CN109655434A - A kind of optical fiber LMR sensor of measuring multiple parameters - Google Patents
A kind of optical fiber LMR sensor of measuring multiple parameters Download PDFInfo
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- CN109655434A CN109655434A CN201910140437.8A CN201910140437A CN109655434A CN 109655434 A CN109655434 A CN 109655434A CN 201910140437 A CN201910140437 A CN 201910140437A CN 109655434 A CN109655434 A CN 109655434A
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- lmr
- sensor
- optical fiber
- refractive index
- multiple parameters
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 21
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims abstract description 36
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 9
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000000835 fiber Substances 0.000 claims description 31
- 239000010408 film Substances 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 12
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 238000001429 visible spectrum Methods 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 description 12
- 238000005259 measurement Methods 0.000 description 8
- 239000000243 solution Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000012491 analyte Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
Abstract
The invention discloses a kind of optical fiber LMR sensor of measuring multiple parameters, which can produce two formants using LMR effect principle, determination that can simultaneously as temperature and refractive index.When temperature or refractive index change, resonant wavelength can change, that is, can determine the value of refractive index and temperature；LMR can resonate under p-polarization light and s polarised light simultaneously, and its sensitivity and precision are greatly improved compared with traditional sensors；It can be occurred in visible region by LMR effect.In addition toluene has big thermo-optic effect, can change toluene refractive index by changing external temperature.And toluene refractive index is big, light guide mechanism can become total internal reflection (TIR) from photon band gap (PBG).TiO2, SnO2 are to be easily obtained and have cost-benefit material simultaneously, and the two can excite LMR effect well, LMR is generated in limit of visible spectrum, become the ideal chose of inexpensive LMR device.
Description
Technical field
The present invention relates to optical sensing field more particularly to a kind of optical fiber LMR sensors of measuring multiple parameters.
Background technique
Lossy Mode Resonance (LMR) Chinese is loss mode resonance.Evanescent wave and conductive metal oxide
Intercouple the resonance of generation between loss mode in object, it can be excited by TE or TM polarised light.This resonance will lead to
The intensity of the light transmitted in optical waveguide drastically reduces, to form resonance trough.LMR effect is very sensitive to extraneous refractive index, when
When extraneous variations in refractive index, the resonance trough of LMR can also generate corresponding change, reflect the variations in refractive index of external substance, because
This, can be obtained to be measured by refraction rate conversion.Fibre optical sensor has the advantages that traditional sensors institute is incomparable: sensitivity
It is high, dynamic range is big, fast response time, not by electromagnetic interference, firing and explosion prevention, be easy to remote telemetering, good confidentiality, weight
Gently, mechanical strength height etc..Many new structure transducer sensitivities have been even up to 10000nm/RIU in the prior art, still
It is all that can only measure single chemical quantity, it is very inconvenient when being related to a variety of biochemistry measurements.Therefore it needs to propose a kind of new
The more measurement type sensors of high sensitivity of the energy combination single-measurement sensor advantage of type.
Summary of the invention
According to problem of the existing technology, the invention discloses a kind of optical fiber LMR sensors of measuring multiple parameters, specifically
Structure includes fibre core, and the outer surface of the fibre core is provided with covering, and the extending direction on the covering along fibre core is provided with multiple
Airport is provided with air hole inwall, the dew between the surface and airport of the fibre core between the two neighboring airport
Core segment is coated with TiO2The inner surface of film layer, the airport is coated with SnO2Film layer is provided with heat in the airport
Quick material.
The upper end of the sensor has notch, which is upper W type.
The distance of air hole inwall between the two neighboring airport is 1 μm -2 μm.
The diameter of the fibre core is 10 μm -15 μm.
The fibre diameter of the fibre optical sensor is 120-130 μm.
The SnO2Film layer with a thickness of 50-100nm.
The TiO of optical fiber LMR sensor W type dew core segment2Thin film layer thickness is 25-100nm.
The thermo-sensitive material is toluene.
By adopting the above-described technical solution, a kind of optical fiber LMR sensor of measuring multiple parameters provided by the invention, the biography
Sensor can produce two formants using LMR effect principle, determination that can simultaneously as temperature and refractive index.When temperature or folding
When the rate of penetrating changes, resonant wavelength can change, that is, can determine the value of refractive index and temperature；LMR is in p-polarization light simultaneously
With can resonate under s polarised light, and its sensitivity and precision are greatly improved compared with traditional sensors；It can by LMR effect
Occur in visible region.In addition toluene has big thermo-optic effect, can change toluene refractive index by changing external temperature.And
Toluene refractive index is big, and light guide mechanism can become total internal reflection (TIR) from photon band gap (PBG).TiO2, SnO2 are to be easy to simultaneously
It obtaining and there is cost-benefit material, the two can excite LMR effect well, LMR is generated in limit of visible spectrum,
Become the ideal chose of inexpensive LMR device.The invention patent solves while measuring two physics based on the above reasons
The problem of amount, and sensitivity is higher, can be widely popularized in fields such as microstructured optical fibers.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The some embodiments recorded in application, for those of ordinary skill in the art, without creative efforts,
It is also possible to obtain other drawings based on these drawings.
Fig. 1 is the cross section structure schematic diagram of the double measurement fibre optical sensors of Novel W-shaped in the invention patent embodiment one；
Fig. 2 is the double measurement fibre optical sensor different temperatures of W type in the invention patent embodiment one, loss value under refractive index
Fig. 3 is the detection system figure of the double measurement fibre optical sensors of W type in the invention patent embodiment one
Fig. 4 is the double fibre optical sensor peak wavelengths that measure of the W type in the invention patent embodiment one with the raised line of temperature
Property matched curve
In figure: 1, fibre core, 2, covering, 3, SnO2Film layer, 4, TiO2Film layer, 5, air hole inwall, 6, airport, A, W
The double measurement fibre optical sensors of type, B, wideband light source, C, spectrometer, D, multimode fibre optical path, E, injection port, F, outlet, G, meter
Calculation machine, H, glass tube, I, bracket.
Specific embodiment
To make technical solution of the present invention and advantage more ,=- is plus clear, with reference to the attached drawing in the embodiment of the present invention, right
Technical solution in the embodiment of the present invention carries out clear and complete description:
A kind of optical fiber LMR sensor of measuring multiple parameters as shown in Figure 1, the sensor are based on a kind of novel D type sensing
Device, the W type LMR microstructured optical fibers overall diameter are 125 μm, and material is vitreous silica, using 1 cladding structure of fibre core, including it is complete
Whole fibre core 1, fan-shaped surrounding layer 2 and to exclude 4 be set between fibre core 1 and covering 2 after two air scoops equally distributed
Identical cross section is fan-shaped airport 6, and the diameter d of fibre core 1 is 15 μm, and the thickness c of adjacent air hole inwall is 2 μ
m.W moulding plane face TiO2Film layer, the film layer with a thickness of 100nm.SnO is plated in inner surface in remaining air hole2Film layer, thickness
For 50nm.Toluene is injected in plated film airport 6 later.
Toluene is due to there is big thermo-optic effect to can be used as sensor information, it is easier to the variation of sense ambient temperature, and inject
Multiple airports, the strength of resonance are consequently increased, and show higher constraint loss, it is easier to excite evanscent field, excitation loss
Mode resonance effect, sensitivity are higher.Fibre-optical probe can be directly placed into solution to be measured.Test the Effect study of its double measurement
It tests as follows:
The preparation method of the optical fiber LMR sensor of measuring multiple parameters, using overall diameter be 125 μm, material is vitreous silica
LMR microstructured optical fibers are raw material.Fibre core 1 is set to including complete fibre core 1, fan-shaped surrounding layer 2 and after excluding two air scoops
4 equally distributed identical cross sections between covering 2 are fan-shaped airport, and the diameter d of fibre core 1 is 15 μm,
Adjacent airport inner wall thickness c is 2 μm.Two airports are removed using femto-second laser, form W type structure.Use magnetron sputtering
Method plates one layer of TiO in W type dew wicking surface2Film.Using wet-chemical deposition technique, by adjusting sedimentation time, solution flow velocity etc. can
The SnO being coated in target stomata is controlled with accurate2Film thickness.The toluene being filled into airport can be real in an identical manner
It is existing.
We have studied the magnetic distribution in design sensor using FInite Element (FEM).Boundary condition has been set as
U.S. matching layer only absorbs energy, not reflected energy.Sample refractive index is respectively 1.33,1.34.Temperature distinguishes 20 DEG C, 40 DEG C of .60
℃.The material of W type micro-structured fibres is vitreous silica, and dispersing characteristic determines that calculating is neglected by the Sellmeier equation of temperature-independent
The dispersing characteristic of toluene is omited.
λ is the wavelength in the vacuum as unit of micron, T be by DEG C as unit of.When meeting phase in certain wave strong point
Timing, the energy transfer in core schema damages mode into TiO2 film, to observe formant at the wavelength.Analysis
The variation of object refractive index will lead to core schema and damage the variation of the phase-matching condition between mode, generate different losses
Spectrum.Therefore, the offset that peak wavelength is damaged by measuring, can be effectively detected the variation of analyte refractive index.As reference,
The limitation of fibre optical sensor is lost is defined as:
αloss(dB/m)=8.686 × k0lm[neff]
In formula: αlossIt is the limitation loss of fibre optical sensor, k0=2 π/λ is wave number, and Im (neff) is mode availability indexes
Imaginary part.It is calculated, is obtained at refractive index n1=1.33, T=20 DEG C of different wave length condition by the numerical value of above-mentioned 2 formula again
Under corresponding imaginary numbers.
The sensitivity of sensor can be expressed as the shifted by delta λ of resonance troughpWith the change Δ n of sample to be tested refractive indexa's
Ratio, i.e.,
In formula: SλFor the wavelength sensitivity of sensor, Δ λpFor the offset for the trough that resonates, Δ naFor sample to be tested refractive index
Change, RIU is refractive index unit.Similarly right side is the change of temperature.It is bent with the raised variation of temperature to depict peak wavelength
Line.Fit line shows good linear relationship.Temperature sensitivity has reached 6.50nm/ DEG C, and refractive index sensitivity is in refractive index
10000nm/RIU or so is reached when=1.38.It is larger that loss peak is responsible for when temperature change or variations in refractive index
Variation, being capable of preferably temperature and refractive index.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (8)
1. a kind of optical fiber LMR sensor of measuring multiple parameters, it is characterised in that: including fibre core (1), the appearance of the fibre core (1)
Face is provided with covering (2), and the extending direction on the covering (2) along fibre core (1) is provided with multiple airports (6), described adjacent
It is provided with air hole inwall (5) between two airports (6), the dew core between the surface and airport (6) of the fibre core (1)
Divide and is coated with TiO2The inner surface of film layer (4), the airport (6) is coated with SnO2Film layer (3), the airport (6)
Inside is filled with thermo-sensitive material.
2. a kind of optical fiber LMR sensor of measuring multiple parameters according to claim 1, it is further characterized in that: the sensor
Upper end have notch, the notch be upper W type.
3. a kind of optical fiber LMR sensor of measuring multiple parameters according to claim 1, it is further characterized in that: it is described adjacent
The distance of air hole inwall (5) between two airports (7) is 1 μm -2 μm.
4. a kind of optical fiber LMR sensor of measuring multiple parameters according to claim 1, it is further characterized in that: the fibre core
(1) diameter is 10 μm -15 μm.
5. a kind of optical fiber LMR sensor of measuring multiple parameters according to claim 1, it is further characterized in that: the light
The fibre diameter of fiber sensor is 120-130 μm.
6. a kind of optical fiber LMR sensor of measuring multiple parameters according to claim 1, it is further characterized in that: the SnO2It is thin
Film layer (3) with a thickness of 50-100nm.
7. a kind of optical fiber LMR sensor of measuring multiple parameters according to claim 1, it is further characterized in that: optical fiber LMR
The TiO of sensor W type dew core segment2Thin film layer thickness is 25-100nm.
8. a kind of optical fiber LMR sensor of measuring multiple parameters according to claim 1, it is further characterized in that: the temperature-sensitive
Material is toluene.
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| CN201910140437.8A CN109655434B (en) | 2019-02-22 | 2019-02-22 | Optical fiber LMR sensor for multi-parameter measurement |
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| CN201910140437.8A CN109655434B (en) | 2019-02-22 | 2019-02-22 | Optical fiber LMR sensor for multi-parameter measurement |
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| CN109655434B CN109655434B (en) | 2024-01-26 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109974925A (en) * | 2019-04-26 | 2019-07-05 | 东北大学 | A kind of microstructure fiber sensor based on loss mode resonance |
| CN110108645A (en) * | 2019-05-16 | 2019-08-09 | 东北大学 | A kind of c-type photonic crystal planar array of measurable multichannel analysis object |
| CN110455346A (en) * | 2019-09-11 | 2019-11-15 | 东北大学 | It is a kind of for measuring the fibre optical sensor of seawater thermohaline depth |
| CN111272687A (en) * | 2020-03-27 | 2020-06-12 | 东北大学 | Hazardous gas real-time detection device based on infrared multispectral imaging |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109974925A (en) * | 2019-04-26 | 2019-07-05 | 东北大学 | A kind of microstructure fiber sensor based on loss mode resonance |
| CN109974925B (en) * | 2019-04-26 | 2024-01-26 | 东北大学 | Microstructure optical fiber sensor based on loss mode resonance |
| CN110108645A (en) * | 2019-05-16 | 2019-08-09 | 东北大学 | A kind of c-type photonic crystal planar array of measurable multichannel analysis object |
| CN110455346A (en) * | 2019-09-11 | 2019-11-15 | 东北大学 | It is a kind of for measuring the fibre optical sensor of seawater thermohaline depth |
| CN111272687A (en) * | 2020-03-27 | 2020-06-12 | 东北大学 | Hazardous gas real-time detection device based on infrared multispectral imaging |
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