CN107643596A - The diffraction axis axicon lens system and its Diode laser imaging method of a kind of binary zone plate form - Google Patents
The diffraction axis axicon lens system and its Diode laser imaging method of a kind of binary zone plate form Download PDFInfo
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- CN107643596A CN107643596A CN201711132189.XA CN201711132189A CN107643596A CN 107643596 A CN107643596 A CN 107643596A CN 201711132189 A CN201711132189 A CN 201711132189A CN 107643596 A CN107643596 A CN 107643596A
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Abstract
The invention discloses a kind of diffraction axis axicon lens system of binary zone plate form and its Diode laser imaging method, the purpose of small focal spot Diode laser is realized.The technical scheme is that：System includes the diffraction axis axicon lens and focus lamp of coaxial setting；Multiple steps are etched on diffraction axis axicon lens.The method of combined axis axicon lens and binary optical of the present invention, the purpose of small focal spot Diode laser is realized, simplify the process of axial cone mirror, this small focal spot element with long focal depth, there is the advantages of simple in construction, the efficiency of light energy utilization is high, and depth of focus depth is controllable.
Description
Technical field
The present invention relates to refraction and diffraction hybrid structure technical field, and in particular to a kind of diffraction axis axicon lens of binary zone plate form
System and its Diode laser imaging method.
Background technology
Depth of focus refers to the focal plane of certain optical systems permission or the excursion of image planes position, in numerous optical focusing systems
In occupy particularly important position.In recent years, in the application scenarios such as laser boring, laser cutting, to the depth of focus of focus on light beam
It is required that more and more higher, under focus state, required depth of focus is more deep better.
In face of such requirement, producing the method for Diode laser has a variety of, such as phase-shift mask method, optics apodization, wavefront compile
Code method etc., but these methods have the shortcomings that respective, the focal depth range whard to control having, in the focal depth range whard to control having
Optical field amplitude, some efficiencies of light energy utilization are low.1954, traditional axial cone mirror was suggested, as achievable Diode laser function
Element, the constantly extensive concern by everybody, but traditional axial cone mirror is not affected by popularization always because of its difficulty of processing.
The content of the invention
It is an object of the invention to provide a kind of diffraction axis axicon lens system of binary zone plate form and its Diode laser to be imaged
Method, realize the purpose of small focal spot Diode laser.
To achieve the above object, the technical scheme is that
The embodiments of the invention provide a kind of diffraction axis axicon lens system of binary zone plate form, including：Coaxial setting
Diffraction axis axicon lens and focus lamp；
Multiple steps are etched on the diffraction axis axicon lens.
In one or more embodiments of first aspect present invention, the locking angle of diffraction axis axicon lens is：
Wherein λ is the wavelength of incident laser, and n is refractive index of the diffraction axis axicon lens under wavelength X, and D is the incidence
The size of center salt free ligands speck of the laser through being formed after diffraction axis axicon lens；
In one or more embodiments of first aspect present invention, during incident laser after diffraction axis axicon lens through forming
The dimension D of heart salt free ligands speck is：
Wherein M2For the beam quality of the incident laser, f is the focal length of the focus lamp, ZfFor the system pre-set
Depth of focus.
In one or more embodiments of first aspect present invention, etched line a width of d, the etching depth h of step, then
H=λ/2 (n-1), tan α=h/d.
Second aspect, the embodiment of the present invention additionally provide a kind of diffraction axis axicon lens Diode laser imaging of binary zone plate form
Method, comprise the following steps：
It is λ laser as incident laser to use wavelength, is incident to diffraction axis axicon lens.
Multiple steps are etched on the diffraction axis axicon lens.
Incident laser line focus mirror after the diffraction axis axicon lens is focused imaging.
In one or more embodiments of second aspect of the present invention, in addition to：
The locking angle for setting the diffraction axis axicon lens is：
Wherein λ is the wavelength of incident laser, and n is refractive index of the diffraction axis axicon lens under wavelength X, and D is the incidence
The size of center salt free ligands speck of the laser through being formed after diffraction axis axicon lens.
In one or more embodiments of second aspect of the present invention, during incident laser after diffraction axis axicon lens through forming
The dimension D of heart salt free ligands speck is：
Wherein M2For the beam quality of the incident laser, f is the focal length of the focus lamp, ZfFor the system pre-set
Depth of focus.
In one or more embodiments of second aspect of the present invention, etched line a width of d, the etching depth h of step, then
H=λ/2 (n-1), tan α=h/d.
The invention has the advantages that：
The method of combined axis axicon lens and binary optical of the present invention, realizes the purpose of small focal spot Diode laser, simplifies axial cone mirror
Process, this small focal spot element with long focal depth, there is the advantages of simple in construction, the efficiency of light energy utilization is high, and depth of focus depth is controllable.
Brief description of the drawings
The diffraction axis axicon lens system construction drawing for the binary zone plate form that Fig. 1 is provided by the embodiment of the present invention.
The diffraction axis axicon lens structural representation for being etched with step that Fig. 2 is provided by the embodiment of the present invention.
Embodiment
Following examples are used to illustrate the present invention, but are not limited to the scope of the present invention.
Embodiment 1
A kind of diffraction axis axicon lens system using binary optical zone plate form design, there is the programmable advantage of depth of focus,
Its light channel structure includes diffraction axis axicon lens element and focus lamp successively along laser propagation direction.Structure such as accompanying drawing 1.Wherein, diffraction
Multiple steps are etched on axial cone mirror.
In the embodiment of the present invention, diffraction axis axicon lens as shown in Fig. 2 locking angle be：
Wherein λ is the wavelength of incident laser, and n is refractive index of the diffraction axis axicon lens under wavelength X, and D is the incidence
The size of center salt free ligands speck of the laser through being formed after diffraction axis axicon lens.
In the embodiment of the present invention, the dimension D of center salt free ligands speck of the incident laser through being formed after diffraction axis axicon lens is：
Wherein M2For the beam quality of the incident laser, f is the focal length of the focus lamp, ZfFor the system pre-set
Depth of focus.
In the embodiment of the present invention, etched line a width of d, the etching depth h of step, then h=λ/2 (n-1), tan α=h/d.
Embodiment 2
For the LASER Light Source of wavelength X, it is assumed that the focal length of focus lamp is f.
The first step：The depth of focus Z obtained according to needed for systemf, with reference to the focal length f of focus lamp, after obtaining diffraction axis axicon lens
Center salt free ligands speck size D；
Second step：Salt free ligands spot size D according to required by the first step, with reference to incident light wavelength lambda, calculating axial cone mirror should have
Locking angle；
3rd step：For the axial cone mirror that the angle of wedge is α, its phase face is intended using the multi-step form of binary optical
Close, calculate the line width d and etching depth h etched every time, keep tan α=h/d, element schematic such as accompanying drawing 2；
4th step：Light path is built according to design, obtains the purpose of design of Diode laser.
Embodiment 3
Diffraction axis axicon lens coordinates focus lamp.Specific implementation includes：
1st, according to incident optical parameter (wavelength), focus lamp parameter (focal length) and required obtained depth of focus length, design
Satisfactory diffraction axis axicon lens element.
2nd, light path is debugged according to design, corresponding depth of focus effect is obtained at appropriate operating distance.
Case effect
In the case of lambda1-wavelength λ=1064nm, the focal length f=10mm of focus lamp, it is desirable to obtained depth of focus length
For Zf=1mm.
The first step：There are focal length f=10mm and depth of focus Zf=1mm, wavelength X=1064nm, release axial cone mirror and focus lamp it
Between salt free ligands spot size D=0.52mm；
Second step：According to salt free ligands spot size, with reference to wavelength, obtain the locking angle of involved axial cone mirror=
1.74x10-3rad；
3rd step：According to α=1.74x10-3Rad, the height h=295.5nm of each step of diffraction axis axicon lens element is drawn,
Width d=169um；
4th step：The above-mentioned axial energy distribution of simplation verification and depth of focus length.
Although above (or utility model) of the invention is made in detail with generality explanation and specific embodiment
Description, but on the basis of the present invention, it can be made some modifications or improvements, this is aobvious and easy to those skilled in the art
See.Therefore, these modifications or improvements without departing from theon the basis of the spirit of the present invention, are belonged to claimed
Scope.
Claims (8)
1. the diffraction axis axicon lens system of a kind of binary zone plate form, it is characterised in that the system includes：Coaxial setting is spread out
Penetrate axial cone mirror and focus lamp；
Multiple steps are etched on the diffraction axis axicon lens.
2. the system as claimed in claim 1, it is characterised in that the locking angle of the diffraction axis axicon lens is：
<mrow>
<mi>&alpha;</mi>
<mo>=</mo>
<mfrac>
<mrow>
<mn>0.766</mn>
<mi>&lambda;</mi>
</mrow>
<mrow>
<mo>(</mo>
<mi>n</mi>
<mo>-</mo>
<mn>1</mn>
<mo>)</mo>
<mi>D</mi>
</mrow>
</mfrac>
<mo>;</mo>
</mrow>
Wherein λ is the wavelength of incident laser, and n is refractive index of the diffraction axis axicon lens under wavelength X, and D is the incident laser
The size of center salt free ligands speck through being formed after diffraction axis axicon lens.
3. the system as claimed in claim 1, it is characterised in that center of the incident laser through being formed after diffraction axis axicon lens
The dimension D of salt free ligands speck is：
<mrow>
<mi>D</mi>
<mo>=</mo>
<msqrt>
<mfrac>
<mrow>
<mn>8</mn>
<msup>
<mi>M</mi>
<mn>2</mn>
</msup>
<msup>
<mi>f</mi>
<mn>2</mn>
</msup>
<mi>&lambda;</mi>
</mrow>
<mrow>
<msub>
<mi>Z</mi>
<mi>f</mi>
</msub>
<mi>&pi;</mi>
</mrow>
</mfrac>
</msqrt>
<mo>;</mo>
</mrow>
Wherein M2For the beam quality of the incident laser, f is the focal length of the focus lamp, ZfFor the system depth of focus pre-set.
4. the system as claimed in claim 1, it is characterised in that etched line a width of d, the etching depth h of the step, then h
=λ/2 (n-1), tan α=h/d.
A kind of 5. diffraction axis axicon lens Diode laser imaging method of binary zone plate form, it is characterised in that the imaging method bag
Include following steps：
It is λ laser as incident laser to use wavelength, is incident to diffraction axis axicon lens；
Multiple steps are etched on the diffraction axis axicon lens；
Incident laser line focus mirror after the diffraction axis axicon lens is focused imaging.
6. method as claimed in claim 5, it is characterised in that the imaging method also includes：
The locking angle for setting the diffraction axis axicon lens is：
<mrow>
<mi>&alpha;</mi>
<mo>=</mo>
<mfrac>
<mrow>
<mn>0.766</mn>
<mi>&lambda;</mi>
</mrow>
<mrow>
<mo>(</mo>
<mi>n</mi>
<mo>-</mo>
<mn>1</mn>
<mo>)</mo>
<mi>D</mi>
</mrow>
</mfrac>
<mo>;</mo>
</mrow>
Wherein λ is the wavelength of incident laser, and n is refractive index of the diffraction axis axicon lens under wavelength X, and D is the incident laser
The size of center salt free ligands speck through being formed after diffraction axis axicon lens.
7. method as claimed in claim 5, it is characterised in that center of the incident laser through being formed after diffraction axis axicon lens
The dimension D of salt free ligands speck is：
<mrow>
<mi>D</mi>
<mo>=</mo>
<msqrt>
<mfrac>
<mrow>
<mn>8</mn>
<msup>
<mi>M</mi>
<mn>2</mn>
</msup>
<msup>
<mi>f</mi>
<mn>2</mn>
</msup>
<mi>&lambda;</mi>
</mrow>
<mrow>
<msub>
<mi>Z</mi>
<mi>f</mi>
</msub>
<mi>&pi;</mi>
</mrow>
</mfrac>
</msqrt>
<mo>;</mo>
</mrow>
Wherein M2For the beam quality of the incident laser, f is the focal length of the focus lamp, ZfFor the system depth of focus pre-set.
8. method as claimed in claim 5, it is characterised in that etched line a width of d, the etching depth h of the step, then h
=λ/2 (n-1), tan α=h/d.
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| CN201711132189.XA CN107643596B (en) | 2017-11-15 | 2017-11-15 | Binary zone plate type diffraction axicon lens system and long focal depth imaging method thereof |
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| CN201711132189.XA CN107643596B (en) | 2017-11-15 | 2017-11-15 | Binary zone plate type diffraction axicon lens system and long focal depth imaging method thereof |
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| CN107643596A true CN107643596A (en) | 2018-01-30 |
| CN107643596B CN107643596B (en) | 2020-03-13 |
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Cited By (3)
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| CN109031682A (en) * | 2018-07-10 | 2018-12-18 | 北京润和微光科技有限公司 | The generation system and method for Diode laser, small spot based on diffraction optical element |
| CN110850591A (en) * | 2019-10-25 | 2020-02-28 | 昆明理工大学 | Analytic description method of annular structured light |
| CN112034627A (en) * | 2020-08-11 | 2020-12-04 | 北京润和微光科技有限公司 | DOE-based focusing ring light spot generation method and system |
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| CN104865706A (en) * | 2015-05-21 | 2015-08-26 | 中国科学院光电技术研究所 | Apparatus of increasing coherent beam combination laser beam quality |
| WO2015189240A1 (en) * | 2014-06-11 | 2015-12-17 | Hans-Ulrich Dodt | Light sheet microscopy using meso-optical elements |
| CN106444052A (en) * | 2016-11-16 | 2017-02-22 | 华侨大学 | Optical system capable of generating order-adjustable defocused beams |
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| WO2015189240A1 (en) * | 2014-06-11 | 2015-12-17 | Hans-Ulrich Dodt | Light sheet microscopy using meso-optical elements |
| CN104865706A (en) * | 2015-05-21 | 2015-08-26 | 中国科学院光电技术研究所 | Apparatus of increasing coherent beam combination laser beam quality |
| CN106444052A (en) * | 2016-11-16 | 2017-02-22 | 华侨大学 | Optical system capable of generating order-adjustable defocused beams |
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| 张前安等: "轴棱锥-透镜系统产生局域空心光束中心亮斑的消除", 《物理学报》 * |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109031682A (en) * | 2018-07-10 | 2018-12-18 | 北京润和微光科技有限公司 | The generation system and method for Diode laser, small spot based on diffraction optical element |
| CN110850591A (en) * | 2019-10-25 | 2020-02-28 | 昆明理工大学 | Analytic description method of annular structured light |
| CN112034627A (en) * | 2020-08-11 | 2020-12-04 | 北京润和微光科技有限公司 | DOE-based focusing ring light spot generation method and system |
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| CN107643596B (en) | 2020-03-13 |
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