CN109655975B - Erasable integrated optical waveguide monitoring device based on phase-change material - Google Patents
Erasable integrated optical waveguide monitoring device based on phase-change material Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3536—Optical coupling means having switching means involving evanescent coupling variation, e.g. by a moving element such as a membrane which changes the effective refractive index
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- H04B10/07—Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems
- H04B10/075—Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal
- H04B10/079—Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal using measurements of the data signal
- H04B10/0795—Performance monitoring; Measurement of transmission parameters
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Abstract
The invention discloses an erasable integrated optical waveguide monitoring device based on a phase-change material. The first input waveguide is sequentially connected with the first coupling waveguide and the first output waveguide, the second coupling waveguide is arranged on the side of the first coupling waveguide in parallel and sequentially connected with the S-shaped connecting waveguide and the second output waveguide, the third coupling waveguide covers the second coupling waveguide, and the detector is connected with the second output waveguide. The optical signal enters the first coupling waveguide along the first input waveguide, the third coupling waveguide is made of a phase change material, and the mode of the hybrid waveguide and the mode of the first coupling waveguide meet or do not meet a phase matching condition by changing the refractive index of the phase change material, so that the optical signal in the first coupling waveguide is coupled or not coupled into the hybrid waveguide, and the optical monitoring component receives or does not receive the optical signal. The invention can be used for systems such as polarization multiplexing coherent optical communication and the like, and has the advantages of simple and convenient process, simple structure, high extinction ratio and the like.
Description
Technical Field
The invention belongs to the field of optical signal monitoring devices, and particularly relates to an erasable integrated optical waveguide monitoring device based on a phase-change material.
Background
It is well known that long-distance optical communications have enjoyed great success. Similarly, optical interconnection, as a new interconnection method, can overcome the bottleneck problem existing in the conventional electrical interconnection, and has attracted much attention. Currently, optical interconnects are continuously moving towards ultra-short distance interconnects, and the demand for communication capacity is increasing. A wide variety of integrated devices have been successfully implemented including high speed modulators, monitors, and monolithically integrated lasers. However, autonomous optical signal monitoring on wafer scale remains one of a few challenges. If errors caused by machining errors can be identified in the experimental process, the next machining test can be avoided to a great extent, and the manufacturing cost is reduced. In large-scale integrated optical circuits, therefore, monitoring of certain optical devices or individual components after a particular processing step is essential in order to be able to detect devices with poor operating conditions early on.
In terms of performance requirements of devices, detection points are generally cascaded on or around the devices themselves for monitoring the signal intensity in the optical waveguide, and currently, several commonly used monitoring methods mainly include: the Bragg grating or the directional coupler is utilized to couple out the optical signal in the waveguide to be detected in a certain proportion for monitoring, but because the structure is mostly processed around the device by the traditional process and can not be removed after detection, the coupling phenomenon caused by the structure can cause the loss of the optical device after detection, and in a large-scale integrated photoelectric device, because the number of required monitoring points is very large, the loss caused by the monitoring points can be inconstant. Therefore, an erasable monitoring device is needed, which can change the state of the monitoring device after monitoring through external operation, so that the monitoring device does not influence the light intensity of the device to be tested any more. And in the monitoring state, the optical signal of the device to be detected can be used for detecting as much as possible to improve the monitoring efficiency.
Disclosure of Invention
The invention aims to provide an erasable integrated optical waveguide monitoring device based on a phase-change material, which is used for detecting the performance of the device so as to reduce the power consumption of a chip.
The invention adopts the specific technical scheme that:
the optical fiber coupling device comprises a coupling area and an optical monitoring component, wherein the coupling area comprises a first input waveguide, a first coupling waveguide, a first output waveguide, a second coupling waveguide, a third coupling waveguide, an S-shaped connecting waveguide and a second output waveguide, the first input waveguide is sequentially connected with the first coupling waveguide and the first output waveguide along a straight line, the second coupling waveguide is arranged on one side of the first coupling waveguide in parallel, the second coupling waveguide is connected with one end of the second output waveguide through the S-shaped connecting waveguide, and the other end of the second output waveguide is connected with the optical monitoring component; the third coupling waveguide covers the upper surface of the second coupling waveguide, the width of the third coupling waveguide is equal to or smaller than that of the second coupling waveguide, and the second coupling waveguide and the third coupling waveguide form a hybrid waveguide.
The optical signal is transmitted through the first output waveguide and the second output waveguide along the first input waveguide in sequence, meanwhile, the optical signal in the first input waveguide is also coupled into the first coupling waveguide, the third coupling waveguide is made of a phase change material, and the mode of the hybrid waveguide and the mode of the first coupling waveguide meet or do not meet the phase matching condition by changing the refractive index of the phase change material, so that the optical signal in the first coupling waveguide is coupled or not coupled into the hybrid waveguide, and the optical monitoring component receives or does not receive the optical signal.
The optical monitoring assembly is a silicon-based photoelectric monitoring assembly, the silicon-based photoelectric monitoring assembly comprises metal electrodes which are arranged right above the second output waveguide and arranged on two sides of the second output waveguide, and the pressurized metal electrodes convert optical signals of the second output waveguide into electric signals, so that the silicon-based photoelectric monitoring assembly detects the electric signals.
The optical monitoring assembly is a phase-change material-based resistance optical monitoring assembly, the resistance optical monitoring assembly comprises waveguide electrodes and a phase-change material strip waveguide, the phase-change material strip waveguide covers the upper surface of the second output waveguide, the two waveguide electrodes are distributed on two sides of the phase-change material strip waveguide, when an optical signal is transmitted through the second output waveguide, the resistivity of the phase-change material strip waveguide changes, so that the photocurrent output by the waveguide electrodes changes, and the resistance optical monitoring assembly converts the optical signal into an electrical signal to be output.
The optical monitoring component is a longitudinal coupling Bragg grating which is arranged at intervals along the waveguide direction of the second output waveguide, when an optical signal enters the longitudinal coupling Bragg grating, the longitudinal coupling Bragg grating couples the optical signal into the space and is received by the optical fiber, and the optical signal is received by the optical fiber through a spectrometer or an oscilloscope.
The third coupling waveguide is made of phase change materials and is different from the first coupling waveguide, the second coupling waveguide, the first output waveguide, the S-shaped connecting waveguide and the second output waveguide.
When the phase-change material is in an amorphous state, the mode in the first coupling waveguide and the mode in the combined waveguide formed by the second coupling waveguide and the third coupling waveguide meet or partially meet the phase matching condition, and complete coupling or partial coupling can occur; partial coupling is coupling that selectively causes power to be distributed in a certain proportion by selecting the coupling length. When the phase-change material is in a crystal state, the mode in the first coupling waveguide and the mode in the combined waveguide formed by the second coupling waveguide and the third coupling waveguide do not meet the phase matching condition, and the coupling phenomenon is completely avoided.
The refractive index of the phase-change material is adjusted by external electrode heating or laser stimulation or electric pulse.
According to the invention, by changing the effective refractive index of the phase-change material of the mixed optical waveguide, when the signal mode of the mixed optical waveguide and the optical waveguide to be detected meets the phase matching condition, the optical monitoring component can detect the optical signal, and the optical monitoring component is used for signal detection; when the refractive index of the phase-change material is changed to cause the signal mode mismatch between the hybrid waveguide and the waveguide to be detected, the signal to be detected is not coupled into the detection waveguide any longer, the optical monitoring component does not detect the optical signal any longer, the detection waveguide does not influence the transmission signal, and the detection point where the optical monitoring component is located is erased.
The invention has the beneficial effects that:
1. the invention has simple structure, convenient design and simple and convenient manufacture, and can obviously reduce the manufacturing cost of devices.
2. The reliability of monitoring the device performance is greatly improved, the power consumption and the cost of the device are reduced, and the method has important application value.
Drawings
Fig. 1 is a top view of a first coupling region coupling structure.
FIG. 2 is a top view of a second coupling region coupling structure
Fig. 3 is a top view of the photo-monitoring module being a photo-monitoring module.
FIG. 4 is a top view of the photo-monitoring assembly being a phase change material resistance based photo-electric photo-monitoring assembly.
FIG. 5 is a top view of the optical monitoring assembly as a vertically coupled grating.
Fig. 6 is a sectional view a-a of fig. 1.
Fig. 7 is a sectional view B-B of fig. 1.
Fig. 8 is a cross-sectional view C-C of fig. 1.
Fig. 9 is a sectional view a-a of fig. 2.
Fig. 10 is a sectional view B-B of fig. 2.
Fig. 11 is a cross-sectional view C-C of fig. 2.
Fig. 12 is a cross-sectional view taken along line D-D of fig. 3.
In the figure: the device comprises a first input waveguide 1, a first coupling waveguide 2a, a second coupling waveguide 2b, a third coupling waveguide 2c, a third coupling waveguide 2d, a fourth coupling waveguide 2d, an S-shaped connecting waveguide 3, a first output waveguide 4a, a second output waveguide 4b, an optical monitoring component 5, a waveguide electrode 6a, a phase-change material strip waveguide 6b, a longitudinal coupling Bragg grating 7 and a metal electrode 8.
Detailed Description
The invention is further illustrated by the following figures and examples.
As shown in fig. 1, one coupling structure (first coupling structure) of the coupling region of the present invention includes a first input waveguide 1, a first coupling waveguide 2a, a first output waveguide 4a, a second coupling waveguide 2b, a third coupling waveguide 2c, an S-shaped connecting waveguide 3, and a second output waveguide 4 b. The first input waveguide 1 is sequentially connected with a first coupling waveguide 2a and a first output waveguide 4a along a straight line, a second coupling waveguide 2b is arranged on one side of the first coupling waveguide 2a in parallel, the second coupling waveguide 2b is connected with one end of a second output waveguide 4b through an S-shaped connecting waveguide 3, and the other end of the second output waveguide 4b is connected with an optical monitoring component 5; the third coupling waveguide 2c covers the upper surface of the second coupling waveguide 2b, the width of the third coupling waveguide 2c is equal to or smaller than that of the second coupling waveguide 2b, and the second coupling waveguide 2b and the third coupling waveguide 2c form a hybrid waveguide.
Optical signals are transmitted along the first input waveguide 1 through the first output waveguide 4a and the second output waveguide 4b in sequence, meanwhile, the optical signals in the first input waveguide 1 are also coupled into the first coupling waveguide 2a, the third coupling waveguide 2c is made of a phase change material, and by changing the refractive index of the phase change material, the mode of the hybrid waveguide and the mode of the first coupling waveguide 2a meet or do not meet the phase matching condition, so that the optical signals in the first coupling waveguide 2a are coupled or not coupled into the hybrid waveguide, and the optical monitoring component 5 receives or does not receive the optical signals.
The optical signal enters the first coupling waveguide 2a along the first input waveguide 1, and since the third coupling waveguide 2c is a phase change material, by changing the refractive index of the phase change material so that the mode of the second coupling waveguide and the mode of the first coupling waveguide 2a satisfy or do not satisfy the phase matching condition, when the phase matching condition is satisfied between the hybrid waveguide and the first coupling waveguide 2a, the optical signal in the first coupling waveguide 2a will be coupled into the hybrid waveguide and enter the S-shaped connecting waveguide 3 from the hybrid waveguide, so that the optical monitoring component 5 receives the optical signal, if the phase matching condition is no longer satisfied by the hybrid waveguide and the first coupling waveguide 2a by adjusting the refractive index of the phase change material, no optical signal is coupled into the second coupling waveguide, further, the optical monitoring module 5 cannot receive the optical signal, and the optical monitoring module 5 cannot receive the optical signal, that is, the optical monitoring point is erased.
As shown in fig. 6, 7 and 8, the input waveguide 1 is a silicon-based strip optical waveguide structure, a mixed waveguide composed of a first coupling waveguide 2a, a second coupling waveguide 2b and a third coupling waveguide 2c is parallel, the third coupling waveguide 2c covers the second coupling waveguide, and the width of the third coupling waveguide is equal to or less than that of the second coupling waveguide 2 b. The first output waveguide 4a and the second output waveguide 4b are arranged in parallel with each other.
As shown in fig. 2, the coupling region may be another coupling structure (second coupling structure), and a fourth coupling waveguide 2d is added compared to the coupling structure of fig. 1, but the arrangement of the coupling waveguides is different from that of fig. 1, specifically: the second coupling waveguide 2b and the fourth coupling waveguide 2d are sequentially arranged on the same side of the first coupling waveguide 2a at intervals in parallel, the fourth coupling waveguide 2d is connected with one end of a second output waveguide 4b through an S-shaped connecting waveguide 3, and the other end of the second output waveguide 4b is connected with an optical monitoring component 5;
like the hybrid waveguide shown in fig. 1, the third coupling waveguide 2c in fig. 2 covers the upper surface of the second coupling waveguide 2b, the width of the third coupling waveguide 2c is equal to or less than that of the second coupling waveguide 2b, and the second coupling waveguide 2b and the third coupling waveguide 2c form the hybrid waveguide;
an optical signal enters the first coupling waveguide 2a along the first input waveguide 1, because the third coupling waveguide 2c is made of a phase-change material, the mode of the second coupling waveguide and the mode of the first coupling waveguide 2a meet or do not meet a phase matching condition by changing the refractive index of the phase-change material, when the phase matching condition is met between the hybrid waveguide and the first coupling waveguide 2a, the optical signal in the first coupling waveguide 2a is coupled into the hybrid waveguide and enters the S-shaped connecting waveguide 3 through the third coupling waveguide 2c in the hybrid waveguide, so that the optical signal is received by the optical monitoring component 5; if the mixed waveguide and the first coupling waveguide 2a do not satisfy the phase matching condition any more by adjusting the refractive index of the phase change material, no optical signal is coupled into the second coupling waveguide, and the optical monitoring component 5 cannot receive the optical signal. The optical monitoring component 5 does not receive the optical signal, i.e. the optical monitoring point is erased.
As shown in fig. 9, 10, 11 and 12, the input waveguide 1 in the second coupling mode is also a silicon-based strip optical waveguide structure. The first coupling waveguide 2a, the second coupling waveguide 2b and the fourth coupling waveguide 2d are parallel to each other, and the third coupling waveguide 2c is disposed on the upper surface of the second coupling waveguide 2b and constitutes a combined waveguide with the second coupling waveguide 2 b.
As shown in fig. 7 and 10, the third coupling waveguide 2c is made of a phase change material, and the material of the third coupling waveguide 2c is different from that of the first coupling waveguide 2a and the second coupling waveguide 2 b. When the phase-change material is stimulated by external temperature change, laser pulse and electric signals, the state of the material is changed, and the refractive index is obviously changed. When the phase change material of the third coupling waveguide 2c is in an amorphous state, the mode in the first coupling waveguide 2a and the mode in the combined waveguide composed of the second coupling waveguide 2b and the third coupling waveguide 2c satisfy or partially satisfy a phase matching condition, and complete coupling or partial coupling may occur; partial coupling is coupling that selectively causes power to be distributed in a certain proportion by selecting the coupling length. When the phase change material is in a crystal state, the mode in the first coupling waveguide 2a and the mode in the combined waveguide formed by the second coupling waveguide 2b and the third coupling waveguide 2c do not meet the phase matching condition, and the coupling phenomenon is not generated at all. In a specific implementation, the refractive index of the phase change material is adjusted by external electrode heating or laser stimulation or electrical pulses.
When the first coupling waveguide 2a needs to be monitored, a mode in the hybrid waveguide and a mode in the first coupling waveguide satisfy or partially satisfy a phase matching condition, and an optical signal in the first coupling waveguide 2a is completely or partially coupled into the hybrid waveguide, which is composed of the second coupling waveguide 2b and a third coupling waveguide 2c formed by processing a phase change material shown in fig. 1 and 2; when the monitoring is finished, the refractive index of the phase-change material is obviously changed in a mode of external heating or laser pulse irradiation or electric stimulation, the mode in the mixed waveguide formed by the second coupling waveguide 2b and the third coupling waveguide 2c and the mode in the first coupling waveguide no longer meet the phase matching condition, no optical signal is coupled into the mixed waveguide, and the detection point is erased.
As shown in fig. 3, the optical monitoring component 5 may be a silicon-based optoelectronic optical monitoring component, the optical signal of the second output waveguide (4b) is converted into an electrical signal by the silicon-based optoelectronic optical monitoring component, and 8 in fig. 3 is a metal electrode disposed on both sides of the second output waveguide and directly above the waveguide. The silicon-based photoelectric monitoring component can be a photon-based optical monitoring component (such as a photoelectric light guide monitoring component, a photovoltaic optical monitoring component, a photoelectric triode optical monitoring component and the like) or a thermo-optical monitoring component, the common silicon-based photoelectric monitoring component comprises germanium, III-V materials and graphene materials, the silicon-based photoelectric monitoring component comprises metal electrodes 8 which are arranged right above the second output waveguide 4b and on two sides of the second output waveguide 4b, and the pressurized metal electrodes 8 convert optical signals of the second output waveguide 4b into electric signals, so that the silicon-based photoelectric monitoring component detects the electric signals.
As shown in fig. 4, the monitoring component 5 may be a phase change material based resistive optical monitoring component 6a, 6b, where 6a is a waveguide side electrode and 6b is a height phase change material stripe waveguide covering the second output waveguide. The phase change material strip waveguide 6b covers the upper surface of the second output waveguide 4b, the two waveguide electrodes 6a are distributed on two sides of the phase change material strip waveguide 6b, an optical signal of the second output waveguide 4b interacts with the phase change material strip waveguide 6b, when the optical signal is transmitted through the second output waveguide 4b, the temperature of the phase change material is changed, the resistivity of the phase change material strip waveguide 6b is changed, the photocurrent output by the waveguide electrodes 6a is changed, and the resistance light monitoring component converts the optical signal into an electric signal to be output.
As shown in fig. 5, the optical monitoring component 5 may be a longitudinally coupled bragg grating 7 arranged at intervals along the waveguide direction of the second output waveguide 4b, and due to the bragg principle, after an optical signal enters the longitudinally coupled bragg grating 7 through the second coupling waveguide, the longitudinally coupled bragg grating 7 couples the optical signal into space with a certain coupling efficiency and is received by an optical fiber, and the optical fiber receives the optical signal through a spectrometer or an oscilloscope.
The optical monitoring assembly 5 of fig. 3, 4 and 5 can be applied to the coupling structure of the coupling region shown in fig. 1 and also to the coupling structure shown in fig. 2.
The working process of the invention is as follows:
light is input along the first input waveguide 1 and enters the first coupling waveguide 2a, when the light signal detection device is used for detecting a light signal, a mode in a mixed waveguide formed by a third coupling waveguide 2c and a second coupling waveguide 2b which are synthesized by phase change materials and the light signal to be detected meet a phase matching condition, the light signal in the first coupling waveguide 2a can be coupled into the mixed waveguide, the coupling signal can enter a second output waveguide 4b through an S-shaped connecting waveguide to be output and enter an photoelectric detection region for detecting the light signal, and the coupling signal can also be further coupled into a fourth coupling waveguide 2d, enter the second output waveguide 4b through the S-shaped connecting waveguide to be output and enter the photoelectric detection region for detecting the light signal; when the detection is completed, by changing the external environment: the refractive index of the phase change material is obviously changed by means of electrode heating or laser pulse irradiation or electrical stimulation, the mode in the mixed waveguide formed by the second coupling waveguide 2b and the third coupling waveguide 2c and the mode in the first coupling waveguide no longer meet the phase matching condition, and no optical signal is coupled into the mixed waveguide, so that the photoelectric detection region no longer receives the optical signal.
The specific implementation process of the invention is as follows:
selecting silicon nanowire optical waveguides based on silicon-on-insulator (SOI) materials: the core layer is made of silicon material, the thickness is 220nm, and the refractive index is 3.4744; the lower cladding layer and the upper cladding layer are both made of SiO2, the thickness is 2 μm, and the refractive index is 1.4404. In this example, the optical signal to be measured is considered to be in the TE polarization mode, and the operating wavelength is 1550 nm. The phase-change material adopts Ge2Sb2Te5GST, the amorphous state refractive index is 4.6+0.12i, and the crystal state effective refractive index is 7.45+1.49 i.
The silicon nanowire optical waveguide is etched into a strip waveguide with a certain width by adopting photoetching and dry etching processes, the phase-change material is covered on the silicon nanowire optical waveguide in a deposition or growth mode, and the phase-change material optical waveguide is formed in an etching mode. The phase-change material is heated to a melting point and is quenched to be converted into an amorphous state, the refractive index of the material at the moment is 4.6+0.12i, the width of the input optical waveguide 1 is selected to be 430nm of the width of a common single-mode waveguide, the height of the GST material is given, the GST waveguide width is selected to be 200nm by taking 20nm as an example, so that the mode in a mixed waveguide formed by a third coupling waveguide 2c and a second coupling waveguide 2b which are synthesized by the phase-change material and an optical signal to be detected meet the phase matching condition, and the coupling length is selected, so that the coupling efficiency. The coupled signal light enters the second output waveguide through the S-shaped connecting waveguide 3 and is output to the light monitoring assembly 5 located in the detection area.
The optical monitoring component 5 has three detection methods, which are respectively a silicon-based photoelectric monitoring component, or a resistance photoelectric monitoring component based on a phase-change material, or a vertical coupling grating.
As shown in fig. 3 and 12, when the optical monitoring component 5 is a silicon-based photoelectric optical monitoring component 8 (photoelectric optical detector), an optical signal enters the photoelectric monitoring component 5 through the second output waveguide 4a, a voltage is applied to the periphery of the waveguide through the metal electrodes 8 above and on both sides of the second output waveguide, the resistance between the electrodes changes to cause the output current to change, the optical signal is converted into an electrical signal, and the transmission signal is detected; when the refractive index of the phase-change material changes, the optical signal is not coupled into the mixed waveguide formed by the second coupling waveguide 2b and the third coupling waveguide 2c any more, and is transmitted to the back-end optical link by the first output waveguide 4a, the photoelectric optical monitoring component cannot receive the optical signal, and the output electrical signal is zero.
As shown in fig. 4, when the optical monitoring component 5 is a resistance photoelectric optical monitoring component based on a phase-change material, 6a is the phase-change material covering the second output waveguide, and 6b is the metal electrodes on both sides of the waveguide, after an optical signal enters the second output waveguide, the optical signal interacts with the phase-change material to cause a change in temperature of the phase-change material, and then the resistivity of the phase-change material changes to cause a change in photocurrent output by the metal electrode, so that the optical signal can be converted into an electrical signal to be output.
As shown in fig. 5, when the optical monitoring component 5 is a vertical coupling grating and 7 is a longitudinal coupling bragg grating, after the optical signal enters the coupling grating through the second coupling waveguide, the optical signal is coupled into the space with a certain coupling efficiency and received by the optical fiber due to the bragg principle, and the other end of the optical fiber can be connected to a spectrometer or an oscilloscope to receive the optical signal.
After the detection of the optical monitoring component 5 is finished, the GST is heated to a temperature higher than the crystallization temperature by external laser pulse heating, and when the GST is below the melting point, the GST is converted into a crystal state, and the refractive index of the material is changed to 7.45+1.49i, so that the mode in the mixed waveguide formed by the third coupling waveguide 2c and the second coupling waveguide 2b synthesized by the phase change material and the optical signal to be detected no longer meet the phase matching condition. The signal light directly enters the first coupling waveguide 2a through the input waveguide 1, reaches the first output waveguide 4a, enters the rear-end optical device, no signal coupling exists between the second coupling waveguide and the third coupling waveguide, the optical monitoring assembly 5 does not detect the optical signal any more, then a detection point where the optical monitoring assembly 5 is located is erased, the optical signal is transmitted along the transmission waveguide without being influenced by the coupling wave, and therefore the loss for monitoring the optical signal is effectively reduced.
In the implementation, the coupling region in fig. 3, 4 and 5 may also use the second coupling structure as shown in fig. 2, and the second output waveguide is connected to the optical monitoring component 5 via the S-shaped connecting waveguide.
The invention changes the effective refractive index of the optical signal mode in the mixed optical waveguide by changing the crystalline state/amorphous state of the phase-change material, when the phase-change material is used for signal detection, the signal mode in the mixed optical waveguide and the optical waveguide to be detected meets the phase matching condition, the signal optical part can be coupled out, the optical signal can be converted into an electric signal by the optical monitoring component connected at the rear part, or the optical signal is longitudinally coupled out by the coupling grating and received by the optical fiber for optical signal detection, when the phase-change material is stimulated by external temperature change, laser pulse and electric signal, the material state is changed, the refractive index is obviously changed, the effective refractive index of the mode in the mixed waveguide formed by the phase-change material and the passive waveguide is changed, the mode is mismatched, the signal to be detected is not coupled into the detection waveguide. Therefore, the power consumption of the device can be greatly reduced, and the reliability of the device can be improved.
The above-described embodiments are intended to illustrate rather than to limit the invention, and any modifications and variations of the present invention are within the spirit of the invention and the scope of the appended claims.
Claims (3)
1. An erasable integrated optical waveguide monitoring device based on phase-change materials is characterized in that: the coupling structure comprises a coupling area and an optical monitoring component (5), wherein the coupling area comprises a first input waveguide (1), a first coupling waveguide (2 a), a first output waveguide (4 a), a second coupling waveguide (2 b), a third coupling waveguide (2 c), an S-shaped connecting waveguide (3) and a second output waveguide (4b), the first input waveguide (1) is sequentially connected with the first coupling waveguide (2 a) and the first output waveguide (4 a) along a straight line, the second coupling waveguide (2 b) is arranged on one side of the first coupling waveguide (2 a) in parallel, the second coupling waveguide (2 b) is connected with one end of the second output waveguide (4b) through the S-shaped connecting waveguide (3), and the other end of the second output waveguide (4b) is connected with the optical monitoring component (5); the third coupling waveguide (2 c) covers the upper surface of the second coupling waveguide (2 b), the width of the third coupling waveguide (2 c) is equal to or smaller than that of the second coupling waveguide (2 b), and the second coupling waveguide (2 b) and the third coupling waveguide (2 c) form a mixed waveguide;
the optical signal enters a first coupling waveguide (2 a) along a first input waveguide (1), a third coupling waveguide (2 c) is made of a phase-change material, and the refractive index of the phase-change material is changed, so that the mode of the hybrid waveguide and the mode of the first coupling waveguide (2 a) partially meet or do not meet a phase matching condition, the optical signal in the first coupling waveguide (2 a) is partially coupled or not coupled into the hybrid waveguide, and an optical monitoring component (5) receives or does not receive the optical signal;
when the phase-change material is in an amorphous state, the mode in the first coupling waveguide (2 a) and the mode in the mixed waveguide formed by the second coupling waveguide (2 b) and the third coupling waveguide (2 c) partially meet the phase matching condition, and partial coupling occurs; when the phase-change material is in a crystal state, the mode in the first coupling waveguide (2 a) and the mode in the mixed waveguide formed by the second coupling waveguide (2 b) and the third coupling waveguide (2 c) do not meet the phase matching condition, and the coupling phenomenon is not generated at all; optical signals directly enter the first coupling waveguide (2 a) through the first input waveguide (1), reach the first output waveguide (4 a) and enter the rear-end optical device, the optical signals are not coupled into the second coupling waveguide (2 b) and the third coupling waveguide (2 c), the optical monitoring component (5) does not detect the optical signals any more, a detection point where the optical monitoring component (5) is located is erased, the optical signals are not influenced by the coupling waves any more when being transmitted along the transmission waveguide, and therefore the loss for monitoring the optical signals is effectively reduced;
the width of the first input waveguide (1) is 430nm, and the width of the third coupling waveguide (2 c) is 200 nm;
the optical monitoring component (5) is a longitudinal coupling Bragg grating (7) which is arranged at intervals along the waveguide direction of the second output waveguide (4b), the longitudinal coupling Bragg grating (7) couples optical signals into the space and receives the optical signals by an optical fiber, and the optical fiber receives the optical signals by a spectrometer or an oscilloscope.
2. An erasable integrated optical waveguide monitoring device based on phase change material as claimed in claim 1, wherein: the third coupling waveguide (2 c) is made of a phase change material and is different from the first coupling waveguide (2 a), the second coupling waveguide (2 b), the first output waveguide (4 a), the S-shaped connecting waveguide (3) and the second output waveguide (4 b).
3. An erasable integrated optical waveguide monitoring device based on phase change material as claimed in claim 1, wherein: the refractive index of the phase-change material is adjusted by external electrode heating or laser stimulation or electric pulse.
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| CN113568246B (en) | 2021-07-12 | 2022-08-16 | 华中科技大学 | Straight waveguide type phase change all-optical Boolean logic device and full-binary logic implementation method thereof |
| CN114942424B (en) * | 2022-07-25 | 2022-11-25 | 苏州旭创科技有限公司 | Laser radar chip and laser radar |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1407752A (en) * | 2001-09-06 | 2003-04-02 | 朗迅科技公司 | Multi-raster optical waveguide monitor |
| CN101866065A (en) * | 2010-05-28 | 2010-10-20 | 浙江大学 | Phase change material-aid self-supporting light-controlled optical waveguide switch |
| CN202405298U (en) * | 2011-12-31 | 2012-08-29 | 浙江大学 | Near-infrared band full-silicon-based nano photoelectric detector |
| WO2017187151A1 (en) * | 2016-04-27 | 2017-11-02 | Oxford University Innovation Ltd. | Optical device |
| US9891112B1 (en) * | 2016-10-19 | 2018-02-13 | International Business Machines Corporation | Radiation detector |
| CN108279511A (en) * | 2017-12-28 | 2018-07-13 | 宁波大学 | A kind of electrooptic modulator based on phase-change material |
| CN108878544A (en) * | 2017-05-15 | 2018-11-23 | 上海新微科技服务有限公司 | Si-based photodetectors and preparation method thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2681163Y (en) * | 2003-10-22 | 2005-02-23 | 华中科技大学 | Micro vanadium dioxide optical switch |
| JP2006184345A (en) * | 2004-12-27 | 2006-07-13 | Keio Gijuku | Optical switch, optical serial-parallel converter, parallel bit delay variable/wavelength conversion circuit, and optical time switch |
| CN106324865B (en) * | 2016-08-19 | 2018-12-07 | 上海交通大学 | One kind being based on the three-dimensionally integrated photoswitch of phase-change material |
-
2019
- 2019-01-16 CN CN201910040173.9A patent/CN109655975B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1407752A (en) * | 2001-09-06 | 2003-04-02 | 朗迅科技公司 | Multi-raster optical waveguide monitor |
| CN101866065A (en) * | 2010-05-28 | 2010-10-20 | 浙江大学 | Phase change material-aid self-supporting light-controlled optical waveguide switch |
| CN202405298U (en) * | 2011-12-31 | 2012-08-29 | 浙江大学 | Near-infrared band full-silicon-based nano photoelectric detector |
| WO2017187151A1 (en) * | 2016-04-27 | 2017-11-02 | Oxford University Innovation Ltd. | Optical device |
| US9891112B1 (en) * | 2016-10-19 | 2018-02-13 | International Business Machines Corporation | Radiation detector |
| CN108878544A (en) * | 2017-05-15 | 2018-11-23 | 上海新微科技服务有限公司 | Si-based photodetectors and preparation method thereof |
| CN108279511A (en) * | 2017-12-28 | 2018-07-13 | 宁波大学 | A kind of electrooptic modulator based on phase-change material |
Non-Patent Citations (1)
| Title |
|---|
| Ultracompact 2×2 Directional Coupling Optical Switch with Si Waveguides and Phase-Change Material;Daiki Tanaka 等;《2012 International Conference on Photonics in Switching(PS)》;20130926;第1页左栏第1行至第2页左栏倒数第5行，第3页左栏第1-13行、图1-4 * |
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