CN109644546A - Plasma generating element - Google Patents

Plasma generating element Download PDF

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Publication number
CN109644546A
CN109644546A CN201780014636.3A CN201780014636A CN109644546A CN 109644546 A CN109644546 A CN 109644546A CN 201780014636 A CN201780014636 A CN 201780014636A CN 109644546 A CN109644546 A CN 109644546A
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CN
China
Prior art keywords
conductive component
coated wire
plasma generating
plate
generating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780014636.3A
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Chinese (zh)
Inventor
堀川幸司
山田庆太郎
伊达和治
高土与明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of CN109644546A publication Critical patent/CN109644546A/en
Pending legal-status Critical Current

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/22—Ionisation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma

Abstract

Plasma generating element (2) includes: coated wire (10), and it includes the covering portion (12) of conductor wire (11) and insulating wrapped conductor wire (11)；And conductive component (20), it is configured adjacently in a manner of contacting covering portion (12) at least partially with coated wire (10)；Conductive component (20) has the clamping part of at least more than one, and the clamping part sandwiches coated wire (10) and kept on the direction that the extending direction with coated wire (10) intersects；By applying voltage between conductor wire (10) and conductive component (20), plasma is generated near clamping part.

Description

Plasma generating element
Technical field
It generates dielectric barrier electric discharge to generate the plasma generating element of plasma the present invention relates to a kind of.This Application be advocate the priority based on September in 2016 Japanese patent application submitted on the 2nd i.e. Patent 2016-171797, and Quote documented all contents in the Japanese patent application.
Background technique
As disclosing the plasma that can generate plasma under the air environment containing nitrogen, oxygen and under atmospheric pressure The document of body producing element can enumerate No. 4982851 bulletins (patent document 1) of Japanese Patent No..
Plasma generating element documented by patent document 1 is by a plurality of having been led core wire by what insulating layer coated Line is twisted and becomes twisted wire structure or a plurality of conducting wire of braiding and becomes combined braiding structure to constitute.
By constituting in such a manner, small gap is formed near the part that conducting wire is in contact with each other.In this state Under, by applying voltage between conducting wire, and dielectric barrier electric discharge is generated in the gap.As a result, plasma can be generated Body.
Existing technical literature
Patent document
Patent document 1: No. 4982851 bulletins of Japanese Patent No..
Summary of the invention
The technical problems to be solved by the invention
However, the plasma generating element disclosed in patent document 1, due to needing to be twisted together or weave a plurality of conducting wire Structure becomes complicated, has difficulties in terms of productivity.In addition, just needing to decompose in a such as damaged situation of conducting wire It constitutes the conducting wire of twisted wire structure and braiding structure and re-assemblies.
Present invention has been made in view of the above problems, the purpose of the present invention is to provide a kind of with easy structure etc. Gas ions producing element.
The means solved the problems, such as
The plasma generating element of first scheme according to the present invention, comprising: coated wire includes conductor wire and insulation Coat the covering portion of above-mentioned conductor wire；And conductive component, in a manner of contacting above-mentioned covering portion at least partially with above-mentioned packet Conducting wire is covered to be configured adjacently；Above-mentioned conductive component has the clamping part of at least more than one, and above-mentioned clamping part is led with above-mentioned cladding Above-mentioned coated wire is sandwiched on the direction that the extending direction of line intersects and is kept；By in above-mentioned conductor wire and above-mentioned conduction Apply voltage between component and generates plasma near above-mentioned clamping part.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned conductive component also be may include Configuration in the first plate-like portion of side and is configured in the other side when from above-mentioned coated wire from when from above-mentioned coated wire The second plate-like portion.In the situation, above-mentioned first plate-like portion preferably has the first contact portion contacted with above-mentioned coated wire, on Stating the second plate-like portion preferably has the second contact portion contacted with above-mentioned coated wire.In turn, above-mentioned clamping part is by above-mentioned First contact portion and above-mentioned second contact portion and constitute.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned first plate-like portion and above-mentioned Two plate-like portions can also extend along the above-mentioned extending direction of above-mentioned coated wire.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned first plate-like portion and above-mentioned Two plate-like portions can also be from the direction that above-mentioned first plate-like portion, above-mentioned coated wire and above-mentioned second plate-like portion arrange In the case where, extend in such a way that the above-mentioned extending direction with above-mentioned coated wire intersects.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned first plate-like portion can also have Have the first projecting strip part, above-mentioned first projecting strip part from the main surface being located at the main surface opposite side for being connected to above-mentioned coated wire, The direction for being directed away from above-mentioned coated wire is prominent, and extends along the direction that above-mentioned first plate-like portion extends.Also, above-mentioned second Plate-like portion also can have the second projecting strip part, and above-mentioned second projecting strip part is opposite with the circumferential surface for being connected to above-mentioned coated wire from being located at The main surface of side, the direction for being directed away from above-mentioned coated wire is prominent, and extends along the direction that above-mentioned second plate-like portion extends.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned first plate-like portion and above-mentioned One projecting strip part can also be made of a component, and above-mentioned second plate-like portion and above-mentioned second projecting strip part can also be by a component structures At.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned conductive component is also possible to lead to It crosses one or more endless members that inner peripheral surface is contacted with above-mentioned coated wire and constitutes.In this case, it is preferable to above-mentioned clamping Portion is made up of the inner peripheral surface of the above-mentioned endless member contacted with above-mentioned coated wire.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned conductive component is also possible to lead to It crosses along half cartridge unit of the above-mentioned extending direction extension of above-mentioned coated wire and constitutes.In this case, it is preferable to above-mentioned half Component has curved in a manner of sandwiching above-mentioned coated wire on the direction that the above-mentioned extending direction with above-mentioned coated wire intersects Bent inner peripheral surface, and preferably above-mentioned clamping part is made up of the above-mentioned inner peripheral surface of the part contacted with above-mentioned coated wire.
In the plasma generating element according to the first scheme of aforementioned present invention, preferably above-mentioned half cartridge unit is from upper When stating the above-mentioned extending direction observation of coated wire, there is U-shaped, V-shape or polygonal shape.
In the plasma generating element according to the first scheme of aforementioned present invention, preferably above-mentioned half cartridge unit is from upper When stating the above-mentioned extending direction observation of coated wire, have by the one end of above-mentioned inner peripheral surface and the another side of above-mentioned inner peripheral surface The opening face of defined, in such a situation it is preferred that above-mentioned half cartridge unit has anti-delinking part, the anti-delinking part and above-mentioned inner peripheral surface One side of above-mentioned one end and the above-mentioned another side of above-mentioned inner peripheral surface connection, and extend along the circumferential surface of above-mentioned coated wire, Prevent above-mentioned coated wire from falling off from above-mentioned opening surface side.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned conductive component also be may include There are the plate-like portion contacted with above-mentioned coated wire and one end and the connection of above-mentioned plate-like portion and another side is wound in above-mentioned packet Cover one or more winders of conducting wire.In this case, it is preferable to which above-mentioned clamping part is by contacting with above-mentioned coated wire The inner peripheral surface of partial above-mentioned winder and constitute.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned multiple winders also be can wrap The first winder and the second winder containing the above-mentioned extending direction arrangement along above-mentioned coated wire.In this case, it is preferable to The coiling direction of above-mentioned first winder is opposite with the coiling direction of above-mentioned second winder.
In the plasma generating element according to the first scheme of aforementioned present invention, above-mentioned plate-like portion also can have prominent Item portion, the projecting strip part are directed away from above-mentioned cladding from the main surface with the main surface opposite side for being contacted with the coated wire The direction of conducting wire is prominent, and extends along the direction that above-mentioned plate-like portion extends.
In the plasma generating element of alternative plan according to the present invention, comprising: multiple coated wires include conductor wire And the covering portion of the above-mentioned conductor wire of insulating wrapped, and configure concurrently with each other；And conductive component, it is contacted at least part The mode and above-mentioned multiple coated wires for stating covering portion are configured adjacently；Above-mentioned conductive component has multiple clamping parts, above-mentioned multiple Clamping part sandwiches above-mentioned multiple coated wires and is kept on the direction that the extending direction with above-mentioned coated wire intersects；On Configuration when conductive component includes from above-mentioned coated wire is stated to see in the first conductive component of side and from above-mentioned coated wire When examining configure the other side the second conductive component, above-mentioned first conductive component have mesh shape, and have with it is above-mentioned more First contact portion group of a coated wire contact, above-mentioned second conductive component have mesh corresponding with above-mentioned first conductive component Shape, and have the second contact portion group for contacting with above-mentioned multiple coated wires, above-mentioned multiple clamping parts are by above-mentioned the One contact portion group and above-mentioned second contact portion group and constitute；By applying voltage between above-mentioned conductor wire and above-mentioned conductive component And plasma is generated near above-mentioned multiple clamping parts.
In the plasma generating element according to the alternative plan of aforementioned present invention, above-mentioned first conductive component and above-mentioned Second conductive component can also contain multiple edge, and the multiple edge provides the opening portion in multilateral shape opening.In this feelings Under condition, from above-mentioned first conductive component, above-mentioned multiple coated wires and above-mentioned second conductive component arrange direction under, Above-mentioned multiple coated wires also can be configured to arrange in a manner of the center for passing through edge adjacent to each other in column-shaped.
In the plasma generating element according to the alternative plan of aforementioned present invention, above-mentioned first conductive component and above-mentioned Second conductive component can also contain multiple edge, and the multiple edge provides the opening portion in multilateral shape opening.In this feelings Under condition, from above-mentioned first conductive component, above-mentioned multiple coated wires and above-mentioned second conductive component arrange direction under, Above-mentioned multiple coated wires also can be configured to arrange in a manner of the center for passing through edge toward each other in column-shaped.
In the plasma generating element according to the alternative plan of aforementioned present invention, above-mentioned first conductive component can also be with Multiple first electric conductors comprising parallel configuration.In this case, it is preferable to which above-mentioned second conductive component includes along above-mentioned Multiple second electric conductors of the parallel configuration in direction of multiple first electric conductor arrangements.
Invention effect
In accordance with the invention it is possible to provide a kind of plasma generating element with easy structure.
Detailed description of the invention
Fig. 1 is the summary stereogram to indicate the plasma generating equipment of embodiment one.
Fig. 2 is the sectional view to indicate the plasma generating element of embodiment one.
Fig. 3 is the summary stereogram to indicate the plasma generating equipment of embodiment two.
Fig. 4 is the sectional view to indicate the plasma generating element of embodiment two.
Fig. 5 is the summary stereogram to indicate the plasma generating equipment of embodiment three.
Fig. 6 is the sectional view to indicate the plasma generating element of embodiment three.
Fig. 7 is the sectional view of the plasma generating element of variation one.
Fig. 8 is the summary stereogram to indicate the plasma generating equipment of embodiment four.
Fig. 9 is the sectional view to indicate the plasma generating element of embodiment four.
Figure 10 is the schematic top view to indicate the plasma generating equipment of embodiment five.
Figure 11 is the exploded perspective view to indicate the plasma generating equipment of embodiment five.
Figure 12 is the sectional view to a part for indicating the plasma generating element of embodiment five.
Figure 13 is the schematic top view to indicate the plasma generating element of embodiment six.
Figure 14 is the schematic top view to indicate the plasma generating element of embodiment seven.
Figure 15 is the schematic top view to indicate the plasma generating element of embodiment eight.
Figure 16 is the schematic top view to indicate the plasma generating element of embodiment nine.
Figure 17 is the schematic top view to indicate the plasma generating element of embodiment ten.
Figure 18 is the schematic top view to indicate the plasma generating element of embodiment 11.
Figure 19 is the schematic top view to indicate the plasma generating element of embodiment 12.
Figure 20 is the schematic top view to indicate the plasma generating element of embodiment 13.
Figure 21 is the summary stereogram to indicate the plasma generating equipment of embodiment 14.
Figure 22 is the sectional view to indicate the plasma generating element of embodiment 14.
Figure 23 is the sectional view to indicate 15 plasma generating element of embodiment.
Figure 24 is the sectional view to indicate the plasma generating element of embodiment 16.
Figure 25 is the summary stereogram to indicate the plasma generating equipment of embodiment 17.
Figure 26 be to indicate the conductive component of embodiment 17 winding before state summary stereogram.
Figure 27 is the summary stereogram to indicate the plasma generating element of embodiment 18.
Figure 28 is the summary stereogram to indicate the plasma generating element of embodiment 19.
Figure 29 be to indicate the conductive component of embodiment 19 winding before state summary stereogram.
Figure 30 is the summary stereogram to indicate the plasma generating equipment of embodiment 20.
Figure 31 is the sectional view to the internal structure for indicating the air cleaner of embodiment 21.
Figure 32 is the rearview of the air cleaner of embodiment 21.
Figure 33 is the sectional view to the internal structure for indicating the air cleaner of embodiment 22.
Figure 34 is the rearview of the air cleaner of embodiment 22.
Figure 35 is the sectional view to the internal structure for indicating the air cleaner of embodiment 23.
Figure 36 is the rearview of the air cleaner of embodiment 23.
Specific embodiment
Hereinafter, detailed description of embodiments of the present invention with reference to the accompanying drawings.In addition, in the reality of following presentation It applies in mode, in the accompanying drawings, marks same reference numerals for identical or common part, and do not repeat its explanation.
(embodiment one)
Fig. 1 is the summary stereogram to indicate the plasma generating equipment of embodiment one.Fig. 2 is to indicate embodiment party The sectional view of the plasma generating element of formula one.Referring to Figures 1 and 2, to 1 He of plasma generating equipment of embodiment one Plasma generating element 2 is illustrated.
As shown in Figure 1, the plasma generating equipment 1 of embodiment one includes plasma generating element 2, support member 30 and high voltage circuit 50.
As depicted in figs. 1 and 2, plasma generating element 2 is to generate plasma for generating dielectric barrier electric discharge The element of body.Plasma generating element 2 includes coated wire 10 and conductive component 20.
Coated wire 10 extends along defined direction.The linear extension of coated wire 10.Coated wire 10 includes conduction The covering portion 12 of line 11 and the insulating wrapped conductor wire 11.One of coated wire 10 on the extending direction of coated wire 10 End side and another side, conductor wire 11 are externally exposed.Conductor wire 11 is made of metal wire.Covering portion 12 is for example by ceramics (Ceramics), ethylene (Vinyl), Teflon (polytetrafluoroethylene (PTFE)) (Teflon) (registered trademark) and insulation resin member etc. It constitutes.
Conductive component 20 is configured adjacently in such a way that a part is contacted with covering portion 12 with coated wire 10.Conductive component 20 With the clamping part for sandwiching coated wire 10 on the direction that the extending direction with coated wire 10 intersects and being kept.
Positioned at the first plate-like portion 21 of side and from coated wire 10 when conductive component 20 includes from coated wire 10 Positioned at the second plate-like portion 22 of the other side when observation.First plate-like portion 21 and the second plate-like portion 22 along coated wire 10 extension Direction extends.The direction that first plate-like portion 21 and the second plate-like portion 22 intersect from the extending direction with coated wire 10 sandwiches cladding Conducting wire 10.First plate-like portion 21 and the second plate-like portion 22 are such as the metal of the ferroalloy as aluminium, aluminium alloy, iron and stainless steel Plate is constituted.
First plate-like portion 21 has the first contact portion P1 contacted with coated wire 10 (being more specifically covering portion 12).The One contact portion P1 linearly extends along the extending direction of coated wire 10.Second plate-like portion 22 has and coated wire 10 The second contact portion P2 of (being more specifically covering portion 12) contact.Second contact portion P2 is straight along the extending direction of coated wire 10 Linearly extend.
By above-mentioned first contact portion P1 and the second contact portion P2, constitutes conductive component 20 and sandwich coated wire 10 and carry out The clamping part of holding.
Support member 30 supports conductive component 20.Support member 30 prevents conductive component 20 from separating from coated wire 10.
Support member 30 includes the first support member 31 and the second support member 32.First support member 31 has first Part 311, second part 312 and interconnecting piece 313.
First part 311 has plate-like shape.First part 311 be connected to the first plate-like portion 21 outer surface (with and packet It covers conducting wire 10 and contacts the main surface that side is opposite side).Second part 312 has plate-like shape portion.Second part 312 is defined It is separated on direction with first part 311.Second part 312 be connected to the second plate-like portion 22 outer surface (with coated wire 10 Contact the main surface that side is opposite side).Interconnecting piece 313 connects first part 311 and second part 312.
Gap between first part 311 and second part 312, the first plate-like portion 21 of insertion, coated wire 10 and the Each one end of two plate-like portions 22, first part 311 presses the first plate-like portion 21 toward 22 side of the second plate-like portion as a result, and second Part 312 presses the second plate-like portion 22 toward 21 side of the first plate-like portion.
Second support member 32 has structure identical with the first support member 31.Second support part 32 has first Divide 321, second part 322 and interconnecting piece 323.
Gap between first part 321 and second part 322, the first plate-like portion 21 of insertion, coated wire 10 and the Each another side of two plate-like portions 22, first part 321 presses the first plate-like portion 21 toward 22 side of the second plate-like portion as a result, the Two parts 322 press the second plate-like portion 22 toward 21 side of the first plate-like portion.
In two end sides of coated wire 10, by the first support member 31 and the second support member 32 by the first plate-like portion 21 And second plate-like portion 22 pressed towards coated wire 10, thus, it is possible to prevent the first plate-like portion 21 and the second plate-like portion 22 and packet Cover the separation of conducting wire 10.Therefore, the first plate-like portion 21 and the second plate-like portion 22 can be made steadily to contact with coated wire 10.
High voltage circuit 50 generates high voltage by the voltage from power supply (not shown).The one of high voltage circuit 50 Side is electrically connected by wiring 41 with conductor wire 11.The other side of high voltage circuit 50 passes through wiring 42 and conductive component 20 (the first plate-like portion 21 and the second plate-like portion 22) electrical connection.First plate-like portion 21 and the second plate-like portion 22 are connected in parallel.
High frequency, high voltage are applied between conductive component 20 and conductor wire 11 by high voltage circuit 50.As a result, in conductive part Potential difference is generated between part 20 and conductor wire 11.The voltage being applied between conductive component 20 and conductor wire 11 is preferably alternating current Pressure.
First plate-like portion 21 and the second plate-like portion 22 are contacted with covering portion 12, and pass through the contact of the first contact portion P1 and second Portion P2 constitutes clamping part, forms gap R (the plasma generation that can generate plasma around clamping part as a result, Portion).
In the R of the gap, plasma can be generated by meeting defined discharging condition.Specifically, by Between conductor wire 11 and the first plate-like portion 21 and apply voltage between conductor wire 11 and the second plate-like portion 22 and generates dielectric Barrier discharge simultaneously generates plasma, the voltage be according to from the circumferential surface of covering portion 12 to the first plate-like portion 21 distance, with And the product since the circumferential surface of covering portion 12 to the distance of the second plate-like portion 22 and atmosphere pressures (Fluid pressure) is determined Voltage more than discharge voltage.
Apply alternating voltage, and by make to be applied between conductor wire 11 and the first plate-like portion 21 and conductive plate 11 with The polarity of voltage between second plate-like portion 22 inverts, and can repeat dielectric barrier electric discharge.
Due to along the first contact portion P1 and the second contact portion P2, to the one end of the extending direction of coated wire 10 and another One end substantially evenly generates plasma, therefore can generate plasma to wide scope.Thus, it is possible to make to deal with objects Gas efficiently contacts plasma.
Plasma is generated on one side, the process object gas of air etc. is made to pass through plasma generating equipment 1 on one side, by This, is able to carry out bacterium present in process object gas, virus loses activity, alternatively, be included in the processing pair of stink etc. As the decomposition of the foreign gas in gas removes.Thereby, it is possible to purified treatment object gas.
As shown in Figures 1 and 2, deal with objects gas air supply direction can be set to the extending direction of coated wire 10 with And the orthogonal direction (direction AR1) in direction of first plate-like portion 21, coated wire 10, the second plate-like portion 20 arrangement.By that will locate Reason object gas is blown toward above-mentioned air supply direction, and is dealt with objects gas and directly hit above-mentioned first contact portion P1 and above-mentioned Second contact portion P2 can be such that plasma is included in process object gas.
In addition, the air supply direction of process object gas can also be the first plate-like portion 21, coated wire 10 and the second plate The direction that portion 22 arranges, can also be the extending direction of coated wire 10.When by air supply direction be set as the first plate-like portion 21, cladding Conducting wire 10 and the second plate-like portion 22 arrangement direction when, by deal with objects gas a part circumferentially flow in On the circumferential surface of coated wire 10, and plasma can be made to be included in process object gas.When air supply direction is set as wrapping When covering the extending direction of conducting wire 10, a part by dealing with objects gas is flowed along the extending direction of coated wire 10 in packet On the circumferential surface for covering conducting wire 10, and plasma can be made to be included in process object gas.
In addition, conductive component 20 is grounded, also can when even if thus user touching the conductive component 20 for being exposed to outside Enough ensure safety.
As described above, the plasma generating element 2 of embodiment one, there is no twisted coated wires 10 each other, but Coated wire 10 is sandwiched by the first plate-like portion 21 and the second plate-like portion 22 thus to constitute, therefore can simplify its structure.Companion With in this, it can also simplify the structure of the plasma generating equipment 1 including plasma generating element 2.
(embodiment two)
Fig. 3 is the summary stereogram to indicate the plasma generating equipment of embodiment two.Fig. 4 is to indicate embodiment party The sectional view of the plasma generating element of formula two.Referring to Fig. 3 and Fig. 4, to the plasma generating equipment 1A of embodiment two It is illustrated with plasma generating element 2A.
As shown in figure 3, the plasma generating equipment 1A of embodiment two and the plasma of embodiment one are generated and are filled It sets 1 to compare, the structure of plasma generating element 2A is different, and is accompanied by this and the structure of support member 30A is different.About it His structure is then roughly the same.
As shown in Figures 3 and 4, plasma generating element 2A be by the plasma generating element 2 of embodiment one simultaneously It configures multiple and constitutes capablely.Specifically, plasma generating element 2A includes multiple coated wire 10A, 10B, 10C and more A conductive component 20A, 20B, 20C.
Multiple coated wire 10A, 10B, 10C are configured concurrently with each other.Each of multiple coated wire 10A, 10B, 10C Covering portion 12 comprising conductor wire 11 and the insulating wrapped conductor wire 11.
Multiple conductive component 20A, 20B, 20C sandwich coated wire 10A, 10B, 10C respectively and are kept.It is more as a result, Each of a conductive component 20A, 20B, 20C have the clamping part for sandwiching coated wire 10A, 10B, 10C.
Multiple conductive component 20A, 20B, 20C separately include the first plate-like portion 21 and the second plate-like portion 22.It is contained in multiple The first plate-like portion 21 and the second plate-like portion 22 of conductive component 20A, 20B, 20C are respectively from multiple coated wire 10A, 10B, 10C The direction of arrangement sandwiches coated wire 10A, 10B, 10C.
First plate-like portion 21 has the first contact portion P1 contacted with coated wire 10.Second plate-like portion 22 has and cladding The second contact portion P2 that conducting wire 10 contacts.Clamping part is constituted by the first contact portion P1 and the second contact portion P2.
Support member 30A supports multiple conductive component 20A, 20B, 20C.Support member 30A prevent conductive component 20A, 20B, 20C are separated with coated wire 10A, 10B, 10C.
Support member 30A includes the first support member 31A, the second support member 32A.First support member 31A has big Cause the bulk of cuboid.First support member 31A has the first recess portion 301, the second recess portion 302 and third recess portion 303.Second Support part part 32A also has structure identical with the first support member 31.
Each one end of first plate-like portion 21, coated wire 10A and the second plate-like portion 22 is inserted into the first support member 31A The first recess portion 301.Each another side of first plate-like portion 21, coated wire 10A and the second plate-like portion 22 is inserted into second The first recess portion of support part part 32A.
Each one end of first plate-like portion 21, coated wire 10B and the second plate-like portion 22 is inserted into the first support member 31A The second recess portion 302.Each another side of first plate-like portion 21, coated wire 10B and the second plate-like portion 22 is inserted into second The second recess portion of support part part 32A.
Each one end of first plate-like portion 21, coated wire 10C and the second plate-like portion 22 is inserted into the first support member 31A Third recess portion 303.Each another side of first plate-like portion 21, coated wire 10C and the second plate-like portion 22 is inserted into second The first recess portion of support part part 32A.
The side of high voltage circuit 50 is electrically connected by wiring 41 with multiple conductor wires 11.Multiple conductor wires 11 are in parallel even It connects.The other side of high voltage circuit 50 is by wiring 42 respectively with included in multiple conductive component 20A, 20B, 20C the One plate-like portion 21 and the electrical connection of the second plate-like portion 22.First plate-like portion 21 included in multiple conductive component 20A, 20B, 20C And second plate-like portion 22 be connected in parallel respectively.
Applied respectively by high voltage circuit 50 each and multiple conductive component 20A, 20B, 20C to multiple conductor wires 11 High voltage, and identically as embodiment one, plasma is generated from multiple clamping parts.
In addition, the air supply direction for dealing with objects gas can be set as and multiple coated wires as shown in Fig. 3 and Fig. 4 The direction of arrangement and the orthogonal direction (direction AR2) of the extending direction of coated wire 10, or also can be set as multiple claddings and lead The direction that line 10 arranges, can also be set as the direction parallel with the extending direction of coated wire 10.
Even if the plasma generating element 2A and plasma of embodiment two are raw in the case where configured as described above It can also be obtained at device 1A roughly the same with the plasma generating element 2 of embodiment one and plasma generating equipment 1 Effect.
Plasma generating element 2A include multiple coated wire 10A, 10B, 10C and multiple conductive component 20A, 20B, 20C can spread wide range purified treatment object gas as a result, compared with embodiment one.
(embodiment 3)
Fig. 5 is the summary stereogram to indicate the plasma generating equipment of embodiment three.Fig. 6 is to indicate embodiment party The sectional view of the plasma generating element of formula three.Referring to Fig. 5 and Fig. 6, to the plasma generating equipment 1B of embodiment three And plasma generating element 2B is illustrated.
As shown in figure 5, the plasma generating equipment 1B of embodiment three and the plasma of embodiment one are generated and are filled Set 1 compared to when, the structure of the conductive component 20B1 of plasma generating element 2B is different.Other structures are roughly the same.
As shown in Figures 5 and 6, the conductive component 20B1 of plasma generating element 2B includes the first plate-like portion 21B and the Two plate-like portion 22B.
First plate-like portion 21B has the first projecting strip part 23.First projecting strip part 23 from be located at and be connected to coated wire 10 The direction that the main surface 21Bb of main surface 21Ba opposite side is directed away from coated wire 10 is prominent.First projecting strip part 23 is along first The extending direction of plate-like portion 21B extends.
First plate-like portion 21B and the first projecting strip part 23 are made of a component.First plate-like portion 21B and the first projecting strip part 23 by will have the sheet metal bending of writing board shape to be formed.Constituted the first plate-like portion 21B and as a result, and with different components The case where one projecting strip part 23, is compared, and the mutual labour of fixed different components, time can be saved, and can reduce manufacture at This.
Second plate-like portion 22B has the second projecting strip part 24.Second projecting strip part 24 from be located at and be connected to coated wire 10 The direction that the main surface 22Bb of main surface 22Ba opposite side is directed away from coated wire 10 is prominent.Second projecting strip part 24 is along second The extending direction of plate-like portion 22B extends.
Second plate-like portion 22B and the second projecting strip part 24 are made of a component.Second plate-like portion 22B and the second projecting strip part 24 by will have the sheet metal bending of writing board shape to be formed.Constituted the second plate-like portion 22B and as a result, and with different components The case where two projecting strip part 24, is compared, and the mutual labour of fixed different components, time can be saved, and can reduce manufacture at This.
Even situation as constituted above, the plasma generating element 2B and plasma of embodiment two generate dress Set the 1B also available effect roughly the same with the plasma generating element 2 of embodiment one, plasma generating equipment 1 Fruit.
As described above, improving the first plate-like portion 21B and the second plate by the first projecting strip part 23 of setting and the second projecting strip part 24 The rigidity of shape portion 22B.Therefore, even with the first support member 31 and the second support member 32 at the both ends of coated wire 10 Side is also able to suppress the first plate the case where pressing the first plate-like portion 21B and the second plate-like portion 22B towards coated wire 10 Portion 21B and the second plate-like portion 22B is separated with the central part of the first plate-like portion 21B and the second plate-like portion 22B from coated wire 10 Mode is bent.Thereby, it is possible to contact the first plate-like portion 21B and the second plate-like portion 22B more steadily with coated wire 10.
As a result, it is possible to along the first contact portion P1 and the second contact portion P2, to the one of the extending direction of coated wire 10 End side and another side more uniformly generate plasma.
In addition, as the air supply direction for shown in Fig. 5 and Fig. 6, dealing with objects gas can be the first plate-like portion 21B, cladding The direction (direction AR3) of conducting wire 10 and the second plate-like portion 22B arrangement, is also possible to parallel with the extending direction of coated wire 10 Direction, or be also possible to and the first plate-like portion 21B, coated wire 10 and the second plate-like portion 22B arrangement direction and cladding The orthogonal direction of the extending direction of conducting wire 10.
(variation one)
Fig. 7 is the sectional view of the plasma generating element of variation one.Referring to Fig. 7, the plasma of variation one is generated Element 2C is illustrated.
As shown in fig. 7, the plasma generating equipment 2C of variation one, the plasma generating element with embodiment three When 2B is compared, the structure of conductive component 20C1 is different.It is then roughly the same about other structures.
When conductive component 20C1 is compared with the conductive component 20B1 with embodiment three, the first projecting strip part 23C and the is set The position of two projecting strip part 24C is different, and also different in the following aspects: the first plate-like portion 21B and the first projecting strip part 23C are by difference Component constitute, and the second plate-like portion 22B and the second projecting strip part 24C are made of different components.
The substantially central portion of the first plate-like portion 21B is arranged in first projecting strip part 23C.First projecting strip part 23C by bonding or Welding etc. and be fixed in the first plate-like portion 21B.The substantially central portion of the second plate-like portion 22B is arranged in second projecting strip part 24C.Second Projecting strip part 24C is fixed in the second plate-like portion 22B by bonding or welding etc..
First projecting strip part 23C and the second projecting strip part 24C can be made of metal plate, can also be made of resin component.
Even situation as constituted above, the plasma generating element 2C of variation one and include the plasma The plasma generating equipment of body producing element, also available plasma generating element 2B with embodiment three and wait from Daughter generating means 1B roughly the same effect.
(embodiment four)
Fig. 8 is the summary stereogram to indicate the plasma generating equipment of embodiment four.In addition, height is omitted in Fig. 8 Potential circuit and wiring.Fig. 9 is the sectional view to indicate the plasma generating element of embodiment four.Referring to Fig. 8 and figure 9, the plasma generating equipment 1D and plasma generating element 2D of embodiment four are illustrated.
As shown in figure 8, the plasma generating equipment 1D of embodiment four and the plasma of embodiment three are generated and are filled When setting 1B and comparing, the structure of plasma generating element 2D is different, and is accompanied by this and the structure of support member 30D is different.Its His structure is roughly the same.
As can be seen from figures 8 and 9, plasma generating element 2D passes through the plasma generating element 2B1 of embodiment three It concurrently configures and constitutes.Specifically, plasma generating element 2D include multiple coated wire 10A, 10B, 10C and Multiple conductive component 20B1,20B2,20B3.
Multiple coated wire 10A, 10B, 10C are configured concurrently with each other.Each packet of multiple coated wire 10A, 10B, 10C Covering portion 12 containing conductor wire 11 and the insulating wrapped conductor wire 11.
Multiple conductive component 20B1,20B2,20B3 sandwich coated wire 10A, 10B, 10C respectively and are kept.As a result, Multiple conductive component 20B1,20B2,20B3's is each, has the clamping part of clamping coated wire 10A, 10B, 10C.
Multiple conductive component 20B1,20B2,20B3 separately include the first plate-like portion 21B and the second plate-like portion 22B.It is multiple to lead First plate-like portion 21B and the second plate-like portion 22B included in electrical components 20B1,20B2,20B3 are led from multiple claddings respectively The direction that the direction of line 10A, 10B, 10C arrangement and the extending direction of multiple coated wire 10A, 10B, 10C intersect sandwiches packet Cover conducting wire 10A, 10B, 10C.
First plate-like portion 21B has the first contact portion P1 contacted with coated wire 10.Second plate-like portion 22B has and packet Cover the second contact portion P2 of the contact of conducting wire 10.Clamping part is constituted by the first contact portion P1 and the second contact portion P2.
First plate-like portion 21B has the first projecting strip part 23.First projecting strip part 23 is the first projecting strip part with embodiment three 23 identical compositions.Second plate-like portion 22B has the second projecting strip part 24.
Support member 30D supports multiple conductive component 20B1,20B2,20B3.Support member 30D prevents conductive component 20B1,20B2,20B3 are separated from coated wire 10A, 10B, 10C.
Support member 30D includes the first support member 31D, the second support member 32D.First support member 31D has the The interconnecting piece 313 of a part 311, second part 312 and connection first part 311 and second part 312.
First part 311 has plate-like shape.First part 311 is connected to multiple conductive component 20B1,20B2,20B3's The outer surface (contacting side into the main surface of opposite side with coated wire 10) of first plate-like portion 21B included in each, will They are pressed towards 312 side of second part.
First part 311 is provided with multiple notches.Multiple conductive component 20B1,20B2,20B3 are inserted into multiple notches It is each included in the first projecting strip part 23 one end.
Second part 312 has plate-like shape portion.Second part 312 is separated with first part 311 in specified directions. Second part 312 be connected to multiple conductive component 20B1,20B2,20B3 it is each included in the second plate-like portion 22 appearance Face (contacts side into the main surface of opposite side with coated wire 10), they are pressed towards 311 side of first part.
Second part 312 is provided with multiple notches.Multiple conductive component 20B1,20B2,20B3 are inserted into multiple notches It is each included in the second projecting strip part 24 one end.
Multiple coated wire 10A, 10B, 10C and multiple conductions are inserted between first part 311 and second part 312 The one end of component 20B1,20B2,20B3, as a result, the first support member 31D support multiple coated wire 10A, 10B, 10C with And the one end of multiple conductive component 20B1,20B2,20B3.
Second support member 32D has structure identical with the first support member 31D.Second support member 32D is with In the state that one support member 31D is identical, the first support member 31D supports multiple coated wire 10A, 10B, 10C and multiple The another side of conductive component 20B1,20B2,20B3.
The side of high voltage circuit (not shown) is electrically connected by wiring (not shown) with multiple conductor wires 11.It is multiple to lead Electric wire 11 is connected in parallel.The other side of high voltage circuit (not shown) passes through wiring (not shown) and multiple conductive components Each electrical connection of first plate-like portion 21B and the second plate-like portion 22B included in 20B1,20B2,20B3.Multiple conductive parts First plate-like portion 21B and the second each of plate-like portion 22B included in part 20B1,20B2,20B3 are connected in parallel.
By above-mentioned high voltage circuit to each and multiple conductive component 20B1,20B2,20B3 points of multiple conductor wires 11 Not Shi Jia high voltage generate plasma near multiple clamping parts and identicallyly as embodiment one.
Even situation configured as described above, the plasma generating element 2D and plasma of embodiment four generate dress Set 1D can also obtain it is roughly the same with the plasma generating element 2B of embodiment three and plasma generating equipment 1B Effect.
Plasma generating element 2D include multiple coated wire 10A, 10B, 10C and multiple conductive component 20B1, 20B2,20B3 can spread wider scope purified treatment object gas as a result, compared with embodiment one.
(embodiment five)
Figure 10 is the schematic top view to indicate the plasma generating equipment of embodiment five.Figure 11 is to indicate to implement The exploded perspective view of the plasma generating equipment of mode five.Figure 12 is to indicate that the plasma of embodiment five generates member The sectional view of a part of part.Referring to Fig.1 0 to Figure 12, to the plasma generating equipment 1E and plasma of embodiment five Producing element 2E is illustrated.
As shown in Figures 10 and 11, the plasma generating equipment 1E of embodiment five includes plasma generating element 2E And high voltage circuit 50.As shown in Figure 10 to Figure 12, plasma generating element 2E includes multiple coated wires 10 and conductive part Part 20E.
Multiple coated wires 10 configure concurrently with each other.The each of multiple coated wires 10 includes conductor wire 11 and cladding The covering portion 12 of conductor wire 11.
Conductive component 20E is configured adjacently in a manner of contacting covering portion 12 at least partially with multiple coated wires 10.It leads Electrical components 20E has multiple clamping parts, and the multiple clamping part sandwiches on the direction that the extending direction with coated wire intersects Multiple coated wires 10 are simultaneously kept；
Conductive component 20E includes the first conductive component 21E and the second conductive component 22E.First conductive component 21E is from cladding It is arranged when conducting wire 10 is observed in side.First conductive component 21E has mesh shape.Specifically, more with rectangular shape A opening portion has the mesh shape arranged in row shape or column-shaped.
First conductive component 21E has multiple electric conductors 211 (the first electric conductor) and framework 215.Multiple electric conductors 211 that This is concurrently configured.Multiple electric conductors 211 are for example with plate-like shape.In addition, the shape of electric conductor 211 is not limited to plate shape Shape is also possible to cylindrical shape.
Feelings from the direction that the first conductive component 21E, multiple coated wires 10 and the second conductive component 22E are arranged Under condition (when overlook view), multiple electric conductors 211 are extended in a manner of intersecting with coated wire 10.Specifically, multiple conductions Body 221 is in the feelings from the direction that the first conductive component 21E, multiple coated wires 10 and the second conductive component 22E are arranged Under condition, upwardly extended in the side orthogonal with the extending direction of coated wire 10.Multiple electric conductors 211 are propped up by framework 215 Support.
It is arranged when second conductive component 22E is from coated wire 10 in the other side.Second conductive component 22E has mesh Shape.Specifically, multiple opening portions with rectangular shape have the mesh shape arranged in row shape or column-shaped.
Second conductive component 22E has multiple electric conductors 221 (the second electric conductor) and framework 225.Multiple 221 edges of electric conductor The direction that arranges of multiple electric conductors 211 configure concurrently with each other.Multiple electric conductors 221 are for example with plate-like shape.In addition, leading The shape of electric body 221 is not limited to plate-like shape, is also possible to cylindrical shape.
Multiple electric conductors 221 are arranged from the first conductive component 21E, multiple coated wires 10 and the second conductive component 22E In the case where the direction observation of column, extended in a manner of intersecting with coated wire 10.Multiple electric conductors 221 along with multiple conductions The identical direction of body 211 extends.Multiple electric conductors 221 are supported by framework 225.
Multiple coated wires 10 are sandwiched by the first conductive component 21E and the second conductive component 22E, and as a result, first Conductive component 21E has the first contact portion group contacted with multiple coated wires 10, and the second conductive component 22E has and multiple packets Cover the second contact portion group of the contact of conducting wire 10.
Multiple coated wires 10 are contacted by multiple electric conductors 211 of the first conductive component 21E, and pass through the first contact portion P1 is formed in ranks shape, and forms the first contact portion group.It is contacted by multiple electric conductors 221 of the second conductive component 22E multiple Coated wire 10, and formed by the second contact portion P2 in ranks shape, and form the second contact portion group.
By these the first contact portion groups and the second contact portion group, constitutes and to sandwich multiple coated wires 10 and be kept Multiple clamping parts.
The side of high voltage circuit 50 is electrically connected by wiring 41 with multiple conductor wires 11.Multiple conductor wires 11 are in parallel even It connects.The other side of high voltage circuit 50 is electrically connected by wiring 42 with multiple electric conductors 211 and multiple electric conductors 221.It is multiple Electric conductor 211 and multiple electric conductors 221 are connected in parallel.
By high voltage circuit 50 to each and multiple conductive component 20E (more specifically, first of multiple conductor wires 11 Multiple electric conductors 221 of multiple electric conductors 211 of conductive component 21E and the second conductive component 22E) apply high voltage, as a result, Identically as embodiment one, plasma is generated near multiple clamping parts.
As described above, the not twisted coated wire of the plasma generating element 2E of embodiment five is each other, but it is logical The first conductive component 21E and the second conductive component 22E with mesh shape is crossed to sandwich multiple conductor wires 11 and thus constitute, because This can simplify its structure.It is accompanied by this, can also simplify the plasma generating equipment including plasma generating element 2E The structure of 1E.
Also, plasma generating element 2E includes multiple coated wires 10, thus compared with embodiment one, can spread Wider scope purified treatment object gas.
In addition, the air supply direction of process object gas is preferably that the first conductive component 21E and the second conductive component 22E is arranged Direction.
(embodiment six)
Figure 13 is the schematic top view to indicate the plasma generating element of embodiment six.Referring to Fig.1 3, to embodiment party The plasma generating element 2F of formula six is illustrated.
As shown in figure 13, the plasma generating element 2F of embodiment six is generated with the plasma of embodiment five When element 2E is compared, the structure of conductive component 20F is different.Other structures are roughly the same.
Conductive component 20F includes the first conductive component 21F and the second conductive component 22F.First conductive component 21F and second Conductive component 22F has mesh shape, and the mesh shape refers to that multiple opening portions with rectangular shape are arranged in ranks shape Shape.
First conductive component 21F has multiple electric conductors 211,212 and framework 215.Multiple electric conductors 211 are parallel Ground configuration.When overlook view, multiple electric conductors 211 extend along the direction parallel with the extending direction of multiple coated wires 10. Multiple electric conductors 212 configure concurrently with each other.When overlook view, multiple electric conductors 212 are with substantially orthogonal with multiple electric conductors 211 Mode extend.Multiple electric conductors 211 and multiple electric conductors 212 are supported by framework 215.
Second conductive component 22F has multiple electric conductors 221,222 and framework 225.Multiple electric conductors 221 are parallel Ground configuration.Multiple electric conductors 221 in plan view, prolong along the direction parallel with the extending direction of multiple coated wires 10 It stretches.Multiple electric conductors 222 configure concurrently with each other.When overlook view, multiple electric conductors 222 with multiple electric conductors 221 substantially Orthogonal mode extends.Multiple electric conductors 221 and multiple electric conductors 222 are supported by framework 225.
First conductive component 21F and the second conductive component 22F has the multiple of the opening portion of regulation rectangular shaped opening Edge 231,232,233,234.
Multiple coated wires 10 are sandwiched by the first conductive component 21F and the second conductive component 22F.Multiple claddings are led Line 10 is when from the direction that the first conductive component 21F, multiple coated wires 10 and the second conductive component 22F are arranged, configuration At by pass through opposite to each other to edge center in a manner of in column-shaped arrange.
Specifically, multiple coated wires 10 it is each be configured to in each right of multiple opening portions that column direction configures It answers.When overlook view, each of multiple coated wires 10 is passed through in corresponding opening portion in the center of the opposite edge of line direction.
For example, under overlook view, a cladding being had in mind is led as one be conceived in multiple coated wires 10 Line 10 pass through regulation opening portion multiple edge 231,232,233,234 in opposite to each other to edge 231,233 center O1, O2。
Even situation configured as described above, the plasma generating element 2F of embodiment six has and embodiment five The roughly the same effect of plasma generating element 2E.
When overlook view, each center across the edge constituted in opening portion of multiple coated wires 10 makes as a result, From each being equidistant to clamping part of the apex at the both ends of the edge passed through.Thereby, it is possible to hand in clamping part and edge Generally uniform real estate is at plasma on the direction of fork.In turn, multiple clamping parts become and regularly arrange, can be on the whole Also plasma is substantially evenly generated.
(embodiment seven)
Figure 14 is the schematic top view to indicate the plasma generating element of embodiment seven.Referring to Fig.1 4, to embodiment party The plasma generating element 2G of formula seven is illustrated.
As shown in figure 14, the plasma generating element 2G of embodiment seven is generated with the plasma of embodiment six When element 2F is compared, multiple coated wires 10 and line direction it is different.It is then roughly the same about other structures.
It is more when from the direction that the first conductive component 21F, multiple coated wires 10 and the second conductive component 22F are arranged A coated wire 10 is configured to pass through regulation and be constituted the mesh shape that the first conductive component 21F and the second conductive component 22F have In the edge of the opening portion of shape, the mode at the center of edge adjacent to each other in column-shaped arrange.
The each of multiple coated wires 10 upwardly extends in the side parallel with the diagonal line of the opening portion with rectangular shape. When overlook view, multiple coated wires 10 it is each, the opening portion passed through it is each in, across edge adjacent to each other Center.
For example, under overlook view, a cladding being had in mind is led as one be conceived in multiple coated wires 10 The center O1 of the edge 231,234 adjacent to each other in multiple edge 231,232,233,234 of regulation opening portion of line 10, O3。
Even situation configured as described above, the plasma generating element 2F of embodiment seven has and embodiment six The roughly the same effect of plasma generating element 2F.
(embodiment eight)
Figure 15 is the schematic top view to indicate the plasma generating element of embodiment eight.Referring to Fig.1 5, to embodiment party The plasma generating element 2H of formula eight is illustrated.
As shown in figure 15, the plasma generating element 2H of embodiment eight is generated with the plasma of embodiment five When element 2E is compared, the structure of conductive component 20H is (specifically, the shape of the first conductive component 21H and the second conductive component 22H Shape) it is different.It is then roughly the same about other structures.
First conductive component 21H has multiple electric conductors 211, multiple electric conductors 212, multiple electric conductors 213 and framework 215。
Multiple electric conductors 211 extend along a first direction.Multiple electric conductors 212 are along the second party intersected with first direction To extension.Multiple electric conductors 213 extend along the third direction intersected with first direction and second direction.Multiple electric conductors 211, Multiple electric conductors 212 and multiple electric conductors 213 are supported by framework 215.
First conductive component 21H is made up of multiple electric conductors 211, multiple electric conductors 212 and multiple electric conductors 213 For with following mesh shape, that is, multiple opening portions with triangle are in the mesh shape of plane earth arrangement.
Second conductive component 22H also has and the first conductive component 21H same shape.Second conductive component 22E It is configured to the mesh shape for having following by multiple electric conductors 221, multiple electric conductors 222 and multiple electric conductors 223, That is, multiple opening portions with triangle are in the mesh shape of plane earth arrangement.
It is more when from the direction that the first conductive component 21H, multiple coated wires 10 and the second conductive component 22H are arranged A coated wire 10 is configured to be constituted across regulation in the edge of the opening portion of the mesh shape of triangle, adjacent to each other The mode at the center of edge is arranged in column-shaped.
Multiple coated wires 10 it is each, in the electric conductor 211 extended with each comfortable different directions, electric conductor 212 and lead The side that the extending direction of the electric conductor 211 of either one or two of electric body 213 is parallel upwardly extends.When overlook view, multiple claddings are led Line 10 it is each the opening portion passed through it is each in, across regulation opening portion edge in, by with said one electric conductor The center for the edge adjacent to each other that 211 different two electric conductors of others 212,213 are constituted.
For example, under overlook view, a cladding being had in mind is led as one be conceived in multiple coated wires 10 Line 10 passes through center O3, O4 of edge 232,232 adjacent to each other in multiple edge 231,232,233 of regulation opening portion.
Even situation configured as described above, the plasma generating element 2H of embodiment eight also has and embodiment Five plasma generating element 2E roughly the same effect.
(embodiment nine)
Figure 16 is the schematic top view to indicate the plasma generating element of embodiment nine.Referring to Fig.1 6, to embodiment party The plasma generating element 2I of formula nine is illustrated.
As shown in figure 16, the plasma generating element 2I of embodiment nine is generated with the plasma of embodiment eight When element 1H is compared, the extending direction of multiple coated wires 10 is different.It is then roughly the same about other structures.
It is more when from the direction that the first conductive component 21H, multiple coated wires 10 and the second conductive component 22H are arranged A coated wire 10 is configured to be constituted across regulation in the edge of the opening portion of the mesh shape of triangle, adjacent to each other The mode at the center of edge is arranged in column-shaped.
Multiple coated wires 10 it is each, in the electric conductor 211 extended with each comfortable different directions, electric conductor 212 and lead The side that the extending direction of the electric conductor 212 of either one or two of electric body 213 is parallel upwardly extends.When overlook view, multiple claddings are led Line 10 it is each the opening portion passed through it is each in, across regulation opening portion edge in, by with said one electric conductor The center for the edge adjacent to each other that 212 different two electric conductors of others 211,213 are constituted.
For example, under overlook view, a cladding being had in mind is led as one be conceived in multiple coated wires 10 Line 10 passes through center O5, O4 of edge 231,233 adjacent to each other in multiple edge 231,232,233 of regulation opening portion.
Even situation configured as described above, the plasma generating element 2I of embodiment nine also has and embodiment Eight plasma generating element 2H roughly the same effect.
(embodiment ten)
Figure 17 is the schematic top view to indicate the plasma generating element of embodiment ten.Referring to Fig.1 7, to embodiment party The plasma generating element 2J of formula ten is illustrated.
As shown in figure 17, the plasma generating element 2J of embodiment ten is generated with the plasma of embodiment five When element 2E is compared, the structure of conductive component 20J is (specifically, the shape of the first conductive component 21J and the second conductive component 22J Shape) it is different.It is then roughly the same about other structures.
First conductive component 21J is configured to the mesh shape for having following, that is, multiple opening portions with hexagon shape are in The mesh shape of plane earth arrangement.Second conductive component 22J has the diameter roughly the same with the first conductive component 21J.Second leads Electrical components 22J is configured to the mesh shape for having following, that is, multiple opening portions with hexagon shape are in the net of plane earth arrangement Mesh shape.
Feelings from the direction that the first conductive component 21J, multiple coated wires 10 and the second conductive component 22J are arranged Under condition (when overlook view), multiple coated wires 10 are configured to pass through the opening portion that regulation is constituted the mesh shape of hexagon shape Edge in, opposite to each other to edge center mode in column-shaped arrange.
When overlook view, multiple coated wires 10 it is opposite with three groups of opening portion of regulation hexagon shape to edge Any group in (231,234), (232,235), (233,236) it is opposite to edge (232, the 235) direction that arranges it is parallel Side upwardly extends.
When overlook view, multiple coated wires 10 it is each pass through constitute three pairs of hexagon shaped opening portion it is opposite to side Portion (231,234), (232,235), a pair in (233,236) it is opposite to edge (232,235) center (O12, O15).
Even situation configured as described above, the plasma generating element 2J of embodiment ten has and embodiment five The roughly the same effect of plasma generating element 2E.
(embodiment 11)
Figure 18 is the schematic top view to indicate the plasma generating element of embodiment 11.Referring to Fig.1 8, to implementation The plasma generating element 2K of mode 11 is illustrated.
As shown in figure 18, the plasma generating element 2K of embodiment 11 is raw with the plasma of embodiment ten When comparing at element 2J, the extending direction of multiple coated wires 10 is different.It is then roughly the same about other structures.
Feelings from the direction that the first conductive component 21J, multiple coated wires 10 and the second conductive component 22J are arranged Under condition (when overlook view), multiple coated wires 10 are configured to pass through the opening portion that regulation is constituted the mesh shape of hexagon shape Edge in, opposite to each other to edge center mode in column-shaped arrange.
When overlook view, multiple coated wires 10 it is each it is opposite with three groups of opening portion of regulation hexagon shape to Edge (231,234), (232,235), any group in (233,236) it is opposite to the parallel direction of edge (232,235) on Extend.
When overlook view, multiple coated wires 10 it is each the opening portion passed through it is each in, pass through regulation opening portion Three groups it is opposite to edge (231,234), (232,235), in (233,236), it is opposite with above-mentioned one group to edge (232, 235) in different multiple edge 231,233,234,236, it is opposite with above-mentioned one group to edge (232,235) parallel side Upwards it is opposite to two groups of edge (231,233), (234,236) the center of any one.
For example, under overlook view, a cladding being had in mind is led as one be conceived in multiple coated wires 10 Line 10 pass through it is opposite with above-mentioned one group to edge (232,235) parallel direction on respect to two groups of edge (231, 233), in (234,236), it is opposite to edge (231,233) center (O11, O13).
When being conceived to another coated wire, under overlook view, the coated wire 10 pass through with above-mentioned one group of phase On the parallel direction of opposite edge (232,235) it is opposite to two groups of edge (231,233), in (234,236), with respect to The center (O14, O16) of edge (234,236).
Even situation configured as described above, the plasma generating element 2K of embodiment 11 also has and embodiment party The same above effect of the plasma generating element 2J of formula ten.By increasing the quantity of clamping part, plasma can be increased Production quantity.
(embodiment 12)
Figure 19 is the schematic top view to indicate the plasma generating element of embodiment 12.Referring to Fig.1 9, to implementation The plasma generating element 2L of mode 12 is illustrated.
As shown in figure 19, the plasma generating element LK of embodiment 12 is raw with the plasma of embodiment ten When comparing at element 2J, the extending direction of multiple coated wires 10 is different.It is then roughly the same about other structures.
Feelings from the direction that the first conductive component 21J, multiple coated wires 10 and the second conductive component 22J are arranged Under condition (when overlook view), multiple coated wires 10 are configured to pass through the opening portion that regulation is constituted the mesh shape of hexagon shape Edge in, the mode at the center of edge adjacent to each other arranges in column-shaped.
When overlook view, multiple coated wires 10 it is opposite with three groups of opening portion of regulation hexagon shape to edge Any group in (231,234), (232,235), (233,236) it is opposite to edge (231, the 234) direction that arranges it is parallel Side upwardly extends.
When overlook view, multiple coated wires 10 it is each the opening portion passed through it is each in, pass through regulation opening portion Three groups it is opposite to edge (231,234), (232,235), in (233,236), it is opposite with above-mentioned one group to edge (231, 234) in different multiple edge 231,233,234,236, two groups of edge adjacent to each other (232,233), (235,236) are appointed The center of one.
For example, under overlook view, a cladding being had in mind is led as one be conceived in multiple coated wires 10 Line 10 pass through above-mentioned two groups of edge adjacent to each other (232,233), in (235,236), edge adjacent to each other (232,233) Center (O12, O13).
When being conceived to another coated wire, under overlook view, which passes through above-mentioned two groups phases each other In adjacent edge (232,233), (235,236), the center (O15, O16) of edge adjacent to each other (235,236).
Even situation configured as described above, the plasma generating element 2L of embodiment 12 also has and embodiment party The plasma generating element 2J of formula ten roughly the same effect.
(embodiment 13)
Figure 20 is the schematic top view to indicate the plasma generating element of embodiment 13.Referring to Figure 20, to implementation The plasma generating element 2M of mode 13 is illustrated.
As shown in figure 20, the plasma generating element 2M of embodiment 13 is raw with the plasma of embodiment ten When comparing at element 2J, the extending direction of multiple coated wires 10 is different.It is then roughly the same about other structures.
Feelings from the direction that the first conductive component 21J, multiple coated wires 10 and the second conductive component 22J are arranged Under condition (when overlook view), multiple coated wires 10 are configured to pass through the opening portion that regulation is constituted the mesh shape of hexagon shape Edge in, the center of edge adjacent to each other, and pass through opposite to each other to edge center mode in column-shaped arrangement.
When overlook view, multiple coated wires 10 it is opposite with three groups of opening portion of regulation hexagon shape to edge Any group in (231,234), (232,235), (233,236) it is opposite to edge (231, the 234) direction that arranges it is parallel Side upwardly extends.
When overlook view, a part of multiple coated wires 10 the opening portion passed through it is each in, pass through regulation opening Three groups of portion it is opposite to edge (231,234), (232,235), in (233,236), above-mentioned one group it is opposite to edge (231, 234) center (O11, O15).
When overlook view, the other parts of multiple coated wires 10 the opening portion passed through it is each in, opened across regulation Three groups of oral area it is opposite to edge (231,234), (232,235), in (233,236), it is opposite with above-mentioned one group to edge (231,234) in different multiple edge 231,233,234,236, two groups of edge adjacent to each other (232,233), (235, 236) center of any one.
For example, under overlook view, being had in mind as one in the other parts for being conceived to multiple coated wires 10 One coated wire 10 is in above-mentioned two groups of edge adjacent to each other (232,233), (235,236), edge adjacent to each other (232,233) center (O12, O13).
It, should under overlook view when another coated wire in the other parts for being conceived to multiple coated wires 10 Coated wire 10 pass through above-mentioned two groups of edge adjacent to each other (232,233), in (235,236), edge adjacent to each other (235, 236) center (O15, O16).
Even situation configured as described above, the plasma generating element 2L of embodiment 12 also has and embodiment party The same above effect of the plasma generating element 2J of formula ten.By increasing the quantity of clamping part, plasma can be increased Production quantity.
As that, to the plasma generating element of embodiment 12, can be suitably designed from above embodiment six The shape of the opening portion of conductive component, and suitably adjusted and suitably change multiple coated wires 10 and line direction more The quantity of a clamping part.Thereby, it is possible to adjust plasma production quantity.
(embodiment 14)
Figure 21 is the summary stereogram to indicate the plasma generating equipment of embodiment 14.
Figure 22 is the sectional view to indicate the plasma generating element of embodiment 14.Referring to Figure 21 and Figure 22, to reality The plasma generating equipment 1N and plasma generating element 2N for applying mode 14 are illustrated.
As shown in Figure 21 and Figure 22, the plasma generating equipment 1N of embodiment 14 with embodiment one it is equal from When daughter generating means 1 are compared, the structure (specifically, being structure of conductive component 20N) of plasma generating element 2N is no Together.It is then roughly the same about other structures.
Conductive component 20N is made of half cartridge unit of the extending direction extension along coated wire 10.From coated wire When 10 extending direction observation, conductive component 20N has U-shaped.Conductive component 20N has inner peripheral surface 20Na, the inner peripheral surface 20Na is bent in a manner of sandwiching coated wire 10 on the direction intersected with the extending direction of coated wire 10.Along cladding When the extending direction observation of conducting wire 10, inner peripheral surface 20Na has substantially half-oval shaped.In addition, the shape of inner peripheral surface 20Na is not It is defined in half-oval shaped, or the semioval shape (half- of half oblong shape, half rail shape and half ovum type shape etc. oval shape)。
Inner peripheral surface 20Na has the first contact portion P1 and the second contact portion P2, the first contact portion P1 in from coated wire 10 observation Shi Congyi side contacts coated wires 10, the second contact portion P2 is when from coated wire 10 from another side contacts Coated wire 10.First contact portion P1 and the second contact portion P2 extends along the extending direction of coated wire 10.
Be made up of clamping part the first contact portion P1 and the second contact portion P2, the clamping part with coated wire 10 Coated wire 10 is sandwiched on the direction that extending direction intersects and is kept.Inner peripheral surface 20Na has shape as described above, Thereby, it is possible to considerably expand the region for the plasma generating unit being formed near clamping part.
When from the extending direction of coated wire 10, conductive component 20 has through the one end of inner peripheral surface 20Na and interior The opening face of the another side defined of circumferential surface 20Na.Conductive component 20 has anti-delinking part 27, the anti-delinking part and inner peripheral surface One of one end and another side of 20Na connection, for preventing coated wire 10 from falling off from above-mentioned opening surface side.Anti-delinking part 27 are arranged in a manner of the perimeter surface close to coated wire 10.
The side of high voltage circuit 50 is electrically connected by wiring 41 with conductor wire 11.The other side of high voltage circuit 50 is logical It crosses wiring 42 and is electrically connected with conductive component 20N.Multiple conductor wire 11 and conductive component 20N are applied by high voltage circuit 50 Thus identically as embodiment one high voltage generates plasma near clamping part.Also in the case, by that will lead Electrical components 20N ground connection, and even user touches and is exposed to the situation of external conductive component 20N and can also ensure that safety Property.
As described above, coated wire is due to being twisted together by the plasma generating element 2N of embodiment 14 each other, But it is thus constituted and the inner peripheral surface 20Na of the conductive component 20N with semi-barrel shape shape sandwiches coated wire 10, therefore energy Enough simplify its structure.It is accompanied by this, can also simplify the plasma generating equipment 1N's for having plasma generating element 2N Structure.
(embodiment 15)
Figure 23 is the sectional view to indicate the plasma generating element of embodiment 15.Referring to Figure 23, to embodiment 15 plasma generating element 2O is illustrated.
As shown in figure 23, the plasma generating element 2O of embodiment 15 is in the plasma with embodiment 14 When producing element 2N is compared, the shape (more specifically, the shape of inner peripheral surface 20Oa) of conductive component 20O is different.
Conductive component 20O is made of half cartridge unit of the extending direction extension along coated wire 10.From coated wire When 10 extending direction observation, conductive component 20O has U-shaped.Conductive component 20O has inner peripheral surface 20Oa, the inner peripheral surface 20Oa is bent in a manner of sandwiching coated wire 10 on the direction intersected with the extending direction of coated wire 10.Along cladding When the extending direction observation of conducting wire 10, inner peripheral surface 20Oa has substantially semi-circular shape.There is substantially semicircle by inner peripheral surface 20Oa Shape can considerably make the area for the plasma generating unit being formed near clamping part compared with embodiment 14 Domain stenosis is narrow.
Even situation configured as described above, the plasma generating element 2O of embodiment 15 can also be obtained and reality Apply the roughly the same effect of the plasma generating element 2N of mode 14.
(embodiment 16)
Figure 24 is the sectional view to indicate the plasma generating element of embodiment 16.Referring to Figure 24, to embodiment 16 plasma generating element 2P is illustrated.
As shown in figure 24, the plasma generating element 2P of embodiment 16 is in the plasma with embodiment 14 When producing element 2N is compared, the shape of conductive component 20P is different.It is then roughly the same about other structures.
Conductive component 20P is made of half cartridge unit of the extending direction extension along coated wire 10.From coated wire When 10 extending direction observation, conductive component 20P has U-shaped.Conductive component 20P has inner peripheral surface 20Pa, the inner peripheral surface 20Pa is bent in a manner of sandwiching coated wire 10 on the direction intersected with the extending direction of coated wire 10.Along cladding When the extending direction observation of conducting wire 10, inner peripheral surface 20Pa has V-shape.There is substantially V-like shape by inner peripheral surface 20Pa, with Embodiment 14 is compared, and the region for being formed in the plasma generating unit near clamping part can be made roughly equal.
Even situation configured as described above, the plasma generating element 2P of embodiment 16 can also be obtained and reality Apply the roughly the same effect of the plasma generating element 2N of mode 14.
As, to the plasma generating element of embodiment 16, can suitably changed from above embodiment 14 Become the shape with the conductive component 20N, 20O, 20P of semi-barrel shape shape, and increases the freedom degree of the processing of conductive component.Preferably Conductive component is suitably selected according to the difficulty processed.
(embodiment 17)
Figure 25 is the summary stereogram to indicate the plasma generating equipment of embodiment 17.Referring to Figure 25, to implementation The plasma generating equipment 1Q of mode 17 is illustrated.
As shown in figure 25, the plasma generating equipment 1Q of embodiment 17 is raw with the plasma of embodiment one When comparing at device 1, the structure (specifically, structure of conductive component 20Q) of plasma generating element 2Q is different.About it His structure is then roughly the same.
Plasma generating element 2Q includes coated wire 10 and multiple conductive component 20Q.Multiple conductive component 20Q along The extending direction of coated wire 10 is arranged.
Multiple conductive component 20Q's is each containing plate-like portion 21Q and winder 28Q.When overlook view, plate-like portion 21Q with The mode intersected with the extending direction of coated wire 10 extends.Plate-like portion 21Q is contacted with the main surface of side with coated wire 10 Mode configure.
Winder 28Q is the state that one end and plate-like portion 21Q connection and another side are wound in coated wire 10.Volume Around portion, 28Q sandwiches coated wire 10 and is kept.Pass through the inner peripheral surface of the winder 28Q of the part contacted with coated wire 10 To constitute clamping part.
Figure 26 be to indicate the conductive component of embodiment 17 winding before state summary stereogram.Referring to figure 26, the state before the winding of the conductive component 20Q of embodiment 17 is illustrated.
As shown in figure 26, the state before the winding of conductive component 20Q is cut by a part setting in plate-like portion 21Q Mouthful, and the sheet metal portion 28Q1 of coated wire 10 can be wound in plate-like portion 21Q setting.By the free end of sheet metal portion 28Q1 That is winder 28Q is consequently formed on coated wire 10 in another side.
The side of high voltage circuit 50 is electrically connected by wiring 41 with conductor wire 11.The other side of high voltage circuit 50 is logical It crosses wiring 42 and is electrically connected with multiple conductive component 20Q.Multiple conductive component 20Q are connected in parallel.
Apply high voltage between conductor wire 11 and each conductive component 20Q by high voltage circuit 50, thus with embodiment party Formula one in the same manner, can generate plasma near clamping part.Even if also, connecing in coated wire 10 and plate-like portion 21Q Near contact portion, plasma can be also generated.Also in the case, by the way that conductive component 20Q to be grounded, and even user touches It touches and is exposed to the situation of external conductive component 20Q and can also ensure that safety.
As described above, the not twisted coated wire of the plasma generating element 2Q of embodiment 17 is each other, but By the way that a winder 28Q made of coated wire 10 of the plate-like portion 21Q of sheet metal is sandwiched coated wire 10 It constitutes, therefore its structure can be simplified.It is accompanied by this, it is raw can also to simplify the plasma including plasma generating element 2Q At the structure of device 1Q.
In addition, being made up of although example goes out multiple plate-like portion 21Q and multiple winder 28Q in embodiment 14 The case where conductive component 20Q, is simultaneously illustrated, and but not limited to this, can also pass through the plate-like portion 21Q and odd number of odd number Winder 28Q constitute.
(embodiment 18)
Figure 27 is the summary stereogram to indicate the plasma generating element of embodiment 18.Referring to Figure 27, to implementation The plasma generating element 2R of mode 18 is illustrated.
As shown in figure 27, the plasma generating element 2R of embodiment 18 with described in embodiment 17 it is equal from When daughter producing element 2Q is compared, the structure of conductive component 2OR is different.It is then roughly the same about other structures.
The plate-like portion 21Q of conductive component 20R has a projecting strip part 23R, and the projecting strip part 23R is from being located at and be connected to cladding and lead The direction that the main surface of 10 opposite side of line is directed away from coated wire 10 is prominent.Projecting strip part 23R along plate-like portion 21Q extension side To extension.
Plate-like portion 21Q, projecting strip part 23R and winder 28Q are made of a component.Plate-like portion 21Q and projecting strip part 23R is logical Crossing bending has the sheet metal of writing board shape and is formed.Constituted plate-like portion 21Q's and projecting strip part 23R from different components as a result, Situation is compared, and can save makes different components affixed labour, time each other, and can reduce manufacturing cost.
Even situation configured as described above, the plasma generating element 2R of embodiment 18 can also be obtained and reality Apply the roughly the same effect of the plasma generating element 2Q of mode 17.
By being set as described above projecting strip part 23R, the rigidity of plate-like portion 21Q can be improved.Thus, it is possible to improve plate-like portion The close contact of 21Q and coated wire 10.As a result, it is possible to prevent from winding because plate-like portion 21Q is separated from coated wire 10 The case where winding of portion 28Q is disengaged.
(embodiment 19)
Figure 28 is the summary stereogram to indicate the plasma generating element of embodiment 19.Referring to Figure 28, to implementation The plasma generating element 2S of mode 19 is illustrated.
As shown in figure 28, the plasma generating element 2S of embodiment 19 is in the plasma with embodiment 17 When producing element 2Q is compared, the structure of conductive component 2OS is different.It is then roughly the same about other structures.
Conductive component 20S includes plate-like portion 21Q, the first winder 28S1 and the second winder 28S2.First winder 28S1 and the second winder 28S2 is arranged along the extending direction of coated wire 10.First winder 28S1 and the second winder 28S2's is each, and one end is connected to plate-like portion 21Q, and another side is wound on coated wire 10.First winder 28S1 and Two winder 28S2 are opposite.Thus, it is possible to which the first winder 28S1 and the reeling condition of the second winder 28S2 is inhibited to be solved It opens.
Figure 29 be to indicate the conductive component of embodiment 19 winding before state summary stereogram.Referring to figure 29, the state before the winding of the conductive component 20S of embodiment 19 is illustrated.
As shown in figure 29, in conductive component 20S winding before state when, plate-like portion 21Q have with extension side The stretching extension 29S of stretching is stretched out on orthogonal direction.In stretching extension 29S, cladding can be wound in by, which being linked with, is led Sheet metal portion 28S11,28S12 of line 10.
The side of sheet metal portion 28S11 towards the extending direction of plate-like portion 21Q extends.Sheet metal portion 28S12 is towards plate The other side of the extending direction of portion 21Q extends.Sheet metal portion 28S11 and sheet metal portion 28S12 along extension 29S stretching side To arrangement.By the way that respective free end, that is, another side of the sheet metal portion 28S11 and sheet metal portion 28S12 are wound in cladding Conducting wire 10 forms the first winder 28S1 and the second winder 28S2.
Even situation configured as described above, the plasma generating element 2S of embodiment 19 can also be obtained and reality Apply the roughly the same effect of the plasma generating element 2Q of mode 17.
In addition, in embodiment 19, although example goes out the situation that the quantity of winder is two and is illustrated, But not limited to this, and the quantity of winder can also be one or three or more.As described, by suitably adjusting multiple windings The quantity in portion, adjustable plasma production quantity.
(embodiment 20)
Figure 30 is the summary stereogram to indicate the plasma generating equipment of embodiment 20.Referring to Figure 30, to implementation The plasma generating equipment 1T of mode 20 is illustrated.
As shown in figure 30, the plasma generating equipment 1T of embodiment 20 is raw with the plasma of embodiment one When comparing at device 1, the structure of plasma generating element 2T is different.It is then roughly the same about other structures.
Plasma generating element 2T includes multiple coated wires 10 and multiple conductive component 20T.Multiple coated wires 10 It configures concurrently with each other.Multiple conductive component 20T are arranged to respectively correspond multiple coated wires 10.
The each of multiple conductive component 20T is made of multiple endless member 21T.Multiple endless member 21T are along cladding The extending direction of conducting wire 10 is arranged and is configured.Each inner peripheral surface of multiple endless member 21T spreads circumferential direction and coated wire 10 periphery face contact.
The each of multiple endless member 21T sandwiches coated wire 10 and is kept.Pass through the inner peripheral surface of endless member 21T Constitute clamping part, and be equipped with by endless member 21T it is multiple, and clamping part be also equipped with it is multiple.
Multiple endless member 21T are connected by conductive connecting component 60.Connecting component 60 is for example with stick Shape, and extend along the extending direction of coated wire 10.
The side of high voltage circuit 50 is electrically connected by wiring 41 with multiple conductor wires 11.Multiple conductor wires 11 are in parallel even It connects.The other side of high voltage circuit 50 is electrically connected by wiring 42 and connecting component 60 with multiple each of conductive component 20T. Multiple conductive component 20T are connected in parallel.
Apply high electricity respectively between each and multiple conductive component 20T of multiple conductor wires 11 by high voltage circuit 50 Pressure, thus identically as embodiment one, generates plasma near multiple clamping parts.
As described above, the not twisted coated wire of the plasma generating element 2T of embodiment 20 is each other, but Coated wire 10 is sandwiched by each inner peripheral surface of multiple endless member 21T thus to constitute, therefore can simplify its structure. It is accompanied by this, also can simplify the structure of the plasma generating equipment 1T including plasma generating element 2T.
In addition, though illustrating plasma producing element 2T is by multiple coated wires 10 and multiple conductive component 20T And the case where constituting and be illustrated, but not limited to this, can also pass through the coated wire 10 of odd number and leading for odd number Electrical components 20T is constituted.
In addition, in embodiment 20, although illustrating conductive component 20T is made of multiple endless member 21T Situation is simultaneously illustrated, and but not limited to this, can also be made of the endless member of odd number.
(embodiment 21)
Figure 31 is the sectional view to the internal structure for indicating the air cleaner of embodiment 21.Figure 32 is embodiment The rearview of 21 air cleaner.Referring to Figure 31 and Figure 32, the air cleaner of embodiment 21 is said It is bright.In addition, air cleaner 200 be include plasma generating equipment electronic equipment an example, as plasma Generating means, such as the plasma generating equipment 1A of embodiment two can be used.In addition, will be wrapped in Figure 31 and Figure 32 The each of the multiple coated wires being contained in plasma generating equipment 1A is used as coated wire 10 to be illustrated.
As shown in Figure 31 and Figure 32, air cleaner 200 includes plasma generating equipment 1A, is provided with suction inlet 220 With the body part 210 of outlet 230, air-supply path 240 and as the pressure fan 250 of air supplying part.
Suction inlet 220 is arranged on the back side of body part 210.Outlet 230 is arranged on the top of body part 210. Air-supply path 240 is arranged in body part 210, and suction inlet 220 and outlet 230 are connected.It is provided in air-supply path 240 Pressure fan 250.The a part in air-supply path 240 is provided by the shell of pressure fan 250.
Pressure fan 250 will blow from the air that suction inlet 220 sucks towards outlet 230.It can make as pressure fan 250 With various pressure fan such as Sirocco fan (sirocco fan), cross flow fans (cross flow fan).
Plasma generating equipment 1A configuration is in air-supply path 240.Specifically, plasma generating equipment 1A configuration exists Position near suction inlet 220 or the air-supply path 240 between pressure fan 250 and outlet 230.Plasma generates Device 1A is configured in the substantially orthogonal mode of the extending direction of coated wire 10 and air supply direction.Specifically, plasma is raw The virtual plane being arranged at device 1A with multiple coated wires 10 mode substantially orthogonal with air supply direction configures.In addition, The pressure loss of preferably air-supply of the plasma generating equipment 1A to blow configures in a manner of becoming smaller.
Plasma generating equipment 1A is so configured, and plasma is generated by one side, is bypassed air through on one side Gas ions generating means 1A, thereby, it is possible to carry out bacterium present in air, virus lose activity, alternatively, be included in stink Deng air in foreign gas decomposition removal.Thereby, it is possible to purify from suction inlet 220 suck air with will be from outlet 230 discharged air.As a result, it is possible to clean air is discharged from outlet 230.
(embodiment 22)
Figure 33 is the sectional view to the internal structure for indicating the air cleaner of embodiment 22.Figure 34 is embodiment The rearview of 22 air cleaner.Referring to Figure 33 and Figure 34, to the air cleaner 200A of embodiment 22 into Row explanation.
As shown in Figure 33 and Figure 34, the air cleaner 200A of embodiment 22 is in the sky with embodiment 21 When gas branner 200 is compared, the setting direction of plasma generating equipment 1A is different.It is then roughly the same about other structures.
Plasma generating equipment 1A configuration is in air-supply path 240.Specifically, plasma generating equipment 1A configuration exists Position near suction inlet 220 or the air-supply path 240 between pressure fan 250 and outlet 230.Plasma generates Device 1A is configured in the substantially parallel mode of the extending direction of coated wire 10 and air supply direction.Even so configuration etc. from Clean air can be also discharged in the case where daughter generating means 1A from outlet 230.
(embodiment 23)
Figure 35 is the sectional view to the internal structure for indicating the air cleaner of embodiment 23.Figure 36 is embodiment The rearview of 23 air cleaner.Referring to Figure 35 and Figure 36, to the air cleaner 200B of embodiment 23 into Row explanation.
As shown in Figure 35 and Figure 36, the air cleaner 200B of embodiment 23 is in the sky with embodiment 21 When gas branner 200 is compared, the structure of plasma generating equipment is different.In embodiment 23, as plasma Generating means use the plasma generating equipment 1T of embodiment 20.
Plasma generating equipment 1T configuration is in air-supply path 240.Specifically, plasma generating equipment 1T configuration exists Position near suction inlet 220 or the air-supply path 240 between pressure fan 250 and outlet 230.Plasma generates Device 1T is configured in the substantially orthogonal mode of the extending direction of coated wire 10 and air supply direction.Specifically, plasma is raw The virtual plane being arranged at device 1T with multiple coated wires 10 mode substantially orthogonal with air supply direction configures.Even The case where so configuration plasma generating equipment 1T, clean air can also be discharged from outlet 230.
In addition, though clear to air as an example of electronic equipment from embodiment 21 to 23 Net machine is illustrated, but the present invention is not limited thereto, and electronic equipment can be also in addition to this air conditioner (air conditioning dress Set), freezing equipment, dust catcher, humidifier, dehumidifier etc., as long as having when sucking air and being blown, for making air Pass through the electronic equipment of the air supplying part of plasma generating equipment 1A, 1T.
In addition, in embodiment 21 into embodiment 23, although example goes out to be used as plasma to generate dress It sets and using the situation of plasma generating equipment 1A, 1T of embodiment two and embodiment 20 and is illustrated, but It is to be not limited to this, it is possible to use the plasma generating equipment of above embodiment one, three to 19 and variation.
More than, though having explained the embodiment of the present invention, embodiment of disclosure is in all sides Face is all illustration rather than restrictive content.The scope of the present invention indicated by claims, includes and claim Being had altered in the equivalent meaning and range.
Description of symbols
1,1A, 1B, 1D, 1E, 1N, 1Q, 1T plasma generating equipment,
2,2A,2B,2B1,2C,2D,2E,2F,2G,2H,2I,2J,2K,2L,2M,2N,2O,2P,
2Q, 2R, 2S, 2T, LK plasma generating element,
10,10A, 10B, 10C coated wire,
11 conductor wires,
12 covering portion,
20,20A,20B,20B2,20B3,20B1,20C,20C1,20E,20F,20H,20J,20N,20O,
20P, 20Q, 20R, 20S, 20T conductive component,
20Na, 20Oa inner peripheral surface,
The first plate-like portion of 21,21B,
The first conductive component of 21E, 21F, 21H, 21J,
21Q plate-like portion,
21T endless member,
The second plate-like portion of 22,22B,
The second conductive component of 22E, 22F, 22H, 22J,
The first projecting strip part of 23,23C,
23R projecting strip part,
The second projecting strip part of 24,24C,
27 anti-delinking parts,
28Q winder,
28Q1,28S11,28S12 sheet metal portion,
The first winder of 28S1,
The second winder of 28S2,
29S stretching extension,
30,30A, 30D support member,
The first support member of 31,31A, 31D,
The second support member of 32,32A, 32D,
41,42 wirings,
50 high voltage circuits,
60 connecting components,
211,212,213 electric conductors,
215 frameworks,
221,222,223 electric conductors,
225 frameworks,
231,232,233,234 edge,
301 first recess portions,
302 second recess portions,
303 third recess portions,
311 first parts,
312 second parts,
313 interconnecting pieces,
321 first parts,
322 second parts,
323 interconnecting pieces.

Claims (7)

1. a kind of plasma generating element characterized by comprising
Coated wire, the covering portion comprising conductor wire described in conductor wire and insulating wrapped；And
Conductive component is configured adjacently in a manner of contacting the covering portion at least partially with the coated wire,
The conductive component has the clamping part of at least more than one, and the clamping part is in the extending direction with the coated wire The coated wire is sandwiched on the direction of intersection and is kept,
Plasma is generated near the clamping part and application voltage between the conductor wire and the conductive component.
2. plasma generating element as described in claim 1, which is characterized in that the conductive component includes from the cladding Configuration configures in the first plate-like portion of side and when from the coated wire from the second plate in the other side when conducting wire is observed Portion,
First plate-like portion has the first contact portion contacted with the coated wire,
Second plate-like portion has the second contact portion contacted with the coated wire,
The clamping part is made up of first contact portion and second contact portion.
3. plasma generating element as claimed in claim 2, which is characterized in that first plate-like portion has the first ridge Portion, first projecting strip part are directed away from institute from the main surface being located at the main surface opposite side for being connected to the coated wire The direction for stating coated wire is prominent, and extends along the direction that first plate-like portion extends,
Second plate-like portion has the second projecting strip part, and second projecting strip part is from being located at and week for being connected to the coated wire The main surface of face opposite side is directed away from the direction side that is prominent, and extending along second plate-like portion of the coated wire To extension.
4. plasma generating element as described in claim 1, which is characterized in that the conductive component is flanked by inner circumferential It touches one or more endless members in the coated wire and constitutes,
The clamping part is constituted and being the inner peripheral surface by being contacted with the endless member of the coated wire.
5. plasma generating element as described in claim 1, which is characterized in that the conductive component is by along described Half cartridge unit that the extending direction of coated wire extends and constitute,
Half cartridge unit has to sandwich the cladding on the direction that the extending direction with the coated wire intersects The curved inner peripheral surface of the mode of conducting wire,
The clamping part is made up of the inner peripheral surface of the part contacted with the coated wire.
6. plasma generating element as described in claim 1, which is characterized in that the conductive component include and the cladding The plate-like portion and one end of conductive contact and plate-like portion connection and another side are wound in one of the coated wire Or multiple winders,
The clamping part is constituted and being the inner peripheral surface of the winder of the part by contacting with the coated wire.
7. a kind of plasma generating element characterized by comprising
Multiple coated wires, the covering portion comprising conductor wire described in conductor wire and insulating wrapped, and configure concurrently with each other；And
Conductive component is configured adjacently in a manner of contacting the covering portion at least partially with the multiple coated wire,
The conductive component is led with the multiple cladding is sandwiched on the direction that the extending direction with the coated wire intersects Line and the multiple clamping parts kept,
The first conductive component for configuring when the conductive component includes from the coated wire from side and from the cladding The second conductive component in the other side is configured when conducting wire is observed,
First conductive component have the first contact portion group, the first contact portion group have mesh shape, and with it is described Multiple coated wire contacts,
Second conductive component has the second contact portion group, and the second contact portion group has and first conductive component pair The mesh shape answered, and contacted with the multiple coated wire,
The multiple clamping part is made up of the first contact portion group and the second contact portion group,
By between the conductor wire and the conductive component apply voltage and near the multiple clamping part generate etc. from Daughter.
CN201780014636.3A 2016-09-02 2017-02-03 Plasma generating element Pending CN109644546A (en)

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