CN111609874A - 一种基于光纤内倾斜分束器的反射式马赫-曾德尔干涉仪 - Google Patents
一种基于光纤内倾斜分束器的反射式马赫-曾德尔干涉仪 Download PDFInfo
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Abstract
本发明提供了一种基于光纤内倾斜分束器的反射式马赫‑曾德尔干涉仪，包括宽带光源，环形器，传感头，光谱分析仪。其中传感头由单模光纤制成，其特征在于：用飞秒激光在单模光纤里刻蚀，得到一条与光纤轴夹角16
Description
技术领域
本发明提供了一种基于光纤内倾斜分束器的反射式马赫-曾德尔干涉仪，属于光纤传感技术领域。
背景技术
20世纪70年代，光纤传感技术伴随光纤通信技术的发展而迅速发展起来，相对于传统传感器来说，其具有极高的灵敏度和分辨率，频带范围很宽，动态范围很大，不受电磁场干扰等优点，是许多经济、军事强国争相研究的高新技术，可广泛应用于国民经济的各个领域，在航天、航海、石油开采、医疗等众多领域都得到了广泛的应用。在多种光纤传感器中，基于马赫曾德干涉原理的光纤传感器发展迅速，成为了光纤传感器研究领域的一个重要分支，广泛应用于结构内应变、应力、温度、压力、形变、振动和位移等物理量连续实时的安全检测，还可用于复合材料的固化状态的监测等，对于飞机、舰船、建筑等安全使用及完整性检测具有重要意义。现阶段，各种不同结构的马赫曾德干涉仪及其制作方法也层出不穷，比如基于内置空腔的微锥形光纤，错位熔接的光纤，光纤光栅和特种光纤等。以上所述均有很大不足，内置气腔设备很脆弱，坚固性差；光纤纤芯错位熔接其重复性难以实现，并且手动组装需要大量时间；光纤光栅写入过程复杂，成本较高，且其结构的不稳定性在一定程度上限制了其应用；特殊光纤价格昂贵。此外，这些干涉仪大部分采用透射式结构，在工作时需要将样品置于光源输出端和光谱检测端中间，在应用方面受到局限性，尤其不适合狭小封闭空间的传感测量。为了克服这些缺点，我们需要采用新的思路和技术来制作光纤传感器件。
飞秒激光辐射可以在二氧化硅材料内部的局部区域产生持久的正或负折射率改变，因此它可以用于在二氧化硅材料内部刻制波导。尽管二氧化碳激光和紫外激光曝光法均可用于制作二氧化硅材料中的光波导，但飞秒激光刻录法具有较高的精度和较好的表面光洁度。因此，飞秒激光有望在器件生产上有很大的潜力
发明内容
本发明针对现有技术不足，提供一种基于光纤内倾斜分束器的反射式马赫-曾德尔干涉仪，本发明具有结构紧凑、制造简单、机械强度高和成本低等优点，可用于温度和折射率测量。
本发明解决技术问题所采取的技术方案为：一种基于光纤内倾斜分束器的反射式马赫-曾德尔干涉仪，包括宽带光源，环形器，传感头，光谱分析仪，其连接方式为：环形器输入端连接宽带光源，环形器反馈端连接光谱分析仪，环形器输出端连接传感头，其特征在于：所述的传感头，是由飞秒激光在单模光纤里刻蚀，得到一条与光纤轴夹角16°的贯穿纤芯的光分束器，使得在纤芯中传播的入射光一部分穿过分束器传输，另一部分被反射到包层与空气界面，再经过全反射回到纤芯，两部分光在光纤端面处发生干涉并反射回纤芯，形成单光纤在线反射型马赫-曾德干涉仪。
所述的单模光纤的纤芯直径和光纤直径分别为8μm和125μm。
本发明与现有技术相比的有益效果是：
1、传感头选用价格低廉的普通单模光纤制备，具有成本低，制作简单的优点。
2、传感头对于温度、应力、折射率都具有敏感性，可以用于对环境参数的同时测量。
3、传感头为反射式结构，可以用于狭窄空间的传感测量。
附图说明
为了更清楚地说明本发明实施例或技术方案，下面结合附图和实施例对本发明作进一步说明。
图1为本发明的实施应用系统示意图。
图2为本发明传感头示意图。
图中, 1.宽带光源，2.环形器，3.传感头，4.光谱分析仪，5.单模光纤，5a. 单模光纤纤芯，5b. 单模光纤包层，6.光分束器。
具体实施方式
下面结合附图及实施实例对本发明作进一步描述：
图1所示为本发明的实施应用系统示意图，包括宽带光源1、环形器2、传感头3、光谱分析仪4。其连接方式为：环形器2有三个接口端，分别为：光源进口端，光源出口端，反馈端。进口端与宽带光源1连接，出口端与传感头3连接，反馈端和光谱分析仪4相连接。
图2所示为本发明传感头3的结构示意图，所述的传感头3，由单模光纤5、光分束器67构成，单模光纤5包括单模光纤纤芯5a，单模光纤包层5b。
所述传感头的制作方法及步骤是：第一步：利用飞秒激光在单模光纤内刻蚀出穿过纤芯的光分束器6，光分束器和纤芯的夹角为16°；第二步在距离光分束器6约200μm的长度处将端面切平。其中飞秒激光刻蚀的能量为500nJ，扫描速度为10μm/s。
结合图1，2，介绍具体的工作原理：由宽带光源1发出的光经环形器2到达传感头3，该光束在3中到达分束器6时，光被分成两部分：一部分穿过分束器传输，另一部分被反射到包层与空气界面，再经过全反射回到纤芯，两部分光在光纤端面中重新组合并干涉，到达光纤切割端面时会被反射回来，形成单光纤在线反射型马赫-曾德干涉仪。
以上所述的具体实施例，对本发明的目的、技术方案和有益效果进行了进一步详细说明，应被理解的是，以上所述仅为本发明的具体实施例而已，并不用于限制本发明，凡在本发明的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。
Claims (3)
1.一种基于光纤内倾斜分束器的反射式马赫-曾德尔干涉仪，包括宽带光源，环形器，传感头，光谱分析仪，其连接方式为：环形器输入端连接宽带光源，环形器反馈端连接光谱分析仪，环形器输出端连接传感头；其特征在于：所述的传感头，由飞秒激光的单模光纤内刻写与光纤轴夹角16
光分束器构成。
2.根据权利要求1所述一种基于光纤内倾斜分束器的反射式马赫-曾德尔干涉仪，其特征在于：所述的光分束器，使得在纤芯中传播的入射光一部分穿过分束器传输，另一部分被反射到包层与空气界面，再经过全反射回到纤芯，两部分光在光纤端面处发生干涉并反射回纤芯，形成单光纤反射型马赫-曾德干涉仪。
3.根据权利要求1所述的一种基于光纤内倾斜分束器的反射式马赫-曾德尔干涉仪，其特征为：所述的单模光纤的纤芯直径和光纤直径分别为8μm和125μm。
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| CN113465771A (zh) * | 2021-06-02 | 2021-10-01 | 哈尔滨工业大学 | 一种基于游标效应的光纤温度传感装置 |
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Application publication date: 20200901 |