CN110887515A - 一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪 - Google Patents
一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪 Download PDFInfo
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Abstract
本发明提供了一种基于光纤内平行反射镜的并联式法布里‑珀罗干涉仪,包括宽带光源,环形器,传感头,光谱分析仪。其中传感头由单模光纤制成,其特征在于:用飞秒激光在单模光纤里刻蚀,得到六条平行反射镜,组成三组平行独立、不同尺寸的法布里‑珀罗腔,使得在纤芯中的入射光在纤芯中传播的入射光分别经过三组平行独立、不同尺寸的法布里‑珀罗腔产生干涉并反射回纤芯,形成单光纤并联式法布里‑珀罗干涉仪。由环形器接收来自宽带光源的光并传输至传感头,再将光返回至环形器,经由环形器传输至光谱分析仪,形成并联式法布里‑珀罗干涉仪。本发明具有制造简单、机械强度高和成本低等优点,具有很好的高温工作稳定性,可用于应力和高温测量。
Description
技术领域
本发明提供了一种基于光纤内平行反射镜的串联式法布里-珀罗干涉仪,属于光纤传感技术领域。
背景技术
光纤传感技术是以光波作为信号载体,光纤作为传导介质,用于检测和传输外界待测物理量的传感技术。光纤传感技术始于上世纪70 年代,随着光纤通信技术的发展而迅速发展起来。经过几十年的迅猛发展,光纤传感技术已经成为当时瞩目的高新技术之一。光纤传感器由于它结构紧凑、轻便、抗电磁干扰和抗腐蚀的优点,是许多经济、军事强国争相研究的高新技术,可广泛应用于国民经济的各个领域,如航天、航海、石油开采、医疗等。其中相位调制光纤传感器由于采用干涉技术而具有很高的检测灵敏度,主要分为有马赫-泽德干涉仪、法布里-珀罗干涉仪、迈克尔逊干涉仪和萨格纳克干涉仪。法布里-珀罗干涉仪结构的光纤传感器以其结构简单,体积小,高灵敏度,单光纤信号传输等优点,广泛应用于结构内应变、应力、温度、压力、形变、振动和位移等物理量连续实时的安全检测,还可用于复合材料的固化状态的监测等,对于飞机、舰船、建筑等安全使用及完整性检测具有重要意义。
现阶段,各种不同结构的法布里-珀罗干涉仪及其制作方法也层出不穷,比如基于内置空腔的微锥形光纤,错位熔接的光纤、光纤镀膜、光纤腐蚀以及特种光纤等。以上所述均有很大不足,内置气腔以及腐蚀的光纤设备很脆弱,坚固性差且无法准确控制腔长;光纤纤芯错位熔接其重复性难以实现,并且手动组装需要大量时间;光纤镀膜成本昂贵。为了克服这些缺点,我们需要采用新的思路和技术来制作光纤传感器件。
飞秒激光辐射可以在二氧化硅材料内部的局部区域产生持久的正或负折射率改变,因此它通过非线性吸收效应可用于在二氧化硅材料刻蚀改变材料性质。随着全光纤传感器的加工中使用飞秒激光的机会越来越多,对飞秒激光的使用方法也在不断拓展中,采用飞秒脉冲照射烧蚀单模光纤的方法以生成干涉腔体的结构形式非常丰富,制备方便,有望用于制备新型法布里-珀罗干涉仪光纤传感器件。
发明内容
本发明针对现有技术不足,提供一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪,本发明具有结构紧凑、制造简单、机械强度高和成本低等优点,可用于应力和高温测量。
本发明解决技术问题所采取的技术方案为:一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪,包括宽带光源,环形器,传感头,光谱分析仪,其连接方式为:环形器输入端连接宽带光源,环形器反馈端连接光谱分析仪,环形器输出端连接传感头,其特征在于:用飞秒激光在单模光纤里刻蚀,得到六条平行反射镜,组成三组平行独立、不同尺寸的法布里-珀罗腔,使得在纤芯中的入射光在纤芯中传播的入射光分别经过三组平行独立、不同尺寸的法布里-珀罗腔产生干涉并反射回纤芯,形成单光纤并联式法布里-珀罗干涉仪。由环形器接收来自宽带光源的光并传输至传感头,再将光返回至环形器,经由环形器传输至光谱分析仪,形成并联式法布里-珀罗干涉仪。
所述的单模光纤的纤芯直径和光纤直径分别为8.2μm和125μm。
本发明与现有技术相比的有益效果是。
1、传感头选用价格低廉的普通单模光纤制备,具有成本低,制作简单的优点。
2、传感头对于高温、应力都具有敏感性,可以用于对环境参数的同时测量。
3、传感头为反射式结构,可以用于狭窄空间的传感测量。
附图说明
为了更清楚地说明本发明实施例或技术方案,下面结合附图和实施例对本发明作进一步说明。
图1为本发明的实施应用系统示意图。
图2为本发明传感头示意图。
图中, 1.宽带光源,2.环形器,3.传感头,4.光谱分析仪,5.单模光纤,5a. 单模光纤纤芯,5b. 单模光纤包层,6、7、8、9、10、11.反射镜。
具体实施方式
下面结合附图及实施实例对本发明作进一步描述。
图1所示为本发明的实施应用系统示意图,包括宽带光源1、环形器2、传感头3、光谱分析仪4。其连接方式为:环形器2有三个接口端,分别为:光源进口端,光源出口端,反馈端。进口端与宽带光源1连接,出口端与传感头3连接,反馈端和光谱分析仪4相连接。
图2所示为本发明传感头3的结构示意图,所述的传感头3,由单模光纤5、反射镜6、7、8、9、10、11构成,单模光纤5包括单模光纤纤芯5a,单模光纤包层5b。
所述传感头的制作方法及步骤是:利用飞秒激光在单模光纤纤芯内刻蚀出六条垂直于光轴的高、宽分别为2μm和1 μm的反射镜6、7、8、9、10、11,其中飞秒激光刻蚀的能量为500nJ,扫描速度为2μm/s。
结合图1,2,介绍具体的工作原理:由宽带光源1发出的光经环形器2到达传感头3,该光束在3中经过六条平行反射镜6、7、8、9、10、11组成三组平行独立、不同尺寸的法布里-珀罗腔,使得在纤芯中的入射光在纤芯中传播的入射光分别经过三组平行独立、不同尺寸的法布里-珀罗腔产生干涉并反射回纤芯,形成单光纤并联式法布里-珀罗干涉仪。
以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,应被理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围内。
Claims (5)
1.一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪,包括宽带光源,环形器,传感头,光谱分析仪,其连接方式为:环形器输入端连接宽带光源,环形器反馈端连接光谱分析仪,环形器输出端连接传感头;其特征在于:所述的传感头,由飞秒激光在单模光纤纤芯内刻写六条平行反射镜形成的三组平行独立、不同尺寸的法布里-珀罗腔组成。
2.根据权利要求1所述一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪,其特征在于:所述的并联结构,使得在纤芯中传播的入射光分别经过三组平行独立、不同尺寸的法布里-珀罗腔产生干涉并反射回纤芯,形成单光纤并联式法布里-珀罗干涉仪。
3.根据权利要求1所述的一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪,其特征为:所述的单模光纤的纤芯直径和光纤直径分别为8.2μm和125μm。
4.根据权利要求1所述的一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪,其特征为:所述的三组平行独立、不同尺寸的法布里-珀罗腔长度分别为24μm、59μm、100μm。
5.根据权利要求1所述的一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪,其特征为:所述的反射镜长度和宽度分别为2μm和1μm。
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