CN109682221A - Heating plant and heat-exchange system - Google Patents
Heating plant and heat-exchange system Download PDFInfo
- Publication number
- CN109682221A CN109682221A CN201811554747.6A CN201811554747A CN109682221A CN 109682221 A CN109682221 A CN 109682221A CN 201811554747 A CN201811554747 A CN 201811554747A CN 109682221 A CN109682221 A CN 109682221A
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- Prior art keywords
- outlet
- heat
- import
- heating plant
- heat exchange
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
- F27D17/004—Systems for reclaiming waste heat
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D13/00—Apparatus for preheating charges; Arrangements for preheating charges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0003—Monitoring the temperature or a characteristic of the charge and using it as a controlling value
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Environmental & Geological Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The disclosure provides a kind of heat-exchanger rig and heat-exchange system, is related to polysilicon preparation technical field.The heat-exchanger rig includes reduction furnace, and the reduction furnace includes furnace tube and chassis, and the furnace tube includes the first heat exchanger channels, and first heat exchanger channels have the first import and first outlet；The chassis includes the second heat exchanger channels, and second heat exchanger channels have the second import and second outlet；The feeding device that first import and second import are capable of providing heat exchange raw material with one respectively is connected to, and the second outlet and first inlet communication, the first outlet with a thermal to be added for being connected to.The heat-exchanger rig and heat-exchange system of the disclosure can simplification of flowsheet, reduce production cost.
Description
Technical field
This disclosure relates to polysilicon preparation technical field, in particular to a kind of heating plant and heat-exchange system.
Background technique
Polysilicon is a kind of excellent semiconductor material, is generally used in integrated circuit, electronic device and solar battery.
A large amount of heat would generally be generated in the reduction process of polysilicon preparation, in order to avoid the wasting of resources, is usually recycled benefit
With to provide thermal energy for thermal to be added, which can be raw material workshop.
Existing reduction furnace generally comprises chassis and furnace tube, and the water exported in chassis and furnace tube is mixed, then is delivered to be added
It is used in thermal.But the water temperature of the water exported in chassis is lower than the water temperature of the water exported in furnace tube, thus mixed water
Temperature is lower, needs additional heating equipment to heat it, is just able to satisfy requirement of the device to be heated to water temperature, process flow is multiple
It is miscellaneous, and production cost is higher.
It should be noted that information is only used for reinforcing the reason to the background of the disclosure disclosed in above-mentioned background technology part
Solution, therefore may include the information not constituted to the prior art known to persons of ordinary skill in the art.
Summary of the invention
The disclosure is designed to provide a kind of heating plant and heat-exchange system, can simplification of flowsheet, reduction is produced into
This.
According to one aspect of the disclosure, a kind of heating plant is provided, comprising:
Reduction furnace, including furnace tube and chassis, the furnace tube include the first heat exchanger channels, and first heat exchanger channels have the
One import and first outlet；The chassis includes the second heat exchanger channels, and second heat exchanger channels have the second import and second
Outlet；
The feeding device that first import and second import are capable of providing heat exchange raw material with one respectively is connected to, described
Second outlet and first inlet communication, the first outlet with a thermal to be added for being connected to.
In a kind of exemplary embodiment of the disclosure, the heating plant further include:
Pressure-applying unit, the second outlet is by the pressure-applying unit and first inlet communication, for described the
The heat exchange raw material pressurization of two outlet outputs.
In a kind of exemplary embodiment of the disclosure, the heating plant further include:
Temperature detection device is set to the first outlet, the temperature of the heat exchange raw material for detecting the first outlet output
Degree.
In a kind of exemplary embodiment of the disclosure, the heating plant further include:
Valve is set to the first outlet, is used to open or closes the first outlet.
In a kind of exemplary embodiment of the disclosure, the pressure-applying unit includes at least one pump.
In a kind of exemplary embodiment of the disclosure, the heating plant further include:
Control assembly is connect with the temperature detection device, and the temperature for detecting in the temperature detection device reaches
When to threshold value, controls the valve and open；When the temperature that the temperature detection device detects is not up to the threshold value, control
The valve is closed.
In a kind of exemplary embodiment of the disclosure, the heat exchange raw material is water.
In a kind of exemplary embodiment of the disclosure, the threshold value is 150 DEG C.
According to one aspect of the disclosure, a kind of heat-exchange system is provided, comprising:
Feeding device, for exporting heat exchange raw material；
Heating plant described in above-mentioned any one, first import are connected to the feeding device；
Thermal to be added is connected to the first outlet.
In a kind of exemplary embodiment of the disclosure, heat exchange of the feeding device for output temperature to be 130 DEG C is former
Material.
The heating plant and heat-exchange system of the disclosure, due to connecting the first import and the second import with feeding device respectively
It is logical, hot charge heat exchange can be exchanged simultaneously by the first heat exchanger channels and the second heat exchanger channels, heat-exchange time can be reduced；Again due to inciting somebody to action
Second outlet is connected to heat exchange feedstock transportation to the first heat exchanger channels that can export the second heat exchanger channels with first outlet and carries out two
Secondary heat exchange can avoid the additional heating equipment of addition, simplification of flowsheet, and have to obtain the higher heat exchange raw material of temperature
Conducive to reduction production cost.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not
The disclosure can be limited.
Detailed description of the invention
The drawings herein are incorporated into the specification and forms part of this specification, and shows the implementation for meeting the disclosure
Example, and together with specification for explaining the principles of this disclosure.It should be evident that the accompanying drawings in the following description is only the disclosure
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the structural schematic diagram of disclosure embodiment heat-exchange system.
Fig. 2 is the structural schematic diagram of disclosure embodiment heating plant.
In figure: 1, furnace tube 1；11, the first import；12, first outlet；2, chassis；21, the second import；22, second outlet；
3, temperature detection device；100, feeding device；200, thermal to be added.
Specific embodiment
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to embodiment set forth herein；On the contrary, thesing embodiments are provided so that the present invention will
Fully and completely, and by the design of example embodiment comprehensively it is communicated to those skilled in the art.Identical attached drawing in figure
Label indicates same or similar structure, thus the detailed description that will omit them.
Although the term of relativity, such as "upper" "lower" is used to describe a component of icon for another in this specification
The relativeness of one component, but these terms are in this manual merely for convenient, for example, with reference to the accompanying drawings described in show
The direction of example.It is appreciated that, if making it turn upside down the device overturning of icon, the component described in "upper" will
As the component in "lower".When certain structure is at other structures "upper", it is possible to refer to that certain structural integrity is formed in other structures
On, or refer to that certain structure is " direct " and be arranged in other structures, or refer to that certain structure is arranged by the way that another structure is " indirect " in other knots
On structure.
Term "one", " one ", "the" and " described " to indicate there are one or more elements/component part/etc.；With
Language " comprising " and " having " is to indicate the open meaning being included and refer to element/composition portion in addition to listing
Also may be present except divide/waiting other element/component part/etc..Term " first ", " second " only use as label, are not
Quantity limitation to its object.
Disclosure embodiment provides a kind of heating plant, as shown in Fig. 2, the heating plant may include:
Reduction furnace, including furnace tube 1 and chassis 2, the furnace tube 1 include the first heat exchanger channels, the first heat exchanger channels tool
There are the first import 11 and first outlet 12；The chassis 2 include the second heat exchanger channels, second heat exchanger channels have second into
Mouth 21 and second outlet 22；
The feeding device 100 that first import 11 and second import 21 are capable of providing heat exchange raw material with one respectively connects
Logical, the second outlet 22 is connected to first import 11, and the first outlet 12 is used to connect with a thermal 200 to be added
Logical, the temperature for the heat exchange raw material that the first outlet 12 exports is greater than the temperature of the heat exchange raw material of the second outlet 22 output.
The heating plant of the disclosure can since the first import 11 and the second import 21 to be connected to feeding device 100 respectively
Hot charge heat exchange is exchanged simultaneously by the first heat exchanger channels and the second heat exchanger channels, can reduce heat-exchange time；Again due to by second
Outlet 22 is connected to heat exchange feedstock transportation to the first heat exchanger channels that can export the second heat exchanger channels with first outlet 12 and carries out two
Secondary heat exchange can avoid the additional heating equipment of addition, simplification of flowsheet, and have to obtain the higher heat exchange raw material of temperature
Conducive to reduction production cost.
Each section of disclosure embodiment heating plant is described in detail below:
Reduction furnace may include furnace tube 1 and chassis 2, and furnace tube 1 can be set to the side wall of reduction furnace, can be cylindric or prism
Shape does not do particular determination it is of course also possible to be other shapes herein, and the material of furnace tube 1 can be metal, nonmetallic or alloy
Material, it is of course also possible to be other materials.Chassis 2 can be set to reduction furnace bottom, shape can be round, rectangle or other
Irregular figure, the material on chassis 2 can be metal, nonmetallic or alloy material, it is of course also possible to be other materials, herein
It will not enumerate.
Furnace tube 1 may include the first heat exchanger channels, which can be used for accommodating heat exchange material.For example,
Furnace tube 1 may include inner wall and the outer wall that is surrounded on outside inner wall, have the space that can accommodate heat exchange material, the sky between inner and outer wall
Between can be the first heat exchanger channels.Certainly, the first heat exchanger channels are also possible to the channel being shaped in 1 side wall of furnace tube, or
It can also be the pre- pipeline etc. being embedded in 1 side wall of furnace tube, the shape of cross section can be round, rectangle or other irregular components
Shape does not do particular determination to the shape and form of the first heat exchanger channels herein, as long as heat exchange material can be accommodated.
First heat exchanger channels can have the first import 11 and first outlet 12, in which:
First import 11 can be set to the outer surface of 1 side wall of furnace tube, so as to pass through the first import 11 to the first heat exchanger channels
Interior input heat exchange raw material, the ingredient of the heat exchange raw material does not do particular determination herein, for example, the heat exchange raw material can be water or oil etc.
The liquid of heat can be absorbed.First import 11 can be the tubular structure set on 1 wall outer surface of furnace tube, to mention with one
It is connected to for the feeding device 100 for the raw material that exchanges heat.
The quantity of first import 11 can be one, to connect with feeding device 100.Certainly,
The quantity of first import 11 is also possible to peripheries that are multiple, and being distributed in furnace tube 1 in a ring.First import 11
Shape can be round, rectangle or other figures, not do particular determination to the shape of the first import 11 herein.
First outlet 12 can be set to the outer surface of 1 side wall of furnace tube, and can be located at the first side of the import 11 far from chassis 2,
First outlet 12 can be connected to a thermal 200 to be added, can be by by the heat exchange raw material that the first import 11 enters the first heat exchanger channels
First outlet 12 exports and enters in device 200 to be heated.
The quantity of first outlet 12 can be one, to be connected to thermal 200 to be added, and will exchange heat feedstock transportation extremely
In thermal 200 to be added.Certainly, the quantity of first outlet 12 is also possible to multiple, and each first outlet 12 can divide in a ring
It is distributed in the periphery of furnace tube 1, the i.e. outer surface of 1 side wall of furnace tube, the heat exchange raw material in the first heat exchanger channels can be simultaneously from each first
12 output of outlet.Each first outlet 12 can be uniformly distributed around the axis of furnace tube 1, and to make to exchange heat, raw material is uniformly exported.First goes out
The shape of mouth 12 can be circle, ellipse, square etc., can also be irregular figure, herein not to first outlet 12
Shape does particular determination.
Chassis 2 may include the second heat exchanger channels, which can be used for accommodating heat exchange material.For example,
Second heat exchanger channels are also possible to the cavity being formed in chassis 2, are also possible to tubular structure, and for example, the second heat exchange is logical
Road can be the channel for being shaped in 2 inner wall of chassis, alternatively, can also be the pre- pipeline etc. for being embedded in 2 inner wall of chassis, it is transversal
The shape in face can be round, rectangle or other irregular figures, not be spy to the shape and form of the second heat exchanger channels herein
It is different to limit, as long as heat exchange material can be accommodated.
Second heat exchanger channels can have the second import 21 and second outlet 22, in which:
Second import 21 can be set to side of the chassis 2 far from furnace tube 1, can be by the second import 21 into the second heat exchanger channels
Input heat exchange raw material, the ingredient of the heat exchange raw material do not do particular determination herein, for example, the heat exchange raw material can be water or oil etc. can
To absorb the liquid of heat.Second import 21 can be the tubular structure set on chassis 2, to be capable of providing heat exchange raw material with one
Feeding device 100 is connected to.
The quantity of second import 21 can be one, to connect with feeding device 100.Certainly, the number of the second import 21
Amount is also possible to multiple, and can be uniformly distributed on chassis 2.The shape of second import 21 can be round, rectangle or other figures
Shape does not do particular determination to the shape of the second import 21 herein.
Second outlet 22 can be connected to the first import 11, can by the heat exchange raw material that the second import 21 enters the second heat exchanger channels
It is exported by second outlet 22 and is entered in the first heat exchanger channels by the first import 11, carry out secondary heat exchange, and first outlet 12 is defeated
The temperature of heat exchange raw material out can be greater than the temperature for the heat exchange raw material that second outlet 22 exports, thus heat exchange raw material can be made abundant
Ground exchanges heat, and obtains the higher heat exchange raw material of temperature, avoids heat waste.
The quantity of second outlet 22 can be one, to be connected to the first import 11, and will pass through the second heat exchanger channels
Heat exchange feedstock transportation after heat exchange carries out secondary heat exchange into the first heat exchanger channels.Certainly, the quantity of second outlet 22 can also be with
It is multiple, and each second outlet 22 can be uniformly distributed in chassis 2, the heat exchange raw material in the second heat exchanger channels can be simultaneously from each
Second outlet 22 exports.Each second outlet 22 can be connected to each first import 11 correspondingly.The shape of second outlet 22 can
To be round, rectangle or other irregular figures, particular determination is not done to the shape of second outlet 12 herein.
For the ease of the output of the second heat exchanger channels heat exchange feedstock transportation to the first heat exchanger channels, disclosure embodiment
Heating plant can also include pressure-applying unit, and second outlet 22 can be connected to by the pressure-applying unit with the first import 11, pressurization group
The heat exchange raw material pressurization that part can be used for exporting second outlet 22, so that the feedstock transportation that will exchange heat is to the first heat exchanger channels.Citing
For, pressure-applying unit may include at least one pump, which can be pressure pump or other kinds of pump, and one end of pump can be with second
22 connection of outlet, the other end can be connect with the first import 11, can be controlled pump by singlechip controller and be moved back and forth, to make to change
The pressure of hot charge reaches preset value and keeps constant, and then can guarantee that heat exchange raw material is input to the first import 11.
As shown in Fig. 2, the heating plant of disclosure embodiment can also include temperature detection device 3, the can be set to
The side of one outlet 12 can be used for detecting the temperature of the heat exchange raw material of the output of first outlet 12.Temperature detection device 3 may include
Temperature-sensing element, the temperature-sensing element can be temperature sensor, it is of course also possible to be other elements, will not enumerate herein.Its
Material can be conductor or semiconductor material, and for example, the material of temperature-sensing element can be platinum, aluminium etc., naturally it is also possible to be
Other materials, if it is temperature sensitive, and temperature characterisitic can be converted to usable output signal.
The quantity of temperature-sensing element can be one, naturally it is also possible to be multiple, and each temperature-sensing element can be set correspondingly
In the side of each first outlet 12, in order to detect multiple first outlets 12 heat exchange raw material temperature.
The heating plant of disclosure embodiment can also include valve, and valve can be set at first outlet 12, and available
In opening or closing first outlet 12.The quantity of valve can be one, in order to open or close first outlet 12, certainly,
When the quantity of first outlet 12 is multiple, the quantity of valve is also possible to multiple, and multiple valves can be set to correspondingly
At first outlet 12.The material of valve can be metal material or stainless steel material, and size can be greater than or equal to first outlet
12 opening size, and its shape can match with the shape of first outlet 12, for example, shape can be round, square
Shape or other irregular figures.When valve opens first outlet 12, heat exchange raw material can be exported from first outlet 12.
The heating plant of disclosure embodiment can also include control assembly, and control assembly can be set to first outlet 12
Place, and can be connect with temperature detection device 3, it can be used for when the temperature that temperature detection device 3 detects reaches threshold value, can control
Valve is opened；Meanwhile valve can be can control to close when the temperature that temperature detection device 3 detects is not up to threshold value.Control group
Part can be preset control program, be also possible to the controller for a corresponding temperature signal, naturally it is also possible to be other classes
The control assembly of type opens or closes as long as can control valve.The quantity of control assembly can be one, in order to control
Valve at first outlet 12 opens or closes, and certainly, when the quantity of valve is multiple, the quantity of control assembly is also possible to
It is multiple, and each control assembly can control each valve correspondingly.
For example, threshold value can be predetermined temperature value, can be 150 DEG C, be also possible to 140 DEG C, 160
DEG C, 170 DEG C etc., naturally it is also possible to be other temperature, particular determination do not done to threshold value herein, as long as being able to satisfy thermal to be added
The temperature requirements of heat exchange raw material needed for 200.For 150 DEG C of threshold value, when the temperature that temperature detection device 3 detects is greater than
Or when being equal to 150 DEG C, control assembly can control valve to open, at this point, the heat exchange raw material in the first heat exchanger channels can go out from first
Mouth 12 exports, and when the temperature that temperature detection device 3 detects is less than 150 DEG C, control assembly can control valve to close, heat exchange original
Material can continue to exchange heat in the first heat exchanger channels.
Embodiment further provides a kind of heat-exchange systems for the disclosure, as shown in Figure 1, the heat-exchange system may include feed dress
Set the heating system and thermal to be added 200 of 100, any of the above-described embodiment, in which:
Feeding device 100, for exporting heat exchange raw material；
Heating plant described in any of the above embodiments, first import 11 and the second import 21 and the feeding device 100
Connection；
Thermal 200 to be added is connected to the first outlet 12.
The heat-exchange system of the disclosure can since the first import 11 and the second import 21 to be connected to feeding device 100 respectively
Hot charge heat exchange is exchanged simultaneously by the first heat exchanger channels and the second heat exchanger channels, can reduce heat-exchange time；Again due to by second
Outlet 22 is connected to heat exchange feedstock transportation to the first heat exchanger channels that can export the second heat exchanger channels with first outlet 12 and carries out two
Secondary heat exchange can avoid the additional heating equipment of addition, simplification of flowsheet, and have to obtain the higher heat exchange raw material of temperature
Conducive to reduction production cost.
Heating plant can be the cabinet for storing heat exchange raw material, can by the first import 11 and the second import 21 with
Heating plant connection, and can be by the first import 11 and the second import 21 by the heat exchange feedstock transportation with initial temperature to first
In heat exchanger channels and the second heat exchanger channels.The initial temperature can be 130 DEG C, is also possible to 110 DEG C, 120 DEG C etc., certainly may be used
To be other temperature, will not enumerate herein.Heat exchange raw material can be water, be also possible to oil, naturally it is also possible to be that other are changed
Hot charge, the type for not exchanging hot charge herein do particular determination, as long as the heat in heating plant can be absorbed.
Thermal 200 to be added can be connected to first outlet 12, and the heat exchange that can be used for receiving the output of first outlet 12 is former
Material, and by its rational utilization, for example, which can be raw material workshop, naturally it is also possible to be that other are needed
Exchange heat the device of raw material, will not enumerate herein.
In addition, the detail of heating plant is described in detail in the above-described embodiment, it is no longer superfluous herein
It states.
Those skilled in the art after considering the specification and implementing the invention disclosed here, will readily occur to its of the disclosure
Its embodiment.This application is intended to cover any variations, uses, or adaptations of the disclosure, these modifications, purposes or
Person's adaptive change follows the general principles of this disclosure and including the undocumented common knowledge in the art of the disclosure
Or conventional techniques.The description and examples are only to be considered as illustrative, and the true scope and spirit of the disclosure are by appended
Claim is pointed out.
Claims (10)
1. a kind of heating plant characterized by comprising
Reduction furnace, including furnace tube and chassis, the furnace tube include the first heat exchanger channels, first heat exchanger channels have first into
Mouth and first outlet；The chassis includes the second heat exchanger channels, and second heat exchanger channels have the second import and second outlet；
The feeding device that first import and second import are capable of providing heat exchange raw material with one respectively is connected to, and described second
Outlet and first inlet communication, the first outlet with a thermal to be added for being connected to.
2. heating plant according to claim 1, which is characterized in that the heating plant further include:
Pressure-applying unit, the second outlet is by the pressure-applying unit and first inlet communication, for going out to described second
The heat exchange raw material pressurization of mouth output.
3. heating plant according to claim 1, which is characterized in that the heating plant further include:
Temperature detection device is set to the first outlet, the temperature of the heat exchange raw material for detecting the first outlet output.
4. heating plant according to claim 3, which is characterized in that the heating plant further include:
Valve is set to the first outlet, is used to open or closes the first outlet.
5. heating plant according to claim 2, which is characterized in that the pressure-applying unit includes at least one pump.
6. heating plant according to claim 4, which is characterized in that the heating plant further include:
Control assembly is connect with the temperature detection device, and the temperature for detecting in the temperature detection device reaches threshold
When value, controls the valve and open；When the temperature that the temperature detection device detects is not up to the threshold value, described in control
Valve is closed.
7. heating plant according to claim 1, which is characterized in that the heat exchange raw material is water.
8. heating plant according to claim 6, which is characterized in that the threshold value is 150 DEG C.
9. a kind of heat-exchange system characterized by comprising
Feeding device, for exporting heat exchange raw material；
The described in any item heating plants of claim 1-8, first import are connected to the feeding device；
Thermal to be added is connected to the first outlet.
10. heat-exchange system according to claim 9, which is characterized in that the feeding device is 130 DEG C for output temperature
Heat exchange raw material.
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| CN201811554747.6A CN109682221A (en) | 2018-12-18 | 2018-12-18 | Heating plant and heat-exchange system |
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| CN201811554747.6A CN109682221A (en) | 2018-12-18 | 2018-12-18 | Heating plant and heat-exchange system |
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| CN102424386A (en) * | 2011-09-06 | 2012-04-25 | 江苏中圣高科技产业有限公司 | Efficient energy-saving type polysilicon reduction furnace |
| CN102515167A (en) * | 2011-11-29 | 2012-06-27 | 天津大学 | Periodical alternatively operating polycrystalline silicon reduction furnace equipped with inner heat-insulating barrel and operation method |
| CN102659109A (en) * | 2012-04-27 | 2012-09-12 | 四川新光硅业科技有限责任公司 | Polycrystalline silicon reduction furnace |
| CN103626185A (en) * | 2013-06-18 | 2014-03-12 | 浙江精功科技股份有限公司 | Polysilicon production apparatus |
| JP2016138021A (en) * | 2015-01-28 | 2016-08-04 | 株式会社トクヤマ | Method and apparatus of manufacturing polycrystalline silicon rod |
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Application publication date: 20190426 |
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