CN109623139A - Water Jet Guided Laser processing unit (plant) and system - Google Patents

Water Jet Guided Laser processing unit (plant) and system Download PDF

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Publication number
CN109623139A
CN109623139A CN201811507530.XA CN201811507530A CN109623139A CN 109623139 A CN109623139 A CN 109623139A CN 201811507530 A CN201811507530 A CN 201811507530A CN 109623139 A CN109623139 A CN 109623139A
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China
Prior art keywords
laser
liquid
chamber
water jet
gas
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Granted
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CN201811507530.XA
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CN109623139B (en
Inventor
张广义
张文武
王玉峰
茹浩磊
郭春海
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Ningbo Institute of Material Technology and Engineering of CAS
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Ningbo Institute of Material Technology and Engineering of CAS
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

This application discloses a kind of Water Jet Guided Laser processing unit (plant) and systems, belong to technical field of laser processing.Water Jet Guided Laser processing unit (plant) includes: frame structure, laser transmission pipeline and laminar flow component;Frame structure from top to bottom successively includes focusing chamber, liquid chamber and gas chamber;Laser transmission pipeline is fixed in liquid chamber along the direction of propagation of laser, and the lower end of laser transmission pipeline is fixed with window filter;Liquid chamber is provided with liquid inlet;It is fixed with laminar flow component in the first annular space that laser transmission pipeline and liquid chamber are formed, so as to stable laminar flow be formed along the direction of propagation of laser into the liquid in liquid chamber, to form cladding to the laser projected by laser transmission pipeline.The arrangement increases the coupled powers between the total reflection efficiency and laser and liquid of laser, to obtain high-power coupling Water Jet Guided Laser, improve the working depth of laser.

Description

Water Jet Guided Laser processing unit (plant) and system
Technical field
This application involves a kind of Water Jet Guided Laser processing unit (plant) and systems, belong to technical field of laser processing.
Background technique
Water Jet Guided Laser processing technology is a kind of technology that fine water jet guidance laser is processed, in water due to laser It is different from the refractive index in air, make the laser of water transmission occur to be totally reflected and be limited on the interface of water beam and air In water beam, water does up the effect of optical fibers.
At this stage, a kind of high-power coupling Water Jet Guided Laser processing unit (plant), the device are disclosed in patent CN108262556A Including liquid chamber, window lens, liquid chamber includes condenser lens, support construction and liquid contracting stream conduction device, liquid contracting The inner wall of stream conduction device is coated with total reflection figure layer, using reflection coating and the method for rotation Water Jet Guided Laser, improves laser Coupled power, and further expanded the depth capability of laser processing.A kind of rotation is disclosed in patent CN108581224A Formula laser processing device and its application, laser-processing system and method, the device include: support portion and contracting stream conduction device, branch The liquid with laser coupled is connected in support part;Contracting stream conduction device is set to the lower section of support portion and is connected with support portion;Its In, liquid chamber and encapsulation gas blanket are equipped in contracting stream conduction device;Encapsulation gas blanket is set to outside liquid chamber;Liquid chamber Cross-sectional diameter be gradually reduced along the transmission direction of laser, and form conduction terminals, the main shaft and laser primary optical axis of conduction terminals at Inclined at acute angles;The contracting stream conduction device mode that rotary laser is processed in laser primary optical axis rotation, the patent improves working depth.
However, Water Jet Guided Laser processing unit (plant) in the prior art, when being coupled due to liquid and laser, coupled power is also It is that relatively low and laser total reflection efficiency is also relatively low, so that the output power of laser is lower, therefore the working depth of laser Still it is not able to satisfy the demand of some occasions.
Summary of the invention
According to the one aspect of the application, a kind of Water Jet Guided Laser processing unit (plant) is provided, the arrangement increases the complete of laser Coupled power between reflection efficiency and laser and liquid improves adding for the laser to obtain high-power coupled laser Work depth can make working depth reach 10mm or more.
The Water Jet Guided Laser processing unit (plant), comprising: frame structure, laser transmission pipeline and laminar flow component;
The frame structure from top to bottom successively includes focusing chamber, liquid chamber and gas chamber;
The laser transmission pipeline is fixed in the liquid chamber along the direction of propagation of laser, the laser transmission pipeline Lower end be fixed with window filter;
The liquid chamber is provided with liquid inlet;
The laminar flow component is fixed in the first annular space that the laser transmission pipeline and the liquid chamber are formed So as to form stable laminar flow along the direction of propagation of laser into the liquid in the liquid chamber to by the laser The laser that defeated pipeline projects forms cladding.
Optionally, the laminar flow component includes at least one cyclic annular filter screen, and the top of the liquid chamber is along its circumferential direction Equipped with multiple liquid inlets, the ring-type filter screen is located at the lower section of the multiple liquid inlet.
Optionally, the laminar flow component includes the first cyclic annular filter screen, the second cyclic annular filter screen and energy accumulation member, described Second cyclic annular filter screen is located at the lower section of the described first cyclic annular filter screen, the described first cyclic annular filter screen and the second cyclic annular filter screen Between be folded with the energy accumulation member;
Preferably, the energy accumulation member is cavernous body.
Optionally, the laminar flow component further includes third ring-type filter screen and air guide, the third ring-type filtering Net is located at the lower section of the described second cyclic annular filter screen, and is folded between the described second cyclic annular filter screen and third ring-type filter screen Air guide;
Preferably, the air guide is more diversion pipes.
Optionally, being mounted on the indoor condenser lens of the cavity for focusing can slide along the direction of propagation of the laser.
Optionally, the bottom end of the liquid chamber forms the first necking, and first necking is located at the window lens Lower section;The bottom end of the gas chamber forms the second necking, and second necking is located at the lower section of first necking.
Those skilled in the art can select in suitable liquid chamber internal diameter and the first necking according to needs of production The ratio of diameter, the application do not do and strictly limit.Preferably, the ratio of the internal diameter of the liquid chamber and the internal diameter of the first necking Greater than 10:1.
Optionally, gas filtration dress is fixed in the second annular space that the gas chamber and first necking are formed It sets, the top of the gas chamber is circumferentially with multiple gas accesses along it, and the gas-filtering device is located at the multiple gas The lower section of body entrance.
Optionally, the liquid in the liquid chamber is water, and the indoor gas of air chamber is nitrogen.
According to the another aspect of the application, a kind of Water Jet Guided Laser system of processing is additionally provided, comprising: electric-control system, laser Device, optical element, liquid transmission unit, gas transport unit and Water Jet Guided Laser processing unit (plant) described in any of the above embodiments;
The electric-control system is connect with the laser, gas transport unit and liquid transmission unit for controlling respectively State laser, gas transport unit and liquid transmission unit;
The optical element is between the laser and Water Jet Guided Laser processing unit (plant) for generating the laser Laser import in the Water Jet Guided Laser processing unit (plant);
The liquid transmission unit is connect with the liquid chamber in the Water Jet Guided Laser processing unit (plant) for importing liquid In liquid chamber;
The gas transport unit is connect with the gas chamber in the Water Jet Guided Laser processing unit (plant) for introducing gas into In gas chamber.
The beneficial effect that the application can generate includes:
1) Water Jet Guided Laser processing unit (plant) provided herein, by formed in laser transmission pipeline and liquid chamber the Laminar flow component is fixed in one annular space, so that forming stable laminar flow, laminar flow into the liquid in liquid chamber It is wrapped in around laser beam and forms liquid beam so that laser is propagated in the liquid beam, stable laminar flow liquid beam improves the complete of laser Reflection efficiency.
2) Water Jet Guided Laser processing unit (plant) provided herein improves since liquid has stable laminar flow characteristics The stability of system reduces light scattering bring and destroys and damage, improves light liquid coupled power.
3) Water Jet Guided Laser processing unit (plant) provided herein, since total reflection efficiency with higher and light liquid couple function Rate, therefore high-power coupled laser can be exported, i.e., the laser can reach multikilowatt power under micro-meter scale, and working depth reaches To 10mm or more.
4) Water Jet Guided Laser processing unit (plant) provided herein, technical costs are low.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of Water Jet Guided Laser processing unit (plant) provided in this embodiment;
Fig. 2 is that the Water Jet Guided Laser in Water Jet Guided Laser processing unit (plant) provided in this embodiment conducts schematic diagram;
Fig. 3 is the structural block diagram of Water Jet Guided Laser system of processing provided in this embodiment.
Component and reference signs list:
100 frame structures;101 focus chamber;1011 condenser lenses;
102 liquid chambers;1021 first neckings;1022 liquid inlets;
103 gas chamber;1031 second neckings;1032 gas accesses;
1033 gas-filtering devices;200 laser transmission pipelines;201 window lens;
301 cyclic annular filter screens;3011 first cyclic annular filter screens;
3012 second cyclic annular filter screens;3013 third ring-type filter screens;
302 energy accumulation members;303 air guides;
11 electric-control systems;12 lasers;13 optical elements;
14 liquid transmission units;15 gas transport units;
16 Water Jet Guided Laser processing unit (plant)s;17 workpiece.
Specific embodiment
The application is described in detail below with reference to embodiment, but the application is not limited to these embodiments.
This application provides a kind of Water Jet Guided Laser processing unit (plant)s, comprising: frame structure 100, laser transmission pipeline 200 and Laminar flow component;Frame structure 100 successively includes focusing chamber 101, liquid chamber 102 and gas chamber 103 from top to bottom;Laser Transmission pipeline 200 is fixed in liquid chamber 102 along the direction of propagation of laser, and the lower end fixation of laser transmission pipeline 200 is fenestrate Mouth filter 201;Liquid chamber 102 is provided with liquid inlet 1022;Laser transmission pipeline 200 and liquid chamber 102 formed the Laminar flow component is fixed in one annular space so as to form stable laminar flow into the liquid in liquid chamber 102 to by swashing The laser that light-transmissive conduits 200 project forms cladding.
Specifically, the upper section of frame structure 100, which is formed, focuses chamber 101, the middle section of frame structure 100 forms liquid chamber 102, the lower section of frame structure 100 forms gas chamber 103.Gas in gas chamber 103 to by liquid chamber 102 for flowing Liquid out forms cladding so that laser is propagated in the liquid.
Water Jet Guided Laser processing unit (plant) provided by the present application passes through the first ring formed in laser transmission pipeline and liquid chamber It is fixed with laminar flow component in shape space, forms stable laminar flow, laminar flow into the liquid in liquid chamber to realize It is wrapped in around laser beam and forms liquid beam so that laser is propagated in the liquid beam, stable laminar flow liquid beam improves the complete of laser Reflection efficiency and light liquid coupled power improve the working depth of laser to obtain powerful output laser.
Optionally, laminar flow component includes at least one cyclic annular filter screen 301, and the top of liquid chamber 102 is set along its circumferential direction There are multiple liquid inlets 1022, cyclic annular filter screen 301 is located at the lower section of multiple liquid inlets 1022.
Specifically, the internal perisporium of cyclic annular filter screen 301 is arranged and supports on the outer wall of laser transmission pipeline 200, cyclic annular The periphery wall of filter screen 301 is supported on the internal chamber wall of liquid chamber 102, so as to be passed through by the liquid that liquid inlet 1022 enters In cyclic annular 301 influent chamber 102 of filter screen.Cyclic annular filter screen 301 improves the uniformity of fluid, is conducive to fluid and is formed Stable laminar flow.Liquid inlet 1022 is uniformly arranged along the top peripheral wall of liquid chamber 102.Cyclic annular filter screen 301 can be 1 It is a, or may be 2, it is, of course, also possible to be 3, it is uniform along the direction of propagation of laser between multiple ring-type filter screens 301 It is arranged on the outer wall of laser transmission pipeline 200, flow effect is improved step by step to the liquid multi-layer in liquid chamber 102.
Optionally, laminar flow component includes the first cyclic annular filter screen 3012 of cyclic annular filter screen 3011, second and energy accumulation member 302, the second cyclic annular filter screen 3012 is located at the lower section of the first cyclic annular filter screen 3011, the first cyclic annular filter screen 3011 and the second ring Energy accumulation member 302 is folded between shape filter screen 3012.Preferably, energy accumulation member 302 is cavernous body.
Specifically, in the cavity wall institute of the first cyclic annular filter screen 3011 and the second cyclic annular filter screen 3012 and liquid chamber 102 Cavernous body is stuffed entirely in the space of formation.The specific energy storage effect of cavernous body generates storage to the fluid entered in liquid chamber 102 It stores, so that being conducive to fluid forms stable laminar flow.
Optionally, laminar flow component further includes third ring-type filter screen 3013, air guide 303, third ring-type filter screen 3013 are located at the lower section of the second cyclic annular filter screen 3012, and between the second cyclic annular filter screen 3012 and third ring-type filter screen 3013 It is folded with air guide 303.
Preferably, air guide 303 is more diversion pipes 303.
In a specific example, air guide 303 is more diversion pipes 303.More diversion pipes 303 are mounted on second The cavity wall of cyclic annular filter screen 3012 and third ring-type filter screen 3013 and liquid chamber 102 is formed by space, diversion pipe 303 Upper end support on the second cyclic annular filter screen 3012, the lower end of diversion pipe 303 is supported on third ring-type filter screen 3013, with Keep liquid consistent along the flow direction of diversion pipe 303 and the direction of propagation of laser, that is to say, that make fluid in the propagation side of laser It is upwardly formed stable laminar flow.
Diversion pipe 303 can be metal tube or be plastic tube, perhaps be ceramic tube or also with for glass tube, tube wall For smooth shape, advantageously forms liquid and form laminar flow.Preferably, diversion pipe 303 is glass tube.Diversion pipe 303 can be solid Pipe, or may be hollow pipe.When diversion pipe 303 be hollow pipe when, fluid can be flowed out from die, or from Guan Yuguan it Between flow out.
In another specific example, air guide 303 is multiple sheet airflow fences.Specifically, in the second cyclic annular mistake Multiple sheet airflow fences are folded between strainer 3012 and third ring-type filter screen 3013.Multiple sheet airflow fences are transmitted along laser The periphery wall of pipeline 200 is uniformly distributed, and each airflow fence is located at the radially extending on direction of laser transmission pipeline 200, shape At astral ray shape, the inner end of sheet airflow fence is supported on the outer wall of laser transmission pipeline 200, and the outer end of sheet airflow fence is supported On the inner wall of liquid chamber 102, the upper end of sheet airflow fence is supported on the second cyclic annular filter screen 3012, sheet airflow fence It supports on third ring-type filter screen 3013 lower end.
Optionally, being mounted on the condenser lens 1011 focused in chamber 101 can slide along the direction of propagation of laser.
Specifically, condenser lens 1011 can be slided along the direction of propagation of the laser, excellent to adjust the focal position of laser Selection of land, focal position are the liquid outlet position of liquid chamber 102.And laser can also be adjusted to be all-trans in liquid gas-bearing formation Incidence angle when penetrating, to improve total reflection efficiency.
Optionally, the bottom end of liquid chamber 102 forms the first necking 1021, and the first necking 1021 is located at window lens 201 Lower section;The bottom end of gas chamber 103 forms the second necking 1031, and the second necking 1031 is located at the lower section of the first necking 1021.
Specifically, the first necking 1021 is the cambered surface necking to 102 indent of liquid chamber, as shown in Figure 1, first necking 1021 diameter is gradually reduced along the direction of propagation of laser.First necking 1021 advantageously allows that treated by laminar flow component Liquid continues to keep the state of laminar flow, is totally reflected with realizing that laser is realized in liquid gas-bearing formation, and be also beneficial to laser and fluid shape At efficient coupling, reduce due to laser light scattering and bring destruction and damage.
Second necking 1031 is the cambered surface necking to 103 indent of gas chamber, as shown in Figure 1, second necking 1031 Diameter is gradually reduced along the direction of propagation of laser.It is marked with gas in gas chamber 103, the gas and liquid form laser and realizes The necessary condition of total reflection.Second necking 1031 realizes gas and is wrapped with laser fluid column to what is flowed out from the first necking 1021 Compression effectiveness, as shown in Fig. 2, the diameter of fluid column is further reduced to improve the output power of laser.In gas chamber 103 Gas can for high pressure gas to realize better compression effectiveness.
In this application, the internal diameter of liquid chamber 102 is preferably far longer than the internal diameter of the first necking 1021, to realization liquid It is most important to form stable laminar flow.First necking 1021 goes out the going out at liquid more preferably greater than the second necking 1031 of the internal diameter at liquid Interior diameter.The internal diameter of first necking 1021 and the second necking 1031 is a millimeter rank.
Optionally, the ratio of the internal diameter of liquid chamber 102 and the internal diameter of the first necking 1021 is greater than 10:1.
Optionally, gas filtration dress is fixed in the second annular space that gas chamber 103 and the first necking 1021 are formed 1033 are set, the top of gas chamber 103 is circumferentially with multiple gas accesses 1032 along it, and gas-filtering device 1033 is located at multiple The lower section of gas access 1032.
Specifically, gas-filtering device 1033 can be filter screen, or may be filter grid.Gas-filtering device 1033 can improve the uniformity of gas.Multiple gas accesses 1032 can be uniformly arranged along the peripheral wall of gas chamber 103.
Optionally, the liquid in liquid chamber 102 is water, and the gas in gas chamber 103 is nitrogen.
Present invention also provides a kind of Water Jet Guided Laser systems of processing, comprising: electric-control system 11, laser 12, optical element 13, liquid transmission unit 14, gas transport unit 15 and Water Jet Guided Laser processing unit (plant) 16 described above;
Electric-control system 11 is connect with laser 12, gas transport unit 15 and liquid transmission unit 14 for controlling respectively State the operation of laser 12, gas transport unit 15 and liquid transmission unit 14;
Optical element 13 swashs between laser 12 and Water Jet Guided Laser processing unit (plant) 16 for generate laser 12 Light imports in Water Jet Guided Laser processing unit (plant) 16;
Liquid transmission unit 14 is connect with the liquid chamber 102 in Water Jet Guided Laser processing unit (plant) 16 for liquid to be imported liquid In fluid chamber 102;
Gas transport unit 15 is connect with the gas chamber 103 in Water Jet Guided Laser processing unit (plant) 16 for introducing gas into gas In fluid chamber 103.
Embodiment 1
Fig. 1 is the structural schematic diagram of Water Jet Guided Laser processing unit (plant) provided in this embodiment, and Fig. 2 is water provided in this embodiment The Water Jet Guided Laser conduction schematic diagram in laser processing device is led, specifically the present embodiment is illustrated below with reference to Fig. 1 and Fig. 2.
As shown in Figure 1, it is provided in this embodiment lead laser processing device include focus chamber 101, liquid chamber 102 and Gas chamber 103, condenser lens 1011, which is slidably mounted on, to be focused in chamber 101.
Laser transmission pipeline 200 is mounted on the center of liquid chamber 102, and the upper end of laser transmission pipeline 200 is fixed On the bottom wall for focusing chamber 101, the lower end of laser transmission pipeline 200 is equipped with window lens 201, and window lens 201 with There is a certain distance between first necking 1021.Laminar flow component includes the first cyclic annular filter screen of cyclic annular filter screen 3011, second 3012, third ring-type filter screen 3013, cavernous body and more diversion pipes, cavernous body are located at the first cyclic annular filter screen 3011 and the Between two cyclic annular filter screens 3012, more diversion pipes are located between the second cyclic annular filter screen 3012 and third ring-type filter screen 301. Multiple liquid inlets 1022 are evenly distributed in the cavity wall of the liquid chamber 102 of first cyclic annular 3011 top of filter screen.
Be equipped with gas-filtering device 1033 in gas chamber 103, gas-filtering device 1033 be located at the first necking 1021 with Gas chamber 103 is formed by the second annular space.Gas-filtering device 1033 is ring-type, and is set in a necking 1021 On periphery wall.Multiple gas accesses are evenly distributed in the cavity wall of the gas chamber 103 of the top of gas-filtering device 1033 1032。
In the present embodiment, laser is successively propagated along focusing chamber, liquid chamber, gas chamber.Laser enters cavity for focusing When room, the condenser lens focused in chamber generates focusing effect to it, when being totally reflected using condenser lens adjustment laser Incidence angle, to improve the total reflection efficiency of laser.Laser enters the laser transmission pipeline being located in liquid chamber by focusing chamber, Enter in liquid chamber across window lens, the laminar flow in liquid chamber coats it, then by liquid chamber into Enter in gas chamber, the gas in gas chamber coats above-mentioned laminar flow, so that laser is in liquid gas-bearing formation stream interface It is totally reflected.
As shown in Fig. 2, laser beam is totally reflected in liquid gas-bearing formation stream interface;
To guarantee that laser in the total reflection effect of liquid gas interface, should meet following condition:
Wherein θ 1 is the incidence angle of laser and liquid gas-bearing formation stream interface, and θ 2 is refraction angle, and n1, n2 are respectively light and water, nitrogen Refractive index.It is assumed that θ 2 is 90 °, i.e. laser is totally reflected in liquid gas-bearing formation stream interface, at this point, calculating to obtain θ 1 as laser and liquid The minimum incidence angle that gas-bearing formation stream interface is totally reflected is not less than θ 1 with liquid gas-bearing formation stream interface incidence angle as long as meeting laser, that Laser can be totally reflected in liquid gas-bearing formation stream interface.Using the total reflection effect of liquid gas-bearing formation stream interface, device is by laser light Line is transmitted to 400 surface of workpieces processing and carries out material removal process.
Embodiment 2
Fig. 3 be Water Jet Guided Laser system of processing provided in this embodiment structural block diagram, below with reference to Fig. 3 with the present embodiment into Row illustrates.
Water Jet Guided Laser system of processing in the present embodiment includes electric-control system 11, electric-control system 11 respectively with laser 12, Liquid transmission unit 14 and gas transmission unit 15 are electrically connected.The laser generated in laser 12 enters water by optical element 13 It leads in the focusing chamber 101 of laser processing device 16, focusing is generated to the laser by condenser lens 1011.The laser is again successively By the transmission of laser transmission pipeline 200, the processing of window lens 201, the laminar flow cladding of liquid chamber 102, gas chamber 103 Contracting stream compression processing, liquid gas-bearing formation stream interface total reflection effect etc. reach workpiece performance, deep processing is carried out to material.
Liquid transmission unit 14 is connected to liquid chamber 102, injects water to liquid chamber 102.
Gas transport unit 15 is connected to gas chamber 103, injects nitrogen to gas chamber 103.
The above is only several embodiments of the application, not does any type of limitation to the application, although this Shen Please disclosed as above with preferred embodiment, however not to limit the application, any person skilled in the art is not taking off In the range of technical scheme, a little variation or modification are made using the technology contents of the disclosure above and is equal to Case study on implementation is imitated, is belonged in technical proposal scope.

Claims (10)

1. a kind of Water Jet Guided Laser processing unit (plant) characterized by comprising frame structure, laser transmission pipeline and laminar flow component;
The frame structure successively includes focusing chamber, liquid chamber and gas chamber from top to bottom;
The laser transmission pipeline is fixed in the liquid chamber along the direction of propagation of laser, under the laser transmission pipeline End is fixed with window filter;
The liquid chamber is provided with liquid inlet;
Be fixed with the laminar flow component in the first annular space that the laser transmission pipeline and the liquid chamber are formed so that Stable laminar flow is formed along the direction of propagation of laser into the liquid in the liquid chamber, thus to by the laser transfer tube The laser that road projects forms cladding.
2. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that the laminar flow component includes at least one The top of cyclic annular filter screen, the liquid chamber is circumferentially with multiple liquid inlets along it, and the ring-type filter screen is located at described The lower section of multiple liquid inlets.
3. Water Jet Guided Laser processing unit (plant) according to claim 2, which is characterized in that the laminar flow component includes first cyclic annular Filter screen, the second cyclic annular filter screen and energy accumulation member, the described second cyclic annular filter screen are located at the described first cyclic annular filter screen Lower section is folded with the energy accumulation member between the described first cyclic annular filter screen and the second cyclic annular filter screen;
Preferably, the energy accumulation member is cavernous body.
4. Water Jet Guided Laser processing unit (plant) according to claim 3, which is characterized in that the laminar flow component further includes third ring Shape filter screen and air guide, the third ring-type filter screen are located at the lower section of the described second cyclic annular filter screen, and described the The air guide is folded between two cyclic annular filter screens and third ring-type filter screen;
Preferably, the air guide is more diversion pipes.
5. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that it is indoor poly- to be mounted on the cavity for focusing Focus lens can be slided along the direction of propagation of the laser.
6. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that the bottom end of the liquid chamber forms the One necking, first necking are located at the lower section of the window lens;
The bottom end of the gas chamber forms the second necking, and second necking is located at the lower section of first necking.
7. Water Jet Guided Laser processing unit (plant) according to claim 6, which is characterized in that the internal diameter of the liquid chamber and first The ratio of the internal diameter of necking is greater than 10:1.
8. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that the gas chamber and first contracting It is fixed with gas-filtering device in the second annular space that mouth is formed, the top of the gas chamber is circumferentially with multiple gas along it Body entrance, the gas-filtering device are located at the lower section of the multiple gas access.
9. Water Jet Guided Laser processing unit (plant) according to claim 1, which is characterized in that the liquid in the liquid chamber is Water, the indoor gas of air chamber are nitrogen.
10. a kind of Water Jet Guided Laser system of processing characterized by comprising electric-control system, laser, optical element, liquid transmission Unit, gas transport unit and Water Jet Guided Laser processing unit (plant) according to any one of claims 1 to 9;
The electric-control system connect with the laser, gas transport unit and liquid transmission unit described sharp for controlling respectively Light device, gas transport unit and liquid transmission unit;
The optical element swashs between the laser and Water Jet Guided Laser processing unit (plant) for generate the laser Light imports in the Water Jet Guided Laser processing unit (plant);
The liquid transmission unit is connect with the liquid chamber in the Water Jet Guided Laser processing unit (plant) for liquid to be imported liquid In chamber;
The gas transport unit is connect with the gas chamber in the Water Jet Guided Laser processing unit (plant) for introducing gas into gas In chamber.
CN201811507530.XA 2018-12-11 2018-12-11 Water-guided laser processing device and system Active CN109623139B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811507530.XA CN109623139B (en) 2018-12-11 2018-12-11 Water-guided laser processing device and system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811507530.XA CN109623139B (en) 2018-12-11 2018-12-11 Water-guided laser processing device and system

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