CN109702325B - 一种动态调节脉冲能量与时间间隔的激光加工方法 - Google Patents
一种动态调节脉冲能量与时间间隔的激光加工方法 Download PDFInfo
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- CN109702325B CN109702325B CN201910143582.1A CN201910143582A CN109702325B CN 109702325 B CN109702325 B CN 109702325B CN 201910143582 A CN201910143582 A CN 201910143582A CN 109702325 B CN109702325 B CN 109702325B
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- 238000003672 processing method Methods 0.000 title claims abstract description 9
- 238000000034 method Methods 0.000 claims abstract description 21
- 230000008569 process Effects 0.000 claims abstract description 20
- 238000003754 machining Methods 0.000 claims abstract description 8
- 230000002238 attenuated effect Effects 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 abstract description 22
- 230000004044 response Effects 0.000 abstract description 2
- 230000003993 interaction Effects 0.000 description 6
- 210000002381 plasma Anatomy 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
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CN201910143582.1A CN109702325B (zh) | 2017-07-06 | 2017-07-06 | 一种动态调节脉冲能量与时间间隔的激光加工方法 |
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CN201710546389.3A CN107234336B (zh) | 2017-07-06 | 2017-07-06 | 一种动态调节脉冲能量与时间间隔的激光加工方法及装置 |
CN201910143582.1A CN109702325B (zh) | 2017-07-06 | 2017-07-06 | 一种动态调节脉冲能量与时间间隔的激光加工方法 |
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CN201710546389.3A Division CN107234336B (zh) | 2017-07-06 | 2017-07-06 | 一种动态调节脉冲能量与时间间隔的激光加工方法及装置 |
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CN109702325A CN109702325A (zh) | 2019-05-03 |
CN109702325B true CN109702325B (zh) | 2020-09-01 |
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CN201710546389.3A Active CN107234336B (zh) | 2017-07-06 | 2017-07-06 | 一种动态调节脉冲能量与时间间隔的激光加工方法及装置 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US11346952B2 (en) | 2017-12-08 | 2022-05-31 | Hesai Technology Co., Ltd. | Systems and methods for light detection and ranging |
CN108089201B (zh) * | 2017-12-08 | 2020-04-24 | 上海禾赛光电科技有限公司 | 障碍物信息获取方法、激光脉冲的发射方法及装置 |
JP7043128B2 (ja) * | 2018-01-31 | 2022-03-29 | 住友重機械工業株式会社 | レーザ制御装置及びレーザ加工方法 |
TWI734931B (zh) * | 2018-09-17 | 2021-08-01 | 鴻超光電科技股份有限公司 | 軸調光斑方法及其系統 |
CN109175729A (zh) * | 2018-09-30 | 2019-01-11 | 大族激光科技产业集团股份有限公司 | 一种用于环氧树脂封装片的激光切割系统及方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPS6293095A (ja) * | 1985-10-18 | 1987-04-28 | Matsushita Electric Ind Co Ltd | レ−ザ加工装置 |
JPH10153750A (ja) * | 1996-11-25 | 1998-06-09 | Sumitomo Electric Ind Ltd | レーザビーム整形光学部品 |
CN101655391B (zh) * | 2009-08-28 | 2011-06-15 | 中国科学院光电技术研究所 | 一种改进的白天星体探测装置 |
CN102000912B (zh) * | 2010-09-21 | 2014-06-18 | 中国科学院理化技术研究所 | 一种激光微纳加工系统及方法 |
JP5775811B2 (ja) * | 2011-12-26 | 2015-09-09 | 浜松ホトニクス株式会社 | レーザ加工装置及びレーザ加工方法 |
CN102642092B (zh) * | 2012-04-13 | 2015-06-10 | 北京信息科技大学 | 基于激光光束的微孔加工装置及方法 |
CN103777194B (zh) * | 2014-01-23 | 2016-03-02 | 中国科学院空间科学与应用研究中心 | 一种模块化的光电探测器响应特征检测系统 |
CN104296970A (zh) * | 2014-10-17 | 2015-01-21 | 上海集成电路研发中心有限公司 | 电控自动化光电测试装置 |
CN106881527B (zh) * | 2015-12-10 | 2020-07-03 | 彭翔 | 激光加工系统的智能加工组件 |
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2017
- 2017-07-06 CN CN201910143582.1A patent/CN109702325B/zh active Active
- 2017-07-06 CN CN201710546389.3A patent/CN107234336B/zh active Active
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CN107234336B (zh) | 2020-08-28 |
CN107234336A (zh) | 2017-10-10 |
CN109702325A (zh) | 2019-05-03 |
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