CN109623139A - Water Jet Guided Laser processing unit (plant) and system - Google Patents
Water Jet Guided Laser processing unit (plant) and system Download PDFInfo
- Publication number
- CN109623139A CN109623139A CN201811507530.XA CN201811507530A CN109623139A CN 109623139 A CN109623139 A CN 109623139A CN 201811507530 A CN201811507530 A CN 201811507530A CN 109623139 A CN109623139 A CN 109623139A
- Authority
- CN
- China
- Prior art keywords
- laser
- liquid
- chamber
- water jet
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
This application discloses a kind of Water Jet Guided Laser processing unit (plant) and systems, belong to technical field of laser processing.Water Jet Guided Laser processing unit (plant) includes: frame structure, laser transmission pipeline and laminar flow component;Frame structure from top to bottom successively includes focusing chamber, liquid chamber and gas chamber;Laser transmission pipeline is fixed in liquid chamber along the direction of propagation of laser, and the lower end of laser transmission pipeline is fixed with window filter;Liquid chamber is provided with liquid inlet;It is fixed with laminar flow component in the first annular space that laser transmission pipeline and liquid chamber are formed, so as to stable laminar flow be formed along the direction of propagation of laser into the liquid in liquid chamber, to form cladding to the laser projected by laser transmission pipeline.The arrangement increases the coupled powers between the total reflection efficiency and laser and liquid of laser, to obtain high-power coupling Water Jet Guided Laser, improve the working depth of laser.
Description
Technical field
This application involves a kind of Water Jet Guided Laser processing unit (plant) and systems, belong to technical field of laser processing.
Background technique
Water Jet Guided Laser processing technology is a kind of technology that fine water jet guidance laser is processed, in water due to laser
It is different from the refractive index in air, make the laser of water transmission occur to be totally reflected and be limited on the interface of water beam and air
In water beam, water does up the effect of optical fibers.
At this stage, a kind of high-power coupling Water Jet Guided Laser processing unit (plant), the device are disclosed in patent CN108262556A
Including liquid chamber, window lens, liquid chamber includes condenser lens, support construction and liquid contracting stream conduction device, liquid contracting
The inner wall of stream conduction device is coated with total reflection figure layer, using reflection coating and the method for rotation Water Jet Guided Laser, improves laser
Coupled power, and further expanded the depth capability of laser processing.A kind of rotation is disclosed in patent CN108581224A
Formula laser processing device and its application, laser-processing system and method, the device include: support portion and contracting stream conduction device, branch
The liquid with laser coupled is connected in support part;Contracting stream conduction device is set to the lower section of support portion and is connected with support portion;Its
In, liquid chamber and encapsulation gas blanket are equipped in contracting stream conduction device;Encapsulation gas blanket is set to outside liquid chamber;Liquid chamber
Cross-sectional diameter be gradually reduced along the transmission direction of laser, and form conduction terminals, the main shaft and laser primary optical axis of conduction terminals at
Inclined at acute angles;The contracting stream conduction device mode that rotary laser is processed in laser primary optical axis rotation, the patent improves working depth.
However, Water Jet Guided Laser processing unit (plant) in the prior art, when being coupled due to liquid and laser, coupled power is also
It is that relatively low and laser total reflection efficiency is also relatively low, so that the output power of laser is lower, therefore the working depth of laser
Still it is not able to satisfy the demand of some occasions.
Summary of the invention
According to the one aspect of the application, a kind of Water Jet Guided Laser processing unit (plant) is provided, the arrangement increases the complete of laser
Coupled power between reflection efficiency and laser and liquid improves adding for the laser to obtain high-power coupled laser
Work depth can make working depth reach 10mm or more.
The Water Jet Guided Laser processing unit (plant), comprising: frame structure, laser transmission pipeline and laminar flow component;
The frame structure from top to bottom successively includes focusing chamber, liquid chamber and gas chamber;
The laser transmission pipeline is fixed in the liquid chamber along the direction of propagation of laser, the laser transmission pipeline
Lower end be fixed with window filter;
The liquid chamber is provided with liquid inlet;
The laminar flow component is fixed in the first annular space that the laser transmission pipeline and the liquid chamber are formed
So as to form stable laminar flow along the direction of propagation of laser into the liquid in the liquid chamber to by the laser
The laser that defeated pipeline projects forms cladding.
Optionally, the laminar flow component includes at least one cyclic annular filter screen, and the top of the liquid chamber is along its circumferential direction
Equipped with multiple liquid inlets, the ring-type filter screen is located at the lower section of the multiple liquid inlet.
Optionally, the laminar flow component includes the first cyclic annular filter screen, the second cyclic annular filter screen and energy accumulation member, described
Second cyclic annular filter screen is located at the lower section of the described first cyclic annular filter screen, the described first cyclic annular filter screen and the second cyclic annular filter screen
Between be folded with the energy accumulation member;
Preferably, the energy accumulation member is cavernous body.
Optionally, the laminar flow component further includes third ring-type filter screen and air guide, the third ring-type filtering
Net is located at the lower section of the described second cyclic annular filter screen, and is folded between the described second cyclic annular filter screen and third ring-type filter screen
Air guide;
Preferably, the air guide is more diversion pipes.
Optionally, being mounted on the indoor condenser lens of the cavity for focusing can slide along the direction of propagation of the laser.
Optionally, the bottom end of the liquid chamber forms the first necking, and first necking is located at the window lens
Lower section;The bottom end of the gas chamber forms the second necking, and second necking is located at the lower section of first necking.
Those skilled in the art can select in suitable liquid chamber internal diameter and the first necking according to needs of production
The ratio of diameter, the application do not do and strictly limit.Preferably, the ratio of the internal diameter of the liquid chamber and the internal diameter of the first necking
Greater than 10:1.
Optionally, gas filtration dress is fixed in the second annular space that the gas chamber and first necking are formed
It sets, the top of the gas chamber is circumferentially with multiple gas accesses along it, and the gas-filtering device is located at the multiple gas
The lower section of body entrance.
Optionally, the liquid in the liquid chamber is water, and the indoor gas of air chamber is nitrogen.
According to the another aspect of the application, a kind of Water Jet Guided Laser system of processing is additionally provided, comprising: electric-control system, laser
Device, optical element, liquid transmission unit, gas transport unit and Water Jet Guided Laser processing unit (plant) described in any of the above embodiments;
The electric-control system is connect with the laser, gas transport unit and liquid transmission unit for controlling respectively
State laser, gas transport unit and liquid transmission unit;
The optical element is between the laser and Water Jet Guided Laser processing unit (plant) for generating the laser
Laser import in the Water Jet Guided Laser processing unit (plant);
The liquid transmission unit is connect with the liquid chamber in the Water Jet Guided Laser processing unit (plant) for importing liquid
In liquid chamber;
The gas transport unit is connect with the gas chamber in the Water Jet Guided Laser processing unit (plant) for introducing gas into
In gas chamber.
The beneficial effect that the application can generate includes:
1) Water Jet Guided Laser processing unit (plant) provided herein, by formed in laser transmission pipeline and liquid chamber the
Laminar flow component is fixed in one annular space, so that forming stable laminar flow, laminar flow into the liquid in liquid chamber
It is wrapped in around laser beam and forms liquid beam so that laser is propagated in the liquid beam, stable laminar flow liquid beam improves the complete of laser
Reflection efficiency.
2) Water Jet Guided Laser processing unit (plant) provided herein improves since liquid has stable laminar flow characteristics
The stability of system reduces light scattering bring and destroys and damage, improves light liquid coupled power.
3) Water Jet Guided Laser processing unit (plant) provided herein, since total reflection efficiency with higher and light liquid couple function
Rate, therefore high-power coupled laser can be exported, i.e., the laser can reach multikilowatt power under micro-meter scale, and working depth reaches
To 10mm or more.
4) Water Jet Guided Laser processing unit (plant) provided herein, technical costs are low.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of Water Jet Guided Laser processing unit (plant) provided in this embodiment;
Fig. 2 is that the Water Jet Guided Laser in Water Jet Guided Laser processing unit (plant) provided in this embodiment conducts schematic diagram;
Fig. 3 is the structural block diagram of Water Jet Guided Laser system of processing provided in this embodiment.
Component and reference signs list:
100 frame structures;101 focus chamber;1011 condenser lenses;
102 liquid chambers;1021 first neckings;1022 liquid inlets;
103 gas chamber;1031 second neckings;1032 gas accesses;
1033 gas-filtering devices;200 laser transmission pipelines;201 window lens;
301 cyclic annular filter screens;3011 first cyclic annular filter screens;
3012 second cyclic annular filter screens;3013 third ring-type filter screens;
302 energy accumulation members;303 air guides;
11 electric-control systems;12 lasers;13 optical elements;
14 liquid transmission units;15 gas transport units;
16 Water Jet Guided Laser processing unit (plant)s;17 workpiece.
Specific embodiment
The application is described in detail below with reference to embodiment, but the application is not limited to these embodiments.
This application provides a kind of Water Jet Guided Laser processing unit (plant)s, comprising: frame structure 100, laser transmission pipeline 200 and
Laminar flow component;Frame structure 100 successively includes focusing chamber 101, liquid chamber 102 and gas chamber 103 from top to bottom;Laser
Transmission pipeline 200 is fixed in liquid chamber 102 along the direction of propagation of laser, and the lower end fixation of laser transmission pipeline 200 is fenestrate
Mouth filter 201;Liquid chamber 102 is provided with liquid inlet 1022;Laser transmission pipeline 200 and liquid chamber 102 formed the
Laminar flow component is fixed in one annular space so as to form stable laminar flow into the liquid in liquid chamber 102 to by swashing
The laser that light-transmissive conduits 200 project forms cladding.
Specifically, the upper section of frame structure 100, which is formed, focuses chamber 101, the middle section of frame structure 100 forms liquid chamber
102, the lower section of frame structure 100 forms gas chamber 103.Gas in gas chamber 103 to by liquid chamber 102 for flowing
Liquid out forms cladding so that laser is propagated in the liquid.
Water Jet Guided Laser processing unit (plant) provided by the present application passes through the first ring formed in laser transmission pipeline and liquid chamber
It is fixed with laminar flow component in shape space, forms stable laminar flow, laminar flow into the liquid in liquid chamber to realize
It is wrapped in around laser beam and forms liquid beam so that laser is propagated in the liquid beam, stable laminar flow liquid beam improves the complete of laser
Reflection efficiency and light liquid coupled power improve the working depth of laser to obtain powerful output laser.
Optionally, laminar flow component includes at least one cyclic annular filter screen 301, and the top of liquid chamber 102 is set along its circumferential direction
There are multiple liquid inlets 1022, cyclic annular filter screen 301 is located at the lower section of multiple liquid inlets 1022.
Specifically, the internal perisporium of cyclic annular filter screen 301 is arranged and supports on the outer wall of laser transmission pipeline 200, cyclic annular
The periphery wall of filter screen 301 is supported on the internal chamber wall of liquid chamber 102, so as to be passed through by the liquid that liquid inlet 1022 enters
In cyclic annular 301 influent chamber 102 of filter screen.Cyclic annular filter screen 301 improves the uniformity of fluid, is conducive to fluid and is formed
Stable laminar flow.Liquid inlet 1022 is uniformly arranged along the top peripheral wall of liquid chamber 102.Cyclic annular filter screen 301 can be 1
It is a, or may be 2, it is, of course, also possible to be 3, it is uniform along the direction of propagation of laser between multiple ring-type filter screens 301
It is arranged on the outer wall of laser transmission pipeline 200, flow effect is improved step by step to the liquid multi-layer in liquid chamber 102.
Optionally, laminar flow component includes the first cyclic annular filter screen 3012 of cyclic annular filter screen 3011, second and energy accumulation member
302, the second cyclic annular filter screen 3012 is located at the lower section of the first cyclic annular filter screen 3011, the first cyclic annular filter screen 3011 and the second ring
Energy accumulation member 302 is folded between shape filter screen 3012.Preferably, energy accumulation member 302 is cavernous body.
Specifically, in the cavity wall institute of the first cyclic annular filter screen 3011 and the second cyclic annular filter screen 3012 and liquid chamber 102
Cavernous body is stuffed entirely in the space of formation.The specific energy storage effect of cavernous body generates storage to the fluid entered in liquid chamber 102
It stores, so that being conducive to fluid forms stable laminar flow.
Optionally, laminar flow component further includes third ring-type filter screen 3013, air guide 303, third ring-type filter screen
3013 are located at the lower section of the second cyclic annular filter screen 3012, and between the second cyclic annular filter screen 3012 and third ring-type filter screen 3013
It is folded with air guide 303.
Preferably, air guide 303 is more diversion pipes 303.
In a specific example, air guide 303 is more diversion pipes 303.More diversion pipes 303 are mounted on second
The cavity wall of cyclic annular filter screen 3012 and third ring-type filter screen 3013 and liquid chamber 102 is formed by space, diversion pipe 303
Upper end support on the second cyclic annular filter screen 3012, the lower end of diversion pipe 303 is supported on third ring-type filter screen 3013, with
Keep liquid consistent along the flow direction of diversion pipe 303 and the direction of propagation of laser, that is to say, that make fluid in the propagation side of laser
It is upwardly formed stable laminar flow.
Diversion pipe 303 can be metal tube or be plastic tube, perhaps be ceramic tube or also with for glass tube, tube wall
For smooth shape, advantageously forms liquid and form laminar flow.Preferably, diversion pipe 303 is glass tube.Diversion pipe 303 can be solid
Pipe, or may be hollow pipe.When diversion pipe 303 be hollow pipe when, fluid can be flowed out from die, or from Guan Yuguan it
Between flow out.
In another specific example, air guide 303 is multiple sheet airflow fences.Specifically, in the second cyclic annular mistake
Multiple sheet airflow fences are folded between strainer 3012 and third ring-type filter screen 3013.Multiple sheet airflow fences are transmitted along laser
The periphery wall of pipeline 200 is uniformly distributed, and each airflow fence is located at the radially extending on direction of laser transmission pipeline 200, shape
At astral ray shape, the inner end of sheet airflow fence is supported on the outer wall of laser transmission pipeline 200, and the outer end of sheet airflow fence is supported
On the inner wall of liquid chamber 102, the upper end of sheet airflow fence is supported on the second cyclic annular filter screen 3012, sheet airflow fence
It supports on third ring-type filter screen 3013 lower end.
Optionally, being mounted on the condenser lens 1011 focused in chamber 101 can slide along the direction of propagation of laser.
Specifically, condenser lens 1011 can be slided along the direction of propagation of the laser, excellent to adjust the focal position of laser
Selection of land, focal position are the liquid outlet position of liquid chamber 102.And laser can also be adjusted to be all-trans in liquid gas-bearing formation
Incidence angle when penetrating, to improve total reflection efficiency.
Optionally, the bottom end of liquid chamber 102 forms the first necking 1021, and the first necking 1021 is located at window lens 201
Lower section;The bottom end of gas chamber 103 forms the second necking 1031, and the second necking 1031 is located at the lower section of the first necking 1021.
Specifically, the first necking 1021 is the cambered surface necking to 102 indent of liquid chamber, as shown in Figure 1, first necking
1021 diameter is gradually reduced along the direction of propagation of laser.First necking 1021 advantageously allows that treated by laminar flow component
Liquid continues to keep the state of laminar flow, is totally reflected with realizing that laser is realized in liquid gas-bearing formation, and be also beneficial to laser and fluid shape
At efficient coupling, reduce due to laser light scattering and bring destruction and damage.
Second necking 1031 is the cambered surface necking to 103 indent of gas chamber, as shown in Figure 1, second necking 1031
Diameter is gradually reduced along the direction of propagation of laser.It is marked with gas in gas chamber 103, the gas and liquid form laser and realizes
The necessary condition of total reflection.Second necking 1031 realizes gas and is wrapped with laser fluid column to what is flowed out from the first necking 1021
Compression effectiveness, as shown in Fig. 2, the diameter of fluid column is further reduced to improve the output power of laser.In gas chamber 103
Gas can for high pressure gas to realize better compression effectiveness.
In this application, the internal diameter of liquid chamber 102 is preferably far longer than the internal diameter of the first necking 1021, to realization liquid
It is most important to form stable laminar flow.First necking 1021 goes out the going out at liquid more preferably greater than the second necking 1031 of the internal diameter at liquid
Interior diameter.The internal diameter of first necking 1021 and the second necking 1031 is a millimeter rank.
Optionally, the ratio of the internal diameter of liquid chamber 102 and the internal diameter of the first necking 1021 is greater than 10:1.
Optionally, gas filtration dress is fixed in the second annular space that gas chamber 103 and the first necking 1021 are formed
1033 are set, the top of gas chamber 103 is circumferentially with multiple gas accesses 1032 along it, and gas-filtering device 1033 is located at multiple
The lower section of gas access 1032.
Specifically, gas-filtering device 1033 can be filter screen, or may be filter grid.Gas-filtering device
1033 can improve the uniformity of gas.Multiple gas accesses 1032 can be uniformly arranged along the peripheral wall of gas chamber 103.
Optionally, the liquid in liquid chamber 102 is water, and the gas in gas chamber 103 is nitrogen.
Present invention also provides a kind of Water Jet Guided Laser systems of processing, comprising: electric-control system 11, laser 12, optical element
13, liquid transmission unit 14, gas transport unit 15 and Water Jet Guided Laser processing unit (plant) 16 described above;
Electric-control system 11 is connect with laser 12, gas transport unit 15 and liquid transmission unit 14 for controlling respectively
State the operation of laser 12, gas transport unit 15 and liquid transmission unit 14;
Optical element 13 swashs between laser 12 and Water Jet Guided Laser processing unit (plant) 16 for generate laser 12
Light imports in Water Jet Guided Laser processing unit (plant) 16;
Liquid transmission unit 14 is connect with the liquid chamber 102 in Water Jet Guided Laser processing unit (plant) 16 for liquid to be imported liquid
In fluid chamber 102;
Gas transport unit 15 is connect with the gas chamber 103 in Water Jet Guided Laser processing unit (plant) 16 for introducing gas into gas
In fluid chamber 103.
Embodiment 1
Fig. 1 is the structural schematic diagram of Water Jet Guided Laser processing unit (plant) provided in this embodiment, and Fig. 2 is water provided in this embodiment
The Water Jet Guided Laser conduction schematic diagram in laser processing device is led, specifically the present embodiment is illustrated below with reference to Fig. 1 and Fig. 2.
As shown in Figure 1, it is provided in this embodiment lead laser processing device include focus chamber 101, liquid chamber 102 and
Gas chamber 103, condenser lens 1011, which is slidably mounted on, to be focused in chamber 101.
Laser transmission pipeline 200 is mounted on the center of liquid chamber 102, and the upper end of laser transmission pipeline 200 is fixed
On the bottom wall for focusing chamber 101, the lower end of laser transmission pipeline 200 is equipped with window lens 201, and window lens 201 with
There is a certain distance between first necking 1021.Laminar flow component includes the first cyclic annular filter screen of cyclic annular filter screen 3011, second
3012, third ring-type filter screen 3013, cavernous body and more diversion pipes, cavernous body are located at the first cyclic annular filter screen 3011 and the
Between two cyclic annular filter screens 3012, more diversion pipes are located between the second cyclic annular filter screen 3012 and third ring-type filter screen 301.
Multiple liquid inlets 1022 are evenly distributed in the cavity wall of the liquid chamber 102 of first cyclic annular 3011 top of filter screen.
Be equipped with gas-filtering device 1033 in gas chamber 103, gas-filtering device 1033 be located at the first necking 1021 with
Gas chamber 103 is formed by the second annular space.Gas-filtering device 1033 is ring-type, and is set in a necking 1021
On periphery wall.Multiple gas accesses are evenly distributed in the cavity wall of the gas chamber 103 of the top of gas-filtering device 1033
1032。
In the present embodiment, laser is successively propagated along focusing chamber, liquid chamber, gas chamber.Laser enters cavity for focusing
When room, the condenser lens focused in chamber generates focusing effect to it, when being totally reflected using condenser lens adjustment laser
Incidence angle, to improve the total reflection efficiency of laser.Laser enters the laser transmission pipeline being located in liquid chamber by focusing chamber,
Enter in liquid chamber across window lens, the laminar flow in liquid chamber coats it, then by liquid chamber into
Enter in gas chamber, the gas in gas chamber coats above-mentioned laminar flow, so that laser is in liquid gas-bearing formation stream interface
It is totally reflected.
As shown in Fig. 2, laser beam is totally reflected in liquid gas-bearing formation stream interface;
To guarantee that laser in the total reflection effect of liquid gas interface, should meet following condition:
Wherein θ 1 is the incidence angle of laser and liquid gas-bearing formation stream interface, and θ 2 is refraction angle, and n1, n2 are respectively light and water, nitrogen
Refractive index.It is assumed that θ 2 is 90 °, i.e. laser is totally reflected in liquid gas-bearing formation stream interface, at this point, calculating to obtain θ 1 as laser and liquid
The minimum incidence angle that gas-bearing formation stream interface is totally reflected is not less than θ 1 with liquid gas-bearing formation stream interface incidence angle as long as meeting laser, that
Laser can be totally reflected in liquid gas-bearing formation stream interface.Using the total reflection effect of liquid gas-bearing formation stream interface, device is by laser light
Line is transmitted to 400 surface of workpieces processing and carries out material removal process.
Embodiment 2
Fig. 3 be Water Jet Guided Laser system of processing provided in this embodiment structural block diagram, below with reference to Fig. 3 with the present embodiment into
Row illustrates.
Water Jet Guided Laser system of processing in the present embodiment includes electric-control system 11, electric-control system 11 respectively with laser 12,
Liquid transmission unit 14 and gas transmission unit 15 are electrically connected.The laser generated in laser 12 enters water by optical element 13
It leads in the focusing chamber 101 of laser processing device 16, focusing is generated to the laser by condenser lens 1011.The laser is again successively
By the transmission of laser transmission pipeline 200, the processing of window lens 201, the laminar flow cladding of liquid chamber 102, gas chamber 103
Contracting stream compression processing, liquid gas-bearing formation stream interface total reflection effect etc. reach workpiece performance, deep processing is carried out to material.
Liquid transmission unit 14 is connected to liquid chamber 102, injects water to liquid chamber 102.
Gas transport unit 15 is connected to gas chamber 103, injects nitrogen to gas chamber 103.
The above is only several embodiments of the application, not does any type of limitation to the application, although this Shen
Please disclosed as above with preferred embodiment, however not to limit the application, any person skilled in the art is not taking off
In the range of technical scheme, a little variation or modification are made using the technology contents of the disclosure above and is equal to
Case study on implementation is imitated, is belonged in technical proposal scope.
Claims (10)
1. a kind of Water Jet Guided Laser processing unit (plant) characterized by comprising frame structure, laser transmission pipeline and laminar flow component;
The frame structure successively includes focusing chamber, liquid chamber and gas chamber from top to bottom;
The laser transmission pipeline is fixed in the liquid chamber along the direction of propagation of laser, under the laser transmission pipeline
End is fixed with window filter;
The liquid chamber is provided with liquid inlet;
Be fixed with the laminar flow component in the first annular space that the laser transmission pipeline and the liquid chamber are formed so that
Stable laminar flow is formed along the direction of propagation of laser into the liquid in the liquid chamber, thus to by the laser transfer tube
The laser that road projects forms cladding.
2. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that the laminar flow component includes at least one
The top of cyclic annular filter screen, the liquid chamber is circumferentially with multiple liquid inlets along it, and the ring-type filter screen is located at described
The lower section of multiple liquid inlets.
3. Water Jet Guided Laser processing unit (plant) according to claim 2, which is characterized in that the laminar flow component includes first cyclic annular
Filter screen, the second cyclic annular filter screen and energy accumulation member, the described second cyclic annular filter screen are located at the described first cyclic annular filter screen
Lower section is folded with the energy accumulation member between the described first cyclic annular filter screen and the second cyclic annular filter screen;
Preferably, the energy accumulation member is cavernous body.
4. Water Jet Guided Laser processing unit (plant) according to claim 3, which is characterized in that the laminar flow component further includes third ring
Shape filter screen and air guide, the third ring-type filter screen are located at the lower section of the described second cyclic annular filter screen, and described the
The air guide is folded between two cyclic annular filter screens and third ring-type filter screen;
Preferably, the air guide is more diversion pipes.
5. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that it is indoor poly- to be mounted on the cavity for focusing
Focus lens can be slided along the direction of propagation of the laser.
6. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that the bottom end of the liquid chamber forms the
One necking, first necking are located at the lower section of the window lens;
The bottom end of the gas chamber forms the second necking, and second necking is located at the lower section of first necking.
7. Water Jet Guided Laser processing unit (plant) according to claim 6, which is characterized in that the internal diameter of the liquid chamber and first
The ratio of the internal diameter of necking is greater than 10:1.
8. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that the gas chamber and first contracting
It is fixed with gas-filtering device in the second annular space that mouth is formed, the top of the gas chamber is circumferentially with multiple gas along it
Body entrance, the gas-filtering device are located at the lower section of the multiple gas access.
9. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that the liquid in the liquid chamber is
Water, the indoor gas of air chamber are nitrogen.
10. a kind of Water Jet Guided Laser system of processing characterized by comprising electric-control system, laser, optical element, liquid transmission
Unit, gas transport unit and Water Jet Guided Laser processing unit (plant) according to any one of claims 1 to 9;
The electric-control system connect with the laser, gas transport unit and liquid transmission unit described sharp for controlling respectively
Light device, gas transport unit and liquid transmission unit;
The optical element swashs between the laser and Water Jet Guided Laser processing unit (plant) for generate the laser
Light imports in the Water Jet Guided Laser processing unit (plant);
The liquid transmission unit is connect with the liquid chamber in the Water Jet Guided Laser processing unit (plant) for liquid to be imported liquid
In chamber;
The gas transport unit is connect with the gas chamber in the Water Jet Guided Laser processing unit (plant) for introducing gas into gas
In chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811507530.XA CN109623139B (en) | 2018-12-11 | 2018-12-11 | Water-guided laser processing device and system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811507530.XA CN109623139B (en) | 2018-12-11 | 2018-12-11 | Water-guided laser processing device and system |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109623139A true CN109623139A (en) | 2019-04-16 |
CN109623139B CN109623139B (en) | 2021-07-27 |
Family
ID=66072493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811507530.XA Active CN109623139B (en) | 2018-12-11 | 2018-12-11 | Water-guided laser processing device and system |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109623139B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111014946A (en) * | 2020-01-19 | 2020-04-17 | 中国科学院宁波材料技术与工程研究所 | Water-guided laser processing device and processing system |
CN111098043A (en) * | 2020-01-19 | 2020-05-05 | 中国科学院宁波材料技术与工程研究所 | Water-guided laser processing device and processing system |
CN113634880A (en) * | 2021-07-28 | 2021-11-12 | 中国科学院宁波材料技术与工程研究所 | Multi-beam water-guided laser processing device and system |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1256413A1 (en) * | 2001-05-07 | 2002-11-13 | JENOPTIK Automatisierungstechnik GmbH | Laser machining head |
CN101396768A (en) * | 2007-09-28 | 2009-04-01 | 速技能机械有限公司 | Laser processing device using laser beam induced into jet column |
CN101823183A (en) * | 2009-03-04 | 2010-09-08 | 鸿富锦精密工业(深圳)有限公司 | Water-conducted laser device |
CN103487233A (en) * | 2013-09-11 | 2014-01-01 | 北京工业大学 | Laminar flow trough used for generating laminar flow flowing |
CN104368911A (en) * | 2014-10-28 | 2015-02-25 | 中国科学院宁波材料技术与工程研究所 | Laser processing head, application of laser processing head and laser processing system and method |
CN105598592A (en) * | 2016-03-25 | 2016-05-25 | 东南大学 | Underwater laser cutting device and underwater laser cutting method |
CN205495109U (en) * | 2015-12-29 | 2016-08-24 | 武汉汉水计量科技有限公司 | Through type filter that stretches out and draws back |
WO2018072808A1 (en) * | 2016-10-17 | 2018-04-26 | Abb Schweiz Ag | Cleaning device and method for controlling a laser focus inside a fluid beam, and a system including the cleaning device |
CN108480842A (en) * | 2018-06-12 | 2018-09-04 | 桂林电子科技大学 | Water Jet Guided Laser coupling shunting stable-pressure device |
-
2018
- 2018-12-11 CN CN201811507530.XA patent/CN109623139B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1256413A1 (en) * | 2001-05-07 | 2002-11-13 | JENOPTIK Automatisierungstechnik GmbH | Laser machining head |
CN101396768A (en) * | 2007-09-28 | 2009-04-01 | 速技能机械有限公司 | Laser processing device using laser beam induced into jet column |
CN101823183A (en) * | 2009-03-04 | 2010-09-08 | 鸿富锦精密工业(深圳)有限公司 | Water-conducted laser device |
CN103487233A (en) * | 2013-09-11 | 2014-01-01 | 北京工业大学 | Laminar flow trough used for generating laminar flow flowing |
CN104368911A (en) * | 2014-10-28 | 2015-02-25 | 中国科学院宁波材料技术与工程研究所 | Laser processing head, application of laser processing head and laser processing system and method |
CN205495109U (en) * | 2015-12-29 | 2016-08-24 | 武汉汉水计量科技有限公司 | Through type filter that stretches out and draws back |
CN105598592A (en) * | 2016-03-25 | 2016-05-25 | 东南大学 | Underwater laser cutting device and underwater laser cutting method |
WO2018072808A1 (en) * | 2016-10-17 | 2018-04-26 | Abb Schweiz Ag | Cleaning device and method for controlling a laser focus inside a fluid beam, and a system including the cleaning device |
CN108480842A (en) * | 2018-06-12 | 2018-09-04 | 桂林电子科技大学 | Water Jet Guided Laser coupling shunting stable-pressure device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111014946A (en) * | 2020-01-19 | 2020-04-17 | 中国科学院宁波材料技术与工程研究所 | Water-guided laser processing device and processing system |
CN111098043A (en) * | 2020-01-19 | 2020-05-05 | 中国科学院宁波材料技术与工程研究所 | Water-guided laser processing device and processing system |
CN113634880A (en) * | 2021-07-28 | 2021-11-12 | 中国科学院宁波材料技术与工程研究所 | Multi-beam water-guided laser processing device and system |
CN113634880B (en) * | 2021-07-28 | 2023-12-05 | 中国科学院宁波材料技术与工程研究所 | Multi-beam water-guided laser processing device and processing system |
Also Published As
Publication number | Publication date |
---|---|
CN109623139B (en) | 2021-07-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN109623139A (en) | Water Jet Guided Laser processing unit (plant) and system | |
CN109085667A (en) | A kind of super surface achromatism line polarisation lens | |
CN107074590A (en) | Method, system and equipment for the processing of fluid | |
CN108247201B (en) | A kind of high pressure water beam generating device and the Water Jet Guided Laser system with the device | |
CN101523267A (en) | Illuminator method and device | |
US11248858B2 (en) | Heat transfer device and furnace using same | |
JP2019188127A (en) | Ultraviolet light irradiation device | |
CN207319681U (en) | A kind of sound field is imaged Fresnel Lenses | |
CN107643596A (en) | The diffraction axis axicon lens system and its Diode laser imaging method of a kind of binary zone plate form | |
CN108107559A (en) | High-transmittance condensing system for light beams with different field angles | |
CN109514080A (en) | High power Water Jet Guided Laser processing unit (plant) and system | |
CN106772727B (en) | A kind of column vector beam dielectric grating Diode laser condenser lens | |
CN107797224A (en) | Optical lens and laser process equipment and laser processing | |
CN109514081A (en) | A kind of Water Jet Guided Laser processing unit (plant) and system of processing | |
JP2006037961A (en) | Intake casing | |
CN206696535U (en) | A kind of dual-wavelength laser continuous zoom beam expanding lens | |
CN109623140A (en) | Optical fiber couples processing unit (plant) and system with Water Jet Guided Laser | |
CN107166757A (en) | The circular Fresnel type solar collecting device of point focusing twice | |
CN207723690U (en) | A kind of high pressure water beam generating means and the Water Jet Guided Laser system with the device | |
CN108262556B (en) | High-power coupling laser processing device and laser processing system | |
CN103454769B (en) | The method of optical system, exposure device and manufacture device | |
CN113634880B (en) | Multi-beam water-guided laser processing device and processing system | |
CN206627648U (en) | A kind of flat axicon lens of all dielectric grating | |
CN105527716A (en) | Ultraviolet laser zoom beam expanding lens | |
CN1639530A (en) | Device for introducing hot gas into a heating surface pipe of a waste heat boiler |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |