central position of the disc body, a plurality of grabbing discs are uniformly arranged at the edge of the disc body at intervals along the circumferential direction, a supporting column is arranged on one side, away from the disc body, of each grabbing disc, the supporting columns extend along the radial direction of the grabbing discs, a sample holder can be assembled between every two adjacent grabbing discs in a plugging mode, and a sample is placed on the sample holder; the tray body is made of 316 stainless steel, 316L stainless steel or 304 stainless steel, and the tray grabbing material is made of oxygen-free copper.
In practical application, the tray body is in a regular polygon structure, and each edge is connected with the grabbing tray; after the plurality of sample trays and the plurality of grabbing discs are fixed, the whole sample tray for the ultra-high vacuum downward transmission sample is of a nearly circular structure.
The tray body is of a regular hexagon structure, and each edge is connected with the grabbing tray; six the sample holds in the palm with six grab the fixed back of dish, the sample tray is whole to be nearly circular structure for the sample under the ultrahigh vacuum, just it is used for distinguishing every sample position to do the digital mark on the disk body.
Specifically, spring pieces are respectively arranged on two sides of the gripping disk, which are in contact with the sample holder, and the sample holder is inserted into the spring pieces to be detachably fixed with the gripping disk.
In practical application, the grabbing disc adopts a triangle-like structure, and the spring piece adopts a rectangular structure; the support column is used for being connected with the grabbing mechanism to realize the movement of the sample tray for the ultra-high vacuum downloading.
The length of the spring piece is half of the side length of the grabbing disc, and the spring piece is far away from the disc body.
Specifically, the sample support adopts a rectangular structure, a groove is formed in the sample support, and the sample is placed in the groove.
Further, a clamping jaw is arranged on one side, away from the disc body, of the sample support along the radial extension of the disc body.
Furthermore, the disc body is provided with lightening holes.
Compared with the prior art, the advantages of the ultrahigh vacuum downward sample tray and the manufacturing method of the ultrahigh vacuum downward sample tray are the same, and are not repeated herein.
In addition, the sample tray for ultra-high vacuum sample transfer is of a nearly circular structure as a whole, so that the structure is compact, and the sample tray is of a rotational symmetric structure in a two-dimensional plane, so that the sample tray is more beneficial to transfer, and the sample transfer efficiency is further effectively improved; and, the pillar can be used for with snatch the mechanism and be connected, for the rotation and the translation of sample tray provide a plurality of points of snatching, realize the removal of sample tray to guarantee the multidimension degree direction of motion of sample tray.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic flow chart of a method for manufacturing an ultra-high vacuum sample tray according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an ultra-high vacuum sample unloading tray according to an embodiment of the present invention.
In the figure: 1-a tray body; 2-a rotating shaft; 3, grabbing a disc; 4-a pillar; 5-sample holder; 6-sample; 7-spring leaf; 8-clamping jaws; 11-lightening holes.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the system or element being referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; the connection can be mechanical connection or electrical connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Fig. 1 is a schematic flow chart of a method for manufacturing an ultra-high vacuum sample tray according to an embodiment of the present invention; fig. 2 is a schematic structural diagram of an ultra-high vacuum sample unloading tray according to an embodiment of the present invention.
As shown in fig. 2 in combination with fig. 1, an embodiment of the present invention provides a method for manufacturing an ultra-high vacuum sample downloading tray, where the ultra-high vacuum sample downloading tray includes: the rotary table comprises a table body 1, wherein a rotary shaft 2 is arranged at the central position of the table body 1, a plurality of grabbing tables 3 are uniformly arranged at the edge of the table body 1 at intervals along the circumferential direction, a supporting column 4 is arranged on one side, away from the table body 1, of each grabbing table 3, the supporting column 4 extends along the radial direction of the grabbing table 3, a sample support 5 can be assembled between every two adjacent grabbing tables 3, and a sample 6 is placed on the sample support 5; the material of the tray body 1 adopts 316 stainless steel, 316L stainless steel or 304 stainless steel, and the material of the grabbing tray 3 adopts oxygen-free copper; the manufacturing method of the sample tray for the ultra-high vacuum downward transmission comprises the following steps: step S1, forming a tray body, a rotating shaft and a support column by machining, punching or cutting 316 stainless steel, 316L stainless steel or 304 stainless steel, wherein the tray body and the rotating shaft are integrally formed, and a plurality of mounting holes are uniformly formed in the periphery of the tray body; step S2, forming a grabbing disc by machining, stamping or cutting an oxygen-free copper material, and connecting the grabbing disc with the disc body through a mounting hole; and step S3, connecting the support with the grabbing disc in a welding mode, and polishing the welding line smoothly.
Compared with the prior art, the manufacturing method of the sample tray for the ultra-high vacuum downloading has the following advantages:
in the method for manufacturing an ultra-high vacuum sample transfer tray according to an embodiment of the present invention, as shown in fig. 2 in combination with fig. 1, the ultra-high vacuum sample transfer tray includes: the rotary table comprises a table body 1, wherein a rotary shaft 2 is arranged at the central position of the table body 1, a plurality of grabbing tables 3 are uniformly arranged at the edge of the table body 1 at intervals along the circumferential direction, a supporting column 4 is arranged on one side, away from the table body 1, of each grabbing table 3, the supporting column 4 extends along the radial direction of the grabbing table 3, a sample support 5 can be assembled between every two adjacent grabbing tables 3, and a sample 6 is placed on the sample support 5; the material of the tray body 1 adopts 316 stainless steel, 316L stainless steel or 304 stainless steel, and the material of the grabbing tray 3 adopts oxygen-free copper; the manufacturing method of the sample tray for the ultra-high vacuum downward transmission comprises the following steps: step S1, forming a tray body, a rotating shaft and a support column by machining, punching or cutting 316 stainless steel, 316L stainless steel or 304 stainless steel, wherein the tray body and the rotating shaft are integrally formed, and a plurality of mounting holes are uniformly formed in the periphery of the tray body; step S2, forming a grabbing disc by machining, stamping or cutting an oxygen-free copper material, and connecting the grabbing disc with the disc body through a mounting hole; and step S3, connecting the support with the grabbing disc in a welding mode, and polishing the welding line smoothly. Therefore, it can be known from the analysis that in the manufacturing method of the sample tray for the ultra-high vacuum downloading, the tray body, the rotating shaft and the support are made of 316 stainless steel, 316L stainless steel or 304 stainless steel through machining, stamping or cutting, and the gripping tray is made of oxygen-free copper through machining, stamping or cutting, so that under the condition of the ultra-high vacuum, the material has small deformation and good elasticity, and has ultra-high machining precision and deformation precision, and the movement effect of the sample tray can be indirectly ensured; and, because the edge of disk body evenly is equipped with a plurality of grabs the dish along circumference interval, and can hold in the palm through the mode assembly sample of plug between two adjacent grabs the dish, has placed the sample on the sample holds in the palm, therefore a plurality of samples hold in the palm and can effectively improve the sample transfer efficiency, and the connected mode of plug can effectively prevent that the sample from droing.
As shown in fig. 2, an embodiment of the present invention further provides an ultra-high vacuum sample tray, including: the sample taking device comprises a disc body 1, wherein a rotating shaft 2 is arranged at the central position of the disc body 1, a plurality of grabbing discs 3 are uniformly arranged at the edge of the disc body 1 at intervals along the circumferential direction, a supporting column 4 is arranged on one side, away from the disc body 1, of each grabbing disc 3, the supporting column 4 extends along the radial direction of each grabbing disc 3, a sample support 5 can be assembled between every two adjacent grabbing discs 3 in a plugging and unplugging mode, and a sample 6 is placed on the sample support 5; the material of the tray body 1 adopts 316 stainless steel, 316L stainless steel or 304 stainless steel, and the material of the grabbing tray 3 adopts oxygen-free copper.
The disk body 1, the rotating shaft 2 and the support column 4 are made of 316 stainless steel, 316L stainless steel or 304 stainless steel materials, and the gripping disk is made of an oxygen-free copper material, so that the materials have small deformation and good elasticity under the ultrahigh vacuum condition and have ultrahigh processing precision and deformation precision, and the movement effect of the sample tray can be indirectly ensured; and, because the edge of disk body 1 evenly is equipped with a plurality of grabs dish 3 along circumference interval, and can hold in the palm 5 through the mode assembly sample of plug between two adjacent grabs dish 3, has placed sample 6 on the sample holds in the palm 5, therefore a plurality of samples hold in the palm 5 and can effectively improve and pass appearance efficiency, and the connected mode of plug can effectively prevent that the sample from droing.
In practical application, as shown in fig. 2, the tray body 1 may be in a regular polygon structure, and each side is connected with a catch tray 3; after the sample trays 5 and the gripping trays 3 are fixed, the sample trays for ultra-high vacuum downward transfer are integrally of a nearly circular structure.
Preferably, as shown in fig. 2, the tray body 1 may adopt a regular hexagon structure, and each side is connected with a catch tray 3; after the six sample trays 5 and the six grabbing discs 3 are fixed, the sample trays for ultra-high vacuum sample downloading are integrally of a nearly circular structure, and a digital mark is made on the disc body 1 and used for distinguishing the position of each sample.
The nearly circular structure not only can simultaneously bear a plurality of samples (for example, six), but also has a compact structure and is rotationally symmetrical on a two-dimensional plane, so that the transmission of the sample tray is facilitated, and the sample transmission efficiency is further improved.
Specifically, as shown in fig. 2, spring pieces 7 may be respectively disposed on both sides of the gripping disk 3 contacting the sample holder 5, so that the sample holder 5 can be inserted into the spring pieces 7 to be detachably fixed to the gripping disk 3.
The plug-in detachable fixation is realized through the spring piece 7, so that the free detachment can be realized, and the falling off of a sample can be effectively prevented.
In practical application, as shown in fig. 2, the catch tray 3 may have a triangle-like structure, and the spring plate 7 may have a rectangular structure; in addition, the above-mentioned pillar 4 can be used for being connected with a grasping mechanism, thereby realizing the movement of the sample tray for ultra-high vacuum downloading.
The column 4 can provide a plurality of gripping points for rotation and translation of the sample tray, thereby ensuring that the sample tray has a multi-dimensional direction of motion.
As shown in fig. 2, the length of the spring plate 7 may be half of the side length of the gripping disk 3, and the spring plate 7 is disposed away from the disk body 1. This kind of setting not only can guarantee that the sample holds in the palm 5 stable fixed, convenient to detach moreover, and save material simultaneously is convenient for manufacture.
Specifically, the sample holder 5 may have a rectangular structure, and the sample holder 5 may have a groove, so that the sample 6 can be stably placed in the groove.
Further, as shown in fig. 2, a claw 8 may be extended from a side of the sample holder 5 away from the tray body 1 in a radial direction of the tray body 1, so that the sample holder 5 can be inserted into and pulled out of the holding tray 3 by the claw 8 cooperating with the robot arm.
Furthermore, as shown in fig. 2, the tray body 1 may be provided with lightening holes 11; the lightening holes 11 may preferably be provided in plurality, and the plurality of lightening holes 11 are evenly distributed on the tray body 1.
The sample tray for the ultra-high vacuum downloading provided by the embodiment of the invention is mainly used for sample transmission under the ultra-high vacuum. As the experimental pipeline and the cavity are required to achieve ultra-high vacuum, the vacuum pumping is generally required to be carried out for more than ten hours and even more than twenty hours. The normal sample changing process is to inflate the vacuum experimental pipeline and the vacuum cavity, open the cabin door, change the sample, close the cabin door and extract the vacuum again. In doing so, the average time for one change takes at least ten hours. Under the prior art, the number of samples that sample tray can bear is two at most, and the great restriction of trade appearance time has experimental speed. For this reason, the invention of the sample tray capable of simultaneously carrying a plurality of (for example, six) sample trays can improve the experiment speed by about 3 times.
The sample tray is designed into a dodecagonal shape and is of a nearly circular structure, and the shape design can enable the sample tray to bear more sample trays and is beneficial to sample transfer of the whole tray. Because under the ultrahigh vacuum, the transfer direction of sample can only be the linear type, and what unilateral manipulator snatched is mostly forward and backward motion, is in a dimension promptly. Therefore, the nearly circular circulating structure can ensure that each flag-shaped sample holder carried by the tray can be closely matched with the manipulator through rotary motion. Due to the limitation of the structure of the flag-shaped sample tray and the size of the pipeline, the number of the sample trays which can be carried on the sample tray related to the invention can be six. Based on the patented technology of the invention, under the condition of enlarging the size of the pipeline, the size of the sample tray can be enlarged along with the expansion of the size of the pipeline, so that the number of the sample trays on the pipeline can be increased as appropriate.
Under ultra-high vacuum conditions, the rotational movement of the parts is much more difficult than the linear movement. In order to ensure the vacuum degree, the inner diameter of the ultrahigh vacuum pipeline is mostly narrower, and the space does not have the condition of completing corresponding rotary motion; under the condition of ultrahigh vacuum, the expansion and contraction effect is reduced, the gas lubrication is invalid, and the rotary motion can be completed only under the conditions that the processing precision of various parts is very high and the mutual matching degree is also very high.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (9)
1. A method for manufacturing an ultrahigh vacuum sample downloading tray is characterized by comprising the following steps: the sample holder comprises a disc body, wherein a rotating shaft is arranged at the central position of the disc body, a plurality of grabbing discs are uniformly arranged at the edge of the disc body at intervals along the circumferential direction, a supporting column is arranged on one side, away from the disc body, of each grabbing disc, the supporting columns extend along the radial direction of the grabbing discs, a sample holder can be assembled between every two adjacent grabbing discs in a plugging mode, and a sample is placed on the sample holder; the tray body is made of 316 stainless steel, 316L stainless steel or 304 stainless steel, and the tray grabbing material is made of oxygen-free copper;
the manufacturing method of the sample tray for the ultra-high vacuum downward transmission comprises the following steps:
forming a disc body, a rotating shaft and a support column by machining, stamping or cutting 316 stainless steel, 316L stainless steel or 304 stainless steel materials, wherein the disc body and the rotating shaft are integrally formed, and a plurality of mounting holes are uniformly formed in the periphery of the disc body;
an oxygen-free copper material is adopted to form a grabbing disc through machining, stamping or cutting, and the grabbing disc is connected with the disc body through the mounting hole;
the support is connected with the grabbing disc in a welding mode and is used for providing a grabbing point for rotation and translation of the sample tray.
2. An ultra-high vacuum sample tray, comprising: the sample tray comprises a tray body, wherein a rotating shaft is arranged at the central position of the tray body, lightening holes are formed in the tray body, a plurality of grabbing trays are uniformly arranged at the edge of the tray body at intervals along the circumferential direction, a supporting column is arranged on one side, away from the tray body, of each grabbing tray, the supporting columns extend along the radial direction of the grabbing trays, the supporting columns are used for providing grabbing points for rotation and translation of the sample tray, a sample tray can be assembled between every two adjacent grabbing trays in a plugging mode, and a sample is placed on the sample tray; the tray body is made of 316 stainless steel, 316L stainless steel or 304 stainless steel, and the tray grabbing material is made of oxygen-free copper.
3. The ultra-high vacuum down-transfer sample tray of claim 2, wherein the tray body adopts a regular polygon structure, and each edge is connected with the gripping disk; after the plurality of sample trays and the plurality of grabbing discs are fixed, the whole sample tray for the ultra-high vacuum downward transmission sample is of a nearly circular structure.
4. The ultra-high vacuum down-transfer sample tray of claim 3, wherein the tray body adopts a regular hexagonal structure, and each edge is connected with the gripping disk; six the sample holds in the palm with six grab the fixed back of dish, the sample tray is whole to be nearly circular structure for the sample under the ultrahigh vacuum, just it is used for distinguishing every sample position to do the digital mark on the disk body.
5. The ultra-high vacuum sample tray for downward conveying of any one of claims 2 to 4, wherein spring pieces are respectively arranged on two sides of the gripping disk contacting with the sample tray, and the sample tray is inserted into the spring pieces to be detachably fixed with the gripping disk.
6. The ultra-high vacuum sample-unloading tray according to claim 5, wherein the gripping disk is of a triangle-like structure, and the spring piece is of a rectangular structure; the support column is used for being connected with the grabbing mechanism to realize the movement of the sample tray for the ultra-high vacuum downloading.
7. The ultra-high vacuum down-transfer sample tray of claim 6, wherein the spring plate has a length that is half of a side length of the gripping disk, and the spring plate is disposed away from the disk body.
8. The ultra-high vacuum sample-unloading tray according to claim 5, wherein the sample tray is rectangular and is provided with a groove, and the sample is placed in the groove.
9. The ultra-high vacuum down-conversion sample tray as claimed in claim 8, wherein the sample tray is provided with claws extending in a radial direction of the tray body on a side thereof away from the tray body.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910169888.4A CN109702439B (en) | 2019-03-06 | 2019-03-06 | Sample tray for ultra-high vacuum downward sample transfer and manufacturing method thereof |
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| CN201910169888.4A CN109702439B (en) | 2019-03-06 | 2019-03-06 | Sample tray for ultra-high vacuum downward sample transfer and manufacturing method thereof |
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| CN109702439A CN109702439A (en) | 2019-05-03 |
| CN109702439B true CN109702439B (en) | 2020-08-11 |
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| CN113884707A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and transfer vacuum sample holder |
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| CN202557942U (en) * | 2012-04-28 | 2012-11-28 | 熊建军 | Copper pole line tray |
| CN104417833A (en) * | 2013-08-28 | 2015-03-18 | 承德天工建材有限公司 | Tray applied to production process of sound absorption board and production process thereof |
| CN107973073A (en) * | 2017-11-30 | 2018-05-01 | 清华大学 | Ultrahigh vacuum passes the sample transfer device of sample system |
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| CN208007515U (en) * | 2017-12-20 | 2018-10-26 | 上海艾度机器有限公司 | A kind of single side tablet pallet |
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| JPH01237428A (en) * | 1988-03-18 | 1989-09-21 | Nippon Telegr & Teleph Corp <Ntt> | Sample transfer apparatus in vacuum |
| CN205307284U (en) * | 2016-01-09 | 2016-06-15 | 王月兰 | Novel tray device |
| CN205749541U (en) * | 2016-05-31 | 2016-11-30 | 中国科学院高能物理研究所 | Sample transferring device and have this device ultrahigh vacuum measure system |
| CN107677844B (en) * | 2017-09-06 | 2019-09-27 | 清华大学 | A kind of sample transferring device and ultrahigh vacuum measuring system |
| CN208361372U (en) * | 2018-07-09 | 2019-01-11 | 江阴鑫联金属制品有限公司 | All-purpose robot casts the automatic handgrip assembly of shell processed |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202557942U (en) * | 2012-04-28 | 2012-11-28 | 熊建军 | Copper pole line tray |
| CN104417833A (en) * | 2013-08-28 | 2015-03-18 | 承德天工建材有限公司 | Tray applied to production process of sound absorption board and production process thereof |
| CN107973073A (en) * | 2017-11-30 | 2018-05-01 | 清华大学 | Ultrahigh vacuum passes the sample transfer device of sample system |
| CN207737672U (en) * | 2017-12-20 | 2018-08-17 | 上海艾度机器有限公司 | A kind of nine foot plane pallets |
| CN208007515U (en) * | 2017-12-20 | 2018-10-26 | 上海艾度机器有限公司 | A kind of single side tablet pallet |
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