CN109687117A - Graphene millimeter wave reconfigurable antenna and preparation method thereof - Google Patents

Graphene millimeter wave reconfigurable antenna and preparation method thereof Download PDF

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Publication number
CN109687117A
CN109687117A CN201910132192.4A CN201910132192A CN109687117A CN 109687117 A CN109687117 A CN 109687117A CN 201910132192 A CN201910132192 A CN 201910132192A CN 109687117 A CN109687117 A CN 109687117A
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layer
antenna
graphene
metal strip
graphene layer
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CN109687117B (en
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胡南
谢文青
刘建睿
赵丽新
刘爽
袁昌勇
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Beijing Star Enlan Microwave Technology Co Ltd
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Beijing Star Enlan Microwave Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/36Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H01Q1/364Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor
    • H01Q1/368Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor using carbon or carbon composite
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/36Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H01Q1/38Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q19/00Combinations of primary active antenna elements and units with secondary devices, e.g. with quasi-optical devices, for giving the antenna a desired directional characteristic
    • H01Q19/06Combinations of primary active antenna elements and units with secondary devices, e.g. with quasi-optical devices, for giving the antenna a desired directional characteristic using refracting or diffracting devices, e.g. lens
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02DCLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
    • Y02D30/00Reducing energy consumption in communication networks
    • Y02D30/70Reducing energy consumption in communication networks in wireless communication networks

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  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Details Of Aerials (AREA)

Abstract

The invention discloses a kind of graphene millimeter wave reconfigurable antennas and preparation method thereof, are related to millimeter wave antenna technical field.The antenna includes substrate, the intermediate single-layer graphene layer not being in contact is provided at left and right sides of the substrate, the upper surface of substrate between the upper surface of the single-layer graphene layer of the left and right sides and two single-layer graphene layers is provided with the metal strip of structure irregular cycle, the metal strip of structure irregular cycle forms Chirp Bragg grating, and the Bragg-grating structure of the upper surface of left and right sides single-layer graphene layer is connected together by metal layer.The antenna is restructural, has 4 kinds of working conditions;Working method is simple, it is only necessary to adjust back grid voltage;100GHz-300GHz, simple process can be effectively operating in;By changing Chirp Bragg optical grating construction, expansible working frequency to 1000GHz.

Description

Graphene millimeter wave reconfigurable antenna and preparation method thereof
Technical field
The present invention relates to millimeter wave antenna technical field more particularly to a kind of graphene millimeter wave reconfigurable antenna and its systems Make method.
Background technique
It is target-seeking etc. for realization communication, navigation, guidance, warning, weapon with the rapid development of modern radar and communication system Purpose, antenna amount needed for aircraft, steamer, satellite etc. are more and more.This is continuously increased the weight loaded on platform, And expense needed for building antenna also constantly rises, meanwhile, it is disturbed under the electromagnetism between each antenna also very greatly, seriously affects day The normal work of line.For the radar cross section realization for mitigating the antenna weights loaded on platform, reducing cost, reducing platform Good electromagnetic compatibility characteristic, it would be desirable to the function of mutiple antennas is realized with an antenna.By dynamically changing its physics knot Structure or size or its property, make it have multiple functions, and this antenna is known as reconfigurable antenna.
Millimeter wave refers to that frequency is in one section of electromagnetic wave of 26.5GHz-300GHz, and millimeter wave and THz wave are in high speed nothing Line communication, radar, human-body safety detection etc. fields have broad application prospects, the transmitting of Yao Shixian millimeter wave frequency band signal and It receives, be unable to do without various millimeter wave antennas.In the millimeter wave frequency band of the high-end of millimeter wave, such as 100GHz or more, that is, enter Terahertz frequency, Terahertz frequency refer to that the electromagnetic wave of 100GHz-10THz, 1THz=1000GHz are overlapped in millimeter wave and Terahertz Frequency 100GHz-300GHz has huge potential market in the application such as future communications, imaging, radar.
Due to band frequency height, to the device material that can be worked in the frequency range, structure and antenna etc. are all relatively difficult to achieve, If being able to achieve the antenna of the frequency and restructural, the solid technical support of the application offer to the following frequency range.
Summary of the invention
The technical problem to be solved by the present invention is to how provide a kind of simple process, restructural graphene millimeter wave can Reconfigurable antenna and preparation method thereof.
In order to solve the above technical problems, the technical solution used in the present invention is: a kind of restructural day of graphene millimeter wave Line, it is characterised in that: including substrate, the intermediate single-layer graphene layer not being in contact is provided at left and right sides of the substrate, it is left The upper surface of substrate between the upper surface of the single-layer graphene layer of right two sides and two single-layer graphene layers, which is provided with, does not advise The metal strip of the then metal strip of periodic structure, structure irregular cycle forms Chirp Bragg grating, left and right sides single layer The Bragg-grating structure of the upper surface of graphene layer is connected together by metal layer;With the single-layer graphene layer phase There are two backgates for the bottom setting of the corresponding silicon dioxide substrates, pass through the voltage in control backgate, control graphene layer Middle electronics gas concentration cooperates the Chirp Bragg grating above graphene layer, and make Antenna Operation in four kinds of states: 1) antenna is along Zhou Sing Bragg grating to the left, bidirectional radiation to the right;2) antenna only radiates to the left;3) antenna only radiates to the right;4) antenna, which is in, closes Closed state.
Preferably, the substrate is silicon dioxide substrates.
Preferably, wherein the making material of the metal strip, metal layer and backgate is gold.
Preferably, the Antenna Operation is in 100GHz-300GHz, centre frequency 200GHz, and corresponding wavelength is 1.5mm, the metal stripe pitch in the antenna above single-layer graphene layer are 0.15mm to 1.5mm gradual change, and metal strip width is 20 Micron.
Preferably, the metal strip between two single-layer graphene layers uses constant spacing, spacing 0.15mm, in left and right two For metal strip on the single-layer graphene layer of side according to first spacing 0.15mm, second spacing is 0.15mm+d;Third spacing For 0.15mm+2d, until being gradient to 0.15mm+nd=1.5mm;Wherein d=0.05mm acquires n=27, it is known that in the left and right sides 28 metal strips (6) are respectively arranged on single-layer graphene layer.
The invention also discloses a kind of graphene millimeter wave reconfigurable antenna production methods, it is characterised in that including walking as follows It is rapid:
The single-layer graphene layer of chemical vapor deposition manner acquisition is displaced through in silicon dioxide substrates, by etching single layer stone Black alkene forms figure, so that single-layer graphene layer is separated into left and right two parts, and makes the lining between single-layer graphene layer Bottom exposes, and passes through the lining of the semiconductor technology method between the single-layer graphene layer and between single-layer graphene layer The metal strip that structure irregular cycle is made on bottom forms Chirp Bragg grating, and will be on single-layer graphene layer by metal Metal strip link together, metal is made by the technique of semiconductor in silicon dioxide substrates bottom, forms the back of left and right two Grid control electronics gas concentration in graphene layer, cooperate the Chirp Bragg light above graphene layer by voltage in control backgate Grid make Antenna Operation in four kinds of states: 1) antenna along Chirp Bragg grating to the left, bidirectional radiation to the right;2) antenna is only to the left Radiation;3) antenna only radiates to the right;4) antenna is in close state.
The beneficial effects of adopting the technical scheme are that the antenna is displaced through in silicon dioxide substrates The single-layer graphene layer that chemical vapor deposition manner obtains forms special graph by etching graphene, passes through semiconductor technology Method makes the metal strip of structure irregular cycle, forms Chirp Bragg grating, in silicon dioxide substrates bottom by partly leading The technique of body makes metal, forms two backgates in left and right, and by voltage in control backgate, it is dense to can control electron gas in graphene Degree cooperates the Chirp Bragg grating above graphene, and Antenna Operation can be made in four kinds of states: 1) antenna is along Chirp Bragg light Grid to the left, bidirectional radiation to the right;2) antenna only radiates to the left;3) antenna only radiates to the right;4) antenna is in close state.This hair The bright antenna has the advantage that antenna is restructural, has 4 kinds of working conditions;Working method is simple, it is only necessary to adjust back Grid voltage;100GHz-300GHz, simple process can be effectively operating in;By changing Chirp Bragg optical grating construction, expansible work Frequency is to 1000GHz.
Detailed description of the invention
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Fig. 1 is the overlooking structure diagram of antenna described in the embodiment of the present invention;
Fig. 2 is the schematic cross-sectional view of antenna described in the embodiment of the present invention;
Wherein: 1, substrate;2, single-layer graphene layer;3, metal strip;4, metal layer;5, backgate.
Specific embodiment
With reference to the attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete Ground description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, but the present invention can be with Implemented using other than the one described here other way, those skilled in the art can be without prejudice to intension of the present invention In the case of do similar popularization, therefore the present invention is not limited by the specific embodiments disclosed below.
As Figure 1-Figure 2, the embodiment of the invention discloses a kind of graphene millimeter wave reconfigurable antenna, including substrate 1, The left and right sides of the substrate 1 is provided with the intermediate single-layer graphene layer 2 not being in contact, the single-layer graphene layer 2 of the left and right sides Upper surface and two single-layer graphene layers 2 between the upper surface of substrate 1 be provided with the metal strip of structure irregular cycle 3, the metal strip 3 of structure irregular cycle forms Chirp Bragg grating, the upper surface of left and right sides single-layer graphene layer 2 The Bragg-grating structure connected together by metal layer 4;The dioxy corresponding with the single-layer graphene layer 2 There are two backgates 5 for the bottom setting of silicon substrate 1, and by the voltage in control backgate 5, it is dense to control electron gas in graphene layer 2 Degree cooperates the Chirp Bragg grating above graphene layer, and make Antenna Operation in four kinds of states: 1) antenna is along Chirp Bragg light Grid to the left, bidirectional radiation to the right;2) antenna only radiates to the left;3) antenna only radiates to the right;4) antenna is in close state.
When left and right, two backgates all load negative pressure, since the electronics in graphene layer is dissipated by negative pressure, graphene at this time Not electromagnetic wave absorption, Antenna Operation is in the first state at this time, i.e., antenna along Chirp Bragg grating to the left, two-way spoke to the right It penetrates;
When left side backgate loads negative pressure, when right side backgate is not pressurized, since the electronics in the graphene of left side is dissipated by negative pressure, left survey Graphene not electromagnetic wave absorption, and right side graphene absorbs the electromagnetic wave laterally propagated, therefore electromagnetism since there are electron gases Wave cannot transmit to the right, and Antenna Operation is radiated in second of state, i.e. antenna along Chirp Bragg grating to the left at this time;
When right side backgate loads negative pressure, when left side backgate is not pressurized, since the electronics in the graphene of right side is dissipated by negative pressure, right survey Graphene not electromagnetic wave absorption, and left side graphene absorbs the electromagnetic wave laterally propagated, therefore electromagnetism since there are electron gases Wave cannot transmit to the left, and Antenna Operation radiates to the right in the third state, i.e. antenna along Chirp Bragg grating at this time;
When left and right, two backgates are all not loaded with negative pressure, due to the electron gas in graphene, graphene electromagnetic wave absorption at this time, this When Antenna Operation be in close state in the 4th kind of state, i.e. antenna.
The substrate can be silica, and all metal materials are gold in the antenna;To work in 100GHz- For the reconfigurable antenna of 300GHz, centre frequency 200GHz, corresponding wavelength 1.5mm, corresponding wavelength 1.5mm, institute 3 spacing of metal strip for stating 2 top of single-layer graphene layer in antenna is 0.15mm to 1.5mm gradual change, and 3 width of metal strip is 20 microns. Metal strip 3 between two single-layer graphene layers 2 uses constant spacing, spacing 0.15mm, in left and right sides single-layer graphene For metal strip 3 on layer 2 according to first spacing 0.15mm, second spacing is 0.15mm+d;Third spacing is 0.15mm+ 2d, until being gradient to 0.15mm+nd=1.5mm;Wherein d=0.05mm acquires n=27, it is known that in left and right sides single-layer graphene 28 metal strips 3 are respectively arranged on layer.
Correspondingly, the embodiment of the invention also discloses a kind of graphene millimeter wave reconfigurable antenna production method, feature It is to include the following steps:
The single-layer graphene layer 2 of chemical vapor deposition manner acquisition is displaced through in silicon dioxide substrates 1, by etching single layer Graphene 2 forms figure, so that single-layer graphene layer 2 is separated into left and right two parts, and makes the institute between single-layer graphene layer 2 It states substrate 1 to expose, by semiconductor technology method between the single-layer graphene layer 2 and between single-layer graphene layer 2 The substrate 1 on make the metal strip 3 of structure irregular cycle, form Chirp Bragg grating, and by metal by single layer Metal strip 3 on graphene layer 2 links together, and makes metal, shape by the technique of semiconductor in 1 bottom of silicon dioxide substrates Electronics gas concentration in graphene layer, cooperation graphene layer top are controlled by voltage in control backgate 5 at two backgates 5 in left and right Chirp Bragg grating, make Antenna Operation in four kinds of states: 1) antenna along Chirp Bragg grating to the left, two-way spoke to the right It penetrates;2) antenna only radiates to the left;3) antenna only radiates to the right;4) antenna is in close state.
Antenna of the present invention has the advantage that antenna is restructural, has 4 kinds of working conditions;Working method is simple, only Need to adjust back grid voltage;100GHz-300GHz, simple process can be effectively operating in;By changing Chirp Bragg grating knot Structure, expansible working frequency to 1000GHz.

Claims (6)

1. a kind of graphene millimeter wave reconfigurable antenna, it is characterised in that: including substrate (1), the left and right sides of the substrate (1) It is provided with the intermediate single-layer graphene layer (2) not being in contact, the upper surface of the single-layer graphene layer (2) of the left and right sides and two The upper surface of substrate (1) between single-layer graphene layer (2) is provided with the metal strip (3) of structure irregular cycle, described not advise Then periodic structure metal strip (3) formed Chirp Bragg grating, the upper surface of left and right sides single-layer graphene layer (2) it is described Bragg-grating structure is connected together by metal layer (4);The titanium dioxide corresponding with single-layer graphene layer (2) There are two backgate (5) for the bottom setting of silicon substrate (1), electric in control graphene layer (2) by the voltage in control backgate (5) Sub- gas concentration cooperates the Chirp Bragg grating above graphene layer, and make Antenna Operation in four kinds of states: 1) antenna is along chirp cloth Glug grating to the left, bidirectional radiation to the right;2) antenna only radiates to the left;3) antenna only radiates to the right;4) antenna, which is in, closes shape State.
2. graphene millimeter wave reconfigurable antenna as described in claim 1, it is characterised in that: the substrate (1) is titanium dioxide Silicon substrate.
3. graphene millimeter wave reconfigurable antenna as described in claim 1, it is characterised in that: the wherein metal strip (3), gold The making material for belonging to layer (4) and backgate (5) is gold.
4. graphene millimeter wave reconfigurable antenna as described in claim 1, it is characterised in that: the Antenna Operation in 100GHz-300GHz, centre frequency 200GHz, corresponding wavelength 1.5mm, in the antenna on single-layer graphene layer (2) Metal strip (3) spacing of side is 0.15mm to 1.5mm gradual change, and metal strip (3) width is 20 microns.
5. graphene millimeter wave reconfigurable antenna as described in claim 1, it is characterised in that: two single-layer graphene layers (2) Between metal strip (3) use constant spacing, spacing 0.15mm, the metal strip on left and right sides single-layer graphene layer (2) (3) according to first spacing 0.15mm, second spacing is 0.15mm+d;Third spacing is 0.15mm+2d, until gradual change To 0.15mm+nd=1.5mm;Wherein d=0.05mm acquires n=27, it is known that is respectively set on the single-layer graphene layer of the left and right sides There are 28 metal strips (3).
6. a kind of graphene millimeter wave reconfigurable antenna production method, it is characterised in that include the following steps:
It is displaced through the single-layer graphene layer (2) of chemical vapor deposition manner acquisition on silicon dioxide substrates (1), passes through etching Single-layer graphene (2) forms figure, so that single-layer graphene layer (2) is separated into left and right two parts, and makes single-layer graphene layer (2) substrate (1) between exposes, between the single-layer graphene layer (2) and single by semiconductor technology method The metal strip (3) that structure irregular cycle is made on the substrate (1) between layer graphene layer (2), forms Chirp Bragg Grating, and the metal strip (3) on single-layer graphene layer (2) is linked together by metal, in silicon dioxide substrates (1) bottom Metal is made by the technique of semiconductor, forms two backgates (5) in left and right, by voltage in control backgate (5), controls graphene Electronics gas concentration in layer cooperates the Chirp Bragg grating above graphene layer, makes Antenna Operation in four kinds of states: 1) antenna edge Chirp Bragg grating to the left, bidirectional radiation to the right;2) antenna only radiates to the left;3) antenna only radiates to the right;4) antenna is in Closed state.
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CN110783685A (en) * 2019-10-30 2020-02-11 深圳捷豹电波科技有限公司 Millimeter wave antenna and millimeter wave antenna process design
CN112751199A (en) * 2020-12-10 2021-05-04 中国科学院深圳先进技术研究院 Terahertz phase modulator

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