CN111190164A - Scanning device and scanning method - Google Patents
Scanning device and scanning method Download PDFInfo
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- CN111190164A CN111190164A CN202010106526.3A CN202010106526A CN111190164A CN 111190164 A CN111190164 A CN 111190164A CN 202010106526 A CN202010106526 A CN 202010106526A CN 111190164 A CN111190164 A CN 111190164A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
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Abstract
The invention provides a scanning device and a scanning method, wherein the device comprises a light source, a scanning device and a light beam receiver; the light source is used for emitting a light signal to the scanning device; the scanning device comprises an optical deflection component, a light source and a scanning component, wherein the optical deflection component is used for receiving the optical signal emitted by the light source, changing the propagation direction and projecting the optical signal to a measured object; the light beam receiver is used for receiving the echo signal reflected by the measured object; the optical deflection assembly comprises a reconfigurable optical super surface layer and a micro lens array, the reconfigurable optical super surface layer is used for deflecting optical signals emitted by the light source, and the micro lens array is used for shaping the optical signals after the reconfigurable optical super surface layer is deflected. Realizing large-angle and high-frequency optical scanning of incident beams; meanwhile, the method has the application advantages of miniaturization, integration and the like, and the cost can be controlled in large-scale manufacturing.
Description
Technical Field
The invention relates to the technical field of micro-nano optics, in particular to a scanning device and a scanning method.
Background
The traditional scanning mirror is a macroscopic millimeter-scale mechanical structural member and is widely applied to the fields of projection display, bar code scanning, medical imaging, optical communication and the like, but the traditional scanning mirror limits the development of the traditional scanning mirror in the field of optical scanning due to the reasons of overlarge volume, high cost, poor shock resistance and the like, and is disconnected from the vast scanning positioning requirements to a certain extent.
The above background disclosure is only for the purpose of assisting understanding of the concept and technical solution of the present invention and does not necessarily belong to the prior art of the present patent application, and should not be used for evaluating the novelty and inventive step of the present application in the case that there is no clear evidence that the above content is disclosed at the filing date of the present patent application.
Disclosure of Invention
The present invention provides a scanning device and a scanning method for solving the existing problems.
In order to solve the above problems, the technical solution adopted by the present invention is as follows:
a scanning apparatus includes a light source, a scanning device, and a light beam receiver; the light source is used for emitting a light signal to the scanning device; the scanning device comprises an optical deflection component, a light source and a scanning component, wherein the optical deflection component is used for receiving the optical signal emitted by the light source, changing the propagation direction and projecting the optical signal to a measured object; the light beam receiver is used for receiving the echo signal reflected by the measured object; the optical deflection assembly comprises a reconfigurable optical super surface layer and a micro lens array, the reconfigurable optical super surface layer is used for deflecting optical signals emitted by the light source, and the micro lens array is used for shaping the optical signals after the reconfigurable optical super surface layer is deflected.
In one embodiment of the invention, the deflection comprises a one-dimensional deflection and a two-dimensional deflection. The optical device further comprises a lens, wherein the lens comprises at least one optical lens assembly for collecting the echo signals reflected by the measured object and focusing the echo signals to the light beam receiver. The reconfigurable optical super surface layer comprises a reconfigurable optical super surface layer and a reconfigurable optical super surface layer, and further comprises a controller, wherein the control circuit is used for applying bias voltage to the scanning device, and the bias voltage controls the dielectric constant of the reconfigurable optical super surface layer to change. The controller is embedded into the scanning device through a chip processing technology; alternatively, the controller is provided separately from the scanning device.
In another embodiment of the invention, the optical deflection assembly further comprises a transparent layer comprising a first transparent layer disposed on the underside of the reconfigurable optical super surface layer for supporting the reconfigurable optical super surface layer and a second transparent layer disposed on the upper side of the reconfigurable optical super surface layer for protecting the reconfigurable optical super surface layer. The first transparent layer and/or the second transparent layer is a glass medium. The reconfigurable optical super surface layer includes a nano-antenna for redirecting light.
The invention also provides a scanning method, which comprises the following steps: s1: controlling a light source to emit a light signal to a scanning device comprising an optical deflection assembly; s2: controlling the scanning device to receive the optical signal emitted by the light source, change the propagation direction and project the optical signal to a measured object; s3: controlling a light beam receiver to receive the echo signal reflected by the measured object so as to further obtain depth information; the optical deflection assembly comprises a reconfigurable optical super surface layer and a micro lens array, the reconfigurable optical super surface layer is used for deflecting optical signals emitted by the light source, and the micro lens array is used for shaping the optical signals after the reconfigurable optical super surface layer is deflected.
In one embodiment of the invention, a bias voltage is applied to the scanning device, which bias voltage controls a change in the dielectric constant of the reconfigurable optical super surface layer.
The invention has the beneficial effects that: the utility model provides a scanning device and scanning method, through the combination of reconfigurable optics super surface course and microlens array, use the change of the dielectric constant of bias voltage control reconfigurable optics super surface course to make incident beam focus to the different positions of microlens array focal plane after the super surface course of reconfigurable optics, constantly change in the one-dimensional or two-dimensional direction of microlens array focal plane, and then realize incident beam wide-angle, high frequency optical scanning. Meanwhile, the method has the application advantages of miniaturization, integration and the like, and the cost can be controlled in large-scale manufacturing.
Drawings
Fig. 1 is a schematic structural diagram of a scanning device according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of an optical deflection assembly according to the present invention.
Fig. 3 is a schematic structural diagram of another optical deflection assembly provided in accordance with the present invention.
FIG. 4 is a schematic structural view of a reconfigurable optical super surface layer provided in accordance with the present invention.
Fig. 5 is a schematic flow chart of a scanning method according to the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the embodiments of the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and the embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element. In addition, the connection may be for either a fixing function or a circuit connection function.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the embodiments of the present invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be in any way limiting of the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Fig. 1 is a schematic structural diagram of a scanning device according to the present invention. The scanning apparatus 100 comprises a light source 101, a scanning device 102 and an optical receiver 103. A light source 101 for emitting a light signal to the scanning device 102; a scanning device 102 including an optical deflection assembly 104 for receiving the optical signal emitted by the light source 101 and projecting the optical signal to a measured object after changing the propagation direction; a light beam receiver 103 for receiving the echo signal reflected by the object to be measured; the optical deflection assembly 104 includes a reconfigurable optical super surface layer and a micro lens array (not shown in the figure), the reconfigurable optical super surface layer is used for deflecting an optical signal emitted by the light source 101, and the micro lens array is used for shaping the optical signal after the reconfigurable optical super surface layer is deflected.
The reconfigurable optical super-surface layer is a new technology combining optics and nanotechnology, and characteristics of polarization, phase, amplitude, frequency and the like of light can be adjusted and controlled through a sub-wavelength micro-nano structure. The super surface with reconfigurable optical response has small volume, low consumption and easy design and realization, can miniaturize an optical scanning device and easily meet the existing scanning positioning requirement. In one embodiment of the present invention, the optical super-surface may be implemented by a plasma super-surface (plasmon surface), a dielectric super-surface (dielectric surface), a geometric super-surface (geometry surface), a Huygens' super-surface, or other types of super-surfaces. In this embodiment, the optical super-surface may comprise a plurality of scattering elements (scattering elements) arranged in a two-dimensional manner. The plurality of scattering units may be implemented using metal nanoparticles, dielectric nanoparticles, small holes formed in a metal layer, and a multi-layered scattering unit structure. Each scattering element may be a subwavelength range (subwavelength-scale) structure to control the propagation of light. The plurality of scattering elements may have spatially varying orientations, geometries, and/or materials to provide different local optical responses to the optical signal, such as amplitude responses, phase responses, polarization responses, or combinations thereof.
In one embodiment of the invention, the reconfigurable optical super surface layer may implement one-dimensional deflection or two-dimensional deflection of an optical signal. The scanning device also comprises a processor which can further obtain depth information by using the echo signals reflected by the measured object. The processor may be a separate component provided separately or may be a processor of the electronic device when the scanning apparatus is integrated in the electronic device. Specifically, the system may be a Central Processing Unit (CPU), other general purpose Processor, a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), an off-the-shelf Programmable Gate Array (FPGA) or other Programmable logic device, a discrete Gate or transistor logic device, a discrete hardware component, and the like. A general purpose processor may be a microprocessor or the processor may be any conventional processor or the like.
In one embodiment, the light source 101 may be a light source such as a Light Emitting Diode (LED), an Edge Emitting Laser (EEL), a Vertical Cavity Surface Emitting Laser (VCSEL), or a light source array composed of a plurality of light sources, and the light beam emitted by the light source may be visible light, infrared light, ultraviolet light, or the like. The light source 101 may be modulated at a time-sequential amplitude to emit a light beam outward, such as in one embodiment, the light source 101 is controlled to emit a pulsed light beam, a square wave modulated light beam, a sine wave modulated light beam, or the like at a frequency.
In one embodiment, the light beam receiver 103 may be a Charge Coupled Device (CCD), a Complementary Metal Oxide Semiconductor (CMOS), an Avalanche Diode (AD), a Single Photon Avalanche Diode (SPAD), or other image sensor, and the pixels of the image sensor may be in the form of a single point, a linear array, or an area array. Typically, a readout circuit (not shown) including one or more of a signal amplifier, a time-to-digital converter (TDC), an analog-to-digital converter (ADC), and the like is also included in connection with the optical beam receiver 103.
In one embodiment, the scanning device 100 includes a lens 105, and the lens 105 includes one or more optical lens assemblies for collecting echo signals reflected from the object to be measured and focusing the echo signals to the beam receiver 103. The optical lens assembly includes a focusing lens that may be part of a fixed focusing optical subsystem or a variable focusing subsystem that implements an autofocus configuration.
In one embodiment, the scanning apparatus 100 further comprises a controller (not shown) for controlling the circuitry to apply a bias voltage to the scanning device 102. The controller includes a logic operation module and a voltage control module, or further includes a processor, a register, and other components, and can implement simple logic operations, such as addition, subtraction, multiplication, division, and the like, and generate a related control operation instruction according to the operation result, implement a function of controlling the related control operation instruction, and implement a function of controlling the working state of the related component, for example, applying a bias voltage to the scanning device 102 to control the working state of the scanning device 102. In some equivalent embodiments, the logic operation module and the voltage control module can be replaced by a logic operation circuit and a voltage control circuit. The controller may be embedded in the scanning device 102 through a chip manufacturing process, or may be a separate module and disposed separately from the scanning device 102.
In one embodiment, the light source 101 emits a light signal to the scanning device 102, and the control circuit applies a bias voltage to the scanning device 102, under the action of which the structure of the optical deflection assembly 104 housed in the scanning device 102 changes. The optical deflection assembly 104 receives an optical signal emitted by the light source 101, the optical signal is emitted to a measured object through two-dimensional deflection of the reconfigurable optical super-surface layer of the optical deflection assembly 104 and shaping of the micro-lens array to scan the measured object, and an echo signal reflected by the measured object is received by the lens 105 and focused to the light beam receiver 103. The light beam receiver 103 receives the echo signal and further processes the echo signal to obtain depth information of the object to be measured. It should be understood that the present invention is also applicable to one-dimensional optical scanning, where the beam is deflected in only one dimension at the reconfigurable optical super-surface layer, without limitation.
Fig. 2 is a schematic structural diagram of an optical deflection assembly provided in accordance with the present invention. The optical deflection assembly 200 further comprises transparent layers including a first transparent layer 201 and a second transparent layer 202, the first transparent layer 201 is disposed on the lower side of the reconfigurable optical super surface layer 203 for supporting the reconfigurable optical super surface layer 203, the second transparent layer 202 is disposed on the upper side of the reconfigurable optical super surface layer 203 for protecting the reconfigurable optical super surface layer 203, and the first transparent layer 201 and the second transparent layer 202 may be glass media, but are not limited thereto. The microlens array includes a plurality of microlens units, such as the microlens unit 204, arranged in an array, each microlens unit in the microlens array corresponds to each light emitting unit on the light source 101, and one microlens unit may also correspond to a plurality of light emitting units on the light source 101, for shaping the optical signal deflected by the reconfigurable optical super surface layer 203. It should be understood that the microlens array may also be a cylindrical lens, and only needs to function the same, and is not limited herein.
In one embodiment, a bundle of parallel optical signals 205 reach the reconfigurable optical super surface layer 203 through the first transparent layer 201, the control circuit applies a bias voltage to the reconfigurable optical super surface layer 203, controls the dielectric constant of the reconfigurable optical super surface layer 203, and enables the function of the reconfigurable optical super surface layer 203 to meet the optical characteristics of the microlens array, that is, the reconfigurable optical super surface layer 203 is equivalent to a microlens array, the optical signals 205 converge at a point 206 through the reconfigurable optical super surface layer 203, the point 206 is located on the focal plane 207 of the microlens unit 204, the point 206 is equivalent to a point light source, the point light source 206 emits to the microlens unit 204, and is shaped into parallel light under the action of the microlens unit 204. Meanwhile, the configured bias voltage is changed to change the dielectric constant of the reconfigurable optical super surface layer 203, namely, the reconfigurable optical super surface layer 203 is equivalent to another layer of micro-lens array at the moment, and the function is to focus the passing light beam on the focal plane of the micro-lens array of the micro-lens unit 204.
Fig. 3 is a schematic structural diagram of another optical deflecting device according to the present invention. The optical signal 301 is converged at a point 302 through the reconfigurable optical super surface layer 203, the point 302 is located on the focal plane 207 of the micro lens unit 204, but is located at a position different from the point 206, at this time, the point 302 is equivalent to a point light source, the point light source 302 emits to the micro lens unit 204, and the light is shaped into parallel light under the action of the micro lens unit 204. In the process of changing the bias voltage, optical signals passing through the reconfigurable optical super surface layer 203 are focused on different positions of the focal plane 207 of the microlens unit 204, so that optical two-dimensional scanning is realized.
FIG. 4 is a schematic structural view of a reconfigurable optical super surface layer provided by the present invention. The reconfigurable optical super surface layer 203 includes a plurality of nano-antennas, which is a homogeneous material, such as nano-antenna 401, that can redirect light. The structure of the nano antenna can be changed by applying bias voltage on two sides of the reconfigurable optical super surface layer 203, so that the dielectric constant of the reconfigurable optical super surface layer 203 is changed, the function of the reconfigurable optical super surface layer meets the optical characteristics of a micro lens array, and the reconfigurable optical super surface layer is equivalent to a micro lens array. It should be understood that the reconfigurable optical super surface layer 203 may be one or more layers, and the size, orientation and shape of the nano-antenna 401 may be changed according to the desired optical characteristics of the micro-lens array, without limitation.
Fig. 5 is a flowchart of a scanning method provided in the present invention, which includes the following steps:
s1: controlling a light source to emit a light signal to a scanning device comprising an optical deflection assembly;
s2: controlling the scanning device to receive the optical signal emitted by the light source, change the propagation direction and project the optical signal to a measured object;
s3: controlling a light beam receiver to receive the echo signal reflected by the measured object so as to further obtain depth information;
the optical deflection assembly comprises a reconfigurable optical super surface layer and a micro lens array, the reconfigurable optical super surface layer is used for deflecting optical signals emitted by the light source, and the micro lens array is used for shaping the optical signals after the reconfigurable optical super surface layer is deflected.
More specifically, in step S2, the scanning device receives an optical signal emitted by the light source, the optical signal passes through the reconfigurable optical super surface layer, the dielectric constant of the reconfigurable optical super surface layer changes under the control of the control circuit, so that the optical beam is focused on the focal plane of the microlens array, during the process that the dielectric constant changes continuously, the optical beam is focused on different positions of the focal plane of the microlens array, i.e., the optical beam is focused into a point light source, the position of the point light source changes continuously in two dimensions of the focal plane of the microlens array along with the change of the dielectric constant of the reconfigurable optical super surface layer, and then the point light source is projected onto the microlens array, and the optical beam is shaped into a parallel optical beam by the microlens array and emitted to the object to be measured, thereby realizing two-dimensional optical scanning; in step S3, the light beam receiver receives the echo signal reflected by the measured object, and the processor extracts the echo signal for further processing to obtain the depth information of the measured object.
It will be understood by those skilled in the art that all or part of the steps for implementing the embodiments described above may be implemented by hardware, or may be implemented by hardware related to instructions of a program, which may be stored in a computer-readable storage medium, and when the computer program is executed by a processor, the steps of the various method embodiments described above may be implemented. Wherein the computer program comprises computer program code, which may be in the form of source code, object code, an executable file or some intermediate form, etc. The computer-readable medium may include: any entity or device capable of carrying the computer program code, recording medium, usb disk, removable hard disk, magnetic disk, optical disk, computer Memory, Read-Only Memory (ROM), Random Access Memory (RAM), electrical carrier wave signals, telecommunications signals, software distribution medium, and the like. It should be noted that the computer readable medium may contain content that is subject to appropriate increase or decrease as required by legislation and patent practice in jurisdictions, for example, in some jurisdictions, computer readable media does not include electrical carrier signals and telecommunications signals as is required by legislation and patent practice.
The invention achieves the following beneficial effects: through the combination of the reconfigurable optical super-surface layer and the micro-lens array, the change of the dielectric constant of the reconfigurable optical super-surface layer is controlled by using bias voltage, so that an incident beam passes through the reconfigurable optical super-surface layer and then is focused to different positions of a focal plane of the micro-lens array, and the incident beam is continuously changed in the one-dimensional or two-dimensional direction of the focal plane of the micro-lens array, and further, the large-angle and high-frequency optical scanning of the incident beam is realized. Meanwhile, the method has the application advantages of miniaturization, integration and the like, and the cost can be controlled in large-scale manufacturing.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several equivalent substitutions or obvious modifications can be made without departing from the spirit of the invention, and all the properties or uses are considered to be within the scope of the invention.
Claims (10)
1. A scanning apparatus, comprising a light source, a scanning device and a light beam receiver;
the light source is used for emitting a light signal to the scanning device;
the scanning device comprises an optical deflection component, a light source and a scanning component, wherein the optical deflection component is used for receiving the optical signal emitted by the light source, changing the propagation direction and projecting the optical signal to a measured object;
the light beam receiver is used for receiving the echo signal reflected by the measured object;
the optical deflection assembly comprises a reconfigurable optical super surface layer and a micro lens array, the reconfigurable optical super surface layer is used for deflecting optical signals emitted by the light source, and the micro lens array is used for shaping the optical signals after the reconfigurable optical super surface layer is deflected.
2. The scanning device according to claim 1, wherein said deflection comprises a one-dimensional deflection and a two-dimensional deflection.
3. The scanning device of claim 1, further comprising a lens including at least one optical lens assembly for collecting echo signals reflected from the object to be measured for focusing to the beam receiver.
4. A scanning device according to claim 1, further comprising a controller, the control circuit being arranged to apply a bias voltage to the scanning device, the bias voltage controlling the dielectric constant of the reconfigurable optical super surface layer to change.
5. The scanning device of claim 4, wherein the controller is embedded in the scanning device by a chip fabrication process; alternatively, the controller is provided separately from the scanning device.
6. A scanning device according to any of claims 1-5, wherein the optical deflection assembly further comprises a transparent layer comprising a first transparent layer disposed on the underside of the reconfigurable optical super surface layer for supporting the reconfigurable optical super surface layer and a second transparent layer disposed on the upper side of the reconfigurable optical super surface layer for protecting the reconfigurable optical super surface layer.
7. A scanning device as claimed in claim 6, characterized in that the first transparent layer and/or the second transparent layer is a glass medium.
8. A scanning device as claimed in any one of the claims 1-5, characterized in that the reconfigurable optical super surface layer comprises nano-antennas for redirecting light.
9. A scanning method, comprising:
s1: controlling a light source to emit a light signal to a scanning device comprising an optical deflection assembly;
s2: controlling the scanning device to receive the optical signal emitted by the light source, change the propagation direction and project the optical signal to a measured object;
s3: controlling a light beam receiver to receive the echo signal reflected by the measured object so as to further obtain depth information;
the optical deflection assembly comprises a reconfigurable optical super surface layer and a micro lens array, the reconfigurable optical super surface layer is used for deflecting optical signals emitted by the light source, and the micro lens array is used for shaping the optical signals after the reconfigurable optical super surface layer is deflected.
10. The scanning method of claim 9 wherein a bias voltage is applied to the scanning device, the bias voltage controlling the dielectric constant of the reconfigurable optical super surface layer to change.
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| CN111521993A (en) * | 2020-05-27 | 2020-08-11 | 深圳力策科技有限公司 | Passive nano antenna array receiver and three-dimensional imaging system |
| CN116560154A (en) * | 2023-07-06 | 2023-08-08 | 深圳赋能光达科技有限公司 | Acousto-optic deflection module, distance measuring device and electronic equipment based on diffusion sheet beam expansion |
| CN116559834A (en) * | 2023-07-06 | 2023-08-08 | 深圳赋能光达科技有限公司 | Acousto-optic deflection transmitting module based on superlens, detecting device and electronic equipment |
| CN116559835A (en) * | 2023-07-06 | 2023-08-08 | 深圳赋能光达科技有限公司 | Acousto-optic deflection transmitting module based on cylindrical lens, detecting device and electronic equipment |
| CN116559837A (en) * | 2023-07-06 | 2023-08-08 | 深圳赋能光达科技有限公司 | Acousto-optic deflection module based on superlens collimation, photoelectric device and electronic equipment |
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