CN109655434B - Optical fiber LMR sensor for multi-parameter measurement - Google Patents
Optical fiber LMR sensor for multi-parameter measurement Download PDFInfo
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- CN109655434B CN109655434B CN201910140437.8A CN201910140437A CN109655434B CN 109655434 B CN109655434 B CN 109655434B CN 201910140437 A CN201910140437 A CN 201910140437A CN 109655434 B CN109655434 B CN 109655434B
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 22
- 238000005259 measurement Methods 0.000 title claims abstract description 19
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 9
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000000835 fiber Substances 0.000 claims description 32
- 238000005253 cladding Methods 0.000 claims description 13
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000005350 fused silica glass Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 12
- 230000008859 change Effects 0.000 abstract description 11
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 230000007246 mechanism Effects 0.000 abstract description 2
- 238000001429 visible spectrum Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 9
- 239000000523 sample Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 239000012491 analyte Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
Abstract
The invention discloses an optical fiber LMR sensor for multi-parameter measurement, which can generate two formants by adopting an LMR effect principle and can be used for determining temperature and refractive index simultaneously. When the temperature or the refractive index changes, the resonance wavelength can change, and the values of the refractive index and the temperature can be determined; meanwhile, the LMR can resonate under p-polarized light and s-polarized light, and the sensitivity and the precision of the LMR are greatly improved compared with those of the traditional sensor; can occur in the visible region by LMR effects. In addition, toluene has a large thermo-optic effect, and the refractive index of toluene can be changed by changing the external temperature. And toluene has a large refractive index, the light guiding mechanism can change from Photonic Bandgap (PBG) to Total Internal Reflection (TIR). At the same time, tiO2 and SnO2 are readily available and cost effective materials, both of which can well excite the LMR effect, producing an LMR in the visible spectrum, making it an ideal choice for low cost LMR devices.
Description
Technical Field
The invention relates to the technical field of optical sensing, in particular to an optical fiber LMR sensor for multi-parameter measurement.
Background
Lossy Mode Resonance (LMR) Chinese name loss mode resonance. Resonance generated by mutual coupling between evanescent waves and loss modes in the conductive metal oxide can be excited by TE or TM polarized light. Such resonance may cause the intensity of light transmitted in the optical waveguide to decrease drastically, thereby forming a resonance trough. The LMR effect is sensitive to the external refractive index, and when the external refractive index changes, the resonance trough of the LMR also changes correspondingly to reflect the refractive index change of the external substance, so that the refractive index conversion can be used for obtaining the to-be-measured value. The optical fiber sensor has the advantages incomparable with the traditional sensor: high sensitivity, large dynamic range, high response speed, no electromagnetic interference, explosion and flame protection, easy remote measurement, good confidentiality, light weight, high mechanical strength and the like. Many of the novel structural sensors in the prior art have a sensitivity even up to 10000nm/RIU, but are all capable of measuring only a single chemical quantity, and are very inconvenient when multiple biochemical quantity measurements are involved. It is therefore desirable to provide a new type of high sensitivity multi-measurement sensor that combines the advantages of a single measurement sensor.
Disclosure of Invention
According to the problems existing in the prior art, the invention discloses an optical fiber LMR sensor for multi-parameter measurement, which comprises a fiber core, wherein the outer surface of the fiber core is provided with a cladding, a plurality of air holes are arranged on the cladding along the extending direction of the fiber core, and a plurality of air holes are arranged between two adjacent air holesAn air hole inner wall is arranged, and a part of the exposed core between the surface of the fiber core and the air hole is coated with TiO 2 A film layer, the inner surface of the air hole is coated with SnO 2 And the film layer is provided with a thermosensitive material in the air hole.
The upper end of the sensor is provided with a notch which is of an upper W shape.
The distance between the inner walls of the air holes between the two adjacent air holes is 1-2 mu m.
The diameter of the fiber core is 10 μm-15 μm.
The diameter of the optical fiber sensor is 120-130 mu m.
The SnO 2 The thickness of the thin film layer is 50-100nm.
TiO of the W-shaped exposed core part of the optical fiber LMR sensor 2 The thickness of the film layer is 25-100nm.
The heat sensitive material is toluene.
Due to the adoption of the technical scheme, the optical fiber LMR sensor for multi-parameter measurement can generate two formants by adopting an LMR effect principle, and can be used for determining temperature and refractive index simultaneously. When the temperature or the refractive index changes, the resonance wavelength can change, and the values of the refractive index and the temperature can be determined; meanwhile, the LMR can resonate under p-polarized light and s-polarized light, and the sensitivity and the precision of the LMR are greatly improved compared with those of the traditional sensor; can occur in the visible region by LMR effects. In addition, toluene has a large thermo-optic effect, and the refractive index of toluene can be changed by changing the external temperature. And toluene has a large refractive index, the light guiding mechanism can change from Photonic Bandgap (PBG) to Total Internal Reflection (TIR). At the same time, tiO2 and SnO2 are readily available and cost effective materials, both of which can well excite the LMR effect, producing an LMR in the visible spectrum, making it an ideal choice for low cost LMR devices. Based on the reasons, the invention solves the problem of measuring two physical quantities simultaneously, has higher sensitivity, and can be widely popularized in the fields of micro-structure optical fibers and the like.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic cross-sectional view of a novel W-type dual-measurement fiber sensor according to an embodiment of the present invention;
FIG. 2 shows the loss values at different temperatures and refractive indexes of a W-type dual-measurement optical fiber sensor according to an embodiment of the present invention
FIG. 3 is a diagram of a detection system of a W-type dual-measurement optical fiber sensor according to a first embodiment of the present invention
FIG. 4 is a linear fit curve of peak wavelength of a W-type dual-measurement fiber sensor with increasing temperature according to a first embodiment of the present invention
In the figure: 1. fiber core, 2, cladding, 3, snO 2 Film layer, 4, tiO 2 Film layer 5, air hole inner wall, 6, air hole, A, W type double-measurement optical fiber sensor, B, broadband light source, C, spectrometer, D, multimode optical fiber light path, E, sample inlet, F, sample outlet, G, computer, H, glass tube, I, support.
Detailed Description
In order to make the technical solution and the advantages of the present invention more = -clear, the following is a clear and complete description of the technical solution in the embodiment of the present invention with reference to the accompanying drawings in the embodiment of the present invention:
the optical fiber LMR sensor for multi-parameter measurement is shown in fig. 1, and is based on a novel D-type sensor, wherein the outer diameter of the optical fiber of the W-type LMR microstructure is 125 mu m, the material is fused quartz, a cladding structure of a fiber core 1 is adopted, the optical fiber comprises a complete fiber core 1, a fan-shaped outer cladding 2 and 4 uniformly distributed completely same air holes 6 with fan-shaped cross sections, wherein the completely same cross sections are arranged between the fiber core 1 and the cladding 2 after two air holes are removed, the diameter D of the fiber core 1 is 15 mu m, and the thickness c of the inner wall of each adjacent air hole is 2 mu m. W-shaped planing surface TiO 2 A thin film layer having a thickness of 100nm. The rest of the air holes are formed in the inner surfaceSnO plating 2 The thickness of the film layer is 50nm. Toluene was then injected into the coating air holes 6.
Toluene can be used as a sensing medium due to a large thermo-optical effect, so that the change of the ambient temperature is easier to sense, a plurality of air holes are injected, the resonance intensity is also increased, higher constraint loss is shown, an evanescent field is easier to excite, the loss mode resonance effect is excited, and the sensitivity is higher. The fiber optic probe can be placed directly into the solution to be tested. The effect study experiments for testing the dual measurements were as follows:
the preparation method of the optical fiber LMR sensor for multi-parameter measurement uses an LMR microstructure optical fiber with the outer diameter of 125 mu m and fused quartz as a raw material. The fiber comprises a complete fiber core 1, a fan-shaped outer cladding 2 and 4 uniformly distributed air holes with the fan-shaped cross section, wherein the air holes are arranged between the fiber core 1 and the cladding 2 after two air holes are planed, the diameter d of the fiber core 1 is 15 mu m, and the thickness c of the inner wall of each adjacent air hole is 2 mu m. And removing the two air holes by using a femtosecond laser to form a W-shaped structure. Coating a layer of TiO on the surface of the W-shaped exposed core by using a magnetron sputtering method 2 And (3) a film. SnO coated in the target pores can be precisely controlled by adjusting deposition time, solution flow rate, etc. using wet chemical deposition techniques 2 Film thickness. Toluene filled into the air holes can be achieved in the same manner.
We have studied the electromagnetic field distribution in the design sensor using the Finite Element Method (FEM). The boundary conditions are set to a perfect matching layer, absorbing energy only and not reflecting energy. The refractive index of the sample was 1.33 and 1.34, respectively. The temperature is 20 ℃,40 ℃ and 60 ℃ respectively. The material of the W-type microstructure fiber is fused silica, the dispersion characteristic is determined by a temperature-dependent Sellmeier equation, and the dispersion characteristic of toluene is calculated and ignored.
Lambda is the wavelength in microns in vacuum and T is in c. When phase matching is satisfied at a specific wavelength, energy in the core mode is transferred to a lossy mode in the TiO2 film, so that a formant is observed at the wavelength. Variations in the refractive index of the analyte will result in variations in the phase matching conditions between the core mode and the lossy mode, resulting in different loss spectra. Thus, by measuring the shift in the lossy peak wavelength, a change in the refractive index of the analyte can be effectively detected. For reference, the limiting loss of the fiber optic sensor is defined as:
α loss (dB/m)＝8.686×k 0 lm[n eff ]
wherein: alpha loss Is the limiting loss of the fiber optic sensor, k0=2pi/λ is the wavenumber, and Im (neff) is the imaginary part of the mode effective index. And calculating the values of the 2 formulas to obtain corresponding imaginary part values under the different wavelength conditions of T=20 ℃ at the refractive index n1=1.33.
The sensitivity of the sensor can be expressed as the shift Δλ of the resonance trough p Change delta n of refractive index from sample to be measured a Ratio of (2), i.e
Wherein: s is S λ For the wavelength sensitivity of the sensor Δλ p For shift of resonance trough, Δn a For the change of refractive index of the sample to be measured, RIU is the refractive index unit. The right side is the change in temperature in the same way. The peak wavelength is plotted as a function of temperature. The fitted line shows a good linear relationship. The temperature sensitivity reached 6.50 nm/deg.c and the refractive index sensitivity reached around 10000nm/RIU at refractive index=1.38. The temperature and the refractive index can be well determined by causing larger change of loss peak value when the temperature is changed or the refractive index is changed.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (3)
1. An optical fiber LMR sensor for multi-parameter measurement, characterized by: the fiber comprises a fiber core (1), wherein a cladding layer (2) is arranged on the outer surface of the fiber core (1), a plurality of air holes (6) are formed in the cladding layer (2) along the extending direction of the fiber core (1), air hole inner walls (5) are arranged between two adjacent air holes (6), a TiO2 film layer (4) is coated on a core exposing part between the surface of the fiber core (1) and the air holes (6), a SnO2 film layer (3) is coated on the inner surface of each air hole (6), and a thermosensitive material is filled in each air hole (6); the outer diameter of the W-type LMR microstructure optical fiber is 125 mu m, the material is fused quartz, a cladding structure of a fiber core (1) is adopted, the fiber core comprises a complete fiber core, a fan-shaped outer cladding (2) and 4 uniformly distributed air holes (6) with the completely same cross section and fan-shaped are arranged between the fiber core (1) and the cladding (2) after two air holes are removed, the diameter d of the fiber core (1) is 15 mu m, the thickness c of the inner wall of each adjacent air hole is 2 mu m, a notch is formed in the upper end of the sensor, the notch is of an upper W type, and the thermosensitive material is toluene.
2. A multi-parameter measured fiber optic LMR sensor in accordance with claim 1, further characterized by: the thickness of the SnO2 film layer (3) is 50-100nm.
3. A multi-parameter measured fiber optic LMR sensor in accordance with claim 1, further characterized by: the thickness of the TiO2 film layer of the W-shaped exposed core part of the optical fiber LMR sensor is 25-100nm.
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| CN109974925B (en) * | 2019-04-26 | 2024-01-26 | 东北大学 | Microstructure optical fiber sensor based on loss mode resonance |
| CN110108645B (en) * | 2019-05-16 | 2020-06-05 | 东北大学 | C-type photonic crystal planar array capable of measuring multichannel analytes |
| CN110455346A (en) * | 2019-09-11 | 2019-11-15 | 东北大学 | It is a kind of for measuring the fibre optical sensor of seawater thermohaline depth |
| CN111272687B (en) * | 2020-03-27 | 2021-04-20 | 东北大学 | Hazardous gas real-time detection device based on infrared multispectral imaging |
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