CN108020434A - Bottom splashproof is shot at the target - Google Patents
Bottom splashproof is shot at the target Download PDFInfo
- Publication number
- CN108020434A CN108020434A CN201810030583.0A CN201810030583A CN108020434A CN 108020434 A CN108020434 A CN 108020434A CN 201810030583 A CN201810030583 A CN 201810030583A CN 108020434 A CN108020434 A CN 108020434A
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- Prior art keywords
- pipe
- target
- splashproof
- cooling
- fin
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M99/00—Subject matter not provided for in other groups of this subclass
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0021—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for aircrafts or cosmonautics
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to the Anti-splash systems technology field in a kind of experiment plasma space environment simulation equipment for ground electric propulsion, shoot at the target more particularly, to a kind of bottom splashproof.Bottom splashproof is shot at the target shoots at the target skeleton main body and bottom splashproof is shot at the target fins set including bottom splashproof；Bottom splashproof shoot at the target skeleton main body include the 3rd pipe, the 4th pipe and the second cooling tube；The second inlet is connected with 3rd pipe, the second liquid outlet is connected with the 4th pipe；Second cooling tube has multiple, and multiple second cooling tubes are arranged at intervals along perpendicular to length direction；Multiple second cooling tubes are fixedly connected by the 3rd pipe with the 4th pipe, are connected between the 3rd pipe, the 4th pipe and multiple second cooling tubes；Splashproof fins set of shooting at the target in bottom is connected with the second cooling tube, to block the gap between adjacent second cooling tube.To shoot at the target the invention reside in a kind of bottom splashproof is provided, solve splashproof existing in the prior art and shoot at the target the bad technical problem of the reducing effect to sputtering product and the pollutant that backflows.
Description
Technical field
The present invention relates to the Anti-splash system in a kind of experiment plasma space environment simulation equipment for ground electric propulsion
Technical field, shoots at the target more particularly, to a kind of bottom splashproof.
Background technology
The plasma that electric propulsion plume is mainly formed by gas ionization forms, and includes line plasma and charge-exchange
Plasma, can produce spacecraft sputtering polluting effect, not only be polluted including the deposition of charged particle and neutral particle, but also have height
Speed belt charged particle sputters pollution caused by the sputter etching of spacecraft surface.
In ground electric propulsion experiment, when high energy beam current ion and charge-exchange ion collision are in vacuum chamber bulkhead material table
During face, as long as ion energy is more than will produce sputtering pollution by the sputtering threshold value of collision material, so as to influence grain in vacuum chamber
Sub- distribution situation, seriously affects experimental result.Therefore, it is necessary to Anti-splash molsink is rationally designed.
Mainly have suitable for the design structure of the Anti-splash molecule sink structure in the large-scale vacuum cabin of electric propulsion more in the world
It is flat, special-shaped two kinds of formula.But the structure that the splashproof of existing Anti-splash molecule sink structure is shot at the target is simple, and grown
When time ground electric propulsion experiment and contaminant deposition component, quality analysis, the spatial distribution of product is sputtered and pollution of backflowing
Thing can all impact experimental result.
Therefore, the application provides a kind of new bottom splashproof and shoots at the target regarding to the issue above.
The content of the invention
It is an object of the invention to provide a kind of bottom splashproof to shoot at the target, and is shot at the target pair with solving splashproof existing in the prior art
The bad technical problem of the reducing effect of sputtering product and the pollutant that backflows.
Based on above-mentioned purpose, the present invention provides a kind of bottom splashproof and shoots at the target, including bottom splashproof is shot at the target skeleton main body and bottom
End splashproof is shot at the target fins set；
The bottom splashproof shoot at the target skeleton main body include the 3rd pipe, the 4th pipe and the second cooling tube；
The second inlet is connected with 3rd pipe, the second liquid outlet is connected with the 4th pipe；
Second cooling tube has multiple, and multiple second cooling tubes are arranged at intervals along perpendicular to length direction；
Multiple second cooling tubes are fixedly connected by the described 3rd pipe with the 4th pipe, and the 3rd pipe, institute
State and be connected between the 4th pipe and multiple second cooling tubes；
Bottom splashproof fins set of shooting at the target is connected with second cooling tube, with block adjacent second cooling tube it
Between gap.
In any of the above-described technical solution, further, the center line of the 3rd pipe of the present invention and the 4th pipe
Center line is in arc-shaped；
The center line of 3rd pipe and the center line of the 4th pipe are concyclic, and the 3rd pipe and the described 4th pipe pair
Claim to be arranged at concyclic circular both ends radially；
The both ends of second cooling tube along the extending direction are respectively communicated with the 3rd pipe and the described 4th pipe.
In any of the above-described technical solution, further, the second cooling tube of the present invention includes cooling straight tube；
The one end of the cooling straight tube in the axial direction connects the 3rd pipe by the first bridge piece, and the other end passes through
Second bridge piece connection the 4th pipe；
And the cooling straight tube of multiple second cooling tubes is uniformly arranged along the extending direction of the 3rd pipe.
In any of the above-described technical solution, further, bottom splashproof of the present invention is shot at the target as vertical structure；
3rd pipe is positioned at the bottom of the 4th pipe；
Second inlet is located at centre position of the 3rd pipe along extending direction；And/or second liquid outlet
Positioned at centre position of the 4th pipe along extending direction.
In any of the above-described technical solution, further, separator tube is additionally provided with the 3rd pipe of the present invention；
The separator tube is even connected with second inlet.
In any of the above-described technical solution, further, bottom splashproof of the present invention fins set of shooting at the target includes the 3rd wing
Piece and the 4th fin；
The one end of the cooling straight tube radially is connected with the 3rd fin, and the other end is connected with the 4th wing
Piece；
Along the extending direction of the 3rd pipe, the 3rd fin and the 4th fin are arranged at intervals successively；
It is engaged between the 3rd fin and the 4th fin between the adjacent cooling straight tube, to make the bottom
End splashproof shoot at the target fins set closing.
In any of the above-described technical solution, further, circular axis where the present invention along the center line of the 3rd pipe
Line direction, one end of the cooling straight tube are connected with the 3rd fin, and the other end is connected with the 4th fin.
In any of the above-described technical solution, further, width of the present invention along the 3rd fin, the described 3rd
Fin includes corresponding 5th connecting pin and the 6th connecting pin, and the 5th connecting pin is connected with the cooling straight tube, described
5th connecting pin is arc-shaped, and corresponding with the cooling straight tube；
And/or the width along the 4th fin, the 4th fin include corresponding 7th connecting pin and the
Eight connecting pins, the 7th connecting pin are connected with the cooling straight tube, and the 7th connecting pin is arc-shaped, and straight with the cooling
Manage corresponding.
In any of the above-described technical solution, further, circular axis where the present invention along the center line of the 3rd pipe
Line direction, the 6th connecting pin and the 8th connecting pin are bent to both sides respectively, and the 6th connecting pin and described the
Eight connecting pins are corresponding.
In any of the above-described technical solution, further, bottom splashproof of the present invention is shot at the target, and further includes bottom splashproof
Shoot at the target clad；
Bottom splashproof clad of shooting at the target is arranged at bottom splashproof and shoots at the target the outside of fins set；
The shoot at the target material of clad of the bottom splashproof is carbon fiber felt.
Using above-mentioned technical proposal, the present invention has the advantages that：
In use, by connecting coolant circulating system between the second inlet and the second liquid outlet, to make cooling agent
Enter the 3rd pipe from the second inlet, due to being connected between the 3rd pipe, the 4th pipe and the second cooling tube, cooling agent is then by the
Two cooling tubes, discharge from the second liquid outlet of the 4th pipe, complete the one cycle process of cooling agent.Cooling agent is in cyclic process
In, the bottom splashproof being connected with the second cooling tube shoots at the target fins set also by heat transfer cooling.In ground electric propulsion experiment, by bottom
Splashproof, which is shot at the target, to be put into vacuum chamber, and it is corresponding with the bilge to make bottom splashproof shoot at the target, and has the particle of higher-energy in vacuum chamber
It is sputtered onto bottom splashproof to shoot at the target in fins set, bottom splashproof shoots at the target fins set to particle progress cooling down effect, to reduce grain
The energy of son, so that the sputtering rate of particle is reduced, to reduce the destruction to vacuum chamber；On the other hand, it is with a lower temperature
Bottom splashproof shoot at the target fins set can fight each other to a certain extent bottom splashproof shoot at the target fins set surface particle carry out low temperature
Absorption, effectively reduces the content and distribution of sputtering product.
In conclusion bottom splashproof is shot at the target, fins set reduces sputtering of the ion beam to the bilge, reduces iron member in sputtering product
Cellulose content.Cryogenic absorption can be carried out to the pollutant that backflows at the same time, reduce the pollutant load that backflows, guarantee test effect.Solve
Splashproof existing in the prior art is shot at the target the bad technical problem of the reducing effect to sputtering product and the pollutant that backflows.
The additional aspect and advantage of the present invention will become obvious in following description section, or the practice by the present invention
Recognize.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore be not construed as pair
The restriction of scope, for those of ordinary skill in the art, without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is that the bottom splashproof shot at the target of bottom splashproof provided in an embodiment of the present invention is shot at the target the front view of skeleton main body；
Fig. 2 is that the bottom splashproof shot at the target of bottom splashproof provided in an embodiment of the present invention is shot at the target the side view of skeleton main body；
Fig. 3 is that the bottom splashproof shot at the target of bottom splashproof provided in an embodiment of the present invention is shot at the target the top view of skeleton main body；
Fig. 4 is the top view that bottom splashproof provided in an embodiment of the present invention is shot at the target；
Fig. 5 is the connection structure signal of the 4th fin that bottom splashproof provided in an embodiment of the present invention is shot at the target and cooling straight tube
Figure.
Icon：201- the 3rd is managed；202- the 4th is managed；The second cooling tubes of 203-；2031- cools down straight tube；2032- first connects
Connect bend pipe；The second bridge pieces of 2033-；The second inlets of 211-；The second liquid outlets of 212-；221- separator tubes；The 3rd wings of 231-
Piece；The 4th fins of 232-；The 5th fins of 233-；The 7th connecting pins of 2321-；The 8th connecting pins of 2322-.
Embodiment
Technical scheme is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's all other embodiments obtained without making creative work, belong to the scope of protection of the invention.
In the description of the present invention, it is necessary to explanation, term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instruction such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to
Easy to describe the present invention and simplify description, rather than instruction or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ",
" the 3rd " is only used for description purpose, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it is necessary to illustrate, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected；Can
To be mechanical connection or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in invention.
Embodiment one
To shoot at the target referring to shown in Fig. 1-Fig. 5, the present embodiment provides a kind of bottom splashproof, including bottom splashproof is shot at the target skeleton main body
Shoot at the target fins set with bottom splashproof；
Bottom splashproof skeleton main body of shooting at the target includes the 3rd pipe 201, the 4th pipe 202 and the second cooling tube 203；
The second inlet 211 is connected with 3rd pipe 201, the second liquid outlet 212 is connected with the 4th pipe；
Second cooling tube 203 has multiple, and multiple second cooling tubes 203 are set along perpendicular to length direction interval
Put；
Multiple second cooling tubes are fixedly connected by the 3rd pipe 201 with the 4th pipe 202, and the described 3rd
It is connected between pipe, the 4th pipe and multiple second cooling tubes；
Bottom splashproof fins set of shooting at the target is connected with second cooling tube 203, to block adjacent second cooling
Gap between pipe.
Alternatively, by being welded to connect between the second cooling tube and the 3rd pipe, the second cooling tube and the 4th pipe；The bottom
Splashproof shoot at the target fins set with second cooling tube by being welded to connect.
In use, by connecting coolant circulating system between the second inlet and the second liquid outlet, to make cooling agent
Enter the 3rd pipe from the second inlet, due to being connected between the 3rd pipe, the 4th pipe and the second cooling tube, cooling agent is then by the
Two cooling tubes, discharge from the second liquid outlet of the 4th pipe, complete the one cycle process of cooling agent.Cooling agent is in cyclic process
In, the bottom splashproof being connected with the second cooling tube shoots at the target fins set also by heat transfer cooling.
In ground electric propulsion experiment, bottom splashproof is shot at the target and is put into vacuum chamber, and make bottom splashproof shoot at the target and the bilge
Corresponding, the particle with higher-energy is sputtered onto bottom splashproof and shoots at the target in fins set in vacuum chamber, and bottom splashproof is shot at the target fin
Group carries out cooling down effect to particle, to reduce the energy of particle, so that the sputtering rate of particle is reduced, to reduce to vacuum
The destruction in cabin；On the other hand, bottom splashproof with a lower temperature fins set of shooting at the target can fight each other in bottom to a certain extent
Splashproof shoot at the target fins set surface particle carry out cryogenic absorption, effectively reduce sputtering product content and distribution.
In conclusion bottom splashproof is shot at the target, fins set reduces sputtering of the ion beam to the bilge, reduces iron member in sputtering product
Cellulose content.Cryogenic absorption can be carried out to the pollutant that backflows at the same time, reduce the pollutant load that backflows, guarantee test effect.Solve
Splashproof existing in the prior art is shot at the target the bad technical problem of the reducing effect to sputtering product and the pollutant that backflows.
Preferably, shown in Figure 1, the center line of the 3rd pipe 201 and the center line of the 4th pipe 202 are in
Arc-shaped；
The center line of 3rd pipe and the center line of the 4th pipe are concyclic, and the 3rd pipe and the described 4th pipe pair
Claim to be arranged at concyclic circular both ends radially；
The both ends of second cooling tube along the extending direction are respectively communicated with the 3rd pipe and the described 4th pipe.
So as to increase the face area that bottom splashproof is shot at the target, and then increase absorption to particle incoming, cooling area, to prolong
The flow path of long cooling agent, can be to the film-cooled heat of particle, so as to strengthen to grain in ground electric propulsion experiment with increase
The Anti-splash ability of son.
Preferably, shown in Figure 2, second cooling tube 203 includes cooling straight tube 2031；
The one end of the cooling straight tube 2031 in the axial direction connects the 3rd pipe by the first bridge piece 2032
201, the other end connects the 4th pipe 202 by the second bridge piece 2033；
And the cooling straight tube of multiple second cooling tubes is uniformly arranged along the extending direction of the 3rd pipe.
Shot at the target the uniformity of temperature with improving whole bottom splashproof.
It should be noted that the length of multiple cooling straight tubes is different, to adapt to the distance between the 3rd pipe and the 4th pipe.
Preferably, the bottom splashproof is shot at the target as vertical structure；
3rd pipe is positioned at the bottom of the 4th pipe；
Second inlet 211 is located at centre position of the 3rd pipe along extending direction；And/or described second go out
Liquid mouth 212 is located at centre position of the 4th pipe along extending direction.
Specifically, second inlet is located at centre position of the 3rd pipe along extending direction；
Alternatively, second liquid outlet is located at centre position of the 4th pipe along extending direction；
Alternatively, second inlet is located at centre position of the 3rd pipe along extending direction；And described second goes out liquid
Mouth is located at centre position of the 4th pipe along extending direction.
Preferably, second inlet is located at centre position of the 3rd pipe along extending direction；
And second liquid outlet is located at centre position of the 4th pipe along extending direction.
The bilge for guard vacuum cabin that is, bottom splashproof is shot at the target.
The bottom splashproof is shot at the target as vertical structure, i.e.,：In use, the axis direction of cooling straight tube is vertical.
Cooling agent enters from the second inlet, is discharged from the second liquid outlet, that is, cooling agent is bottom in and top out, cooling agent
In bottom splashproof shoot at the target skeleton main body-internal-circulation when, enter the second cooling tube from the 3rd pipe, cooling agent under the effect of gravity, only
Filling up the bottom of the second cooling tube just can gradually go up, until the second cooling tube is completely filled out, can just be discharged from the 4th pipe；Institute
State the second liquid outlet and be located at centre position of the 4th pipe along extending direction, cooling is only completely filled out in the second cooling tube
Agent, cooling agent can just be discharged from the second liquid outlet.Cooling to particle, adsorption area are further increased, is strengthened to particle
Anti-splash ability.
Preferably, it is shown in Figure 1, it is additionally provided with separator tube 221 on the 3rd pipe 201；
The separator tube 221 is even connected with second inlet 211.
In use, the cooling agent entered from the second inlet may be vapour-liquid mixed state, gaseous cooling agent enters bottom
Splashproof skeleton main body of shooting at the target can influence cooling temperature and cooling uniformity, therefore, when cooling agent is inputted from the second inlet, gas
State cooling agent can be discharged directly from separator tube, with exclusive PCR.
It should be noted that in use, need to block the unnecessary hole in the 3rd pipe and the 4th pipe, to ensure to try
Test and be normally carried out.
Preferably, shown in Figure 4, bottom splashproof fins set of shooting at the target includes the 3rd fin 231 and the 4th fin
232；
The one end of the cooling straight tube 2031 radially is connected with the 3rd fin 231, and the other end connects
State the 4th fin 232；
Along the extending direction of the 3rd pipe, the 3rd fin and the 4th fin are arranged at intervals successively；
It is engaged between the 3rd fin and the 4th fin between the adjacent cooling straight tube, to make the bottom
End splashproof shoot at the target fins set closing.
Alternatively, the 3rd fin is with cooling straight tube by being welded to connect, and the 4th fin is with cooling straight tube by being welded to connect.
Bottom splashproof fins set of shooting at the target includes the 3rd fin and the 4th fin, so as to make the 3rd fin, the 4th fin
Connection between cooling straight tube more seals, and passes through and cannot adsorb to avoid particle incoming, cools down.The adjacent cooling straight tube
Between the 3rd fin and the 4th fin between be engaged, with make the bottom splashproof shoot at the target fins set closing, with
Incoming particle is further ensured without direct export.
Preferably, shown in Figure 4, circular axis direction where along the center line of the 3rd pipe, the cooling is directly
One end of pipe is connected with the 3rd fin, and the other end is connected with the 4th fin.
In a first aspect, easy to the connection of the 3rd fin, the 4th fin and cooling straight tube, the dress of bottom Anti-splash can be facilitated
Match somebody with somebody；
Second aspect, can be further ensured that the leakproofness connected between the 3rd fin, the 4th fin and cooling straight tube, order
Incoming particle is without direct export.
Alternatively, shown in Figure 4, bottom splashproof fins set of shooting at the target further includes the 5th fin 233；5th fin
233 are connected to close to the cooling straight tube of edge in multiple cooling straight tubes 2031, and the cooling straight tube positioned at close edge is remote
From the side of other cooling straight tubes, to further improve the leakproofness that bottom splashproof is shot at the target, ensure incoming particle without direct export.
Preferably, shown in Figure 5, along the width of the 3rd fin, the 3rd fin includes corresponding
5th connecting pin and the 6th connecting pin, the 5th connecting pin are connected with the cooling straight tube, and the 5th connecting pin is arc-shaped,
It is and corresponding with the cooling straight tube；
And/or the width along the 4th fin, the 4th fin 232 include corresponding 7th connecting pin
2321 and the 8th connecting pin 2322, the 7th connecting pin 2321 be connected with the cooling straight tube 2031, the 7th connecting pin
2321 is arc-shaped, and corresponding with the cooling straight tube.
Specifically, corresponding 5th connecting pin is included along the width of the 3rd fin, the 3rd fin
With the 6th connecting pin, the 5th connecting pin with it is described cooling straight tube be connected, the 5th connecting pin is arc-shaped, and with it is described cold
But straight tube is corresponding；
Alternatively, along the width of the 4th fin, the 4th fin includes corresponding 7th connecting pin and the
Eight connecting pins, the 7th connecting pin are connected with the cooling straight tube, and the 7th connecting pin is arc-shaped, and straight with the cooling
Manage corresponding.
Alternatively, along the width of the 3rd fin, the 3rd fin includes corresponding 5th connecting pin and the
Six connecting pins, the 5th connecting pin are connected with the cooling straight tube, and the 5th connecting pin is arc-shaped, and straight with the cooling
Manage corresponding；And include corresponding 7th connecting pin and the 8th along the width of the 4th fin, the 4th fin
Connecting pin, the 7th connecting pin with it is described cooling straight tube be connected, the 7th connecting pin is arc-shaped, and with the cooling straight tube
It is corresponding.
Preferably, along the width of the 3rd fin, the 3rd fin include corresponding 5th connecting pin and
6th connecting pin, the 5th connecting pin with it is described cooling straight tube be connected, the 5th connecting pin is arc-shaped, and with the cooling
Straight tube is corresponding；And along the width of the 4th fin, the 4th fin includes corresponding 7th connecting pin and the
Eight connecting pins, the 7th connecting pin are connected with the cooling straight tube, and the 7th connecting pin is arc-shaped, and straight with the cooling
Manage corresponding.
5th connecting pin is arc-shaped, and corresponding with the cooling straight tube, to make between the 5th connecting pin and cooling straight tube
Connection more firmly, it is reliable；
7th connecting pin is arc-shaped, and corresponding with the cooling straight tube, to make the 7th connecting pin and cooling straight tube
Between connection more firmly, it is reliable.
Preferably, along circular axis direction where the center line of the 3rd pipe, the 6th connecting pin and described the
Eight connecting pins 2322 are bent to both sides respectively, and the 6th connecting pin is corresponding with the 8th connecting pin.To improve the 3rd
Leakproofness between fin and the 4th fin.
Preferably, the bottom splashproof described in the present embodiment is shot at the target, and is further included bottom splashproof and is shot at the target clad；
Bottom splashproof clad of shooting at the target is arranged at bottom splashproof and shoots at the target the outside of fins set；
The shoot at the target material of clad of the bottom splashproof is carbon fiber felt.
Specifically, bottom splashproof clad of shooting at the target is arranged on the 3rd fin and the 4th fin.
Carbon fiber felt has highly developed microcellular structure, and the particle in access aperture can be adsorbed effectively.Meanwhile
By investigation, the sputtering raste of carbon is relatively low, and the result influence for ground electric propulsion experiment is smaller.
In conclusion make bottom splashproof shoot at the target with relatively low sputtering raste, it is few without cladding situation sputtering product compared to light cabin.
It is strong to the adsorption capacity of incoming particle meanwhile carbon felt has loose structure, it can effectively reduce bulkhead reflection and secondary sputtering.
Preferably, the shoot at the target material of fins set of the bottom splashproof is T2 red coppers；Specifically, the 3rd fin and the 4th wing
The material of piece is T2 red coppers.T2 red coppers have good conductive and heat-conductive anti-corrosion and processing performance, can weld and be brazed.Containing reduction
The impurity of electrical and thermal conductivity is less, and micro oxygen influences the performance such as conductive and heat-conductive and processing little.
Preferably, the material of the 3rd pipe, the 4th pipe, cooling straight tube, the first bridge piece, the second bridge piece and separator tube
It is stainless steel.
Finally it should be noted that：The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe is described in detail the present invention with reference to foregoing embodiments, it will be understood by those of ordinary skill in the art that：Its according to
Can so modify to the technical solution described in foregoing embodiments, either to which part or all technical characteristic into
Row equivalent substitution；And these modifications or replacement, the essence of appropriate technical solution is departed from various embodiments of the present invention technology
The scope of scheme.
In addition, it will be appreciated by those of skill in the art that although some embodiments described herein include other embodiments
In included some features rather than further feature, but the combination of the feature of different embodiments means in the present invention
Within the scope of and form different embodiments.For example, in claims above, embodiment claimed
It is one of any mode to use in any combination.The information for being disclosed in the background section is merely intended to intensification pair
The understanding of the general background technology of the utility model, and be not construed as recognizing or imply the information structure in any form
The prior art known to those skilled in the art.
Claims (10)
1. a kind of bottom splashproof is shot at the target, it is characterised in that shoots at the target skeleton main body including bottom splashproof and bottom splashproof is shot at the target fin
Group；
The bottom splashproof shoot at the target skeleton main body include the 3rd pipe, the 4th pipe and the second cooling tube；
The second inlet is connected with 3rd pipe, the second liquid outlet is connected with the 4th pipe；
Second cooling tube has multiple, and multiple second cooling tubes are arranged at intervals along perpendicular to length direction；
Multiple second cooling tubes are fixedly connected with the 4th pipe by the described 3rd pipe, and the described 3rd manage, described the
It is connected between four pipes and multiple second cooling tubes；
Bottom splashproof fins set of shooting at the target is connected with second cooling tube, to block between adjacent second cooling tube
Gap.
2. bottom splashproof according to claim 1 is shot at the target, it is characterised in that the center line and the described 4th of the 3rd pipe
The center line of pipe is in arc-shaped；
The center line of 3rd pipe and the center line of the 4th pipe are concyclic, and the 3rd pipe and the described 4th pipe are symmetrically set
It is placed in concyclic circular both ends radially；
The both ends of second cooling tube along the extending direction are respectively communicated with the 3rd pipe and the described 4th pipe.
3. bottom splashproof according to claim 2 is shot at the target, it is characterised in that second cooling tube includes cooling straight tube；
The one end of the cooling straight tube in the axial direction connects the 3rd pipe by the first bridge piece, and the other end passes through second
Bridge piece connection the 4th pipe；
And the cooling straight tube of multiple second cooling tubes is uniformly arranged along the extending direction of the 3rd pipe.
4. bottom splashproof according to claim 2 is shot at the target, it is characterised in that the bottom splashproof is shot at the target as vertical structure；
3rd pipe is positioned at the bottom of the 4th pipe；
Second inlet is located at centre position of the 3rd pipe along extending direction；And/or second liquid outlet is located at
Centre position of 4th pipe along extending direction.
5. bottom splashproof according to claim 1 is shot at the target, it is characterised in that is additionally provided with separator tube on the 3rd pipe；
The separator tube is even connected with second inlet.
6. bottom splashproof according to claim 2 is shot at the target, it is characterised in that bottom splashproof fins set of shooting at the target includes the
Three fins and the 4th fin；
The one end of the cooling straight tube radially is connected with the 3rd fin, and the other end is connected with the 4th fin；
Along the extending direction of the 3rd pipe, the 3rd fin and the 4th fin are arranged at intervals successively；
It is engaged between the 3rd fin and the 4th fin between the adjacent cooling straight tube, to make the bottom prevent
Sputtering target fins set is closed.
7. bottom splashproof according to claim 6 is shot at the target, it is characterised in that circular where along the center line of the 3rd pipe
Axis direction, it is described cooling straight tube one end be connected with the 3rd fin, the other end is connected with the 4th fin.
8. bottom splashproof according to claim 7 is shot at the target, it is characterised in that along the width of the 3rd fin, institute
Stating the 3rd fin includes corresponding 5th connecting pin and the 6th connecting pin, and the 5th connecting pin connects with the cooling straight tube
Connect, the 5th connecting pin is arc-shaped, and corresponding with the cooling straight tube；
And/or the width along the 4th fin, the 4th fin include corresponding 7th connecting pin and the 8th and connect
End is connect, the 7th connecting pin is connected with the cooling straight tube, and the 7th connecting pin is arc-shaped, and cools down straight tube phase with described
It is corresponding.
9. bottom splashproof according to claim 8 is shot at the target, it is characterised in that circular where along the center line of the 3rd pipe
Axis direction, the 6th connecting pin and the 8th connecting pin are bent to both sides respectively, and the 6th connecting pin and institute
It is corresponding to state the 8th connecting pin.
10. shot at the target according to claim 1-9 any one of them bottom splashproof, it is characterised in that further include bottom splashproof and shoot at the target
Clad；
Bottom splashproof clad of shooting at the target is arranged at bottom splashproof and shoots at the target the outside of fins set；
The shoot at the target material of clad of the bottom splashproof is carbon fiber felt.
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| CN201810030583.0A CN108020434B (en) | 2018-01-12 | 2018-01-12 | Bottom end splashproof is shot at the target |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810030583.0A CN108020434B (en) | 2018-01-12 | 2018-01-12 | Bottom end splashproof is shot at the target |
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| CN108020434A true CN108020434A (en) | 2018-05-11 |
| CN108020434B CN108020434B (en) | 2019-03-08 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109632450A (en) * | 2018-11-19 | 2019-04-16 | 浙江大学 | A kind of mechanism for seal chamber vivo sample cooling and transmission |
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| CN101718626A (en) * | 2009-11-10 | 2010-06-02 | 北京航空航天大学 | Heat sink wall panel structure arrangement for increasing absorption of plume gas |
| CN101947474A (en) * | 2010-07-21 | 2011-01-19 | 北京航空航天大学 | Fractional liquid supply temperature self compensation liquid helium heat sink structure |
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| Publication number | Publication date |
|---|---|
| CN108020434B (en) | 2019-03-08 |
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