CN109632450A - A kind of mechanism for seal chamber vivo sample cooling and transmission - Google Patents
A kind of mechanism for seal chamber vivo sample cooling and transmission Download PDFInfo
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- CN109632450A CN109632450A CN201811375007.6A CN201811375007A CN109632450A CN 109632450 A CN109632450 A CN 109632450A CN 201811375007 A CN201811375007 A CN 201811375007A CN 109632450 A CN109632450 A CN 109632450A
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- sample
- transmission
- seal chamber
- cooling
- seal
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- 230000007246 mechanism Effects 0.000 title claims abstract description 31
- 230000005540 biological transmission Effects 0.000 title claims abstract description 30
- 238000001073 sample cooling Methods 0.000 title claims abstract description 15
- 238000012546 transfer Methods 0.000 claims abstract description 64
- 238000005516 engineering process Methods 0.000 claims abstract description 28
- 238000005057 refrigeration Methods 0.000 claims abstract description 27
- 238000001816 cooling Methods 0.000 claims abstract description 26
- 230000033001 locomotion Effects 0.000 claims abstract description 20
- 238000001514 detection method Methods 0.000 claims abstract description 7
- 239000000523 sample Substances 0.000 claims description 78
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 40
- 229910052757 nitrogen Inorganic materials 0.000 claims description 20
- 239000007788 liquid Substances 0.000 claims description 11
- 239000001307 helium Substances 0.000 claims description 6
- 229910052734 helium Inorganic materials 0.000 claims description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 6
- 230000002792 vascular Effects 0.000 claims description 4
- 238000012360 testing method Methods 0.000 claims description 3
- 241000826860 Trapezium Species 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 abstract description 12
- 238000010884 ion-beam technique Methods 0.000 abstract description 8
- 238000012545 processing Methods 0.000 abstract description 5
- 238000012512 characterization method Methods 0.000 abstract description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 18
- 229910052802 copper Inorganic materials 0.000 description 18
- 239000010949 copper Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 11
- 239000004677 Nylon Substances 0.000 description 5
- 229920001778 nylon Polymers 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- -1 polytetrafluoroethylene Polymers 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007687 exposure technique Methods 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003137 locomotive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/42—Low-temperature sample treatment, e.g. cryofixation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention discloses a kind of mechanisms for seal chamber vivo sample cooling and transmission, comprising: cooling cryogenic refrigeration unit is carried out to the seal cavity；It is arranged in the intracorporal moveable sample stage of seal chamber；Transfer levers for being shifted between two or more seal cavities to sample.The cooling transmitting device of sample proposed by the present invention, it is mountable in the micro-nano technology equipment containing electron beam source or ion beam source such as scanning electron microscope, transmission electron microscope, electron beam exposure apparatus, focused ion beam microscope, it realizes and cools down sample in a vacuum, and then characterization detection or processing are carried out to the sample under low-temperature condition.Sample stage is allowed to carry out the movement of micron accuracies simultaneously, and by sample transfer to other vacuum chambers, and in transmission process, sample is able to maintain low-temperature condition, to carry out subsequent operation.
Description
Technical field
The invention belongs to technical field of micro and nano fabrication, and in particular to a kind of for seal chamber vivo sample to be cooling and transmission
Mechanism.
Background technique
The cooling technology of sample is widely used in micro-nano technology and characterization technique, as Terahertz low-temperature superconducting is visited
Survey, electron cryo-microscopy technology, low temperature plasma lithographic technique, ice mask electron beam exposure technique etc..In these application scenarios,
It is generally necessary to which sample to be cooled to liquid nitrogen temperature (77K) even liquid helium temperature (4K) in the vacuum environment of micro-nano technology equipment.
In order to realize sample characterization and the processing of fixed point, the position of accurate movement sample is needed, the vibration of sample is effectively completely cut off.Sometimes it is
Preamble or subsequent operation are carried out to sample, it is also necessary under conditions of keeping sample low temperature, by sample in different vacuum chambers
Between shift.
And existing vacuum and low temperature sample stage is often fixed, and can not turn sample between different vacuum chambers
It moves, even if some can be moved, the shift motion of sample also very little.
In conclusion low temperature can be cooled to for sample in micro-nano technology equipment by how providing one kind, and allow sample
High precision movement and the cooling transmitting device of the sample shifted between vacuum cavity, are that those skilled in the art need to solve at present
Technical problem.
Summary of the invention
The object of the present invention is to provide a kind of for the mechanism that seal chamber vivo sample is cooling and transmits, and is implemented for
The transmission of cooling and high-precision, the movement of big stroke and sample between vacuum chamber to sample in vacuum.
Seal cavity of the invention can be the test chamber of micro-nano technology equipment, and the micro-nano technology equipment, which can be, sweeps
It retouches electron microscope, transmission electron microscope, electron beam exposure apparatus, focused ion beam microscope etc. and contains electron beam source or ion
The micro-nano technology equipment of electron gun.Seal cavity of the invention can be obtained on the basis of existing micro-nano technology equipment it is close
Chamber is sealed, the seal chamber redesigned is also possible to.
A kind of mechanism for seal chamber vivo sample cooling and transmission, comprising:
Cooling cryogenic refrigeration unit is carried out to the seal cavity；
It is arranged in the intracorporal moveable sample stage of seal chamber；
Transfer levers for being shifted or being transmitted to sample between two or more seal cavities.
In the present invention, the cryogenic refrigeration unit can be Dewar container for liquefied nitrogen bottle structure or liquid helium Dewar bottle structure, vascular system
Cold, JT refrigeration machine or GM refrigeration machine etc..Cooling capacity and low is provided to seal cavity of the invention by above-mentioned cryogenic refrigeration mechanism
Warm environment.Preferably, the cryogenic refrigeration unit be Dewar container for liquefied nitrogen bottle structure when, the shell of Dewar container for liquefied nitrogen bottle with it is described close
Seal cavity sealing docking.
As a preference, heretofore described low temperature cold source is Dewar container for liquefied nitrogen (bottle), including shell, inner container bottle and connection
Pipe, the inner container bottle Base top contact connecting tube is fixed on the shell by connecting tube, the interlayer space between shell and inner container bottle with
The connection of seal cavity (such as micro-nano technology equipment) vacuum chamber, inner container bottle bottom of bottle are refrigeration end.Preferably, the Dewar container for liquefied nitrogen
Connecting tube has three, and every connection length of tube is not less than 20 centimetres, and thickness of pipe wall is no more than 1 millimeter.Pass through company to reduce inner container bottle
The leakage heat of adapter tube, extends the holding time of liquid nitrogen in inner container bottle.Preferably, the inner container bottle bottom of bottle material of the Dewar container for liquefied nitrogen is nothing
Oxygen copper.To reduce the thermal loss in heat transfer process as far as possible.
When using low temperature cold sources such as vascular refrigerator, JT refrigeration machine or GM refrigeration machines, cold head is its refrigeration end.
Preferably, further including low temperature baffle, which is connected with the refrigeration end of cryogenic refrigeration unit, another
End is goed deep into the seal cavity.Preferably, the low temperature barrier material is oxygen-free copper.To reduce in heat transfer process as far as possible
Thermal loss.
Preferably, the seal cavity is the test chamber of micro-nano technology equipment；
The low temperature baffle gos deep into the intracorporal one end of the seal chamber and extends to below detection probe, which is equipped with keeps away simultaneously
Allow the avoid holes of detection probe transmission path.For example, the low temperature baffle extends to micro-nano technology equipment electron beam source or ion
Below electron gun, and aperture (avoid holes) on the transmission path of electron beam or ion beam, to pass through electron beam or ion beam.
Preferably, the sample stage includes:
It is fixed on and is able to carry out three-dimensional mobile fixation specimen holder on three-dimensional motion mechanism；
The mobile example frame of sliding being arranged in fixed specimen holder, which can be in the effect of the transfer levers
Lower movement.
Preferably, the fixed specimen holder is equipped with dovetail groove, the mobile example frame is to cooperate with the dovetail groove
Trapezium structure.Using the structure, guarantee even if the mechanism inversion of cooling and transmission of the invention in use, mobile example frame not
It can fall off from fixed specimen holder.
As an implementation, the sample stage includes guide rail platform, support column, fixed specimen holder, mobile example frame.Institute
Guide rail platform is stated to be fixed on mobile station (or three-dimensional motion mechanism) by dovetail groove guide rail.The support column is fixed on guide rail platform
On, it is vertical with guide rail platform upper surface；Support column uses heat-insulating material.On the support columns, side is provided with the fixed specimen holder frame
Groove.The mobile example frame is identical as the groove on fixed specimen holder, can slide into groove, is bonded with fixed specimen holder；It is mobile
Specimen holder side is equipped with the locating piece for realizing positioning with transfer levers；For example the locating piece is to be provided with mobile example frame side
The threaded hole in face, threaded hole here can also be replaced by the locating piece of other structures certainly, for example, can be screw-rod structure or
It is also possible to the magnetic part being arranged or the slot for being also possible to engaging perhaps pore structure or the bulge-structure of engaging etc.,
It is relatively fixed with transfer levers to realize；Mobile example frame cross section is fillet trapezoid.
Preferably, support column material is nylon, to prevent the heat transfer between transfer screw rod and mobile example platform as far as possible.
Preferably, on the support columns, side is provided with groove to the fixed specimen holder frame.
The mobile example frame is identical as the groove on fixed specimen holder, can slide into groove, is bonded with fixed specimen holder；It moves
Dynamic specimen holder side is provided with a threaded hole.
Preferably, the groove is dovetail groove；The mobile example frame is the trapezoidal agllutination cooperated with the dovetail groove
Structure.Mobile example frame cross section is trapezoidal (can be more preferably fillet trapezoid).So that fixed specimen holder and movement
Even if specimen holder is inversely installed in vacuum equipment, mobile example frame will not be fallen, and can and be fixed specimen holder and closely connect
Touching, maintains good heat transfer
Preferably, the fixed specimen holder and mobile example frame material are oxygen-free copper.To reduce heat transfer process as far as possible
In thermal loss.
Preferably, the transfer levers front end is equipped with for realizing the second locating piece being fixed to each other with mobile example frame.
The structure of second locating piece is generally matched with the locating piece of mobile example frame side setting.For example it can be and be provided with transfer levers
The screw rod or magnetic part of front end or the bulge-structure of engaging or the slot or the pore structure that are also possible to engaging etc..
As a kind of embodiment, the transfer levers nose threads are fixed with transfer screw rod, pass through the realization of transfer screw rod and mobile example
Frame it is relatively fixed.As a kind of specific scheme, the transfer levers front end offers screw hole, to install transfer screw rod；Transfer
The material of screw rod is heat-insulating material.
Preferably, being equipped with flexible heat transfer piece between the low temperature baffle and fixed specimen holder.
Preferably, the flexible heat transfer piece includes and is not limited to oxygen-free copper braid over braid, red copper braid over braid, graphene band
Deng.The refrigeration end of low temperature cold source is fixed in flexible heat transfer piece one end, and the other end is fixed on fixed specimen holder.Realize low temperature cold source pair
The cooling of sample.
Preferably, heat-reflecting material is wrapped up outside flexible conductive structure, to reduce the heat as caused by heat radiation in diabatic process
Amount loss.
In addition to this, in the present invention, since the temperature of low temperature baffle is higher than the temperature of flexible heat transfer piece and sample stage, make
Obtaining low temperature baffle also has another important function, that is, the low temperature baffle in the present invention is adsorbed by the effect of cryogenic absorption
Residual particles and gas molecule in vacuum chamber, avoid them from being adsorbed on sample, contaminated samples.
Preferably, the three-dimensional motion mechanism is five-axle linkage mechanism.The five-axle linkage mechanism in addition to X, Y, Z axis,
There are one rotary shaft and a swinging axles.Rotary shaft can be A axis (X-axis) and be also possible to B (Y-axis) or C axis (Z axis), rotation
Axis can be with 360 degree rotation, swinging axle in addition to rotary shaft it is defined after (such as A axis), in remaining two axis one
A (such as B or C), swinging axle can generally be swung (90 degree such as positive and negative) in certain angle.Preferably, the three-dimensional
Movement mechanism realizes that mobile station (i.e.) can move in tri- directions in X, Y, Z by electro-mechanical devices or piezoelectric ceramics control movement, with this
Dynamic, moving range is not less than 100 millimeters × 100 millimeters × 10 millimeters, and mobile accuracy is not less than 1 micron；Can 360 ° rotation, inclination
Range is not less than -10 ° to 30 °, and inclination is not less than 0.1 ° with running accuracy.
In the present invention, the transfer levers can be any magnetic force transfer levers (or magnetic rod), mechanical transfer bar, manipulator
Sample tool is passed etc. common vacuum system, transfer levers front end is provided with screw hole, to install transfer screw rod.It is exhausted for shifting the material of screw rod
Hot material.As further preferred, in the present invention, the transfer levers can select the existing magnetic rod for item transfer.
Preferably, the transfer nut stem material is polytetrafluoroethylene (PTFE).To prevent transfer screw rod and mobile example platform as far as possible
Between heat transfer.
Sample cooling conveyer structure of the invention includes low temperature cold source, low temperature baffle, flexible heat transfer piece, three-dimensional motion machine
Structure, sample stage, transfer levers.The low temperature cold source is supported by shell, and is connect with micro-nano technology equipment cavity wall, and airtight vacuum is formed
Cavity.Low temperature baffle is fixed on low temperature cold source refrigeration end.The three-dimensional motion mechanism is in micro-nano technology equipment cavity, is loaded
Sample stage simultaneously drives its three-dimensional space locomotive function；The sample stage is connect with low temperature cold source by flexible conductive structure, is had
The function of sample low temperature environment is maintained, it can be achieved that disengaging, installation and three-dimensional of the sample in vacuum low-temperature environment are mobile；Transfer levers
Transfer transmission for cryogenic sample in vacuum environment.The cooling transmitting device of sample can be kept micro- with micro-nano technology integration of equipments
The sample received in process between the low-temperature vacuum environment and multiple tracks micro-nano technology process of sample is mobile, rotation and transmission.
The cooling transmitting device of sample proposed by the present invention, it is mountable in scanning electron microscope, transmission electron microscope, electricity
In the micro-nano technology equipment containing electron beam source or ion beam source such as beamlet exposure machine, focused ion beam microscope, realize true
Aerial cooling sample, and then characterization detection or processing are carried out to the sample under low-temperature condition.Sample stage is allowed to carry out micron simultaneously
The movement of class precision, and by sample transfer to other vacuum chambers, and in transmission process, sample is able to maintain low-temperature condition, with
Just subsequent operation is carried out.
Detailed description of the invention
Fig. 1 is a kind of specific embodiment of the cooling transmitting device of sample of micro-nano technology equipment provided by the present invention
Structural schematic diagram.
Fig. 2 is the amplification assumption diagram of part A in Fig. 1.
Fig. 3 is the state diagram that mobile example frame is detached from fixed specimen holder.
Specific embodiment
Core of the invention is to provide a kind of cooling transmitting device of sample of micro-nano technology equipment, this device it is mountable
Scanning electron microscope, transmission electron microscope, electron beam exposure apparatus, focused ion beam microscope etc. containing electron beam source or from
In the micro-nano technology equipment in beamlet source, realizes the cooling of sample in vacuum and high-precision, big stroke are mobile and sample is in vacuum
Transmission between chamber.
In order to enable those skilled in the art to better understand the solution of the present invention, with reference to the accompanying drawings and detailed description
Invention is further described in detail.
Fig. 1 is a kind of specific embodiment of the cooling transmitting device of sample of micro-nano technology equipment provided by the present invention
Structural schematic diagram.
Referring also to Fig. 2 and Fig. 3, the cooling transmission dress of the sample for the micro-nano technology equipment that the specific embodiment of the invention provides
It sets, including cryogenic refrigeration unit, low temperature baffle 4, flexible heat transfer piece, mobile station 6, sample stage, transfer levers 7.Flexible heat transfer piece is adopted
With oxygen-free copper braid over braid 5.
The structure of similar existing Dewar container for liquefied nitrogen bottle can be used in cryogenic refrigeration unit, but is in existing Dewar container for liquefied nitrogen bottle
Improved structure in structure, specifically includes shell 1, inner container bottle 2 and connecting tube 3, and shell 1 is fixed on the true of micro-nano technology equipment
In cavity cavity wall 9 (in the present embodiment micro-nano technology equipment be scanning electron microscope), when processing, can be processed as one structure,
Be also possible to by the connection types such as welding, flanged joint realize be fixed to each other so that cryogenic refrigeration unit low temperature cavity with
The vacuum chamber of micro-nano technology equipment forms integrated seal cavity.2 Base top contact connecting tube 3 of inner container bottle, inner container bottle 2 pass through connection
Pipe 3 is fixed on shell 1, and the interlayer space between shell 1 and inner container bottle 2 is connected to the vacuum chamber of micro-nano technology equipment.
Specifically, the connecting tube 3 of Dewar container for liquefied nitrogen has three, and every connection length of tube is 25 centimetres, and thickness of pipe wall is 0.5 milli
Rice extends the holding time of liquid nitrogen in inner container bottle to reduce from inner container bottle 2 to the heat transfer of shell 1.Dewar container for liquefied nitrogen inner container bottle 2
Base material is oxygen-free copper.
Low temperature baffle 4 is fixed on 2 bottom of inner container bottle of Dewar container for liquefied nitrogen by elastic washer and screw.Under normal conditions, sample
Product drop to after low temperature also can cryogenic absorption residual particles, but low temperature baffle temperature is lower in the present embodiment that (temperature is lower than soft
The temperature of property heat transfer piece and sample stage), residual particles can be adsorbed onto first on low temperature baffle.Low temperature baffle 4 in the present invention is logical
The residual particles and gas molecule in the effect absorption vacuum chamber of cryogenic absorption are crossed, avoids them from being adsorbed on sample, pollutes
Sample.
Specifically, low temperature baffle 4 extends to the lower part of the electron gun 8 of scanning electron microscope, 8 muzzle of electron gun just under
Side reserves aperture (i.e. relief hole or avoid holes), so that electron beam passes through.4 material of low temperature baffle is oxygen-free copper.
Mobile station 6 be scanning electron microscope carry Mechanical Moving platform, can be used existing three-dimensional motion mechanism or
Five-shaft movement mechanism etc., such as the present embodiment Hu are total, and the intrinsic mobile station of scanning electron microscope can be directly used in mobile station,
Can be in X, tri- directions Y, Z are mobile, and mobile accuracy is 1 micron, and moving range is 125 millimeters × 125 millimeters × 12 millimeters；It can
360 ° of rotations (using the central axis of mobile station 6 as shaft, i.e. Z axis), can tilt in the range of -10 ° to 30 ° (relative to water
Plane, using X-axis or Y-axis as axle center), inclination is 0.1 ° with running accuracy.
Sample stage includes guide rail platform 10, support column 11, fixed specimen holder 12, mobile example frame 13.
Specifically, guide rail platform 10 is fixed in mobile station 6 by dovetail groove guide rail.Support column 11 is fixed on guide rail platform 10
On, it is vertical with guide rail platform plane.Support column 11 is nylon stud, connects guide rail platform 10 with nylon nut by nylon screw and consolidates
Determine specimen holder 12, realizes the fixation of fixed 12 opposite rail platform 10 of specimen holder.Fixed 12 frame of specimen holder is on support column 11, side
It is provided with fillet trapezoid groove (or claiming dovetail groove), trapezoidal groove opening width is less than the width of trapezoidal groove slot bottom, in device
When needing to be inverted, prevent mobile example frame 13 from falling off from fixed specimen holder 12.13 external structure of mobile example frame and fixed sample
Trapezoidal groove on product frame 12 is identical, and the two cooperates, thus can slide into groove, fits closely with fixed specimen holder 12, and
It will not fall off.13 side of mobile example frame is provided with a threaded hole.
Specifically, fixed specimen holder 12 and 13 material of mobile example frame are oxygen-free copper.
Sample stage is connect with low temperature baffle 4 by oxygen-free copper braid over braid 5.5 both ends of oxygen-free copper braid over braid are the copper in welding
Strip terminal.5 one end of oxygen-free copper braid over braid is welded on 4 lower surface of low temperature baffle, and the other end is by screw and elastic washer in fixation
12 side of specimen holder, 4 temperature of low temperature baffle is lower than the temperature of oxygen-free copper braid over braid 5 at this time, and the temperature of oxygen-free copper braid over braid 5 is lower than
The temperature of fixed specimen holder 12.Heat-reflecting material is wrapped up on 5 surface of oxygen-free copper braid over braid, to reduce the externally heat of oxygen-free copper braid over braid 5
Radiation.
Transfer levers 7 are magnetic force transfer levers, can choose existing commercially available magnetic rod, and 7 front end of transfer levers is provided with screw hole, installation
The transfer screw rod 14 of polytetrafluoroethylene material, transfer 14 end of screw rod has closes with the corresponding threaded holes of 13 side of mobile example frame
External thread structure.It is true from a cryogenic vacuum chamber to another low temperature that mobile example frame 13 can be completed by transfer levers 7
The transfer of cavity.
Before cooling sample, sample is fixed on mobile example frame 13 first.Then by the intracavitary pumping of scanning electron microscope
Vacuum.Then liquid nitrogen is perfused into inner container bottle 2 by connecting tube 3.The bottom of bottle of liquid nitrogen cooling liner bottle 2 and the low temperature being attached thereto
Baffle 4 and oxygen-free copper braid over braid 5, and then cooling fixed specimen holder 12 and mobile example frame 13, the final cooling realized to sample.
It is hanging between 10 top surface of guide rail platform and fixed 12 bottom surface of specimen holder, vacuum gap is constituted, fixed specimen holder 12 only passes through thermal conductivity
Low nylon support column 11 is connected with guide rail platform 10, thus from guide rail platform 10 to mobile example frame 13 conduct heat speed compared with
Slowly, fixed specimen holder 12 and mobile example frame 13 is enable to be cooled to lower temperature.
, can be by mobile station 6 come the position of mobile example after the completion of in the cooling procedure of sample and cooling, oxygen-free copper is compiled
Ribbon 5 can guarantee that low temperature baffle 4 is remained with fixed specimen holder 12 and connect, and sample is made to maintain low temperature.
Referring to fig. 2, transfer sample is when leaving sample stage, and it is intracavitary that transition of operation bar 7 protrudes into scanning electron microscope, adjusts sample stage 6
With 7 position of transfer levers, it is directed at the screw hole on mobile example frame 13 with transfer screw rod 14.Then transfer levers 7 are rotated, spiral shell will be shifted
Bar 14 screws in the screw hole on mobile example frame 13.Referring to Fig. 3, transfer levers 7 are then pulled, by mobile example frame 13 from fixed sample
Skidded off in the groove of frame 14, to leave sample stage, and then can enter in subsequent detection or process vacuum chamber carry out it is subsequent
Detection or processing.Since transfer screw rod is polytetrafluoroethylene material, thermal conductivity is lower, thus from transfer levers 7 to mobile example
The speed that frame 13 conducts heat is slower, can be in the low temperature for maintaining sample during passing sample of short time.
When shifting on sample to sample stage, it is intracavitary that transition of operation bar 7 protrudes into scanning electron microscope, adjusts sample stage 6 and transfer levers 7
Position makes mobile example frame 13 slide into the groove on fixed specimen holder 12.Then transfer screw rod 14 is screwed out into mobile example frame 13
On screw hole.Then transfer levers 7 are pulled, scanning electron microscope chamber is left.
In the present embodiment, Dewar container for liquefied nitrogen bottle structure can also be by liquid helium Dewar bottle structure, vascular refrigerator, JT refrigeration machine or GM
Refrigeration machine etc. replaces.
Claims (10)
1. a kind of mechanism for seal chamber vivo sample cooling and transmission characterized by comprising
Cooling cryogenic refrigeration unit is carried out to the seal cavity；
It is arranged in the intracorporal moveable sample stage of seal chamber；
Transfer levers for being shifted between two or more seal cavities to sample.
2. the mechanism according to claim 1 for seal chamber vivo sample cooling and transmission, which is characterized in that further include
Low temperature baffle, the low temperature baffle one end are connected with the refrigeration end of cryogenic refrigeration unit, and the other end gos deep into the seal cavity.
3. the mechanism according to claim 2 for seal chamber vivo sample cooling and transmission, which is characterized in that described close
Seal the test chamber that cavity is micro-nano technology equipment；
The low temperature baffle gos deep into the intracorporal one end of the seal chamber and extends to below detection probe, which is equipped with evacuation inspection simultaneously
The avoid holes of probing head transmission path.
4. the mechanism according to claim 2 for seal chamber vivo sample cooling and transmission, which is characterized in that the sample
Sample platform includes:
It is fixed on and is able to carry out three-dimensional mobile fixation specimen holder on three-dimensional motion mechanism；
The mobile example frame of sliding being arranged in fixed specimen holder, the mobile example frame can move under the action of the transfer levers
It is dynamic.
5. the mechanism according to claim 4 for seal chamber vivo sample cooling and transmission, which is characterized in that described low
Flexible heat transfer piece is equipped between warm baffle and fixed specimen holder.
6. the mechanism according to claim 4 for seal chamber vivo sample cooling and transmission, which is characterized in that described solid
Random sample product are provided with dovetail groove, and the mobile example frame is the trapezium structure cooperated with the dovetail groove.
7. the mechanism according to claim 4 for seal chamber vivo sample cooling and transmission, which is characterized in that described three
Dimension movement mechanism is five-axle linkage mechanism.
8. the mechanism according to claim 7 for seal chamber vivo sample cooling and transmission, which is characterized in that described three
Dimension movement mechanism can drive the fixed specimen holder in X-axis, and Y weeks, the mobile accuracy in three directions of Z axis was not less than 1 micron；Incline
Tiltedly it is not less than 0.1 ° with running accuracy.
9. the mechanism according to claim 1 for seal chamber vivo sample cooling and transmission, which is characterized in that described low
Warm refrigeration unit is Dewar container for liquefied nitrogen bottle structure, liquid helium Dewar bottle structure, vascular refrigerator, JT refrigeration machine or GM refrigeration machine.
10. the mechanism according to claim 9 for seal chamber vivo sample cooling and transmission, which is characterized in that described
When cryogenic refrigeration unit is Dewar container for liquefied nitrogen bottle structure or liquid helium Dewar bottle structure, the shell of Dewar container for liquefied nitrogen bottle or liquid helium Dewar bottle
It is docked with seal cavity sealing.
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| CN110319991A (en) * | 2019-07-04 | 2019-10-11 | 合肥中科离子医学技术装备有限公司 | Spring test device based on GM refrigeration machine |
| CN110595869A (en) * | 2019-10-29 | 2019-12-20 | 上海映晓电子科技有限公司 | Equipment for preparing frozen soil sample based on contact heat conduction technology in vacuum environment |
| CN112129615A (en) * | 2020-10-09 | 2020-12-25 | 重庆渝微电子技术研究院有限公司 | Low-temperature biological cold and hot table |
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| CN110164744A (en) * | 2019-05-17 | 2019-08-23 | 中国科学院理化技术研究所 | Based on low-temperature solid cooling scanning electron microscope refrigeration system and method |
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| CN112129615A (en) * | 2020-10-09 | 2020-12-25 | 重庆渝微电子技术研究院有限公司 | Low-temperature biological cold and hot table |
| CN112403837A (en) * | 2020-11-11 | 2021-02-26 | 上饶市光耀光学设备制造有限公司 | Coating device is used in processing of high accuracy optical lens piece |
| CN112403837B (en) * | 2020-11-11 | 2022-02-08 | 上饶市光耀光学设备制造有限公司 | Coating device is used in processing of high accuracy optical lens piece |
| CN114904592A (en) * | 2021-02-10 | 2022-08-16 | 中国科学院物理研究所 | Sample transfer device under ultrahigh vacuum condition |
| CN114904592B (en) * | 2021-02-10 | 2024-05-07 | 中国科学院物理研究所 | Sample transfer device under ultrahigh vacuum condition |
| CN113484159B (en) * | 2021-06-21 | 2022-04-15 | 北京理工大学 | Low-temperature environment box for split Hopkinson pressure bar |
| CN113484159A (en) * | 2021-06-21 | 2021-10-08 | 北京理工大学 | Low-temperature environment box for split Hopkinson pressure bar |
| CN113466495A (en) * | 2021-08-19 | 2021-10-01 | 中国科学院兰州化学物理研究所 | Ultralow-temperature high-vacuum atomic force microscope system |
| CN114324429A (en) * | 2021-12-10 | 2022-04-12 | 浙江大学杭州国际科创中心 | Sample freezing and transmission integrated device for scanning electron microscope |
| WO2024021269A1 (en) * | 2022-07-28 | 2024-02-01 | 维亚生物科技(上海)有限公司 | Cryo-stage for cryo-electron microscope and control system therefor |
| CN117739612A (en) * | 2023-07-12 | 2024-03-22 | 西湖大学 | Liquid helium consumption free circulating refrigerating system and liquid helium temperature zone electron microscope |
| CN118280795A (en) * | 2024-06-03 | 2024-07-02 | 海尔生物医疗科技(成都)有限公司 | Sample low-temperature transmission system for refrigeration electron microscope |
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