CN109631965B - 一种基于微光纤锥球面反射型的干涉仪 - Google Patents

一种基于微光纤锥球面反射型的干涉仪 Download PDF

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CN109631965B
CN109631965B CN201910073398.4A CN201910073398A CN109631965B CN 109631965 B CN109631965 B CN 109631965B CN 201910073398 A CN201910073398 A CN 201910073398A CN 109631965 B CN109631965 B CN 109631965B
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李晋
张越
任春桥
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Northeastern University China
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    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35312Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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    • G01MEASURING; TESTING
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    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/3537Optical fibre sensor using a particular arrangement of the optical fibre itself
    • G01D5/35374Particular layout of the fiber
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    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/03Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means

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Abstract

本发明公开了一种基于微光纤锥球面反射型的干涉仪,采用的技术方案如下:使用密封胶将微光纤锥固定在毛细管的轴心位置,为了避免微光纤锥的抖动影响到结构的稳定性,采用固定支架将其支撑固定。为了构建F‑P腔,采用高温熔融技术将单模光纤拉锥并将其锥尖熔融得到微球,单模光纤的另一端被密封胶固定在毛细管的轴心位置,为了避免结构抖动对其传感性能的影响,在毛细管内灌注缓冲液。该结构基于光学消逝场和微球球面构建F‑P干涉腔,可有效提高F‑P结构的响应速度,适用于加速度等动态参量的实时监测。

Description

一种基于微光纤锥球面反射型的干涉仪
技术领域
本发明涉及一种基于微光纤锥球面反射型干涉仪结构,涉及一种由微光纤锥和微球构建干涉腔的F-P干涉仪。
背景技术
光纤传感器具有高分辨率、耐高温、抗腐蚀、抗电磁干扰等优点,因此,将光纤应变传感器运用于工程结构监测已成为近几十年来各国学者研究的热点,期间设计了许多不同类型的光纤传感器。光纤F-P干涉仪早在20世纪80年代就被发明出来,它的工作机理是基于光波的干涉现象,经过一定长度F-P腔后的信号光会与原始参考光干涉,通过干涉信号的光谱解调可以获得F-P腔长的变化,因而可利用光波分干涉原理来精确测量小位移和细微的波长变化。在航空航天、工业生产、医疗卫生等领域,光纤F-P干涉仪都有着广泛的应用前景。光纤F-P干涉仪的结构形式多样,可以借助不同的制备技术和新型材料构建F-P干涉腔,以实现对光学信号的调制或者对外界环境参量变化的实时、精确监测。
传统的F-P干涉仪结构均是借助外界环境的影响,实现F-P腔长度的改变,一般的响应速度不高,只能实现对缓变参量的测量。现实生产生活中,很多场合要求实现对动态参量的实时监控,对响应时间的要求极为苛刻。例如对加速度的测量,传统F-P加速度传感器均是通过惯性质量块的移动改变F-P腔长度,其响应速度和准确性都难以满足精准测量的需要。
发明内容
为了达到上述目的,本发明提出了一种基于微光纤锥球面反射型的干涉仪结构。
本发明采用的技术方案如下:使用密封胶1将微光纤锥4固定在毛细管6的轴心位置,为了避免微光纤锥4的抖动影响到结构的稳定性,采用固定支架2将其支撑固定。为了构建F-P腔,采用高温熔融技术将单模光纤8拉锥并将其锥尖熔融得到微球3,单模光纤8的另一端被密封胶1固定在毛细管6的轴心位置,为了避免结构抖动对其传感性能的影响,在毛细管6内灌注缓冲液7。
所述的干涉仪结构整体封装在毛细管6中,该毛细管的材质为二氧化硅,外形为圆柱形,长度为100mm,内径为200微米,外径为300微米。用于固定光纤的密封胶1为环氧树脂AB胶,制备方法简单,并且不受环境温度的影响;所述的固定支架2的材质为氟化镁晶体,其折射率低于二氧化硅,可有效降低光学损耗;所述的微光纤锥4由直径为200微米,纤芯直径为30微米的多模光纤经过高温熔融拉伸制作而成,其尖端用光纤切割笔切割平整,同时制作完成的微光纤锥4的尖端将形成锥形纤芯5,可产生光学消逝场,有效提高F-P干涉仪的光学传输效率和用于传感测量的灵敏度;所述的单模光纤8的直径外125微米,由其制作的光纤锥尖端熔融制作的微球3的直径为40微米,该直径可通过单模光纤8的尖端直径和高温熔融过程中的技术参数进行调整;所述的缓冲液7,为折射率为1.37的低折射率匹配液,减小光学损耗的同时,有效缓冲微球的高频振荡,提高结构稳定性。
与现有技术相比,本发明的有益效果是:
1)本发明提出了一种基于微光纤锥球面反射型的干涉仪结构,该结构基于光学消逝场和微球球面构建F-P干涉腔,可有效提高F-P结构的响应速度,适用于加速度等动态参量的实时监测;
2)本发明提出了一种基于微光纤锥球面反射型的干涉仪结构,可以在测量加速度的同时,对采集到的信息进行远距离高质量传输,灵敏度高、成本低,微型化的毛细管结构便于安装和分布式组网。
附图说明
图1为一种基于微光纤锥球面反射型的干涉仪结构的示意图。
图中:1密封胶;2固定支架;3微球;4微光纤锥;5锥形纤芯;6毛细管;7缓冲液;
8单模光纤。
具体实施方式
下面通过具体实施方式阐明本发明的实质特点和显著进步。
一种基于微光纤锥球面反射型的干涉仪,与传统F-P干涉仪结构相比,该结构采用微光纤锥可产生光学消逝场,同时该消逝场对外界环境参数变化极为敏感的特性,有效提高了F-P干涉仪的测量灵敏度;并且,该F-P干涉仪结构的另一个反射面为微球球面,与微光纤锥端面构成F-P腔,微光纤锥端面的消逝场可形成锥形势阱光场,而不是传统光纤出射的单个光斑,该光场在微球表面的可形成近似漫反射的效果,使光束不至偏离结构的轴心,可有效提高F-P结构的光学信号稳定性;该结构中的微光纤锥和微球均是由普通光纤采用简单的工艺制作而成,并用环氧树脂胶封装在二氧化硅毛细管内,使结构整体的成本极低;为了进一步提高结构的稳定性和光学耦合效果,将折射率为1.37的低折射率匹配液作为缓冲液灌注到毛细管内,减小光学损耗的同时,有效缓冲微球的高频振荡,提高结构稳定性。
此处以加速度传感测量为例,阐明本发明的实施方式,在使用本发明提出的一种基于微光纤锥球面反射型的干涉仪结构,测定加速度时,需要将单波长光信号,即632.8nm的He-Ne光信号输入到微光纤锥4内,光信号通过其传输到达锥形纤芯5并出射形成光学消逝场,该消逝场将穿过缓冲液7到达微球3的表面并反射回微光纤锥4内,与原始光信号产生干涉,该干涉光信号从干涉仪结构出射后,可借助环形器或者反射镜作用输入光信号解调设备,对干涉光信号中提取出微光纤锥4和微球3间的相对位置变化信息。当加速度发生变化时,缓冲液7可以迅速消除微球3的抖动,使之响应新的加速度信息,从而导致球面位置偏离毛细管6的轴心,使F-P腔场发生微小改变,实现对加速度的快速监测。
所述的用于测量加速度的干涉仪结构示意图,如图1所示,该结构整体封装在毛细管6中,该毛细管的材质为二氧化硅,外形为圆柱形,长度为100mm,内径为200微米,外径为300微米。用于固定微光纤锥4和单模光纤8的密封胶1均为环氧树脂AB胶;固定支架2的材质为氟化镁晶体,其折射率低于二氧化硅,可有效降低光学损耗;所述的微光纤锥4的直径为200微米,纤芯直径为30微米,其尖端锥形纤芯5的最小芯径为1微米,可产生光学消逝场,有效提高F-P干涉仪的光学传输效率和用于传感测量的灵敏度;所述的单模光纤8的直径外125微米,其尖端微球3的直径为40微米,该直径与传感器测量精度直接相关,可通过单模光纤8的尖端直径和高温熔融过程中的技术参数需要进行调整;所述的缓冲液7,为折射率为1.37的低折射率匹配液,减小光学损耗的同时,有效缓冲微球的高频振荡,提高结构稳定性。

Claims (7)

1.一种基于微光纤锥球面反射型的干涉仪,包括密封胶(1)、固定支架(2)、微球(3)、微光纤锥(4)、锥形纤芯(5)、毛细管(6)、缓冲液(7)、单模光纤(8),其特征在于:密封胶(1)将微光纤锥(4)固定在毛细管(6)的轴心位置;固定支架(2)支撑固定微光纤锥(4),避免的抖动影响到结构的稳定性;所述的微光纤锥(4)由直径为200微米,纤芯直径为30微米的多模光纤经过高温熔融拉伸制作而成,其尖端用光纤切割笔切割平整,构成锥形纤芯(5);单模光纤(8)尖端的微球(3)和微光纤锥(4)的锥形纤芯(5)构成F-P干涉仪,毛细管(6)内灌注缓冲液(7);所述的单模光纤(8)的直径为125微米,采用高温熔融法在其尖端得到微球(3)。
2.根据权利要求1所述的一种基于微光纤锥球面反射型的干涉仪,其特征在于:所述的锥形纤芯(5),尖端纤芯直径为1微米,产生光学消逝场,有效提高F-P干涉仪的光学传输效率和用于传感测量的灵敏度。
3.根据权利要求1或2所述的一种基于微光纤锥球面反射型的干涉仪,其特征在于:所述的毛细管(6)的材质为二氧化硅,外形为圆柱形,长度为100mm,内径为200微米,外径为300微米。
4.根据权利要求3所述的一种基于微光纤锥球面反射型的干涉仪,其特征在于:所述的缓冲液(7),为折射率为1.37的低折射率匹配液,减小光学损耗的同时,有效缓冲微球的高频振荡,提高结构稳定性。
5.根据权利要求1所述的一种基于微光纤锥球面反射型的干涉仪,其特征在于:所述的微球(3)的直径为40微米,该直径可通过单模光纤(8)的尖端直径和高温熔融过程中的技术参数进行调整。
6.根据权利要求1所述的一种基于微光纤锥球面反射型的干涉仪,其特征在于:所述的密封胶(1)为环氧树脂AB胶。
7.根据权利要求1所述的一种基于微光纤锥球面反射型的干涉仪,其特征在于:所述的固定支架(2)的材质为氟化镁晶体,其折射率低于二氧化硅,有效降低光学损耗。
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JP2007225894A (ja) * 2006-02-23 2007-09-06 Matsushita Electric Works Ltd 光結合部品及びその製造方法
CN104852259B (zh) * 2015-05-22 2018-01-19 哈尔滨工程大学 液滴回音壁模式激光器及其制作方法
CN105806511B (zh) * 2016-04-29 2018-09-25 四川大学 基于球锥串联结构的微光纤超小型温度传感器
CN108169919B (zh) * 2018-01-18 2020-03-17 重庆邮电大学 一种利用锥形光纤倏逝场的微结构锁模器件及其生产工艺

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