CN109669226A - A kind of laser radar scanning device and its design method based on super surface lens group pattern - Google Patents

A kind of laser radar scanning device and its design method based on super surface lens group pattern Download PDF

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Publication number
CN109669226A
CN109669226A CN201910011485.7A CN201910011485A CN109669226A CN 109669226 A CN109669226 A CN 109669226A CN 201910011485 A CN201910011485 A CN 201910011485A CN 109669226 A CN109669226 A CN 109669226A
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lens group
layer
surface lens
group pattern
super surface
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CN109669226B (en
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马云贵
陈瑞
周毅
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The invention discloses a kind of laser radar scanning device and its design method based on super surface lens group pattern is implemented in combination with laser radar scanning by super surface lens group pattern and piezoelectric ceramics.The device includes two layers of parallel super surface lens group, and the super surface lens of first layer realize ideal focusing or the diverging of vertical incidence collimated light beam, make its focus or virtual focus on the front focal plane that the second layer surpasses surface lens group.First layer is surpassed the light beam dissipated after surface lens convergence, or the light beam directly dissipated, is transformed into parallel light emergence by the super surface lens group of the second layer；When first layer surpasses surface lens, and lateral displacement occurs, identical lateral displacement also occurs for focal position, for the second layer surpasses surface lens group, is equivalent to the light wave that point off-axis on front focal plane issues, becomes the plane wave for having certain angle of emergence by lens；By lenslet array, enhance its clear aperture, realizes the high speed under small displacement, high-resolution, the laser radar design of wide-angle.

Description

A kind of laser radar scanning device and its design based on super surface lens group pattern Method
Technical field
The invention belongs to micronano optical and optical chip integration fields, more particularly to one kind to be based on super surface lens group pattern Laser radar scanning device and its design method.
Background technique
Laser radar (Light Detection And Ranging, abbreviation Lidar) is a kind of by detecting remote mesh Target scatters light characteristic to obtain the optical remote sensing technology of target relevant information.It is conventional radar technology and modern laser The product combined, using laser beam as information carrier, amplitude, phase, polarization and the frequency of available light carry information.With with It is compared toward microwave radar, laser radar can obtain higher resolution ratio, detect more tiny object.However conventional laser Radar realizes that light beam scans using reflecting mirror high-speed rotation, due to the rate limitation of its machinery rotation, prevents it from obtaining quickly Scan frequency, and very big scanning angle has certain disconnection, and its with vast high-speed object Scan orientation demand It is with high costs, limit its development.
Summary of the invention
In view of the deficiencies of the prior art, it is an object of the present invention to provide a kind of laser thunders based on super surface lens group pattern Up to scanning means and its design method.
The technical solution adopted by the present invention to solve the technical problems is as follows: a kind of swashing based on super surface lens group pattern Optical radar scanning means, the device include two layers of parallel super surface lens group pattern, the super surface lens of the first layer of the plane of incidence Group pattern realizes ideal focusing or the diverging of vertical incidence collimated light beam, its focus or virtual focus is made to surpass surface lens in the second layer On the front focal plane of group, the second layer of exit facet super surface lens group pattern is sent out after first layer is surpassed the convergence of surface lens group pattern Scattered light beam, or the light beam directly dissipated, are transformed into parallel light emergence；Occur laterally when first layer surpasses surface lens group pattern When displacement, identical lateral displacement also occurs for focal position, corresponds to for the super surface lens group pattern of the second layer, is equivalent to The light wave that off-axis point issues on front focal plane, passes through the plane wave for becoming having certain angle of emergence after lens；
The super surface lens group pattern of first layer is micro- by the sub-wavelength of the first transparent substrates and the first transparent substrates side Structure composition, the transparent substrates are used to transmit incident light, and support sub-wavelength micro structure, the sub-wavelength micro structure are used for Phase-modulation is realized to the light beam of transparent substrates transmission, is made of several nanometers of dielectric posts；
The super surface lens group pattern of the second layer is micro- by the sub-wavelength of the second transparent substrates and the second transparent substrates two sides Structure composition, the transparent substrates are for transmiting incident light, and support sub-wavelength micro structure, the sub-wavelength micro structure of the plane of incidence For collimated incident light, the sub-wavelength micro structure of exit facet is used for the aberration correction of different angle emergent light, the sub-wavelength of two sides Micro-structure is made of several nanometers of dielectric posts.
Further, piezoelectricity is loaded on the super surface lens group pattern of the first layer or the super surface lens group pattern of the second layer Ceramics realize the angle scanning of outgoing beam.
Further, which further includes being placed in the super surface lens group pattern of first layer and the super surface lens group battle array of the second layer Super surface phase-modulation layer on focussing plane between column, for realizing the phase compensation of entire scanning means, to improve The resolution ratio of outgoing beam.
Further, it is saturating to be equal to the super surface of the second layer for the aperture of lens of the super surface lens group pattern exit facet of the first layer The aperture of lens of the microscope group array plane of incidence, to improve the utilization rate of light beam；The super surface lens group pattern exit facet of the second layer Aperture of lens and the ratio between the aperture of lens of the super surface lens group pattern plane of incidence of first layer be greater than 1:1.36, spread out with eliminating stitch more Penetrate secondary lobe.
Further, the spacing between the super surface lens group pattern of the first layer and the super surface lens group pattern of the second layer Surpass the focal length of surface lens group pattern and the sum of the focal length of the super surface lens group pattern of the second layer, the first layer equal to first layer The numerical aperture of super surface lens group pattern and the super surface lens group pattern of the second layer is equal, to ensure that light beam surpasses table in the second layer The exit facet of face lens group is full of pupil, reduces diffraction secondary lobe.
Further, the lattice constant of the nanometer dielectric posts is less than operation wavelength, connects in the transmission amplitude of operation wavelength Nearly 1, the transmission phase of different sized nanostructures dielectric posts covers 0~2 π.
Further, the nanometer dielectric posts of each layer of sub-wavelength micro structure, which are arranged, meets: in each lattice position of entire surface Different phases is compensated, to realize the phase distribution requirement of each face design.
A kind of design method of the laser radar scanning device based on super surface lens group pattern, this method includes following step It is rapid:
Step (1) is required according to design objective and technique limits, and determines operation wavelength, the scanning angle model of scanning means It encloses and scan frequency, two layers surpasses the structure size of each lens, focal length in surface lens group pattern to calculate, the second layer is super Displacement needed for the operating angle of each lens and maximum scan angle in surface lens group pattern.
The structural parameters that step (2) is calculated according to step (1), using binary optical elements (Binary2) in ZEMAX In simulate to two layers surpassing surface lens group pattern, obtain desired phase distribution and the structure index path on super surface；? In laser radar design, the lens of optimization need reversed arrangement as the super surface lens group pattern of the second layer.
Step (3) calculates the transmission amplitude and phase of different sized nanostructures dielectric posts using electromagnetic simulation software, and selection is received When meter Jie Zhi column dimension, its lattice constant need to be met less than operation wavelength, operation wavelength transmission amplitude close to 1, different rulers The transmission phase of very little nanometer dielectric posts covers 0~2 π.
Step (4) designs nanometer dielectric posts according to the phase requirements of every layer of super each lattice position of surface lens group pattern Arrangement mode.
Step (5) acts on piezoelectric ceramics on the super surface lens group pattern of single layer, using the variation of signal voltage, realizes The transverse shifting of super surface lens group pattern, so that the light wave after focusing be made to become in the case where the second layer surpasses the effect of surface lens group pattern To there is the directional light of certain angle of emergence, by the two-dimensional movement to super surface array, the two-dimentional wide-angle to objects in front is realized Scanning.
Further, the specific design method of the step (1) is as follows:
In the super surface lens group pattern of the second layer, the operating angle of each lens is equal to the scanning angle of design, work The corresponding image height of angle is required displacement, and the bore and focal length of the plane of incidence of each lens optimize gained, optimization by ZEMAX So that each lens have image height as small as possible in required visual field in the super surface lens group pattern of the second layer, corresponding coke at this time Away from and bore be design optimal value.
It is obtained in the super surface lens group pattern of the second layer between the focal length f and displacement l of each lens using geometrical relationship Relationship:
0.5*l/f=tan θ (1)
Wherein θ is exit direction angle.
It is hereby achieved that in structural parameters in displacement and the super surface lens group pattern of the second layer each lens focal length Value distorts since actual design lens exist, and the relationship of beam projecting angle and image height is not exclusively decided by (1) formula, still, this Formula determines an initial structural parameters.
The bore and the super each lens of surface lens group pattern of the second layer of the super each lens of surface lens group pattern of first layer The plane of incidence bore it is equal, to improve beam utilization, the numerical aperture of the super each lens of surface lens group pattern of first layer Surpass that each lens of surface lens group pattern are identical with the second layer, the super each lens of surface lens group pattern of first layer are determined with this Bore and focal length.
Further, in the step (2), the phase distribution on super surface is simulated with binary optical elements, phase Bit distribution is defined as the even multinomial of radial coordinate:
φ (ρ)=∑ an(ρ/R)2n (2)
Wherein R is super surface lens radius, and ρ is the radial coordinate on super surface, coefficient anTo make in incidence angle maximum The smallest (root mean square of the focus size) Optimal Parameters of focus, n are even multinomial item number, thus obtain each super surface lens Desired phase distribution.
The beneficial effects of the present invention are: using piezoelectric ceramics control by the combination of micro-nano optical technology and piezoelectric ceramics Micro lateral displacement occurs for microlens array processed, may be implemented to make full use of the transformation of vertical incidence light wave shooting angle The characteristics of high-NA of super surface lenticule, integrability and piezoelectric ceramic electric control are displaced, may be implemented laser radar Wide-angle, high-frequency scanning, while also there are the advantages such as light-weight, thickness is thin, integrability application, and extensive It can control its cost in manufacture.Therefore, the laser radar based on super surface lens group pattern is designed as current problems faced Provide highly effective solution.
Detailed description of the invention
Fig. 1 is the schematic diagram that laser radar scanning is realized using super surface lens group pattern, and a, b are respectively in designing in figure First layer and the super surface lens group pattern of the second layer.
Fig. 2 is the simulation optimization schematic diagram of the super surface lenticule group of second layer bilayer.
Fig. 3 is the structure chart and identical structure unit cell arrays figure for designing structure cell, and h is the height that nanometer is lived, d in figure1、d2Point Not Wei center nano-pillar and edge nano-pillar diameter, p is lattice period.
Fig. 4 (a) is that the transmissivity and phase when wavelength is 946nm under the composite construction unit different radii of design combines are prolonged Slow numerical result.
Fig. 4 (b) is the transmissivity and phase when wavelength is 1550nm under the composite construction unit different radii of design combines Postpone numerical result.
Fig. 5 (a) is the fitted figure of super surface lenticule radial phase distribution function under 946nm light wave.
Fig. 5 (b) is the fitted figure of super surface lenticule radial phase distribution function under 1550nm light wave.
In Fig. 6, (a) is artificial super surface lens group pattern infrared microscope flowering structure figure, is (b) artificial super surface lens Group pattern 100X visible light microscope flowering structure figure is (c) artificial focusing of the super surface lens group pattern for incident infrared light Situation.
Fig. 7 (a) is the optical beam transformation analogous diagram in no relative displacement of super surface lens combination array.
Fig. 7 (b) is the angular spectrum figure of Fig. 7 (a) output light field.
Fig. 8 (a) is the optical beam transformation analogous diagram in maximum relative displacement of super surface lens combination array.
Fig. 8 (b) is the angular spectrum figure of Fig. 8 (a) output light field.
Specific embodiment
Invention is further described in detail in the following with reference to the drawings and specific embodiments.
A kind of laser radar scanning device based on super surface lens group pattern provided by the invention, the device include two layers Parallel super surface lens group pattern, the super surface lens group pattern of the first layer of the plane of incidence realize the reason of vertical incidence collimated light beam Want to focus or dissipate, make its focus or virtual focus on the front focal plane that the second layer surpasses surface lens group, the second layer of exit facet is super First layer is surpassed the light beam dissipated after the convergence of surface lens group pattern, or the light beam directly dissipated, turned by surface lens group pattern Become parallel light emergence；When first layer surpasses surface lens group pattern, and lateral displacement occurs, focal position also occurs identical Lateral displacement corresponds to for the super surface lens group pattern of the second layer, is equivalent to the light wave that point off-axis on front focal plane issues, leads to Become the plane wave for having certain angle of emergence after crossing lens.
As shown in Figure 1, the plane wave of vertical incidence is focused on the super surface of the second layer by the super surface lens group pattern a of first layer On the front focal plane of lenslet array b, then surface lens array is surpassed by the second layer, light wave is transformed to plane wave.
When first layer surpasses surface lens group pattern, and lateral displacement occurs, identical lateral position also occurs for focal position It moves, for the second layer surpasses surface lens group pattern, the light wave that point off-axis on front focal plane issues is equivalent to, by becoming after lens To there is the plane wave of certain angle of emergence.
The super surface lens group pattern of first layer is micro- by the sub-wavelength of the first transparent substrates and the first transparent substrates side Structure composition, the transparent substrates are used to transmit incident light, and support sub-wavelength micro structure, the sub-wavelength micro structure are used for Phase-modulation is realized to the light beam of transparent substrates transmission, is made of several nanometers of dielectric posts.
The super surface lens group pattern of the second layer is micro- by the sub-wavelength of the second transparent substrates and the second transparent substrates two sides Structure composition, the transparent substrates are for transmiting incident light, and support sub-wavelength micro structure, the sub-wavelength micro structure of the plane of incidence For collimated incident light, the sub-wavelength micro structure of exit facet is used for the aberration correction of different angle emergent light, the sub-wavelength of two sides Micro-structure is made of several nanometers of dielectric posts.
Further, piezoelectricity is loaded on the super surface lens group pattern of the first layer or the super surface lens group pattern of the second layer Ceramics realize the angle scanning of outgoing beam.
Further, which further includes being placed in the super surface lens group pattern of first layer and the super surface lens group battle array of the second layer Super surface phase-modulation layer on focussing plane between column, for realizing the phase compensation of entire scanning means, to improve The resolution ratio of outgoing beam.
Further, it is saturating to be equal to the super surface of the second layer for the aperture of lens of the super surface lens group pattern exit facet of the first layer The aperture of lens of the microscope group array plane of incidence, to improve the utilization rate of light beam；The super surface lens group pattern exit facet of the second layer Aperture of lens and the ratio between the aperture of lens of the super surface lens group pattern plane of incidence of first layer be greater than 1:1.36, spread out with eliminating stitch more Penetrate secondary lobe.
Further, the spacing between the super surface lens group pattern of the first layer and the super surface lens group pattern of the second layer Surpass the focal length of surface lens group pattern and the sum of the focal length of the super surface lens group pattern of the second layer, the first layer equal to first layer The numerical aperture of super surface lens group pattern and the super surface lens group pattern of the second layer is equal, to ensure that light beam surpasses table in the second layer The exit facet of face lens group is full of pupil, reduces diffraction secondary lobe.
Further, the lattice constant of the nanometer dielectric posts is less than operation wavelength, connects in the transmission amplitude of operation wavelength Nearly 1, the transmission phase of different sized nanostructures dielectric posts covers 0~2 π.
Further, the nanometer dielectric posts of each layer of sub-wavelength micro structure, which are arranged, meets: in each lattice position of entire surface Different phases is compensated, to realize the phase distribution requirement of each face design
A kind of laser radar design based on super surface lens group pattern, specifically includes the following steps:
Step (1) is required according to design objective and technique limits, and determines operation wavelength, the scanning angle model of scanning means It encloses and scan frequency, two layers surpasses the structure size of each lens, focal length in surface lens group pattern to calculate, the second layer is super Displacement needed for the operating angle of each lens and maximum scan angle in surface lens group pattern.
The structural parameters that step (2) is calculated according to step (1), using binary optical elements (Binary2) in ZEMAX In simulate to two layers surpassing surface lens group pattern, obtain desired phase distribution and the structure index path on super surface.Such as Fig. 2 is the super surface lens group structure index path of bilayer of Zemax optimization.
Step (3) calculates the transmission amplitude and phase of different sized nanostructures dielectric posts using electromagnetic simulation software, and selection is received When meter Jie Zhi column dimension, its lattice constant need to be met less than operation wavelength, operation wavelength transmission amplitude close to 1, different rulers The transmission phase of very little nanometer dielectric posts covers 0~2 π.As shown in Fig. 3 the composite nano medium of the work of the dual wavelength designed Cylindrulite born of the same parents are made of two class nanometer dielectric posts, and h is the height that nanometer is lived, nanometer dielectric posts and side centered on d1, d2 difference in figure The diameter of edge nanometer dielectric posts, p are lattice period.The phase value being calculated according to electromagnetic simulation software chooses suitable construction Basic unit of the nanometer dielectric posts (composite nano medium rod structure is used when dual wavelength) as the artificial special plane of medium base, Different transmission phases can be by changing its parameter (d1, d2) realize, such as the ginseng that Fig. 4 (a), Fig. 4 (b) they are composite construction structure cell Array closes (d1, d2) transmission amplitude and phase value of the serial number at two wavelength.
Step (4) designs nanometer dielectric posts according to the phase requirements of every layer of super each lattice position of surface lens group pattern Arrangement mode.Fig. 5 (a), Fig. 5 (b) are to fit within super surface lenticule using Fig. 4 (a), Fig. 4 (b) result radially to exist respectively Transmission phase Function Fitting effect under 946nm and 1550nm.If Fig. 6 is super surface lens group pattern laboratory sample figure.
Step (5) acts on piezoelectric ceramics on the super surface lens group pattern of single layer, using the variation of signal voltage, realizes The transverse shifting of super surface lens group pattern, so that the light wave after focusing be made to become in the case where the second layer surpasses the effect of surface lens group pattern To there is the directional light of certain angle of emergence, by the two-dimensional movement to super surface array, the two-dimentional wide-angle to objects in front is realized Scanning.
As Fig. 7 (a), Fig. 7 (b) simulation result shown in, have a small lateral position in first super surface lenticule When shifting, a deviation will be occurred by the light wave of second super surface lenticule group.Fig. 7 (a) is when not being displaced, and light wave hangs down Straight outgoing, Fig. 7 (b) are Fig. 7 (a) output light field angular spectrum figure.Fig. 8 (a) is optical path analogous diagram when lens array shows displacement, Fig. 8 It (b) is Fig. 8 (a) output light field angular spectrum figure.
Further, the specific design method of the step (1) is as follows:
In the super surface lens group pattern of the second layer, the operating angle of each lens is equal to the scanning angle of design, work The corresponding image height of angle is required displacement, and the bore and focal length of the plane of incidence of each lens optimize gained, optimization by ZEMAX So that each lens have image height as small as possible in required visual field in the super surface lens group pattern of the second layer, corresponding coke at this time Away from and bore be design optimal value.
It is obtained in the super surface lens group pattern of the second layer between the focal length f and displacement l of each lens using geometrical relationship Relationship:
0.5*l/f=tan θ (1)
Wherein θ is exit direction angle.
It is hereby achieved that in structural parameters in displacement and the super surface lens group pattern of the second layer each lens focal length Value distorts since actual design lens exist, and the relationship of beam projecting angle and image height is not exclusively decided by (1) formula, still, this Formula determines an initial structural parameters.
The bore and the super each lens of surface lens group pattern of the second layer of the super each lens of surface lens group pattern of first layer The plane of incidence bore it is equal, to improve beam utilization, the numerical aperture of the super each lens of surface lens group pattern of first layer Surpass that each lens of surface lens group pattern are identical with the second layer, the super each lens of surface lens group pattern of first layer are determined with this Bore and focal length.
Further, in the step (2), the phase distribution on super surface is simulated with binary optical elements, phase Bit distribution is defined as the even multinomial of radial coordinate:
φ (ρ)=∑ an(ρ/R)2n (2)
Wherein R is super surface lens radius, and ρ is the radial coordinate on super surface, coefficient anTo make in incidence angle maximum The smallest (root mean square of the focus size) Optimal Parameters of focus, n are even multinomial item number, thus obtain each super surface lens Desired phase distribution.
Above-described embodiment is used to illustrate the present invention, rather than limits the invention, in spirit of the invention and In scope of protection of the claims, to any modifications and changes that the present invention makes, protection scope of the present invention is both fallen within.

Claims (10)

1. a kind of laser radar scanning device based on super surface lens group pattern, which is characterized in that the device includes flat two layers Capable super surface lens group pattern, the super surface lens group pattern of the first layer of the plane of incidence realize the ideal of vertical incidence collimated light beam It focuses or dissipates, make its focus or virtual focus on the front focal plane that the second layer surpasses surface lens group, the super table of the second layer of exit facet First layer is surpassed the light beam dissipated after the convergence of surface lens group pattern, or the light beam directly dissipated, transformation by face lenslet array At parallel light emergence；When first layer surpasses surface lens group pattern, and lateral displacement occurs, identical cross also occurs for focal position To displacement, correspond to for the super surface lens group pattern of the second layer, is equivalent to the light wave that point off-axis on front focal plane issues, passes through Become the plane wave for having certain angle of emergence after lens；
The super surface lens group pattern of first layer by the first transparent substrates and the first transparent substrates side sub-wavelength micro structure Composition, the transparent substrates are for transmiting incident light, and support sub-wavelength micro structure, and the sub-wavelength micro structure is for saturating The light beam of bright substrate transmission realizes phase-modulation, is made of several nanometers of dielectric posts；
The super surface lens group pattern of the second layer by the second transparent substrates and the second transparent substrates two sides sub-wavelength micro structure Composition, the transparent substrates are used to transmit incident light, and support sub-wavelength micro structure, the sub-wavelength micro structure of the plane of incidence are used for Collimated incident light, the sub-wavelength micro structure of exit facet are used for the aberration correction of different angle emergent light, the micro- knot of the sub-wavelength of two sides Structure is made of several nanometers of dielectric posts.
2. a kind of laser radar scanning device based on super surface lens group pattern according to claim 1, feature exist In loading piezoelectric ceramics on the super surface lens group pattern of the first layer or the super surface lens group pattern of the second layer, realize outgoing The angle scanning of light beam.
3. a kind of laser radar scanning device based on super surface lens group pattern according to claim 1, feature exist In the device further includes that the focusing being placed between the super surface lens group pattern of first layer and the super surface lens group pattern of the second layer is put down Super surface phase-modulation layer on face, for realizing the phase compensation of entire scanning means, to improve the resolution of outgoing beam Rate.
4. a kind of laser radar scanning device based on super surface lens group pattern according to claim 1, feature exist In the aperture of lens of the super surface lens group pattern exit facet of first layer is equal to the super surface lens group pattern plane of incidence of the second layer Aperture of lens, to improve the utilization rate of light beam；The aperture of lens of the super surface lens group pattern exit facet of the second layer and The ratio between aperture of lens of one layer of super surface lens group pattern plane of incidence is greater than 1:1.36, to eliminate more seam diffraction secondary lobes.
5. a kind of laser radar scanning device based on super surface lens group pattern according to claim 1, feature exist In the spacing between the super surface lens group pattern of the first layer and the super surface lens group pattern of the second layer is equal to the super table of first layer The focal length of face lenslet array and the sum of the focal length of the super surface lens group pattern of the second layer, the super surface lens group battle array of first layer Column are equal with the numerical aperture of the super surface lens group pattern of the second layer, and the outgoing of surface lens group is surpassed to ensure light beam in the second layer Face is full of pupil, reduces diffraction secondary lobe.
6. a kind of laser radar scanning device based on super surface lens group pattern according to claim 1, feature exist Be less than operation wavelength in the lattice constant of, nanometer dielectric posts, operation wavelength transmission amplitude close to 1, different sizes are received The transmission phase of rice dielectric posts covers 0~2 π.
7. a kind of laser radar scanning device based on super surface lens group pattern according to claim 1, feature exist In the nanometer dielectric posts of each layer of sub-wavelength micro structure, which are arranged, to be met: different phases is compensated in each lattice position of entire surface, To realize the phase distribution requirement of each face design.
8. a kind of design method of any one of claim 1-7 laser radar scanning device, which is characterized in that including following Step:
Step (1) is required according to design objective and technique limits, determine the operation wavelength of scanning means, scanning angle range and Scan frequency two layers surpasses the structure size of each lens, focal length in surface lens group pattern to calculate, the super surface of the second layer Displacement needed for the operating angle of each lens and maximum scan angle in lenslet array.
The structural parameters that step (2) is calculated according to step (1), it is right in ZEMAX using binary optical elements (Binary2) Two layers surpass surface lens group pattern to be simulated, obtains desired phase distribution and the structure index path on super surface；In laser In Radar Design, the lens of optimization need reversed arrangement as the super surface lens group pattern of the second layer.
Step (3) calculates the transmission amplitude and phase of different sized nanostructures dielectric posts using electromagnetic simulation software, and nanometer is selected to be situated between When matter column dimension, its lattice constant need to be met less than operation wavelength, operation wavelength transmission amplitude close to 1, different sizes are received The transmission phase of rice dielectric posts covers 0~2 π.
Step (4) designs the row of nanometer dielectric posts according to the phase requirements of every layer of super each lattice position of surface lens group pattern Mode for cloth.
Step (5) acts on piezoelectric ceramics on the super surface lens group pattern of single layer, using the variation of signal voltage, realizes super table The transverse shifting of face lenslet array, so that the light wave after focusing be made to become having in the case where the second layer surpasses the effect of surface lens group pattern The directional light of certain angle of emergence is realized and is scanned to the two-dimentional wide-angle of objects in front by the two-dimensional movement to super surface array.
9. according to the method described in claim 8, it is characterized in that, the specific design method of the step (1) is as follows:
In the super surface lens group pattern of the second layer, the operating angle of each lens is equal to the scanning angle of design, operating angle Corresponding image height is required displacement, and the bore and focal length of the plane of incidence of each lens optimize gained by ZEMAX, optimization so that Each lens have image height as small as possible in required visual field in the super surface lens group pattern of the second layer, at this time corresponding focal length with And bore is design optimal value.
The pass in the super surface lens group pattern of the second layer between the focal length f and displacement l of each lens is obtained using geometrical relationship System:
0.5*l/f=tan θ (1)
Wherein θ is exit direction angle.
It is hereby achieved that in structural parameters in displacement and the super surface lens group pattern of the second layer each lens focal length value, by Exist in actual design lens and distort, the relationship of beam projecting angle and image height is not exclusively decided by (1) formula, and still, this formula is true A fixed initial structural parameters.
The bore of the super each lens of surface lens group pattern of first layer enters with the super each lens of surface lens group pattern of the second layer The bore for penetrating face is equal, to improve beam utilization, the numerical aperture of the super each lens of surface lens group pattern of first layer and the Two layers of super each lens of surface lens group pattern are identical, and the bore of the super each lens of surface lens group pattern of first layer is determined with this And focal length.
10. according to the method described in claim 8, it is characterized in that, the phase distribution on super surface is used in the step (2) Binary optical elements are simulated, and phase distribution is defined as the even multinomial of radial coordinate:
φ (ρ)=∑ an(ρ/R)2n (2)
Wherein R is super surface lens radius, and ρ is the radial coordinate on super surface, coefficient anTo make focus most in incidence angle maximum Small Optimal Parameters, n are even multinomial item number, thus obtain the desired phase distribution of each super surface lens.
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