CN109687117B - Graphene millimeter wave reconfigurable antenna and manufacturing method thereof - Google Patents
Graphene millimeter wave reconfigurable antenna and manufacturing method thereof Download PDFInfo
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- CN109687117B CN109687117B CN201910132192.4A CN201910132192A CN109687117B CN 109687117 B CN109687117 B CN 109687117B CN 201910132192 A CN201910132192 A CN 201910132192A CN 109687117 B CN109687117 B CN 109687117B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/364—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor
- H01Q1/368—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor using carbon or carbon composite
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q19/00—Combinations of primary active antenna elements and units with secondary devices, e.g. with quasi-optical devices, for giving the antenna a desired directional characteristic
- H01Q19/06—Combinations of primary active antenna elements and units with secondary devices, e.g. with quasi-optical devices, for giving the antenna a desired directional characteristic using refracting or diffracting devices, e.g. lens
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
Abstract
The invention discloses a graphene millimeter wave reconfigurable antenna and a manufacturing method thereof, and relates to the technical field of millimeter wave antennas. The antenna comprises a substrate, wherein the left side and the right side of the substrate are provided with single-layer graphene layers, the middle of the single-layer graphene layers is not contacted with each other, the upper surfaces of the single-layer graphene layers on the left side and the right side and the upper surface of the substrate between the two single-layer graphene layers are provided with metal strips of an irregular periodic structure, the metal strips of the irregular periodic structure form chirped Bragg gratings, and the Bragg grating structures on the upper surfaces of the single-layer graphene layers on the left side and the right side are connected together through the metal layers. The antenna is reconfigurable and has 4 working states; the working mode is simple, and the back grid voltage is only required to be adjusted; can effectively work at 100GHz-300GHz, and has simple process; by changing the chirped bragg grating structure, the operating frequency can be extended to 1000GHz.
Description
Technical Field
The invention relates to the technical field of millimeter wave antennas, in particular to a graphene millimeter wave reconfigurable antenna and a manufacturing method thereof.
Background
With the rapid development of modern radar and communication systems, the number of antennas required for aircrafts, ships, satellites, etc. is increasing for the purposes of communication, navigation, guidance, surveillance, weapon seeking, etc. The weight of the load on the platform is increased continuously, the cost required for building the antennas is increased continuously, and meanwhile, the electromagnetic interference among the antennas is very large, so that the normal operation of the antennas is seriously influenced. In order to reduce the weight of the antenna loaded on the platform, reduce the cost, and reduce the radar cross section of the platform to realize good electromagnetic compatibility, it is desirable to realize the functions of multiple antennas by using one antenna. Such antennas are known as reconfigurable antennas by dynamically changing their physical structure or dimensions or their properties to provide a variety of functions.
Millimeter waves refer to a section of electromagnetic waves with the frequency of 26.5GHz-300GHz, and millimeter waves and terahertz waves have wide application prospects in the fields of high-speed wireless communication, radars, human safety detection and the like, and the millimeter wave frequency band signals are transmitted and received without any millimeter wave antennas. At the high end of millimeter waves, for example, the millimeter wave frequency band above 100GHz, namely, the terahertz frequency is the electromagnetic wave of 100GHz-10THz, 1 THz=1000 GHz, and the terahertz overlapping frequency of 100GHz-300GHz has huge potential markets in future communication, imaging, radar and other applications.
Because the frequency of the frequency band is high, the materials, structures, antennas and the like of devices which can work in the frequency band are difficult to realize, and if the antennas with the frequency can be realized and can be reconstructed, the method provides solid technical support for future application of the frequency band.
Disclosure of Invention
The invention aims to solve the technical problem of providing a graphene millimeter wave reconfigurable antenna which is simple in process and reconfigurable and a manufacturing method thereof.
In order to solve the technical problems, the invention adopts the following technical scheme: the utility model provides a graphite alkene millimeter wave reconfigurable antenna which characterized in that: the anti-fake graphene structure comprises a substrate, wherein single-layer graphene layers with non-contact middle are arranged on the left side and the right side of the substrate, metal strips with irregular periodic structures are arranged on the upper surfaces of the single-layer graphene layers on the left side and the right side and the upper surfaces of the substrate between the two single-layer graphene layers, the metal strips with the irregular periodic structures form chirped Bragg gratings, and the Bragg grating structures on the upper surfaces of the single-layer graphene layers on the left side and the right side are connected together through the metal layers; the bottom of the silicon dioxide substrate corresponding to the single-layer graphene layer is provided with two back grids, the electron gas concentration in the graphene layer is controlled by controlling the voltage on the back grids, and the antenna is enabled to work in four states by matching with the chirped Bragg grating above the graphene layer: 1) The antenna radiates leftwards and rightwards along the chirped Bragg grating in a bidirectional manner; 2) The antenna radiates only to the left; 3) The antenna radiates only to the right; 4) The antenna is in an off state.
Preferably, the substrate is a silicon dioxide substrate.
Preferably, the metal strips, the metal layer and the back gate are made of gold.
Preferably, the antenna works at 100GHz-300GHz, the center frequency of the antenna is 200GHz, the corresponding wavelength is 1.5mm, the distance between metal strips above a single graphene layer in the antenna is 0.15mm to 1.5mm gradually changed, and the width of the metal strips is 20 microns.
Preferably, the metal strips between the two single-layer graphene layers are at a fixed interval of 0.15mm, the metal strips on the single-layer graphene layers on the left side and the right side are at a first interval of 0.15mm, and the second interval is 0.15mm+d; the third pitch is 0.15mm+2d until the taper is 0.15mm+nd=1.5 mm; where d=0.05 mm, and n=27, it was found that 28 metal strips (6) were provided on each of the left and right single-layer graphene layers.
The invention also discloses a manufacturing method of the graphene millimeter wave reconfigurable antenna, which is characterized by comprising the following steps:
transferring a single-layer graphene layer obtained by a chemical vapor deposition mode on a silicon dioxide substrate, forming a graph by etching the single-layer graphene, separating the single-layer graphene layer into a left part and a right part, exposing the substrate between the single-layer graphene layers, manufacturing metal strips with irregular periodic structures between the single-layer graphene layers and between the single-layer graphene layers on the substrate by a semiconductor process method to form chirped Bragg gratings, connecting the metal strips on the single-layer graphene layers together by metal, manufacturing metal at the bottom of the silicon dioxide substrate by a semiconductor process to form a left back gate and a right back gate, controlling the concentration of electron gas in the graphene layer by controlling the voltage on the back gate, and matching the chirped Bragg gratings above the graphene layers to enable the antenna to work in four states: 1) The antenna radiates leftwards and rightwards along the chirped Bragg grating in a bidirectional manner; 2) The antenna radiates only to the left; 3) The antenna radiates only to the right; 4) The antenna is in an off state.
The beneficial effects of adopting above-mentioned technical scheme to produce lie in: the antenna is characterized in that a single-layer graphene layer obtained in a chemical vapor deposition mode is transferred on a silicon dioxide substrate, special patterns are formed by etching graphene, metal strips with irregular periodic structures are manufactured through a semiconductor process method to form chirped Bragg gratings, metal is manufactured at the bottom of the silicon dioxide substrate through a semiconductor process to form left and right back grids, the concentration of electron gas in the graphene can be controlled by controlling the voltage on the back grids, and the antenna can work in four states by matching with the chirped Bragg gratings above the graphene: 1) The antenna radiates leftwards and rightwards along the chirped Bragg grating in a bidirectional manner; 2) The antenna radiates only to the left; 3) The antenna radiates only to the right; 4) The antenna is in an off state. The antenna of the invention has the following advantages: the antenna is reconfigurable and has 4 working states; the working mode is simple, and the back grid voltage is only required to be adjusted; can effectively work at 100GHz-300GHz, and has simple process; by changing the chirped bragg grating structure, the operating frequency can be extended to 1000GHz.
Drawings
The invention will be described in further detail with reference to the drawings and the detailed description.
Fig. 1 is a schematic top view of an antenna according to an embodiment of the present invention;
fig. 2 is a schematic cross-sectional structure of an antenna according to an embodiment of the present invention;
wherein: 1. a substrate; 2. a single layer graphene layer; 3. a metal strip; 4. a metal layer; 5. and a back gate.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present invention is not limited to the specific embodiments disclosed below.
As shown in fig. 1-2, the embodiment of the invention discloses a graphene millimeter wave reconfigurable antenna, which comprises a substrate 1, wherein the left side and the right side of the substrate 1 are provided with single-layer graphene layers 2 which are not in contact with each other in the middle, the upper surfaces of the single-layer graphene layers 2 on the left side and the right side and the upper surface of the substrate 1 between the two single-layer graphene layers 2 are provided with metal strips 3 with irregular periodic structures, the metal strips 3 with the irregular periodic structures form chirped bragg gratings, and the bragg grating structures on the upper surfaces of the single-layer graphene layers 2 on the left side and the right side are connected together through a metal layer 4; the bottom of the silicon dioxide substrate 1 corresponding to the single-layer graphene layer 2 is provided with two back grids 5, the electron gas concentration in the graphene layer 2 is controlled by controlling the voltage on the back grids 5, and the antenna is enabled to work in four states by matching with the chirped Bragg grating above the graphene layer: 1) The antenna radiates leftwards and rightwards along the chirped Bragg grating in a bidirectional manner; 2) The antenna radiates only to the left; 3) The antenna radiates only to the right; 4) The antenna is in an off state.
When negative pressure is loaded on the left back grating and the right back grating, electrons in the graphene layer are dissipated by the negative pressure, the graphene does not absorb electromagnetic waves, and the antenna works in a first state, namely, the antenna radiates leftwards and rightwards along the chirped Bragg grating;
when the left back grating is loaded with negative pressure and the right back grating is not pressurized, the electrons in the left graphene are dissipated by the negative pressure, the left graphene does not absorb electromagnetic waves, the right graphene absorbs electromagnetic waves which are transmitted transversely due to the existence of electron gas, so that the electromagnetic waves cannot be transmitted rightwards, and the antenna works in a second state, namely, the antenna radiates leftwards along the chirped Bragg grating;
when the right back grating is loaded with negative pressure and the left back grating is not pressurized, the electrons in the right graphene are dissipated by the negative pressure, the right graphene does not absorb electromagnetic waves, the left graphene absorbs electromagnetic waves which are transmitted transversely due to the existence of electron gas, so that the electromagnetic waves cannot be transmitted leftwards, and the antenna works in a third state, namely, the antenna radiates rightwards along the chirped Bragg grating;
when negative pressure is not loaded on the left back grid and the right back grid, the graphene absorbs electromagnetic waves due to electron gas in the graphene, and the antenna works in a fourth state, namely the antenna is in a closed state.
The substrate can be silicon dioxide, and all metal materials in the antenna are gold; taking a reconfigurable antenna working at 100GHz-300GHz as an example, the center frequency is 200GHz, the corresponding wavelength is 1.5mm, the spacing between the metal strips 3 above the single-layer graphene layer 2 in the antenna is 0.15mm to 1.5mm and gradually changes, and the width of the metal strips 3 is 20 microns. The metal strips 3 between the two single-layer graphene layers 2 are at a fixed interval of 0.15mm, the metal strips 3 on the single-layer graphene layers 2 on the left side and the right side are at a first interval of 0.15mm, and the second interval is 0.15mm+d; the third pitch is 0.15mm+2d until the taper is 0.15mm+nd=1.5 mm; where d=0.05 mm, and n=27, it was found that 28 metal strips 3 were provided on each of the left and right single-layer graphene layers.
Correspondingly, the embodiment of the invention also discloses a manufacturing method of the graphene millimeter wave reconfigurable antenna, which is characterized by comprising the following steps:
transferring a single-layer graphene layer 2 obtained by a chemical vapor deposition mode on a silicon dioxide substrate 1, forming a graph by etching the single-layer graphene layer 2, separating the single-layer graphene layer 2 into a left part and a right part, exposing the substrate 1 between the single-layer graphene layers 2, manufacturing metal strips 3 with irregular periodic structures on the substrate 1 between the single-layer graphene layers 2 and between the single-layer graphene layers 2 by a semiconductor process method to form chirped Bragg gratings, connecting the metal strips 3 on the single-layer graphene layer 2 together by metal, manufacturing metal at the bottom of the silicon dioxide substrate 1 by a semiconductor process to form a left back gate 5 and a right back gate 5, controlling the concentration of electron gas in the graphene layers by controlling the voltage on the back gates 5, and matching the chirped Bragg gratings above the graphene layers to enable the antenna to work in four states: 1) The antenna radiates leftwards and rightwards along the chirped Bragg grating in a bidirectional manner; 2) The antenna radiates only to the left; 3) The antenna radiates only to the right; 4) The antenna is in an off state.
The antenna of the invention has the following advantages: the antenna is reconfigurable and has 4 working states; the working mode is simple, and the back grid voltage is only required to be adjusted; can effectively work at 100GHz-300GHz, and has simple process; by changing the chirped bragg grating structure, the operating frequency can be extended to 1000GHz.
Claims (6)
1. The utility model provides a graphite alkene millimeter wave reconfigurable antenna which characterized in that: the anti-fake graphene structure comprises a substrate (1), wherein single-layer graphene layers (2) with non-contact middle are arranged on the left side and the right side of the substrate (1), metal strips (3) with irregular periodic structures are arranged on the upper surfaces of the single-layer graphene layers (2) on the left side and the right side and the upper surfaces of the substrate (1) between the two single-layer graphene layers (2), chirped Bragg gratings are formed by the metal strips (3) with the irregular periodic structures, and the Bragg grating structures on the upper surfaces of the single-layer graphene layers (2) on the left side and the right side are connected together through metal layers (4); two back grids (5) are arranged at the bottom of the substrate (1) corresponding to the single-layer graphene layer (2), the electron gas concentration in the graphene layer (2) is controlled by controlling the voltage on the back grids (5), and the antenna is enabled to work in four states by matching with the chirped Bragg grating above the graphene layer: 1) The antenna radiates leftwards and rightwards along the chirped Bragg grating in a bidirectional manner; 2) The antenna radiates only to the left; 3) The antenna radiates only to the right; 4) The antenna is in an off state.
2. The graphene millimeter wave reconfigurable antenna of claim 1, wherein: the substrate (1) is a silicon dioxide substrate.
3. The graphene millimeter wave reconfigurable antenna of claim 1, wherein: wherein the metal strips (3), the metal layer (4) and the back gate (5) are made of gold.
4. The graphene millimeter wave reconfigurable antenna of claim 1, wherein: the antenna works at 100GHz-300GHz, the center frequency of the antenna is 200GHz, the corresponding wavelength is 1.5mm, the distance between the metal strips (3) above the single-layer graphene layer (2) in the antenna is 0.15mm to 1.5mm, the width of the metal strips (3) is 20 microns, and the metal strips are gradually changed.
5. The graphene millimeter wave reconfigurable antenna of claim 1, wherein: the metal strips (3) between the two single-layer graphene layers (2) are at a fixed interval of 0.15mm, the metal strips (3) on the single-layer graphene layers (2) on the left side and the right side are at a first interval of 0.15mm, and the second interval is 0.15mm+d; the third pitch is 0.15mm+2d until the taper is 0.15mm+nd=1.5 mm; where d=0.05 mm, and n=27, it was found that 28 metal strips (3) were provided on each of the left and right single-layer graphene layers.
6. The manufacturing method of the graphene millimeter wave reconfigurable antenna is characterized by comprising the following steps of:
transferring a single-layer graphene layer (2) obtained through a chemical vapor deposition mode on a silicon dioxide substrate (1), forming a graph by etching the single-layer graphene layer (2), separating the single-layer graphene layer (2) into a left part and a right part, exposing the substrate (1) between the single-layer graphene layers (2), manufacturing metal strips (3) with irregular periodic structures between the single-layer graphene layers (2) and between the single-layer graphene layers (2) on the substrate (1) through a semiconductor process method, forming chirped Bragg gratings, connecting the metal strips (3) on the single-layer graphene layers (2) together through metal, manufacturing metal at the bottom of the silicon dioxide substrate (1) through a semiconductor process, forming a left back gate (5) and a right back gate (5), controlling the concentration of electron gas in the graphene layers through controlling the voltage on the back gates (5), and matching the chirped Bragg gratings above the graphene layers, so that the antenna works in four states: 1) The antenna radiates leftwards and rightwards along the chirped Bragg grating in a bidirectional manner; 2) The antenna radiates only to the left; 3) The antenna radiates only to the right; 4) The antenna is in an off state.
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| CN110783685B (en) | 2019-10-30 | 2021-08-17 | 深圳捷豹电波科技有限公司 | Millimeter wave antenna and millimeter wave antenna process design |
| CN112751199B (en) * | 2020-12-10 | 2023-06-27 | 中国科学院深圳先进技术研究院 | Terahertz phase modulator |
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