CN1786776A - Method and apparatus for bi-phase composite superresolution pupil filtering - Google Patents
Method and apparatus for bi-phase composite superresolution pupil filtering Download PDFInfo
- Publication number
- CN1786776A CN1786776A CN 200510130464 CN200510130464A CN1786776A CN 1786776 A CN1786776 A CN 1786776A CN 200510130464 CN200510130464 CN 200510130464 CN 200510130464 A CN200510130464 A CN 200510130464A CN 1786776 A CN1786776 A CN 1786776A
- Authority
- CN
- China
- Prior art keywords
- phase
- light beam
- modulation panel
- light
- phase modulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Holo Graphy (AREA)
Abstract
The invention discloses a double phase compounding super differentiate pupil filtering method that includes the following steps: splitting the directly writing beam into orthogonal the first beam and the second beam; adjusting the phase and angle of the first beam; adjusting the phase and angle of the second beam; making the first and the second beam assemble through focusing field lens to make the first beam and the second beam focus on the same focal plane. The invention solves the problem of generating stray light in the process of beam blocking, beam molding, passing through mask plane. The invention has great flexibility for phase design. It also supplies the device of the double phase compounding super differentiate pupil filtering method.
Description
Technical field
The invention belongs to optical precision measurement and manufacturing field, is a kind of breakthrough Rayleigh diffraction limit, obtains the generation technique of super-resolution microscale laser facula.
Background technology
The optical ultra-discrimination technology is meant, obtains the also little optical modulation technology of describing than Rayleigh diffraction limit of the minimum dimension hot spot that may generate under the relative photo propagation condition.The optical ultra-discrimination technology can be subdivided into optical ultra-discrimination imaging technology, super-resolution confocal microtechnic, super-resolution laser direct-writing technology again.The optical ultra-discrimination imaging technology is mainly used in projection lithography, this optical ultra-discrimination is to obtain super-resolution imaging resolution by methods such as off-axis illumination, coherent illumination, quadrupole illuminatings, this super-resolution means of illumination is paid attention to the contiguous distortion correction of illumination uniformity and image, is the optical ultra-discrimination technology that remarkable difference is arranged with the present invention.
The pupil filtering that generally acknowledge countries in the world in confocal microscopy super resolution technology, laser direct-writing super resolution technology is modulated focal plane hot spot COMPLEX AMPLITUDE computation model as shown in Equation (1),
Wherein, v=kNAr, expression hot spot radial coordinate, k is a wave number, NA is a numerical aperture of objective
U=kNA
2Z, z is for being the axial coordinate of initial point with the focus, r is an object lens normalization pupil radius,
P (r)=A (r) exp (j φ (r)) is a normalization pupil filtering function.
In super-resolution confocal microtechnic, super-resolution laser direct-writing technical field,, realize that the method for super-resolution pupil filtering is divided into according to the technological approaches that changes iris filter transmittance function A (r) and phase function exp (j φ (r)):
Amplitude type iris filter:, be called Modulation and Amplitude Modulation during A (r) change when exp (j φ (r)) is constant
Australian Sheppard in 1998 and Hegedus two people propose the ring light filtering method, adopt diaphragm to block the light method and obtain annular incident beam.In addition, the various countries scholar has proposed as many endless belt ring light ultra-resolution method etc., the essence of these methods all be by block, the transmitance modulator approach obtains the oscillator intensity different incident beam that distributes, A (r) functional value is a design parameter, realizes optical ultra-discrimination.
The shortcoming of this method is that light energy losses is big, easily produces parasitic light, and advantage is to realize simply.
U.S. Sales in 1997 and Morris propose to obtain shaping circular light with the binary diffractive optic element approach, realize optical ultra-discrimination.China Harbin Institute of Technology, Shanghai precision optics precision optical machinery research institute also adopt this method to obtain ring light.The shortcoming of this method is to be subjected to present manufacture craft horizontal constraints, is difficult to produce high-precision binary optical elements, and therefore outgoing beam collimation and the energy uniformity through shaping is difficult to guarantee that this can destroy the energy distribution of super-resolution hot spot; In addition,, therefore can produce power lose, generate the parasitic light that is difficult to suppress, influence super-resolution hot spot quality because the binary optical elements shaping is undertaken by diffraction principle.The needed super-resolution element of this ultra-resolution method manufacture difficulty is very big, can not promote the use of at present.
Phase-type iris filter:, be called position modulation mutually during exp (j φ (r)) change when A (r) is constant.
Nineteen fifty Wilking proposes to use first, nineteen sixty-five Thompson proposes two districts, π position phase iris filter subsequently, U.S. Sales proposed multistage pure position iris filter mutually with Morris in 1997, and A Genting Silvia Ledesma proposed this structure phase fitler of superelevation in 2004.Put it briefly, the position phase pupil filtering technology that has proposed at present all is by changing the optical ultra-discrimination that exp (j φ (r)) function parameter is realized on a phase board.
The advantage of this method is that energy loss is little, and shortcoming is that simple phase board design flexibility is poor.For obtaining good super-resolution effect, needing increases structural complexity, makes difficulty but the phase board of labyrinth but exists, and easily generates problems such as diffraction parasitic light.
Complex amplitude type iris filter: change A (r) and exp (j φ (r)) function simultaneously.Realize that super-resolution is called the complex amplitude modulation.
People such as Spain Juana had made up complex amplitude pupil filter in 2003, the flourishing three district's complex amplitude pupil filters that propose of China Xiao in 2004.In addition, also have some to use based on the super solution comple amplitude pupil filter of the modulation of monochromatic light pupil, amplitude mask principle of interference.This method can obtain better super-resolution effect, but owing to change transmitance and position phase parameter simultaneously, therefore designs relative complex.The making complexity of its super-resolution element depends on transmitance and the position designing requirement of value mutually.
Summary of the invention
One object of the present invention is to obtain the minimum dimension hot spot that may generate described than Rayleigh diffraction limit, and is mainly used in super-resolution confocal microtechnic, super-resolution laser direct-writing device.
For achieving the above object, the invention provides a kind of bi-phase composite superresolution pupil filtering method,, said method comprising the steps of according to the present invention:
Be divided into the first mutually orthogonal light beam and second light beam with directly writing light beam; Wherein, first light beam is a transmitted light beam, and second light beam is a folded light beam;
First light beam is carried out the position to be modulated mutually; Wherein, position modulation mutually realizes that by first phase modulation panel the structure of first phase modulation panel is determined by its normalization position phase distribution function;
Second light beam is carried out the position to be modulated mutually; Position modulation mutually realizes that by second phase modulation panel the structure of second phase modulation panel is determined by its normalization position phase distribution function;
Described first light beam and second light beam are assembled by focusing objective len;
Described first light beam and second light beam are focused on the same focal plane.
The beneficial effect of described bi-phase composite superresolution pupil filtering method is, the first, do not need to make the transmitance modulation panel and just can realize transmitance modulation, avoided that light beam blocks, generated the problem of parasitic light in the beam shaping, transmitance gradual change mask plate modulated process; , secondly, avoid in the beam shaping process broken beam collimation and energy uniformity; Once more, when realizing the transmitance modulation, also remain with a phase design freedom, thereby can independently realize amplitude type super-resolution, phase-type super-resolution and complex amplitude type super-resolution, have the advantage of flexible design.
Another object of the present invention is to provide a kind of device of realizing above-mentioned bi-phase composite superresolution pupil filtering method.
To achieve these goals, the invention provides a kind of bi-phase composite superresolution pupil filtering system, according to the present invention, described bi-phase composite superresolution pupil filtering system comprises first light path, and described first light path comprises the polarization spectroscope of common light path, first phase modulation panel and half-reflecting half mirror; Second light path, described second light path comprises the polarization spectroscope of common optical axis, first catoptron, second catoptron, second phase modulation panel, half-reflecting half mirror, described first, second light path focuses on and stack at focusing surface by focusing objective len; Described first, second light path light beam is the integral multiple of wavelength to the optical path difference of focusing objective len forward end apex; The common complex light pupil function that constitutes of described first, second light path position phase modulating function has can realize the continuously adjustable feature of transmitance; Described complex light pupil function is generated by the phase function stack of many two phase modulation panel elements.
Further, described first phase modulation panel with second mutually modulation panel for the revolution symmetrical structure.
After directly writing light beam arrival polarization spectroscope, light beam is divided into transmitted light beam and folded light beam two parts, and wherein transmitted light beam continues to propagate, and through first phase modulation panel, half-reflecting half mirror arrives focusing objective len, focuses on the focussing plane; Folded light beam arrives focusing objective len through first, second catoptron, second phase modulation panel, half-reflecting half mirror, focuses on the focussing plane;
Good result of the present invention is: at first, in realizing dissimilar super-resolution, design parameter but has only the mutually a kind of design parameter in position, thereby simplicity of design adopts the dibit phase-plate to realize super-resolution, compares with the unit phase-plate to have wideer design parameter range of choice; Secondly, the super-resolution element is the position phase modulation panel with simple structure, and this element manufacture difficulty is little, promotes the use of easily.
Description of drawings
Fig. 1 is the principle schematic of bi-phase composite superresolution pupil filtering of the present invention system.
Fig. 2 is the mapping relations of entrance pupil and emergent pupil.
Fig. 3 is amplitude type super-resolution hot spot and Airy disk hot spot comparison diagram.
Fig. 4 is phase type super-resolution hot spot and Airy disk hot spot comparison diagram.
Fig. 5 is complex amplitude type super-resolution hot spot and Airy disk hot spot comparison diagram.
Fig. 6 gives an example for the phase board design of Structural Parameters.
Fig. 7 is the super-resolution effect of distinct methods design example.
Embodiment
With reference to accompanying drawing 1, bi-phase composite superresolution pupil filtering of the present invention system comprises polarization spectroscope 1, first phase modulation panel 2, first catoptron 3, half-reflecting half mirror 4, second catoptron 5, second phase modulation panel 6, focusing objective len 7.
Straight-writing system adopts polarized light, directly write light beam through links such as steady light, collimations after, arrive polarization spectroscope 1, light beam is divided into two parts; Transmitted light beam continues to propagate, and through first phase modulation panel 2, half-reflecting half mirror 4 arrives focusing objective len 7, focuses on the focussing plane 8; Another road light beam is a reflected light, arrives focusing objective lens 7 through first catoptron 3, second catoptron 5, second phase modulation panel 6, half-reflecting half mirror 4, focuses on the focussing plane 8.Because system bits phase modulating action, two-way light beam produce the coherent light stack on 8 focussing planes, phase parameter is selected under the prerequisite in suitable position, and system produces the super-resolution effect of synthetic hot spot main lobe width less than Rayleigh diffraction limit spot size.
Bi-phase composite superresolution pupil filtering method of the present invention may further comprise the steps:
Be divided into the first mutually orthogonal light beam and second light beam with directly writing light beam; Wherein, first light beam is a transmitted light beam, and second light beam is a folded light beam;
Transmitted light beam is carried out the position to be modulated mutually; Wherein, position modulation mutually realizes that by first phase modulation panel the structure of first phase modulation panel is determined by its normalization position phase distribution function;
Folded light beam is carried out the position modulates mutually; Wherein, position modulation mutually realizes that by second phase modulation panel the structure of second phase modulation panel is determined by its normalization position phase distribution function;
Described transmitted light beam and folded light beam are assembled become coherent light;
Described first light beam and second light beam are focused on the same focal plane.
Principle of the present invention is as follows: directly write the distribution of amplitudes of hot spot on the focal plane and follow formula (1) model, system architecture as shown in Figure 1.
Promptly directly writing light beam with approximate ideal collimation plane ripple is input beam.Make the position phase modulating function of first phase modulation panel, second phase modulation panel be respectively
1(r
1, θ
1) and
2(r
2, θ
2), wherein, r1, θ 1, r2, θ 2 are the normalization polar coordinates variable on first phase modulation panel, second phase modulation panel plane of living among Fig. 1.When 1., 2. position phase modulation panel was the revolution symmetrical structure, its modulating function can be abbreviated as
1(r
1) and
2(r
2).Because the straight-writing system incident light is the desired collimation plane wave,, be equivalent to the modulating action of object lens entrance pupil position so first phase modulation panel, second phase modulation panel place position shown in Figure 1.Be
1(r
1)=
1(ρ '),
2(r
2)=
2(ρ '), ρ ' are annular entrance pupil normalization radial coordinates, and ψ (ρ ') is the entrance pupil modulating function.But, go into pupil function and go out relation between the pupil function because the P (ρ) in the formula (1) for going out pupil function, therefore is necessary explanation.
Directly writing object lens is finite aperture optical systems.Therefore, entrance pupil, aperture diaphragm and emergent pupil can be regarded as the finite point set, represent with A, B, C respectively.Element in the set is the phase value of volume coordinate position.By the relation of the conjugate image between aperture and the entrance pupil as can be known, exist between set B, the A and shine upon f:B-A one by one, reach inverse mapping f
-1: A-B.Equally as can be known, exist between set B, the C and shine upon g:B-C one by one, reach inverse mapping g by the relation of the conjugate image between aperture and the emergent pupil
-1: C-B.As seen, set B and A, set B and C constitute the equity set respectively.According to the symmetry and the transitivity of equity set, set A and C also are the equity set as can be known.Promptly exist and shine upon T:A-C and inverse mapping T one by one
-1: C-A.Mapping relations between entrance pupil, aperture diaphragm and the emergent pupil as shown in Figure 2.
Write directly that object lens go out pupil function P (ρ) and the mapping relations of going between the pupil function ψ (ρ ') can be expressed as formula (2), wherein,
By formula (2) as can be known, after obtaining P (ρ), can determine phase board 1., 2. structure.For directly writing object lens, mapping T:A-C, and inverse mapping T
-1: C-A is a linear mapping, therefore turns round symmetric convention normalization and goes into pupil function and turn round symmetric convention normalization to go out the pupil function equivalence, be i.e. P (ρ) ψ (ρ ').
Adjusting first phase modulation panel, second phase modulation panel place light path, to make its optical path difference be the integral multiple of wavelength.Element 1 splitting ratio is 50% among Fig. 1, and then phase board 1., equivalent normalization 2. goes out pupil function and be
Two position phase modulating functions at the synthetic complex amplitude of directly writing on the focal plane are
Order,
Then,
P(ρ)＝P
1(ρ)+P
2(ρ)＝A′(ρ)·e
iβ|
A′(ρ)＝cosα (5)
As seen, this method by two phase parts compound produced equivalent multiple transmittance function A ' (ρ)=cos α.When β=0, formula (5) is a Modulation and Amplitude Modulation.Adopt this dibit phase composite super resolution method can realize that light beam blocks and amplitude gradual change modulation.Solving equation (6), can determine a phase modulation panel 1., normalization position phase distribution function 2..
The structure deterministic process of the first, the second phase modulation panel is as follows:
With focusing objective len NA=0.65 is example
(1) realizes amplitude type super-resolution
Make pupil function P (ρ)=P
1(ρ)+P
2(ρ)=(ρ) e of A '
I β|
A ' (ρ)=cos αMiddle e
I β=1.R1, the value of r2 is obtained by the mathematics optimizing; A ' (ρ)=variation range of cos α is
0≤r
1, r
2≤ 0.44, A ' (ρ)=0 then gets according to formula (6)
0.44＜r
1, r
2≤ 0.9, A ' (ρ)=1, then
0.9＜r
1, r
2≤ 1.0, A ' (ρ)=0, then
With phase board 1., 2. normalization phase structure distribution function substitution formula (4) is through calculating the super-resolution curve that can get accompanying drawing 3.Hot spot super-resolution factor G=0.93, Si Telieer is than S=3.86, and the main lobe secondary lobe compares M=8.9%.
(2) realize the phase type super-resolution
Make pupil function P (ρ)=P
1(ρ)+P
2(ρ)=(ρ) e of A '
I β|
A ' (ρ)=cos αMiddle A ' (ρ)=1.β is changed to
0≤r
1, r
2≤ 0.14, β=0 then gets according to formula (6)
0.14＜r
1, r
2≤ 0.48, β=π, then
0.48＜r
1, r
2≤ 1.0, β=0, then
With phase board 1., 2. normalization phase structure distribution function substitution formula (4) is through calculating the super-resolution curve that can get accompanying drawing 4.Hot spot super-resolution factor G=0.69, Si Telieer is than S=3.37, and the main lobe secondary lobe compares M=27.8%.
(3) realize complex amplitude type super-resolution
Make pupil function P (ρ)=P
1(ρ)+P
2(ρ)=(ρ) e of A '
I β|
A ' (ρ)=cos αβ and A ' being changed to (ρ)
0≤r
1, r
2≤ 0.49, β=0, A ' is (ρ)=0.14 item according to formula (6)
0.49＜r
1, r
2≤ 0.57, β=π, A ' are (ρ)=1 item
0.57＜r
1, r
2≤ 1.0, β=0, A ' (ρ)=1, then
With phase board 1., 2. normalization phase structure distribution function substitution formula (4) is through calculating the super-resolution curve that can get accompanying drawing 5.Hot spot super-resolution factor G=0.79, Si Telieer is than S=3.9, and the main lobe secondary lobe compares M=10.4%.
Claims (5)
1. bi-phase composite superresolution pupil filtering method is characterized in that: may further comprise the steps:
A. light beam be will directly write and the first mutually orthogonal light beam and second light beam will be divided into; Wherein, first light beam is a transmitted light beam, and second light beam is a folded light beam;
B. first light beam being carried out the position modulates mutually; Wherein, position modulation mutually realizes that by first phase modulation panel the structure of first phase modulation panel is determined by its normalization position phase distribution function;
C. second light beam being carried out the position modulates mutually; Position modulation mutually realizes that by second phase modulation panel the structure of second phase modulation panel is determined by its normalization position phase distribution function;
Described first light beam is become with second beam convergence;
Described first light beam and second light beam are focused on the same focal plane.
2. bi-phase composite superresolution pupil filtering method according to claim 1, it is characterized in that: the structural parameters of described first, second phase modulation panel, the equation with two unknowns formed of the difference of modulation panel structural parameters is definite mutually with the position by position phase modulation panel structural parameters sum.
3. bi-phase composite superresolution pupil filtering device adopts and directly writes light beam as incident beam, it is characterized in that: comprise first light path, described first light path comprises the polarization spectroscope of common light path, first phase modulation panel and half-reflecting half mirror;
Second light path, described second light path comprise the polarization spectroscope with the common light path of first light path, and first catoptron, second catoptron, second phase modulation panel are with the half-reflecting half mirror of the common light path of first light path;
Described first, second light path focuses on and stack at focusing surface by focusing objective len;
Described first, second light path light beam is the integral multiple of lambda1-wavelength to the optical path difference of focusing objective len forward end apex.
4. bi-phase composite superresolution pupil filtering according to claim 3 system is characterized in that: described first phase modulation panel with second mutually modulation panel be the revolution symmetrical structure.
5. bi-phase composite superresolution pupil filtering device according to claim 3 is characterized in that: the common complex light pupil function that constitutes of the position phase modulating function of described first, second phase modulation panel; The complex light pupil function that the position phase distribution function stack of described many two phase modulation panel elements generates can realize that transmitance is adjustable continuously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101304645A CN100504513C (en) | 2005-12-09 | 2005-12-09 | Bi-phase composite superresolution pupil filtering method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101304645A CN100504513C (en) | 2005-12-09 | 2005-12-09 | Bi-phase composite superresolution pupil filtering method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1786776A true CN1786776A (en) | 2006-06-14 |
| CN100504513C CN100504513C (en) | 2009-06-24 |
Family
ID=36784303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101304645A Expired - Fee Related CN100504513C (en) | 2005-12-09 | 2005-12-09 | Bi-phase composite superresolution pupil filtering method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100504513C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103414510A (en) * | 2013-08-12 | 2013-11-27 | 浙江宇视科技有限公司 | EPON protection device and method |
| CN106324851A (en) * | 2016-11-02 | 2017-01-11 | 长春理工大学 | Reflective polarization aberration compensation device based on light path splitting polarization modulation |
| CN106501958A (en) * | 2016-11-02 | 2017-03-15 | 长春理工大学 | A kind of transmission-type Polarization aberration compensation device based on path-splitting Polarization Modulation |
| CN109406411A (en) * | 2017-08-15 | 2019-03-01 | 台湾超微光学股份有限公司 | Light supply apparatus |
| CN110441033A (en) * | 2019-07-03 | 2019-11-12 | 中国科学院上海光学精密机械研究所 | Coherent beam combination image measuring apparatus and its measurement method based on intensity coding modulation |
| CN116540504A (en) * | 2023-07-04 | 2023-08-04 | 之江实验室 | Variable wavelength laser direct-writing lithography system based on continuous spectrum light source and application |
-
2005
- 2005-12-09 CN CNB2005101304645A patent/CN100504513C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103414510A (en) * | 2013-08-12 | 2013-11-27 | 浙江宇视科技有限公司 | EPON protection device and method |
| CN106324851A (en) * | 2016-11-02 | 2017-01-11 | 长春理工大学 | Reflective polarization aberration compensation device based on light path splitting polarization modulation |
| CN106501958A (en) * | 2016-11-02 | 2017-03-15 | 长春理工大学 | A kind of transmission-type Polarization aberration compensation device based on path-splitting Polarization Modulation |
| CN109406411A (en) * | 2017-08-15 | 2019-03-01 | 台湾超微光学股份有限公司 | Light supply apparatus |
| CN110441033A (en) * | 2019-07-03 | 2019-11-12 | 中国科学院上海光学精密机械研究所 | Coherent beam combination image measuring apparatus and its measurement method based on intensity coding modulation |
| CN116540504A (en) * | 2023-07-04 | 2023-08-04 | 之江实验室 | Variable wavelength laser direct-writing lithography system based on continuous spectrum light source and application |
| CN116540504B (en) * | 2023-07-04 | 2024-04-26 | 之江实验室 | Variable wavelength laser direct-writing lithography system based on continuous spectrum light source and application |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100504513C (en) | 2009-06-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105807412A (en) | Total internal reflection microscopy method and device based on free-form surface shaping | |
| CN1786776A (en) | Method and apparatus for bi-phase composite superresolution pupil filtering | |
| CN104428706A (en) | Microscope and method for spim microscopy | |
| US9323052B2 (en) | Lithography pupil shaping optical system and method for generating off-axis illumination mode | |
| CN111290062B (en) | Design method of Fermat spiral Greek ladder photon sieve and imaging light path thereof | |
| CN104570341B (en) | A kind of method and apparatus for synthesizing Beams in Conical Lenses shadow region | |
| CN103069328A (en) | Optical system for laser optical rectification and wave front control | |
| CN111307772B (en) | Single-objective lens light sheet fluorescence microscopic imaging device and method based on micro-mirror array | |
| CN104111590A (en) | Laser direct writing device based on combined vortex double focusing light spot | |
| CN108845409B (en) | Device and method for generating array multiple focuses based on polyhedral prism | |
| CN102566076B (en) | Multifocal light beam generation apparatus and multifocal confocal scan microscope | |
| KR20160030125A (en) | Optical design method for x-ray focusing system using rotating mirror, and x-ray focusing system | |
| CN111221122B (en) | Design method of super-resolution telescopic imaging system with larger field intensity tolerance | |
| CN107643596B (en) | Binary zone plate type diffraction axicon lens system and long focal depth imaging method thereof | |
| CN104459999B (en) | Illuminating system of imaging flow cytometry | |
| CN109031682A (en) | The generation system and method for Diode laser, small spot based on diffraction optical element | |
| CN113703170B (en) | Novel three-dimensional hollow light field generation method and device | |
| CN113504717B (en) | Uniform holographic two-photon microscope system based on space-time focusing | |
| CN111596462A (en) | Multi-orbital angular momentum light beam generator and preparation method thereof | |
| CN108982455B (en) | Multi-focus light section fluorescence microscopic imaging method and device | |
| CN111250873B (en) | Deep super-resolution laser direct writing system based on GB-STED and implementation method thereof | |
| CN106404723A (en) | Secondary harmonic high resolution imaging method and system | |
| CN111240027B (en) | Optical spatial filtering system based on axicon-lens combination and working method thereof | |
| CN103728718B (en) | The multiple optical illumination method and apparatus of a kind of Multispectral microscope | |
| CN104238135A (en) | Control device for distance between double focuses |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190522 Address after: 150000 Heilongjiang Harbin Dalian economic and Trade Zone, the North Road and Xingkai Road intersection Patentee after: Harbin University of Technology Robot Group Co., Ltd. Address before: 150080 No. 2 Yikuang Street, Harbin, Heilongjiang Province Patentee before: Harbin Institute of Technology |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090624 Termination date: 20191209 |