CN112763194B - Optical device monitoring and calibration system and method - Google Patents
Optical device monitoring and calibration system and method Download PDFInfo
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- CN112763194B CN112763194B CN202110023040.8A CN202110023040A CN112763194B CN 112763194 B CN112763194 B CN 112763194B CN 202110023040 A CN202110023040 A CN 202110023040A CN 112763194 B CN112763194 B CN 112763194B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
Abstract
The invention discloses a system and a method for monitoring and calibrating an optical device, wherein the system and the method for monitoring and calibrating the optical device comprise the following steps: an optical device to be tested and a monitoring device; the optical device to be tested is connected with an input waveguide and an output waveguide; the monitoring device comprises a first monitoring waveguide and a second monitoring waveguide; the first monitoring waveguide is provided with an input grating for inputting an optical signal; the second monitoring waveguide is provided with an output grating for outputting optical signals; a first polymer is arranged between the first monitoring waveguide and the input waveguide, so that the first monitoring waveguide is coupled and conducted with the input waveguide; a second polymer is arranged between the second monitoring waveguide and the output waveguide, so that the second monitoring waveguide is coupled and conducted with the output waveguide; and monitoring and/or calibrating the optical device to be tested according to the optical signal input by the input grating and the optical signal output by the output grating. The problem that monitoring and calibration of individual optical devices in a large-scale optical network are lacked in the prior art is solved.
Description
Technical Field
The invention relates to the technical field of waveguides, in particular to a system and a method for monitoring and calibrating an optical device.
Background
With the development of semiconductor technology, integrated optics has been widely applied in the Field of optical communication, and in recent years, various emerging technologies, such as a fifth-Generation mobile communication technology (5th-Generation, abbreviated as 5G), a Field-Programmable Gate Array (FPGA) applied in the optical Field, quantum communication, photonic Artificial Intelligence (AI), laser radar, etc., have been generated, which have prompted the development of an integrated optical chip towards large-scale and high-integration levels, but a large-scale integrated optical chip may include thousands of optical devices, all of which are in an optical network, so that direct calibration and monitoring of a single device cannot be achieved, and monitoring and calibration of a single key device become a great challenge.
Aiming at the problem that the prior art lacks monitoring and calibration of optical devices in a large-scale optical network, an effective solution is not provided.
Disclosure of Invention
In view of this, embodiments of the present invention provide a system and a method for monitoring and calibrating an optical device, so as to solve the problem that monitoring and calibration of the optical device in a large-scale optical network in the prior art is lacking.
Therefore, the embodiment of the invention provides the following technical scheme:
in a first aspect of the present invention, there is provided an optical device monitoring and calibrating system, comprising: an optical device to be measured and a monitoring device;
the optical device to be tested is connected with an input waveguide and an output waveguide;
the monitoring device comprises a first monitoring waveguide and a second monitoring waveguide; the first monitoring waveguide is provided with an input grating for inputting an optical signal; the second monitoring waveguide is provided with an output grating for outputting optical signals;
a first polymer is arranged between the first monitoring waveguide and the input waveguide, so that the first monitoring waveguide is coupled and conducted with the input waveguide; a second polymer is arranged between the second monitoring waveguide and the output waveguide, so that the second monitoring waveguide is coupled and conducted with the output waveguide;
and monitoring and/or calibrating the optical device to be tested according to the optical signal input by the input grating and the optical signal output by the output grating.
Optionally, the optical device monitoring and calibration system further includes:
a cladding layer between the first monitor waveguide and the input waveguide has a first deep groove, and a cladding layer between the second monitor waveguide and the output waveguide has a second deep groove; the first deep groove and the second deep groove are used for placing the first polymer and the second polymer.
Optionally, the optical device monitoring and calibration system further includes:
the first polymer and the second polymer are erasable.
Optionally, the optical device monitoring and calibration system further includes:
the core layers of the first monitor waveguide, the second monitor waveguide, the input waveguide, and the output waveguide are composed of a high refractive index material, and the cladding layers of the first monitor waveguide, the second monitor waveguide, the input waveguide, and the output waveguide are composed of a low refractive index material.
Optionally, the optical device monitoring and calibration system further includes:
the refractive index of the first polymer and the refractive index of the second polymer are both greater than the refractive index of air.
Optionally, the optical device monitoring and calibrating system further includes:
the coupling length of the first monitoring waveguide and the input waveguide is a first preset range, so that the efficiency of coupling an optical signal from the first monitoring waveguide into the input waveguide is first designated efficiency;
the coupling length of the output waveguide and the second monitoring waveguide is set to be a second preset range, so that the efficiency of coupling the optical signal from the output waveguide into the second monitoring waveguide is a second specified efficiency.
Optionally, the optical device monitoring and calibration system further includes:
the ratio of the optical signal output by the output grating to the input optical signal of the input grating is used for monitoring and/or calibrating the optical device to be tested.
In a second aspect of the present invention, a method for monitoring and calibrating an optical device is provided, which includes:
arranging a first polymer between the first monitoring waveguide and an input waveguide of the optical device to be detected, so that the first monitoring waveguide is coupled and conducted with the input waveguide;
arranging a second polymer between a second monitoring waveguide and an output waveguide of the optical device to be detected, so that the second monitoring waveguide is coupled and conducted with the output waveguide;
an input grating is arranged on the first monitoring waveguide and used for inputting optical signals, and an output grating is arranged on the second monitoring waveguide and used for outputting optical signals;
and monitoring and/or calibrating the optical device to be tested according to the optical signal input by the input grating and the optical signal output by the output grating.
Optionally, the optical device monitoring and calibrating method further includes:
and after monitoring and/or calibration are completed, erasing the first polymer and the second polymer, and restoring the function of the optical device to be detected.
Optionally, the optical device monitoring and calibrating method further includes:
forming a first deep groove on the cladding between the first monitoring waveguide and the input waveguide through etching; and forming a second deep groove on the cladding layer between the second monitoring waveguide and the output waveguide by etching;
and filling the first polymer and the second polymer in the first deep groove and the second deep groove respectively.
The technical scheme of the embodiment of the invention has the following advantages:
the embodiment of the invention provides a system and a method for monitoring and calibrating an optical device, wherein the system and the method for monitoring and calibrating the optical device comprise the following steps: an optical device to be tested and a monitoring device; the optical device to be tested is connected with an input waveguide and an output waveguide; the monitoring device comprises a first monitoring waveguide and a second monitoring waveguide; the first monitoring waveguide is provided with an input grating for inputting an optical signal; the second monitoring waveguide is provided with an output grating for outputting optical signals; a first polymer is arranged between the first monitoring waveguide and the input waveguide, so that the first monitoring waveguide is coupled and conducted with the input waveguide; a second polymer is arranged between the second monitoring waveguide and the output waveguide, so that the second monitoring waveguide is coupled and conducted with the output waveguide; and monitoring and/or calibrating the optical device to be measured according to the optical signal input by the input grating and the optical signal output by the output grating. The problem that monitoring and calibration of optical devices in a large-scale optical network are lacked in the prior art is solved. The embodiment of the invention can directly calibrate and monitor a single device in a large-scale integrated chip, and after the monitoring and the calibration are finished, the first polymer and the second polymer are cleaned, so that the performance of the chip is not influenced at all, and the device can be used as a wafer-level testing means.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic diagram of an optical device monitoring and calibration system according to an embodiment of the present invention;
FIG. 2a is a schematic illustration of a deep groove in an optical device monitoring and calibration system according to an embodiment of the present invention;
FIG. 2b is a schematic illustration of a polymer in an optical device monitoring and calibration system according to an embodiment of the present invention;
FIG. 3 is a block diagram of a waveguide in an optical device monitoring and calibration system according to an embodiment of the present invention;
FIG. 4a is a schematic illustration of optical signal transmission without the addition of polymer in an optical device monitoring and calibration system according to an embodiment of the present invention;
FIG. 4b is a schematic illustration of optical signal transmission with polymer addition in an optical device monitoring and calibration system according to an embodiment of the present invention;
FIG. 5 is a flow chart of an optical device monitoring and calibration method according to an embodiment of the invention.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be considered as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, the word "exemplary" is used to mean "serving as an example, instance, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments. The following description is presented to enable any person skilled in the art to make and use the application. In the following description, details are set forth for the purpose of explanation. It will be apparent to one of ordinary skill in the art that the present application may be practiced without these specific details. In other instances, well-known structures and processes are not set forth in detail in order to avoid obscuring the description of the present application with unnecessary detail. Thus, the present application is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed herein.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
In this embodiment, an optical device monitoring and calibrating system is provided, which may be used for optical device monitoring and calibrating, for example, an apparatus for monitoring loss of an optical device, fig. 1 is a schematic diagram of an optical device monitoring and calibrating system according to an embodiment of the present invention, as shown in fig. 1, including: an optical device under test and a monitoring device.
The optical device to be tested is connected with an input waveguide and an output waveguide. The input waveguide and the output waveguide enable the optical signal to be input into the optical device to be tested, and the optical signal can be output from the optical device to be tested, so that the monitoring and calibration of the optical device to be tested are facilitated.
The monitoring device includes a first monitoring waveguide and a second monitoring waveguide. The first monitoring waveguide is provided with an input grating for inputting an optical signal. The second monitoring waveguide is provided with an output grating for outputting optical signals. Specifically, the monitoring signal is input through the input grating, and is output through the output grating after passing through the optical device to be detected, so that the monitoring signal can be input into the optical device to be detected through the monitoring device so as to realize monitoring and calibration of the optical device to be detected.
And a first polymer is arranged between the first monitoring waveguide and the input waveguide, so that the first monitoring waveguide is coupled and conducted with the input waveguide. And a second polymer is arranged between the second monitoring waveguide and the output waveguide, so that the second monitoring waveguide is coupled and conducted with the output waveguide. Because the existence of the first polymer enables the monitoring signal to be input into the input waveguide from the first monitoring waveguide, and the existence of the second polymer enables the signal to be output into the second monitoring waveguide from the output waveguide, the first polymer and the second polymer enable the optical device monitoring and calibration system to operate, so that the monitoring and calibration functions of the optical device can be realized.
And monitoring and/or calibrating the optical device to be measured according to the optical signal input by the input grating and the optical signal output by the output grating. Specifically, the optical device to be measured is calibrated by the optical signal output by the output grating and the optical signal input by the input grating. For example, by inputting a red-blue mixed light, the optical device to be tested is used for filtering red light, and whether the optical device is damaged or not is calibrated through the color of the output color light. It should be understood by those skilled in the art that the above embodiments of the present invention are not intended to limit the present invention, and other monitoring and calibration methods are within the scope of the present invention.
The prior art lacks a technology for monitoring and calibrating a key optical device in a large-scale optical network. In the embodiment of the invention, the monitoring and calibration of the key optical device are realized through the optical device monitoring and calibration system, and the problem that the monitoring and calibration of the optical device in a large-scale optical network in the prior art is lacked is solved. The embodiment of the invention can directly calibrate and monitor a single device in a large-scale integrated chip and can also be used as a wafer-level test means.
To illustrate how the first polymer and the second polymer are added, in an alternative embodiment, as shown in fig. 2a, the cladding between the first monitor waveguide and the input waveguide has a first deep groove and the cladding between the second monitor waveguide and the output waveguide has a second deep groove. As shown in fig. 2b, the first deep trench and the second deep trench are used for placing the first polymer and the second polymer. In particular, in order to protect the waveguide from external interference, the waveguide core needs to be surrounded by a cladding layer outside the waveguide core. A first deep trench is formed by etching away a portion of the cladding layer between the first monitor waveguide and the input waveguide, and a second deep trench is formed by etching away a portion of the cladding layer between the second monitor waveguide and the output waveguide. And filling the first polymer and the second polymer into the first deep groove and the second deep groove respectively, and curing to ensure that the first monitoring waveguide is coupled and conducted with the input waveguide and the second monitoring waveguide is coupled and conducted with the output waveguide. The first polymer and the second polymer are added through the first deep groove and the second deep groove, so that the shape, the length and the width of the first polymer and the second polymer are easy to control. In addition, when the polymers are added into the deep groove, the first polymer and the second polymer can cover the cladding, and the preparation difficulty is reduced.
In an alternative embodiment, the first polymer and the second polymer are erasable. Specifically, after the first polymer and the second polymer are added and cured, light in the optical network is input from the input waveguide, and if the first polymer and the second polymer are not removed, the light can be coupled into the first monitoring waveguide and cannot enter the optical device to be tested, or less light is input into the optical device to be tested, so that the optical device to be tested is isolated, after the test is completed, the original function of the optical device to be tested can be restored by erasing the first polymer and the second polymer, the performance of a chip is not influenced at all, and further the control of an optical path is realized by controlling whether the first polymer and the second polymer are filled, so that the monitoring and calibration of the optical device to be tested are realized.
To illustrate the core and cladding of the waveguides, in an alternative embodiment, as shown in fig. 3, the core layers of the first monitor waveguide, the second monitor waveguide, the input waveguide, and the output waveguide are composed of a high refractive index material, and the cladding layers of the first monitor waveguide, the second monitor waveguide, the input waveguide, and the output waveguide are composed of a low refractive index material. Specifically, the waveguide is generally composed of a core layer with a high refractive index and a cladding layer with a low refractive index surrounding the core layer, so as to form an optical waveguide effect, and most of optical signals are transmitted in the core layer in a constrained manner. The waveguide structure ensures that light is stably transmitted in the waveguide, optical signal loss is avoided, and the transmission efficiency of optical signals is improved. In addition, the cladding layer is used for protecting the waveguide from external environment interference and also provides support for electrode manufacturing of the integrated optical chip.
To illustrate the refractive indices of the first polymer and the second polymer, in an alternative embodiment, the refractive indices of the first polymer and the second polymer are both greater than the refractive index of air. Specifically, as shown in fig. 4a and 4b, when the medium between the first monitoring waveguide and the input waveguide and the medium between the second monitoring waveguide and the output waveguide are air, since the refractive index of air is small, the optical signal in the first monitoring waveguide is difficult to enter the input waveguide, and the optical signal in the output waveguide is difficult to enter the second monitoring waveguide, so that 0 coupling of the first monitoring waveguide and the input waveguide, that is, input and output of the optical signal in the first monitoring waveguide, and 0 coupling of the second monitoring waveguide and the output waveguide, that is, input and output of the optical signal in the output waveguide are achieved. When the medium between the first monitoring waveguide and the input waveguide is a first polymer, and the medium between the second monitoring waveguide and the output waveguide is a second polymer, the refractive indexes of the first polymer and the second polymer are larger than that of air, so that the optical signal in the first monitoring waveguide can be coupled into the input waveguide, namely the optical signal is input by the first monitoring waveguide and output by the input waveguide, and the optical signal in the output waveguide can be coupled into the second monitoring waveguide, namely the optical signal is input by the output waveguide and output by the second monitoring waveguide.
In an alternative embodiment, the coupling length of the first monitoring waveguide to the input waveguide is within a first predetermined range such that the efficiency with which the optical signal is coupled from the first monitoring waveguide into the input waveguide is a first specified efficiency. The coupling length of the output waveguide and the second monitoring waveguide is set to be a second preset range, so that the efficiency of the optical signal coupled into the second monitoring waveguide from the output waveguide is a second specified efficiency. Specifically, by controlling the increase of the coupling length, that is, controlling the increase of the length of the first polymer after filling and curing, the light coupled into the input waveguide from the first monitoring waveguide is enhanced, that is, the efficiency of coupling the optical signal into the input waveguide from the first monitoring waveguide is improved, and similarly, by controlling the increase of the length of the second polymer, the light coupled into the first monitoring waveguide from the input waveguide is enhanced, that is, the efficiency of coupling the optical signal into the first monitoring waveguide from the input waveguide is improved. Therefore, the coupling efficiency of the first monitoring waveguide into the input waveguide can reach a certain range by controlling the coupling length of the first monitoring waveguide and the input waveguide within a range. For example, when the coupling length of the first monitor waveguide and the input waveguide is between 98 microns and 102 microns, the first specified efficiency of the optical signal coupled into the input waveguide by the first monitor waveguide is greater than 99%, and similarly, the coupling length of the output waveguide and the second monitor waveguide can be controlled within a certain range, and the second specified efficiency of the optical signal coupled into the first monitor waveguide by the output waveguide is determined. It should be understood by those skilled in the art that the preset range of the coupling length cannot be specifically fixed in a specific range due to the influence of many factors, such as the material of the first polymer and the second polymer, the length of the first polymer and the second polymer, the width of the first polymer and the second polymer, and the length of the waveguide, etc., and therefore, the above range is only used to illustrate the relationship between the coupling length range and the coupling efficiency of the optical signal, and is not limited to the embodiment of the present invention, and other coupling length ranges are within the protection scope of the present invention. For example, when the materials of the first polymer and the second polymer are changed, so that the coupling length is between 78 micrometers and 82 micrometers, the coupling-in/out efficiency of the optical signal is greater than 99%. In addition, the predetermined range of coupling lengths of the first polymer and the second polymer may be different.
To illustrate the monitoring and calibration of the optical device, in an alternative embodiment, the ratio of the optical signal output by the output grating to the input optical signal of the input grating is used for monitoring and/or calibration of the optical device under test. Specifically, the optical device to be measured is calibrated by the ratio of the optical signal output by the output grating to the optical signal input by the input grating. For example, after the input grating inputs the monitoring signal, the coupling length is controlled so that the monitoring signal in the first monitoring waveguide can be completely guided into the input waveguide, and the optical signal in the output waveguide can be completely guided into the second monitoring waveguide, and further when the optical signal is output through the output grating, the ratio of the optical signal output by the output grating to the monitoring signal is less than 1, and then the optical device can be calibrated to have optical signal loss, and the loss is-10 log (b/a) dB, where a is the monitoring signal input by the input grating; b is the optical signal output by the output grating.
To further illustrate the monitoring and calibration of the optical device, in an alternative embodiment, the optical switch is calibrated by the optical device monitoring and calibration system of an embodiment of the present invention. The calibration of the optical switch is usually used for calibrating the switching voltage of the optical switch, but the calibration is difficult to realize in a large-scale optical network, so that the calibration of the switching voltage of the optical switch can be realized by changing the voltage and monitoring the power change of an output optical signal of the output grating simultaneously in the embodiment of the invention.
The present embodiment provides an optical device monitoring and calibrating method, which is applied to the optical device monitoring and calibrating system of the above embodiment, as shown in fig. 5, and includes:
step S101, arranging a first polymer between a first monitoring waveguide and an input waveguide of an optical device to be detected, so that the first monitoring waveguide is coupled and conducted with the input waveguide;
step S102, arranging a second polymer between a second monitoring waveguide and an output waveguide of the optical device to be detected, so that the second monitoring waveguide and the output waveguide are coupled and conducted;
step S103, an input grating is arranged on the first monitoring waveguide and used for inputting optical signals, and an output grating is arranged on the second monitoring waveguide and used for outputting optical signals;
and step S104, monitoring and/or calibrating the optical device to be tested according to the optical signal input by the input grating and the optical signal output by the output grating.
Optionally, the method further comprises:
and after monitoring and/or calibration are completed, erasing the first polymer and the second polymer, and restoring the function of the optical device to be tested.
Optionally, the method further comprises:
forming a first deep groove on the cladding between the first monitoring waveguide and the input waveguide through etching; forming a second deep groove on the cladding layer between the second monitoring waveguide and the output waveguide through etching;
the first deep groove and the second deep groove are filled with a first polymer and a second polymer respectively.
Further functional descriptions of the above method are the same as those of the corresponding embodiments, and are not repeated herein.
Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations fall within the scope defined by the appended claims.
Claims (7)
1. An optical device monitoring and calibration system, comprising: an optical device to be tested and a monitoring device;
the optical device to be tested is connected with an input waveguide and an output waveguide;
the monitoring device comprises a first monitoring waveguide and a second monitoring waveguide; the first monitoring waveguide is provided with an input grating for inputting an optical signal; the second monitoring waveguide is provided with an output grating for outputting optical signals;
the core layers of the first monitor waveguide, the second monitor waveguide, the input waveguide and the output waveguide are composed of a high refractive index material, and the cladding layers of the first monitor waveguide, the second monitor waveguide, the input waveguide and the output waveguide are composed of a low refractive index material;
a first polymer is arranged between the first monitoring waveguide and the input waveguide, so that the first monitoring waveguide is coupled and conducted with the input waveguide; a second polymer is arranged between the second monitoring waveguide and the output waveguide, so that the second monitoring waveguide is coupled and conducted with the output waveguide; the first polymer and the second polymer are erasable, and the refractive index of the first polymer and the refractive index of the second polymer are both larger than that of air;
and monitoring and/or calibrating the optical device to be tested according to the optical signal input by the input grating and the optical signal output by the output grating.
2. The optical device monitoring and calibration system of claim 1, comprising:
a cladding layer between the first monitor waveguide and the input waveguide has a first deep groove, and a cladding layer between the second monitor waveguide and the output waveguide has a second deep groove; the first deep groove and the second deep groove are used for placing the first polymer and the second polymer respectively.
3. The optical device monitoring and calibration system of claim 1, comprising:
the coupling length of the first monitoring waveguide and the input waveguide is a first preset range, so that the efficiency of coupling an optical signal from the first monitoring waveguide into the input waveguide is first designated efficiency;
the coupling length of the output waveguide and the second monitoring waveguide is set to be a second preset range, so that the efficiency of the optical signal coupled into the second monitoring waveguide from the output waveguide is a second specified efficiency.
4. An optical device monitoring and calibration system as claimed in any one of claims 1 to 3, including:
the ratio of the optical signal output by the output grating to the input optical signal of the input grating is used for monitoring and/or calibrating the optical device to be tested.
5. An optical device monitoring and calibration method using the optical device monitoring and calibration system of any one of claims 1-4, the method comprising:
arranging a first polymer between the first monitoring waveguide and an input waveguide of the optical device to be detected, so that the first monitoring waveguide is coupled and conducted with the input waveguide;
arranging a second polymer between a second monitoring waveguide and an output waveguide of the optical device to be detected, so that the second monitoring waveguide is coupled and conducted with the output waveguide;
an input grating is arranged on the first monitoring waveguide and used for inputting optical signals, and an output grating is arranged on the second monitoring waveguide and used for outputting optical signals;
and monitoring and/or calibrating the optical device to be tested according to the optical signal input by the input grating and the optical signal output by the output grating.
6. The optical device monitoring and calibration method of claim 5, comprising:
and after monitoring and/or calibration is finished, erasing the first polymer and the second polymer, and restoring the function of the optical device to be detected.
7. The optical device monitoring and calibration method of claim 5, comprising:
forming a first deep groove on the cladding between the first monitoring waveguide and the input waveguide through etching; and forming a second deep groove on the cladding layer between the second monitoring waveguide and the output waveguide by etching;
and filling the first polymer and the second polymer in the first deep groove and the second deep groove respectively.
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